Signal transmission structure and memory

Abstract

The embodiment of the present disclosure relates to the technical field of semiconductor, and provides a signal transmission structure and a memory, the signal transmission structure comprises: a first transmission line having N first parts arranged along a first row at intervals, M second parts arranged along a second row at intervals, and third parts connecting adjacent first parts and second parts; a second transmission line having N fourth parts arranged along the second row at intervals, M fifth parts arranged along the first row at intervals, and sixth parts connecting adjacent fourth parts and fifth parts; in a second direction, the first parts and the fourth parts are opposite and arranged in the same layer, the second parts and the fifth parts are opposite and arranged in the same layer, and the third parts and the sixth parts are insulated from each other; and at least one interference line is located around a combined structure formed by the first transmission line and the second transmission line. The embodiment of the present disclosure is at least beneficial to reducing the interference of the interference line on the first transmission line and the second transmission line.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and in particular to a signal transmission structure and a memory. Background Technology

[0002] In memory applications, as signal transmission rates increase and memory sizes shrink further, the coupling effect between closely spaced signal transmission lines increases, which can easily cause significant interference to the signal.

[0003] For example, in conventional dynamic random access memory (DRAM), multiple sets of transmission lines and complementary transmission lines used for the storage array are all in the same horizontal metal layer and extend parallel to each other side by side. Due to this arrangement, these transmission lines and complementary transmission lines crosstalk each other through the coupling capacitance between these transmission lines, which affects signal transmission. Summary of the Invention

[0004] This disclosure provides a signal transmission structure and a memory, which at least helps to reduce interference from interference lines to the first and second transmission lines.

[0005] According to some embodiments of this disclosure, one aspect of this disclosure provides a signal transmission structure, including: a first transmission line having N first portions arranged at intervals along a first row, M second portions arranged at intervals along a second row, and a third portion connecting adjacent first portions and second portions, wherein the first portions and second portions are spaced apart and alternately arranged, and both the first row and the second row extend along a first direction, wherein N and M are both positive integers; a second transmission line having N fourth portions arranged at intervals along the second row, M fifth portions arranged at intervals along the first row, and a sixth portion connecting adjacent fourth portions and fifth portions, wherein the fourth portions and fifth portions are spaced apart and alternately arranged; wherein, along a second direction, the first portions and fourth portions are opposite each other and arranged on the same layer, the second portions and fifth portions are opposite each other and arranged on the same layer, and the third portions and sixth portions are insulated from each other, and the second direction is perpendicular to the first direction; and at least one interference line located around the combined structure formed by the first transmission line and the second transmission line.

[0006] In some embodiments, the first part and the fifth part are arranged on the same layer.

[0007] In some embodiments, a third portion and a sixth portion together constitute an overlapping region, the length of the first transmission line in the first direction is a first length, the length of the overlapping region in the first direction is a second length, and the ratio of the second length to the first length is less than or equal to 1 / 100.

[0008] In some embodiments, one of the third part and the sixth part includes: a first connecting layer located on a different layer from the first part; two first conductive plugs, wherein the two ends of the first connecting layer are electrically connected to the adjacent first part and the second part respectively through the first conductive plugs, or the two ends of the first connecting layer are electrically connected to the adjacent fourth part and the fifth part respectively through the first conductive plugs; the other of the third part and the sixth part includes: a second connecting layer disposed on the same layer as the first part, wherein the two ends of the second connecting layer are in contact with the adjacent first part and the second part respectively, or the two ends of the second connecting layer are in contact with the adjacent fourth part and the fifth part respectively.

[0009] In some embodiments, the extension direction of the second connecting layer intersects both the first direction and the second direction.

[0010] In some embodiments, one of the third and sixth portions includes: a first connecting layer located on a different layer from the first portion; two first conductive plugs, wherein the two ends of the first connecting layer are electrically connected to the adjacent first and second portions respectively via the first conductive plugs, or the two ends of the first connecting layer are electrically connected to the adjacent fourth and fifth portions respectively via the first conductive plugs; the other of the third and sixth portions includes: a second connecting layer located on a different layer from the first portion; two second conductive plugs, wherein the two ends of the second connecting layer are electrically connected to the adjacent first and second portions respectively via the second conductive plugs, or the two ends of the second connecting layer are electrically connected to the adjacent fourth and fifth portions respectively via the second conductive plugs; wherein the first connecting layer and the second connecting layer are also located on different layers.

[0011] In some embodiments, N is 2 and M is 2.

[0012] In some embodiments, the length of the first transmission line in the first direction is a first length, wherein the ratio of the length of the first portion at one end of the first transmission line to the first length is 1 / 3, the ratio of the length of the second portion at the other end of the first transmission line to the first length is 1 / 3, the ratio of the length of the remaining first portion to the first length is 1 / 6, and the ratio of the length of the remaining second portion to the first length is 1 / 6; or, the ratio of the length of the first portion at one end of the first transmission line to the first length is 1 / 6, the ratio of the length of the second portion at the other end of the first transmission line to the first length is 1 / 6, the ratio of the length of the remaining first portion to the first length is 1 / 3, and the ratio of the length of the remaining second portion to the first length is 1 / 3.

[0013] In some embodiments, the at least one interference line includes: a first interference line located on the side of the first transmission line away from the second transmission line; and / or, a second interference line located on the side of the second transmission line away from the first transmission line.

[0014] In some embodiments, the first interference line and the second interference line are disposed on the same layer, and the first interference line is disposed on the same layer as the first portion; or, the first interference line and the second interference line are disposed on the same layer, and the first interference line and the first portion are located on different layers.

[0015] In some embodiments, both the first interference line and the second interference line extend along the first direction, the length of the first interference line in the first direction is greater than or equal to the first length, and the length of the second interference line in the first direction is greater than or equal to the first length.

[0016] In some embodiments, the first direction and the second direction constitute a reference plane, the orthographic projection of the first transmission line on the reference plane is a first orthographic projection, the orthographic projection of the second transmission line on the reference plane is a second orthographic projection, the orthographic projection of the first interference line on the reference plane is a third orthographic projection, and the orthographic projection of the second interference line on the reference plane is a fourth orthographic projection; the signal transmission structure further includes: a third interference line, the orthographic projection of the third interference line on the reference plane being located between the first orthographic projection and the third orthographic projection; and / or, a fourth interference line, the orthographic projection of the fourth interference line on the reference plane being located between the second orthographic projection and the fourth orthographic projection.

[0017] In some embodiments, the third interference line and the fourth interference line are disposed on the same layer, and the third interference line is disposed on the same layer as the first part; or, the third interference line and the fourth interference line are disposed on the same layer, and the third interference line and the first part are located on different layers.

[0018] In some embodiments, both the third interference line and the fourth interference line extend along the first direction, the length of the third interference line in the first direction is less than the first length, and the length of the fourth interference line in the first direction is less than the first length.

[0019] According to some embodiments of this disclosure, another aspect of this disclosure also provides a memory including the signal transmission structure as described in any of the foregoing claims.

[0020] The technical solutions provided in this disclosure have at least the following advantages:

[0021] It is understandable that the first transmission line is designed with the first, third, and second parts alternately connected in sequence, and the second transmission line is designed with the fourth, sixth, and fifth parts alternately connected in sequence. Furthermore, the first and second parts of the first transmission line are located in different rows, and the fourth and fifth parts of the second transmission line are located in different rows. Along the second direction, the first and fourth parts are directly opposite each other and arranged on the same layer, as are the second and fifth parts. The third and sixth parts are mutually insulated. This achieves a twisting relationship between the transmission paths of the first and second transmission lines, and the first and second transmission lines are mutually insulated. This helps reduce interference from other lines on the first and second transmission lines, improving the accuracy of the signals transmitted by the first and second transmission lines. Attached Figure Description

[0022] One or more embodiments are illustrated by way of example with corresponding pictures in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings represent similar elements. Unless otherwise stated, the figures in the drawings do not constitute a limitation on scale. In order to more clearly illustrate the technical solutions in the embodiments of this disclosure or the conventional technology, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this disclosure. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 A top view schematic diagram of a signal transmission structure provided in an embodiment of this disclosure;

[0024] Figure 2 for Figure 1 A top view schematic diagram of the first transmission line in the signal transmission structure shown;

[0025] Figure 3 for Figure 1 A top view schematic diagram of the second transmission line in the signal transmission structure shown;

[0026] Figure 4 A partial top view schematic diagram of a signal transmission structure provided in an embodiment of the present disclosure, in which the first transmission line and the second transmission line are twisted;

[0027] Figure 5 for Figure 4 A partial top view of the first and second transmission lines in the signal transmission structure shown.

[0028] Figure 6 This is a partial top view schematic diagram of another twisting structure of the first and second transmission lines in a signal transmission structure provided in an embodiment of the present disclosure;

[0029] Figure 7 for Figure 6 A partial top view of the first and second transmission lines in the signal transmission structure shown.

[0030] Figures 8 to 11 Here are four other top view schematic diagrams of the signal transmission structure provided in one embodiment of this disclosure. Detailed Implementation

[0031] As can be seen from the background technology, the coupling effect between some signal transmission lines that are close to each other needs to be reduced.

[0032] This disclosure provides a signal transmission structure and a memory. In the signal transmission structure, the first transmission line is designed with a first part, a third part, and a second part alternately connected in contact, and the second transmission line is designed with a fourth part, a sixth part, and a fifth part alternately connected in contact. The first part and the second part of the first transmission line are located in different rows, and the fourth part and the fifth part of the second transmission line are located in different rows. Along the second direction, the first part and the fourth part are opposite each other and arranged on the same layer, and the second part and the fifth part are opposite each other and arranged on the same layer. The third part and the sixth part are mutually insulated. In this way, the transmission paths of the first transmission line and the second transmission line are twisted to each other, and the first transmission line and the second transmission line are mutually insulated, which helps to reduce the interference of interference lines on the first transmission line and the second transmission line, and improve the accuracy of the signals transmitted by the first transmission line and the second transmission line.

[0033] The embodiments of this disclosure will now be described in detail with reference to the accompanying drawings. However, those skilled in the art will understand that many technical details have been provided in the embodiments of this disclosure to facilitate a better understanding of the embodiments. However, the technical solutions claimed in the embodiments of this disclosure can be implemented even without these technical details and various variations and modifications based on the following embodiments.

[0034] This disclosure provides a signal transmission structure according to an embodiment. The signal transmission structure provided by this disclosure will be described in detail below with reference to the accompanying drawings. Figure 1 A top view schematic diagram of a signal transmission structure provided in an embodiment of this disclosure;

[0035] Figure 2 for Figure 1 A top view schematic diagram of the first transmission line in the signal transmission structure shown; Figure 3 for Figure 1 A top view schematic diagram of the second transmission line in the signal transmission structure shown; Figure 4 A partial top view schematic diagram of a signal transmission structure provided in an embodiment of the present disclosure, in which the first transmission line and the second transmission line are twisted; Figure 5 for Figure 4 A partial top view of the first and second transmission lines in the signal transmission structure shown. Figure 6 This is a partial top view schematic diagram of another twisting structure of the first and second transmission lines in a signal transmission structure provided in an embodiment of the present disclosure; Figure 7 for Figure 6 A partial top view of the first and second transmission lines in the signal transmission structure shown. Figures 8 to 11 Here are four other top view schematic diagrams of the signal transmission structure provided in one embodiment of this disclosure.

[0036] refer to Figures 1 to 3 The signal transmission structure includes: a first transmission line 101, which has N first portions 111 spaced along a first row X1, M second portions 121 spaced along a second row X2, and a third portion 131 connecting adjacent first portions 111 and second portions 121, wherein the first portions 111 and second portions 121 are spaced apart and alternately arranged, and both the first row X1 and the second row X2 extend along a first direction X, where N and M are both positive integers; and a second transmission line 102, which has N fourth portions 112 spaced along a second row X2, M fifth portions 122 spaced along a first row X1, and a sixth portion 132 connecting adjacent fourth portions 112 and fifth portions 122, wherein the fourth portions 112 and fifth portions 122 are spaced apart and alternately arranged.

[0037] Along the second direction Y, the first part 111 and the fourth part 112 are opposite each other and arranged on the same layer, the second part 121 and the fifth part 122 are opposite each other and arranged on the same layer, and the third part 131 and the sixth part 132 are insulated from each other. The second direction Y is perpendicular to the first direction X. At least one interference line 103 is located around the combined structure formed by the first transmission line 101 and the second transmission line 102.

[0038] Understandably, reference Figure 2 In the first transmission line 101, the first part 111, the third part 131, and the second part 121 are alternately connected in sequence, and the first part 111 and the second part 121 are located in different rows. This achieves a layout where the first transmission line 101 extends along the first direction X and bends vertically in the second direction Y, resulting in the first transmission line 101 having a wave-like overall shape. (Reference) Figure 3 In the second transmission line 102, the fourth part 112, the sixth part 132 and the fifth part 122 are alternately connected in sequence, and the fourth part 112 and the fifth part 122 are located in different rows. In this way, the second transmission line 102 extends along the first direction X and bends up and down in the second direction Y, so that the second transmission line 102 presents a wave-like shape as a whole.

[0039] Moreover, reference Figure 1 Along the second direction Y, the first portion 111 and the fourth portion 112 are opposite each other and arranged on the same layer, as are the second portion 121 and the fifth portion 122. Thus, the first portion 111 and the fifth portion 122 are arranged alternately and spaced along the first row X1, and the fourth portion 112 and the second portion 121 are arranged alternately and spaced along the second row X2, to achieve mutual twisting between the transmission paths of the first transmission line 101 and the second transmission line 102. Furthermore, the first direction X and the second direction Y constitute a reference plane, and the third portion 131 and the sixth portion 132 are mutually insulated, ensuring electrical insulation between the overlapping areas of the orthographic projections of the first transmission line 101 and the second transmission line 102 on the reference plane, thereby achieving mutual insulation between the first transmission line 101 and the second transmission line 102.

[0040] In summary, the arrangement of the transmission paths of the first transmission line 101 and the second transmission line 102 being twisted together and insulated from each other helps to reduce the interference of the interference line 103 on the first transmission line 101 and the second transmission line 102, thereby improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0041] It should be noted that, for the sake of simplicity and clarity in the diagram, Figures 1 to 3The third part 131 and the sixth part 132 are drawn in a simplified way. The third part 131 and the sixth part 132 will be explained in detail later.

[0042] The signal transmission structure provided in one embodiment of this disclosure will be described in more detail below with reference to the accompanying drawings.

[0043] In some embodiments, reference Figures 1 to 3 The first part 111 and the fifth part 122 are arranged on the same layer. It can be understood that, based on the first part 111 and the fourth part 112 being arranged on the same layer, if the first part 111 and the fifth part 122 are also arranged on the same layer, then the fourth part 112 and the fifth part 122 are also arranged on the same layer. That is, all parts of the second transmission line 102 except for the sixth part 132 can be arranged on the same layer. This helps to reduce the overall layout space occupied by the second transmission line 102 in the signal transmission structure, and also reduces the overall transmission path length of the second transmission line 102. Furthermore, based on the second part 121 and the fifth part 122 being arranged on the same layer, if the first part 111 and the fifth part 122 are also arranged on the same layer, then the first part 111 and the second part 121 are also arranged on the same layer. That is, all parts of the first transmission line 101 except for the third part 131 can be arranged on the same layer. This helps to reduce the overall layout space occupied by the first transmission line 101 in the signal transmission structure, and also reduces the overall transmission path length of the first transmission line 101.

[0044] Furthermore, the remaining portion of the first transmission line 101, excluding the third part 131, and the remaining portion of the second transmission line 102, excluding the sixth part 132, are also arranged on the same layer. It can be understood that the first transmission line 101 and the second transmission line 102, except for the areas where their orthographic projections on the reference plane overlap, can be arranged on the same layer. That is, the spacing between the first transmission line 101 and the second transmission line 102 is relatively close. Thus, designing a layout where the transmission paths of the first transmission line 101 and the second transmission line 102 twist to each other is more conducive to reducing the interference of the interference line 103 on the first transmission line 101 and the second transmission line 102, thereby improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102. Moreover, the fact that the first transmission line 101 and the second transmission line 102, except for the areas where their orthographic projections on the reference plane overlap, can be arranged on the same layer helps to further concentrate the overall layout area of ​​the first transmission line 101 and the second transmission line 102 in the signal transmission structure.

[0045] In some embodiments, reference Figures 1 to 3A third part 131 and a sixth part 132 together constitute an overlapping region 104. The length of the first transmission line 101 in the first direction X is a first length L1, and the length of the overlapping region 104 in the first direction X is a second length L2. The ratio of the second length L2 to the first length L1 is less than or equal to 1 / 100.

[0046] It is understandable that the third part 131 realizes the twist of the first transmission line 101 from the first row X1 to the second row X2 or from the second row X2 to the first row X1, and the sixth part 132 realizes the twist of the second transmission line 102 from the first row X1 to the second row X2 or from the second row X2 to the first row X1. Moreover, the first part 111 and the fifth part 122 are both arranged at intervals along the first row X1, and the second part 121 and the fourth part 112 are both arranged at intervals along the second row X2. Therefore, the orthographic projection of a third part 131 and a sixth part 132 on the reference plane will overlap. Thus, the region jointly formed by a third part 131 and a sixth part 132 is called the overlapping region 104.

[0047] It should be noted that the first transmission line 101 has a relatively long overall length in the first direction X, i.e., the first length L1. The first portion 111 and the second portion 121 extending along the first direction X are mainly used for signal transmission, meaning that the first portion 111 and the second portion 121 together have a relatively long length in the first direction X. The third portion 131 is mainly used to realize the twisting of the first transmission line 101. Therefore, the length of the third portion 131 in the first direction X, i.e., the length of the overlapping region 104 in the first direction X, can be achieved by being relatively short. Thus, setting the ratio of the second length L2 to the first length L1 to be less than or equal to 1 / 100 is beneficial for realizing the twisting of the first transmission line 101 without affecting the signal transmission of the first transmission line 101.

[0048] Furthermore, along the second direction Y, the first part 111 and the fourth part 112 are opposite each other and arranged on the same layer, and the second part 121 and the fifth part 122 are opposite each other and arranged on the same layer. Therefore, the length of the second transmission line 102 in the first direction X is also the first length L1, and the length of the sixth part 132 in the first direction X is also the second length L2. Thus, setting the ratio of the second length L2 to the first length L1 to be less than or equal to 1 / 100 is beneficial for achieving the twisting of the second transmission line 102 without affecting signal transmission.

[0049] The third part 131 implements the twisting of the first transmission line 101, and the sixth part 132 implements the twisting of the second transmission line 102, including but not limited to the following four embodiments.

[0050] In some embodiments, reference Figure 4 and Figure 5The sixth part 132 may include: a first connecting layer 105, located on a different layer from the first part 111; two first conductive plugs 115, the two ends of the first connecting layer 105 being electrically connected to the adjacent fourth part 112 and fifth part 122 respectively through the first conductive plugs 115; the third part 131 may include: a second connecting layer 125, disposed on the same layer as the first part 111, the two ends of the second connecting layer 125 being in contact with the adjacent first part 111 and second part 121 respectively. It can be understood that the first transmission line 101 is entirely on the same layer, and the second transmission line 102, except for the sixth part 132, is entirely on the same layer.

[0051] It should be noted that, Figure 4 and Figure 5 Taking the sixth part 132, which includes a first connecting layer 105 and two first conductive plugs 115, and the third part 131, which includes a second connecting layer 125, as an example, in practical applications, the specific construction of the third part 131 and the sixth part 132 can be selected according to actual needs.

[0052] For example, in some other embodiments, the third part 131 may include: a first connecting layer 105, located on a different layer from the first part 111; two first conductive plugs 115, the two ends of the first connecting layer 105 being electrically connected to the adjacent first part 111 and second part 121 respectively through the first conductive plugs 115; the sixth part 132 may include: a second connecting layer 125, disposed on the same layer as the first part 111, the two ends of the second connecting layer 125 being contacted and connected to the adjacent fourth part 112 and fifth part 122 respectively. It can be understood that the second transmission line 102 is entirely on the same layer, and the first transmission line 101, except for the third part 131, is entirely on the same layer.

[0053] In the two embodiments described above, when either the first transmission line 101 or the second transmission line 102 is twisted, it will not jump to another metal layer, meaning that the entire line is in the same layer. This is beneficial for reducing the overall transmission path length while achieving the twist. When the other line is twisted, it needs to jump to another metal layer, which requires the auxiliary connection of the first conductive plug 115 to achieve mutual insulation between the first transmission line 101 and the second transmission line 102.

[0054] In both of the above embodiments, the extension direction of the second connecting layer 125 can intersect both the first direction X and the second direction Y. It should be noted that... Figure 4 and Figure 5The example uses a Z-shaped orthographic projection of the second connecting layer 125 onto the reference plane. In practical applications, the specific shape of the orthographic projection of the second connecting layer 125 onto the reference plane is not limited. It is only necessary to achieve contact connection between adjacent first parts 111 and second parts 121. For example, the second connecting layer 125 is a long strip-shaped connecting layer extending in a fixed direction, and its extension direction intersects both the first direction X and the second direction Y.

[0055] In some other embodiments, reference is made to Figure 6 and Figure 7 The sixth part 132 includes: a first connecting layer 105, which is located on a different layer from the first part 111; two first conductive plugs 115, the two ends of the first connecting layer 105 being electrically connected to the adjacent fourth part 112 and fifth part 122 respectively through the first conductive plugs 115; the third part 131 includes: a second connecting layer 125, which is located on a different layer from the first part 111; two second conductive plugs 135, the two ends of the second connecting layer 125 being electrically connected to the adjacent first part 111 and second part 121 respectively through the second conductive plugs 135; wherein, the first connecting layer 105 and the second connecting layer 125 are also located on different layers.

[0056] It should be noted that, Figure 6 and Figure 7 The example uses the sixth part 132, which includes a first connecting layer 105 and two first conductive plugs 115, and the third part 131, which includes a second connecting layer 125 and two second conductive plugs 135. In practical applications, the specific construction of the third part 131 and the sixth part 132 can be selected according to actual needs.

[0057] For example, in some embodiments, the third part 131 includes: a first connecting layer 105, located on a different layer from the first part 111; two first conductive plugs 115, the two ends of the first connecting layer 105 being electrically connected to the adjacent first part 111 and second part 121 respectively through the first conductive plugs 115; the sixth part 132 includes: a second connecting layer 125, located on a different layer from the first part 111; two second conductive plugs 135, the two ends of the second connecting layer 125 being electrically connected to the adjacent fourth part 112 and fifth part 122 respectively through the second conductive plugs 135; wherein the first connecting layer 105 and the second connecting layer 125 are also located on different layers.

[0058] It is understood that the first connecting layer 105, the second connecting layer 125, and the first part 111 are located in three different metal layers. Thus, when either the first transmission line 101 or the second transmission line 102 is twisted, it will jump to another metal layer, and the first transmission line 101 and the second transmission line 102 are mutually insulated.

[0059] It should be noted that, in order to illustrate the first conductive plug 115, Figures 4 to 7 The first connecting layer 105 is drawn using perspective; to illustrate the second conductive plug 135, Figure 6 and Figure 7 The second connecting layer 125 is drawn using a perspective drawing method.

[0060] In the above embodiments, reference is made to Figure 5 and Figure 7 At least one of the first connecting layer 105 and the second connecting layer 125 includes: a first sub-connecting layer 145 and a second sub-connecting layer 155 arranged in parallel, both extending along a second direction Y; and a third sub-connecting layer 165, which contacts and connects the first sub-connecting layer 145 and the second sub-connecting layer 155. One end of the first sub-connecting layer 145, away from the third sub-connecting layer 165, is in contact with a conductive plug, and one end of the second sub-connecting layer 155, away from the third sub-connecting layer 165, is in contact with another conductive plug. It is understood that the conductive plug here refers to either the first conductive plug 115 or the second conductive plug 135.

[0061] It should be noted that, for the sake of simplicity and clarity in the diagram, Figure 4 and Figure 6 The first sub-connection layer 145, the second sub-connection layer 155, and the third sub-connection layer 165 are not shown in the diagram. Figure 5 and Figure 7 The first sub-connecting layer 145, the second sub-connecting layer 155, and the third sub-connecting layer 165 in the first connecting layer 105 and the second connecting layer 125 are indicated by dashed lines. Furthermore, Figure 5 and Figure 7 Taking the example where both the first connection layer 105 and the second connection layer 125 include a first sub-connection layer 145, a second sub-connection layer 155, and a third sub-connection layer 165, in practical applications, one of the first connection layer 105 and the second connection layer 125 may include the first sub-connection layer 145, the second sub-connection layer 155, and the third sub-connection layer 165, while the other may implement the twisting of the first transmission line 101 or the second transmission line 102 in other forms.

[0062] In some embodiments, the first sub-connecting layer 145, the second sub-connecting layer 155, and the third sub-connecting layer 165 can be integrally formed structures, that is, at least one of the first connecting layer 105 and the second connecting layer 125 is an integrally formed structure.

[0063] In some embodiments, the third sub-connecting layer 165 may extend along the first direction X. It is understood that the first sub-connecting layer 145, the second sub-connecting layer 155, and the third sub-connecting layer 165 all extend along either the first direction X or the second direction Y. This reduces the difficulty of fabricating the first sub-connecting layer 145, the second sub-connecting layer 155, and the third sub-connecting layer 165, thereby reducing the cost of forming the first connecting layer 105 and / or the second connecting layer 125. In other embodiments, the third sub-connecting layer 165 may extend along a fixed direction, intersecting both the first direction X and the second direction Y.

[0064] In some embodiments, reference Figures 1 to 3 N is 2, M is 2.

[0065] It should be noted that, Figures 1 to 3 The example only uses N = 2 and M = 2. In practical applications, N can be equal to M, or the difference between N and M can be 1.

[0066] The following detailed explanation uses an example where N is 2 and M is 2.

[0067] In some embodiments, reference Figures 1 to 3 The length of the first transmission line 101 in the first direction X is a first length L1. The length of the first part 111 at one end of the first transmission line 101 is 1 / 3 of the first length L1. The length of the second part 121 at the other end of the first transmission line 101 is 1 / 3 of the first length L1. The length of the remaining first part 111 is 1 / 6 of the first length L1. The length of the remaining second part 121 is 1 / 6 of the first length L1.

[0068] It is understandable that the first part 111 and the fourth part 112 are directly opposite each other, and the second part 121 and the fifth part 122 are directly opposite each other. Therefore, the second transmission line 102 and the first transmission line 101 are arranged in the same way. That is, the length of the second transmission line 102 in the first direction X is also the first length L1. The ratio of the length of the fourth part 112 at one end of the second transmission line 102 to the first length L1 is also 1 / 3. The ratio of the length of the fifth part 122 at the other end of the first transmission line 101 to the first length L1 is also 1 / 3. The ratio of the length of the remaining fourth part 112 to the first length L1 is also 1 / 6. The ratio of the length of the remaining fifth part 122 to the first length L1 is also 1 / 6.

[0069] As can be seen, both the first transmission line 101 and the second transmission line 102 are twisted three times each, and the twist points correspond one-to-one. Thus, even if the relative positional relationship between the interference line 103 and the combined structure formed by the first transmission line 101 and the second transmission line 102 is uncertain, that is, the interference line 103 may be located anywhere around the combined structure formed by the first transmission line 101 and the second transmission line 102, the combined layout of the first transmission line 101 and the second transmission line 102 is conducive to reducing the interference of the interference line 103 on the first transmission line 101 and the second transmission line 102, so as to improve the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0070] It should be noted that, Figures 1 to 3 In the example, the ratio of the length of the first part 111 and the length of the second part 121 located at the end of the first transmission line 101 to the first length L1 is 1 / 3, and the ratio of the remaining length of the first part 111 and the length of the second part 121 to the first length L1 is 1 / 6. In practical applications, the length of the first part 111 and the length of the second part 121 can be selected according to the position of the actual interference line 103 relative to the first transmission line 101 and the second transmission line 102.

[0071] For example, in some other embodiments, the ratio of the length of the first portion 111 at one end of the first transmission line 101 to the first length L1 can be 1 / 6, the ratio of the length of the second portion 121 at the other end of the first transmission line 101 to the first length L1 can be 1 / 6, the ratio of the length of the remaining first portion 111 to the first length L1 can be 1 / 3, and the ratio of the length of the remaining second portion 121 to the first length L1 can be 1 / 3. Similarly, the ratio of the length of the fourth portion 112 at one end of the second transmission line 102 to the first length L1 is also 1 / 6, the ratio of the length of the fifth portion 122 at the other end of the first transmission line 101 to the first length L1 is also 1 / 6, the ratio of the length of the remaining fourth portion 112 to the first length L1 is also 1 / 3, and the ratio of the length of the remaining fifth portion 122 to the first length L1 is also 1 / 3.

[0072] In some embodiments, reference Figure 1 At least one interference line 103 may include: a first interference line 113, located on the side of the first transmission line 101 away from the second transmission line 102; and a second interference line 123, located on the side of the second transmission line 102 away from the first transmission line 101.

[0073] In other embodiments, at least one interference line 103 may include a first interference line 113 located on the side of the first transmission line 101 away from the second transmission line 102.

[0074] In some other embodiments, at least one interference line 103 may include a second interference line 123 located on the side of the second transmission line 102 away from the first transmission line 101.

[0075] It is understood that the number of interference lines 103 is not limited in one embodiment of this disclosure.

[0076] In some embodiments, the first interference line 113 and the second interference line 123 are arranged on the same layer, and the first interference line 113 is arranged on the same layer as the first portion 111. It is understood that the first portion 111 and the second portion 121 of the first transmission line 101 constitute the main body of the first transmission line 101, and the fourth portion 112 and the fifth portion 122 of the second transmission line 102 constitute the main body of the second transmission line 102. Thus, the first interference line 113, the second interference line 123, the main body of the first transmission line 101, and the main body of the second transmission line 102 are all arranged on the same layer. In this case, the combined twisting method of the first transmission line 101 and the second transmission line 102 can effectively reduce the interference of the first interference line 113 and the second interference line 123 on the first transmission line 101 and the second transmission line 102, thereby improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0077] In other embodiments, the first interference line 113 and the second interference line 123 are disposed on the same layer, and the first interference line 113 and the first portion 111 may be located on different layers.

[0078] In some embodiments, the first interference line 113 and the second interference line 123 both extend along the first direction X, the length of the first interference line 113 in the first direction X is greater than or equal to the first length L1, and the length of the second interference line 123 in the first direction X is greater than or equal to the first length L1.

[0079] In some embodiments, the length of the first interference line 113 in the first direction X is equal to the length of the second interference line 123 in the first direction X. For example, in the first direction X, the length of the first interference line 113 and the length of the second interference line 123 are both a first length L1.

[0080] In some embodiments, the vertical distance from the first interference line 113 to the first transmission line 101 is equal to the vertical distance from the second interference line 123 to the second transmission line 102.

[0081] In some embodiments, the first direction X and the second direction Y constitute a reference plane, the orthographic projection of the first transmission line 101 on the reference plane is the first orthographic projection, the orthographic projection of the second transmission line 102 on the reference plane is the second orthographic projection, the orthographic projection of the first interference line 113 on the reference plane is the third orthographic projection, and the orthographic projection of the second interference line 123 on the reference plane is the fourth orthographic projection.

[0082] In one example, the signal transmission structure may include: a third interference line 133, the orthographic projection of the third interference line 133 on the reference plane being located between the first orthographic projection and the third orthographic projection; and a fourth interference line 143, the orthographic projection of the fourth interference line 143 on the reference plane being located between the second orthographic projection and the fourth orthographic projection.

[0083] In another example, the signal transmission structure may include a third interference line 133, the orthographic projection of the third interference line 133 on the reference plane being located between the first orthographic projection and the third orthographic projection.

[0084] In yet another example, the signal transmission structure may include a fourth interference line 143, the orthographic projection of which on the reference plane lies between the second orthographic projection and the fourth orthographic projection.

[0085] It is understood that, along the first direction X, the signal transmission structure includes a first overlapping region 104, a second overlapping region 104 and a third overlapping region 104 arranged at one interval, and the positions of the third interference line 133 and the fourth interference line 143 relative to the first transmission line 101 and the second transmission line 102 include, but are not limited to, the following four embodiments.

[0086] In some embodiments, reference Figure 8 Along the second direction Y, the third interference line 133 and the fourth interference line 143 are directly opposite the second overlapping region 104. In one example, along the second direction Y, the third interference line 133 is further opposite to at least a portion of the fifth portion 122 of the intermediate region, and / or at least a portion of the first portion 111 of the intermediate region; the fourth interference line 143 is further opposite to at least a portion of the second portion 121 of the intermediate region, and / or at least a portion of the fourth portion 112 of the intermediate region.

[0087] In other embodiments, reference is made to... Figure 9 Along the second direction Y, the third interference line 133 and the fourth interference line 143 are directly opposite the third overlapping region 104. In one example, along the second direction Y, the third interference line 133 is further opposite to at least a portion of the first portion 111 located in the middle region, and / or at least a portion of the fifth portion 122 located at the end; the fourth interference line 143 is further opposite to at least a portion of the fourth portion 112 located in the middle region, and / or at least a portion of the second portion 121 located at the end.

[0088] In some other embodiments, reference is made to Figure 10Along the second direction Y, the third interference line 133 and the fourth interference line 143 are directly opposite the first overlapping region 104. In one example, along the second direction Y, the third interference line 133 is further opposite to at least a portion of the first portion 111 located at the end, and / or at least a portion of the fifth portion 122 located in the middle region; the fourth interference line 143 is further opposite to at least a portion of the fourth portion 112 located at the end, and / or at least a portion of the second portion 121 located in the middle region.

[0089] In some other embodiments, reference is made to Figure 11 Along the second direction Y, the third interference line 133 and the fourth interference line 143 are not directly opposite to either of the overlapping regions 104. In one example, along the second direction Y, the third interference line 133 is directly opposite to at least a portion of the first portion 111 at the end; the fourth interference line 143 is directly opposite to at least a portion of the fourth portion 112 at the end.

[0090] It is understandable that, in the four examples above, the combined twisting method of the first transmission line 101 and the second transmission line 102 is beneficial to reduce the interference of the first interference line 113 and the second interference line 123 on the first transmission line 101 and the second transmission line 102, while also reducing the interference of the third interference line 133 and the fourth interference line 143 on the first transmission line 101 and the second transmission line 102, thereby further improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0091] In the above embodiment, the third interference line 133 and the fourth interference line 143 are arranged on the same layer, and the third interference line 133 is arranged on the same layer as the first part 111. It can be understood that the first part 111 and the second part 121 of the first transmission line 101 constitute the main body of the first transmission line 101, and the fourth part 112 and the fifth part 122 of the second transmission line 102 constitute the main body of the second transmission line 102. Thus, the third interference line 133, the fourth interference line 143, the main body of the first transmission line 101, and the main body of the second transmission line 102 are all arranged on the same layer. In this case, the combined twisting method of the first transmission line 101 and the second transmission line 102 effectively reduces the interference of the first interference line 113 and the second interference line 123 to the first transmission line 101 and the second transmission line 102, and also helps to reduce the interference of the third interference line 133 and the fourth interference line 143 to the first transmission line 101 and the second transmission line 102, thereby further improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0092] In the above embodiments, the third interference line 133 and the fourth interference line 143 are arranged on the same layer, and the third interference line 133 and the first part 111 may be located on different layers.

[0093] It is understood that in the various embodiments described above, when the first interference line 113 and the second interference line 123 are arranged on the same layer, and the third interference line 133 and the fourth interference line 143 are arranged on the same layer, the first interference line 113 and the third interference line 133 can also be arranged on the same layer, that is, the first interference line 113, the second interference line 123, the third interference line 133 and the fourth interference line 143 are all arranged on the same layer. In one example, the first interference line 113, the second interference line 123, the third interference line 133 and the fourth interference line 143 can all be arranged on the same layer as the first part 111.

[0094] In the above embodiments, both the third interference line 133 and the fourth interference line 143 extend along the first direction X. The length of the third interference line 133 in the first direction X is less than the first length L1, and the length of the fourth interference line 143 in the first direction X is less than the first length L1.

[0095] In some embodiments, the length of the third interference line 133 in the first direction X can be equal to the length of the fourth interference line 143 in the first direction X.

[0096] In some embodiments, the vertical distance from the third interference line 133 to the first transmission line 101 is equal to the vertical distance from the fourth interference line 143 to the second transmission line 102.

[0097] In one example, refer to Figure 8 The length of a first portion 111 at one end of the first transmission line 101 is 1 / 3 of the length of the first length L1, the length of a second portion 121 at the other end of the first transmission line 101 is 1 / 3 of the length of the first length L1, the length of the remaining first portion 111 is 1 / 6 of the length of the first length L1, and the length of the remaining second portion 121 is 1 / 6 of the length of the first length L1; the length of a fourth portion 112 at one end of the second transmission line 102 is 1 / 3 of the length of the first length L1, the length of a fifth portion 122 at the other end of the first transmission line 101 is 1 / 3 of the length of the first length L1, the length of the remaining fourth portion 112 is 1 / 6 of the length of the first length L1, and the length of the remaining fifth portion 122 is 1 / 6 of the length of the first length L1.

[0098] Furthermore, along the second direction Y, the third interference line 133 and the fourth interference line 143 are directly opposite the second overlapping area 104. Along the second direction Y, the third interference line 133 is also directly opposite the fifth part 122 located in the middle region and the first part 111 located in the middle region; the fourth interference line 143 is also directly opposite the second part 121 located in the middle region and the fourth part 112 located in the middle region.

[0099] Specifically, along the second direction Y, the distance between the first part 111 of length (1 / 3)L1 and the closer first interference line 113 is the first distance, and the distance between the second part 121 of length (1 / 3)L1 and the closer second interference line 123 is the second distance, and the first distance is equal to the second distance. Along the second direction Y, the distance between the first part 111 of length (1 / 6)L1 and the closer third interference line 133 is the third distance, and the distance between the second part 121 of length (1 / 6)L1 and the closer fourth interference line 143 is the fourth distance, and the third distance is equal to the fourth distance.

[0100] It is understood that in the scenario described above, both the first transmission line 101 and the second transmission line 102 are twisted three times, and the twists correspond one-to-one. Taking the first transmission line 101 as an example, assuming that the first transmission line 101 has not been twisted, that is, the entire first transmission line 101 extends along the first direction X, then the coupling effect of the entire first interference line 113 on the entire untwisted first transmission line 101 is defined as parameter A, the coupling effect of the entire second interference line 123 on the entire untwisted first transmission line 101 is defined as parameter D, the coupling effect of the entire third interference line 133 on the entire untwisted first transmission line 101 is defined as parameter E, and the coupling effect of the entire fourth interference line 143 on the entire untwisted first transmission line 101 is defined as parameter F.

[0101] Thus, for the entire untwisted first transmission line 101, the total value C1 of the coupling effect caused by the first interference line 113, the second interference line 123, the third interference line 133 and the fourth interference line 143 on the entire untwisted first transmission line 101 is equal to the sum of A, D, E and F, that is, C1 = A + D + E + F.

[0102] Compared with the exemplary description provided in one embodiment of this disclosure, i.e., referring to Figure 8 The first transmission line 101 and the second transmission line 102 are each twisted 3 times, and the twist points correspond one-to-one.

[0103] In this case, the first transmission line 101 is relatively close to the first interference line 113, that is, the portion at the first distance only includes a first part 111 with a length of (1 / 3)L1 and a first part 111 with a length of (1 / 6)L1. It can be understood that the coupling effect of the first interference line 113 on the first transmission line 101, which has been twisted 3 times, is (1 / 3+1 / 6)A.

[0104] The first transmission line 101 is relatively close to the second interference line 123, meaning that the portion at the second distance only includes a second part 121 of length (1 / 3)L1 and a second part 121 of length (1 / 6)L1. It can be understood that the coupling effect of the second interference line 123 on the first transmission line 101, which has been twisted three times, is (1 / 3 + 1 / 6)D.

[0105] The first transmission line 101 is relatively close to the third interference line 133, meaning that the portion at the third distance only includes a first part 111 with a length of (1 / 6)L1. It can be understood that the coupling effect of the third interference line 133 on the first transmission line 101, which has been twisted three times, is (1 / 6)E.

[0106] The first transmission line 101 is relatively close to the fourth interference line 143, meaning that the portion at the fourth distance only includes a second part 121 of length (1 / 6)L1. It is understandable that the coupling effect of the fourth interference line 143 on the first transmission line 101, which has been twisted three times, is (1 / 6)F.

[0107] Therefore, for the first transmission line 101, which is twisted three times, the total coupling effect C2 caused by the first interference line 113, the second interference line 123, the third interference line 133, and the fourth interference line 143 is equal to the sum of (1 / 3 + 1 / 6)A, (1 / 3 + 1 / 6)D, (1 / 6)E, and (1 / 6)F, i.e., C2 = (1 / 2)A + (1 / 2)D + (1 / 6)E + (1 / 6)F. It is evident that C2 is much smaller than C1, meaning that twisting the first transmission line 101 three times helps reduce the coupling effect caused by the first interference line 113, the second interference line 123, the third interference line 133, and the fourth interference line 143. Similarly, twisting the second transmission line 102 three times, compared to not twisting it, also helps reduce the coupling effect caused by the first interference line 113, the second interference line 123, the third interference line 133, and the fourth interference line 143. Therefore, the combined layout of the first transmission line 101 and the second transmission line 102 is beneficial to reducing the interference of the interference line 103 on the first transmission line 101 and the second transmission line 102, thereby improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0108] In some embodiments, one of the first transmission line 101 and the second transmission line 102 is a global input / output line, and the other of the first transmission line 101 and the second transmission line 102 is a complementary global input / output line.

[0109] In some embodiments, the signal transmission structure may include: P interference lines 103, wherein the P interference lines 103 are located on the side of the first transmission line 101 away from the second transmission line 102, and / or on the side of the second transmission line 102 away from the first transmission line 101, where P is a positive integer; wherein the coupling effect of the P interference lines 103 on the first transmission line 101 is equal to the coupling effect of the P interference lines 103 on the second transmission line 102. It is understood that ensuring that the coupling effect of the P interference lines on the first transmission line 101 is equal to the coupling effect on the second transmission line 102 is beneficial to making the interference level of the signal in the first transmission line 101 consistent with the interference level of the signal in the second transmission line 102, thereby improving the accuracy of the signals transmitted by the first transmission line 101 and the second transmission line 102.

[0110] Another embodiment of this disclosure also provides a memory including a signal transmission structure as provided in one embodiment of this disclosure. This facilitates improving the accuracy of signal reception and transmission in the memory device through the signal transmission structure, thereby enhancing the memory's performance.

[0111] In some embodiments, the memory may be a DDR memory, such as a DDR4 memory, DDR5 memory, DDR6 memory, LPDDR4 memory, LPDDR5 memory, or LPDDR6 memory.

[0112] Those skilled in the art will understand that the above embodiments are specific examples of implementing this disclosure, and in practical applications, various changes in form and detail may be made without departing from the spirit and scope of the embodiments of this disclosure. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the embodiments of this disclosure; therefore, the scope of protection of the embodiments of this disclosure should be determined by the scope defined in the claims.

Claims

1. A signal transmission structure, characterized in that, include: A first transmission line has N first portions arranged at intervals along a first row, M second portions arranged at intervals along a second row, and a third portion connecting adjacent first portions and second portions, wherein the first portions and second portions are spaced apart and alternately arranged, and both the first row and the second row extend along a first direction, wherein N and M are both positive integers. The second transmission line has N fourth portions arranged at intervals along the second row, M fifth portions arranged at intervals along the first row, and a sixth portion connecting adjacent fourth portions and fifth portions, wherein the fourth portions and fifth portions are spaced apart and alternately arranged. In this configuration, along the second direction, the first part and the fourth part are directly opposite each other and arranged on the same layer, the second part and the fifth part are directly opposite each other and arranged on the same layer, and the third part and the sixth part are mutually insulated. The second direction is perpendicular to the first direction. At least one interference line is located around the combined structure formed by the first transmission line and the second transmission line; N is 2, and M is 2; The length of the first transmission line in the first direction is a first length; Wherein, the length of the first portion at one end of the first transmission line is 1 / 3 of the length of the first portion, the length of the second portion at the other end of the first transmission line is 1 / 3 of the length of the first portion, the length of the remaining first portion is 1 / 6 of the length of the first portion, and the length of the remaining second portion is 1 / 6 of the length of the first portion.

2. The signal transmission structure as described in claim 1, characterized in that, The first part and the fifth part are arranged on the same layer.

3. The signal transmission structure as described in claim 2, characterized in that, The third part and the sixth part together constitute an overlapping area, the length of the first transmission line in the first direction is a first length, the length of the overlapping area in the first direction is a second length, and the ratio of the second length to the first length is less than or equal to 1 / 100.

4. The signal transmission structure as described in claim 1, characterized in that, One of the third and sixth parts includes: a first connecting layer located on a different layer from the first part; two first conductive plugs, the two ends of the first connecting layer being electrically connected to the adjacent first part and the second part respectively through the first conductive plugs, or the two ends of the first connecting layer being electrically connected to the adjacent fourth part and the fifth part respectively through the first conductive plugs; The other of the third and sixth parts includes: a second connecting layer disposed on the same layer as the first part, wherein the two ends of the second connecting layer are respectively in contact with the adjacent first and second parts, or the two ends of the second connecting layer are respectively in contact with the adjacent fourth and fifth parts.

5. The signal transmission structure as described in claim 4, characterized in that, The extension direction of the second connecting layer intersects both the first direction and the second direction.

6. The signal transmission structure as described in claim 1, characterized in that, One of the third and sixth parts includes: a first connecting layer located on a different layer from the first part; two first conductive plugs, the two ends of the first connecting layer being electrically connected to the adjacent first part and the second part respectively through the first conductive plugs, or the two ends of the first connecting layer being electrically connected to the adjacent fourth part and the fifth part respectively through the first conductive plugs; The other of the third and sixth parts includes: a second connecting layer located on a different layer from the first part; two second conductive plugs, wherein the two ends of the second connecting layer are electrically connected to the adjacent first and second parts respectively via the second conductive plugs, or the two ends of the second connecting layer are electrically connected to the adjacent fourth and fifth parts respectively via the second conductive plugs; The first connection layer and the second connection layer are located in different layers.

7. The signal transmission structure as described in claim 1, characterized in that, The at least one interference line includes: A first interference line is located on the side of the first transmission line away from the second transmission line; and / or, The second interference line is located on the side of the second transmission line away from the first transmission line.

8. The signal transmission structure as described in claim 7, characterized in that, The first interference line and the second interference line are arranged on the same layer, and the first interference line is arranged on the same layer as the first part; or, the first interference line and the second interference line are arranged on the same layer, and the first interference line and the first part are located on different layers.

9. The signal transmission structure as described in claim 7, characterized in that, Both the first interference line and the second interference line extend along the first direction, and the length of the first interference line in the first direction is greater than or equal to the first length, and the length of the second interference line in the first direction is greater than or equal to the first length.

10. The signal transmission structure as described in claim 7, characterized in that, The first direction and the second direction constitute a reference plane. The orthographic projection of the first transmission line on the reference plane is the first orthographic projection, the orthographic projection of the second transmission line on the reference plane is the second orthographic projection, the orthographic projection of the first interference line on the reference plane is the third orthographic projection, and the orthographic projection of the second interference line on the reference plane is the fourth orthographic projection. The signal transmission structure also includes: The third interference line, the orthographic projection of the third interference line on the reference plane is located between the first orthographic projection and the third orthographic projection; And / or, The fourth interference line, the orthographic projection of the fourth interference line on the reference plane is located between the second orthographic projection and the fourth orthographic projection.

11. The signal transmission structure as described in claim 10, characterized in that, The third interference line and the fourth interference line are arranged on the same layer, and the third interference line is arranged on the same layer as the first part; or, the third interference line and the fourth interference line are arranged on the same layer, and the third interference line is located on a different layer from the first part.

12. The signal transmission structure as described in claim 10, characterized in that, Both the third interference line and the fourth interference line extend along the first direction. The length of the third interference line in the first direction is less than the first length, and the length of the fourth interference line in the first direction is less than the first length.

13. A memory, characterized in that, Includes the signal transmission structure as described in any one of claims 1 to 12.

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