Fault detection method and device for vacuum pump controller

Abstract

The present invention discloses a fault detection method and device for a vacuum pump controller, wherein the fault detection method includes: determining whether the bearing control stage of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function; when the bearing control stage of the vacuum pump controller is not faulty, determining whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller; when the acceleration drive stage of the vacuum pump controller is not faulty, determining whether the acceleration stage of the vacuum pump controller is faulty according to the duration and speed setting value of the acceleration drive signal output by the vacuum pump controller. The technical solution of the present invention can quickly locate the fault of the vacuum pump controller by simulating the feedback signals of each stage of the vacuum pump, thereby improving the efficiency of fault detection of the molecular pump controller and reducing the cost of repairing equipment.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumps, and in particular to a fault detection method and device for a vacuum pump controller. Background Art

[0002] In the semiconductor industry, second-hand equipment is favored by many companies because of its lower price and relatively reliable performance. However, as the use time of second-hand equipment continues to increase, the supply of accessories and parts becomes increasingly difficult. This challenge mainly comes from two aspects: on the one hand, as time goes by, old products are discontinued, resulting in a gradual reduction in the supply of their accessories and parts; on the other hand, the emergence of new products makes it more difficult to obtain parts for old models of equipment, because new products are usually no longer compatible with old equipment. In this case, molecular pumps and molecular pump controllers, as key components necessary to maintain high vacuum in the equipment, are crucial to the stable operation of the equipment.

[0003] However, the complexity and fragility of molecular pump controllers pose many challenges to equipment maintenance. Existing maintenance methods mainly rely on the experience of engineers to troubleshoot problems by replacing parts, which is inefficient and unable to quickly locate the fault location. Summary of the invention

[0004] The present invention provides a vacuum pump controller fault detection method and device to solve the problems existing in the prior art. By simulating the feedback signals of each stage of the vacuum pump, the fault of the vacuum pump controller can be quickly located, thereby improving the efficiency of fault detection of the molecular pump controller.

[0005] In a first aspect, the present invention provides a vacuum pump controller fault detection method, comprising:

[0006] Determining whether a bearing control stage of the vacuum pump controller fails according to a bearing control signal output by the vacuum pump controller and a first relationship function; the first relationship function includes a relationship function between the bearing control signal and a feedback voltage;

[0007] When the bearing control stage of the vacuum pump controller is not faulty, determining whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller;

[0008] When there is no fault in the acceleration driving phase of the vacuum pump controller, it is determined whether there is a fault in the acceleration phase of the vacuum pump controller according to the duration and the speed setting value of the acceleration driving signal output by the vacuum pump controller.

[0009] Optionally, determining whether a bearing control stage of the vacuum pump controller fails according to a bearing control signal output by the vacuum pump controller and a first relationship function includes:

[0010] Acquire the bearing control signal output by the vacuum pump controller in real time;

[0011] outputting a feedback voltage corresponding to the bearing control signal to the vacuum pump controller according to the bearing control signal and the first relationship function, so that the vacuum pump controller adjusts the bearing control signal according to the feedback voltage;

[0012] Returning to the step of acquiring the bearing control signal output by the vacuum pump in real time and outputting a feedback voltage to the vacuum pump controller according to the bearing control signal and a first relationship function, until the acquired bearing control signal satisfies a first preset condition;

[0013] Determining the feedback voltage corresponding to the bearing control signal according to the bearing control signal acquired for the last time;

[0014] Determining whether the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to a first set value;

[0015] If so, it is determined that there is no fault in the bearing control stage of the vacuum pump controller.

[0016] Optionally, the vacuum pump controller fault detection method further includes:

[0017] When the duration of the acquired bearing control signal is greater than or equal to the first preset duration, and there is no continuous set number of acquired bearing control signals that satisfy the first preset condition, it is determined that a first fault exists in the bearing control stage of the vacuum pump controller.

[0018] Optionally, the vacuum pump controller fault detection method further includes:

[0019] If the difference between the feedback voltage and the set feedback voltage does not meet the first set value, it is determined that a second fault exists in the bearing control stage of the vacuum pump controller.

[0020] Optionally, when the bearing control stage of the vacuum pump controller is not faulty, determining whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller includes:

[0021] When there is no fault in the bearing control stage of the vacuum pump controller, outputting an acceleration instruction signal to the vacuum pump controller so that the vacuum pump controller outputs an acceleration drive signal;

[0022] Acquiring the acceleration driving signal in real time;

[0023] Determining whether an absolute value of a difference between the acceleration drive signal and the preset drive signal is less than or equal to a second set value;

[0024] If so, it is determined that the acceleration drive phase of the vacuum pump controller is not faulty.

[0025] Optionally, the vacuum pump controller fault detection method further includes:

[0026] If the acceleration drive signal does not meet the second preset condition, it is determined that a fault exists in the acceleration drive stage of the vacuum pump controller.

[0027] Optionally, the acceleration drive signal includes four drive voltages, and the fault detection method further includes:

[0028] If at least one driving voltage is zero, it is determined that the vacuum pump controller has a driving fault.

[0029] Optionally, when the acceleration driving stage of the vacuum pump controller is not faulty, determining whether the acceleration stage of the vacuum pump controller is faulty according to the duration and the speed setting value of the acceleration driving signal output by the vacuum pump controller includes:

[0030] outputting a feedback speed to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines the time to stop outputting the acceleration drive signal according to the feedback speed;

[0031] Determine whether the absolute value of the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is less than or equal to a third setting value;

[0032] If so, it is determined that the acceleration phase of the vacuum pump controller is not faulty.

[0033] Optionally, the vacuum pump controller fault detection method further includes:

[0034] If the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is not within the first preset range, it is determined that there is a fault in the acceleration phase of the vacuum pump controller.

[0035] In a second aspect, the present invention provides a fault component detection device for a vacuum pump controller, comprising:

[0036] A bearing control stage fault determination module, used to determine whether the bearing control stage of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function;

[0037] an acceleration drive phase fault determination module, used to determine whether the acceleration drive phase of the vacuum pump controller fails according to the acceleration drive signal and the preset drive signal of the vacuum pump controller when the bearing control phase of the vacuum pump controller does not fail;

[0038] The acceleration phase fault determination module is used to determine whether the acceleration phase of the vacuum pump controller is faulty based on the duration and speed setting value of the acceleration drive signal output by the vacuum pump controller when the acceleration drive phase of the vacuum pump controller is not faulty.

[0039] The technical solution of the present invention determines whether the bearing control stage of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function, and when the bearing control stage of the vacuum pump controller is not faulty, determines whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller, and when the acceleration drive stage of the vacuum pump controller is not faulty, determines whether the acceleration stage of the vacuum pump controller is faulty according to the duration of the acceleration drive signal output by the vacuum pump controller and the speed setting value, so that when detecting the fault of the vacuum pump controller, by simulating the feedback signals of each stage of the vacuum pump, the fault of the vacuum pump controller can be quickly and accurately located without relying on the experience of engineers, thereby improving the efficiency of fault detection of the molecular pump controller and reducing the cost of repairing equipment.

[0040] It should be understood that the contents described in this section are not intended to identify the key or important features of the embodiments of the present invention, nor are they intended to limit the scope of the present invention. Other features of the present invention will become easily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0042] Figure 1 A flow chart of a fault detection method for a vacuum pump controller provided by an embodiment of the present invention;

[0043] Figure 2 A flow chart of another method for detecting a fault of a vacuum pump controller provided by an embodiment of the present invention;

[0044] Figure 3 A schematic structural diagram of a fault component detection device for a vacuum pump controller provided in an embodiment of the present invention. DETAILED DESCRIPTION

[0045] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0046] It should be noted that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein.

[0047] A vacuum pump refers to a device or equipment that uses mechanical, physical, chemical or physicochemical methods to evacuate the container to obtain a vacuum. Depending on the characteristics of the vacuum pump, the vacuum pump may include but is not limited to a molecular pump, a diffusion pump, an ion pump and a Roots vacuum pump. All types of vacuum pumps output a drive signal from the controller to the motor so that the motor drives the rotor. During the startup phase of the vacuum pump, the vacuum pump controller first outputs a bearing control signal to control the magnetic force of the electromagnet, thereby controlling the rotor position through the magnetic force generated by the electromagnet. At the same time, the displacement sensor in the vacuum pump detects the rotor position and outputs a voltage signal to feed back to the vacuum pump controller. The controller adjusts the bearing control signal according to the voltage signal until the rotor is in the correct position. Then, the controller outputs an acceleration drive signal to accelerate the rotor of the vacuum pump until the rotor speed reaches the set value. At this time, the vacuum pump is started.

[0048] The controller of the vacuum pump is used to control the operation process of the vacuum pump. When the operation of the vacuum pump fails, it is necessary to first eliminate the wiring problem and the short circuit fuse problem, and then detect the fault of the vacuum pump controller itself. At present, in the prior art, when the operation of the vacuum pump fails, the fault detection depends on the experience of engineers. Engineers replace the possibly damaged parts based on their own experience until the vacuum pump can operate normally. This method is time-consuming and laborious, and repeated disassembly of the machine is likely to cause damage to other undamaged parts, thereby further aggravating the degree of failure of the vacuum pump.

[0049] Figure 1 This is a flow chart of a vacuum pump controller fault detection method provided by an embodiment of the present invention. This embodiment is applicable to the situation of quickly and accurately locating the fault of the vacuum pump controller. The method can be executed by a vacuum pump controller fault detection device. Figure 1 As shown, the method includes:

[0050] S110. Determine whether a bearing control stage of the vacuum pump controller fails according to a bearing control signal output by the vacuum pump controller and a first relationship function.

[0051] The bearing control signal is a signal output by the vacuum pump controller for controlling the magnetic force of the electromagnet so that the rotor is in the correct position. Exemplarily, the bearing control signal is a current signal. The first relationship function includes a relationship function between the bearing control signal and the feedback voltage, that is, the feedback voltage corresponding to each bearing control signal. The bearing control stage of the vacuum pump controller can be understood as a stage in which the vacuum pump controller controls the molecular pump to start the rotor and gradually put it in the correct position.

[0052] Specifically, when testing the vacuum pump controller, the bearing control signal output by the vacuum pump controller is first obtained. When the bearing controller signal output by the vacuum pump controller is obtained, the feedback voltage corresponding to the bearing control signal is fed back to the vacuum pump controller according to the first relationship function, so that the vacuum pump controller adjusts the bearing control signal according to the feedback voltage until the bearing controller signal output by the vacuum pump controller is stable. At this time, if the feedback voltage is equal to the voltage value when the rotor is in the correct position, it is determined that the bearing control stage of the vacuum pump controller is not faulty. On the contrary, if the bearing control signal output by the vacuum pump controller cannot be stable, or, when the bearing control signal is stable, the corresponding feedback voltage is not equal to the voltage value when the rotor is in the correct position, it is determined that the bearing control stage of the vacuum pump controller is faulty.

[0053] S120: When the bearing control stage of the vacuum pump controller is not faulty, determine whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller.

[0054] The acceleration drive signal is a signal output by the vacuum pump controller to accelerate the rotor after the rotor is in the correct position. In an optional embodiment, the acceleration drive signal includes a periodic four-way drive voltage. The preset drive signal can be understood as the correct acceleration drive signal that the vacuum pump controller should output. The acceleration drive stage of the vacuum pump controller can be understood as the stage in which the vacuum pump controller outputs the acceleration drive signal to accelerate the rotor after the rotor is in the correct position.

[0055] Specifically, when the bearing control stage of the vacuum pump controller is not faulty, that is, when the vacuum pump controller can drive the rotor to rotate and place the rotor in the correct position, by comparing the acceleration drive signal output by the vacuum pump controller with the preset drive signal, if the acceleration drive signal matches the preset drive signal, it is determined that the acceleration drive stage of the vacuum pump controller is not faulty; on the contrary, if the acceleration drive signal does not match the preset drive signal, it is determined that the acceleration drive stage of the vacuum pump controller is faulty.

[0056] S130: When there is no fault in the acceleration driving phase of the vacuum pump controller, determine whether there is a fault in the acceleration phase of the vacuum pump controller according to the duration of the acceleration driving signal output by the vacuum pump controller and the speed setting value.

[0057] Among them, the duration of the vacuum pump controller outputting the acceleration drive signal can be understood as the total time of receiving the acceleration drive signal of the vacuum pump controller. In an optional embodiment, when the acceleration drive signal output by the vacuum pump controller is received, the timing starts until the acceleration drive signal is no longer received, that is, the vacuum pump controller stops outputting the acceleration drive signal and the timing stops. The speed setting value is the speed finally reached by the speed determined according to the acceleration drive signal and the duration of the acceleration drive signal. The acceleration stage of the vacuum pump controller can be understood as the stage in which the vacuum pump controller continuously outputs the acceleration drive signal to make the rotor speed reach the speed setting value.

[0058] Specifically, when the acceleration drive phase of the vacuum pump controller does not fail, the duration of the acceleration drive signal output by the vacuum pump is recorded. When the duration of the acceleration drive signal at the vacuum pump controller corresponds to the speed setting value, it is determined that the acceleration phase of the vacuum pump controller does not fail. On the contrary, when the duration of the acceleration drive signal at the vacuum pump controller does not correspond to the speed setting value, it is determined that the acceleration phase of the vacuum pump controller fails.

[0059] In this embodiment, whether the bearing control stage of the vacuum pump controller is faulty is determined based on the bearing control signal output by the vacuum pump controller and the first relationship function, and when the bearing control stage of the vacuum pump controller is not faulty, whether the acceleration drive stage of the vacuum pump controller is faulty is determined based on the acceleration drive signal and the preset drive signal of the vacuum pump controller, and when the acceleration drive stage of the vacuum pump controller is not faulty, whether the acceleration stage of the vacuum pump controller is faulty is determined based on the duration of the acceleration drive signal output by the vacuum pump controller and the speed setting value. When the fault of the vacuum pump controller is detected, the fault of the vacuum pump controller can be quickly and accurately located by simulating the feedback signals of each stage of the vacuum pump without relying on the experience of engineers, thereby improving the efficiency of fault detection of the molecular pump controller and reducing the cost of repairing equipment.

[0060] Figure 2A flow chart of another method for detecting a fault of a vacuum pump controller provided by an embodiment of the present invention. Based on the above embodiment, this embodiment further adds steps of how to determine whether the bearing control phase of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function, how to determine whether the acceleration drive phase of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller, and how to determine whether the acceleration phase of the vacuum pump controller is faulty according to the duration and speed setting value of the acceleration drive signal output by the vacuum pump controller, refer to Figure 2 As shown, the method specifically:

[0061] S210, acquiring a bearing control signal output by a vacuum pump controller in real time.

[0062] S220. Output a feedback voltage corresponding to the bearing control signal to the vacuum pump controller according to the bearing control signal and the first relationship function, so that the vacuum pump controller adjusts the bearing control signal according to the feedback voltage.

[0063] The first relationship function is pre-stored in the fault detection device of the vacuum pump controller, and the first relationship function includes a relationship function between the bearing control signal output by the vacuum pump controller and the feedback voltage, that is, each bearing control signal has a corresponding feedback voltage.

[0064] S230 , returning to execute S210 to S220 until the acquired bearing control signals meet the first preset condition.

[0065] Among them, the first preset condition can be determined according to the bearing control signal condition when the rotor of the vacuum pump is in the correct position. For example, if the maximum current fluctuation in the output bearing control signal when the rotor of the vacuum pump is in the correct position is 50mA, then the first preset condition can be set to the difference between the currents in the bearing control signals obtained for 5 consecutive seconds is less than or equal to 50mA, or, the bearing control signal is obtained every 50ms until the difference between the currents in the bearing control signals obtained 100 times in a row is less than or equal to 50mA.

[0066] Specifically, when the fault detection device of the vacuum pump controller receives the bearing control signal output by the vacuum pump controller, the feedback voltage corresponding to the bearing control signal is output to the vacuum pump controller according to the received bearing control signal and the first relationship function, so that when the vacuum pump controller receives the feedback voltage, it can adjust the output bearing control signal according to the feedback voltage. After the fault detection device of the vacuum pump controller receives the adjusted bearing control signal, it outputs the feedback voltage corresponding to the adjusted bearing control signal to the vacuum pump controller again, so that the vacuum pump controller continues to adjust the bearing control signal according to the feedback voltage until the acquired bearing control signals meet the first preset condition. It can be understood that in the process of the vacuum pump controller controlling the vacuum pump to start, when the rotor is in the correct position, the bearing control signal adjusted according to the feedback voltage will maintain a fixed value output, so that the rotor always floats in the correct position. Therefore, when the bearing control signals acquired for a set number of consecutive times meet the first preset condition, the feedback voltage can be stopped from being sent to the vacuum pump controller.

[0067] In an optional embodiment, if when the duration of the bearing control signal is obtained is greater than or equal to a first preset duration, there is no first preset condition satisfied between the control signals of the bearing obtained for a consecutive set number of times, it is determined that a first fault exists in the bearing control stage of the vacuum pump controller.

[0068] The first preset time length can be determined according to the time taken by the vacuum pump controller to control the rotor of the vacuum pump to float from the bottom to the correct position, and the first preset time length is greater than or equal to the maximum time taken by the vacuum pump controller to control the rotor of the vacuum pump to float from the bottom to the correct position. For example, the first preset time length is 2 minutes. The first fault includes a bearing control fault.

[0069] Specifically, in the process where the fault detection device of the vacuum pump controller continuously outputs a corresponding feedback voltage to the vacuum pump controller according to the adjusted bearing control signal, if the duration of obtaining the bearing control signal is greater than or equal to the first preset duration, there is no continuous set number of control signals of the bearing obtained to meet the first preset condition, that is, in the process of simulating the vacuum pump controller controlling the rotor to float from the bottom to the correct position according to the bearing control signal output by the vacuum pump controller, the vacuum pump controller fails to make the rotor in the correct position. Therefore, it can be determined that there is a first fault in the bearing control stage of the vacuum pump controller, namely, a bearing control fault.

[0070] S240: Determine a feedback voltage corresponding to the bearing control signal according to the bearing control signal acquired last time.

[0071] S250, determining whether the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value; if so, executing S260; if not, executing S270.

[0072] Among them, the set feedback voltage can be understood as the voltage value fed back when the rotor is in the correct position. In an optional embodiment, the set feedback voltage is pre-calibrated and stored in the fault detection device of the vacuum pump controller. The first set value can be determined according to the floating range of the voltage value fed back when the rotor is in the correct position. In an exemplary embodiment, the first set value can be 50mA. It can be understood that when the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value, the feedback voltage is within the floating range of the voltage value fed back when the rotor is in the correct position. Therefore, it can be considered that when the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value, the vacuum pump controller can control the rotor to float from the bottom to the rotor in the correct position.

[0073] S260: Determine that there is no fault in the bearing control stage of the vacuum pump controller.

[0074] S270: Determine that a second fault exists in the bearing control stage of the vacuum pump controller.

[0075] Among them, the second fault includes a bearing control feedback fault.

[0076] Specifically, after the first preset condition is met between the bearing control signals obtained for a set number of consecutive times, the feedback voltage is stopped from being output to the vacuum pump controller, and the feedback voltage corresponding to the bearing control signal is determined based on the bearing control signal obtained for the last time, and then it is determined whether the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value. If the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value, it is determined that the vacuum pump controller can control the rotor to float from the bottom to the rotor in the correct position. At this time, it can be determined that there is no fault in the bearing control stage of the vacuum pump controller; on the contrary, if the absolute value of the difference between the feedback voltage and the set feedback voltage is greater than the first set value, it is determined that the rotor is not in the correct position when the vacuum pump controller outputs a stable bearing control signal. At this time, it can be determined that there is a second fault in the bearing control stage of the vacuum pump controller, that is, there is a bearing control feedback fault in the vacuum pump controller.

[0077] S280: When there is no fault in the bearing control stage of the vacuum pump controller, output an acceleration instruction signal to the vacuum pump controller so that the vacuum pump controller outputs an acceleration drive signal.

[0078] The acceleration instruction signal can be understood as a signal that allows the vacuum pump controller to control the rotor of the vacuum pump to accelerate. The acceleration drive signal can be understood as a drive signal output by the vacuum pump controller to the vacuum pump to accelerate the rotor.

[0079] S290, acquiring an acceleration driving signal in real time.

[0080] S2100, determining whether the absolute value of the difference between the acceleration driving signal and the preset driving signal is less than or equal to a second set value; if so, executing S2110; if not, executing S2120.

[0081] The preset drive signal can be understood as the correct acceleration drive signal when the vacuum pump controller controls the rotor of the vacuum pump to accelerate the rotation. The preset drive signal can be a four-way square wave signal. In an optional embodiment, the preset drive signal is pre-stored in the fault detection device of the vacuum pump controller. The second set value is determined according to the acceptable fluctuation range of the preset drive signal. For example, the second set value can be 5V or 10V.

[0082] S2110. Determine that there is no fault in the acceleration drive phase of the vacuum pump controller.

[0083] S2120: Determine that there is a fault in the acceleration drive phase of the vacuum pump controller.

[0084] Specifically, when the bearing control stage of the vacuum pump controller is not faulty, the acceleration drive stage of the vacuum pump controller can be further detected to see if it is faulty. The specific method is: output an acceleration instruction signal to the vacuum pump controller so that the vacuum pump controller outputs an acceleration drive signal, and obtain the acceleration drive signal output by the vacuum pump controller in real time, so that when the acceleration drive signal is obtained, determine whether the absolute value of the difference between the acceleration drive signal and the preset drive signal is less than or equal to a second set value. If the absolute value of the difference between the acceleration drive signal and the preset drive signal is less than or equal to the second set value, it means that the acceleration drive signal output by the vacuum pump controller is a correct acceleration drive signal, and it is determined that the acceleration drive stage of the vacuum pump controller is not faulty. On the contrary, if the absolute value of the difference between the acceleration drive signal and the preset drive signal is greater than the second set value, it means that the acceleration drive signal output by the vacuum pump controller is an erroneous acceleration drive signal, and it is determined that the acceleration drive stage of the vacuum pump controller is faulty.

[0085] In an optional embodiment, the acceleration drive signal includes four drive voltages, and the fault detection method further includes: if at least one drive voltage is zero, determining that the vacuum pump controller has a drive fault.

[0086] Among them, the four drive voltages drive the rotor in four directions respectively. At least one drive voltage being zero can be understood as one drive voltage being zero and the other three drive voltages being correct, or two drive voltages being zero and the other two drive voltages being correct, or three drive voltages being zero and one drive voltage being correct, or all four drive voltages being zero. Among them, when some drive voltages are zero and some drive voltages are correct, it is determined that some drive faults of the vacuum pump controller exist.

[0087] S2130. Outputting a feedback rotation speed to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines a time to stop outputting the acceleration drive signal according to the feedback rotation speed.

[0088] The second relationship function includes a relationship function between the duration of the acceleration drive signal and the feedback rotation speed. In an optional embodiment, the second relationship function is pre-calibrated and stored in a fault detection device of the vacuum pump controller.

[0089] Specifically, when the absolute value of the difference between the acceleration drive signal and the preset drive signal is less than or equal to the second set value, that is, when the acceleration drive stage of the vacuum pump controller is not faulty, the feedback speed corresponding to the duration of the acceleration drive signal is output to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller can determine whether the feedback speed is the correct speed of the rotor based on the feedback speed. When the vacuum pump controller believes that the feedback speed is the set speed of the rotor, the vacuum pump controller stops outputting the acceleration drive signal.

[0090] S2140, determining whether the absolute value of the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is less than or equal to the third setting value; if so, executing S2150; if not, executing S2160.

[0091] The speed setting value can be understood as the correct speed of the rotor after the acceleration is completed. In an optional embodiment, the speed setting value is pre-calibrated and stored in the fault detection device of the vacuum pump controller. The third setting value can be determined according to the fluctuation range of the correct speed of the rotor after the acceleration is completed. In an exemplary embodiment, the third setting value can be 2000rpm.

[0092] S2150: Determine that there is no fault in the acceleration phase of the vacuum pump controller.

[0093] S2160: Determine that there is a fault in the acceleration phase of the vacuum pump controller.

[0094] Specifically, when the acceleration drive stage of the vacuum pump is not faulty, the duration of the vacuum pump controller outputting the acceleration drive signal is obtained in real time, and the corresponding feedback speed is output to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines the time to stop outputting the acceleration drive signal according to the feedback speed, and then determines whether the absolute value of the difference in feedback speeds corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal is less than or equal to the third set value. If the absolute value of the difference in feedback speeds corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal is less than or equal to the third set value, it means that the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal is the correct speed of the rotor after the acceleration is completed, and it can be determined that the acceleration stage of the vacuum pump controller is not faulty; on the contrary, if the absolute value of the difference in feedback speeds corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal is greater than the third set value, it means that the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal is not the correct speed of the rotor after the acceleration is completed, and it can be determined that there is a fault in the acceleration stage of the vacuum pump controller.

[0095] It should be noted that when judging whether there is a fault in the acceleration phase of the vacuum pump controller, the acceleration time of the vacuum pump controller must also be considered. If the acceleration time is too long or too short, it means that there is a fault in the acceleration phase of the vacuum pump controller. In an optional embodiment, if the total time duration of the vacuum pump controller outputting the acceleration drive signal is less than the second preset time or greater than or equal to the third preset time, it is determined that there is a fault in the acceleration phase of the vacuum pump controller. Among them, the second preset time is determined according to the lower limit of the correct time duration of the acceleration phase of the vacuum pump controller, and the third preset time is determined according to the upper limit of the correct time duration of the acceleration phase of the vacuum pump controller. In an exemplary embodiment, the second preset time is 4 minutes and the third preset time is 6 minutes.

[0096] In this example, when a bearing control signal output by a vacuum pump controller is received by a fault detection device of the vacuum pump controller, a feedback voltage corresponding to the bearing control signal is output to the vacuum pump controller based on the received bearing control signal and a first relationship function, so that the vacuum pump controller adjusts the bearing control signal according to the feedback voltage until the acquired bearing control signals meet a first preset condition, then stops sending the feedback voltage to the vacuum pump controller, and determines the feedback voltage corresponding to the bearing control signal based on the last acquired bearing control signal, and then determines whether the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value If the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to the first set value, it is determined that there is no fault in the bearing control stage of the vacuum pump controller; on the contrary, if the absolute value of the difference between the feedback voltage and the set feedback voltage is greater than the first set value, it is determined that there is a second fault in the bearing control stage of the vacuum pump controller, that is, there is a bearing control feedback fault in the vacuum pump controller; if when the duration of the bearing control signal is greater than or equal to the first preset duration, there is no control signal of the bearing obtained for a consecutive set number of times that meets the first preset condition, it is determined that there is a first fault in the bearing control stage of the vacuum pump controller, that is, a bearing control fault. When the bearing control stage of the vacuum pump controller is not faulty, an acceleration instruction signal is output to the vacuum pump controller to make the vacuum pump controller output an acceleration drive signal. The acceleration drive signal output by the vacuum pump controller is obtained in real time, so that when the acceleration drive signal is obtained, it is determined whether the absolute value of the difference between the acceleration drive signal and the preset drive signal is less than or equal to the second set value. If the absolute value of the difference between the acceleration drive signal and the preset drive signal is less than or equal to the second set value, it is determined that the acceleration drive stage of the vacuum pump controller is not faulty. On the contrary, if the absolute value of the difference between the acceleration drive signal and the preset drive signal is greater than the second set value, it is determined that the acceleration drive stage of the vacuum pump controller is faulty. When there is no fault in the acceleration drive phase of the vacuum pump controller, a feedback speed is output to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines the moment to stop outputting the acceleration drive signal according to the feedback speed, and then determines whether the absolute value of the difference in feedback speeds corresponding to the total duration of the acceleration drive signal output by the vacuum pump controller is less than or equal to the third set value. If the absolute value of the difference in feedback speeds corresponding to the total duration of the acceleration drive signal output by the vacuum pump controller is less than or equal to the third set value, it is determined that there is no fault in the acceleration phase of the vacuum pump controller. On the contrary, if the absolute value of the difference in feedback speeds corresponding to the total duration of the acceleration drive signal output by the vacuum pump controller is greater than the third set value, it is determined that there is a fault in the acceleration phase of the vacuum pump controller. In this way, the fault detection process of the vacuum pump controller can be simplified and the efficiency of fault detection of the vacuum pump controller can be improved.

[0097] Based on the same concept, this embodiment also provides a fault component detection device for a vacuum pump controller, and the control device can be implemented in the form of hardware and / or software. Figure 3 A schematic diagram of the structure of a fault detection device for a vacuum pump controller provided by an embodiment of the present invention, as shown in FIG. Figure 3 As shown, the control device includes:

[0098] The bearing control stage fault determination module 310 is used to determine whether the bearing control stage of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function.

[0099] The acceleration drive phase fault determination module 320 is used to determine whether the acceleration drive phase of the vacuum pump controller is faulty based on the acceleration drive signal and the preset drive signal of the vacuum pump controller when the bearing control phase of the vacuum pump controller is not faulty.

[0100] The acceleration phase fault determination module 330 is used to determine whether the acceleration phase of the vacuum pump controller is faulty according to the duration of the acceleration drive signal output by the vacuum pump controller and the speed setting value when the acceleration drive phase of the vacuum pump controller is not faulty.

[0101] The faulty component detection device for the vacuum pump controller of a commercial vehicle provided in an embodiment of the present invention can execute the faulty component detection method for the vacuum pump controller provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method. The similarities can be referred to the above description.

[0102] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum pump controller fault detection method, characterized in that: include: Determining whether a bearing control stage of the vacuum pump controller fails according to a bearing control signal output by the vacuum pump controller and a first relationship function; the first relationship function includes a relationship function between the bearing control signal and a feedback voltage; When the bearing control stage of the vacuum pump controller is not faulty, determining whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller; When the acceleration driving stage of the vacuum pump controller is not faulty, determining whether the acceleration stage of the vacuum pump controller is faulty according to the duration of the acceleration driving signal output by the vacuum pump controller and the speed setting value; When the acceleration driving stage of the vacuum pump controller is not faulty, determining whether the acceleration stage of the vacuum pump controller is faulty according to the duration of the acceleration driving signal output by the vacuum pump controller and the speed setting value includes: outputting a feedback speed to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines the time to stop outputting the acceleration drive signal according to the feedback speed; Determine whether the absolute value of the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is less than or equal to a third setting value; If so, it is determined that the acceleration phase of the vacuum pump controller is not faulty.

2. The vacuum pump controller fault detection method according to claim 1, characterized in that: Determining whether a bearing control stage of the vacuum pump controller fails according to a bearing control signal output by the vacuum pump controller and a first relationship function includes: Acquire the bearing control signal output by the vacuum pump controller in real time; outputting a feedback voltage corresponding to the bearing control signal to the vacuum pump controller according to the bearing control signal and the first relationship function, so that the vacuum pump controller adjusts the bearing control signal according to the feedback voltage; Returning to the step of acquiring the bearing control signal output by the vacuum pump in real time and outputting a feedback voltage to the vacuum pump controller according to the bearing control signal and a first relationship function, until the acquired bearing control signal satisfies a first preset condition; Determining the feedback voltage corresponding to the bearing control signal according to the bearing control signal acquired for the last time; Determining whether the absolute value of the difference between the feedback voltage and the set feedback voltage is less than or equal to a first set value; If so, it is determined that there is no fault in the bearing control stage of the vacuum pump controller.

3. The vacuum pump controller fault detection method according to claim 2, characterized in that: Also includes: When the duration of the acquired bearing control signal is greater than or equal to the first preset duration, and there is no continuous set number of acquired bearing control signals that satisfy the first preset condition, it is determined that a first fault exists in the bearing control stage of the vacuum pump controller.

4. The vacuum pump controller fault detection method according to claim 2, characterized in that: Also includes: If the difference between the feedback voltage and the set feedback voltage does not meet the first set value, it is determined that a second fault exists in the bearing control stage of the vacuum pump controller.

5. The vacuum pump controller fault detection method according to claim 1, characterized in that: When the bearing control stage of the vacuum pump controller is not faulty, determining whether the acceleration drive stage of the vacuum pump controller is faulty according to the acceleration drive signal and the preset drive signal of the vacuum pump controller includes: When there is no fault in the bearing control stage of the vacuum pump controller, outputting an acceleration instruction signal to the vacuum pump controller so that the vacuum pump controller outputs an acceleration drive signal; Acquiring the acceleration driving signal in real time; Determining whether an absolute value of a difference between the acceleration drive signal and the preset drive signal is less than or equal to a second set value; If so, it is determined that the acceleration drive phase of the vacuum pump controller is not faulty.

6. The vacuum pump controller fault detection method according to claim 5, characterized in that: Also includes: If the acceleration drive signal does not meet the second preset condition, it is determined that a fault exists in the acceleration drive stage of the vacuum pump controller.

7. The vacuum pump controller fault detection method according to claim 5, characterized in that: The acceleration driving signal includes four driving voltages, and the fault detection method further includes: If at least one driving voltage is zero, it is determined that the vacuum pump controller has a driving fault.

8. The vacuum pump controller fault detection method according to claim 1, characterized in that: Also includes: If the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is not within the first preset range, it is determined that there is a fault in the acceleration phase of the vacuum pump controller.

9. A fault detection device for a vacuum pump controller, characterized in that: include: A bearing control stage fault determination module, used to determine whether the bearing control stage of the vacuum pump controller is faulty according to the bearing control signal output by the vacuum pump controller and the first relationship function; an acceleration drive phase fault determination module, used to determine whether the acceleration drive phase of the vacuum pump controller fails according to the acceleration drive signal and the preset drive signal of the vacuum pump controller when the bearing control phase of the vacuum pump controller does not fail; an acceleration phase fault determination module, for determining whether the acceleration phase of the vacuum pump controller fails according to the duration of the acceleration drive signal output by the vacuum pump controller and the speed setting value when the acceleration drive phase of the vacuum pump controller does not fail; When the acceleration driving stage of the vacuum pump controller is not faulty, determining whether the acceleration stage of the vacuum pump controller is faulty according to the duration of the acceleration driving signal output by the vacuum pump controller and the speed setting value includes: outputting a feedback speed to the vacuum pump controller according to the duration of the acceleration drive signal and the second relationship function, so that the vacuum pump controller determines the time to stop outputting the acceleration drive signal according to the feedback speed; Determine whether the absolute value of the difference between the feedback speed corresponding to the total duration of the vacuum pump controller outputting the acceleration drive signal and the speed setting value is less than or equal to a third setting value; If so, it is determined that the acceleration phase of the vacuum pump controller is not faulty.

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