A zone melting furnace heat preservation device

Abstract

The present invention belongs to the technical field of zone furnace heat preservation, and specifically relates to a zone furnace heat preservation device, which includes a main heating coil sleeved between a single crystal rod and a polycrystalline rod, and an auxiliary heating device sleeved on the polycrystalline rod. The auxiliary heating device includes an auxiliary heating coil, the polycrystalline rod passes through the auxiliary heating coil, both the upper and lower ends of the auxiliary heating coil are connected with wires, a cold and heat exchange cover sleeved on the auxiliary heating coil, two groups of water pipes, one end of each of the two groups of water pipes is fixedly connected to the outer ring of the cold and heat exchange cover, and the water pipes communicate with the cavity inside the cold and heat exchange cover; during the process of cooling the polycrystalline rod, due to the fact that the water in the cavity is in a continuous flowing state, the water always remains at a low temperature, thereby maintaining the high efficiency of the water in absorbing heat. This not only improves the efficiency of cooling the polycrystalline rod, but also the water absorbs the heat dissipated by the polycrystalline rod, realizing the recovery of thermal energy, thereby achieving the purpose of saving resources.

Description

Technical Field

[0001] The present invention belongs to the technical field of zone furnace heat preservation, and specifically relates to a zone furnace heat preservation device. Background Art

[0002] Monocrystalline silicon is a semiconductor material, generally used for manufacturing integrated circuits and other electronic components. There are two monocrystalline silicon growth techniques: one is the zone melting method, and the other is the Czochralski method. Since the zone melting method does not use a crucible to hold silicon raw materials, it avoids the possible contamination caused by crucible materials. Therefore, the purity of monocrystalline silicon grown by the zone melting method is higher than that of the Czochralski method. Normal zone furnace production includes processes such as preparation - preheating - welding - necking - shoulder expansion - isodiameter - finishing - cooling, etc. Preheating usually uses a heat preservation device for heating. The heat preservation device can not only preheat the material but also keep the material warm.

[0003] The patent with publication number CN103451727B discloses a polycrystalline rod heat preservation device for a zone furnace, which includes an auxiliary heater sleeved on the polycrystalline rod, a data analysis module, and an infrared thermometer. Two interfaces on the auxiliary heater are electrically connected to an externally provided auxiliary heating power supply through cables, and both the data analysis module and the infrared thermometer are electrically connected to the auxiliary heating power supply through signal lines. The temperature at the lower end of the polycrystalline rod is monitored in real time by the infrared thermometer, and the data analysis module analyzes and judges the data fed back by the infrared thermometer to determine the magnitude of the current input from the auxiliary heating power supply into the auxiliary heater, thereby realizing the heat preservation of the polycrystalline rod, not only reducing the risk of polycrystalline rod cracking but also achieving the purpose of saving time and electric energy.

[0004] In the above solution, when the infrared thermometer detects that the temperature at the lower end of the polycrystalline rod is too high, the current input from the auxiliary heating power supply into the auxiliary heater will be controlled to the minimum to reduce the temperature of the polycrystalline rod to a suitable value. However, during the process of the polycrystalline rod temperature decreasing, the heat on the polycrystalline rod naturally dissipates to the surrounding, with a slow heat dissipation rate. Secondly, the heat dissipated from the polycrystalline rod to the surrounding will be dissipated, resulting in waste of thermal energy. Therefore, the present invention provides a zone furnace heat preservation device. Summary of the Invention

[0005] In order to make up for the deficiencies of the prior art and solve at least one of the technical problems proposed in the background art.

[0006] The technical solution adopted by the present invention to solve its technical problems is: A zone furnace heat preservation device of the present invention includes a main heating coil sleeved between the single crystal rod and the polycrystalline rod, and an auxiliary heating device sleeved on the polycrystalline rod. The auxiliary heating device includes an auxiliary heating coil. The polycrystalline rod passes through the auxiliary heating coil. Both the upper and lower ends of the auxiliary heating coil are connected with wires. A heat exchange cover is sleeved on the auxiliary heating coil. There are two groups of water pipes. One end of each group of water pipes is fixedly connected to the outer ring of the heat exchange cover, and the water pipes communicate with the cavity inside the heat exchange cover.

[0007] In the process of cooling the polycrystalline rod, the water in the cavity is in a continuous flow state, so that the water is always at a low temperature, thereby maintaining the high efficiency of water in absorbing heat. This not only improves the efficiency of cooling the polycrystalline rod, but also absorbs the heat emitted by the polycrystalline rod to recover heat energy, thereby achieving the purpose of saving resources.

[0008] Preferably, the heat exchange cover comprises a main cover body, the main cover body is located above the auxiliary heating coil, and the polycrystalline rod passes through the main cover body, a bevel gear disk rotatably installed in the main cover body, six groups of bevel gears meshing with the bevel gear disk, and the six groups of bevel gears are rotatably installed in the main cover body at equal angles, six groups of arc plates, and the six groups of arc plates are distributed at equal angles below the main cover body, and a receiving block fixedly connected to the upper end of the arc plate, and the receiving block is fixedly connected to one end of the two groups of telescopic tubes, and the other ends of the two groups of telescopic tubes are fixedly connected to the inner ring of the main cover body, six groups of guide grooves are opened at equal angles in the main cover body, and the six groups of receiving blocks are slidably connected to the six groups of guide grooves respectively, and two groups of annular cavities are arranged in the main cover body, and the two groups of telescopic tubes are connected to the two groups of annular cavities respectively, and six groups of oblique slide grooves are opened at equal angles on the bevel gear disk, and a pin shaft is fixedly installed on the receiving block, and the pin shaft passes through the oblique slide groove, and the two groups of water pipes are respectively connected with the two groups of annular cavities;

[0009] Under the guidance of the oblique slide groove, the pin shaft drives the receiving block and the curved plate to move back to the direction of the polycrystalline rod, so that the six groups of curved plates are separated and away from the auxiliary heating coil, so that the heating effect of the auxiliary heating coil on the heat exchange cover is greatly weakened, and the water inside the heat exchange cover cannot be evaporated, which not only ensures the efficiency of the auxiliary heating coil in heating the polycrystalline rod, but also improves the service life of the heat exchange cover.

[0010] Preferably, a transmission shaft is respectively installed at both ends of the arc-shaped plate, and several groups of heat dissipation fins are installed on the transmission shaft at equal distances. Two groups of shells are symmetrically embedded and installed on both sides of the upper end of the arc-shaped plate. An L-shaped movable plate is movably installed in the shell, and a pressure head on the upper end of the L-shaped movable plate is fixedly connected. A U-shaped spring plate is arranged below the L-shaped movable plate, and a socket is opened at the lower end of the L-shaped movable plate. The socket is inserted into the upper end of the transmission shaft, and two groups of spiral grooves are opened on the outer side of the upper end of the transmission shaft. Two groups of cams are fixedly installed in the socket, and the two groups of cams pass through the two groups of spiral grooves respectively. Six groups of conical surfaces are arranged at equal angles at the lower end of the main cover body, and the conical surfaces are used to push the pressure head. Several groups of storage grooves for accommodating heat dissipation fins are opened on one side of the arc-shaped plate, and the transmission shaft is rotatably connected to the arc-shaped plate.

[0011] The two groups of cams move downward together with the L-shaped movable plate, and the cams squeeze the groove wall of the spiral slide groove, so that the transmission shaft together with several groups of heat sink fins rotate toward the storage groove until the cams stagger the conical surface, so that the heat sink fins are received in the storage groove, which greatly reduces the heating effect of the auxiliary heating coil on the heat sink fins and increases the service life of the heat sink fins.

[0012] The beneficial effects of the present invention are as follows:

[0013] 1. In the process of cooling the polycrystalline rod, the water in the cavity is in a continuous flow state, so that the water is always at a low temperature, thereby maintaining the high efficiency of water in absorbing heat. This not only improves the efficiency of cooling the polycrystalline rod, but also absorbs the heat emitted by the polycrystalline rod to achieve heat energy recovery, thereby achieving the purpose of saving resources.

[0014] 2. A group of bevel gears are driven by a group of motors to rotate, and a group of bevel gears drives the bevel gear plate to rotate. The rotation direction is the direction indicated by the arrow in the figure below. As the bevel gear plate rotates, the six groups of pins will slide along the six groups of oblique grooves respectively. Under the guidance of the oblique grooves, the pins drive the receiving block and the arc plate to move back to the direction of the polycrystalline rod, so that the six groups of arc plates are separated and away from the auxiliary heating coil, so that the heating effect of the auxiliary heating coil on the heat exchange cover is greatly weakened, and the water inside the heat exchange cover cannot be evaporated, which not only ensures the efficiency of the auxiliary heating coil in heating the polycrystalline rod, but also improves the service life of the heat exchange cover.

[0015] 3. When the six groups of arc plates begin to separate, the two groups of pressure heads at the upper ends of the arc plates will be squeezed by the corresponding conical surfaces, so that the pressure heads drive the L-shaped movable plates to move downward along the inner cavity of the shell, and the L-shaped movable plates compress the U-shaped spring sheets. At the same time, the two groups of cams move downward together with the L-shaped movable plates, and the cams squeeze the groove walls of the spiral grooves, so that the transmission shaft together with several groups of heat sink fins rotate toward the receiving groove direction until the cams stagger the conical surfaces, so that the heat sink fins are received in the receiving grooves, which greatly reduces the heating effect of the auxiliary heating coil on the heat sink fins and increases the service life of the heat sink fins. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below in conjunction with the accompanying drawings.

[0017] Figure 1 It is a schematic diagram of the structure of the present invention.

[0018] Figure 2 It is a schematic diagram of the combination of the auxiliary heating device and the polycrystalline rod of the present invention.

[0019] Figure 3 It is a schematic diagram of the auxiliary heating coil, the heat exchange cover and the water pipe combination of the present invention.

[0020] Figure 4 It is a cross-sectional schematic diagram of the heat exchange cover of the present invention.

[0021] Figure 5 It is a schematic diagram of the main cover body, receiving block, telescopic pipe and water pipe assembly in cross section according to the present invention.

[0022] Figure 6Schematic diagram of the combination of the polycrystalline rod, auxiliary heating coil, arc-shaped plate, and receiving block of the present invention.

[0023] Figure 7 Schematic diagram of the arc-shaped plate with a partial cross-section of the present invention.

[0024] Figure 8 Schematic diagram of the combination of the transmission shaft, housing, L-shaped movable plate, pressure-bearing head, jack, convex shaft, and U-shaped elastic sheet of the present invention.

[0025] Figure 9 Schematic diagram of the combination of the main housing and the arc-shaped plate with a partial cross-section of the present invention.

[0026] In the figure: 1. Main heating coil; 2. Auxiliary heating device; 3. Single crystal rod; 4. Polycrystalline rod; 201. Auxiliary heating coil; 202. Wire; 203. Heat and cold exchange cover; 204. Water pipe; 205. Cavity; 2031. Main housing; 311. Guide groove; 312. Annular cavity; 313. Conical surface; 2032. Bevel gear disk; 321. Oblique chute; 2033. Bevel gear; 2034. Arc-shaped plate; 2035. Receiving block; 351. Pin shaft; 2036. Telescopic tube; 341. Transmission shaft; 41. Spiral chute; 342. Heat dissipation fin; 343. Housing; 344. L-shaped movable plate; 345. Pressure-bearing head; 346. Jack; 46. Convex shaft; 347. U-shaped elastic sheet; 348. Storage groove. Detailed implementation manners

[0027] In order to make the technical means, creative features, achieved purposes, and functions of the present invention easy to understand, the present invention will be further described below in conjunction with specific implementation manners. Embodiment 1

[0028] As Figure 1 shown in Figure 2 A zone melting furnace heat preservation device according to an embodiment of the present invention includes a main heating coil 1 sleeved between a single crystal rod 3 and a polycrystalline rod 4, and an auxiliary heating device 2 sleeved on the polycrystalline rod 4. The auxiliary heating device 2 includes an auxiliary heating coil 201. The polycrystalline rod 4 passes through the auxiliary heating coil 201. Both the upper and lower ends of the auxiliary heating coil 201 are connected with wires 202. A heat and cold exchange cover 203 sleeved on the auxiliary heating coil 201, two groups of water pipes 204. One end of each of the two groups of water pipes 204 is fixedly connected to the outer ring of the heat and cold exchange cover 203, and the water pipes 204 communicate with the cavity 205 inside the heat and cold exchange cover 203.

[0029] Specifically, a group of water pipes 204 are externally connected to a water pump, two groups of wires 202 are electrically connected to an auxiliary heating power supply of an external device, the lower end of the polycrystalline rod 4 is monitored in real time by an infrared thermometer, the auxiliary heating power supply is electrically connected to the data analysis module through a signal line, and the main heating coil 1, the auxiliary heating power supply, the infrared thermometer, and the data analysis module all adopt the relevant corresponding mechanisms in the zone melting furnace polycrystalline rod heat preservation device with the above-mentioned publication number CN103451727B. When the infrared thermometer detects that the temperature of the lower end of the polycrystalline rod 4 is too high, the data analysis module controls the current input by the auxiliary heating power supply into the auxiliary heating coil 201 to decrease, so that the heating effect of the auxiliary heating coil 201 on the polycrystalline rod 4 becomes weaker. The heat of the polycrystalline rod 4 itself will dissipate to the surroundings, causing the temperature of the polycrystalline rod 4 itself to gradually decrease. At the same time, cooling water is injected into the cavity 205 of the heat and cold exchange cover 203 through a group of water pipes 204 by a water pump, so that the cooling water quickly absorbs the heat dissipated by the polycrystalline rod 4, and the water that absorbs the heat is discharged through another group of water pipes 204 until the temperature of the polycrystalline rod 4 drops to the predetermined temperature range, and the injection of cooling water into the cavity 205 is stopped, thereby realizing the heat preservation of the polycrystalline rod 4. Compared with the prior art, during the cooling process of the polycrystalline rod 4, since the water in the cavity 205 is in a continuous flowing state, the water is always at a low temperature, thereby maintaining the high efficiency of the water in absorbing heat, not only improving the cooling efficiency of the polycrystalline rod 4, but also the water absorbs the heat dissipated by the polycrystalline rod 4, realizing the recovery of thermal energy, thereby achieving the purpose of saving resources.

[0030] As Figures 3 to 5 shown, the heat and cold exchange cover 203 includes a main cover body 2031. The main cover body 2031 is located above the auxiliary heating coil 201, and the polycrystalline rod 4 passes through the main cover body 2031. A bevel gear disk 2032 rotatably installed in the main cover body 2031, six bevel gears 2033 meshing with the bevel gear disk 2032, the six bevel gears 2033 are rotatably installed in the main cover body 2031 at equal angles, six arc-shaped plates 2034, the six arc-shaped plates 2034 are distributed at equal angles below the main cover body 2031, a receiving block 2035 fixedly connected to the upper end of the arc-shaped plate 2034, one end of two telescopic tubes 2036 is fixedly connected to the receiving block 2035, and the other ends of the two telescopic tubes 2036 are fixedly connected to the inner ring of the main cover body 2031. Six guiding grooves 311 are equally angled in the main cover body 2031, and the six receiving blocks 2035 are respectively slidably connected to the six guiding grooves 311. Two annular cavities 312 are arranged in the main cover body 2031, and the two telescopic tubes 2036 are respectively communicated with the two annular cavities 312. Six inclined chutes 321 are equally angled in the bevel gear disk 2032, a pin shaft 351 is fixedly installed on the receiving block 2035, the pin shaft 351 passes through the inclined chute 321, and the two water pipes 204 are respectively connected to the two annular cavities 312.

[0031] Specifically, the telescopic tube 2036 has good high-temperature resistance and telescopic properties. The arc-shaped plate 2034 and the receiving block 2035 are both hollow, and the inside of the arc-shaped plate 2034 is connected to the inside of the receiving block 2035. Since the auxiliary heating coil 201 is located inside the heat and cold exchange cover 203, and the distance between the inner circle of the heat and cold exchange cover 203 and the outer circle of the auxiliary heating coil 201 is relatively close, when the current input to the auxiliary heating coil 201 is increased, the heat and cold exchange cover 203 will also be heated by the auxiliary heating coil 201 at the same time. As the temperature of the heat and cold exchange cover 203 rises, the water inside the heat and cold exchange cover 203 will be evaporated dry. The evaporation of water will affect the heating efficiency of the auxiliary heating coil 201 for the polycrystalline rod 4. Secondly, after the heat and cold exchange cover 203 undergoes multiple heating and cooling cycles, thermal fatigue will occur in the heat and cold exchange cover 203, reducing the service life of the heat and cold exchange cover 203. In the initial state, the six arc-shaped plates 2034 are in a combined state. Therefore, when cooling the polycrystalline rod 4 as described above, the cooling water enters a set of annular cavities 312 through a set of water pipes 204. Then, the cooling water in the annular cavity 312 enters the receiving block 2035 through a set of telescopic tubes 2036. The cooling water in the receiving block 2035 enters the arc-shaped plate 2034 to absorb the heat dissipated by the polycrystalline rod 4. The water after absorbing the heat enters another set of annular cavities 312 through another set of telescopic tubes 2036, and then is discharged through another set of water pipes 204 to achieve the cooling of the polycrystalline rod 4 as described above. When the cooling of the polycrystalline rod 4 ends, the input of the cooling water into a set of water pipes 204 is stopped, and then a set of bevel gears 2033 is driven to rotate by a set of motors. A set of bevel gears 2033 drives the bevel gear disc 2032 to rotate in the direction indicated by the arrow in the figure below Figure 3 When the bevel gear disc 2032 rotates, the six pin shafts 351 will slide along the six inclined chutes 321 respectively. Under the guidance of the inclined chutes 321, the pin shafts 351 drive the receiving block 2035 together with the arc-shaped plate 2034 to move away from the polycrystalline rod 4, separating the six arc-shaped plates 2034 and moving them away from the auxiliary heating coil 201, greatly weakening the heating effect of the auxiliary heating coil 201 on the heat and cold exchange cover 203, and preventing the water inside the heat and cold exchange cover 203 from being evaporated. This not only ensures the heating efficiency of the auxiliary heating coil 201 for the polycrystalline rod 4, but also improves the service life of the heat and cold exchange cover 203. Embodiment 2

[0032] As Figures 6 to 9As shown, compared with Example 1, another embodiment of the present invention is: a transmission shaft 341 is installed at each end of the arc plate 2034, and a plurality of groups of heat dissipation fins 342 are installed on the transmission shaft 341 at equal distances, two groups of shells 343, and the two groups of shells 343 are symmetrically embedded and installed on both sides of the upper end of the arc plate 2034, an L-shaped movable plate 344 is movably installed in the shell 343, a pressure head 345 is fixedly connected to the upper end of the L-shaped movable plate 344, a U-shaped spring piece 347 is arranged below the L-shaped movable plate 344, and a U-shaped spring piece 347 is arranged below the L-shaped movable plate 344. A socket 346 is provided at the end, and the upper end of the transmission shaft 341 is plugged into the socket 346. Two groups of spiral grooves 41 are provided on the outer side of the upper end of the transmission shaft 341. Two groups of cams 46 are fixedly installed in the socket 346. The two groups of cams 46 pass through the two groups of spiral grooves 41 respectively. Six groups of conical surfaces 313 are provided at equal angles at the lower end of the main cover body 2031. The conical surfaces 313 are used to push the pressure bearing head 345. Several groups of receiving grooves 348 for receiving the heat dissipating fins 342 are provided on one side of the arc plate 2034. The transmission shaft 341 is rotatably connected to the arc plate 2034.

[0033] Specifically, in the initial state, the heat dissipation fins 342 are separated from the storage grooves 348, and the heat dissipation fins 342 are located between the arc plate 2034 and the polycrystalline rod 4. The heat dissipation fins 342 have good thermal conductivity, so that the heat dissipation fins 342 can quickly absorb the heat emitted by the polycrystalline rod 4 and transfer the heat to the arc plate 2034. The heat dissipation fins 342 are set to increase the contact area between the heat exchange cover 203 and the heat emitted by the polycrystalline rod 4, thereby improving the heat recovery efficiency. When the six groups of arc plates 2034 begin to separate, the two groups of pressure heads 345 at the upper ends of the arc plates 2034 will be squeezed by the corresponding conical surfaces 313. , so that the pressure head 345 drives the L-shaped movable plate 344 to move downward along the inner cavity of the shell 343, and the L-shaped movable plate 344 compresses the U-shaped spring piece 347, and at the same time, the two groups of convex shafts 46 move downward together with the L-shaped movable plate 344, and the convex shafts 46 squeeze the groove wall of the spiral groove 41, so that the transmission shaft 341 together with a plurality of groups of heat dissipating fins 342 rotate toward the receiving groove 348 until the convex shaft 46 staggers the conical surface 313, so that the heat dissipating fins 342 are received in the receiving groove 348, which greatly reduces the heating effect of the auxiliary heating coil 201 on the heat dissipating fins 342 and improves the service life of the heat dissipating fins 342.

[0034] Working principle: When the infrared thermometer detects that the temperature at the lower end of the polycrystalline rod 4 is too high, the data analysis module controls the auxiliary heating power supply to input the current into the auxiliary heating coil 201 to reduce the heating effect of the auxiliary heating coil 201 on the polycrystalline rod 4, and the heat of the polycrystalline rod 4 itself will be dissipated to the surroundings, so that the temperature of the polycrystalline rod 4 itself gradually decreases. At the same time, the cooling water is injected into a group of annular cavities 312 through a group of water pipes 204 through a water pump, and then the cooling water in the annular cavity 312 enters the receiving block 2035 through a group of telescopic tubes 2036, and the cooling water in the receiving block 2035 enters the arc The arc plate 2034 and the plurality of heat dissipation fins 342 are kept at low temperature, so that the cooling water absorbs the heat emitted by the polycrystalline rod 4. The water after absorbing the heat enters the another group of annular cavities 312 through another group of telescopic tubes 2036, and then is discharged through another group of water pipes 204, so as to realize the above-mentioned cooling of the polycrystalline rod 4. When the cooling of the polycrystalline rod 4 is finished, the cooling water is stopped from being input into the one group of water pipes 204, and then a group of bevel gears 2033 are driven to rotate by a group of motors, and a group of bevel gears 2033 drive the bevel gear disc 2032 to rotate, and the rotation direction is the lower side. Figure 3 The middle arrow indicates the direction. As the bevel gear disc 2032 rotates, the six groups of pins 351 will slide along the six groups of oblique grooves 321 respectively. Under the guidance of the oblique grooves 321, the pins 351 drive the receiving block 2035 and the arc plate 2034 to move in the direction away from the polycrystalline rod 4, so that the six groups of arc plates 2034 are separated and away from the auxiliary heating coil 201.

[0035] When the six groups of arc plates 2034 begin to separate, the two groups of pressure heads 345 at the upper ends of the arc plates 2034 will be squeezed by the corresponding conical surfaces 313, so that the pressure heads 345 drive the L-shaped movable plate 344 to move downward along the inner cavity of the shell 343, and the L-shaped movable plate 344 compresses the U-shaped spring piece 347. At the same time, the two groups of convex shafts 46 move downward together with the L-shaped movable plate 344, and the convex shafts 46 squeeze the groove wall of the spiral groove 41, so that the transmission shaft 341 together with several groups of heat dissipating fins 342 rotate toward the receiving groove 348 until the convex shaft 46 staggers the conical surface 313, so that the heat dissipating fins 342 are received into the receiving groove 348.

[0036] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A zone melting furnace heat preservation device, comprising a main heating coil sleeved between a single crystal rod and a polycrystalline rod, and an auxiliary heating device sleeved on the polycrystalline rod, characterized in that: The auxiliary heating device comprises an auxiliary heating coil; The polycrystalline rod passes through an auxiliary heating coil, and the upper and lower ends of the auxiliary heating coil are connected with wires; A cold and heat exchange cover sleeved on the auxiliary heating coil; Two groups of water pipes, one end of each of the two groups of water pipes is fixedly connected to the outer ring of the cold and heat exchange cover, and the water pipes are connected to the cavity built into the cold and heat exchange cover; The heat exchange cover comprises: A main cover body, wherein the main cover body is located above the auxiliary heating coil and the polycrystalline rod passes through the main cover body; Rotating a conical gear disc installed in the main cover; Six groups of bevel gears meshing with the bevel gear disc, the six groups of bevel gears being rotatably installed in the main housing at equal angles; Six groups of arc plates, the six groups of arc plates are distributed at equal angles below the main cover; A receiving block fixedly connected to the upper end of the arc-shaped plate; The receiving block is fixedly connected to one end of the two sets of telescopic tubes, and the other ends of the two sets of telescopic tubes are fixedly connected to the inner circle of the main cover body; Transmission shafts are respectively installed at both ends of the arc-shaped plate; A plurality of groups of heat dissipation fins are installed on the transmission shaft at equal distances; Two sets of shells, the two sets of shells are symmetrically embedded and installed on both sides of the upper end of the arc plate; An L-shaped movable plate movably mounted in the housing; A pressure-bearing head fixedly connected to the upper end of the L-shaped movable plate; A U-shaped spring piece is arranged below the L-shaped movable plate; The lower end of the L-shaped movable plate is provided with a plug hole, and the upper end of the transmission shaft is plugged into the plug hole; Two sets of spiral grooves are provided on the outer side of the upper end of the transmission shaft, and two sets of convex shafts are fixedly installed in the insertion hole, and the two sets of convex shafts pass through the two sets of spiral grooves respectively; The lower end of the main cover body is provided with six groups of conical surfaces at equal angles, and the conical surfaces are used to push the pressure bearing head; A plurality of receiving grooves for receiving heat dissipation fins are provided on one side of the arc-shaped plate, and the transmission shaft is rotatably connected to the arc-shaped plate.

2. A zone furnace insulation device according to claim 1, characterized in that: Six groups of guide grooves are provided in the main cover at equal angles, and the six groups of receiving blocks are slidably connected to the six groups of guide grooves respectively.

3. A zone furnace insulation device according to claim 2, characterized in that: Two groups of annular cavities are arranged in the main cover body, the two groups of telescopic tubes are respectively connected to the two groups of annular cavities, and the two groups of water pipes are respectively connected to the two groups of annular cavities.

4. A zone furnace insulation device according to claim 3, characterized in that: The bevel gear disc is provided with six groups of oblique sliding grooves at equal angles, and a pin is fixedly mounted on the receiving block, and the pin passes through the oblique sliding grooves.

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