Electrode design method, device, equipment, storage medium and piezoelectric actuator

Abstract

The present invention relates to the technical field of inkjet head design, and in particular to an electrode design method, device, equipment, storage medium and piezoelectric actuator. The method comprises: obtaining design parameters of a piezoelectric actuator to perform modal analysis and obtain modal analysis results; obtaining a design area image of an upper driving electrode, dividing the design area image to obtain a plurality of divided areas, and setting an independent variable for each divided area; based on the modal analysis results, obtaining displacement information corresponding to the divided areas; assigning values ​​to the independent variables of the divided areas based on the displacement information, stopping the assignment when a preset assignment stop condition is met, and obtaining the assignment results; constructing a three-dimensional model of an upper driving electrode based on the assignment results; the electrode design method disclosed in the present application has the advantages of large deformation displacement and high deformation efficiency, which can effectively improve the response speed and stability of the piezoelectric actuator and reduce the working energy consumption of the piezoelectric actuator.

Description

Technical Field

[0001] The present invention relates to the technical field of inkjet head design, and in particular to an electrode design method, device, equipment, storage medium and piezoelectric actuator. Background Art

[0002] With the continuous advancement of micro-electromechanical technology and the increasing demand for inkjet printing, the number of nozzles integrated inside the inkjet head has increased significantly, and the corresponding microchannel density has also shown an upward trend, resulting in a gradual reduction in the size of the pressure chamber and its corresponding piezoelectric actuator; in pursuit of deformation displacement that meets inkjet standards, smaller actuator sizes require higher driving voltages, and the heat dissipation problem generated by the simultaneous operation of high-density actuators has a negative impact on the quality of inkjet and the service life of the nozzle; therefore, improving the deformation efficiency of the piezoelectric actuator is not only the basis for ensuring the normal operation of the inkjet head, but also a key way to improve its performance.

[0003] As the core microfluidic device in the piezoelectric inkjet head, the piezoelectric actuator usually adopts a ring-shaped design for the driving electrode. On the one hand, the ring electrode has better displacement performance than the full-coverage electrode. On the other hand, by adjusting the area of ​​the ring electrode, the problem of inconsistent power-on deformation caused by the difference in layer thickness between the middle and edge of the wafer in large-area material deposition processing is effectively solved.

[0004] However, the upper driving electrode design of the currently common pressure chamber is mostly an equal-width ring electrode, and its design is mainly based on manual experience, which has the problems of slow design speed, low design accuracy and low design consistency. The design method based on manual experience fails to fully consider the various complex situations in practical applications, which affects the performance and efficiency of the pressure chamber in actual operation.

[0005] It can be seen that the existing technology still needs to be improved and enhanced. Summary of the invention

[0006] In order to overcome the shortcomings of the prior art, the purpose of the present invention is to provide an electrode design method. The designed upper driving electrode has the advantages of large deformation displacement and high deformation efficiency, which can effectively improve the response speed and stability of the piezoelectric actuator and reduce the working energy consumption of the piezoelectric actuator.

[0007] The first aspect of the present invention provides an electrode design method, including: obtaining design parameters of a piezoelectric actuator, performing modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtaining modal analysis results; obtaining a design area image of an upper driving electrode, dividing the design area image to obtain multiple divided areas, and setting an independent variable for each divided area; based on the modal analysis results, obtaining displacement information corresponding to the divided areas; assigning values ​​to the independent variables of the divided areas based on the displacement information, stopping the assignment when a preset assignment stop condition is met, and obtaining the assignment results; and constructing a three-dimensional model of the upper driving electrode based on the assignment results.

[0008] Optionally, in a first embodiment of the first aspect of the present invention, the obtaining of the design parameters of the piezoelectric actuator, performing a modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtaining modal analysis results specifically include: obtaining the design parameters of the piezoelectric actuator, and constructing a three-dimensional model of the piezoelectric actuator using finite element modeling software based on the obtained design parameters; obtaining analysis requirements, the analysis requirements including constraints, analysis types, and parameters to be solved; based on the analysis requirements, performing a modal analysis calculation on the three-dimensional model of the piezoelectric actuator using a finite element solver to obtain modal analysis results, the modal analysis results including fixed frequencies and modal shapes.

[0009] Optionally, in a second implementation of the first aspect of the present invention, the step of obtaining a design area image of the upper driving electrode, dividing the design area image to obtain a plurality of divided areas, and setting an independent variable for each divided area specifically includes: obtaining a design area image of the upper driving electrode, wherein the design area image is a two-dimensional plan view of the upper driving electrode; dividing the design area image into a plurality of divided areas using a structured grid division method; and setting an independent variable γ for each divided area, wherein the initial value of the independent variable γ for each divided area is zero.

[0010] Optionally, in a third embodiment of the first aspect of the present invention, the method of obtaining displacement information corresponding to the divided areas based on the modal analysis results specifically includes: obtaining the first-order mode of each divided area based on the modal analysis results, and obtaining the displacement vector corresponding to the first-order mode; analyzing and calculating the displacement vectors one by one to obtain multiple displacement absolute values ​​corresponding to the divided areas; integrating multiple displacement vectors and displacement absolute values ​​to obtain displacement information.

[0011] Optionally, in a fourth embodiment of the first aspect of the present invention, the independent variables of the divided areas are assigned based on the displacement information, and when a preset assignment stop condition is met, the assignment is stopped, and the assignment result is obtained, specifically including: sorting multiple displacement absolute values ​​from small to large to obtain a sorting result; based on the sorting result, assigning the independent variables γ of the divided areas one by one; accumulating the areas of the assigned divided areas to obtain the assigned areas; when the assigned areas meet the preset assignment stop condition, the assignment is stopped, and the assignment results are obtained, and the assignment results include the contour information of the assigned divided areas.

[0012] Optionally, in a fifth embodiment of the first aspect of the present invention, the constructing of the three-dimensional model of the upper driving electrode based on the assignment result specifically includes: based on the contour information of the assigned divided area, using the B-spline curve interpolation method to perform contour fitting to obtain the two-dimensional contour of the upper driving electrode; obtaining the design height of the upper driving electrode, and stretching the two-dimensional contour according to the design height of the upper driving electrode to obtain the three-dimensional model of the upper driving electrode.

[0013] The second aspect of the present invention provides an electrode design device, including: an analysis module, used to obtain the design parameters of the piezoelectric actuator, perform modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtain modal analysis results; a division module, used to obtain a design area image of the upper driving electrode, divide the design area image to obtain multiple divided areas, and set an independent variable for each divided area; an acquisition module, used to obtain displacement information corresponding to the divided area based on the modal analysis results; an assignment module, used to assign values ​​to the independent variables of the divided areas based on the displacement information, stop the assignment when a preset assignment stop condition is met, and obtain the assignment result; a construction module, used to construct a three-dimensional model of the upper driving electrode based on the assignment result.

[0014] The third aspect of the present invention provides an electrode design device, which includes: a memory and at least one processor, wherein instructions are stored in the memory; at least one of the processors calls the instructions in the memory so that the electrode design device performs each step of the electrode design method described in any one of the above items.

[0015] A fourth aspect of the present invention provides a computer-readable storage medium having instructions stored thereon, and the instructions, when executed by a processor, implement the various steps of any of the above-mentioned electrode design methods.

[0016] A fifth aspect of the present invention provides a piezoelectric actuator, comprising an upper driving electrode, a piezoelectric material, a lower driving electrode and a vibration plate arranged in sequence from top to bottom, wherein the upper driving electrode is designed based on any of the electrode design methods described above.

[0017] In the technical solution of the present invention, the modal analysis result is obtained by obtaining the design parameters of the piezoelectric actuator; the design area image of the upper driving electrode is obtained, and the design area image is divided and processed to obtain multiple divided areas, and an independent variable is set for each divided area; based on the modal analysis result, the displacement information corresponding to the divided area is obtained; based on the displacement information, the independent variables of the divided area are assigned, and when the preset assignment stop condition is met, the assignment is stopped and the assignment result is obtained; based on the assignment result, a three-dimensional model of the upper driving electrode is constructed; the electrode design method disclosed in the present application, the designed upper driving electrode has the advantages of large deformation displacement and high deformation efficiency, which can effectively improve the response speed and stability of the piezoelectric actuator and reduce the working energy consumption of the piezoelectric actuator. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A first flow chart of the electrode design method provided by an embodiment of the present invention;

[0019] Figure 2 A second flow chart of the electrode design method provided by an embodiment of the present invention;

[0020] Figure 3 A third flow chart of the electrode design method provided by an embodiment of the present invention;

[0021] Figure 4 A fourth flow chart of the electrode design method provided by an embodiment of the present invention;

[0022] Figure 5 A fifth flow chart of the electrode design method provided by an embodiment of the present invention;

[0023] Figure 6 A sixth flow chart of the electrode design method provided by an embodiment of the present invention;

[0024] Figure 7 A schematic diagram of the structure of an electrode design device provided in an embodiment of the present invention;

[0025] Figure 8 A schematic diagram of the structure of an electrode design device provided in an embodiment of the present invention;

[0026] Fig. 9 A side view of a piezoelectric actuator provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0027] The present invention provides an electrode design method, device, equipment, storage medium and piezoelectric actuator. The terms "first", "second", "third", "fourth", etc. (if any) in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments described herein can be implemented in an order other than that illustrated or described herein. In addition, the terms "including" or "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units that are clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0028] For ease of understanding, the specific process of the embodiment of the present invention is described below. Figure 1 , an embodiment of the electrode design method in the embodiment of the present invention includes:

[0029] 101. Obtain design parameters of the piezoelectric actuator, perform modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtain modal analysis results;

[0030] In this embodiment, the design parameters of the piezoelectric actuator may include material properties, geometric dimensions and boundary conditions of each layer of the piezoelectric actuator, and the working conditions of the piezoelectric actuator; the modal analysis results may include natural frequency, vibration mode and damping ratio, the fixed frequency is the frequency of free vibration of the structure under external excitation, the vibration mode is the structural deformation mode corresponding to each natural frequency, and the damping ratio is a parameter describing the attenuation rate of structural vibration.

[0031] 102. Acquire a design region image of the upper driving electrode, divide the design region image to obtain a plurality of divided regions, and set an independent variable for each divided region;

[0032] By setting an independent variable as an identifier related to each divided area, it is convenient to adjust the parameters of each divided area separately. In this embodiment, the independent variable is used to characterize the presence or absence of the upper driving electrode material, 1 represents the presence of an electrode, and 0 represents the absence of an electrode.

[0033] 103. Based on the modal analysis results, obtain displacement information corresponding to the divided areas;

[0034] 104. Assign values ​​to the independent variables of the divided regions based on the displacement information, stop assigning values ​​when a preset assignment stop condition is met, and obtain the assignment result;

[0035] 105. Construct a three-dimensional model of the upper driving electrode based on the assignment results.

[0036] The present application discloses an electrode design method, which obtains the modal analysis result by obtaining the design parameters of the piezoelectric actuator; obtains the design area image of the upper driving electrode, divides the design area image to obtain multiple divided areas, and sets an independent variable for each divided area; based on the modal analysis result, obtains the displacement information corresponding to the divided area; assigns the independent variables of the divided area based on the displacement information, stops the assignment when the preset assignment stop condition is met, and obtains the assignment result; constructs a three-dimensional model of the upper driving electrode based on the assignment result; the electrode design method disclosed in the present application has the advantages of large deformation displacement and high deformation efficiency, which can effectively improve the response speed and stability of the piezoelectric actuator and reduce the working energy consumption of the piezoelectric actuator; further, the upper driving electrode is designed based on the design parameters of the piezoelectric actuator, which has the advantages of high design efficiency and high design flexibility, and can be personalized according to a variety of different usage scenarios to improve user satisfaction.

[0037] See also Figure 2 , a second embodiment of the electrode design method in the embodiment of the present invention includes:

[0038] 201. Obtain design parameters of the piezoelectric actuator, and based on the obtained design parameters, use finite element modeling (FEM) software to construct a three-dimensional model of the piezoelectric actuator;

[0039] 202. Obtain analysis requirements, where the analysis requirements include constraint conditions, analysis types, and parameters to be solved;

[0040] In this embodiment, the constraint conditions reflect the support method of the structure in the actual working environment; the analysis types include free modal analysis, constrained modal analysis, etc., the free modal analysis does not consider the constraint conditions, while the constrained modal analysis considers the impact of the constraint conditions on the structural dynamic performance; the parameters to be solved can be the solution order, frequency range, convergence accuracy, etc.

[0041] 203. Based on the analysis requirements, a finite element solver is used to perform modal analysis calculations on the three-dimensional model of the piezoelectric actuator to obtain modal analysis results, wherein the modal analysis results include fixed frequencies and modal shapes.

[0042] See also Figure 3 , a third embodiment of the electrode design method in the embodiment of the present invention includes:

[0043] 301. Acquire a design region image of an upper driving electrode, where the design region image is a two-dimensional plane view of the upper driving electrode;

[0044] 302. Divide the design region image into a plurality of divided regions using a structured grid division method;

[0045] In this embodiment, a structured grid division method is used to divide the design area image. The structured grid division method is usually used for design areas with regular geometric shapes. By creating a regular structured grid, the connectivity and smoothness between grids can be ensured, thereby more accurately simulating physical phenomena. Designers can pre-set the number of grids according to the design accuracy requirements. The more grids there are and the smaller the area of ​​the grid area, the smoother the boundary of the fitted upper electrode area.

[0046] 303. An independent variable γ is set for each partition area, and the initial value of the independent variable γ of each partition area is zero.

[0047] See also Figure 4 , a fourth embodiment of the electrode design method in the embodiment of the present invention includes:

[0048] 401. Based on the modal analysis result, obtain the first-order mode of each divided area, and obtain the displacement vector corresponding to the first-order mode;

[0049] In this embodiment, the first-order mode corresponds to the lowest natural frequency of the structure.

[0050] The inkjet print head's inkjet principle is: the piezoelectric actuator receives a driving signal and deforms, which changes the volume of the pressure chamber. The pressure wave generated by the volume change forces the ink to be ejected from the nozzle. Usually, the driving signal frequency received by the piezoelectric actuator is on the order of 10kHz. The working state of the piezoelectric actuator can be regarded as forced vibration. According to the modal superposition theory, the displacement of the forced vibration structure is approximately the weighted superposition of the multi-order modal displacements of the structure:

[0051] ;

[0052] In the formula, is the displacement vector of the forced vibration structure, and are the first m-order weighting coefficients and modal displacement vectors of the corresponding system, respectively. The magnitude of the weighting coefficient is affected by the distance between the operating frequency and the corresponding order natural frequency.

[0053] The characteristic modal analysis of the structure of the piezoelectric actuator was performed using the finite element numerical method, and it was found that its first-order natural frequency was on the order of 100 kHz. Therefore, the displacement of the piezoelectric actuator is dominated by the first-order modal displacement, and the displacements of other modal orders are less affected. Therefore, the electrode design method disclosed in this application performs geometric design of the upper driving electrode based on the displacement information corresponding to the first-order natural mode.

[0054] 402. Analyze and calculate the displacement vectors one by one to obtain a plurality of displacement absolute values ​​corresponding to the divided areas;

[0055] In this embodiment, the displacement field of the first-order mode is a three-dimensional vector field, which represents the vibration shape of the structure at a specific frequency. Each displacement field corresponds to a displacement vector. The displacement vector describes the displacement direction and magnitude of the divided area under the first-order mode. According to the coordinates of the displacement vector, the absolute value of the displacement corresponding to the displacement vector can be calculated.

[0056] 403. Integrate multiple displacement vectors and displacement absolute values ​​to obtain displacement information.

[0057] See also Figure 5 , a fifth embodiment of the electrode design method in the embodiment of the present invention includes:

[0058] 501. Sort multiple displacement absolute values ​​from small to large to obtain a sorting result;

[0059] In this embodiment, a bubble sort method may be used to sort the multiple displacement absolute values ​​from small to large.

[0060] 502. Based on the sorting result, the independent variable γ of the partition area is assigned one by one, and the independent variable of the partition area is changed from 0 to 1; that is, the independent variable of the partition area with the smallest absolute displacement value is assigned first, and then the independent variable of the partition area with the second smallest absolute displacement value is assigned, and so on.

[0061] 503. Accumulate the areas of the divided regions that have been assigned values ​​to obtain the assigned areas;

[0062] 504. When the assigned area meets the preset assignment stop condition, stop the assignment and obtain the assignment result, where the assignment result includes the contour information of the assigned divided area;

[0063] In this embodiment, the assignment stop condition is:

[0064] ;

[0065] Wherein, α is the set volume fraction of the electrode material, and in this embodiment, ; Ω represents the design area of ​​the upper driving electrode, represents the area of ​​the design region of the upper driving electrode;

[0066] In this embodiment, each time the divided area is assigned a value, the proportion of the area occupied by the γ currently assigned a value of 1 is calculated. , and compare it with the preset α value (60% in this real-time example). If the α value is not reached, the γ at the next position is assigned 1 according to the sorting result, and the condition is checked again. If the α value is reached, the assignment is stopped.

[0067] See also Figure 6 The sixth embodiment of the electrode design method in the embodiment of the present invention includes:

[0068] 601. Based on the contour information of the assigned divided area, a B-spline curve interpolation method is used to perform contour fitting to obtain a two-dimensional contour of the upper driving electrode;

[0069] In this embodiment, based on the contour information of the assigned divided area, that is, according to the distribution of γ values, the B-spline curve interpolation method is used to perform contour fitting; B-spline curve interpolation is a mathematical technology used to smoothly connect a set of data points. This technology constructs a series of B-spline basis functions and uses these basis functions to perform weighted combination of data points to generate a smooth curve passing through all given data points; B-spline curves not only have local support, that is, a part of the curve is determined by only a few data points, but also have flexible adjustability, allowing users to control the shape and smoothness of the curve by adjusting parameters.

[0070] 602. Obtain a design height of the upper driving electrode, and stretch the two-dimensional profile according to the design height of the upper driving electrode to obtain a three-dimensional model of the upper driving electrode;

[0071] In this embodiment, existing three-dimensional modeling software may be used to stretch the two-dimensional profile based on the designed height of the upper driving electrode.

[0072] Under the conditions of a volume fraction of 60% and a driving voltage of 40V, compared with the upper driving electrode designed by the equal-width design method in the prior art, the upper driving electrode designed by the design method of the present application has an increased displacement of the piezoelectric actuator by 22%, and the volume change of the pressure chamber also increases by 17%, indicating that the design of the upper driving electrode by the electrode design method of the present application can effectively improve the deformation efficiency of the piezoelectric actuator. The improvement in deformation efficiency can significantly improve the performance of the piezoelectric actuator, making the piezoelectric actuator have higher application value in the fields of precision control and micro-operation; and the improvement in deformation efficiency helps to reduce energy consumption, which is particularly important for application scenarios that require long-term operation or battery power; further, the improvement in deformation efficiency helps to improve the response speed and working stability of the piezoelectric actuator, ensuring that the piezoelectric actuator completes the command in a short time and stably remains in the specified position, thereby improving the overall performance and reliability of the system.

[0073] The electrode design method in the embodiment of the present invention is described above. The electrode design device in the embodiment of the present invention is described below. Figure 7 , an embodiment of the electrode design device in the embodiment of the present invention includes:

[0074] An analysis module 701 is used to obtain design parameters of the piezoelectric actuator, perform modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtain modal analysis results;

[0075] A division module 702 is used to obtain a design region image of the upper driving electrode, divide the design region image to obtain a plurality of divided regions, and set an independent variable for each divided region;

[0076] An acquisition module 703 is used to acquire displacement information corresponding to the divided area based on the modal analysis result;

[0077] The assignment module 704 is used to assign values ​​to the independent variables of the divided areas based on the displacement information, stop the assignment when a preset assignment stop condition is met, and obtain the assignment result;

[0078] A construction module 705, used to construct a three-dimensional model of the upper driving electrode based on the assignment result;

[0079] Based on the same idea as the method in the above embodiment, the device provided by the present application can implement the method in the above embodiment.

[0080] above Figure 7 The electrode design device in the embodiment of the present invention is described in detail from the perspective of modular functional entities, and the electrode design device in the embodiment of the present invention is described in detail from the perspective of hardware processing.

[0081] Figure 8 800 may have relatively large differences due to different configurations or performances, and may include one or more processors (central processing units, CPU) 810 (for example, one or more processors) and memory 820, and one or more storage media 830 (for example, one or more mass storage devices) storing application programs 833 or data 832. Among them, the memory 820 and the storage medium 830 may be short-term storage or permanent storage. The program stored in the storage medium 830 may include one or more modules (not shown in the figure), and each module may include a series of instruction operations in the electrode design device 800. Furthermore, the processor 810 may be configured to communicate with the storage medium 830, and execute a series of instruction operations in the storage medium 830 on the electrode design device 800 to implement the steps of the electrode design method provided in the above-mentioned method embodiments.

[0082] The electrode design device 800 may also include one or more power supplies 840, one or more wired or wireless network interfaces 850, one or more input and output interfaces 860, and / or one or more operating systems 831, such as Windows Serve, Mac OS X, Unix, Linux, FreeBSD, etc. Those skilled in the art will appreciate that the electrode design device structure shown in the present application does not constitute a limitation on the electrode design device, and may include more or less components than shown in the figure, or combine certain components, or arrange components differently.

[0083] The present invention also provides a computer-readable storage medium, which may be a non-volatile computer-readable storage medium or a volatile computer-readable storage medium. Instructions are stored in the computer-readable storage medium. When the instructions are executed on a computer, the computer executes the steps of the electrode design method.

[0084] Those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working process of the above-described system, device, or unit can refer to the corresponding process in the aforementioned method embodiment and will not be repeated here.

[0085] If the integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention is essentially or the part that contributes to the prior art or the whole or part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including several instructions to enable a computer device (which can be a personal computer, server, or network device, etc.) to perform all or part of the steps of the method described in each embodiment of the present invention. The aforementioned storage medium includes: U disk, mobile hard disk, read-only memory (ROM), random access memory (RAM), disk or optical disk and other media that can store program code.

[0086] See also Fig. 9 The present invention also provides a piezoelectric actuator, which includes an upper driving electrode, a piezoelectric material, a lower driving electrode and a vibration plate arranged in sequence from top to bottom, and the upper driving electrode is designed based on any of the electrode design methods described above.

[0087] Finally, it should be noted that the above description is only a preferred example of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An electrode design method, characterized in that: include: Acquire design parameters of the piezoelectric actuator, perform modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtain modal analysis results; The design area image of the upper driving electrode is obtained, and the design area image is divided to obtain multiple divided areas, and an independent variable is set for each divided area. Specifically: Acquire a design region image of the upper driving electrode, wherein the design region image is a two-dimensional plane image of the upper driving electrode; The design area image is divided into multiple division areas by using a structured grid division method; An independent variable γ is set for each partition area, and the initial value of the independent variable γ of each partition area is zero; Based on the modal analysis results, the displacement information corresponding to the divided areas is obtained, specifically: Based on the modal analysis results, the first-order mode of each divided area is obtained, and the displacement vector corresponding to the first-order mode is obtained; Analyze and calculate the displacement vectors one by one to obtain multiple displacement absolute values ​​corresponding to the divided areas; Integrate multiple displacement vectors and displacement absolute values ​​to obtain displacement information; Based on the displacement information, the independent variables of the divided area are assigned values. When the preset assignment stop condition is met, the assignment is stopped and the assignment result is obtained. Specifically: Sort multiple displacement absolute values ​​from small to large to obtain a sorting result; Based on the sorting results, the independent variables γ of the divided regions are assigned values ​​one by one; Accumulate the areas of the divided regions that have been assigned values ​​to obtain the assigned area; When the assigned area meets the preset assignment stop condition, the assignment is stopped and the assignment result is obtained, wherein the assignment result includes the contour information of the assigned divided area; A three-dimensional model of the upper driving electrode is constructed based on the assignment results.

2. An electrode design method according to claim 1, characterized in that: The obtaining of the design parameters of the piezoelectric actuator, and performing modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator to obtain modal analysis results specifically includes: Acquire design parameters of the piezoelectric actuator, and construct a three-dimensional model of the piezoelectric actuator using finite element modeling software based on the acquired design parameters; Obtaining analysis requirements, wherein the analysis requirements include constraint conditions, analysis types, and parameters to be solved; Based on the analysis requirements, a finite element solver is used to perform modal analysis calculation on the three-dimensional model of the piezoelectric actuator to obtain modal analysis results, which include fixed frequencies and modal shapes.

3. An electrode design method according to claim 1, characterized in that: The constructing of the three-dimensional model of the upper driving electrode based on the assignment result specifically includes: Based on the contour information of the assigned divided area, a B-spline curve interpolation method is used to perform contour fitting to obtain a two-dimensional contour of the upper driving electrode; The design height of the upper driving electrode is obtained, and the two-dimensional contour is stretched according to the design height of the upper driving electrode to obtain a three-dimensional model of the upper driving electrode.

4. An electrode design device, characterized in that: include: An analysis module, used for obtaining design parameters of the piezoelectric actuator, performing modal analysis on the piezoelectric actuator based on the design parameters of the piezoelectric actuator, and obtaining modal analysis results; The partitioning module is used to obtain the design area image of the upper driving electrode, partition the design area image to obtain multiple partition areas, and set an independent variable for each partition area. Specifically: obtain the design area image of the upper driving electrode, the design area image is a two-dimensional plane diagram of the upper driving electrode; use a structured grid partitioning method to divide the design area image into multiple partition areas; set an independent variable γ for each partition area, and the initial value of the independent variable γ of each partition area is zero; The acquisition module is used to acquire displacement information corresponding to the divided area based on the modal analysis results. Specifically: based on the modal analysis results, the first-order mode of each divided area is acquired, and the displacement vector corresponding to the first-order mode is acquired; the displacement vectors are analyzed and calculated one by one to obtain multiple displacement absolute values ​​corresponding to the divided area; multiple displacement vectors and displacement absolute values ​​are integrated to obtain displacement information; The assignment module is used to assign values ​​to the independent variables of the divided areas based on the displacement information. When the preset assignment stop condition is met, the assignment is stopped and the assignment result is obtained. Specifically, multiple displacement absolute values ​​are sorted from small to large to obtain the sorting result; based on the sorting result, the independent variables γ of the divided areas are assigned one by one; the areas of the assigned divided areas are accumulated to obtain the assigned areas; when the assigned areas meet the preset assignment stop condition, the assignment is stopped and the assignment result is obtained, and the assignment result includes the contour information of the assigned divided areas; A construction module is used to construct a three-dimensional model of the upper driving electrode based on the assignment result.

5. An electrode design device, characterized in that: The electrode design device comprises: a memory and at least one processor, wherein instructions are stored in the memory; At least one of the processors calls the instructions in the memory to enable the electrode design device to perform each step of the electrode design method according to any one of claims 1 to 3.

6. A computer-readable storage medium having instructions stored thereon, characterized in that: When the instructions are executed by a processor, the various steps of the electrode design method according to any one of claims 1 to 3 are implemented.

7. A piezoelectric actuator, comprising an upper driving electrode, a piezoelectric material, a lower driving electrode and a vibration plate arranged in sequence from top to bottom, characterized in that: The upper driving electrode is designed based on the electrode design method according to any one of claims 1-3.

Images