Black light wet lab for scientific research

Abstract

The present application discloses a black light wet process laboratory for scientific research, which relates to the field of semiconductor cleaning and etching technology, including a laboratory body, a wet process machine, a transfer robot, a sample supply and collection device, a liquid medicine supply and collection device and a control device; the laboratory body is used to provide a clean space; the transfer robot includes a mobile device, a mechanical arm device, at least one end effector and an accompanying device; the accompanying device can follow the movement of the mobile device and provide a temporary storage space; the mechanical arm device is installed on the mobile device; at least one end effector is installed on the mechanical arm device, and is used to grab semiconductor samples and / or liquid medicine tanks; the above design can realize 24-hour uninterrupted operation of experiments and unmanned operation, and realize a black light laboratory; significantly improve the efficiency of scientific research and equipment utilization rate, improve the reliability of experimental results, reduce experimental costs, and effectively ensure the safety of experimental personnel.

Description

Technical Field

[0001] The present application relates to the field of semiconductor cleaning and etching technology, and in particular to a black light wet process laboratory for scientific research. Background Art

[0002] In the manufacturing process of semiconductor micro-nano devices, a wet bench is needed for wafer surface cleaning and acid-base etching. Although the traditional enterprise-level wet bench has a high degree of automation, it is only suitable for mass production and cannot meet the flexible and changeable scientific research scenarios. To solve the above problems, the Chinese patent with publication number CN118053795B discloses a scientific research wet etching fully automated system and machine to meet the scientific research needs of universities and improve scientific research efficiency and process stability. However, this design can only achieve single-unit automation, and the wet laboratory built in this way still needs to rely on manual operation by personnel, which has the following shortcomings:

[0003] 1. It is difficult to further improve scientific research efficiency;

[0004] 2. It is difficult to fully utilize the wet bench used for scientific research;

[0005] 3. The experimental results are unstable and lack reliability;

[0006] 4. Laboratory management is difficult and the experimental cost is high;

[0007] 5. There are hidden dangers to personnel safety;

[0008] 6. The efficiency of data collection and analysis is low.

[0009] Therefore, it is urgent to provide a new design scheme to solve the above-mentioned shortcomings. Summary of the invention

[0010] In view of this, the purpose of this application is to provide a black light wet method laboratory for scientific research to solve the technical problems caused by the fact that existing wet method laboratories for scientific research still rely on manual operation by personnel.

[0011] In order to achieve the above technical purpose, the present application provides a black light wet process laboratory for scientific research, including a laboratory body, a wet process machine, a transfer robot, a sample receiving device, a liquid medicine receiving device and a control device;

[0012] The laboratory body is used to provide a clean space;

[0013] The wet process machine is arranged in the clean space and is used to process semiconductor samples;

[0014] The sample supply and receiving device is arranged in the clean space, and is used to provide semiconductor samples to be processed and to receive the processed semiconductor samples;

[0015] The liquid medicine supply and collection device is arranged in the clean space, and is used to provide liquid medicine tanks to be replaced and to store the replaced liquid medicine tanks;

[0016] The transfer robot is installed in the clean space and is used to transfer semiconductor samples and / or liquid medicine tanks between the wet process machine, the transfer robot, the sample supply and collection device, and the liquid medicine supply and collection device;

[0017] The transfer robot comprises a mobile device, a mechanical arm device, at least one end effector and an accompanying device;

[0018] The accompanying device can move with the mobile device and provide a temporary storage space;

[0019] The mechanical arm device is installed on the mobile device;

[0020] At least one of the end effectors is mounted on the robotic arm device and is used to grab semiconductor samples and / or liquid medicine tanks;

[0021] The control device is communicatively connected with the wet process machine, the transfer robot, the sample supply and collection device, and the liquid medicine supply and collection device.

[0022] Furthermore, the accompanying device is detachably connected to the mobile device;

[0023] Also includes an accompanying mount;

[0024] The accompanying fixing frame is installed in the clean space and is used to fix the accompanying devices one by one;

[0025] The transfer robot also includes a fork-taking device;

[0026] The forking device is installed on the mobile device and is used to fork the accompanying device located on the accompanying fixed frame.

[0027] Furthermore, the fork picking device includes a fork picking lifting device and a fork tray;

[0028] The accompanying fixing frame is provided with an avoidance cavity for the fork tray to extend into at a position below the accompanying device;

[0029] The fork-taking lifting device is installed on the top of the mobile device, and the driving end is connected to the fork plate, which is used to drive the fork plate to move up and down, so as to fork the accompanying device away from the accompanying fixed frame or fork the accompanying device back into the accompanying fixed frame.

[0030] Furthermore, a plurality of first fork positioning structures are provided on the top of the fork tray;

[0031] The bottom of the accompanying device is provided with a plurality of second forking and positioning structures which are positioned one by one with the first forking and positioning structures.

[0032] Furthermore, a cavity is provided in the accompanying device to form the temporary storage space;

[0033] The accompanying device is equipped with an accompanying opening and closing door mechanism for controlling the opening and closing of the cavity.

[0034] Furthermore, a first docking structure is provided at the bottom of the accompanying device;

[0035] The first docking structure is provided with a first conductive structure electrically connected to the accompanying opening and closing door mechanism;

[0036] The mobile device is provided with a second docking structure capable of docking with the first docking structure;

[0037] The second docking structure is provided with a second conductive structure capable of contacting and conducting with the first conductive structure;

[0038] The transfer robot is also used to supply power to the accompanying opening and closing door mechanism when the first conductive structure contacts and conducts electricity with the second conductive structure.

[0039] Furthermore, the first docking structure is provided with a first air guide structure communicating with the temporary storage space;

[0040] The second docking structure is provided with a second air guiding structure capable of docking and communicating with the first air guiding structure;

[0041] The moving device is provided with an air supply device connected to the second air guide structure.

[0042] Furthermore, the portable fixing frame includes two support plates that are symmetrically arranged at intervals;

[0043] Limiting protrusions are respectively arranged on both side surfaces of the accompanying device and can contact and abut against the top of the support plate in a one-to-one correspondence.

[0044] Furthermore, a floating correction module is provided in the accompanying fixing frame;

[0045] The floating correction module is used to correct the position of the moving device or the forking device extending into the accompanying fixed frame, so that the first forking positioning structure is directly opposite to the second forking positioning structure.

[0046] Furthermore, an anti-corrosion lining is provided in the temporary storage space.

[0047] Furthermore, there are at least two end effectors;

[0048] One of the end effectors is used to grab a semiconductor sample;

[0049] Another end effector is used to grab the liquid medicine tank;

[0050] The end effector is detachably connected to the robot arm device via a joint assembly;

[0051] The accompanying device is provided with a placement station for placing the end effector.

[0052] Furthermore, a sample loading mechanism is installed on the wet process machine below the sample inlet and outlet for carrying semiconductor materials to be fed into the sample inlet and outlet or carrying semiconductor materials fed out from the sample inlet and outlet.

[0053] Further, the sample loading mechanism includes a loading plate and a sample loading drive assembly;

[0054] The material carrier plate is rotatably mounted on the wet process machine platform;

[0055] The sample loading drive assembly is installed on the wet process machine platform and connected to the loading plate to drive the loading plate to rotate.

[0056] Furthermore, the wet process machine is provided with a liquid medicine loading mechanism at the liquid storage chamber, which is used to carry the liquid medicine tank;

[0057] The liquid medicine loading mechanism comprises a loading seat, a liquid medicine loading drive assembly and a liquid taking part;

[0058] The material loading seat is used to carry the liquid medicine tank;

[0059] The liquid medicine loading drive assembly is connected to the loading seat and is used to drive the loading seat to extend out of or retract into the liquid storage cavity;

[0060] The liquid taking piece is detachably mounted on the medicine liquid tank.

[0061] Furthermore, the liquid taking part includes a liquid taking tube and a liquid taking cover;

[0062] The liquid extraction tube can extend into the liquid medicine tank through the liquid medicine port of the liquid medicine tank;

[0063] The liquid collection cover is sleeved on the liquid collection tube and can cooperate with the liquid medicine port to block the liquid medicine port;

[0064] A fixing piece is vertically mounted on the material loading seat, and is used to fix the liquid taking piece to be installed;

[0065] The fixing piece is a hollow column structure, into which the liquid extraction tube can be movably inserted.

[0066] Furthermore, the sample supply and collection device includes a device body and a sample shifting device;

[0067] A sample chamber is provided in the device body;

[0068] The bottom of the sample chamber is provided with a first loading and unloading station, a second loading and unloading station, a first temporary storage station and a second temporary storage station;

[0069] A first loading and unloading window is provided on the equipment body at a position corresponding to the first loading and unloading station, connecting the sample chamber with the outside of the clean space;

[0070] The first loading and unloading window is provided with a first door and window that can be opened and closed;

[0071] A second loading and unloading window connecting the sample chamber and the clean space is provided at a position on the equipment body corresponding to the second loading and unloading station;

[0072] The second loading and unloading window is provided with a second door and window that can be opened and closed;

[0073] The sample shifting device is installed in the sample chamber, and is used to move semiconductor samples between the first loading and unloading station, the second loading and unloading station, the first temporary storage station, and the second temporary storage station.

[0074] Furthermore, a human-machine interaction device is installed on one side of the equipment body located at the first loading and unloading window, which is communicatively connected with the control device and extends out of the clean space.

[0075] Further, the liquid medicine supply and collection device includes a liquid medicine buffer box;

[0076] The liquid medicine cache box is provided with a cache chamber for storing liquid medicine tanks to be loaded or replaced;

[0077] The liquid medicine cache box is provided with a cache opening;

[0078] The cache opening is provided with an openable and closable cache door.

[0079] Furthermore, the floor of the clean space is divided into an outer annular area, an inner annular area and a central annular area located in the inner annular area from the outside to the inside;

[0080] The wet process machine is arranged in the outer annular area or the central annular area;

[0081] The sample supply and collection device and the liquid medicine supply and collection device are arranged in the outer annular area.

[0082] Furthermore, the robotic arm device is a collaborative robotic arm.

[0083] Furthermore, the mobile device is an AGV vehicle.

[0084] It can be seen from the above technical solutions that the black light wet method laboratory for scientific research designed in this application can realize 24-hour uninterrupted operation of experiments and unattended operation by setting up a transfer robot, sample receiving equipment, liquid medicine receiving equipment and control equipment to link with the wet method machine, thus realizing a black light laboratory with the following beneficial effects:

[0085] 1. It can automatically arrange orders according to the work orders input by the experimenters, and automatically circulate semiconductor samples, automatically replace liquid medicine tanks, automatically process semiconductor samples, and automatically collect and analyze experimental data according to the orders, which significantly improves the efficiency of scientific research and the utilization rate of equipment.

[0086] 2. There is no need for experimenters to contact with the liquid medicine, which effectively ensures the safety of experimenters.

[0087] 3. Avoid the waste of liquid medicine and samples caused by the instability of manual operation by traditional experimenters, as well as equipment damage caused by misoperation, and effectively reduce experimental costs.

[0088] 4. Automate the experimental process of semiconductor materials to improve the stability and accuracy of the test, thereby improving the reliability of the experimental results.

[0089] 5. Automated and unattended operation improves the laboratory management level.

[0090] 6. An accompanying device is designed to follow the movement of the mobile device, which can realize the transfer of multiple semiconductor samples or multiple liquid tanks at one time, reduce the frequency of reciprocating material retrieval, and further improve efficiency.

[0091] 7. It has a significant role in promoting the development of scientific research and technology, improving the research and development efficiency of semiconductor technology and accelerating the progress of research and development. BRIEF DESCRIPTION OF THE DRAWINGS

[0092] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0093] Figure 1 A three-dimensional diagram of a black light wet method laboratory for scientific research provided in this application without the laboratory body;

[0094] Figure 2A three-dimensional diagram of a transfer robot for a black light wet laboratory for scientific research provided in this application;

[0095] Figure 3 A three-dimensional diagram of the cooperation between the accompanying device and the accompanying fixing frame of the black light wet method laboratory for scientific research provided in this application;

[0096] Figure 4 A three-dimensional diagram of a transfer robot for a black light wet process laboratory for scientific research provided in this application without an accompanying device;

[0097] Figure 5 A first stereoscopic view of the accompanying device for a black light wet method laboratory for scientific research provided in this application;

[0098] Figure 6 A three-dimensional diagram of a wet process machine in a black light wet process laboratory for scientific research provided in this application;

[0099] Figure 7 It is a schematic diagram of an explosion of a liquid medicine tank for a liquid medicine loading mechanism of a black light wet method laboratory for scientific research provided in this application;

[0100] Figure 8 A three-dimensional diagram of a liquid medicine loading mechanism with a liquid medicine tank for a black light wet method laboratory for scientific research provided in this application;

[0101] Fig. 9 A three-dimensional diagram of the sample receiving device for a black light wet laboratory for scientific research provided in this application without part of the device body;

[0102] Fig.10 A three-dimensional diagram of a liquid medicine buffer box for a black light wet method laboratory for scientific research provided in this application;

[0103] In the figure: 1. wet process machine; 11. sample inlet and outlet; 12. sample loading mechanism; 121. loading plate; 122. sample loading drive assembly; 13. liquid storage chamber; 14. liquid loading mechanism; 141. loading seat; 142. liquid loading drive assembly; 143. liquid taking part; 1431. liquid taking cover; 1432. liquid taking tube; 1433. liquid taking joint; 144. fixing part; 15. liquid tank; 151. liquid port; 2. transfer robot; 21. moving device; 211. second docking structure; 22. mechanical arm device; 23. end effector; 24. accompanying device; 241. second fork positioning structure; 242. accompanying opening and closing door mechanism; 243. limiting protrusion; 244. placement station; 245. extension boss ; 25. Joint assembly; 251. First joint; 252. Second joint; 26. Traveling fixed frame; 261. Support plate; 27. Fork picking device; 271. Fork picking lifting device; 272. Fork tray; 2721. First fork picking positioning structure; 28. Fixture plate; 3. Sample feeding and receiving equipment; 31. Equipment body; 311. First loading and unloading station; 312. Second loading and unloading station; 313. First temporary storage station; 314. Second temporary storage station; 32. Sample shifting device; 33. Flower basket rack; 331. Semiconductor material; 34. Human-computer interaction device; 4. Drug solution feeding and receiving equipment; 41. Drug solution cache box; 42. Cache door; 5. Control device; 61. Outer annular area; 62. Inner annular area; 63. Center annular area. DETAILED DESCRIPTION

[0104] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of them. All other embodiments obtained by ordinary technicians in this field without creative work based on the embodiments in the embodiments of the present application are within the scope of protection of the embodiments of the present application.

[0105] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0106] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0107] The embodiments of the present application disclose a black light wet process laboratory for scientific research.

[0108] See also Figure 1 as well as Figure 2 , an embodiment of a black light wet method laboratory for scientific research provided in the embodiments of the present application includes:

[0109] The laboratory body (not shown), the wet process machine 1, the transfer robot 2, the sample supply and collection device 3, the liquid medicine supply and collection device 4 and the control device 5.

[0110] The laboratory body is used to provide a clean space. The laboratory body can be built with, for example, fireproof and explosion-proof panels, and equipped with equipment such as fire protection and air purification to ensure the cleanliness and safety of the clean space. Technical personnel in this field can make appropriate design changes based on this without limitation.

[0111] The wet process machine 1 is arranged in a clean space for processing semiconductor samples; the wet process machine 1 in the present application can be arranged in multiple units as needed, and they are different types of machine equipment. Taking multiple wet process machines 1 as an example, one of the wet process machines 1 can be an organic wet process machine, and two of them can be oxide cleaning machines, one of them can be a metal etching machine, one of them can be a KOH cleaning machine, one of them can be an HF cleaning machine, one of them can be a mask cleaning machine, etc., and those skilled in the art can select them as needed without limitation. It should be noted that each machine equipment is designed or used based on the scientific research wet etching fully automated system and machine disclosed in the Chinese patent publication number CN118053795B, and the specific details will not be repeated.

[0112] Multiple wet process machines 1 are designed to achieve process interconnection and are arranged in order:

[0113] In wet experiments, there are few continuous processes, which are generally carried out in steps with dry processes / photolithography / coating. Therefore, when multiple machines are interconnected, they also need to cooperate with other equipment, such as:

[0114] Use an organic wet bench / oxide cleaning bench No. 2 to clean the clean wafer surface (short time, just a few minutes), and perform photolithography / dry etching and other processes. Use an organic wet bench / oxide cleaning bench No. 2 / HF cleaning bench to remove the glue (the time varies, from 10 minutes to 2 hours). Use a KOH cleaning bench for wet etching (about 8 hours).

[0115] In the design of multiple wet process machines 1, the use order of each wet process machine 1 is reasonably planned according to the process sequence, appointment time, process duration, sampling time, etc., so that multiple groups of experiments can be carried out simultaneously and in an orderly manner.

[0116] Realize multiple groups of experiments to be carried out on the corresponding wet process machine 1 according to the planned sequence / experiment type.

[0117] The sample supply and receiving device 3 is arranged in a clean space, and is used to provide semiconductor samples to be processed and to receive semiconductor samples that have been processed.

[0118] The drug liquid supply and collection device 4 is arranged in a clean space, and is used to provide the drug liquid tank 15 to be replaced and to store the replaced drug liquid tank 15 .

[0119] The transfer robot 2 is installed in the clean space, and is used to transfer semiconductor samples and / or liquid medicine tanks 15 between the wet process machine 1 , the transfer robot 2 , the sample supply and collection device 3 , and the liquid medicine supply and collection device 4 .

[0120] The transfer robot 2 includes a moving device 21 , a robot arm device 22 , at least one end effector 23 , and a companion device 24 .

[0121] The accompanying device 24 can move with the mobile device 21 and provide a temporary storage space; the temporary storage space can be used to temporarily store semiconductor samples to be loaded, semiconductor samples that have completed processing, liquid medicine tanks 15 to be replaced, or replaced liquid medicine tanks 15.

[0122] The mechanical arm device 22 is mounted on the mobile device 21; at least one end effector 23 is mounted on the mechanical arm device 22, and is used to grab the semiconductor sample and / or the liquid medicine tank 15. The end effector 23 can be an existing mechanical gripper, which can grab the basket rack 33 or the fixture rack loaded with semiconductor samples, and can also be used to grab the liquid medicine tank 15, and grab the tank cover of the liquid medicine tank 15, and under the action of the rotating mechanism at the end of the mechanical arm, unscrew the tank cover or tighten the tank cover, without specific limitation.

[0123] The control device 5 is connected to the wet process machine 1 , the transfer robot 2 , the sample supply and collection device 3 , and the liquid medicine supply and collection device 4 in communication.

[0124] The black light wet method laboratory designed for scientific research in this application can realize 24-hour uninterrupted operation of experiments and unattended operation by setting up a transfer robot 2, a sample receiving device 3, a liquid medicine receiving device 4 and a control device 5 to work in conjunction with the wet method machine 1, thereby realizing a black light laboratory with the following beneficial effects:

[0125] 1. It can automatically arrange orders according to the work orders input by the experimenters, and automatically circulate semiconductor samples, automatically replace the liquid medicine tank 15, automatically process semiconductor samples, and automatically collect and analyze experimental data according to the arranged orders, which significantly improves the efficiency of scientific research and the utilization rate of equipment.

[0126] 2. There is no need for experimenters to contact with the liquid medicine, which effectively ensures the safety of experimenters.

[0127] 3. Avoid the waste of liquid medicine and samples caused by the instability of manual operation by traditional experimenters, as well as equipment damage caused by misoperation, and effectively reduce experimental costs.

[0128] 4. Automating the experimental process of semiconductor materials 331 improves the stability and accuracy of the test, thereby improving the reliability of the experimental results.

[0129] 5. Automated and unattended operation improves the laboratory management level.

[0130] 6. An accompanying device 24 is designed to follow the movement of the moving device 21, so that multiple semiconductor samples or multiple liquid medicine tanks 15 can be transferred at one time, reducing the frequency of reciprocating material extraction and further improving efficiency.

[0131] 7. It has a significant role in promoting the development of scientific research and technology, improving the research and development efficiency of semiconductor technology and accelerating the progress of research and development.

[0132] The above is the first embodiment of the black light wet method laboratory for scientific research provided by the embodiment of the present application. The following is the second embodiment of the black light wet method laboratory for scientific research provided by the embodiment of the present application. For details, please refer to Figures 1 to 10 .

[0133] Based on the solution of the above embodiment 1:

[0134] Furthermore, in order to improve the convenience of use, different accompanying devices 24 can be selected for use according to needs, and the accompanying devices 24 are designed to be detachably connected to the mobile device 21; specifically, different accompanying devices 24 are designed to correspond to a wet process machine 1. When the corresponding wet process machine 1 needs to be loaded and unloaded / the drug solution needs to be changed, the corresponding water accompanying device can be replaced.

[0135] Specifically, Figure 3As shown, the present application is designed with an accompanying fixing frame 26 ; the accompanying fixing frame 26 is installed in the clean space and is used to fix the accompanying devices 24 one by one.

[0136] like Figure 4 As shown, the transfer robot 2 further includes a forking device 27; the forking device 27 is installed on the mobile device 21 and is used to fork the accompanying device 24 located on the accompanying fixed frame 26. A plurality of accompanying devices 24 are designed, and a plurality of corresponding accompanying fixed frames 26 are designed, and the accompanying devices 24 are installed and fixed one by one. When they are needed, the corresponding accompanying device 24 is taken by using the forking device 27, so that the accompanying device 24 can be connected with the mobile device 21. When they are not needed, the accompanying device 24 can be put back on the accompanying fixed frame 26.

[0137] Furthermore, if Figure 4 As shown, the fork device 27 is designed to include a fork lifting device 271 and a fork plate 272 .

[0138] A avoidance cavity for the fork tray 272 to extend into is provided on the accompanying fixing frame 26 at a position below the accompanying device 24 , so as to ensure that the moving device 21 can move to the bottom of the corresponding accompanying device 24 with the fork tray 272 .

[0139] The fork lifting device 271 is installed on the top of the mobile device 21, and the driving end is connected to the fork plate 272, which is used to drive the fork plate 272 to move up and down to fork the accompanying device 24 away from the accompanying fixed frame 26 or fork the accompanying device 24 back into the accompanying fixed frame 26.

[0140] When taking, the mobile device 21 drives into the avoidance cavity and makes the fork plate 272 be located directly below the corresponding accompanying device 24. Then the fork-taking lifting device 271 drives the fork plate 272 to move upward until it can support the accompanying device 24. The mobile device 21 then moves out of the avoidance cavity to fork the accompanying device 24 away from the accompanying fixed frame 26. Then the fork-taking lifting device 271 drives the fork plate 272 to descend to the initial position.

[0141] When putting it back, the fork lifting device 271 drives the fork plate 272 to rise to a certain height, and then the moving device 21 drives into the avoidance cavity and makes the fork plate 272 be located above the corresponding accompanying fixed frame 26, and then the fork lifting device 271 drives the fork plate 272 to lower a certain height to put the accompanying device 24 back on the accompanying fixed frame 26.

[0142] The robotic arm device 22 in the present application can be installed on the top of the fork lifting device 271. The fork lifting device 271 can be a screw slide, etc., as long as it meets the lifting control requirements without any limitation.

[0143] Furthermore, if Figure 4 as well as Figure 5As shown, in order to achieve accurate forking and reliable connection between the accompanying device 24 and the fork plate 272 after forking, a plurality of first forking positioning structures 2721 are provided on the top of the fork plate 272; correspondingly, a plurality of second forking positioning structures 241 that are positioned one by one with the first forking positioning structures 2721 are provided on the bottom of the accompanying device 24.

[0144] The first fork positioning structure 2721 can be a positioning protrusion, and the number thereof can be four. Correspondingly, the second fork positioning structure 241 can be a positioning groove, and the number thereof is consistent with the number of the positioning protrusions. Those skilled in the art can make appropriate design changes based on this without limitation.

[0145] In order to meet the power supply of the electric door mechanism, a battery is configured in the accompanying device 24. Correspondingly, a charging device can be configured on the accompanying fixed frame 26 to charge the battery in the fixed accompanying device 24. The charging method can be wireless charging or contact charging. Of course, the accompanying door opening and closing mechanism 242 can also be a manual door mechanism, and then the mechanical arm device 22 drives the end effector 23 to simulate a human hand to perform the door opening or closing action.

[0146] Of course, the electric door mechanism can also be powered by the transfer robot 2. Specifically, a first docking structure (not shown) is provided at the bottom of the accompanying device 24.

[0147] The first docking structure is provided with a first conductive structure electrically connected to the accompanying opening and closing door mechanism 242 . The first conductive structure may be a contact conductive pin head or other conductive connector structures without limitation.

[0148] The mobile device 21 is provided with a second docking structure 211 that can dock with the first docking structure. The first docking structure and the second docking structure 211 can be mutually interlocked, similar to the above-mentioned protrusion and groove matching design, and the details are not repeated. In addition, in order to prevent the up and down movement of the fork plate 272 from being affected, the fork plate 272 is provided with an avoidance window for the second docking structure 211 to move out.

[0149] The second docking structure 211 is provided with a second conductive structure that can be in contact with the first conductive structure for electrical conduction; the transfer robot 2 is also used to supply power to the accompanying opening and closing door mechanism 242 when the first conductive structure is in contact with the second conductive structure for electrical conduction; specifically, the fork plate 272 rises to fork the accompanying device 24 from the accompanying fixed frame 26, then withdraws from the accompanying fixed frame 26, and then descends to the initial position. At this time, the first docking structure of the accompanying device 24 located on the fork plate 272 also completes the docking with the second docking structure 211, and the first conductive structure is in contact with the second conductive structure for electrical conduction, and then the power management module on the transfer robot 2 is controlled to supply power to the accompanying opening and closing door mechanism 242.

[0150] Furthermore, the first docking structure may be provided with a first air guiding structure connected to the temporary storage space, and the second docking structure 211 may be provided with a second air guiding structure capable of docking and communicating with the first air guiding structure. The first air guiding structure and the second air guiding structure may be mutually pluggable air joints.

[0151] The mobile device 21 is equipped with an air supply device (not shown) connected to the second air guide structure. The air supply device may be an air pump device, which can supply air to the temporary storage space or extract air from the temporary storage space. The air supply device may be used in the following ways:

[0152] 1. Supply air to the temporary storage space (the air supply device can be equipped with a filter device to filter the gas supplied to the temporary storage space), so that the temporary storage space is kept in a slightly positive pressure state. In this way, even in the open state, the overflow gas generated by the slightly positive pressure can be used to prevent external dust from entering the temporary storage space, thereby maintaining the cleanliness of the temporary storage space;

[0153] 2. Blow or vacuum the temporary storage space to clean it;

[0154] 3. When the accompanying opening and closing door mechanism 242 is pneumatically driven, it can be used as a power source to control the accompanying opening and closing door mechanism 242.

[0155] Furthermore, in order to enable the first fork positioning structure 2721 to be accurately aligned with the second fork positioning structure 241, thereby ensuring that the subsequent first fork positioning structure 2721 is just docked with the second fork positioning structure 241 to accurately fork the accompanying device 24, a floating correction module (not shown in the figure) can be provided in the accompanying fixed frame 26.

[0156] The floating correction module is used to correct the position of the moving device 21 or the forking device 27 extending into the accompanying fixed frame 26 so that the first forking positioning structure 2721 and the second forking positioning structure 241 are directly opposite.

[0157] The floating correction module can be specifically designed to include a first direction corrector and a second direction corrector (the first direction corrector and the second direction corrector both include a telescope and a push plate, the telescope is connected to the push plate to drive the push plate to move, and then the extended moving device 21 can be pushed to move to complete the correction); there are two first direction correctors, which are symmetrically arranged along a direction perpendicular to the direction in which the moving device 21 extends into and out of the accompanying fixed frame 26. It can be understood that when the moving device 21 extends into the accompanying fixed frame 26, the two first direction correctors are located on both sides of themselves, and the position of the moving device 21 in the first direction is corrected by the telescopic movement of the first direction corrector; the second direction corrector is arranged along the direction in which the moving device 21 extends into and out of the accompanying fixed frame 26. It can be understood that when the moving device 21 extends into the accompanying fixed frame 26, the second direction corrector is located at the front end of the moving device 21, and the position of the moving device 21 in the second direction is corrected by the telescopic movement of the second direction corrector.

[0158] In order to better achieve accurate positioning and matching, a larger positioning guide groove can be designed around the designed positioning groove, which has a guiding slope to guide the positioning protrusion into the positioning groove to achieve physical positioning. Of course, a positioning sensor such as a scanner can be added to the bottom of the accompanying device 24, and a sensing structure such as a label code that can be sensed by the positioning sensor can be set on the fork plate 272 to achieve inductive positioning. Those skilled in the art can make appropriate changes based on this design without limitation.

[0159] Furthermore, in order to prevent the temporary storage space from being corroded by the drug solution, an anti-corrosion lining is provided in the temporary storage space. The anti-corrosion lining can be made of materials such as PFA, Teflon, PP, etc., without specific limitation.

[0160] Furthermore, if Figure 3 As shown, the accompanying device 24 is a box-like structure, and a cavity is provided inside thereof for forming a temporary storage space; an accompanying opening and closing door mechanism 242 for controlling the opening and closing of the cavity is installed on the accompanying device 24. The accompanying opening and closing door mechanism 242 is an electric door mechanism, which is controlled by the control device 5 to realize electric opening and closing, such as a flip-type electric door mechanism, which can refer to the existing electric door design or directly use it, and the specific details are not repeated.

[0161] Furthermore, if Figure 3 As shown, for the design of the portable fixing frame 26, it can include two support plates 261 that are symmetrically arranged at intervals; correspondingly, the two side surfaces of the portable device 24 are respectively provided with limit protrusions 243 that can contact and abut against the top of the support plate 261 in a one-to-one correspondence. For the contact charging design, charging contacts can be set at the bottom of the limit protrusion 243 and the top of the support plate 261, and the battery inside the portable device 24 can be charged through contact.

[0162] Furthermore, if Figure 3 As shown, at least two end effectors 23 are designed, one of which is used to grab the semiconductor sample, and the other end effector 23 is used to grab the liquid medicine tank 15. Different end effectors 23 are implemented to perform different actions, so that the corresponding end effectors 23 can be designed more specifically. For example, the opening and closing degree of the clamping mechanism of the end effector 23 used to grab the basket 33 carrying the semiconductor material 331 can be designed to be smaller, while the opening and closing degree of the clamping mechanism used to grab the liquid medicine tank 15 can be designed to be larger, and there is no specific limitation.

[0163] In addition, the end effector 23 can also be a maintenance actuator. The robotic arm device 22 drives the end effector 23 as a maintenance actuator to perform maintenance on the corresponding equipment to realize automated maintenance operations. Of course, it is not limited to this and can be other actuators, such as a cleaning mechanism, to realize cleaning operations. There is no specific limitation.

[0164] like Figure 2 As shown, the end effector 23 can be designed to be detachably connected to the robot arm device 22 through a joint assembly 25. The joint assembly 25 is an existing quick connector, specifically including a first joint 251 fixed to the end of the robot arm device 22 and a second joint 252 fixed to the end effector 23, so as to achieve quick connection and disassembly.

[0165] like Figure 3 As shown, in order to carry the end effector 23 during the accompanying operation and facilitate the replacement of the end effector 23, a placement station 244 for placing the end effector 23 is provided on the accompanying device 24. The placement station 244 can be a slot structure for the end effector 23 to be inserted into. The second joint 252 can be specifically arranged on the outer side of the end effector 23 and is reinforced and connected to the end effector 23 through a right-angle connecting plate. The placement station 244 is an example of a slot, in which a step for supporting the second joint 252 connected to the inserted end effector 23 is also provided. The second joint 252 is arranged on one side of the end effector 23 to reduce the length of the end effector 23. At the same time, a convex structure is formed on the side of the end effector 23 to facilitate contact with the step for quick fixation. The design structure is simple, the end effector 23 is easy to take and put, and it also helps to improve efficiency. There is no specific limitation.

[0166] In order to enable the placement station 244 on a follower device 24 to be replaced as needed, an extended boss 245 is provided at the bottom of one side of the follower device. By providing the extended boss 245, a right-angle mounting area can be formed between the extended boss 245 and one side of the follower device 24. A detachable jig plate 28 is provided on the extended boss 245. The jig plate 28 can be in a "C" shape. Its lower plate portion fits against the extended boss 245, and its side plate portions fit against one side of the follower device 24 to achieve firm installation and fixation. The required placement station 244 is provided on the upper plate portion of the jig plate 28. The jig plate 28 can be connected to the follower device 24 by fasteners such as screws and bolts, and there is no specific limitation.

[0167] Furthermore, since the processing of the semiconductor material 331 by the wet process machine 1 takes different times according to the processing requirements, although the control device 5 can timely control the transfer robot 2 to pick up the processed semiconductor material 331 after obtaining the processing time of the wet process machine 1 for the semiconductor material 331, if the mobile robot is moving other semiconductor materials 331 or replacing the liquid medicine tank 15 at this time, the transfer robot 2 needs to stop the current work, or the wet process machine 1 needs to be in a waiting state, which will affect the use efficiency of the transfer robot 2 or the wet process machine 1. To solve the above problems:

[0168] As Figure 6 shown, the present application improves the wet process machine 1 and installs a sample loading mechanism 12 below the position of the sample inlet and outlet 11 thereon, which is used to carry the semiconductor material 331 to be sent into the sample inlet and outlet 11 or carry the semiconductor material 331 sent out from the sample inlet and outlet 11. After the wet process machine 1 finishes processing the semiconductor material 331, it can directly push the semiconductor material 331 out of the sample inlet and outlet 11 into the sample loading mechanism 12 for waiting to be picked up, and then the sample inlet and outlet 11 can be closed to continue performing other processes, instead of always keeping the inlet and outlet open for waiting or in a suspended state. When the transfer robot 2 feeds the material, it can first transfer the semiconductor material 331 to the sample loading mechanism 12, and then perform the next process. When waiting for the control device 5 to send that the wet process machine 1 is available, it returns to pick up the semiconductor material 331 output by the wet process machine 1, and at the same time places the semiconductor material 331 on the sample loading mechanism 12 in place for feeding into the wet process machine 1. Since the semiconductor material 331 to be processed is first placed on the sample loading mechanism 12, more space in the temporary storage space of the follower device 24 is also vacated, which is better for recycling the processed semiconductor samples and further improving the use efficiency of the equipment.

[0169] Furthermore, as Figure 6 shown, for the design of the sample loading mechanism 12, it includes a loading plate 121 and a sample loading drive assembly 122.

[0170] The carrier plate 121 is rotatably mounted on the wet process machine 1, and the sample carrier drive assembly 122 is mounted on the wet process machine 1 and connected to the carrier plate 121, and is used to drive the carrier plate 121 to rotate. The sample carrier drive assembly 122 can be an electric push rod, and the number can be two, and one end is hinged to the wet process machine 1, and the other end is hinged to the bottom of the carrier plate 121, and the carrier plate 121 is driven to rotate through telescopic movement; when the carrier plate 121 needs to be used, the sample carrier drive assembly 122 is controlled to extend and move so that the carrier plate 121 is flipped to a horizontal state, and when it is not needed, the sample carrier drive assembly 122 is controlled to retract and move so that the carrier plate 121 is flipped to a vertical state.

[0171] Furthermore, if Figure 6 As shown, in order to better realize the replacement of the liquid medicine tank 15 , the present application improves the wet process machine 1 , and a liquid medicine loading mechanism 14 is installed at the liquid storage chamber 13 of the wet process machine 1 for carrying the liquid medicine tank 15 .

[0172] The liquid storage chamber 13 is of non-enclosed design. Figure 7 as well as Figure 8 As shown, the liquid medicine loading mechanism 14 includes a loading seat 141 , a liquid medicine loading driving assembly 142 and a liquid taking member 143 .

[0173] The loading seat 141 is used for carrying the liquid medicine tank 15 , and is provided with a positioning and mounting groove for positioning and mounting the liquid medicine tank 15 .

[0174] The liquid medicine loading drive assembly 142 is connected to the loading seat 141 and is used to drive the loading seat 141 to extend or retract into the liquid storage chamber 13. The liquid medicine loading drive assembly 142 can be an existing multi-stage telescopic shaft / multi-stage chain transmission telescopic mechanism, which will not be described in detail.

[0175] The liquid taking member 143 is detachably mounted on the liquid medicine tank 15 .

[0176] During replacement, the liquid medicine loading drive assembly 142 first extends the liquid medicine tank 15 to be replaced out of the liquid storage chamber 13, and then the robot arm device 22 drives the end effector 23 to first take out the liquid taking part 143, and then clamp the liquid medicine tank 15 to be replaced to the temporary storage space, and then clamp a new liquid medicine tank 15 from the temporary storage space and place it on the loading seat 141, and then the robot arm device 22 drives the end effector 23 to unscrew the tank cover on the new liquid medicine tank 15, and then install the liquid taking part 143 into the new liquid medicine tank 15, and then the liquid medicine loading drive assembly 142 first extends the liquid medicine tank 15 to be replaced out of the liquid storage chamber 13, and then the robot arm device 22 drives the end effector 23 to first take out the liquid medicine tank 15 to be replaced to the temporary storage space, and then clamp the new liquid medicine tank 15 from the temporary storage space and place it on the loading seat 141, and then the robot arm device 22 drives the end effector 23 to unscrew the tank cover on the new liquid medicine tank 15, and then install the liquid taking part 143 into the new liquid medicine tank 15, and then The driving component 142 retracts the replaced liquid medicine tank 15 into the liquid storage chamber 13, and the liquid extraction mechanism in the wet process machine 1 can be connected to the liquid extraction component 143 through a retractable flexible tube (for example, a retractable bellows). The retractable flexible tube is used for connection to avoid affecting the disassembly and assembly operation of the liquid extraction component 143 and the movement of the carrier 141, so as to absorb the liquid medicine from the new liquid medicine tank 15, or the robot arm device 22 drives the end effector 23 to grab the corresponding joint on the wet process machine 1 and connect it to the liquid extraction component 143.

[0177] Furthermore, if Figure 7 As shown, the design of the liquid taking member 143 includes a liquid taking tube 1432 and a liquid taking cover 1431 .

[0178] The liquid collection tube 1432 can extend into the liquid medicine tank 15 through the liquid medicine port 151 of the liquid medicine tank 15; the liquid collection cover 1431 is sleeved on the liquid collection tube 1432 and can cooperate with the liquid medicine port 151 to block the liquid medicine port 151; wherein, the liquid collection tube 1432 plays the role of collecting liquid, and the liquid collection cover 1431 has the same function as the original tank cover of the liquid medicine tank 15, which plays the role of blocking the liquid medicine port 151 and fixing the liquid collection tube 1432 (the cooperation between the liquid collection cover 1431 and the liquid medicine port 151 of the liquid medicine tank 15 can be plug-in cooperation, thread cooperation, etc., without limitation). In order to facilitate the connection with the liquid collection mechanism in the wet machine 1, one end of the pipe section of the liquid collection tube 1432 located outside the liquid collection cover 1431 is connected to a liquid collection joint 1433. The liquid extraction connector 1433 is a one-way valve connector, that is, it can only absorb liquid medicine from the liquid medicine tank 15 , and the liquid cannot flow back into the liquid medicine tank 15 .

[0179] After the liquid taking part 143 is taken out, in order to facilitate placement, a fixing part 144 is vertically installed on the material carrier 141 to fix the liquid taking part 143 to be installed. Taking the design of the above-mentioned liquid taking tube 1432 and the liquid taking cover 1431 as an example, the fixing part 144 is designed as a hollow column structure for the liquid taking tube 1432 to be inserted movably. Since some residual liquid medicine may remain in the liquid taking tube 1432 after being taken out, after the liquid taking tube 1432 is inserted into the fixing part 144, this part of the residual liquid medicine will remain in the fixing part 144, causing pollution and waste. For this reason, a recovery hole (not shown in the figure) can be opened at the bottom of the fixing part 144, and the recovery hole can be connected to the recovery tank through a recovery tube (which can be a retractable corrugated tube) to recover the residual liquid medicine in the fixing part 144. At the same time, the recovery hole can also be connected to a cleaning device through a cleaning tube, and a cleaning liquid is injected into the fixing part 144 through the cleaning device to clean the liquid taking tube 1432.

[0180] In addition, the present application may also design a medicine tank fixture (not shown) for adapting to loading of medicine liquid tanks 15 of different sizes, and the medicine tank fixture may be set on the loading seat 141 .

[0181] The number of the liquid medicine loading mechanism 14 in the present application can be designed to be one or more according to needs, and there is no specific limitation.

[0182] Furthermore, the present application is designed with a monitoring device (not shown in the figure) capable of monitoring the amount of liquid medicine in the liquid medicine tank 15. In order to avoid affecting the replacement of the liquid medicine tank 15, the monitoring device can be a weighing device, which is arranged on the loading seat 141 to weigh the placed liquid medicine tank 15. When the weight is lower than the preset value, it is regarded that the amount of liquid medicine in the liquid medicine tank 15 has reached the warning value. At this time, a signal can be sent to the control device 5, and then the control device 5 controls the transfer robot 2 to perform the liquid replacement operation.

[0183] The monitoring device can also be an ultrasonic level meter or an infrared level meter. The top of the medicine liquid tank 15 can be provided with a transparent window (not shown in the figure), and the monitoring device is installed on the wet process machine 1. The transparent window of the medicine liquid tank 15 installed on the carrier 141 is used to detect the internal liquid level height through the transparent window, thereby monitoring the amount of medicine in the medicine liquid tank 15.

[0184] When the monitoring device detects that the liquid level of the liquid tank 15 in use has reached the warning value, the information is fed back to the control device 5, and the control device 5 automatically generates a liquid replacement task (the liquid replacement start time of the task is manually specified (taking into account the currently scheduled experimental tasks), and the system automatically calculates the liquid replacement completion time based on this time and the standard working hours for liquid replacement, thereby completing the automatic scheduling of liquid replacement tasks). During the liquid replacement process, the wet process machine 1 is restricted and cannot be used, and the liquid replacement priority is designed to be the highest.

[0185] Furthermore, if Fig. 9 As shown, the sample supply and receiving device 3 includes a device body 31 and a sample shifting device 32 .

[0186] A sample chamber is provided in the equipment body 31; a first loading and unloading station 311, a second loading and unloading station 312, a first temporary storage station 313 and a second temporary storage station 314 are provided at the bottom of the sample chamber. The first loading and unloading station 311, the second loading and unloading station 312, the first temporary storage station 313 and the second temporary storage station 314 are each provided with at least one station slot for placing the flower basket 33.

[0187] A first loading and unloading window (not shown in the figure) connecting the sample chamber and the outside of the clean space is provided at a position corresponding to the first loading and unloading station 311 on the equipment body 31. Experimenters can place semiconductor materials 331 to be experimented on into the first loading and unloading station 311 through the first loading and unloading window, or collect semiconductor materials 331 on which experiments have been completed from the first loading and unloading station 311 through the first loading and unloading window; a first door and window that can be opened and closed is installed on the first loading and unloading window, and the first door and window is an existing electric door and window design, which will not be described in detail.

[0188] A second loading and unloading window (not shown in the figure) connecting the sample chamber and the clean space is provided at a position corresponding to the second loading and unloading station 312 on the equipment body 31. The transfer robot 2 can grab the flower basket rack 33 with semiconductors from the second loading and unloading station 312 through the second loading and unloading window, or place the flower basket rack 33 with processed semiconductor materials 331 in the second loading and unloading station 312; the second loading and unloading window is equipped with a second door and window that can be opened and closed. The second door and window is an existing electric door and window design, which will not be described in detail.

[0189] The sample shifting device 32 is installed in the sample chamber and is used to move semiconductor samples between the first loading and unloading station 311, the second loading and unloading station 312, the first temporary storage station 313 and the second temporary storage station 314. The first temporary storage station 313 can be used to store processed semiconductor materials 331, and the second temporary storage station 314 can be used to store semiconductor materials 331 to be processed.

[0190] The usage process is as follows:

[0191] After the sample shifting device 32 detects that there is a flower basket 33 at the first loading and unloading station 311, the flower basket 33 is moved to the second temporary storage station 314 in sequence, and then the corresponding flower basket 33 in the second temporary storage station 314 is moved to the second loading and unloading station 312 according to the order information, waiting for the transfer robot 2 to take it away; after the sample shifting device 32 detects that there is a flower basket 33 at the second loading and unloading station 312, the flower basket 33 is moved to the first temporary storage station 313 in sequence, and then the corresponding flower basket 33 in the first temporary storage station 313 is moved to the first loading and unloading station 311 according to the order information, waiting for the experimenter to take it away. The sequential recognition of the flower basket 33 can be to recognize the QR code or number on the flower basket 33, and there is no specific limitation.

[0192] The sample shifting device 32 in the present application can be designed to include a three-axis moving module, a clamping mechanism and an identification sensor, etc. The three-axis moving module, the clamping mechanism and the identification sensor are existing designs. Taking the identification of a QR code as an example, the identification sensor can be a scanner. Taking the identification of a number as an example, the identification sensor can be a camera. There is no specific limitation.

[0193] Furthermore, if Fig. 9 As shown, in order to facilitate the experimenter to record the order and set the experimental parameter requirements, a human-machine interaction device 34 is installed on one side of the first loading and unloading window of the equipment body 31, which is connected to the control device 5 and extends outside the clean space. The control device 5 can be set in the clean space, without specific limitation.

[0194] Furthermore, if Figure 1 as well as Fig.10 As shown, for the design of the liquid medicine feeding and receiving device 4, it includes a liquid medicine buffer box 41. The liquid medicine buffer box 41 is provided with a buffer chamber for storing the liquid medicine tank 15 to be loaded or the replaced liquid medicine tank 15; the liquid medicine buffer box 41 is provided with a buffer opening; and the buffer opening is provided with an openable and closable buffer door 42. The number of liquid medicine buffer boxes 41 is preferably designed to be multiple, so that liquid medicine tanks 15 of different liquid medicine types can be stored separately, and the replaced empty liquid medicine tanks 15 can be stored separately, etc.

[0195] Furthermore, if Figure 1 As shown, the floor of the clean room is divided into an outer annular area 61 , an inner annular area 62 , and a central annular area 63 located in the inner annular area 62 from the outside to the inside.

[0196] The wet process machine 1 is disposed in the outer annular area 61 or the central annular area, and the sample supply and collection device 3 and the drug solution supply and collection device 4 are disposed in the outer annular area 61 .

[0197] The above layout design forms a U-shaped layout, which enables compact arrangement of various equipment, effectively reduces the occupancy of clean space, shortens the travel of the mobile robot, extends the endurance of the mobile robot, and further reduces the cost of the experiment.

[0198] A charging station for charging the transfer robot 2 can be set on the outer annular area 61, and at least two mobile robots can be set up to improve the experimental efficiency. When one of the robots is low on power, the other can work normally to ensure stable experiment progress.

[0199] Furthermore, in order to achieve flexible operation, the robot arm device 22 is preferably a collaborative robot arm with a visual sensor for identification and positioning.

[0200] Furthermore, the mobile device 21 is an AGV vehicle, which is equipped with sensors such as laser radar for realizing automatic path planning.

[0201] The working process of the black light wet method laboratory designed for scientific research in this application is as follows:

[0202] 1. The experimenter verifies his identity through the human-machine interaction device 34, and then selects the experiment type. After the selection is completed, the experiment parameters / process route, etc. are set to form an experiment work order. The control device 5 arranges the newly formed experiment work orders in order according to the operation status of the existing wet machine 1 and the waiting experiment work orders;

[0203] 2. Place the flower basket 33 with the semiconductor material 331 to be processed into the first loading and unloading station 311 through the first loading and unloading window;

[0204] 3. The control device 5 sends a signal to the sample shifting device 32 according to the experimental work order. The sample shifting device 32 moves the flower basket 33 in the first loading and unloading station 311 to the second temporary storage station 314, and then waits for the execution signal of the experimental work order. When it is the turn to execute the experimental work order, the control device 5 sends a signal to the sample shifting device 32, the transfer robot 2 and the wet machine 1. Then the shifting device moves the flower basket 33 from the second temporary storage station 314 to the second loading and unloading station 312, waiting for the transfer robot 2 to take it away;

[0205] 4. The transfer robot 2 loads the flower basket 33 in the second loading and unloading station 312 to the corresponding wet process machine 1 according to the experimental work order;

[0206] 5. The corresponding wet process machine 1 processes the semiconductor material 331 in the flower basket 33 according to the experimental parameters in the experimental work order, pushes the flower basket 33 onto the sample loading mechanism 12 after the processing is completed, and sends a signal to the transfer robot 2;

[0207] 6. The transfer robot 2 transfers the flower basket 33 on the sample loading mechanism 12 to the second loading and unloading station 312, and sends a signal to the sample shifting device 32;

[0208] 7. The sample shifting device 32 moves the flower basket rack 33 in the second loading and unloading station 312 to the first temporary storage station 313, then waits for the previous completed flower basket rack 33 to complete the material collection, and then moves the flower basket rack 33 from the first temporary storage station 313 to the first loading and unloading station 311, and feeds back a signal to the control device 5. The control device 5 sends a notification to the mobile terminal of the corresponding experimenter to remind the experimenter to pick up the semiconductor material 331 that has completed the experiment. At the same time, the operating data during the experiment is sorted and analyzed and sent to the experimenter synchronously.

[0209] The control device 5 can collect the operating data of each execution device in real time (process recording, process parameter collection, abnormal event processing), establish a traceable and growable process library, and optimize scheduling.

[0210] It can also monitor abnormalities during the experiment in real time and automatically initiate early warnings.

[0211] It can also comprehensively monitor and record equipment history, repairs, maintenance, and inspections.

[0212] The above is a detailed introduction to the black light wet method laboratory for scientific research provided by this application. For general technicians in this field, according to the ideas of the embodiments of this application, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on this application.

Claims

1. A black light wet process laboratory for scientific research, characterized in that: It includes a laboratory body, a wet process machine (1), a transfer robot (2), a sample supply and collection device (3), a liquid medicine supply and collection device (4), and a control device (5); The laboratory body is used to provide a clean space; The wet process machine (1) is arranged in the clean space and is used to process semiconductor samples; The sample supply and collection device (3) is arranged in the clean space and is used to provide semiconductor samples to be processed and to collect semiconductor samples that have been processed; The liquid medicine supply and collection device (4) is arranged in the clean space and is used to provide liquid medicine tanks (15) to be replaced and to store replaced liquid medicine tanks (15); The transfer robot (2) is installed in the clean space and is used to transfer semiconductor samples between the wet process machine (1), the transfer robot (2) and the sample supply and reception device (3), and to transfer a liquid medicine tank (15) between the wet process machine (1), the transfer robot (2) and the liquid medicine supply and reception device (4); The transfer robot (2) comprises a moving device (21), a mechanical arm device (22), at least one end effector (23) and an accompanying device (24); The accompanying device (24) is capable of following the moving device (21) and providing a temporary storage space; The mechanical arm device (22) is installed on the moving device (21); At least one end effector (23) is mounted on the mechanical arm device (22) and is used to grab semiconductor samples and to grab a liquid medicine tank (15); The control device (5) is communicatively connected with the wet process machine (1), the transfer robot (2), the sample supply and collection device (3) and the liquid medicine supply and collection device (4); The accompanying device (24) is detachably connected to the mobile device (21); It also includes an accompanying fixing frame (26) for fixing the accompanying devices (24) one by one; The transfer robot (2) further comprises a forking device (27); The forking device (27) is installed on the mobile device (21) and is used to fork the accompanying device (24) located on the accompanying fixed frame (26); The fork picking device (27) comprises a fork picking lifting device (271) and a fork plate (272); The driving end of the fork-taking lifting device (271) is connected to the fork plate (272) and is used to drive the fork plate (272) to move up and down, so as to fork the accompanying device (24) away from the accompanying fixing frame (26) or fork the accompanying device (24) back into the accompanying fixing frame (26).

2. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The accompanying fixing frame (26) is installed in the clean space.

3. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The accompanying fixing frame (26) is provided with an avoidance cavity for the fork plate (272) to extend into at a position below the accompanying device (24); The fork lifting device (271) is installed on the top of the moving device (21).

4. The black light wet process laboratory for scientific research according to claim 3, characterized in that: A plurality of first fork positioning structures (2721) are provided on the top of the fork plate (272); A plurality of second forking and positioning structures (241) which are positioned one-to-one with the first forking and positioning structures (2721) are provided at the bottom of the accompanying device (24).

5. The black light wet process laboratory for scientific research according to claim 4, characterized in that: The accompanying device (24) is provided with a cavity for forming the temporary storage space; The accompanying device (24) is provided with an accompanying opening and closing door mechanism (242) for controlling the opening and closing of the cavity.

6. The black light wet process laboratory for scientific research according to claim 5, characterized in that: A first docking structure is provided at the bottom of the accompanying device (24); The first docking structure is provided with a first conductive structure electrically connected to the accompanying opening and closing door mechanism (242); The mobile device (21) is provided with a second docking structure (211) capable of docking with the first docking structure; The second docking structure (211) is provided with a second conductive structure capable of contacting and conducting electricity with the first conductive structure; The transfer robot (2) is also used to supply power to the accompanying opening and closing door mechanism (242) when the first conductive structure and the second conductive structure are in contact and conduct electricity.

7. The black light wet laboratory for scientific research according to claim 6, characterized in that: The first docking structure is provided with a first air guide structure connected to the temporary storage space; The second docking structure (211) is provided with a second air guiding structure capable of docking and communicating with the first air guiding structure; An air supply device connected to and in communication with the second air guide structure is installed on the moving device (21).

8. The black light wet process laboratory for scientific research according to claim 5, characterized in that: The portable fixing frame (26) comprises two support plates (261) which are symmetrically arranged at intervals; Position limiting protrusions (243) capable of contacting and abutting against the top of the support plate (261) in a one-to-one correspondence are respectively provided on both side surfaces of the accompanying device (24).

9. The black light wet process laboratory for scientific research according to claim 6, characterized in that: The accompanying fixing frame (26) is provided with a floating correction module; The floating correction module is used to correct the position of the moving device (21) or the forking device (27) extending into the accompanying fixing frame (26), so that the first forking positioning structure (2721) is directly opposite to the second forking positioning structure (241).

10. The black light wet process laboratory for scientific research according to claim 1, characterized in that: An anti-corrosion lining is provided in the temporary storage space.

11. The black light wet process laboratory for scientific research according to claim 1, characterized in that: There are at least two end effectors (23); One of the end effectors (23) is used to grab a semiconductor sample; The other end effector (23) is used to grab the liquid medicine tank (15); The end effector (23) is detachably connected to the robot arm device (22) via a joint assembly (25); The accompanying device (24) is provided with a placement station (244) for placing the end effector (23).

12. The black light wet process laboratory for scientific research according to claim 1, characterized in that: A sample loading mechanism (12) is installed on the wet process machine (1) below the sample inlet and outlet (11) for carrying semiconductor materials (331) to be fed into the sample inlet and outlet (11) or carrying semiconductor materials (331) fed out of the sample inlet and outlet (11).

13. The black light wet process laboratory for scientific research according to claim 12, characterized in that: The sample loading mechanism (12) comprises a loading plate (121) and a sample loading drive assembly (122); The material carrier plate (121) is rotatably mounted on the wet process machine (1); The sample loading drive assembly (122) is mounted on the wet process machine (1) and connected to the loading plate (121) to drive the loading plate (121) to rotate.

14. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The wet process machine (1) is provided with a liquid medicine loading mechanism (14) at the position of the liquid storage chamber (13), which is used to carry the liquid medicine tank (15); The liquid medicine loading mechanism (14) comprises a loading seat (141), a liquid medicine loading drive assembly (142) and a liquid taking piece (143); The material loading seat (141) is used to carry the liquid medicine tank (15); The liquid medicine loading drive assembly (142) is connected to the loading seat (141) and is used to drive the loading seat (141) to extend out of or retract into the liquid storage chamber (13); The liquid extraction member (143) is detachably mounted on the liquid medicine tank (15).

15. The black light wet process laboratory for scientific research according to claim 14, characterized in that: The liquid collection member (143) comprises a liquid collection tube (1432) and a liquid collection cover (1431); The liquid extraction tube (1432) can extend into the medicine liquid tank (15) through the medicine liquid port (151) of the medicine liquid tank (15); The liquid collection cover (1431) is sleeved on the liquid collection tube (1432) and can cooperate with the liquid medicine port (151) to seal the liquid medicine port (151); A fixing member (144) is vertically mounted on the material loading seat (141) and is used to fix the liquid extraction member (143) to be installed; The fixing member (144) is a hollow columnar rod structure for the liquid extraction tube (1432) to be movably inserted into.

16. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The sample supply and collection device (3) comprises a device body (31) and a sample displacement device (32); The device body (31) is provided with a sample chamber; A first loading and unloading station (311), a second loading and unloading station (312), a first temporary storage station (313) and a second temporary storage station (314) are provided at the bottom of the sample chamber; A first loading and unloading window is provided on the equipment body (31) at a position corresponding to the first loading and unloading station (311), communicating with the sample chamber and the outside of the clean space; The first loading and unloading window is provided with a first door and window that can be opened and closed; A second loading and unloading window is provided on the equipment body (31) at a position corresponding to the second loading and unloading station (312), connecting the sample chamber and the clean space; The second loading and unloading window is provided with a second door and window that can be opened and closed; The sample shifting device (32) is installed in the sample chamber and is used to move semiconductor samples between the first loading and unloading station (311), the second loading and unloading station (312), the first temporary storage station (313) and the second temporary storage station (314).

17. The black light wet process laboratory for scientific research according to claim 16, characterized in that: A human-machine interaction device (34) is installed on one side of the first loading and unloading window on the equipment body (31), which is in communication connection with the control device (5) and extends outside the clean space.

18. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The liquid medicine supply and collection device (4) comprises a liquid medicine buffer box (41); The liquid medicine cache box (41) is provided with a cache chamber for storing liquid medicine tanks (15) to be loaded or replaced liquid medicine tanks (15); The liquid medicine cache box (41) is provided with a cache opening; An openable and closable cache door (42) is installed on the cache opening.

19. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The floor of the clean space is divided from the outside to the inside into an outer annular area (61), an inner annular area (62), and a central area (63) located within the inner annular area (62); The wet process machine (1) is arranged in the outer annular area (61) or the central area (63); The sample supply and collection device (3) and the drug solution supply and collection device (4) are arranged in the outer annular area (61).

20. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The mechanical arm device (22) is a collaborative mechanical arm.

21. The black light wet process laboratory for scientific research according to claim 1, characterized in that: The mobile device (21) is an AGV vehicle.

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