A fine metal mask grabbing device and grabbing method

Abstract

The present invention relates to the technical field of grabbing devices, and discloses a fine metal mask grabbing device and a grabbing method. It includes a multi-axis mechanical arm, and also includes a grabbing frame, which is installed at the front end of the multi-axis mechanical arm and driven by the multi-axis of the multi-axis mechanical arm. The distance adjusting member a, the material suction hose, the vacuum tube and the first visual acquisition probe are all installed on the grabbing frame, two symmetrically arranged lifting main frames, and a group of lifting push rods are installed between the two lifting main frames and the grabbing frame, and two radially arranged grabbing components, and the grabbing components include two driving blocks, two lifting sub-frames and a clamping frame. After the removal part of the fine metal mask is sucked, the device can remove the sucked removal part online, and the suction device can quickly grab and transfer the fine metal mask and the diaphragm paper synchronously when grabbing the fine metal mask, thereby effectively simplifying the grabbing and transfer process of the fine metal mask and improving the grabbing and transfer efficiency of the fine metal mask.

Description

Technical Field

[0001] The present invention relates to the technical field of grabbing devices, and in particular to a fine metal mask grabbing device and a grabbing method. Background Art

[0002] Fine metal mask (FMM) is a core consumable for OLED production. Its thickness is only about 20um, but its length and width can reach 1400mm and 400mm respectively. Therefore, the transportation of fine metal mask is a pain point in the current industry. Figure 1 The fine metal mask shown is stacked together before being transported, with a separator paper placed between adjacent fine metal masks, and both ends of the fine metal mask are engraved by laser processing equipment to form a removable part similar to a U-shaped structure. When transporting the fine metal mask, the U-shaped structure part needs to be removed, and then transferred to the placement area of ​​the next station, and the transfer separator paper is placed on the fine metal mask, and the transfer and stacking are done in this way.

[0003] In the prior art, the patent document with publication number CN117088130B discloses a fine metal mask gripping device and a gripping method thereof, which is installed at the end of a gripping robot and includes a connecting plate connected to the end of the gripping robot. The back of the connecting plate is provided with a telescopic mechanism in a mirror image about its longitudinal midline. The output end of the telescopic mechanism is connected to a gripping mechanism for gripping the product or the diaphragm. The gripping mechanism is connected to a waste separation mechanism for pulling off the part to be removed from the end of the product or for gripping the diaphragm paper. The telescopic mechanism in the above device can be automatically adjusted according to the length of the product, and the adjustable length is between 500 and 1400 mm. The width adjustment in the gripping mechanism is The node component can be automatically adjusted according to the width of the product, and the adjustable width is between 50 and 450 mm, so it is compatible with the sizes of most fine metal mask products on the market. However, after the above-mentioned device absorbs the removed part of the fine metal mask, it is not convenient to remove the absorbed removed part online, and the existing absorption device is not convenient for synchronously grabbing and transferring the fine metal mask and the diaphragm paper when grabbing the fine metal mask, which makes the grabbing and transfer process more complicated and the grabbing efficiency more limited. Based on this, the present invention provides a fine metal mask grabbing device and a grabbing method to solve the technical problems raised in the above-mentioned background technology. Summary of the invention

[0004] The object of the present invention is to provide a fine metal mask gripping device and a gripping method, which solves the problem that the existing device proposed in the background technology is not convenient for removing the removed part of the fine metal mask online after sucking the removed part of the fine metal mask, and the existing suction device is not convenient for synchronously grabbing and transferring the fine metal mask and the diaphragm paper when grabbing the fine metal mask, which makes the grabbing and transfer process more complicated and the grabbing efficiency more limited. In order to solve the above technical problems, the present invention provides the following technical solutions:

[0005] A fine metal mask grabbing device comprises a multi-axis mechanical arm and a grabbing frame, which is installed at the front end of the multi-axis mechanical arm and driven by the multi-axis of the multi-axis mechanical arm;

[0006] The distance adjusting member a, the material suction hose, the vacuum tube and the first visual acquisition probe are all installed on the grabbing frame;

[0007] Two symmetrically arranged lifting main frames, each of which has a set of lifting push rods installed between the two lifting main frames and the grabbing frame;

[0008] two radially arranged gripping members;

[0009] The grabbing component includes two driving blocks, two lifting sub-frames and a clamping frame, the two driving blocks are connected to the distance adjusting member a, a group of pressure sensors are installed between the clamping frame and the two driving blocks, the two lifting sub-frames are respectively slidably connected to the two driving blocks and the two lifting main frames, a guide shaft driven by a guide motor is rotatably connected between the two lifting sub-frames, a distance adjusting member b and a guide rail are installed on the clamping frame, the distance adjusting member b is transmission-connected to two gripping tongs that are mirror-imaged and slidably connected to the guide rail, and the two gripping tongs are provided with a transfer suction and suction component connected to the guide shaft;

[0010] A group of positioning suction frames are slidably connected on the guide rail and correspond to the position between the two grippers. Follower springs are sleeved on the guide rail and correspond to the positions between each two positioning suction frames and between the two grippers and adjacent positioning suction frames. Each positioning suction frame is equipped with a suction foot module connected to the vacuum tube.

[0011] Preferably, the multi-axis robotic arm includes a base, a rotator is installed on the base, a turntable is installed on the rotating surface of the rotator, a first grabbing arm is hinged on the top surface of the turntable, a second grabbing arm is hinged on the front end of the first grabbing arm, a third grabbing arm is hinged on the front end of the second grabbing arm, a rotary arm driven by a rotating motor is rotatably connected to the third grabbing arm, the rotary arm is fixedly connected to the grabbing frame, a group of arm adjustment push rods are hinged between the relative surfaces of the first grabbing arm and the turntable, between the relative surfaces of the second grabbing arm and the first grabbing arm, and between the relative surfaces of the third grabbing arm and the second grabbing arm, and a central control host connected to the data of the first visual acquisition probe is fixedly installed on the turntable.

[0012] Preferably, a negative pressure suction pump and a vacuum pump are respectively installed on the grabbing frame, the negative pressure suction pump is connected to a suction hose, and the vacuum generating port of the vacuum pump is connected to a vacuum tube.

[0013] Preferably, the distance adjusting member a includes two symmetrically arranged clamping screws rotatably connected to the grabbing frame and a clamping motor fixed on the grabbing frame, the two clamping screws are linked by a first chain belt, the output shaft end of the clamping motor is fixedly connected to one of the clamping screws, and the clamping screw is symmetrically provided with a positive thread segment a and a negative thread segment a, and the positive thread segment a and the negative thread segment a are respectively connected to the driving blocks in the two grabbing components.

[0014] Preferably, the distance adjusting member b includes an adjusting screw rotatably connected to the grabbing frame and an adjusting motor fixed on the grabbing frame, the output shaft end of the adjusting motor is fixedly connected to the adjusting screw, and the adjusting screw is symmetrically provided with a positive thread segment b and a negative thread segment b, the positive thread segment a and the negative thread segment a are respectively connected to the two grabbing clamps in transmission, and the axis of the adjusting screw is perpendicular to the axis of the clamping screw.

[0015] Preferably, the transfer suction and absorption component includes a negative pressure suction pipe slidably connected to the grasping forceps, the negative pressure suction pipe is connected to the suction hose, the bottom end of the negative pressure suction pipe is connected to a suction hood, the inner wall of the suction hood is rotatably connected to a sealing column that seals and fits with the suction hood, the sealing column is transmission connected to the guide shaft through a linkage assembly, a second visual acquisition probe connected to the data of the central control host is installed on the sealing column, a suction plane is provided on the sealing column, a negative pressure suction head is installed on the suction plane, a negative pressure suction channel connected to the negative pressure suction head is fixedly opened inside the sealing column, the negative pressure suction channel is connected to the vacuum tube through a flexible connecting pipe, and a solenoid valve a is fixedly provided at the connection between the flexible connecting pipe and the vacuum tube.

[0016] Preferably, the suction hood is an arc-shaped structure, the full arc of the suction hood is 180°, and the axes of the second visual acquisition probe and the negative pressure suction head are both perpendicular to the rotation axis of the sealing column.

[0017] Preferably, the linkage assembly includes a sleeve rotatably connected to the suction hood, the interior of the sleeve is fixed with a transmission shaft groove with openings at both ends and slidingly connected to the guide shaft rod, the inner cavity shape of the transmission shaft groove and the cross-section of the guide shaft rod are both regular polygons, and the sleeve is transmission-connected to the sealing column through a second chain belt.

[0018] Preferably, the suction foot module includes a fixed suction pipe fixedly connected to the positioning suction frame, the inner wall of the fixed suction pipe is slidably connected to a moving suction pipe, the fixed suction pipe is connected to the vacuum pipe through a flexible pipe, an electromagnetic valve b is installed inside the flexible pipe, a T-shaped guide rod slidably connected to the fixed suction pipe is fixedly installed on the moving suction pipe, the T-shaped guide rod is provided with a clamping spring corresponding to the position between the moving suction pipe and the fixed suction pipe, and the bottom end of the moving suction pipe is fixedly connected to a vacuum suction foot.

[0019] The present invention also provides a method for grasping a fine metal mask grasping device as described above, comprising the following steps:

[0020] S1, input the fine metal mask information to be captured into the central control host;

[0021] S2, the first visual acquisition probe acquires the edge features of the fine metal mask to be captured and locates it;

[0022] S3, the central control host adjusts the distance between the two grasping components according to the collection information of the first visual collection probe so that the distance is adapted to the specifications of the fine metal mask to be grasped, and the positions of the two negative pressure suction heads in each grasping component respectively correspond to the positions of the parts to be removed on the fine metal mask to be grasped;

[0023] S4, the vacuum suction foot sucks the fine metal mask to be grasped, and the negative pressure suction head sucks the part to be removed on the fine metal mask. After the negative pressure suction head sucks the part to be removed, the sealing column rotates 180 degrees. After the sealing column rotates, the negative pressure suction head loses negative pressure, and the suction hose sucks the part to be removed sucked by the negative pressure suction head. Then, the sealing column and the negative pressure suction head automatically reset. After the reset is completed, the negative pressure suction head sucks the diaphragm paper under the fine metal mask;

[0024] S5, the multi-axis robot arm moves and transfers the diaphragm paper and the fine metal mask to the next station. After being transferred to the next station, the negative pressure suction head and the vacuum suction foot lose the negative pressure, and then complete the synchronous transfer and grasping of the diaphragm paper and the fine metal mask.

[0025] Compared with the prior art, the beneficial effects achieved by the present invention are:

[0026] 1. After absorbing the removed part of the fine metal mask, the device can remove the absorbed removed part online, and when grabbing the fine metal mask, the suction device can quickly grab and transfer the fine metal mask and the diaphragm paper synchronously, thereby effectively simplifying the grabbing and transferring process of the fine metal mask and improving the grabbing and transferring efficiency of the fine metal mask.

[0027] 2. When the present invention grabs, the second visual acquisition probe is used to collect the position of the part to be removed of the fine metal mask plate by visual acquisition. After the data acquisition of the second visual acquisition probe is completed, the negative pressure suction head performs negative pressure suction on the part to be removed of the fine metal mask plate. After the negative pressure suction head completes suction of the part to be removed of the fine metal mask plate, the sealing column rotates 180°. After the sealing column rotates 180°, the solenoid valve a is closed. After the solenoid valve a is closed, the suction hose performs negative pressure suction and negative pressure collection on the part to be removed of the fine metal mask plate on the negative pressure suction head. After the suction hose negatively pressure collects the material, the negative pressure suction head is reset. After the negative pressure suction head is reset, the negative pressure suction head moves downward under the action of the lifting sub-frame. When the negative pressure suction head moves downward, the diaphragm paper under the fine metal mask plate is negatively suctioned from the removal position of the part to be removed of the fine metal mask plate, thereby quickly completing the synchronous grabbing and synchronous transfer of the fine metal mask plate and the diaphragm paper.

[0028] 3. The present invention adopts a plurality of positioning suction brackets whose positions can be changed by slave settings and a slave spring setting, so that the plurality of suction foot modules can be evenly distributed on the surface of the fine metal mask when sucking the fine metal mask. The plurality of suction foot modules are evenly distributed and have adjustable spacing, so that the plurality of suction foot modules can stably grasp the fine metal mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a structural schematic diagram of a fine metal mask grabbing device;

[0030] Figure 2 It is a structural schematic diagram of the distance adjusting member a and the lifting main frame;

[0031] Figure 3 for Figure 2 A schematic diagram of the local enlarged structure at point A in the middle;

[0032] Figure 4 It is a schematic diagram of the structure of the lifting sub-frame and the suction hose;

[0033] Figure 5 for Figure 4 A schematic diagram of the local enlarged structure at B in the middle;

[0034] Figure 6 It is a schematic diagram of the structure of the distance adjusting member a and the lifting push rod;

[0035] Figure 7 for Figure 6 A schematic diagram of the local enlarged structure at C in the middle;

[0036] Figure 8 for Figure 6 A schematic diagram of the local enlarged structure at D in the middle;

[0037] Fig. 9It is a schematic diagram of the structure of the second vision acquisition probe and the negative pressure suction head.

[0038] Among them: 1. Grab frame; 2. Adjustable distance piece a; 3. Suction hose; 4. Vacuum tube; 5. First vision acquisition probe; 6. Lifting main frame; 7. Lifting push rod; 8. Driving block; 9. Lifting sub-frame; 10. Clamp frame; 11. Pressure sensor; 12. Guide shaft; 13. Adjustable distance piece b; 14. Guide rail; 15. Grab pliers; 16. Positioning suction frame; 17. Driven spring; 18. Base; 19. Central control host; 20 , negative pressure suction pump; 21. vacuum pump; 22. negative pressure suction pipe; 23. suction cover; 24. sealing column; 25. second visual acquisition probe; 26. negative pressure suction head; 27. bushing; 28. fixed suction pipe; 29. ​​dynamic suction pipe; 30. T-shaped guide rod; 31. tightening spring; 32. rotator; 33. turntable; 34. first grabbing arm; 35. second grabbing arm; 36. third grabbing arm; 37. rotating arm; 38. adjusting arm push rod. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0040] See also Figure 1-9 , a fine metal mask gripping device, comprising a multi-axis mechanical arm, and also comprising a gripping frame 1, which is installed at the front end of the multi-axis mechanical arm and driven by the multi-axis of the multi-axis mechanical arm;

[0041] The multi-axis robot arm includes a base 18, on which a rotator 32 is installed, and a turntable 33 is installed on the rotating surface of the rotator 32. A first grab arm 34 is hinged on the top surface of the turntable 33, and a second grab arm 35 is hinged on the front end of the first grab arm 34, and a third grab arm 36 is hinged on the front end of the second grab arm 35. A rotary arm 37 driven by a rotary motor is rotatably connected to the third grab arm 36, and the rotary arm 37 is fixedly connected to the grab frame 1. A group of arm adjustment push rods 38 are hinged between the relative surfaces of the first grab arm 34 and the turntable 33, between the relative surfaces of the second grab arm 35 and the first grab arm 34, and between the relative surfaces of the third grab arm 36 and the second grab arm 35. A central control host 19 connected to the data of the first visual acquisition probe 5 is fixedly installed on the turntable 33;

[0042] By setting the turntable 33, the first gripping arm 34, the second gripping arm 35 and the third gripping arm 36, the spatial gripping position and the spatial gripping angle of the gripping frame 1 can be adjusted in multiple directions;

[0043] The distance adjusting member a2, the material suction hose 3, the vacuum tube 4 and the first visual acquisition probe 5 are all installed on the grabbing frame 1;

[0044] A negative pressure suction pump 20 and a vacuum pump 21 are respectively installed on the grabbing frame 1, the negative pressure suction pump 20 is connected to the suction hose 3, and the vacuum generating port of the vacuum pump 21 is connected to the vacuum tube 4;

[0045] By setting the negative pressure suction pump 20 and the suction hose 3, the part to be removed on the fine metal mask is sucked under negative pressure;

[0046] By setting the vacuum pump 21, the fine metal mask is vacuum-absorbed;

[0047] Two symmetrically arranged lifting main frames 6, a set of lifting push rods 7 are installed between the two lifting main frames 6 and the grabbing frame 1;

[0048] two radially arranged gripping members;

[0049] The grabbing components include two driving blocks 8, two lifting sub-frames 9 and a clamping frame 10;

[0050] Both driving blocks 8 are connected to the distance adjusting member a2;

[0051] The distance adjusting member a2 comprises two clamping screws symmetrically arranged and rotatably connected to the grabbing frame 1 and a clamping motor fixed to the grabbing frame 1. The two clamping screws are linked by a first chain belt, and the output shaft end of the clamping motor is fixedly connected to one of the clamping screws.

[0052] The clamping screw rod is symmetrically provided with a positive thread segment a and a negative thread segment a, and the positive thread segment a and the negative thread segment a are respectively connected to the driving blocks 8 in the two grasping components;

[0053] By setting the distance adjusting member a2, the distance between the two grasping components can be quickly changed. By changing the distance between the two grasping components, the grasping components can be adapted to grasping operations of fine metal mask plates of different specifications.

[0054] A set of pressure sensors 11 are installed between the clamp frame 10 and the two driving blocks 8;

[0055] By setting the pressure sensor 11, the gripping strength of the two gripping components on the fine metal mask can be accurately controlled;

[0056] The data end of the pressure sensor 11 is connected to the central control host 19;

[0057] The two lifting sub-frames 9 are slidably connected to the two driving blocks 8 and the two lifting main frames 6 respectively;

[0058] A guide shaft 12 driven by a guide motor is rotatably connected between the two lifting sub-frames 9;

[0059] The clamp frame 10 is provided with a distance adjusting member b13 and a guide rail 14, and the distance adjusting member b13 is transmission-connected with two gripping clamps 15 arranged in mirror images and slidably connected with the guide rail 14;

[0060] Both grippers 15 are provided with a transfer material suction and suction component connected to the guide shaft 12;

[0061] The distance adjusting member b13 includes an adjusting screw rod rotatably connected to the grabbing frame 1 and an adjusting motor fixed to the grabbing frame 1, the output shaft end of the adjusting motor is fixedly connected to the adjusting screw rod, a positive thread segment b and a negative thread segment b are symmetrically arranged on the adjusting screw rod, the positive thread segment a and the negative thread segment a are respectively connected to the two gripping tongs 15 in a transmission manner, and the axis of the adjusting screw rod is perpendicular to the axis of the clamping screw rod;

[0062] By setting the distance adjusting member b13, the distance between the two grippers 15 can be quickly changed. The two grippers 15 are used to absorb the part to be removed of the fine metal mask.

[0063] The transfer suction and suction components include a negative pressure suction pipe 22 slidably connected to the grasping forceps 15, the negative pressure suction pipe 22 is connected to the suction hose 3, and the bottom end of the negative pressure suction pipe 22 is connected to the suction cover 23;

[0064] The inner wall of the suction cover 23 is rotatably connected with a sealing column 24 that is in sealing contact with the suction cover 23. The sealing column 24 is transmission-connected to the guide shaft 12 through a linkage assembly.

[0065] The linkage assembly includes a shaft sleeve 27 rotatably connected to the suction cover 23, and a transmission shaft groove with two ends opened and slidably connected to the guide shaft 12 is fixedly opened inside the shaft sleeve 27. The inner cavity shape of the transmission shaft groove and the cross section of the guide shaft 12 are both regular polygons. The shaft sleeve 27 is transmission-connected to the sealing column 24 through a second chain belt;

[0066] The suction cover 23 is an arc-shaped structure, and the entire arc of the suction cover 23 is 180°;

[0067] A second visual acquisition probe 25 connected to the central control host 19 is installed on the sealing column 24;

[0068] The second visual acquisition probe 25 is used to acquire the position of the part to be removed of the fine metal mask by visual acquisition;

[0069] The first visual acquisition probe 5, the second visual acquisition probe 25 and the central control host 19 can be customized or selected according to actual needs;

[0070] A suction plane is provided on the sealing column 24, and a negative pressure suction head 26 is installed on the suction plane. A negative pressure suction channel connected to the negative pressure suction head 26 is fixedly provided inside the sealing column 24. The negative pressure suction channel is connected to the vacuum tube 4 through a flexible connecting pipe, and a solenoid valve a is fixedly provided at the connection point between the flexible connecting pipe and the vacuum tube 4.

[0071] Through the setting of the solenoid valve a, the connection between the flexible pipe and the vacuum pipe 4 is controlled;

[0072] The axes of the second visual acquisition probe 25 and the negative pressure suction head 26 are both perpendicular to the rotation axis of the sealing column 24;

[0073] During grabbing, the second visual acquisition probe 25 is used to acquire the position of the part to be removed of the fine metal mask by visual acquisition. After the data acquisition of the second visual acquisition probe 25 is completed, the negative pressure suction head 26 performs negative pressure suction on the part to be removed of the fine metal mask. After the negative pressure suction head 26 completes suction of the part to be removed of the fine metal mask, the sealing column 24 rotates 180°. After the sealing column 24 rotates 180°, the solenoid valve a is closed. After the solenoid valve a is closed, the suction hose 3 performs negative pressure suction and negative pressure collection on the part to be removed of the fine metal mask on the negative pressure suction head 26. After the suction hose 3 negative pressure collects the material, the negative pressure suction head 26 is reset. After the negative pressure suction head 26 is reset, the negative pressure suction head 26 moves downward under the action of the lifting sub-frame 9. When the negative pressure suction head 26 moves downward, the diaphragm paper below the fine metal mask is negatively suctioned from the removal position of the part to be removed of the fine metal mask.

[0074] A group of positioning suction frames 16 are slidably connected on the guide rail 14 and correspond to the position between the two grippers 15. Follower springs 17 are sleeved on the guide rail 14 and correspond to the positions between the two positioning suction frames 16 and the positions between the two grippers 15 and the adjacent positioning suction frames 16. A suction foot module connected to the vacuum tube 4 is installed on each positioning suction frame 16.

[0075] Through the position of the multiple positioning suction racks 16 being able to be changed dynamically and the setting of the driven spring 17, the multiple suction foot modules can be evenly distributed on the surface of the fine metal mask when sucking the fine metal mask. Through the evenly distributed setting and the adjustable spacing setting of the multiple suction foot modules, the multiple suction foot modules can stably grasp the fine metal mask.

[0076] After the suction foot module sucks the fine metal mask and the negative pressure suction head 26 synchronously sucks the diaphragm paper under the fine metal mask, the transfer efficiency of the fine metal mask by the gripping device is effectively improved and the transfer process of the fine metal mask is effectively simplified;

[0077] The foot suction module includes a fixed suction pipe 28 fixedly connected to the positioning suction frame 16, the inner wall of the fixed suction pipe 28 is slidably connected with a moving suction pipe 29, the fixed suction pipe 28 is connected to the vacuum pipe 4 through a flexible pipe, and a solenoid valve b is installed inside the flexible pipe;

[0078] Through the setting of the flexible pipe, the connection between the flexible pipe and the vacuum tube 4 is controlled;

[0079] A T-shaped guide rod 30 slidably connected to the fixed suction pipe 28 is fixedly mounted on the movable suction pipe 29 , and a tightening spring 31 is sleeved on the T-shaped guide rod 30 corresponding to the position between the movable suction pipe 29 and the fixed suction pipe 28 . The bottom end of the movable suction pipe 29 is fixedly connected to a vacuum suction foot.

[0080] By setting the pressing spring 31, the sealing degree of the connection between the vacuum suction foot and the fine metal mask can be effectively ensured;

[0081] The present invention also provides a method for grasping a fine metal mask grasping device as described above, comprising the following steps:

[0082] S1, input the fine metal mask information to be captured into the central control host 19;

[0083] S2, the first visual acquisition probe 5 acquires edge features of the fine metal mask to be captured and locates it;

[0084] S3, the central control host 19 adjusts the distance between the two grasping components according to the collection information of the first visual collection probe 5 and makes the above distance adapt to the specifications of the fine metal mask to be grasped, and the positions of the two negative pressure suction heads 26 in each grasping component correspond to the positions of the parts to be removed on the fine metal mask to be grasped;

[0085] S4, the vacuum suction foot sucks the fine metal mask to be grasped, and the negative pressure suction head 26 sucks the part to be removed on the fine metal mask. After the negative pressure suction head 26 sucks the part to be removed, the sealing column 24 rotates 180°. After the sealing column 24 rotates, the negative pressure suction head 26 loses the negative pressure, and the suction hose 3 sucks the part to be removed sucked by the negative pressure suction head 26. Then, the sealing column 24 and the negative pressure suction head 26 automatically reset. After the reset is completed, the negative pressure suction head 26 sucks the diaphragm paper under the fine metal mask;

[0086] S5, the multi-axis robot moves and transfers the diaphragm paper and the fine metal mask to the next station. After being transferred to the next station, the negative pressure suction head 26 and the vacuum suction foot lose the negative pressure, and then the synchronous transfer and grasping of the diaphragm paper and the fine metal mask are completed.

[0087] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations may be made to the embodiments without departing from the principles and spirit thereof, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A fine metal mask gripping device, comprising a multi-axis robotic arm, characterized in that: It also includes a grabbing frame (1), which is installed at the front end of the multi-axis mechanical arm and driven by the multi-axis of the multi-axis mechanical arm. The multi-axis mechanical arm includes a base (18), a rotator (32) is installed on the base (18), a rotating surface of the rotator (32) is installed with a turntable (33), and a central control host (19) connected to the data of the first visual acquisition probe (5) is fixedly installed on the turntable (33); The distance adjusting member a (2), the material suction hose (3), the vacuum tube (4) and the first visual acquisition probe (5) are all installed on the grabbing frame (1); Two symmetrically arranged lifting main frames (6), a set of lifting push rods (7) being installed between the two lifting main frames (6) and the grabbing frame (1); two radially arranged gripping members; The gripping component comprises two driving blocks (8), two lifting sub-frames (9) and a clamping frame (10), the two driving blocks (8) are connected to the distance adjusting member a (2), a group of pressure sensors (11) are installed between the clamping frame (10) and the two driving blocks (8), the two lifting sub-frames (9) are respectively slidably connected to the two driving blocks (8) and the two lifting main frames (6), a guide shaft (12) driven by a guide motor is rotatably connected between the two lifting sub-frames (9), a distance adjusting member b (13) and a guide rail (14) are installed on the clamping frame (10), the distance adjusting member b (13) is transmission-connected to two gripping tongs (15) arranged in mirror image and slidably connected to the guide rail (14), and the two gripping tongs (15) are provided with a transfer suction and suction component connected to the guide shaft (12); A group of positioning suction frames (16) are slidably connected on the guide rail (14) and at a position corresponding to the position between the two grippers (15); a driven spring (17) is sleeved on the guide rail (14) and at a position corresponding to the position between two positioning suction frames (16) and at a position between the two grippers (15) and adjacent positioning suction frames (16); and a suction foot module connected to the vacuum tube (4) is installed on each of the positioning suction frames (16); The transfer suction and absorption component comprises a negative pressure suction pipe (22) slidably connected to the grasping forceps (15), the negative pressure suction pipe (22) being connected to the suction hose (3), the bottom end of the negative pressure suction pipe (22) being connected to a suction cover (23), the inner wall of the suction cover (23) being rotatably connected to a sealing column (24) which is in sealing contact with the suction cover (23), the sealing column (24) being transmission-connected to the guide shaft (12) through a linkage assembly, a second visual acquisition probe (25) which is data-connected to the central control host (19) being installed on the sealing column (24), a suction plane being provided on the sealing column (24), a negative pressure suction head (26) being installed on the suction plane, a negative pressure suction channel being fixedly opened inside the sealing column (24) and being connected to the negative pressure suction head (26), the negative pressure suction channel being connected to the vacuum tube (4) through a flexible connecting pipe, and a solenoid valve a being fixedly provided at the connection point between the flexible connecting pipe and the vacuum tube (4).

2. The fine metal mask grabbing device according to claim 1, characterized in that: A first grabbing arm (34) is hingedly connected to the top surface of the turntable (33); a second grabbing arm (35) is hingedly connected to the front end of the first grabbing arm (34); a third grabbing arm (36) is hingedly connected to the front end of the second grabbing arm (35); a rotary arm (37) driven by a rotary motor is rotatably connected to the third grabbing arm (36); the rotary arm (37) is fixedly connected to the grabbing frame (1); a group of arm adjustment push rods (38) are hingedly connected between the relative surfaces of the first grabbing arm (34) and the turntable (33), between the relative surfaces of the second grabbing arm (35) and the first grabbing arm (34), and between the relative surfaces of the third grabbing arm (36) and the second grabbing arm (35).

3. The fine metal mask grabbing device according to claim 2, characterized in that: A negative pressure material suction pump (20) and a vacuum pump (21) are respectively installed on the grabbing frame (1); the negative pressure material suction pump (20) is connected to a material suction hose (3); and a vacuum generating port of the vacuum pump (21) is connected to a vacuum tube (4).

4. The fine metal mask grabbing device according to claim 3, characterized in that: The distance adjusting member a (2) comprises two clamping screws which are symmetrically arranged and rotatably connected to the grabbing frame (1) and a clamping motor fixed to the grabbing frame (1), the two clamping screws are linked via a first chain belt, the output shaft end of the clamping motor is fixedly connected to one of the clamping screws, and the clamping screw is symmetrically provided with a positive thread segment a and a negative thread segment a, and the positive thread segment a and the negative thread segment a are respectively transmission-connected to the driving blocks (8) in the two grabbing components.

5. The fine metal mask grabbing device according to claim 4, characterized in that: The distance adjusting member b (13) comprises an adjusting screw rotatably connected to the grabbing frame (1) and an adjusting motor fixed to the grabbing frame (1); the output shaft end of the adjusting motor is fixedly connected to the adjusting screw; a positive thread segment b and a negative thread segment b are symmetrically arranged on the adjusting screw; the positive thread segment a and the negative thread segment a are respectively transmission-connected to two grabbing pliers (15); and the axis of the adjusting screw is perpendicular to the axis of the clamping screw.

6. The fine metal mask grabbing device according to claim 5, characterized in that: The suction hood (23) is an arc-shaped structure, the entire arc of the suction hood (23) is 180°, and the axes of the second visual collection probe (25) and the negative pressure suction head (26) are both perpendicular to the rotation axis of the sealing column (24).

7. The fine metal mask grabbing device according to claim 6, characterized in that: The linkage assembly comprises a shaft sleeve (27) rotatably connected to the suction cover (23); a transmission shaft groove with two ends opened and slidably connected to the guide shaft (12) is fixedly opened inside the shaft sleeve (27); the inner cavity shape of the transmission shaft groove and the cross-section of the guide shaft (12) are both regular polygons; the shaft sleeve (27) is transmission-connected to the sealing column (24) via a second chain belt.

8. The fine metal mask grabbing device according to claim 7, characterized in that: The suction foot module comprises a fixed suction pipe (28) fixedly connected to the positioning suction frame (16); the inner wall of the fixed suction pipe (28) is slidably connected to a moving suction pipe (29); the fixed suction pipe (28) is connected to the vacuum pipe (4) via a flexible pipe; a solenoid valve b is installed inside the flexible pipe; a T-shaped guide rod (30) slidably connected to the fixed suction pipe (28) is fixedly installed on the moving suction pipe (29); a tightening spring (31) is sleeved on the T-shaped guide rod (30) corresponding to the position between the moving suction pipe (29) and the fixed suction pipe (28); and the bottom end of the moving suction pipe (29) is fixedly connected to the vacuum suction foot.

9. A method for grasping a fine metal mask grasping device as claimed in claim 8, characterized in that: The following steps are involved: S1, inputting the fine metal mask information to be captured into the central control host (19); S2, the first visual acquisition probe (5) acquires edge features of the fine metal mask to be captured and locates the edge features; S3, the central control host (19) adjusts the distance between the two grasping components according to the information collected by the first visual acquisition probe (5) so that the distance is adapted to the specifications of the fine metal mask to be grasped, and the positions of the two negative pressure suction heads (26) in each grasping component respectively correspond to the positions of the parts to be removed on the fine metal mask to be grasped; S4, the vacuum suction foot sucks the fine metal mask to be grasped, and the negative pressure suction head (26) sucks the part to be removed on the fine metal mask. After the negative pressure suction head (26) sucks the part to be removed, the sealing column (24) rotates 180 degrees. After the sealing column (24) rotates, the negative pressure suction head (26) loses negative pressure, and the suction hose (3) sucks the part to be removed sucked on the negative pressure suction head (26). Subsequently, the sealing column (24) and the negative pressure suction head (26) automatically reset. After the reset is completed, the negative pressure suction head (26) sucks the diaphragm paper under the fine metal mask; S5, the multi-axis robot arm moves and transfers the diaphragm paper and the fine metal mask plate to the next station together. After being transferred to the next station, the negative pressure suction head (26) and the vacuum suction foot lose the negative pressure, and then the synchronous transfer and grasping of the diaphragm paper and the fine metal mask plate are completed.

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