Anode assembly tool for excimer laser discharge cavity

Abstract

The present invention discloses an anode assembly tool for an excimer laser discharge cavity, comprising an expansion plate, an extension platform is provided at the bottom of the expansion plate, a clamping platform is provided at the bottom of the extension platform, a limit plate is provided at the top of the expansion plate, a synchronous expansion component is provided inside and at the bottom of the expansion plate, the synchronous expansion component can adjust the width and height of the assembly tool according to the size of the discharge cavity, and a connecting platform is installed at the top of the clamping platform. The present invention, through the expansion plate, extension platform, clamping platform, limit plate and synchronous expansion component, can make the tool adjust its own width and height according to the size of the discharge cavity, so that the tool can adapt to the installation of discharge cavities of different specifications and sizes, avoiding the cost of designing and manufacturing multiple tooling for discharge cavities of different specifications, and the tooling structure is simple and easy to use, and can quickly and accurately position the anode of the discharge cavity.

Description

Technical Field

[0001] The invention relates to the technical field of anode assembly tooling, in particular to an anode assembly tooling for a discharge cavity of an excimer laser. Background Art

[0002] Excimer laser is the laser device with the highest output power in the ultraviolet band at present. It is widely used in industry, medical treatment, scientific research and other fields. Due to its high output laser peak power, large pulse energy and wavelength in the ultraviolet region, it has developed rapidly and has been widely used. It is the main excimer laser used at present. In the assembly process of excimer laser, the anode assembly of the discharge cavity is involved. The traditional assembly method uses manual assembly, which is time-consuming and labor-intensive.

[0003] Due to the large degree of freedom of the anode base, the anode is prone to shift during the positioning process, resulting in the displacement of the anode discharge position. Inaccurate anode positioning will affect subsequent high-voltage discharge. Since the discharge chamber has different specifications and types, the specifications of the anode bases in different discharge chambers are also different. When using existing tooling to install the anode base, the tooling may not be convenient to match the discharge chamber and anode base of other specifications, making it inconvenient to accurately install anode bases of other specifications, which will cause the staff to design tooling of different specifications according to the different specifications of anode sizes, increasing the production cost. In view of the above problems, it is urgent to carry out innovative design on the original basis. Summary of the invention

[0004] The purpose of the present invention is to provide an anode assembly tool for an excimer laser discharge cavity, so as to solve the problem raised in the above background technology that when using the existing tool to install the anode base, the tool may not be convenient to adapt to the discharge cavity and the anode base of other specifications, thereby making it inconvenient to accurately install the anode base of other specifications. The technical solution of the present invention is aimed at the technical problem that the existing technical solution is too single, and provides a solution that is significantly different from the existing technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: an anode assembly tool for an excimer laser discharge cavity, comprising an expansion plate, an extension platform is arranged at the bottom of the expansion plate, a clamping platform is arranged at the bottom of the extension platform, a limit plate is arranged at the top of the expansion plate, a synchronous expansion component is arranged inside and at the bottom of the expansion plate, the synchronous expansion component can adjust the width and height of the assembly tool according to the size of the discharge cavity, a connecting platform is installed at the top of the clamping platform, and the connecting platform is limited and slid in the groove at the bottom of the extension platform;

[0006] The regulating limit assembly is arranged at the bottom end of the extension platform and the inside of the clamping platform, and the regulating limit assembly is used to adjust the distance between the clamping platforms according to the size specifications of the anode base.

[0007] Preferably, the expansion plates and the clamping tables are provided in two groups, and the two groups are symmetrically distributed.

[0008] Preferably, a cylindrical notch is provided at a corner of the expansion plate, and the bottom of the limiting plate slides within a limited position at the top of the expansion plate.

[0009] Preferably, the synchronous expansion component includes a bevel gear A rotatably connected to the inside of the limit plate and a bidirectional screw A threadedly connected to the inside of the expansion plate, a bevel gear B is mounted on the surface of the bidirectional screw A, the bevel gear B is meshed with the bevel gear A, an oil cavity is opened inside the expansion plate, a piston rod A slides inside the oil cavity, and a piston rod B slides at the bottom of the oil cavity.

[0010] Preferably, the oil cavity is "L"-shaped, and the piston rod A slides within the oil cavities in the left and right groups of expansion plates in a limited manner.

[0011] Preferably, the bottom of the piston rod B is slidably connected to the sliding groove at the top of the extension platform.

[0012] Preferably, the adjustment limit assembly includes a bidirectional screw B rotatably connected to the cavity at the bottom of the extension platform, a sliding rod is also provided in the cavity at the bottom of the extension platform for limited sliding, a gear group is installed at the end of the bidirectional screw B, a knob is installed at the end of the gear group, a pull rod is provided for limited sliding inside the clamping platform, a protrusion is installed at the top of the pull rod, the protrusion is sleeved on the surface of the sliding rod, an extrusion block A is connected to the bottom end of the pull rod, a top block is provided for limited sliding in the groove on the inner side of the clamping platform, a thin rod is connected at the end of the top block, and an extrusion block B is connected at the end of the thin rod.

[0013] Preferably, the connecting platform is threadedly connected to the bidirectional screw rod B, a strip-shaped slide groove is provided inside the connecting platform, and the slide rod slides in a limited position in the strip-shaped slide groove.

[0014] Preferably, the surfaces of the pull rod and the thin rod are both sleeved with springs, and the extrusion block A and the extrusion block B are both provided with smooth inclined surfaces.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The present invention, through the provision of expansion plates, extension platforms, clamping platforms, limit plates and synchronous expansion components, can adjust the width and height of the tooling according to the size of the discharge chamber, so that the tooling can be adapted to the installation of discharge chambers of different specifications and sizes, avoiding the cost of designing and manufacturing multiple tooling for discharge chambers of different specifications, and the tooling has a simple structure and is easy to use, and can quickly and accurately position the anode of the discharge chamber.

[0017] 2. The present invention, through the provision of an adjustable limit assembly, can not only flexibly adjust the internal spacing of the clamping table according to the width of the anode base, but also change the fixing method between the clamping table and the anode base, thereby simplifying the installation steps between the anode base and the clamping table, and after the positioning tooling accurately installs the anode base into the cavity, the tooling can be quickly disassembled by adjusting the limit assembly, thereby simplifying the installation steps of the anode of the discharge chamber and shortening the installation time. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 is a schematic diagram of the discharge chamber structure;

[0019] Figure 2 It is a schematic diagram of the explosion structure inside the discharge chamber;

[0020] Figure 3 It is a schematic diagram of the tooling structure;

[0021] Figure 4 It is a schematic diagram of the explosion structure of the synchronous expansion component;

[0022] Figure 5 It is a schematic diagram of the cross-sectional structure of the synchronous expansion component;

[0023] Figure 6 for Figure 5 The enlarged structural diagram at A in the middle;

[0024] Figure 7 It is a schematic diagram of the structure of the adjustment limit assembly;

[0025] Figure 8 for Figure 7 The enlarged structural diagram at B in the middle;

[0026] Fig. 9 It is a schematic diagram of the cross-sectional structure of the adjustment limit assembly;

[0027] Fig.10 for Figure 7 Enlarged structural diagram at point C in the middle.

[0028] In the figure: 1. cavity; 2. mounting plate A; 3. anode base; 4. mounting plate B; 5. expansion plate; 6. extension table; 7. clamping table; 8. limit plate; 9. synchronous expansion assembly; 901. bevel gear A; 902. bidirectional screw A; 903. bevel gear B; 904. oil chamber; 905. piston rod A; 906. piston rod B; 10. connecting table; 11. adjustment limit assembly; 111. bidirectional screw B; 112. sliding rod; 113. gear set; 114. knob; 115. pull rod; 116. extrusion block A; 117. top block; 118. extrusion block B. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] See also Figure 1-7 The present invention provides a technical solution: an anode assembly tool for an excimer laser discharge cavity, comprising an expansion plate 5, an extension platform 6 is arranged at the bottom of the expansion plate 5, a clamping platform 7 is arranged at the bottom of the extension platform 6, a limit plate 8 is arranged at the top of the expansion plate 5, a synchronous expansion component 9 is arranged inside and at the bottom of the expansion plate 5, and the synchronous expansion component 9 can adjust the width and height of the assembly tool according to the size of the discharge cavity, and a connecting platform 10 is installed at the top of the clamping platform 7, and the connecting platform 10 is limited and slid in the groove at the bottom of the extension platform 6;

[0031] The regulating limit assembly 11 is arranged at the bottom end of the extension platform 6 and inside the clamping platform 7, and the regulating limit assembly 11 is used to adjust the distance between the clamping platforms 7 according to the size specifications of the anode base 3;

[0032] During operation, since the chamber 1 has different specifications and types, the specifications of the anode base 3 inside different chambers 1 are also different. When the existing tooling is used to install the anode base 3, the tooling may not be convenient to match the discharge chamber 1 and the anode base 3 of other specifications. This embodiment of the present invention can solve the above problem. The specific implementation method is as follows. When using the anode assembly tooling of the excimer laser discharge chamber, first turn the knob 114 to drive the bidirectional screw B111 to rotate through the gear set 113, so as to drive the clamping table 7 to adjust the internal spacing through the connecting table 10 so that the spacing can match the width of the anode base 3. , then slide the slide bar 112 upwards, and when the slide bar 112 slides upwards, it will drive the pull rod 115 to slide upwards through the protrusion, thereby driving the extrusion block A116 to slide upwards, at this time the extrusion block B118 loses pressure, and the top block 117 will shrink inwards due to the elastic force of the spring, at this time the anode base 3 is installed inside the clamping table 7, and the top end of the anode base 3 is fitted with the top end inside the clamping table 7, then release the slide bar 112, the spring on the surface of the pull rod 115 will drive the extrusion block A116 to slide downwards, thereby squeezing the inclined surface of the extrusion block B118 to make the top block 117 extend, so that the anode base 3 can be limited and fixed;

[0033] Then, the anode base 3 is placed inside the cavity 1. At this time, the bevel gear A901 is rotated. The bevel gear A901 will drive the bidirectional screw A902 to rotate through the bevel gear B903. At this time, the expansion plate 5 will slide to both sides, so that the side of the expansion plate 5 fits with the side wall of the cavity 1. When sliding, the expansion plate 5 will inject oil into the lower end of the oil cavity 904, thereby pushing the piston rod B906 to move downward, so that the expansion plate 5 can expand to both sides while driving the extension platform 6 to move synchronously. The top of the cavity 1 can be inserted into the cylindrical notch at the corner of the expansion plate 5. Then, the mounting plate A2 is installed on one side of the cavity 1, and then the mounting plate A2 is connected to the mounting plate B4 by bolts, so that the anode base 3 can be fixed;

[0034] As an embodiment of the present invention, the number of expansion plates 5 and clamping tables 7 is two groups, and the two groups are symmetrically distributed. The establishment of two groups of expansion plates 5 can facilitate the tooling to adjust its own size, and the establishment of two groups of clamping tables 7 can fix the anode base 3;

[0035] As an embodiment of the present invention, a cylindrical notch is provided at the corner of the expansion plate 5, and the bottom of the limiting plate 8 is limitedly slid at the top of the expansion plate 5. When the top of the cavity 1 is inserted into the cylindrical notch, the positioning tool can be prevented from shaking or moving inside the cavity 1. The limiting plate 8 can limit the expansion distance of the expansion plate 5.

[0036] As an embodiment of the present invention, the synchronous expansion component 9 includes a bevel gear A901 rotatably connected to the inside of the limit plate 8 and a bidirectional screw A902 threadedly connected to the inside of the expansion plate 5, a bevel gear B903 is installed on the surface of the bidirectional screw A902, and the bevel gear B903 is meshed with the bevel gear A901. An oil cavity 904 is opened inside the expansion plate 5, a piston rod A905 slides inside the oil cavity 904, and a piston rod B906 slides at the bottom of the oil cavity 904. When the expansion plate 5 moves, the piston rod A905 squeezes the oil inside the oil cavity 904, so that it falls to the bottom of the oil cavity 904, and then can push the piston rod B906 to move, and the synchronous expansion component 9 can adjust the size of the tooling according to the specifications of the cavity 1;

[0037] As an embodiment of the present invention, the oil cavity 904 is "L"-shaped, and the piston rod A905 slides within the oil cavity 904 in the left and right expansion plates 5. The "L"-shaped oil cavity 904 enables the positioning tool to adjust its height while adjusting its width;

[0038] As an embodiment of the present invention, the bottom of the piston rod B906 is slidably connected to the top slot of the extension platform 6, and the expansion plate 5 and the piston rod B906 will not affect the extension platform 6 during the extension process;

[0039] As an embodiment of the present invention, the adjustment limit assembly 11 includes a bidirectional screw B111 rotatably connected to the bottom cavity of the extension platform 6, a slide bar 112 is also limited in sliding in the bottom cavity of the extension platform 6, a gear set 113 is installed at the end of the bidirectional screw B111, a knob 114 is installed at the end of the gear set 113, a pull rod 115 is limited in sliding inside the clamping platform 7, a protrusion is installed at the top of the pull rod 115, the protrusion is sleeved on the surface of the slide bar 112, an extrusion block A116 is connected to the bottom end of the pull rod 115, a top block 117 is limited in sliding in the inner groove of the clamping platform 7, a thin rod is connected to the end of the top block 117, and an extrusion block B118 is connected to the end of the thin rod. The establishment of the adjustment limit assembly 11 can not only flexibly adjust the internal spacing of the clamping platform 7 according to the width of the anode base 3, but also enable the tooling to have the function of rapid disassembly and assembly, thereby simplifying the installation steps of the anode of the discharge chamber;

[0040] As an embodiment of the present invention, the connecting platform 10 is threadedly connected with the bidirectional screw B111, and a strip-shaped slide groove is provided inside the connecting platform 10. The slide rod 112 slides in a limited position in the strip-shaped slide groove. The strip-shaped slide groove makes it possible for the slide rod 112 to not affect the clamping platform 7 when sliding. When the connecting platform 10 moves in the slide groove, the protrusion also slides on the surface of the slide rod 112.

[0041] As an embodiment of the present invention, the pull rod 115 and the thin rod surface are both sleeved with springs, and the extrusion block A116 and the extrusion block B118 are both provided with smooth inclined surfaces. When the extrusion block B118 squeezes the inclined surface of the extrusion block A116, it will move inward. The establishment of the spring can make the extrusion block A116 and the extrusion block B118 automatically reset when the pressure is lost.

[0042] Working principle: when using the anode assembly tool of the excimer laser discharge chamber, first turn the knob 114 to drive the bidirectional screw B111 to rotate through the gear set 113, thereby driving the clamping table 7 to adjust the internal spacing through the connecting table 10 so that the spacing can match the width of the anode base 3, and then slide the slide bar 112 upward. When sliding upward, the slide bar 112 will drive the pull rod 115 to slide upward through the convex block, thereby driving the extrusion block A116 to slide upward. At this time, the extrusion block B118 loses pressure, and the top block 117 will shrink inward due to the elastic force of the spring. At this time, the anode base 3 is installed inside the clamping table 7, and the top of the anode base 3 is fitted with the top of the clamping table 7. Then release the slide bar 112. The spring on the surface of the pull rod 115 will drive the extrusion block A116 to slide downward, thereby squeezing the inclined surface of the extrusion block B118 to make the top block 117 extend, so that the anode base 3 can be limited and fixed;

[0043] Then, the anode base 3 is placed into the cavity 1. At this time, the bevel gear A901 is rotated, and the bevel gear A901 will drive the bidirectional screw A902 to rotate through the bevel gear B903. At this time, the expansion plate 5 will slide to both sides, so that the side of the expansion plate 5 fits with the side wall of the cavity 1. The expansion plate 5 will inject oil into the lower end of the oil cavity 904 when sliding, thereby pushing the piston rod B906 to move downward, so that the expansion plate 5 can expand to both sides while driving the extension platform 6 to move synchronously. The top of the cavity 1 can be inserted into the cylindrical notch at the corner of the expansion plate 5. Then, the mounting plate A2 is installed on one side of the cavity 1, and the mounting plate A2 is connected to the mounting plate B4 by bolts, so that the anode base 3 can be fixed.

[0044] The contents not described in detail in this specification belong to the prior art known to the professional and technical personnel in this field. In the description of the present invention, unless otherwise specified, "multiple" means two or more; the orientation or position relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail" and the like is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", "third" and the like are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0045] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An anode assembly tool for an excimer laser discharge cavity, comprising an expansion plate (5), characterized in that: An extension platform (6) is arranged at the bottom of the expansion plate (5), a clamping platform (7) is arranged at the bottom of the extension platform (6), a limit plate (8) is arranged at the top of the expansion plate (5), a synchronous expansion component (9) is arranged inside and at the bottom of the expansion plate (5), and the synchronous expansion component (9) can adjust the width and height of the assembly tool according to the size of the discharge cavity, and a connecting platform (10) is installed at the top of the clamping platform (7), and the connecting platform (10) is limited and slides in the groove at the bottom of the extension platform (6). The synchronous expansion component ( 9) comprising a bevel gear A (901) rotatably connected to the inside of the limit plate (8) and a bidirectional screw rod A (902) threadedly connected to the inside of the expansion plate (5), a bevel gear B (903) being mounted on the surface of the bidirectional screw rod A (902), the bevel gear B (903) being meshed with the bevel gear A (901), an oil chamber (904) being provided inside the expansion plate (5), a piston rod A (905) sliding inside the oil chamber (904), and a piston rod B (906) sliding at the bottom of the oil chamber (904); An adjustment limit assembly (11) is provided at the bottom end of the extension platform (6) and the inside of the clamping platform (7), and the adjustment limit assembly (11) is used to adjust the distance between the clamping platforms (7) according to the size specifications of the anode base (3). The adjustment limit assembly (11) comprises a bidirectional screw rod B (111) rotatably connected to the bottom cavity of the extension platform (6), and a slide rod (112) is also provided in the bottom cavity of the extension platform (6) for limiting sliding. The end of the bidirectional screw rod B (111) is provided with a A gear set (113) is provided, a knob (114) is installed at the end of the gear set (113), a pull rod (115) is provided inside the clamping platform (7) for limited sliding, a protrusion is provided at the top of the pull rod (115), the protrusion is sleeved on the surface of the sliding rod (112), the bottom end of the pull rod (115) is connected to an extrusion block A (116), a top block (117) is provided in the inner groove of the clamping platform (7) for limited sliding, a thin rod is connected to the end of the top block (117), and an extrusion block B (118) is connected to the end of the thin rod.

2. The anode assembly tool for an excimer laser discharge chamber according to claim 1, characterized in that: The expansion plates (5) and the clamping tables (7) are provided in two groups, and the two groups are symmetrically distributed.

3. The anode assembly tool for an excimer laser discharge chamber according to claim 2, characterized in that: A cylindrical notch is provided at a corner of the expansion plate (5), and the bottom of the limiting plate (8) slides in a limiting manner at the top of the expansion plate (5).

4. The anode assembly tool for an excimer laser discharge chamber according to claim 3, characterized in that: The oil chamber (904) is "L"-shaped, and the piston rod A (905) slides within the oil chambers (904) in the left and right expansion plates (5).

5. The anode assembly tool for an excimer laser discharge chamber according to claim 4, characterized in that: The bottom of the piston rod B (906) is slidably connected to the top sliding groove of the extension platform (6).

6. The anode assembly tool for an excimer laser discharge chamber according to claim 5, characterized in that: The connecting platform (10) is threadedly connected to the bidirectional screw rod B (111), a strip-shaped slide groove is provided inside the connecting platform (10), and the slide rod (112) slides in a limited position in the strip-shaped slide groove.

7. The anode assembly tool for an excimer laser discharge chamber according to claim 6, characterized in that: The pull rod (115) and the thin rod are both sleeved with springs, and the extrusion block A (116) and the extrusion block B (118) are both provided with smooth inclined surfaces.

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