A metal mask fixing transfer device and use method

Abstract

The present invention discloses a metal mask fixing transfer device and a method of using the device, which relates to the field of metal mask transfer technology, including a transfer component; a gripping mechanism, which is installed at the execution end of the transfer component and is used to adsorb and fix the fine metal mask; two clamping mechanisms, which are symmetrically installed on both sides of the gripping mechanism, and are respectively used to clamp and fix the two sides of the isolation film located at the lower side of the fine metal mask, so that the isolation film supports the fine metal mask; a storage mechanism, which is arranged on one side of the next workstation. The present invention uses two clamping mechanisms to clamp and fix the isolation film located at the lower side of the fine metal mask, and tighten and straighten the isolation film, so that the isolation film supports the fine metal mask, avoids the fine metal mask from bending during the transfer process, and improves the quality of the fine metal mask.

Description

Technical Field

[0001] The invention relates to the technical field of metal mask transfer, and in particular to a metal mask fixing transfer device and a use method thereof. Background Art

[0002] Metal masks include ordinary metal masks and fine metal masks. Ordinary metal masks have relatively low manufacturing precision requirements and are used in general semiconductor production. They do not require particularly high resolution or precision. Fine metal masks usually refer to masks with more precise manufacturing processes and finer dimensions. They require higher precision processing and stricter quality control to meet the needs of modern microelectronics manufacturing, especially the precise control of pattern resolution and device size. Fine metal masks are core consumables for OLED production. They are only about 20um thick, but can be up to 1400mm long and 400mm wide.

[0003] The fine metal mask is placed in a tray in a stacked manner, and two adjacent fine metal mask plates need to be isolated by an isolation film. When a fine metal mask plate is taken out from the tray and fixedly transferred to the corresponding process equipment, there is a certain distance between the tray and the corresponding process equipment. Since the thickness of the fine metal mask plate is very thin, it is easy to bend during the transfer process, which in turn affects the quality of the fine metal mask plate; in addition, due to the existence of the isolation film, when transferring the fine metal mask plate, two grasping mechanisms need to be set up to transfer the fine metal mask plate and the isolation film to the corresponding positions respectively, which increases the cost of equipment manufacturing and occupies a large space. Summary of the invention

[0004] The purpose of the present invention is to provide a metal mask fixing transfer device and a method for using the same, which solves the problem that the fine metal mask is prone to bending when transferring the fine metal mask, thereby affecting the quality of the fine metal mask.

[0005] The present invention solves the above technical problems through the following technical solutions, which include:

[0006] Transfer parts;

[0007] A gripping mechanism, which is installed at the execution end of the transfer component and is used to absorb and fix the fine metal mask;

[0008] Two clamping mechanisms, the two clamping mechanisms are symmetrically installed on both sides of the grasping mechanism, and the two clamping mechanisms are respectively used to clamp and fix both sides of the isolation film located at the lower side of the fine metal mask, so that the isolation film supports the fine metal mask; and

[0009] The storage mechanism is arranged on one side of the next workstation. When the transfer component moves the grabbing mechanism close to the storage mechanism, the grabbing mechanism away from the storage mechanism releases the fine metal mask, and the other clamping mechanism transfers the fine metal mask to the storage mechanism for storage.

[0010] Preferably, the gripping mechanism includes a mounting cross plate, on which are mounted two rows of symmetrically arranged first vacuum suction cups and two adjusting components, the two adjusting components being used to drive the two rows of first vacuum suction cups to move, so as to adjust the spacing and positions between two adjacent first vacuum suction cups, a row of second vacuum suction cups being arranged in the middle of the mounting cross plate, and a row of the second vacuum suction cups being slidably arranged on the mounting cross plate, a connecting rod being fixed on one side of the second vacuum suction cup, and both sides of the connecting rod being slidably connected to the first vacuum suction cups located on the same straight line, and the first vacuum suction cup and the second vacuum suction cup are both connected to an external vacuum system.

[0011] Preferably, the adjustment component includes a first electric push rod fixed to the mounting cross plate, a sliding frame is fixed to the telescopic end of the first electric push rod, a first slider fixed to the first vacuum suction cup is slidably arranged in the sliding frame, a plurality of first guide sliding holes are opened on the corresponding side of the mounting cross plate, and a plurality of the first vacuum suction cups respectively penetrate the plurality of first guide sliding holes, and a second slider slidably arranged in the first guide sliding hole is fixed to the first vacuum suction cup.

[0012] Preferably, a second guide sliding hole is opened in the middle of the mounting transverse plate, a plurality of third sliding blocks are slidably arranged in the second guide sliding hole, and a plurality of the second vacuum suction cups are respectively penetrated and fixed to the plurality of third sliding blocks.

[0013] Preferably, the clamping mechanism comprises a second electric push rod fixed to the side of the grasping mechanism through a first mounting plate, a mounting frame is fixed to the telescopic end of the second electric push rod, two rotating rods are installed on the mounting frame for transverse rotation, the two rotating rods are respectively rotatably installed with a first rotating roller and a second rotating roller through a connecting plate, and the first rotating roller is located on a side away from the grasping mechanism, a driving assembly for driving the two rotating rods to rotate is arranged on the mounting frame, and the rotation directions of the two rotating rods are opposite, so as to realize the first rotating roller and the second rotating roller flipping to contact or away from each other;

[0014] A first motor driving the first rotating roller to rotate is fixed on the corresponding connecting plate, and a scraper is fixed on the two connecting plates on the corresponding side, and one side of the scraper is gap-matched with the corresponding first rotating roller;

[0015] A first linear magnetic strip with vertical displacement is arranged between the first rotating roller and the second rotating roller, and metal strips are arranged on both sides of the isolation membrane. The first linear magnetic strip is adsorbed and connected with the metal strip when in contact with it, and the lifting height of the first linear magnetic strip is inversely proportional to the distance between the first rotating roller and the second rotating roller.

[0016] Preferably, the driving assembly includes a third electric push rod fixed to the mounting frame, a double-sided rack is fixed to the telescopic end of the third electric push rod, gears are fixed to the two rotating rods, and the two gears are respectively meshed and connected with the teeth on both sides of the double-sided rack; the first linear magnetic strip is fixed to the lower end of the double-sided rack, and a guide rod slidably arranged on the mounting frame is fixed to the upper side of the first linear magnetic strip.

[0017] Preferably, an arc-shaped magnetic block is embedded in the outer surface of the first rotating roller, and the arc-shaped magnetic block has the same diameter as the outer circumferential surface of the first rotating roller; and a rubber sleeve is provided on the outer surface of the second rotating roller.

[0018] Preferably, the storage mechanism comprises a base, a film receiving plate is installed in the base through a plurality of spring supports, a guide arc plate is fixed on a side of the base close to the gripping mechanism, a traction assembly is arranged on the base, and the traction assembly is used to pull the isolation film discharged from the gripping mechanism to be stored on the film receiving plate; a separation assembly is arranged on a side of the base away from the guide arc plate, and is used to separate the isolation film from the traction assembly;

[0019] The traction assembly includes a lead screw and an optical axis respectively mounted on both sides of the base through a second mounting plate, and the lead screw is rotatably connected to the corresponding second mounting plate, a second motor that drives the lead screw to rotate is fixed on one of the second mounting plates, a moving rod is slidably mounted on the optical axis, and the moving rod is threadedly connected to the lead screw, and a second linear magnetic strip is fixed on the side of the moving rod close to the guide arc plate.

[0020] Preferably, the separation assembly includes a cross bar fixed to the base through a third mounting plate, at least two flip rods are rotatably mounted on the cross bar, a torsion spring for driving the flip rod to flip is mounted on the cross bar, and a limiting groove is provided on the flip rod, a limiting block located in the limiting groove is fixed on the cross bar to limit the rotation angle of the flip rod, and when not subject to other forces, one end of the flip rod close to the guide arc plate tilts upward, and an abutment plate is fixed on one end of the flip rod close to the guide arc plate.

[0021] The present invention also provides a method for using the metal mask fixing and transferring device as described above, comprising the following steps:

[0022] Step 1: Adsorbing the fine metal mask: driving the gripping mechanism to move to the tray where the fine metal mask is stored through the transfer component, and adsorbing and fixing the fine metal mask through the gripping mechanism;

[0023] Step 2: Fix the isolation film: adjust the position of the mounting frame through the second electric push rod in the clamping mechanism, and make the first linear magnetic strip and the metal strip of the top isolation film magnetically fixed, and move the first linear magnetic strip inward by contracting the second electric push rod, and at the same time contract the third electric push rod to make the first linear magnetic strip move upward, the isolation film will gradually bend upward, the first rotating roller and the second rotating roller will flip and finally clamp the edge of the isolation film, and then extend the telescopic end of the second electric push rod to tighten and straighten the isolation film to support the fine metal mask;

[0024] Step 3: Pulling off the isolation film: Move the grabbing mechanism to one side of the storage mechanism through the transfer component, move the first rotating roller and the second rotating roller in the clamping mechanism away from the storage mechanism away from the storage mechanism, and operate the first motor in the clamping mechanism close to the storage mechanism to drive the first rotating roller and the second rotating roller to rotate, so as to transfer the isolation film to the storage mechanism for storage and stacking;

[0025] Step 4: Place the fine metal mask: Place the fine metal mask on the next workstation by running the transfer component.

[0026] Compared with the prior art, the beneficial effects of the present invention are:

[0027] 1. The present invention uses two clamping mechanisms to clamp and fix the isolation film located at the lower side of the fine metal mask, and tighten and straighten the isolation film. The isolation film supports the fine metal mask, avoids the fine metal mask from bending during transportation, and improves the quality of the fine metal mask;

[0028] 2. The present invention only requires one grabbing mechanism, which can reduce the floor space compared with the traditional method which requires two grabbing mechanisms, is conducive to the arrangement of equipment, and reduces costs;

[0029] 3. In the present invention, the isolation membranes can be stacked by setting the storage mechanism, and as the number of isolation membranes on the membrane receiving plate increases, the spring will be compressed and deformed due to the gravity of the isolation membranes, and the membrane receiving plate will drop, so that the height of the traction component and the isolation membrane stacking can be basically maintained unchanged, avoiding a large drop difference between the isolation membranes stacked one after another, which is conducive to the placement of isolation membranes, and more isolation membranes can be stacked and stored;

[0030] 4. In the present invention, the spacing between the vacuum suction cups in the grasping mechanism can be adjusted, so as to adapt to the transfer operation of fine metal mask plates of different sizes, and ensure that the spacing between each row of vacuum suction cups is always consistent, so as to evenly adsorb and fix the fine metal mask plate, so that the fine metal mask plate is evenly stressed and deformation of the fine metal mask plate is avoided as much as possible. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a structural schematic diagram of the present invention;

[0032] Figure 2 for Figure 1 A schematic diagram of the three-dimensional structure of the combination of the grabbing mechanism and the clamping mechanism;

[0033] Figure 3 for Figure 1 The enlarged structural diagram at A in the middle;

[0034] Figure 4 for Figure 3 A structural diagram of the working state;

[0035] Figure 5 for Figure 3 A schematic diagram of the cross-sectional structure of the first rotating roller and the second rotating roller;

[0036] Figure 6 for Figure 1 Schematic diagram of the three-dimensional structure of the grabbing mechanism;

[0037] Figure 7 for Figure 1 Schematic diagram of the three-dimensional structure of the clamping mechanism;

[0038] Figure 8 for Figure 7 The enlarged structural diagram at B in the middle;

[0039] Fig. 9 for Figure 1 A schematic diagram of the three-dimensional structure of the storage mechanism;

[0040] Fig.10 for Fig. 9 A schematic diagram of a main cross-sectional structure;

[0041] Fig.11 for Fig. 9 Schematic diagram of the three-dimensional structure of the separation component;

[0042] Fig.12 for Fig.11 The enlarged structural diagram at C in the middle;

[0043] Fig.13 A schematic diagram of the structure of stacking multiple fine metal masks;

[0044] Fig.14 Schematic diagram of the planar structure of the isolation membrane.

[0045] The numbers in the figure represent:

[0046] 1- Transfer parts;

[0047] 2-grasping mechanism; 21-mounting horizontal plate; 22-first vacuum suction cup; 23-adjusting assembly; 231-first electric push rod; 232-sliding frame; 233-first slider; 234-second slider; 235-first guide sliding hole; 241-second guide sliding hole; 242-third slider; 25-linking rod; 26-second vacuum suction cup;

[0048] 3-clamping mechanism; 31-second electric push rod; 32-mounting frame; 33-rotating rod; 34-first rotating roller; 341-arc-shaped magnetic block; 35-driving assembly; 351-third electric push rod; 352-double-sided rack; 353-gear; 36-first linear magnetic strip; 37-second rotating roller; 371-rubber sleeve; 38-first motor; 39-guide rod; 310-baffle; 311-scraper;

[0049] 4-storage mechanism; 41-base; 42-spring; 43-film receiving plate; 44-guide arc plate; 45-separation assembly; 451-cross bar; 452-flip bar; 453-retaining plate; 454-torsion spring; 455-limiting block; 456-limiting groove; 461-screw rod; 462-second motor; 463-optical axis; 464-moving rod; 465-second linear magnetic strip;

[0050] 5-Next workstation;

[0051] 6-Pallet;

[0052] 71-fine metal mask; 72-isolation film; 73-metal strip. DETAILED DESCRIPTION

[0053] The above and other technical features and advantages of the present invention are described in more detail below in conjunction with the accompanying drawings.

[0054] Embodiment 1

[0055] This embodiment provides a technical solution: a metal mask fixed transfer device, such as Figure 1As shown, it includes a transfer component 1, a gripping mechanism 2, two clamping mechanisms 3 and a storage mechanism 4; the transfer component 1 can be a two-axis truss, a three-axis truss or a robotic arm, and the specific selection is made according to the actual working conditions. The gripping mechanism 2 is installed at the execution end of the transfer component 1, and is used to adsorb and fix the fine metal mask 71. The function of this device is to transfer multiple fine metal mask plates 71 stacked on the tray 6 to the next workstation 5 one by one through the cooperation of the transfer component 1 and the gripping mechanism 2, and carry out the next process; it should be noted that: an isolation film 72 is placed between two adjacent fine metal mask plates 71, and both sides of the isolation film 72 exceed the fine metal mask plate 71. The specific size of the excess is set according to needs and needs to cooperate with the two clamping mechanisms 3. Metal strips 73 are provided on both sides of the isolation film 72; all components of this device are controlled and operated by the LPC controller.

[0056] like Figure 2 and Fig.13 As shown, two clamping mechanisms 3 are symmetrically installed on both sides of the grasping mechanism 2, and the two clamping mechanisms 3 are respectively used to clamp and fix the two sides of the isolation film 72 located on the lower side of the fine metal mask 71. When the two sides of the isolation film 72 are tightened and straightened by using the clamping mechanisms 3 on both sides, the fine metal mask 71 is placed on the isolation film 72, that is, the isolation film 72 supports the fine metal mask 71 to prevent the fine metal mask 71 from bending.

[0057] like Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 7 , Figure 8 and Fig.13As shown, the clamping mechanism 3 includes a second electric push rod 31 fixed to the side of the grasping mechanism 2 through a first mounting plate, a mounting frame 32 is fixed to the telescopic end of the second electric push rod 31, the number of the second electric push rod 31 is at least 2, to ensure the stability of the mounting frame 32, two rotating rods 33 are installed on the mounting frame 32 for transverse rotation, and the two rotating rods 33 are respectively rotatably installed with a first rotating roller 34 and a second rotating roller 37 through a connecting plate, the connecting plate is located at the end of the rotating rod 33, and the first rotating roller 34 is located on the side away from the grasping mechanism 2, and an arc-shaped magnetic block 341 is embedded in the outer surface of the first rotating roller 34, and the arc-shaped magnetic block 341 can be magnetically attracted to the metal strip 73 on the isolation membrane 72 to ensure isolation The isolation film 72 can be smoothly transmitted to the side of the first rotating roller 34, and the arc-shaped magnetic block 341 has the same diameter as the outer circumference of the first rotating roller 34, ensuring that the curvature of the outer circumference of the first rotating roller 34 is the same; in addition, a baffle 310 is provided on the side away from the scraper 311, and the baffle 310 is fixed to the mounting frame 32. The baffle 310 can prevent the isolation film 72 from tilting or falling to the side of the second rotating roller 37; the outer surface of the second rotating roller 37 is provided with a rubber sleeve 371, ensuring that when the first rotating roller 34 contacts the second rotating roller 37, there is a certain buffering function between the first rotating roller 34 and the second rotating roller 37, so that the fine metal mask 71 can be clamped smoothly to avoid signs of slipping.

[0058] like Figure 3 and Figure 4 As shown, a first motor 38 driving the first rotating roller 34 to rotate is fixed on the corresponding connecting plate, and the first rotating roller 34 and the second rotating roller 37 clamp the isolation film 72. By running the first motor 38, the first rotating roller 34 can be driven to rotate, and the second rotating roller 37 can be further driven to rotate, and the isolation film 72 is driven to transmit; a scraper 311 is fixed on the two connecting plates on the corresponding side, and one side of the scraper 311 is gap-matched with the first rotating roller 34. The scraper 311 plays a role in peeling and guiding the isolation film 72 to prevent the isolation film 72 from continuously rotating around the first rotating roller 34.

[0059] like Figure 3 and Figure 4As shown, a first linear magnetic strip 36 with vertical displacement is provided between the first rotating roller 34 and the second rotating roller 37. When the first linear magnetic strip 36 is moved downward to the lowest stroke, the edge of the isolation film 72 can be pulled upward by adsorption connection when the first linear magnetic strip 36 contacts the metal strip 73. The lifting height of the first linear magnetic strip 36 is inversely proportional to the distance between the first rotating roller 34 and the second rotating roller 37, that is, the larger the distance between the first rotating roller 34 and the second rotating roller 37, the lower the height of the first linear magnetic strip 36, so as to ensure that the first linear magnetic strip 36 can contact, attract and fix the metal strip 73; after the first linear magnetic strip 36 moves upward, the distance between the first rotating roller 34 and the second rotating roller 37 is reduced until they contact, so as to clamp the isolation film 72.

[0060] like Figure 7 and Figure 8 As shown, a driving assembly 35 for driving the two rotating rods 33 to rotate is provided on the mounting frame 32, and the rotation directions of the two rotating rods 33 are opposite, so as to realize the flipping of the first rotating roller 34 and the second rotating roller 37 to contact or move away; the driving assembly 35 includes a third electric push rod 351 fixed to the mounting frame 32, and the telescopic end of the third electric push rod 351 is fixed with a double-sided rack 352, and the double-sided rack 352 is a symmetrical rack with teeth on both sides, and the two rotating rods 33 are fixed with gears 353, and the two gears 353 are respectively meshed with the teeth on both sides of the double-sided rack 352; the first linear magnetic strip 36 is fixed to the lower end of the double-sided rack 352, and the upper side of the first linear magnetic strip 36 is fixed with a guide rod 39 slidably set on the mounting frame 32 to ensure the stability of the first linear magnetic strip 36 during vertical displacement.

[0061] like Figure 1 As shown, the storage mechanism 4 is arranged on one side of the next workstation 5, and the two are arranged adjacent to each other, and the height of the storage mechanism 4 is higher than that of the next workstation 5. This arrangement realizes the removal of the isolation film 72 at the end position of the moving path of the fine metal mask 71, so as to facilitate the placement of the fine metal mask 71. When the transfer component 1 moves the grasping mechanism 2 close to the storage mechanism 4, the grasping mechanism 2 away from the side of the storage mechanism 4 releases the fine metal mask 71, and the first motor 38 of the other clamping mechanism 3 runs, and the first rotating roller 34 and the second rotating roller 37 rotate, so that the fine metal mask 71 can be transferred to the storage mechanism 4 for storage.

[0062] Embodiment 2

[0063] This embodiment is further optimized on the basis of the first embodiment, and the same parts as the above technical solution will not be repeated here. In order to better implement the present invention, the following configuration is particularly adopted: Figure 2 and Figure 6As shown, the gripping mechanism 2 in this embodiment includes a mounting transverse plate 21, on which two rows of symmetrically arranged first vacuum suction cups 22 and two adjusting components 23 are mounted. The two adjusting components 23 are respectively used to drive the two rows of first vacuum suction cups 22 to move, so as to adjust the spacing and positions between two adjacent first vacuum suction cups 22. By adjusting the adjusting components 23, the spacing and positions between the plurality of first vacuum suction cups 22 can be always equal. A row of second vacuum suction cups 26 is arranged in the middle of the mounting transverse plate 21, and the row of second vacuum suction cups 26 are all slidably arranged on the mounting transverse plate 21. A connecting rod 25 is fixed on one side of the second vacuum suction cup 26, and both sides of the connecting rod 25 are slidingly connected to the first vacuum suction cup 22 located on the same straight line. Due to the setting of the connecting rod 25, the second vacuum suction cup 26 will move laterally synchronously with the corresponding first vacuum suction cup 22, so that the corresponding first vacuum suction cup 22 and the second vacuum suction cup 26 are always located on the same straight line. The first vacuum suction cup 22 and the second vacuum suction cup 26 are both connected to the external vacuum system, thereby realizing the adsorption and fixation of the fine metal mask 71, and the first vacuum suction cup 22 uses a conventional model, which will not be elaborated here.

[0064] like Figure 6 As shown, further, the adjustment component 23 includes a first electric push rod 231 fixed to the mounting cross plate 21, a sliding frame 232 is fixed to the telescopic end of the first electric push rod 231, and a first slider 233 fixed to the first vacuum suction cup 22 is slidably arranged in the sliding frame 232. Specifically, a groove is provided in the sliding frame 232, and the first slider 233 is arranged in the groove. The width and thickness of the first slider 233 are consistent with those of the groove to ensure the stability of the first vacuum suction cup 22. A plurality of first guide sliding holes 235 are provided on the corresponding side of the mounting cross plate 21. The sliding frame 232 intersects with the plurality of first guide sliding holes 235 as intersections. When the sliding frame 232 moves to any position, the spacing between each adjacent two intersections is equal. The plurality of first vacuum suction cups 22 respectively penetrate the plurality of first guide sliding holes 235. The first vacuum suction cup 22 is fixed with a second slider 234 slidably arranged in the first guide sliding hole 235. The second slider 234 guides the first vacuum suction cup 22.

[0065] like Figure 6 As shown, further, a second guide slide hole 241 is opened in the middle position of the installation cross plate 21, and the second guide slide hole 241 is arranged parallel to the sliding frame 232. A plurality of third sliders 242 are slidably arranged in the second guide slide hole 241, and a plurality of second vacuum suction cups 26 are respectively penetrated and fixed on the plurality of third sliders 242, so that the second vacuum suction cups 26 can be stably guided.

[0066] In this embodiment, the spacing and position between the vacuum suction cups (i.e., the first vacuum suction cup 22 and the second vacuum suction cup 26) can be adjusted to accommodate fine metal mask plates 71 of different sizes, and the spacing between each row of vacuum suction cups can be ensured to always remain consistent, thereby evenly adsorbing and fixing the fine metal mask plate 71 to minimize deformation of the fine metal mask plate 71.

[0067] Embodiment 3

[0068] This embodiment is further optimized on the basis of the first embodiment, and the same parts as the above technical solution will not be repeated here. In order to better implement the present invention, the following configuration is particularly adopted: Figure 1 , Fig. 9 As shown, the storage mechanism 4 in this embodiment includes a base 41, and a film receiving plate 43 is installed in the base 41 through a plurality of springs 42. The elastic coefficient of the spring 42 is set according to needs to ensure that it will be gradually compressed due to the increase in the number of stacked isolation films 72. A guide arc plate 44 is fixed to the side of the base 41 close to the grasping mechanism 2. The guide arc plate 44 is used to receive the isolation film 72 removed from the grasping mechanism 2, which is convenient for docking with the clamping mechanism 3, reducing the path of the transfer component 1 to move the grasping mechanism 2 and shortening the running time. A traction assembly is provided on the base 41, which is used to pull the isolation film 72 discharged from the grasping mechanism 2 to be stored on the film receiving plate 43 for stacking.

[0069] like Fig. 9 and Fig.10 As shown, further, the traction assembly includes a screw rod 461 and an optical axis 463 respectively mounted on both sides of the base 41 through a second mounting plate, and the screw rod 461 is rotatably connected to the corresponding second mounting plate, a second motor 462 that drives the screw rod 461 to rotate is fixed on one of the second mounting plates, a moving rod 464 is slidably mounted on the optical axis 463, and the moving rod 464 is threadedly connected to the screw rod 461, and a second linear magnetic strip 465 is fixed to the side of the moving rod 464 close to the guide arc plate 44.

[0070] When the second motor 462 is running, the lead screw 461 is driven to rotate, thereby driving the moving rod 464 and the second linear magnetic strip 465 to move laterally, approaching or moving away from the guide arc plate 44. When the isolation membrane 72 is discharged by the grasping mechanism 2, it will slide downward along the guide arc plate 44. At this time, the second linear magnetic strip 465 of the traction assembly is moved to the guide arc plate 44, so that the metal strip 73 of the isolation membrane 72 is magnetically fixed to the second linear magnetic strip 465, and the second linear magnetic strip 465 can be moved to the other side, and then the isolation membrane 72 is pulled to the other side and placed on the film receiving plate 43. The setting of the guide arc plate 44 can not only play a filtering role, but also use the gravitational potential energy to make the isolation membrane 72 slide downward by itself, thereby reducing the traction force required for the traction of the traction assembly, and avoiding the second linear magnetic strip 465 and the metal strip 73 of the isolation membrane 72 from separating during the traction process.

[0071] like Figures 9 to 12 As shown, further, a separation assembly 45 is provided on one side of the base 41 away from the guide arc plate 44, which is used to separate the isolation membrane 72 from the traction assembly; the separation assembly 45 includes a cross bar 451 fixed to the base 41 through a third mounting plate, the cross bar 451 is located on the upper side of the traction assembly, at least two flip rods 452 are rotatably mounted on the cross bar 451, a torsion spring 454 is installed on the cross bar 451 to drive the flip rod 452 to flip, and a limiting groove 456 is opened on the flip rod 452, and a limiting block 455 located in the limiting groove 456 is fixed on the cross bar 451 to limit the rotation angle of the flip rod 452. When not subject to other forces, one end of the flip rod 452 close to the guide arc plate 44 is tilted upward, and the other end is tilted downward, and a stop plate 453 is fixed to one end of the flip rod 452 close to the guide arc plate 44.

[0072] When the traction assembly pulls the isolation film 72 close to the separation assembly 45, the moving rod 464 will contact the lower end of the flip rod 452. Under the push of the moving rod 464, the flip rod 452 will rotate around the cross bar 451. Based on the lever principle, the abutment plate 453 will be flipped and displaced downward, and the second linear magnetic strip 465 will press the metal strip 73 on the front side of the isolation film 72 downward, so that the metal strip 73 is separated from the second linear magnetic strip 465 and successfully placed on the film connecting plate 43. As the number of isolation films 72 on the film connecting plate 43 increases, the spring 42 will be compressed and deformed due to the gravity of the isolation film 72, and the film connecting plate 43 will drop, so that the stacking height of the traction assembly and the isolation film 72 can be basically maintained unchanged, avoiding a large drop between the isolation films 72 stacked one after another, which is conducive to the placement of the isolation film 72, and more isolation films 72 can be stacked and stored.

[0073] Embodiment 3

[0074] This embodiment provides a method for using the metal mask fixing transfer device as described in the above embodiment. Figures 1 to 14 As shown, the following steps are included:

[0075] Step 1: Adsorbing the fine metal mask 71: The transfer component 1 drives the grasping mechanism 2 to move to the tray 6 where the fine metal mask 71 is stored, and the distance between the vacuum suction cups is adjusted in advance according to the size of the fine metal mask 71, and then the grasping mechanism 2 can absorb and fix the fine metal mask 71;

[0076] Step 2: Fix the isolation film 72: The position of the mounting frame 32 is adjusted by the second electric push rod 31 in the clamping mechanism 3, and the first linear magnetic strip 36 is magnetically fixed to the metal strip 73 of the top isolation film 72. It should be noted that the magnetic force of the first linear magnetic strip 36 needs to be set to only attract the metal strip 73 that fixes the top isolation film 72, and will not attract and fix the two metal strips 73. The first linear magnetic strip 36 is moved inward by contracting the second electric push rod 31, and the first linear magnetic strip 36 is moved inward by contracting the third electric push rod 351 at the same time. The strip 36 moves upward, and the edge of the isolation film 72 gradually bends upward. The first rotating roller 34 and the second rotating roller 37 flip over and finally clamp the edge of the isolation film 72. At this time, the first linear magnetic strip 36 is separated from the metal strip 73, and the metal strip 73 is magnetically fixed to the arc-shaped magnetic block 341 of the first rotating roller 34. Then, the telescopic end of the second electric push rod 31 can be extended to tighten and straighten the isolation film 72 to support the fine metal mask 71, thereby preventing the fine metal mask 71 from bending and ensuring the quality of the fine metal mask 71.

[0077] Step 3: Remove the isolation film 72: Move the grabbing mechanism 2 to one side of the storage mechanism 4 through the transfer component 1, and make the scraper 311 cover the outer edge of the guide arc plate 44, and move the first rotating roller 34 and the second rotating roller 37 in the clamping mechanism 3 away from the side of the storage mechanism 4 away, that is, release one side of the isolation film 72, and operate the first motor 38 in the clamping mechanism 3 close to the side of the storage mechanism 4, so as to drive the first rotating roller 34 and the second rotating roller 37 to rotate, and transfer the isolation film 72 to the storage mechanism 4 for storage and stacking;

[0078] Step 4: Placing the fine metal mask 71: By operating the transfer component 1, the fine metal mask 71 can be placed on the next workstation 5 for the next process.

[0079] The above description is only a preferred embodiment of the present invention, which is only illustrative and not restrictive of the present invention. Those skilled in the art understand that many changes, modifications, and even equivalences may be made to the present invention within the spirit and scope defined by the claims of the present invention, but all of them will fall within the scope of protection of the present invention.

Claims

1. A metal mask fixing and transferring device, characterized in that: include: Transfer component (1); A gripping mechanism (2), the gripping mechanism (2) being mounted on the execution end of the transfer component (1) and being used for adsorbing and fixing the fine metal mask (71); Two clamping mechanisms (3), the two clamping mechanisms (3) being symmetrically mounted on both sides of the gripping mechanism (2), the two clamping mechanisms (3) being respectively used to clamp and fix both sides of the isolation film (72) located at the lower side of the fine metal mask (71), so as to enable the isolation film (72) to support the fine metal mask (71); and A storage mechanism (4), wherein the storage mechanism (4) is arranged on one side of the next workstation (5), and when the transfer component (1) moves the gripping mechanism (2) close to the storage mechanism (4), the gripping mechanism (2) on the side away from the storage mechanism (4) releases the fine metal mask (71), and the other clamping mechanism (3) transfers the fine metal mask (71) to the storage mechanism (4) for storage.

2. The metal mask fixing and transferring device according to claim 1, characterized in that: The gripping mechanism (2) comprises a mounting cross plate (21), on which two rows of symmetrically arranged first vacuum suction cups (22) and two adjustment components (23) are mounted, the two adjustment components (23) being used to drive the two rows of first vacuum suction cups (22) to move, so as to adjust the spacing and position between two adjacent first vacuum suction cups (22); a row of second vacuum suction cups (26) is arranged at a middle position of the mounting cross plate (21), and the row of second vacuum suction cups (26) are all slidably arranged on the mounting cross plate (21); a connecting rod (25) is fixed on one side of the second vacuum suction cups (26), and both sides of the connecting rod (25) are slidably connected to the first vacuum suction cups (22) located on the same straight line, and the first vacuum suction cups (22) and the second vacuum suction cups (26) are both connected to an external vacuum system.

3. The metal mask fixing and transferring device according to claim 2, characterized in that: The adjustment assembly (23) comprises a first electric push rod (231) fixed to the mounting transverse plate (21); a sliding frame (232) is fixed to the telescopic end of the first electric push rod (231); a first sliding block (233) fixed to the first vacuum suction cup (22) is slidably arranged in the sliding frame (232); a plurality of first guide sliding holes (235) are opened on the corresponding side of the mounting transverse plate (21); and a plurality of the first vacuum suction cups (22) respectively penetrate the plurality of first guide sliding holes (235); and a second sliding block (234) slidably arranged in the first guide sliding hole (235) is fixed to the first vacuum suction cup (22).

4. The metal mask fixing and transferring device according to claim 2, characterized in that: A second guide sliding hole (241) is provided in the middle of the mounting transverse plate (21), a plurality of third sliding blocks (242) are slidably arranged in the second guide sliding hole (241), and a plurality of the second vacuum suction cups (26) are respectively passed through and fixed to the plurality of third sliding blocks (242).

5. The metal mask fixing and transferring device according to claim 1, characterized in that: The clamping mechanism (3) comprises a second electric push rod (31) fixed to the side of the gripping mechanism (2) via a first mounting plate, a mounting frame (32) being fixed to the telescopic end of the second electric push rod (31), two rotating rods (33) being mounted on the mounting frame (32) for transverse rotation, the two rotating rods (33) being respectively mounted with a first rotating roller (34) and a second rotating roller (37) for rotation via a connecting plate, and the first rotating roller (34) being located on a side away from the gripping mechanism (2), a driving assembly (35) for driving the two rotating rods (33) to rotate, and the two rotating rods (33) are rotating in opposite directions, so as to achieve the first rotating roller (34) and the second rotating roller (37) being flipped to contact or away from each other; A first motor (38) for driving the first rotating roller (34) to rotate is fixed to the corresponding connecting plate, and a scraper (311) is fixed to the two connecting plates on the corresponding side, and one side of the scraper (311) is gap-matched with the corresponding first rotating roller (34); A first linear magnetic strip (36) with vertical displacement is provided between the first rotating roller (34) and the second rotating roller (37), and metal strips (73) are provided on both sides of the isolation membrane (72). The first linear magnetic strip (36) and the metal strip (73) are adsorbed and connected when in contact, and the lifting height of the first linear magnetic strip (36) is inversely proportional to the distance between the first rotating roller (34) and the second rotating roller (37).

6. The metal mask fixing and transferring device according to claim 5, characterized in that: The driving assembly (35) comprises a third electric push rod (351) fixed to the mounting frame (32); a double-sided rack (352) is fixed to the telescopic end of the third electric push rod (351); gears (353) are fixed to the two rotating rods (33); the two gears (353) are respectively meshed with teeth on both sides of the double-sided rack (352); the first linear magnetic strip (36) is fixed to the lower end of the double-sided rack (352); and a guide rod (39) slidably arranged on the mounting frame (32) is fixed to the upper side of the first linear magnetic strip (36).

7. The metal mask fixing and transferring device according to claim 5, characterized in that: An arc-shaped magnetic block (341) is embedded in the outer surface of the first rotating roller (34), and the arc-shaped magnetic block (341) has the same diameter as the outer circumferential surface of the first rotating roller (34); and a rubber sleeve (371) is provided on the outer surface of the second rotating roller (37).

8. The metal mask fixing and transferring device according to claim 1, characterized in that: The storage mechanism (4) comprises a base (41), a film receiving plate (43) is supported and installed in the base (41) via a plurality of springs (42), a guide arc plate (44) is fixed on a side of the base (41) close to the gripping mechanism (2), a traction assembly is arranged on the base (41), the traction assembly is used to traction the isolation film (72) discharged from the gripping mechanism (2) to be stored on the film receiving plate (43); a separation assembly (45) is arranged on a side of the base (41) away from the guide arc plate (44), the separation assembly (45) is used to separate the isolation film (72) from the traction assembly; The traction assembly comprises a screw rod (461) and an optical axis (463) respectively mounted on both sides of a base (41) via a second mounting plate, and the screw rod (461) is rotatably connected to the corresponding second mounting plate, a second motor (462) for driving the screw rod (461) to rotate is fixed on one of the second mounting plates, a moving rod (464) is slidably mounted on the optical axis (463), and the moving rod (464) is threadedly connected to the screw rod (461), and a second linear magnetic strip (465) is fixed on one side of the moving rod (464) close to the guide arc plate (44).

9. The metal mask fixing and transferring device according to claim 8, characterized in that: The separation assembly (45) comprises a cross bar (451) fixed to the base (41) via a third mounting plate, at least two flipping rods (452) are rotatably mounted on the cross bar (451), a torsion spring (454) is mounted on the cross bar (451) for driving the flipping rods (452) to flip, and a limiting groove (456) is provided on the flipping rods (452), a limiting block (455) located in the limiting groove (456) is fixed on the cross bar (451) to limit the rotation angle of the flipping rods (452), and when no other force is applied, one end of the flipping rod (452) close to the guide arc plate (44) tilts upward, and one end of the flipping rod (452) close to the guide arc plate (44) is fixed to a stop plate (453).

10. A method for using the metal mask fixing and transferring device according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1: adsorbing the fine metal mask (71): driving the gripping mechanism (2) to move to the tray (6) storing the fine metal mask (71) through the transfer component (1), and adsorbing and fixing the fine metal mask (71) through the gripping mechanism (2); Step 2: Fixing the isolation film (72): adjusting the position of the mounting frame (32) by means of the second electric push rod (31) in the clamping mechanism (3), and making the first linear magnetic strip (36) and the metal strip (73) of the topmost isolation film (72) magnetically fixed, and by contracting the second electric push rod (31) so that the first linear magnetic strip (36) moves inward, and at the same time contracting the third electric push rod (351) so that the first linear magnetic strip (36) moves upward, the isolation film (72) will gradually bend upward, the first rotating roller (34) and the second rotating roller (37) will flip and finally clamp the edge of the isolation film (72), and then the telescopic end of the second electric push rod (31) can be extended to tighten and straighten the isolation film (72) to support the fine metal mask (71); Step 3: Extracting the isolation film (72): The grabbing mechanism (2) is moved to one side of the storage mechanism (4) by the transfer component (1), and the first rotating roller (34) and the second rotating roller (37) in the clamping mechanism (3) on the side away from the storage mechanism (4) are moved away, and the first motor (38) in the clamping mechanism (3) on the side close to the storage mechanism (4) is operated to drive the first rotating roller (34) and the second rotating roller (37) to rotate, so as to transfer the isolation film (72) to the storage mechanism (4) for storage and stacking; Step 4: Placing the fine metal mask (71): Placing the fine metal mask (71) on the next workstation (5) by operating the transfer component (1).

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