Coaxial connection device, detection method and control system for high-frequency current detection

Abstract

The present invention relates to the field of radio frequency technology, and discloses a coaxial connection device, a detection method and a control system for high-frequency current detection. The coaxial connection device body has a coaxial connection structure and a shielding layer jacket; a detection shunt resistor, which is embedded in series on the shielding layer jacket and is used to detect the radio frequency current flowing through the coaxial connection device; a resistance shielding layer, which is arranged in the concentric inner and outer circles of the detection shunt resistor, is used to shield the high-frequency radiation from the core conductor of the coaxial connector and the external interference radiation, wherein one end of the resistance shielding layer is connected to one end of the detection shunt resistor, and the other end is suspended; an impedance matching element, which is connected to an output end of the detection shunt resistor, is used to match the input impedance of the subsequent circuit or detection instrument equipment; and a signal output end is used to output the detected current signal through a small coaxial connector or lead. The problems of accuracy, power consumption, temperature drift and impedance matching in high-frequency current detection are solved, and high-precision detection of high-frequency current is achieved.

Description

Technical Field

[0001] The present invention relates to the field of radio frequency technology, and specifically to a coaxial connection device for high-frequency current detection, which is used for high-precision detection of high-frequency current amplitude and phase, and is particularly suitable for high-precision demanding scenarios such as semiconductor etching and plasma high-frequency power supply for coating equipment. The present invention also relates to a detection method and a control system. Background Art

[0002] In the field of RF communication and semiconductor manufacturing technology, accurate detection of RF current is essential for power control and impedance matching. Traditional current detection methods, such as current transformers and Rogowski coils, have obvious limitations in high-frequency environments. Current transformers are limited by the hysteresis effect of the core material, have large losses and slow response in high-frequency environments, and are usually only suitable for current detection below megahertz. Although the Rogowski coil has good transient response, its accuracy is greatly affected by the manufacturing process and processing circuit, and it is difficult to meet the needs of high-precision detection.

[0003] In high-frequency applications, such as plasma high-frequency power supplies for semiconductor etching and coating equipment, there are extremely high requirements for current amplitude and phase detection. Accurate current detection is a prerequisite for achieving accurate power and impedance control. The resistance detection method is easy to manufacture and control because of its resistance accuracy, and its accuracy is easy to control and guarantee. The special advantage of the pure resistance detection method is that it has almost no delay effect and can quickly and in real time reflect the phase change of the current, making it an ideal choice for high-frequency current detection. However, the resistance detection method also faces some challenges, such as the insertion loss of the detection resistor, temperature rise and temperature drift, the influence of stray inductance and capacitance, and impedance matching of the signal processing circuit.

[0004] Based on the technical problems existing in the above-mentioned prior art, designing a coaxial connection device with a high-precision radio frequency current detection function becomes a problem to be solved by this application. Summary of the invention

[0005] The purpose of the present invention is to provide a coaxial connection device with high-precision radio frequency current detection function, aiming to solve the problems of accuracy, power consumption, temperature drift and impedance matching in high-frequency current detection, and to provide an accurate, low-cost and convenient detection solution.

[0006] In order to solve the above technical problems, the present application provides a coaxial connection device for high-frequency current detection, a radio frequency connector body, having a coaxial connection structure and a shielding layer jacket;

[0007] A detection shunt resistor, which is embedded in series on the shielding layer jacket and is used to detect the radio frequency current flowing through the coaxial connection device;

[0008] The resistance shielding layer is arranged on the concentric inner and outer circles of the detection shunt resistor, and is used to shield the high-frequency radiation from the core conductor of the coaxial connector and the external interference radiation, wherein one end of the resistance shielding layer is connected to one end of the detection shunt resistor, and the other end is suspended;

[0009] An impedance matching element, connected to an output end of the detection shunt resistor, for matching the input impedance of a subsequent circuit or detection instrument;

[0010] The signal output terminal is used to output the detected current signal through a small coaxial connector or a lead, wherein the outer layer of the small coaxial connector is connected to the source end of the large connector to achieve complete equipotentiality, thereby minimizing common-mode interference and noise.

[0011] In addition to the above-mentioned technical solutions, this application also makes improvements in the following aspects:

[0012] In some embodiments, the detection shunt resistor is a plurality of resistors connected in parallel to the shielding layer jackets at both ends.

[0013] In some embodiments, the detection shunt resistor is a ring-shaped resistor connected to the shielding layer jacket at both ends, forming a series connection distribution with the shielding layer jacket.

[0014] In some embodiments, the detection shunt resistor is a chip thick film resistor or a metal alloy resistor.

[0015] In some embodiments, the combined structure of the resistive shielding layer and the detection shunt resistor forms a characteristic impedance resonance for offsetting stray inductance and capacitance in the combined structure.

[0016] In some embodiments, the shielding layer jacket is a metal jacket having electrical and thermal conductivity, and the metal jacket is used to dissipate heat from the detection shunt resistor, thereby reducing the effect of temperature rise on the resistance value.

[0017] In some embodiments, the resistive shielding layer includes a resistive inner shielding layer and a resistive outer shielding layer.

[0018] In some embodiments, the resistor inner shielding layer and the resistor outer shielding layer are coaxially installed and are both arranged in an annular structure.

[0019] A second object of the present invention is to provide a radio frequency current detection method, which is applied to a coaxial connection device for high frequency current detection, comprising the following steps:

[0020] The coaxial connection device is connected in series to the radio frequency system, and when the radio frequency current passes through the detection shunt resistor, a voltage drop is generated across the resistor;

[0021] Detect the voltage drop across the shunt resistor, and according to Ohm's law, the amplitude and phase information of the RF current can be detected;

[0022] The detected current signal is output to the subsequent circuit or detection instrument equipment through the signal output structure for processing and analysis.

[0023] The third object of the present application is to provide a power and impedance feedback control system based on a high-frequency RF power source, comprising the above-mentioned coaxial connection device for high-frequency current detection, through which accurate measurement of the high-frequency current amplitude and phase is achieved, thereby performing feedback control on the power and impedance of the RF power source.

[0024] In combination with the description of the relevant technical features in the above invention content, the present invention has all, part or at least one of the following beneficial effects:

[0025] 1. High-precision detection: By using precision low-value resistors as detection shunt resistors, combined with good heat dissipation design and shielding measures, accurate detection of high-frequency current amplitude and phase is achieved. This detection method has higher accuracy and faster transient phase response, with almost no delay effect, and is suitable for accurate measurement in high-frequency environments.

[0026] 2. High RF power detection capability: The detection shunt resistor is embedded in series on the shielding jacket of the coaxial connector, and the good electrical and thermal conductivity and large surface area of ​​the metal jacket of the coaxial connector are used for heat dissipation, thereby adapting to the detection of high RF power and reducing the impact of temperature rise on the resistance value.

[0027] 3. Low insertion loss and temperature stability: Using precision low-value resistors as detection elements effectively reduces insertion loss. At the same time, good heat dissipation design ensures the temperature stability of the resistance value and reduces the impact of temperature drift on the measurement results. The detection shunt resistor uses a ring-shaped finger ring resistor with a relatively short width.

[0028] The above resistor has the characteristics of low influence of distributed inductance, large resistance flow surface and small influence of skin effect.

[0029] 4. Strong anti-interference ability: The concentric inner and outer circles of the detection shunt resistor are equipped with a resistance shielding layer to shield the high-frequency radiation from the core conductor of the coaxial connector and external interference radiation. This design effectively reduces the impact of environmental interference on the measurement results.

[0030] 5. Signal processing circuit matching: In order to match the input impedance of the subsequent circuit or detection instrument equipment, an impedance matching element is connected to one output end of the detection shunt resistor to ensure the effective transmission of the signal and the accuracy of processing.

[0031] 6. Compact structure and easy integration: The structure of the present application is compact and can be easily integrated into the existing radio frequency system. Accurate current amplitude and phase measurement can be performed by serially connecting the adapter connector of this function.

[0032] 7. Low cost and easy maintenance: Compared with traditional current detection methods, the RF current detection solution provided by this application has lower cost and simpler maintenance, reducing the overall operating cost of the system.

[0033] In summary, this application achieves high-precision detection of high-frequency current through innovative structural design and optimized resistance selection, while solving many problems existing in traditional detection methods in high-frequency environments, and provides an accurate, low-cost and convenient method for power and impedance feedback control and measurement of high-frequency RF power sources. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The drawings described herein are used to provide further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute improper limitations on the present application.

[0035] Figure 1 Schematic diagram of radio frequency current detection for this application;

[0036] Figure 2 This is a schematic diagram of the structure of the coaxial connection device of this application;

[0037] Figure 3 for Figure 2 AA section view;

[0038] Figure 4 This is a schematic diagram of the structure of the coaxial connection device of the present application as a conversion connector;

[0039] Figure 5 for Figure 4 BB section view;

[0040] Figure 6 This is a schematic diagram of the structure of the coaxial connection device of the present application as a fixed connector;

[0041] Figure 7 for Figure 6 CC section view;

[0042] Figure 8 This is a schematic diagram of the structure of the coaxial connection device of the present application as a coaxial cable connector;

[0043] Fig. 9 for Figure 8 DD section view;

[0044] Fig.10A schematic diagram of a detection shunt resistor formed by distributing multiple resistors in parallel in the present application;

[0045] Fig.11 A schematic diagram of a detection shunt resistor formed by a ring resistor in the present application.

[0046] The numbers in the figure are as follows:

[0047] 1. RF connector body; 2. Coaxial connection structure; 3. Shielding layer jacket; 4. Detection shunt resistor; 5. Resistor shielding layer; 51. Resistor inner shielding layer; 52. Resistor outer shielding layer; 6. Impedance matching element; 7. Signal output terminal. DETAILED DESCRIPTION

[0048] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. The description of the exemplary embodiments is merely illustrative and is not intended to be any limitation on the present application and its application or use. The present application can be implemented in other different forms and is not limited to the embodiments described herein.

[0049] 1. Explanation of Descriptive Terms in This Application

[0050] The embodiments provided in this application in conjunction with the technical solutions are intended to make this application more thorough and complete, and to fully convey the scope of this application to those skilled in the art. It should be noted that unless otherwise specifically stated in this application, the relative arrangement of components described in these embodiments should be interpreted as merely exemplary, and not as a limitation to the technical solutions of this application.

[0051] If the directional terms such as "upper", "lower", "left", "right", "bottom", "top" etc. are used in this application, they are defined relative to the directions in the drawings and are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly. These or other directional terms should not be understood as restrictive terms.

[0052] In the present application, when a specific device is described as being located between a first device and a second device, there may or may not be an intermediate device between the specific device and the first device or the second device. When a specific device is described as being connected to other devices, the specific device may be directly connected to the other device without an intermediate device, or may not be directly connected to the other device but have an intermediate device.

[0053] In addition, this application does not discuss in detail the technologies and equipment known to ordinary technicians in the relevant fields, but where appropriate, the technologies and equipment should be considered as part of the specification.

[0054] The application scenarios of this application are mainly based on high-precision detection of high-frequency current amplitude and phase, and are suitable for high-precision demand scenarios such as semiconductor etching and plasma high-frequency power supply for coating equipment. It can also be applied to other scenarios according to its functions, and its application scenarios are not restricted or limited by the specific embodiments recorded in this application.

[0055] Second, based on the traditional current detection methods such as current transformers and Rogowski coils, there are problems such as slow response and low accuracy in high-frequency environments. At the same time, based on the fact that the resistance detection device used in the existing high-frequency current detection method often has problems such as low detection power, large temperature rise and drift, stray inductance and capacitance, and ultimately affects the detection accuracy, this application specifically provides a technical solution to the above problems. The technical solution, working principle and technical effect of this application are described in detail below in conjunction with specific embodiments.

[0056] like Figure 2 , Figure 3 As shown, the present application provides a coaxial connection device with high-precision RF current detection function, including an RF connector body 1, a detection shunt resistor 4, a resistor shielding layer 5, an impedance matching element 6, and a signal output terminal 7 for outputting the detected current signal through a small coaxial connector or lead.

[0057] The detection shunt resistor 4 is embedded in series on the shielding layer jacket 3 of the coaxial connection device, and heat is dissipated through the good electrical and thermal conductivity of the metal jacket of the coaxial connection device, which is suitable for large RF power detection. By adopting the above design, the detection power is increased, the temperature rise of the resistor is reduced, and the temperature drift of the resistance value is reduced.

[0058] By using a precision low-value resistor as the detection shunt resistor 4, combined with good heat dissipation design and shielding measures, accurate detection of high-frequency current amplitude and phase is achieved. This detection method has higher accuracy and faster transient phase response, with almost no delay effect, and is suitable for accurate measurement in high-frequency environments.

[0059] In addition, the detection shunt resistor 4 is embedded in series on the shielding layer jacket 3 of the coaxial connection device. The shielding layer jacket 3 adopts a metal jacket with good electrical and thermal conductivity, and uses a large surface area for heat dissipation, thereby adapting to the detection of large RF power and reducing the impact of temperature rise on the resistance value.

[0060] This application uses precision low-value resistors as detection elements, which can effectively reduce insertion loss. At the same time, good heat dissipation design ensures the temperature stability of the resistance value and reduces the impact of temperature drift on the measurement results.

[0061] The concentric inner and outer circles of the detection shunt resistor 4 are provided with a resistor shielding layer 5 , which includes a resistor inner shielding layer 51 and a resistor outer shielding layer 52 . The resistor inner shielding layer 51 and the resistor outer shielding layer 52 are coaxially installed and are both arranged in a ring structure.

[0062] Through the above design, the existence of the resistor inner shielding layer 51 and the resistor outer shielding layer 52 forms an electromagnetic shielding structure. The resistor shielding layer 5 is used to shield the high-frequency radiation from the core conductor of the coaxial connector and external interference radiation, while avoiding the current path at both ends of the short-circuit resistor, effectively reducing the impact of environmental interference on the measurement results.

[0063] Among them, the resistance shielding layer 5 is only connected to one end of the detection shunt resistor 4, and the other end is suspended. This design not only plays a shielding role but also does not short-circuit the current path at both ends of the resistor, effectively avoiding the possibility of forming loop interference, reducing the additional noise generated by the loop current, and further improving the measurement accuracy.

[0064] The detection shunt resistor 4 and its shielding layer structure form a characteristic impedance resonance, which offsets the stray inductance and capacitance in the structure and improves the detection accuracy.

[0065] In high-frequency circuits, stray inductance and capacitance are common parasitic parameters, which may have an adverse effect on the performance of the circuit, such as introducing additional phase delays, reducing signal quality, etc. The present application adopts a combined structure of a resistive shielding layer 5 and a detection shunt resistor 4 to form a characteristic impedance resonance, which can effectively offset the effects of these stray inductance and capacitance. After offsetting the stray inductance and capacitance, the stability of the circuit is significantly improved. A stable circuit is easier to achieve accurate measurement and control, thereby improving the performance of the entire system.

[0066] In the present application, the detection shunt resistor 4 uses multiple resistors distributed in parallel or a ring resistor to connect the shielding layer jackets at both ends, forming a series connection relationship with the shielding layer jacket 3 to improve detection accuracy and stability.

[0067] By distributing multiple resistors in parallel or designing a ring resistor, the current can be distributed more evenly on each resistor, reducing the measurement error caused by uneven current distribution, while reducing the power consumption and heat generation of a single resistor, and improving the working stability and life of the resistor.

[0068] The series connection of the shielding layer jacket 3 and the detection shunt resistor 4 forms a more stable electromagnetic environment, reducing measurement fluctuations caused by environmental changes or external interference.

[0069] An output end of the detection shunt resistor 4 is connected to an impedance matching element 6 to match the input impedance of a subsequent circuit or detection instrument and equipment to reduce signal reflection and loss.

[0070] The addition of the impedance matching element 6 makes the output impedance of the detection shunt resistor 4 match the input impedance of the subsequent circuit or detection instrument and equipment, reducing the reflection phenomenon of the signal during transmission. This helps to avoid interference and distortion of the signal caused by reflection, improves the transmission quality of the signal, and further ensures the effective transmission of the signal and the accuracy of processing.

[0071] As an optimization, the detection shunt resistor 4 is selected: a chip thick film resistor or a metal alloy resistor, and the resistance value is accurately adjusted by polishing, plating, etc.

[0072] Metal alloy resistors are suitable for current detection scenarios that require high accuracy and stability. Metal alloy resistors usually have the characteristics of low resistance, high precision, low temperature coefficient, and resistance to impact current, which can better meet the needs of high-precision current detection.

[0073] Chip thick film resistors are suitable for current detection scenarios with general accuracy requirements. Chip thick film resistors have the advantages of small size, light weight, easy automated production, and relatively low cost. However, their accuracy and temperature coefficient may not be as good as metal alloy resistors.

[0074] In addition, through polishing, plating and other process means, the resistance value of the chip thick film resistor or metal alloy resistor can be accurately adjusted to meet the needs of high-precision detection of the shunt resistor 4. This precise adjustment can ensure the accuracy of the resistance value, thereby improving the accuracy of current detection.

[0075] The coaxial connection device is also provided with a signal output terminal 7. The detected current signal is output through a small coaxial connector or a coaxial cable lead at the signal output terminal. The outer layer of the small coaxial connector is connected to the source end of the large connector to achieve complete equipotential, minimize common-mode interference and noise, and ensure the reliability and accuracy of signal transmission.

[0076] The coaxial connection device described in this application can be applied in a variety of scenarios, and specific application scenario examples are as follows:

[0077] like Figure 4 , Figure 5 The figure shows the usage scenario of the coaxial connection device applied to a conversion connector.

[0078] like Figure 6 , Figure 7 The figure shows an application scenario in which the coaxial connection device is applied to a fixed connector.

[0079] like Figure 8 , Fig. 9 The figure shows an application scenario in which the coaxial connection device is applied to a coaxial cable connector.

[0080] Based on the above structural optimization design, this embodiment designs a 7 / 16 specification coaxial connection device, which integrates a high-precision RF current detection function. The specific implementation steps are as follows:

[0081] Resistor production and installation: Use metal alloy material to make a resistance ring with a width of 5mm, a thickness of 0.3mm, and a diameter of 22mm as the detection shunt resistor 4. The resistance ring has excellent conductivity and heat dissipation performance, and the resistance value is stable. The resistance ring is welded to the shielding layer jacket 3 of the coaxial connection device to form a series relationship.

[0082] Heat dissipation design: The volume and surface area of ​​the metal jacket of the coaxial connection device are used to effectively dissipate heat from the resistor ring. The good thermal conductivity of the metal jacket can ensure that the temperature rise of the resistor ring is small during the high RF power detection process, thereby reducing the impact of resistance temperature drift on the detection results.

[0083] Shielding design: A shielding layer is set on the concentric inner and outer rings of the resistor ring to shield the high-frequency radiation from the core conductor of the coaxial connector and external interference radiation. The shielding layer is only connected to one end of the resistor ring to ensure the shielding effect without short-circuiting the current path at both ends of the resistor.

[0084] Characteristic impedance resonance: By optimizing the structure of the resistance ring and its shielding layer, the two form a characteristic impedance (such as 50 ohms) resonance, thereby offsetting the stray inductance and capacitance in the structure and improving detection accuracy.

[0085] Impedance matching: Connect a 50-ohm impedance matching resistor to one output end of the resistance loop to ensure that the input impedance of the subsequent circuit or detection instrument matches the output impedance of the coaxial connection device to reduce signal reflection and loss.

[0086] Signal output: The detection signal is led out through a small coaxial connector or coaxial cable. The outer layer of the small coaxial connector is connected to the source end of the large connector to achieve complete equipotentiality, effectively avoiding the influence of common mode interference and noise.

[0087] In order to verify the technical effect that can be achieved by the coaxial connection device described in this embodiment, the following verification experiments were conducted in this example:

[0088] 1. Experimental conditions: In a high-frequency radio frequency environment, the coaxial connection device of this embodiment is used to detect a radio frequency current of 10A.

[0089] 2. Performance parameters: According to the specific structural parameters and resistance adjustment results of this embodiment, the following are some performance parameters of the coaxial connection device:

[0090] (a) Detection current: 10A

[0091] (b) Resistor power consumption: P = I 2R=(10A) 2 ×10mΩ=1W, where I is the detection current and R is the detection shunt resistor

[0092] (c) Detection signal effective amplitude: U = IR = 10A × 10mΩ = 100mV, where I is the detection current and R is the detection shunt resistor

[0093] (d) Temperature rise: Under normal working conditions, due to the good heat dissipation performance of the metal jacket of the coaxial connector, the temperature rise of the detection resistor is small, about 8°C.

[0094] 3. Test results: When the test current is 10A, the effective amplitude of the test signal is 100mV (calculated according to Ohm's law U=IR), and the power consumption of the resistor is 1W. At the same time, due to the good heat dissipation design and shielding effect, the temperature rise of the resistor is only 8°C, which is much lower than expected. The above experiment shows good heat dissipation performance and detection accuracy. The coaxial connection device in this embodiment has excellent performance.

[0095] refer to Figure 1 The present application further records a radio frequency current detection method using the coaxial connection device, comprising the following steps:

[0096] The coaxial connection device is connected in series to the radio frequency system, and when the radio frequency current passes through the detection shunt resistor, a voltage drop is generated across the resistor;

[0097] Detect the voltage drop across the shunt resistor, and according to Ohm's law, the amplitude and phase information of the RF current can be detected;

[0098] The detected current signal is output to the subsequent circuit or detection instrument equipment through the signal output structure for processing and analysis.

[0099] The present application also records a power and impedance feedback control system based on a high-frequency RF power source, including the coaxial connection device described above, through which accurate measurement of the high-frequency current amplitude and phase is achieved, thereby performing feedback control on the power and impedance of the RF power source.

[0100] In summary, the coaxial connection device in this embodiment realizes high-precision detection of high-frequency RF current by integrating detection shunt resistors, optimizing shielding and impedance matching design. It has a simple structure, low cost, and is easy to implement, and can be widely used in semiconductor etching and coating equipment that require accurate current detection.

[0101] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

[0102] In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the fact that ordinary technicians in the field can implement it; when the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

Claims

1. A coaxial connection device for high-frequency current detection, characterized in that: include: A radio frequency connector body (1) has a coaxial connection structure (2) and two shielding layer jackets (3) arranged at intervals; A detection shunt resistor (4) is embedded in series on two shielding layer jackets (3) arranged at intervals, and is used to detect the radio frequency current flowing through the coaxial connection device; The resistor shielding layer (5) comprises a resistor inner shielding layer (51) and a resistor outer shielding layer (52); the resistor inner shielding layer (51) and the resistor outer shielding layer (52) are coaxially installed and are both arranged in a ring structure; The resistor inner shielding layer (51) and the resistor outer shielding layer (52) are respectively arranged on the concentric inner and outer circles of the detection shunt resistor (4) to shield high-frequency radiation from the core conductor of the coaxial connector and external interference radiation; One end of the resistor inner shielding layer (51) is connected to one end of the left shielding layer jacket (3), and the other end is suspended; one end of the resistor outer shielding layer (52) is connected to one end of the right shielding layer jacket (3), and the other end is suspended; An impedance matching element (6), one end of which is connected to an output end of the detection shunt resistor (4) and is used to match the input impedance of a subsequent circuit or detection instrument; The signal output terminal (7) is connected to the other end of the impedance matching element (6) and is used to output the detected current signal through a small coaxial connector or a lead.

2. The coaxial connection device for high-frequency current detection according to claim 1, characterized in that: The detection shunt resistor (4) is a plurality of resistors distributed in parallel and connected to the shielding layer jacket (3).

3. The coaxial connection device for high-frequency current detection according to claim 1, characterized in that: The detection shunt resistor (4) is a ring resistor and is connected in series with the shielding layer jacket (3).

4. The coaxial connection device for high-frequency current detection according to claim 2, characterized in that: The detection shunt resistor (4) is a chip thick film resistor or a metal alloy resistor.

5. The coaxial connection device for high-frequency current detection according to claim 1, characterized in that: The combined structure of the resistance shielding layer (5) and the detection shunt resistor (4) forms a characteristic impedance resonance, which is used to offset the stray inductance and capacitance in the combined structure.

6. The coaxial connection device for high-frequency current detection according to claim 1, characterized in that: The shielding layer jacket (3) is a metal jacket with electrical and thermal conductivity, and the metal jacket is used to dissipate heat from the detection shunt resistor (4), thereby reducing the effect of temperature rise on the resistance value.

7. A radio frequency current detection method, applied to the coaxial connection device for high frequency current detection as claimed in any one of claims 1 to 6, characterized in that: The following steps are involved: The coaxial connection device is connected in series to the radio frequency system, and when the radio frequency current passes through the detection shunt resistor, a voltage drop is generated across the resistor; Detect the voltage drop across the shunt resistor, and according to Ohm's law, the amplitude and phase information of the RF current can be detected; The detected current information is output through the signal output terminal to the subsequent circuit or detection instrument equipment for processing and analysis.

8. A power and impedance feedback control system based on a high frequency radio frequency power source, characterized in that: A coaxial connection device for high-frequency current detection comprising any one of claims 1 to 6, through which accurate measurement of the high-frequency current amplitude and phase is achieved, thereby feedback control of the power and impedance of the radio frequency power source is performed.

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