A profilometer

Abstract

The present invention belongs to the technical field of contour detection equipment, and discloses a contour meter. The contour meter includes a first base and a probe, the probe is installed on the first base; a carrier, the carrier can carry a test piece; a driving mechanism, the driving mechanism can drive the carrier and the test piece to move relative to the probe along a first direction; a detection mechanism, the detection mechanism is electrically connected to the driving mechanism, the detection mechanism can detect that the force on the probe along the first direction is greater than or equal to a preset value, and sends a first signal, the driving mechanism can receive the first signal and stop driving the carrier. Avoid damage to the probe, and then avoid replacing the probe, to ensure test efficiency and test results of the contour meter.

Description

Technical Field

[0001] The present invention relates to the technical field of contour detection equipment, and in particular to a contour meter. Background Art

[0002] A profilometer is an instrument used to test and detect the contour, two-dimensional size, and two-dimensional displacement of an object. It is a precision testing instrument and is widely used in industries such as mechanical processing, motors, auto parts, precision tools, and optical components.

[0003] The profilometer includes a stage, a sensor, and a probe connected to the sensor. The stage is used to carry the workpiece and can drive the workpiece to move. Taking the profilometer detecting the surface profile of the wafer as an example, the working process of the profilometer is roughly as follows: the tip of the probe contacts the surface of the wafer to be measured. When the stage carries the wafer to be measured and slides relative to the probe, the concave and convex structure on the surface of the wafer to be measured causes the probe to float up and down. The sensor senses the floating change, thereby causing the AC carrier waveform to change, and further records the profile of the wafer to be measured. Specifically, the needle tip profile of the probe is a conical surface. When the stage drives the wafer to be measured to move, when the groove depth and protrusion height of the wafer to be measured do not exceed the measuring range of the probe (that is, the height of the conical surface), the probe floats up and down under the guidance of the conical surface to be sensed by the sensor.

[0004] However, in the existing profilometers, when the tester mistakenly pierces the needle tip outside the wafer being tested (for example, in the gap or pore on the surface of the stage), or the groove depth or protrusion height on the surface of the wafer being tested exceeds the range of the selected probe, the probe tip cannot be guided by the conical surface and floats up and down, causing the probe to be continuously subjected to lateral tension, resulting in probe damage. The subsequent replacement of the probe and probe calibration work are complicated, which not only affects the test efficiency, but may also affect the test results of the profilometer. Therefore, there is an urgent need for a profilometer to solve the above problems. Summary of the invention

[0005] The object of the present invention is to provide a profilometer which can identify an abnormal working state of a probe and stop the movement of the stage in time to avoid further damage to the probe.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A profilometer, comprising:

[0008] a first base and a probe, the probe being mounted on the first base;

[0009] A carrier, which can carry the object to be tested;

[0010] A driving mechanism, the driving mechanism being capable of driving the carrier and the object to be tested to move relative to the probe along a first direction;

[0011] The detection mechanism is electrically connected to the driving mechanism, and the detection mechanism can detect that the force applied to the probe along the first direction is greater than or equal to a preset value and send out a first signal. The driving mechanism can receive the first signal and stop driving the carrier.

[0012] Preferably, a slot is provided on the first base, the probe comprises a probe body and a probe connecting portion connected to the probe body, and the probe connecting portion is plugged into the slot along the first direction;

[0013] The detection mechanism includes a torque limiter and a pressure sensor. The torque limiter is installed on the first base. The connecting element of the torque limiter is transmission-connected to the probe. When the force applied to the probe in the first direction is greater than or equal to a preset value, the connecting element moves and triggers the pressure sensor, and the pressure sensor can send the first signal.

[0014] Preferably, a first gear is installed on the probe connecting part, the torque limiter is a gear-type torque limiter, the connecting element is a second gear, the first gear is meshed with the second gear, and when the force applied to the probe in the first direction is greater than or equal to a preset value, the second gear rotates relative to the first base and triggers the pressure sensor.

[0015] Preferably, the pressure sensor comprises a detection end and a mounting end, the mounting end is connected to the first base, the detection end extends between two teeth of the second gear, and the teeth of the second gear press against and trigger the detection end when rotating.

[0016] Preferably, the profilometer further comprises a reset component, which is mounted on the first base, the mounting end is connected to the reset component, and the reset component is configured to reset the detection end.

[0017] Preferably, the reset assembly is a cross spring including a first cross spring bearing, an inner ring sleeve of the first cross spring bearing is connected to the first base, and the mounting end is connected to the outer ring sleeve of the first cross spring bearing.

[0018] Preferably, the reset assembly comprises a rotating shaft and a torsion spring, wherein the rotating shaft is fixed on the first base, the torsion spring is sleeved on the rotating shaft, one end of the torsion spring is fixed to the rotating shaft, and the other end is connected to the mounting end.

[0019] Preferably, the profiler also includes a second base, a follower and a sensor, the first base is pivotally connected to the second base, the follower is connected to the first base, the sensor is arranged on the second base, and the probe can drive the first base to rotate relative to the second base to drive the follower to move relative to the sensor.

[0020] Preferably, the first base is pivotally connected to the second base via a second cross spring bearing, the second base is connected to the inner ring sleeve of the second cross spring bearing, and the first base and the follower are both connected to the outer ring sleeve of the second cross spring bearing.

[0021] Preferably, the sensor is an inductive sensor and comprises a first capacitor plate and a second capacitor plate which are arranged in parallel, and the follower is at least partially arranged between the first capacitor plate and the second capacitor plate.

[0022] Beneficial effects:

[0023] The present invention provides a profiler, in which, during a process in which a driving mechanism drives a carrier and a workpiece to be tested to move relative to a probe along a first direction, the probe and a first base can float to detect the surface profile of the workpiece to be tested, and when the probe tip pierces the outside of the workpiece to be tested, or the depth of a groove or the height of a protrusion on the surface of the workpiece to be tested exceeds the selected probe range, the probe tip cannot be guided by a conical surface and floats up and down, and the force on the probe in the first direction increases. At this time, the detection mechanism detects that the force on the probe in the first direction is greater than or equal to a preset value and sends a first signal, and the driving mechanism receives the first signal and stops driving the carrier to avoid damage to the probe, thereby avoiding replacement of the probe, and ensuring test efficiency and test results of the profiler. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the structure of a profilometer provided in an embodiment of the present invention.

[0025] Figure 2 yes Figure 1 Enlarged view of point A in the middle.

[0026] In the figure:

[0027] 1. Detection mechanism; 11. First gear; 12. Torque limiter; 13. Reset assembly; 14. Pressure sensor; 141. Detection end; 142. Installation end;

[0028] 2. probe; 21. probe body; 22. probe connecting part;

[0029] 3. Second cross spring bearing;

[0030] 41. first base; 42. second base;

[0031] 5. sensor; 51. first capacitor plate; 52. second capacitor plate;

[0032] 6. Follower;

[0033] 7. Carrier. DETAILED DESCRIPTION

[0034] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention, rather than all structures, are shown in the accompanying drawings.

[0035] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0037] In the description of this embodiment, the terms "upper", "lower" and other positions or positional relationships are based on the positions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0038] like Figure 1 As shown, a profilometer is provided in this embodiment, which includes a first base 41, a second base 42, a probe 2, a sensor 5, a follower 6, a carrier 7, a driving mechanism and a controller. Among them, the carrier 7 is used to carry the test piece, and the driving mechanism can drive the carrier 7 and the test piece thereon to move. The driving mechanism is electrically connected to the controller, and the controller can control the action of the driving mechanism. The first base 41 is pivotally connected to the second base 42, the probe 2 is mounted on the first base 41, the follower 6 is connected to the first base 41, and the sensor 5 is arranged on the second base 42 and is electrically connected to the controller.

[0039] The general working process of the profiler is as follows: the driving mechanism can drive the stage 7 to move up and down, so that the upper surface of the workpiece to be tested abuts against the lower end of the probe 2, and the driving mechanism can also drive the stage 7 to move relative to the probe 2 along the first direction. At this time, the concave-convex structure on the surface of the workpiece to be tested causes the probe 2 to float up and down, and the probe 2 drives the first base 41 to rotate relative to the second base 42, and the first base 41 drives the follower 6 to move relative to the sensor 5, thereby causing the detection value of the sensor 5 to float and change, and the controller analyzes the change in the value to obtain the profile of the surface of the workpiece to be tested. In this embodiment, the first direction is the horizontal direction.

[0040] like Figure 1 As shown, in this embodiment, the probe 2 includes a probe body 21 and a probe connecting portion 22, the probe body 21 is fixedly connected to the probe connecting portion 22, and the probe body 21 and the probe connecting portion 22 are perpendicular to each other. Specifically, the probe connecting portion 22 extends along a first direction, and the probe body 21 extends along a second direction, and the second direction is a vertical direction. A slot is provided on the first base 41, and the probe connecting portion 22 is plugged into the slot along the first direction for easy installation. A needle tip is provided at the lower end of the probe body 21, and the needle tip profile is a conical surface, and the height of the conical surface is the range of the probe 2. In the process in which the driving mechanism drives the carrier 7 and the object to be tested to move relative to the probe 2 along the first direction, the needle tip of the probe 2 contacts the concave-convex structure on the surface of the object to be tested, and under the guiding effect of the conical surface of the needle tip, the probe body 21 can float up and down along the second direction to be sensed by the sensor 5, thereby detecting the surface profile of the object to be tested.

[0041] However, when the needle tip pierces the outside of the test piece, or the groove depth and protrusion height of the test piece exceed the measuring range of probe 2, the needle tip cannot be guided by the conical surface and floats up and down in the second direction. Probe 2 is continuously subjected to force in the first direction, causing damage to probe 2.

[0042] In view of this phenomenon, the profiler also includes a detection mechanism 1, which is electrically connected to the controller and then to the driving mechanism. The detection mechanism 1 can detect that the force applied to the probe 2 along the first direction is greater than or equal to a preset value, and sends a first signal. The driving mechanism can receive the first signal and stop driving the carrier 7. Specifically, when the needle tip of the probe 2 pierces the outside of the test piece, or the groove depth or protrusion height on the surface of the test piece exceeds the range of the selected probe 2, the needle tip of the probe 2 cannot be guided by the conical surface and floats up and down, and the force applied to the probe 2 in the first direction increases. At this time, the detection mechanism 1 detects that the force applied to the probe 2 along the first direction is greater than or equal to a preset value and sends a first signal. The driving mechanism receives the first signal and stops driving the carrier 7, thereby avoiding damage to the probe 2 and replacing the probe 2, thereby ensuring the test efficiency and the test results of the profiler.

[0043] like Figure 2 As shown, the detection mechanism 1 includes a torque limiter 12 and a pressure sensor 14. The torque limiter 12 is mounted on the first base 41. The connecting element of the torque limiter 12 is connected to the probe 2 in a transmission manner. When the force applied to the probe 2 in a first direction is greater than or equal to a preset value, the connecting element moves and triggers the pressure sensor 14. After being triggered, the pressure sensor 14 sends a first signal to the controller. After receiving the first signal, the controller controls the driving mechanism to stop driving the carrier 7 to move, so as to avoid damage to the probe 2.

[0044] In this embodiment, a first gear 11 is installed on the probe connecting part 22, and the first gear 11 is used for transmission cooperation with the torque limiter 12. Among them, the torque limiter 12 is a gear-type torque limiter, and the torque limiter 12 includes a main body and a second gear. The main body is fixed on the first base 41, and the second gear is sleeved and connected to the main body. When the second gear is not subjected to force in the circumferential direction or the force is less than a preset value, the second gear is relatively fixed to the main body, and when the force on the second gear is greater than or equal to the preset value, the second gear can slip and rotate relative to the main body. The second gear is the connecting element of the torque limiter 12, and the second gear is meshed with the first gear 11. The gear-type torque limiter is a prior art, and the structure of the main body and the specific transmission structure between the main body and the second gear are not limited here.

[0045] Specifically, when the force applied to the probe 2 in the first direction is greater than or equal to a preset value, the force exerted by the first gear 11 on the second gear is greater than or equal to a preset value, the second gear of the torque limiter 12 rotates relative to the main body, and then rotates relative to the first base 41, and the second gear triggers the pressure sensor 14 during the rotation process.

[0046] It should be noted that when the second gear rotates, it pushes the first gear 11 in the first direction. Since the first gear 11 cannot rotate relative to the probe 2, the probe connecting portion 22 and the first gear 11 produce a slight displacement in the slot. When the profilometer is used to test the contour of the workpiece again, the operator needs to manually reset the probe connecting portion 22 in the slot along the first direction.

[0047] In some embodiments, the torque limiter 12 can be of other types, that is, the connecting element that is transmission-connected to the probe 2 can be of other shapes, and the matching parts on the probe 2 used for transmission-connection to the connecting element can be replaced accordingly. It is only necessary for the connecting element and the matching parts to ensure good transmission cooperation, and no specific limitation is made here.

[0048] like Figure 2As shown, the pressure sensor 14 includes a detection end 141 and a mounting end 142. The mounting end 142 is connected to the first base 41, and the detection end 141 extends between two teeth of the second gear. Therefore, when the second gear rotates relative to the first base 41, the teeth of the second gear can press against the detection end 141, thereby triggering the pressure sensor 14.

[0049] In this embodiment, in order to ensure that the detection mechanism 1 can ensure a stable detection function when the profilometer is used again, the profilometer also includes a reset component 13. The reset component 13 is installed on the first base 41, and the mounting end 142 of the pressure sensor 14 is connected to the reset component 13. When the probe connecting part 22 is manually reset in the slot along the first direction, the second gear is reset at the same time, and the reset component 13 can drive the detection end 141 to reset. It should be noted that reset means that the detection end 141 is re-located between the two teeth of the second gear and does not contact any tooth, that is, the pressure sensor 14 is in a non-triggered state.

[0050] The cross spring bearing is a reset element, which includes an inner sleeve, an outer sleeve and three spring leaves. The three spring leaves are perpendicular to each other. When external force applies tangential force to the outer sleeve, the relative position between the spring leaves changes, so that the outer sleeve rotates relative to the inner sleeve. When there is no external force driving, the spring leaves are reset, and then the outer sleeve is reset relative to the inner sleeve.

[0051] In this embodiment, the reset assembly 13 includes a first cross spring bearing, the inner ring sleeve of the first cross spring bearing is connected to the first base 41, and the mounting end 142 is connected to the outer ring sleeve of the first cross spring bearing. When the second gear rotates, it presses and triggers the detection end 141, at which time the position of the detection end 141 changes, and the outer ring sleeve rotates relative to the inner ring sleeve; when the probe connecting part 22 is reset in the slot along the first direction, the second gear is reset at the same time, the outer ring sleeve is reset, and then the detection end 141 is driven to reset.

[0052] In some embodiments, the reset assembly 13 includes a rotating shaft and a torsion spring, the rotating shaft is fixed on the first base 41, the torsion spring is sleeved on the rotating shaft, one end of the torsion spring is fixed to the rotating shaft, and the other end is connected to the mounting end 142. When the second gear rotates, it presses and triggers the detection end 141, at which time the position of the detection end 141 changes and the torsion spring deforms; when the probe connecting part 22 is reset in the slot along the first direction, the second gear is reset at the same time, the torsion spring is reset, and then the detection end 141 is driven to reset.

[0053] like Figure 1As shown, the first base 41 is pivotally connected to the second base 42 through the second cross spring bearing 3. Specifically, the second base 42 is connected to the inner ring sleeve of the second cross spring bearing 3, and the first base 41 and the follower 6 are both connected to the outer ring sleeve of the second cross spring bearing 3. When the probe 2 floats up and down, it can drive the first base 41 to rotate relative to the second base 42, and the follower 6 to rotate relative to the sensor 5 to change the detection value of the sensor 5. The controller analyzes the change in the value to obtain the profile of the surface of the test piece.

[0054] Specifically, the sensor 5 is an inductive sensor, and includes a first capacitor plate 51 and a second capacitor plate 52 arranged in parallel, and the follower 6 is at least partially arranged between the first capacitor plate 51 and the second capacitor plate 52. The probe 2 floats up and down along with the concave-convex structure of the test piece, and the end of the follower 6 that is not connected to the second cross spring 3 rotates between the two capacitor plates, thereby causing the capacitance value of the sensor 5 to change, and the controller obtains the contour of the surface of the test piece according to the analysis of the capacitance value change.

[0055] In this embodiment, the follower 6 is an aluminum plate. In other embodiments, the follower 6 can be made of any material as long as it can cause a change in capacitance between the two capacitor plates.

[0056] In summary, if Figure 1 As shown in the figure, the working process of the profiler generally includes:

[0057] First, the test piece is placed on the stage 7, and the driving mechanism drives the stage 7 to move upward, so that the upper surface of the test piece abuts against the lower end of the probe 2;

[0058] Next, the driving mechanism drives the carrier 7 to move relative to the probe 2 along the first direction. The probe 2 floats up and down and drives the follower 6 to rotate between the first capacitor plate 51 and the second capacitor plate 52, causing the capacitance value of the sensor 5 to change. The controller analyzes the capacitance value change to obtain the contour of the surface of the test piece.

[0059] When the needle tip of probe 2 pierces the outside of the test piece, or the depth of the groove or the height of the protrusion on the surface of the test piece exceeds the measuring range of the selected probe 2, the needle tip of probe 2 cannot be guided by the conical surface and floats up and down along the second direction. The force on probe 2 in the first direction increases. At this time, the second gear of the torque limiter 12 slips and rotates, triggering the pressure sensor 14. After being triggered, the pressure sensor 14 sends a first signal to the controller. After receiving the first signal, the controller controls the driving mechanism to stop driving the carrier 7 to move, so as to avoid damage to the probe 2.

[0060] When the profilometer is used again, the operator manually resets the probe connecting portion 22 in the slot along the first direction, the second gear is reset, and the reset component 13 drives the detection end 141 to reset.

[0061] Compared with the prior art, the beneficial effects of the profiler of the present invention include: when the probe 2 pierces the outside of the test piece, or the depth of the groove or the height of the protrusion on the surface of the test piece exceeds the measuring range of the selected probe 2, the force applied to the probe 2 in the first direction becomes larger. At this time, the detection mechanism 1 detects that the force applied to the probe 2 along the first direction is greater than or equal to a preset value and sends a first signal. The driving mechanism receives the first signal and stops driving the carrier 7, thereby avoiding damage to the probe 2 and further avoiding replacement of the probe 2, thereby ensuring the test efficiency and the test results of the profiler.

[0062] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. For those skilled in the art, various obvious changes, readjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to list all the embodiments here. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. A profilometer, characterized in that: include: A first base (41) and a probe (2), wherein the probe (2) is mounted on the first base (41); A carrier (7), wherein the carrier (7) is capable of carrying a test piece; A driving mechanism, the driving mechanism being capable of driving the carrier (7) and the object to be tested to move relative to the probe (2) along a first direction; a detection mechanism (1), the detection mechanism (1) being electrically connected to the driving mechanism, the detection mechanism (1) being capable of detecting that the force applied to the probe (2) along the first direction is greater than or equal to a preset value and sending out a first signal, and the driving mechanism being capable of receiving the first signal and stopping driving the carrier (7); A slot is provided on the first base (41); the probe (2) comprises a probe body (21) and a probe connecting portion (22) connected to the probe body (21); the probe connecting portion (22) is plugged into the slot along the first direction; The detection mechanism (1) comprises a torque limiter (12) and a pressure sensor (14); the torque limiter (12) is mounted on the first base (41); a connecting element of the torque limiter (12) is drivingly connected to the probe (2); when the force applied to the probe (2) in the first direction is greater than or equal to a preset value, the connecting element moves and triggers the pressure sensor (14); and the pressure sensor (14) is capable of sending the first signal; The profilometer further comprises a second base (42), a follower (6) and a sensor (5); the first base (41) is pivotally connected to the second base (42); the follower (6) is connected to the first base (41); the sensor (5) is arranged on the second base (42); and the probe (2) is capable of driving the first base (41) to rotate relative to the second base (42) so as to drive the follower (6) to move relative to the sensor (5).

2. The profilometer according to claim 1, characterized in that A first gear (11) is mounted on the probe connecting portion (22); the torque limiter (12) is a gear-type torque limiter; the connecting element is a second gear; the first gear (11) meshes with the second gear; when the force applied to the probe (2) in the first direction is greater than or equal to a preset value, the second gear rotates relative to the first base (41) and triggers the pressure sensor (14).

3. The profilometer according to claim 2, characterized in that The pressure sensor (14) comprises a detection end (141) and a mounting end (142); the mounting end (142) is connected to the first base (41); the detection end (141) extends between two teeth of the second gear; when the teeth of the second gear rotate, they press against and trigger the detection end (141).

4. The profilometer according to claim 3, characterized in that The profilometer further comprises a reset component (13), the reset component (13) being mounted on the first base (41), the mounting end (142) being connected to the reset component (13), and the reset component (13) being configured to reset the detection end (141).

5. The profilometer according to claim 4, characterized in that The reset assembly (13) comprises a first cross spring bearing, the inner ring sleeve of the first cross spring bearing is connected to the first base (41), and the mounting end (142) is connected to the outer ring sleeve of the first cross spring bearing.

6. The profilometer according to claim 4, characterized in that The reset assembly (13) comprises a rotating shaft and a torsion spring, the rotating shaft being fixed on the first base (41), the torsion spring being sleeved on the rotating shaft, one end of the torsion spring being fixed to the rotating shaft, and the other end being connected to the mounting end (142).

7. The profilometer according to any one of claims 1 to 6, characterized in that: The first base (41) is pivotally connected to the second base (42) via a second cross spring bearing (3); the second base (42) is connected to an inner ring sleeve of the second cross spring bearing (3); and the first base (41) and the follower (6) are both connected to an outer ring sleeve of the second cross spring bearing (3).

8. The profilometer according to claim 7, characterized in that The sensor (5) is an inductive sensor and comprises a first capacitor plate (51) and a second capacitor plate (52) arranged in parallel, and the follower (6) is at least partially arranged between the first capacitor plate (51) and the second capacitor plate (52).

Images