Optical extension module and optical system having the same

Abstract

The present invention discloses an optical expansion module and optical system. The optical expansion module includes: a spatial light modulator; an expansion lens assembly, the expansion lens assembly being disposed on one side of the spatial light modulator and forming multiple expanded light paths through a main imaging lens, a reflector assembly, or a prism assembly; multiple microlens array modules, the multiple microlens array modules being disposed on a side of the expansion lens assembly away from the spatial light modulator and located on the image plane of the main imaging lens, each microlens array module corresponding to a single expanded light path; each expanded light path corresponding to a sub-imaging lens, each sub-imaging lens being disposed in a one-to-one correspondence with the microlens array module, and the sub-imaging lens being disposed on the side of the microlens array module away from the expansion lens assembly. The optical expansion module according to embodiments of the present invention has the advantages of improving circuit exposure efficiency and reducing maintenance costs.

Description

Technical Field

[0001] The present invention relates to the technical field of direct-write exposure systems, and in particular to an optical extension module and an optical system having the same. Background Art

[0002] Direct-write lithography is a technique for printing a characteristic pattern on the surface of a photosensitive material (mostly a glue or film). The maskless lithography involved uses a digital micromirror system to generate the pattern. Through an optical projection element, the image is projected onto a light-sensitive substrate at a certain magnification, producing a characteristic pattern.

[0003] However, the chip imaging area size of the optical expansion module in the related technology leads to low lithography efficiency. If fine circuits are exposed, a lens with a smaller magnification will be used to make the imaging area smaller. The number of scans required for full-surface exposure increases, thereby reducing exposure efficiency and increasing costs. Summary of the Invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, one object of the present invention is to provide an optical extension module that has the advantages of improving circuit exposure efficiency and reducing maintenance costs.

[0005] The present invention also provides an optical system with an optical extension module.

[0006] To achieve the above-mentioned objectives, an optical expansion module is proposed according to an embodiment of the present invention, comprising: a spatial light modulator, the spatial light modulator being configured with a main imaging lens; an expansion lens group, the expansion lens group being arranged on one side of the main imaging lens, the expansion lens group forming a plurality of expanded light paths through the main imaging lens and the expansion lens group; a plurality of microlens array modules, the plurality of microlens array modules being arranged on a side of the expansion lens group away from the spatial light modulator and located on the image plane of the main imaging lens, each of the microlens array modules corresponding to one of the expanded light paths; a plurality of sub-imaging lenses, each of the expanded light paths corresponding to a sub-imaging lens, each of the sub-imaging lenses being arranged in a one-to-one correspondence with the plurality of microlens array modules, and the sub-imaging lenses being arranged on a side of the microlens array module away from the expansion lens group.

[0007] In the optical expansion module according to an embodiment of the present invention, the light beam emitted by the spatial light modulator is effectively utilized by the expansion lens assembly to form multiple expanded light paths. This means that multiple beams of light are generated and utilized simultaneously, improving the effectiveness of optical processing. Compared to processing a single beam of light, the parallel processing of multiple beams significantly increases the amount of optical information that can be processed per unit time, thereby improving the exposure efficiency of the circuit. Furthermore, each expanded light path can correspond to a microlens array module, which can precisely control the light beam, including focusing and adjusting its direction, to ensure that each beam of light is efficiently utilized, reducing light energy waste and improving the efficiency of converting light energy into useful information.

[0008] Furthermore, tilted scanning effectively expands the exposure area, achieving wider exposure coverage while maintaining high-quality imaging. Compared to traditional direct light exposure, tilted scanning completes the exposure process more quickly, improving exposure efficiency and saving production time. By increasing the exposure area, tilted scanning can expose more areas in a single exposure, reducing the number and time of exposures, thereby lowering exposure costs. Furthermore, tilted scanning reduces material waste, improves production efficiency, and further reduces exposure costs.

[0009] Therefore, the optical extension module according to the embodiment of the present invention has the advantages of improving the exposure efficiency of the circuit and reducing the maintenance cost.

[0010] According to some specific embodiments of the present invention, the expansion mirror group has a reflector group and / or a prism group, and includes: a first expansion unit, a second expansion unit and a third expansion unit, a first light path is formed in the first expansion unit, a second light path is formed in the second expansion unit, and a third light path is formed in the third expansion unit; the light input areas of the first expansion unit, the second expansion unit and the third expansion unit correspond to the position of the spatial light modulator, and the light output areas of the first expansion unit, the second expansion unit and the third expansion unit are spaced from each other and correspond to the positions of different sub-imaging lenses and the microlens array modules.

[0011] According to some specific embodiments of the present invention, the light entrance areas of the first expansion unit, the second expansion unit, and the third expansion unit are in the same plane; the light exit areas of the first expansion unit, the second expansion unit, and the third expansion unit are in the same plane.

[0012] According to some specific embodiments of the present invention, the first extension unit includes: a first reflector group and a first prism, the first prism is connected to the first reflector group and forms the first optical path internally; the second extension unit includes: a second reflector group and a second prism, the second prism is connected to the second reflector group and forms the second optical path internally; the third extension unit includes: a third reflector group and a third prism, the third prism is connected to the third reflector group and forms the third optical path internally.

[0013] According to some specific embodiments of the present invention, the first reflector group includes two parallel first reflectors, and the two first reflectors are located on one side of the extended mirror group in the thickness direction; the second reflector group includes two parallel second reflectors, and the two second reflectors are located on the other side of the extended mirror group in the thickness direction; the third reflector group includes two parallel third reflectors, one of the third reflectors is located between the first reflector group and the second reflector group in the thickness direction of the extended mirror group, and the other third reflector is located outside the second reflector group in the thickness direction of the extended mirror group.

[0014] According to some specific embodiments of the present invention, the light emitting areas of the first reflector group, the second reflector group, and the third reflector group are staggered in the thickness direction of the extension mirror group.

[0015] According to some specific embodiments of the present invention, the light entrance areas are all constructed into rectangles, and the light entrance areas of the first expansion unit, the second expansion unit, and the third expansion unit are arranged side by side; the light exit areas are constructed into rectangles, and the light exit areas of the first expansion unit, the second expansion unit, and the third expansion unit are arranged into a triangle, and the first expansion unit, the second expansion unit, and the third expansion unit are staggered along the rows and columns of the exposure substrate.

[0016] According to some specific embodiments of the present invention, the microlens array module has a plurality of light holes arranged in an array, a microlens is installed in each of the light holes, and each of the microlenses transmits an independent light path.

[0017] According to an embodiment of the second aspect of the present invention, an optical system is provided, comprising an optical extension module according to the above embodiment of the present invention, wherein a plurality of the optical extension modules are arranged in an array.

[0018] The optical system according to the embodiment of the present invention has the advantages of improving exposure efficiency of the circuit and reducing maintenance costs by utilizing the optical extension module according to the embodiment of the present invention.

[0019] According to some specific embodiments of the present invention, the light emitting areas of the plurality of extension mirror groups are staggered and arranged into multiple rows in the thickness direction; the light emitting areas of the extension mirror groups of different optical extension modules are arranged in an array along the rows in which they are located.

[0020] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments with reference to the accompanying drawings, in which:

[0022] Figure 1 is a structural schematic diagram of an optical extension module according to an embodiment of the present invention;

[0023] Figure 2 This is a schematic structural diagram of an optical extension module with imaging on the same plane according to an embodiment of the present invention;

[0024] Figure 3 is a bottom view of an optical extension module according to an embodiment of the present invention;

[0025] Figure 4 2 is a schematic structural diagram of an optical system according to an embodiment of the present invention.

[0026] Reference numerals:

[0027] Optical extension module 1, spatial light modulator 100, extension lens group 200, micro lens array module 300,

[0028] Sub-imaging lens 400, first expansion unit 210, second expansion unit 220, third expansion unit 230,

[0029] The first reflector group 211, the first prism 212, the second reflector group 221, the second prism 222,

[0030] The third reflecting mirror group 231 , the third prism 232 , and the optical system 10 . DETAILED DESCRIPTION

[0031] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0032] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0033] In the description of the present invention, "first feature" or "second feature" may include one or more of the features.

[0034] In the description of the present invention, “a plurality of” means two or more, and “a number of” means one or more.

[0035] The optical extension module 1 according to an embodiment of the present invention will be described below with reference to the accompanying drawings.

[0036] like Figures 1-4 As shown, the optical extension module 1 according to an embodiment of the present invention includes a spatial light modulator 100 , an extension lens group 200 , a plurality of microlens array modules 300 and a plurality of sub-imaging lenses 400 .

[0037] The spatial light modulator 100 is configured with a main imaging lens. An expansion lens assembly 200 is positioned on one side of the main imaging lens. The expansion lens assembly 200 forms multiple expanded optical paths through the main imaging lens and the expansion lens assembly 200. Multiple microlens array modules 300 are positioned on the side of the expansion lens assembly 200 away from the spatial light modulator 100 and located on the image plane of the main imaging lens. Each microlens array module 300 corresponds to an expanded optical path. Each expanded optical path corresponds to a sub-imaging lens 400. Each sub-imaging lens 400 is positioned in a one-to-one correspondence with the multiple microlens array modules 300. The sub-imaging lenses 400 are positioned on the side of the microlens array module 300 away from the expansion lens assembly 200.

[0038] For example, the spatial light modulator 100 spatially modulates the light beam according to the input signal. The modulated light beam then enters the main imaging lens. After the light beam exits the main imaging lens, it passes through the expansion lens group 200. Through the reflection of the expansion lens group 200, multiple light beams are expanded in space. The microlens array module 300 can finely control the light path, including but not limited to changing the direction of the light beam to meet specific optical requirements. The light beam regulated by the microlens array module 300 is further focused to form a clear image. The sub-imaging lens 400 is used in conjunction with the microlens array module 300 to refocus the light beam processed by the microlens array module 300 to form a final clear image.

[0039] The microlens array module 300 is composed of a specific arrangement of microlenses with micron-level apertures and relief depths. By adjusting the shape, focal length, arrangement structure, and duty cycle of the microlenses in the microlens array module 300, specific optical functions can be achieved, improving the integration and performance of the optical system. Microlenses can be categorized as diffractive or refractive based on their beam modulation principles.

[0040] According to the optical expansion module 1 of the embodiment of the present invention, the light beam emitted by the spatial light modulator 100 is effectively utilized by the expansion lens assembly 200 to form multiple expanded light paths. This means that multiple beams of light are generated and utilized simultaneously, improving the optical processing effect. Compared with the processing of a single beam of light, the parallel processing of multiple beams of light significantly increases the amount of optical information that can be processed per unit time, thereby improving the exposure efficiency of the circuit. At the same time, each expanded light path can correspond to a microlens array module 300. The microlens array module 300 can precisely control the light beams, including focusing and adjusting their direction, ensuring that each light beam is efficiently utilized, reducing light energy waste and improving the efficiency of converting light energy into useful information.

[0041] Furthermore, tilted scanning effectively expands the exposure area, achieving wider exposure coverage while maintaining high-quality imaging. Compared to traditional direct light exposure, tilted scanning completes the exposure process more quickly, improving exposure efficiency and saving production time. By increasing the exposure area, tilted scanning can expose more areas in a single exposure, reducing the number and time of exposures, thereby lowering exposure costs. Furthermore, tilted scanning reduces material waste, improves production efficiency, and further reduces exposure costs.

[0042] Therefore, the optical extension module 1 according to the embodiment of the present invention has the advantages of improving the exposure efficiency of the circuit and reducing the maintenance cost.

[0043] In some specific embodiments of the present invention, Figure 1 As shown, the expansion lens assembly 200 includes a reflector assembly and / or a prism assembly, and includes a first expansion unit 210, a second expansion unit 220, and a third expansion unit 230. A first optical path is formed in the first expansion unit 210, a second optical path is formed in the second expansion unit 220, and a third optical path is formed in the third expansion unit 230. The light input areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 correspond to the positions of the spatial light modulator 100, and the light output areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are spaced apart from each other and correspond to the positions of different sub-imaging lenses 400 and microlens array modules 300.

[0044] By configuring the expansion lens assembly 200 to include multiple expansion units, such as a first expansion unit 210, a second expansion unit 220, and a third expansion unit 230, multi-channel optical expansion is achieved, enabling simultaneous processing of multiple optical paths, improving the parallelism of optical processing, and thereby increasing information carrying capacity. Precise alignment of each expansion unit with the spatial light modulator 100 ensures that the light beam accurately enters the corresponding expansion unit. Furthermore, the light output areas are spaced apart to avoid interference between the individual optical paths, ensuring the independence and stability of each optical path.

[0045] In some specific embodiments of the present invention, Figure 1 As shown, the light-incoming areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are in the same plane. The light-outgoing areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are in the same plane.

[0046] The light inlet areas are located on the same plane, meaning that the starting points of the light beams received by multiple expansion units are consistent. This simplifies the alignment process between the spatial light modulator 100 and the expansion lens assembly 200, ensuring that the light beam enters each expansion unit evenly and accurately, reducing alignment errors and improving the overall operating efficiency of the optical expansion module 1. The light outlet areas are also located on the same plane, ensuring that each expansion unit is aligned with the microlens array module 300 and the sub-imaging lens 400, avoiding interference between the various light paths and improving the accuracy of optical processing. In short, by aligning multiple light inlet and light outlet areas, the performance and stability of the optical expansion module 1 can be improved, and the accuracy of operation can be enhanced.

[0047] In some specific embodiments of the present invention, Figure 1 As shown, the first expansion unit 210 includes a first reflector group 211 and a first prism 212. The first prism 212 is connected to the first reflector group 211 and forms a first optical path therein. The second expansion unit 220 includes a second reflector group 221 and a second prism 222. The second prism 222 is connected to the second reflector group 221 and forms a second optical path therein. The third expansion unit 230 includes a third reflector group 231 and a third prism 232. The third prism 232 is connected to the third reflector group 231 and forms a third optical path therein.

[0048] The first reflector group 211, the second reflector group 221, and the third reflector group 231 can adjust the incident light beam, while the first prism 212, the second prism 222, and the third prism 232 can further control the path of the light beam. The combination of the reflector group and the prism can precisely control the propagation direction of the light beam in space, which is conducive to optimizing the imaging effect. At the same time, the reflector group and prism of each expansion unit can be adjusted independently, which means that the optical parameters of each unit can be adjusted according to different application requirements, improving the adaptability and flexibility of the optical system.

[0049] In some specific embodiments of the present invention, Figure 1 and Figure 2 As shown, the first reflector group 211 includes two parallel first reflectors, the two first reflectors being located on one side of the extended mirror group 200 in the thickness direction. The second reflector group 221 includes two parallel second reflectors, the two second reflectors being located on the other side of the extended mirror group 200 in the thickness direction. The third reflector group 231 includes two parallel third reflectors, one of the third reflectors 231 being located between the first reflector group 211 and the second reflector group 221 in the thickness direction of the extended mirror group 200, and the other third reflector 231 being located outside the second reflector group 221 in the thickness direction of the extended mirror group 200.

[0050] By using parallel mirrors, the direction of the light beam can be precisely controlled, ensuring that the light beam is reflected along the preset path to achieve the desired optical effect. Parallel mirrors can achieve multiple reflections of the light beam, increasing the optical path length and facilitating further beam control.

[0051] In the thickness direction of the extended mirror assembly 200, the first reflector group 210 and the second reflector group 220 are located on either side, while a portion of the third reflector group 230 is located between the two and another portion is located outside the second reflector group 220. This layout optimizes the distribution of optical paths, fully utilizes space, avoids mutual interference between optical paths, ensures that each reflector group operates independently, and improves system stability and efficiency.

[0052] In some specific embodiments of the present invention, Figure 1-Figure 3 As shown, the light-emitting areas of the first reflector group 211, the second reflector group 221, and the third reflector group 231 are staggered along the thickness direction of the extension mirror assembly 200. This staggered arrangement of the outgoing light beams reduces interference in the optical path as the light beams pass through different reflector groups, avoiding unnecessary interference caused by optical path differences. Furthermore, this staggered arrangement ensures that the light-emitting areas of each reflector group do not overlap, ensuring that each light beam propagates independently along a predetermined path, thereby improving the stability and image quality of the optical extension module 1.

[0053] In some specific embodiments of the present invention, Figure 1 and Figure 2 As shown, the light entrance areas are all configured in a rectangular shape, and the light entrance areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are arranged side by side. The light exit area is configured in a rectangular shape, and the light exit areas of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are arranged in a triangular shape. The first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 are staggered in rows and columns along the exposure substrate.

[0054] Arranging the light-incoming regions side by side ensures that the light beam emitted from the spatial light modulator 100 is evenly distributed to each expansion unit, optimizing the beam layout and improving beam utilization efficiency. The staggered arrangement of the first expansion unit 210, the second expansion unit 220, and the third expansion unit 230 in the row and column directions of the exposure substrate effectively prevents crosstalk or overlap between the light-outgoing regions of different expansion units, reducing interference between light paths, ensuring the independence and integrity of each light path, and improving image quality and clarity.

[0055] In some specific embodiments of the present invention, Figure 1 and Figure 2 As shown, the microlens array module 300 has a plurality of light holes arranged in an array, a microlens is installed in each light hole, and each microlens transmits an independent light path.

[0056] Each microlens in the microlens array module 300 can independently focus, diverge, or redirect an incoming light beam, allowing for precise control of the beam to meet specific optical requirements. By independently transmitting light through each microlens, the propagation path of each beam can be individually controlled, enabling precise control of the focusing and imaging of all beams.

[0057] The precise control of the light beam by the microlens array module 300 can reduce light loss during transmission, improve light utilization, and thus enhance the light efficiency of the entire optical system. Furthermore, the microlens array module 300 can help eliminate hot spots or dark areas in images, improving display contrast.

[0058] Next, an optical system 10 according to an embodiment of the present invention will be described.

[0059] According to the optical system 10 of the embodiment of the present invention, Figure 4As shown, the optical extension module 1 according to the above-described embodiment of the present invention is included, with multiple optical extension modules 1 arranged in an array. Each optical extension module 1 independently processes a portion of the light beam. The array arrangement of multiple optical extension modules 1 can process more light beams in parallel, significantly improving the light beam processing capability and data transmission rate of the optical system 10. This reduces the number of spatial light modulators 100 corresponding to the optical extension modules 1, while achieving the same exposure efficiency, thereby reducing equipment costs.

[0060] The optical system according to the above embodiment of the present invention has the advantages of improving the exposure efficiency of the circuit and reducing the maintenance cost by utilizing the optical extension module 1 according to the embodiment of the present invention.

[0061] In some specific embodiments of the present invention, Figure 3 As shown, the light-emitting regions of the multiple extended lens assemblies 200 are staggered in multiple rows along their thickness direction. The light-emitting regions of the extended lens assemblies 200 of different optical extension modules 1 are arranged along their respective row arrays. By staggering the light-emitting regions in the thickness direction, direct overlap of the optical paths of different extended lens assemblies 200 can be effectively avoided, reducing mutual interference between light beams and ensuring the independence of the optical paths of each extended lens assembly 200 and the purity of the light beams. Arranging the light-emitting regions in a row array can optimize the spatial layout of the light beams, making the beam distribution more uniform, facilitating the efficient operation of subsequent optical components such as the microlens array module 300, and improving the performance of the overall optical system 10.

[0062] Other structures and operations according to the embodiments of the present invention are known to those skilled in the art and will not be described in detail here.

[0063] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "example," "specific example," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example.

[0064] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. An optical extension module, characterized in that: include: A spatial light modulator, wherein the spatial light modulator is configured with a main imaging lens; An expansion lens group, the expansion lens group being disposed on one side of the main imaging lens, and the expansion lens group forming a plurality of expanded optical paths through the main imaging lens and the expansion lens group; a plurality of microlens array modules, each of which is disposed on a side of the expansion lens assembly away from the spatial light modulator and located on the image plane of the main imaging lens, and each of which corresponds to one of the expanded optical paths; Multiple sub-imaging lenses, each of the expanded light paths corresponds to a sub-imaging lens, each of the sub-imaging lenses is arranged in a one-to-one correspondence with the multiple microlens array modules, and the sub-imaging lens is arranged on a side of the microlens array module away from the expansion lens group.

2. The optical extension module according to claim 1, wherein: The expansion mirror group has a reflector group and / or a prism group, and includes: a first expansion unit, a second expansion unit, and a third expansion unit, wherein a first optical path is formed in the first expansion unit, a second optical path is formed in the second expansion unit, and a third optical path is formed in the third expansion unit; The light input areas of the first extension unit, the second extension unit and the third extension unit correspond to the position of the spatial light modulator, and the light output areas of the first extension unit, the second extension unit and the third extension unit are spaced apart from each other and correspond to the positions of different sub-imaging lenses and the microlens array modules.

3. The optical extension module according to claim 2, wherein: The light-incoming areas of the first extension unit, the second extension unit, and the third extension unit are in the same plane; The light exit areas of the first extension unit, the second extension unit, and the third extension unit are located in the same plane.

4. The optical extension module according to claim 3, wherein: The first extension unit includes: a first reflector group and a first prism, wherein the first prism is connected to the first reflector group and forms the first optical path therein; The second extension unit includes: a second reflector group and a second prism, wherein the second prism is connected to the second reflector group and forms the second optical path therein; The third expansion unit includes a third reflector group and a third prism. The third prism is connected to the third reflector group and forms the third optical path inside.

5. The optical extension module according to claim 4, wherein: The first reflector group includes two first reflectors arranged in parallel, and the two first reflectors are located on one side of the extended mirror group in the thickness direction; The second reflector group includes two second reflectors arranged in parallel, and the two second reflectors are located on the other side of the extended mirror group in the thickness direction; The third reflector group includes two third reflectors arranged in parallel, one of the third reflectors is located between the first reflector group and the second reflector group in the thickness direction of the extended mirror group, and the other third reflector is located outside the second reflector group in the thickness direction of the extended mirror group.

6. The optical extension module according to claim 4, wherein: The light emitting areas of the first reflector group, the second reflector group, and the third reflector group are staggered in the thickness direction of the extension mirror group.

7. The optical extension module according to claim 2, wherein: The light-entry areas are all configured in a rectangular shape, and the light-entry areas of the first expansion unit, the second expansion unit, and the third expansion unit are arranged side by side; The light exit area is configured as a rectangle, the light exit areas of the first expansion unit, the second expansion unit and the third expansion unit are arranged in a triangle, and the first expansion unit, the second expansion unit and the third expansion unit are staggered along the rows and columns of the exposure substrate.

8. The optical extension module according to claim 1, wherein: The microlens array module has a plurality of light holes arranged in an array, a microlens is installed in each light hole, and each microlens transmits an independent light path.

9. An optical system, characterized in that: include: A plurality of optical extension modules according to any one of claims 1 to 8, wherein the plurality of optical extension modules are arranged in an array.

10. The optical system according to claim 9, wherein: The light-emitting areas of the plurality of extended mirror groups are staggered and arranged in a plurality of rows in the thickness direction; The light-emitting areas of the extension lens groups of different optical extension modules are arranged in an array along the row in which they are located.

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