Bypass flow channel structure and flow measurement device

Abstract

The present application discloses a bypass flow channel structure and a flow measurement device, which relates to the technical field related to flow measurement, and is used to solve the problems of cumbersome manufacturing process and high manufacturing cost of existing flow measurement devices. The bypass flow channel structure provided by the present application includes a body, which has a first wall surface and a second wall surface arranged opposite to each other in the first direction, and a detection flow channel and a receiving groove which are recessed and spaced toward the second wall surface are provided on the first wall surface, and the detection flow channel includes an inlet section, an outlet section and a receiving section connected between the inlet section and the outlet section, and an inlet sub-flow channel and an outlet sub-flow channel arranged at intervals are provided in the receiving groove, and the inlet sub-flow channel connects the inlet section with the receiving groove, and the outlet sub-flow channel connects the outlet section with the receiving groove, and the side of the inlet section and the outlet section away from the receiving section are both used to communicate with the external external flow channel fluid. The bypass flow channel structure provided by the present application can simplify the manufacturing process of the flow measurement device and reduce its manufacturing cost.

Description

Technical Field

[0001] The present application relates to the technical field related to flow measurement, and in particular to a bypass flow channel structure and a flow measurement device. Background Art

[0002] Flow measurement devices are used to detect the flow of fluids passing through fluid channels, mainly the flow of gases or liquids. In today's production and life, flow measurement devices have a wide range of applications, such as industrial control, gas monitoring, biomedicine, automobile air intake, HVAC systems, etc. Depending on the application scenario, the fluid components and flow ranges to be detected are also very different. Among them, the main indicators for evaluating the performance of flow measurement devices are accuracy, flow range, reliability, etc.

[0003] In the prior art, a plurality of different types of flow measurement components are arranged on the substrate of the flow measurement device, and the flow measurement chip in each flow measurement component is fixed on the substrate through the corresponding housing package, and the housing and the surface of the flow measurement chip facing away from the substrate jointly define a flow channel for the fluid to enter the flow channel to measure the flow of the fluid. However, each flow measurement chip needs to be aligned and connected with its own housing, resulting in a cumbersome manufacturing process and high manufacturing cost. Summary of the invention

[0004] The present application provides a bypass flow channel structure and a flow measurement device, which can solve the problems of complicated manufacturing process and high manufacturing cost of existing flow measurement devices.

[0005] To achieve the above-mentioned purpose, on the one hand, the bypass flow channel structure provided in the present application includes a main body, which has a first wall surface and a second wall surface arranged opposite to each other in a first direction, and a detection flow channel and a receiving groove which are recessed toward the second wall surface and arranged at intervals are provided on the first wall surface, and the detection flow channel includes an inlet section, an outlet section and a receiving section connected between the inlet section and the outlet section, and an inlet sub-flow channel and an outlet sub-flow channel arranged at intervals are provided in the receiving groove, the inlet sub-flow channel connects the inlet section with the receiving groove, and the outlet sub-flow channel connects the outlet section with the receiving groove, wherein the sides of the inlet section and the outlet section away from the receiving section are both used to communicate with the external external flow channel fluid, the first wall surface is used to be connected to a substrate, the receiving section is used to accommodate a first type of flow measurement component arranged on the substrate, and the receiving groove is used to accommodate a second type of flow measurement component arranged on the substrate.

[0006] On the other hand, the present application also provides a flow measurement device, comprising:

[0007] substrate;

[0008] In the bypass channel structure as described above, the first wall surface of the body is connected to the substrate;

[0009] Among them, a first type of flow measurement component and a second type of flow measurement component are arranged at intervals on the wall surface of the substrate facing the main body. After the first wall surface of the main body is connected to the substrate, the first type of flow measurement component is accommodated in the accommodating section, and the second type of flow measurement component is accommodated in the accommodating groove.

[0010] The above technical solution of the present application has at least the following beneficial technical effects: when the first wall surface of the body having the above structure is connected to the substrate, the first type of flow measurement component on the substrate is accommodated in the accommodating section, and the second type of flow measurement component on the substrate is accommodated in the accommodating groove, so as to realize the simultaneous packaging of the first type of flow measurement component and the second type of flow measurement component on the substrate through the same body, which is conducive to simplifying its process and reducing its manufacturing cost. In specific use, after the fluid of the outer flow channel enters the detection flow channel through the introduction section, it will be measured by the first type of flow measurement component accommodated in the accommodating section, and then it will be led out of the detection flow channel through the lead-out section and re-enter the outer flow channel. At the same time, the detection flow channel is connected to the receiving groove fluid through the introduction sub-flow channel and the lead-out sub-flow channel respectively, so that a part of the fluid of the detection flow channel can flow into the receiving groove, and the second type of flow measurement is performed through the second type of flow measurement component accommodated in the receiving groove. The flow measurement of the second type is performed, thereby using two types of flow measurement components to perform different detection types of flow measurement on the fluid in the outer flow channel, which is conducive to improving the flow measurement accuracy of the fluid and the flow measurement range ratio of the fluid (the ratio of the maximum measurable flow to the minimum measurable flow). BRIEF DESCRIPTION OF THE DRAWINGS

[0011] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0012] Figure 1 is a three-dimensional diagram of the bypass flow channel structure embodiment 1 of the present application;

[0013] Figure 2 It is a rear view of the bypass flow channel structure embodiment 1 of the present application;

[0014] Figure 3 is a perspective view of the bypass flow channel structure embodiment 1 of the present application;

[0015] Figure 4 It is a rear view of the main body in the first embodiment of the bypass flow channel structure of the present application;

[0016] Figure 5It is a rear view of the flow blocking structure in the first embodiment of the bypass flow channel structure of the present application;

[0017] Figure 6 This is a schematic diagram of a connection structure between the bypass flow channel structure embodiment 1 of the present application and the external flow channel;

[0018] Figure 7 This is a schematic diagram of another connection structure between the bypass flow channel structure embodiment 1 of the present application and the external flow channel;

[0019] Figure 8 This is a schematic diagram of the connection structure between the bypass flow channel structure embodiment 2 of the present application and the external flow channel;

[0020] Fig. 9 is a three-dimensional diagram of the bypass flow channel structure embodiment 3 of the present application;

[0021] Fig.10 This is a schematic diagram of the connection structure between the bypass flow channel structure embodiment 3 of the present application and the external flow channel;

[0022] Fig.11 This is one of the three-dimensional diagrams of the bypass flow channel structure embodiment 4 of the present application;

[0023] Fig.12 This is the second stereogram of the bypass flow channel structure embodiment 4 of the present application;

[0024] Fig.13 It is a structural schematic diagram of the flow measurement device of the present application;

[0025] Fig.14 It is a partial enlarged view of the flow measurement device of the present application;

[0026] Fig.15 It is a structural block diagram of the flow measurement device of the present application;

[0027] Fig.16 It is a cross-sectional view of an outer flow channel connected to the flow measurement device of the present application.

[0028] The main reference numerals in the drawings of this application specification are described as follows:

[0029] 1-body; 11-first wall; 12-second wall; 121-installation groove; 13-detection flow channel; 131-introduction section; 1311-first through hole; 132-exit section; 1321-second through hole; 133-accommodation section; 14-accommodation groove; 141-introduction sub-flow channel; 1411-first flow guide hole; 1412-first overflow glue ring groove; 142-exit sub-flow channel; 1421-second flow guide hole; 1422-second overflow glue ring groove; 15-first through hole; 16-second through hole; 17-first joint; 18-second joint;

[0030] 2-flow blocking structure; 21-first guide groove; 22-second guide groove;

[0031] 3- first sealing ring;

[0032] 4- second sealing ring;

[0033] 100-substrate; 101-first type flow measurement component; 1011-thermal mass flow chip; 1012-substrate layer; 1013-sensitive film; 1014-micro heat source; 1015-first temperature sensor; 1016-second temperature sensor; 1017-third temperature sensor; 1018-pin; 102-second type flow measurement component; 1021-package; 10211-first channel; 10212-second channel; 10213-third overflow glue ring groove; 10214-fourth overflow glue ring groove; 103-pad; 104-conductive via;

[0034] 200 - external flow channel; 201 - resistance module; 202 - first fluid hole; 203 - second fluid hole; 204 - first external connector; 205 - second external connector;

[0035] 300-first external hose;

[0036] 400-second external hose;

[0037] Z-first direction; Y-second direction; X-third direction. DETAILED DESCRIPTION

[0038] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0039] In the description of the present application, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present application.

[0040] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, unless otherwise specified, "plurality" means two or more.

[0041] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0042] The present application provides a bypass flow channel structure and a flow measurement device, which are described in detail below. It should be noted that the description order of the following embodiments does not limit the preferred order of the embodiments of the present application. In the following embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, please refer to the relevant description of other embodiments.

[0043] Reference Figure 1 The bypass channel structure provided in the present application includes a main body 1, and the main body 1 has a first wall surface 11 and a second wall surface 12 arranged opposite to each other in the first direction Z. A detection channel 13 and a receiving groove 14 which are recessed toward the second wall surface 12 and arranged at intervals are provided on the first wall surface 11. The detection channel 13 includes an inlet section 131, an outlet section 132 and a receiving section 133 connected between the inlet section 131 and the outlet section 132. An inlet sub-channel 141 and an outlet sub-channel 142 arranged at intervals are provided in the receiving groove 14, and the inlet sub-channel 141 connects the inlet section 131 with the receiving groove 14, and the outlet sub-channel 142 connects the outlet section 132 with the receiving groove 14. Among them, the sides of the inlet section 131 and the outlet section 132 away from the receiving section 133 are used to connect to the external external flow channel 200 (see the reference numerals) outside. Figure 6 ) is fluidly connected, the first wall 11 is used to communicate with the substrate 100 (see reference numerals Fig.13 ) is connected, and the accommodating section 133 is used to accommodate the first type of flow measurement component 101 (see reference numerals) disposed on the substrate 100 Fig.13 ), the receiving groove 14 is used to receive the second type flow measurement component 102 (see reference numerals) disposed on the substrate 100. Fig.13 ).

[0044] In this technical solution, when the first wall surface 11 of the body 1 having the above structure is connected to the substrate 100, the first type of flow measurement component 101 on the substrate 100 is accommodated in the accommodation section 133, and the second type of flow measurement component 102 on the substrate 100 is accommodated in the accommodation groove 14, so as to realize the simultaneous packaging of the first type of flow measurement component 101 and the second type of flow measurement component 102 on the substrate 100 through the same body 1, which is conducive to simplifying its process and reducing its manufacturing cost. In specific use, after a part of the fluid in the outer flow channel 200 enters the detection flow channel 13 through the introduction section 131, the first type of flow measurement will be performed through the first type of flow measurement component 101 accommodated in the accommodation section 133, and then it will be discharged from the detection flow channel 13 through the outlet section 132 and enter the outer flow channel 200. At the same time, the detection channel 13 is connected to the fluid of the receiving groove 14 through the inlet sub-channel 141 and the outlet sub-channel 142, so that a part of the fluid in the detection channel 13 can flow into the receiving groove 14, and perform a second type of flow measurement through the second type of flow measurement component 102 accommodated in the receiving groove 14. Thus, different types of flow measurements are performed on the fluid in the external flow channel 200 through two types of flow measurement components, which is beneficial to improving the flow measurement accuracy of the fluid and the flow measurement range ratio of the fluid (the ratio of the maximum measurable flow to the minimum measurable flow).

[0045] In other words, the detection principles or measurement principles of the first type of flow measurement component and the second type of flow measurement component are different. The first type of flow measurement can be one of a thermal mass flow chip, a micro-differential pressure flow chip, an ultrasonic flow measurement chip and an electromagnetic flow measurement chip, and the second type of flow measurement component can be another of a thermal mass flow chip, a micro-differential pressure flow chip, an ultrasonic flow measurement chip and an electromagnetic flow measurement chip, so that different types of flow measurements can be performed on the fluid in the external flow channel 200.

[0046] Based on the above embodiment, in order to make the size of the body 1 more compact and realize the miniaturization of the bypass channel structure, so as to ensure that it occupies a smaller connection area of ​​the substrate 100 when connected with the substrate 100, the introduction section 131 and the outlet section 132 both extend along the second direction Y and are arranged at intervals in the third direction X, and the receiving groove 14 is arranged in the interval between the introduction section 131 and the outlet section 132, and the first direction Z, the second direction Y and the third direction X are perpendicular to each other. In other words, the above-mentioned detection channel 13 is roughly U-shaped, and the receiving groove 14 is arranged in the U-shaped space formed by the detection channel 13, and it can also ensure that the communication channel between the detection channel 13 and the receiving groove 14 is easier to realize, so that part of the fluid entering through the external channel 200 is introduced into the detection channel 13, and the other part is introduced into the receiving groove 14.

[0047] In some embodiments, in combination Figure 1~Figure 3The bypass channel structure further includes a baffle structure 2 disposed on the second wall surface 12, on which a first flow guide groove 21 and a second flow guide groove 22 are provided which are not connected to each other, a first flow guide hole 1411 and a second flow guide hole 1421 which are connected and not connected to each other are provided on the bottom wall of the receiving groove 14, a first through hole 1311 which is connected to the bottom wall of the inlet section 131, and a second through hole 1321 which is connected to the bottom wall of the outlet section 132. The first flow guide hole 1411 and the first through hole 1311 are both connected to the first flow guide groove 21 to form an inlet sub-channel 141, and the second flow guide hole 1421 and the second through hole 1321 are both connected to the second flow guide groove 22 to form an outlet sub-channel 142. It can also be understood that the inlet sub-channel 141 is defined by the first guide hole 1411 , the first through hole 1311 and the first guide groove 21 , and the outlet sub-channel 142 is defined by the second guide hole 1421 , the second through hole 1321 and the second guide groove 22 .

[0048] In the actual manufacturing process, plug-ins or core rods corresponding to each other can be pre-arranged at the relative positions between the mold and the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321, and the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321 are made by the plug-ins or core rods on the mold. The first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321 are matched with the design requirements of the corresponding plug-ins or core rods, so that the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321 can be directly made on the main body 1, which is conducive to reducing the manufacturing difficulty and manufacturing cost.

[0049] For example, the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321 are all through along the first direction Z and are cylindrical through holes. In order to ensure the flow rate of the fluid is consistent, the flow areas of the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the second through hole 1321 are equal.

[0050] Reference Figure 2 , Figure 4 and Figure 5The second wall surface 12 is provided with a mounting groove 121 which is recessed toward the first wall surface 11, and the flow blocking structure 2 is embedded in the mounting groove 121 and sealedly connected with the mounting groove 121 to form an inlet sub-flow channel 141 and an outlet sub-flow channel 142. Moreover, by providing the mounting groove 121, on the one hand, it can provide positioning or limiting for the installation of the flow blocking structure 2, and on the other hand, it can reduce the size of the entire bypass flow channel structure in the first direction Z. Among them, in order to facilitate the accommodation section 133 and the receiving groove 14 of the main body 1 to be adapted to the positions of the first type flow measurement component 101 and the second type flow measurement component 102 on the substrate 100, respectively, the above-mentioned receiving groove 14 has a U-shaped structure, and the open end of the U-shaped receiving groove 14 is away from the accommodation section 133. Therefore, during processing and manufacturing, it is only necessary to ensure that the size of the second type flow measurement component 102 in the third direction X is strictly matched with the size of the receiving groove 14 in the third direction X, and the sizes of the two in the second direction Y can have an appropriate error, thereby improving the tolerance rate of the bypass flow channel structure, and facilitating the reliable accommodation of the second type flow measurement component 102 in the receiving groove 14.

[0051] Among them, the first guide hole 1411, the first through hole 1311, the second guide hole 1421 and the port of the second through hole 1321 close to the second wall surface 12 of the body 1 are all located in the mounting groove 121. The baffle structure 2 is provided with a first guide groove 21 and a second guide groove 22 on one side facing the bottom wall of the mounting groove 121, and is bonded to the mounting groove 121 by glue curing bonding / solid adhesive strip to achieve a sealed connection between the two. Specifically, the spacing between the first guide hole 1411 and the first through hole 1311 in the third direction X is less than or equal to the size of the first guide groove 21 in the third direction X, so as to ensure that the first guide hole 1411 and the first through hole 1311 are both located in the area covered by the first guide groove 21. Similarly, the distance between the second guide hole 1421 and the second through hole 1321 in the third direction X is less than or equal to the size of the second guide groove 22 in the third direction X to ensure that the second guide hole 1421 and the second through hole 1321 are both located in the area covered by the second guide groove 22 .

[0052] The baffle structure 2 is a plate-shaped structure. Figure 5 As shown, the baffle structure 2 is in the shape of a plate and is an integrated structure, and a first flow guide groove 21 and a second flow guide groove 22 that are not connected to each other are arranged on one side surface of the plate-shaped flow guide structure 2. Of course, the baffle structure 2 may also include two split sub-plates, one of the two sub-plates is provided with the first flow guide groove 21, and the other of the two sub-plates is provided with the second flow guide groove 22, and both sub-plates are arranged in the mounting groove 121.

[0053] Continue to refer to Figure 1The body 1 is provided with a first through hole 15 and a second through hole 16. The first through hole 15 is provided on a side of the introduction section 131 away from the accommodation section 133, and is used to connect the introduction section 131 with the external flow channel 200. The second through hole 16 is provided on a side of the outlet section 132 away from the accommodation section 133, and is used to connect the outlet section 132 with the external flow channel 200, so as to introduce the fluid of the external flow channel 200 through the introduction section 131 and to be discharged through the outlet section 132. Among them, the ends of the introduction section 131 and the outlet section 132 away from the accommodation section 133 do not penetrate the body 1. In other words, the ends of the introduction section 131 and the outlet section 132 away from the accommodation section 133 both have side walls.

[0054] In some embodiments of the present application, Figure 1 As shown, the body 1 has an outer side wall connected between the first wall surface 11 and the second wall surface 12, and the first via hole 15 and the second via hole 16 both extend along the second direction Y and are located on the same outer side wall. For example, the first via hole 15 is provided at the end of the introduction section 131 in its extension direction, and the second via hole 16 is provided at the end of the outlet section 132 in its extension direction. The first via hole 15 and the introduction section 131 have the same extension direction, and the second via hole 16 and the outlet section 132 have the same extension direction, so as to cope with the installation scenario where the outer flow channel 200 is located on the top side of the body 1, and the outer flow channel 200 and the body 1 have a certain reserved space in the second direction Y to achieve fluid communication between the outer flow channel 200 and the body 1.

[0055] In other embodiments of the present application, Figure 8 As shown, the main body 1 has an outer wall connected between the first wall 11 and the second wall 12, the first via 15 and the second via 16 both extend along the third direction X, and are respectively located on two opposite outer walls, the first via 15 and the second via 16 are respectively located on the left outer wall and the right outer wall of the main body 1 to cope with the usage scenario where the top space of the main body 1 is small during assembly.

[0056] The following is a detailed description of the differences between the bypass channel structure in various embodiments. The differences between the following embodiments are: the first via hole 15 and the second via hole 16 are arranged at different positions on the body 1, and the connection structure between the first via hole 15 and the second via hole 16 and the external flow channel 200 is different.

[0057] Embodiment 1

[0058] like Figure 1 and Figure 6As shown, the top of the body 1 is convexly provided with a first joint 17 and a second joint 18, the first joint 17 is connected to the side of the first through hole 15 away from the inlet section 131, and the second joint 18 is connected to the side of the second through hole 16 away from the outlet section 132, and the first joint 17 and the second joint 18 are both used to communicate with the outer flow channel 200. For example, in specific use, the first joint 17 is directly inserted into the first fluid hole 202 of the outer flow channel 200, and the second joint 18 is directly inserted into the second fluid hole 203 of the outer flow channel 200, so as to quickly realize the fluid conduction between the bypass flow channel structure and the outer flow channel 200. For example, the insertion ends of the first joint 17 and the second joint 18 are both tapered, and when the first joint 17 is inserted into the first fluid hole 202, the small diameter end of the tapered insertion end of the first joint 17 enters the first fluid hole 202 first. Similarly, when the second connector 18 is inserted into the second fluid hole 203 , the small-diameter end of the tapered insertion end of the second connector 18 enters the second fluid hole 203 first.

[0059] Combination Figure 6 and Figure 7 In other embodiments, a first external connector 204 is provided at the first fluid hole 202 of the outer flow channel 200, and a second external connector 205 is provided at the second fluid hole 203 of the outer flow channel 200. Thus, the first external connector 204 of the outer flow channel 200 can be connected to the first connector 17 through the first external hose 300, and the second external connector 205 of the outer flow channel 200 can be connected to the second connector 18 through the second external hose 400.

[0060] Embodiment 2

[0061] like Figure 8 As shown, a first connector 17 is convexly provided on the left outer wall of the body 1, and a second connector 18 is convexly provided on the right outer wall of the body 1. The first connector 17 is connected to the side of the first through hole 15 away from the introduction section 131, and the second connector 18 is connected to the side of the second through hole 16 away from the outlet section 132. Both the first connector 17 and the second connector 18 are used to communicate with the outer flow channel 200. For example, in specific use, a first external connector 204 is provided at the first fluid hole of the outer flow channel 200, and a second external connector 205 is provided at the second fluid hole of the outer flow channel 200. The first connector 17 and the first external connector 204 can be connected by an external hose, and the second connector 18 and the second external connector 205 can be connected by another external hose, so as to quickly realize the fluid conduction of the bypass flow channel structure and the outer flow channel 200.

[0062] Alternatively, in some other embodiments, the first fluid hole of the external flow channel 200 is not provided with the first external connector 204, and the second fluid hole of the external flow channel 200 is not provided with the second external connector 205. In this case, two external hoses can be selected, and each external hose has a tapered insertion end. The tapered insertion end of one external hose is inserted into the first fluid hole, and the other end of the external hose is sleeved on the outer periphery of the first connector 17. The tapered insertion end of the other external hose is inserted into the second fluid hole, and the other end of the external hose is sleeved on the outer periphery of the second connector 18.

[0063] Embodiment 3

[0064] Combination Fig. 9 and Fig.10 , which is different from the first embodiment in that: the top of the body 1 does not need to be protruding with the first joint 17 and the second joint 18, but a first sealing ring 3 is provided at the end of the first through hole 15 away from the inlet section 131, and a second sealing ring 4 is provided at the end of the second through hole 16 away from the outlet section 132. In specific use, the first external joint 204 can be connected to the first fluid hole 202 of the outer flow channel 200, and the second external joint 205 can be connected to the second fluid hole 203 of the outer flow channel 200, and then the first external joint 204 is inserted into the first through hole 15 to compress the first sealing ring 3, and the second external joint 205 is inserted into the second through hole 16 to compress the second sealing ring 4, so as to achieve a sealed connection between the two, and can compress the volume of the entire bypass channel structure.

[0065] Alternatively, in some other embodiments, the distance between the external flow channel 200 and the body 1 is relatively far, and in this case, an external hose may be connected at the first external connector 204, and the external hose has a tapered plug end, and the tapered plug end of the external hose is inserted into the first through hole 15 to compress the first sealing ring 3. At the same time, an external hose is also connected at the second external connector 204, and the external hose has a tapered plug end, and the tapered plug end of the external hose is inserted into the second through hole 16 to compress the second sealing ring 4.

[0066] Embodiment 4

[0067] like Fig.11 and Fig.12As shown, the difference between it and the second embodiment is that: the end of the first through hole 15 away from the introduction section 131 is provided with a first sealing ring 3, and the end of the second through hole 16 away from the outlet section 132 is provided with a second sealing ring 4. In specific use, the first external connector 204 can be connected to the first fluid hole 202 of the outer flow channel 200, and the second external connector 205 can be connected to the second fluid hole 203 of the outer flow channel 200. Among them, the first external connector 204 and the first through hole 15 can be connected by an external hose, and the tapered plug end of the external hose is inserted into the first through hole 15 to compress the first sealing ring 3. At the same time, the second external connector 205 and the second through hole 16 can be connected by another external hose, and the tapered plug end of the external hose is inserted into the second through hole 16 to compress the second sealing ring 4 to achieve a sealed connection between the two.

[0068] It should be noted that the difference between the first embodiment and the second embodiment is that: in order to be applied to different usage scenarios, the opening direction and setting position of the first via hole 15 and the second via hole 16 can be adjusted. Similarly, the setting position of the first joint 17 and the second joint 18 can be adaptively adjusted following the change of the first via hole 15 and the second via hole 16. Figure 1 As shown, the extension direction of the pipelines in the first joint 17 and the second joint 18 is consistent with the through direction of the first through hole 15 and the second through hole 16, and is parallel to the extension direction of the inlet section 131 and the outlet section 132. Figure 8 As shown, the extension direction of the pipeline in the first joint 17 and the second joint 18 is consistent with the penetration direction of the first through hole 15 and the second through hole 16, and is perpendicular to the extension direction of the introduction section 131 and the outlet section 132. Embodiments 1 and 2 achieve fluid communication with the outer flow channel 200 through joints, and embodiments 3 and 4 achieve a sealed connection between the two by providing a sealing ring.

[0069] Based on the third and fourth embodiments, in order to realize the installation of the first sealing ring 3 and the second sealing ring 4, the Fig. 9 , Fig.11 and Fig.12 , a first annular groove is provided on the hole wall of the first via hole 15 on the side away from the introduction section 131, and the first sealing ring 3 is provided in the first annular groove, and a second annular groove is provided on the hole wall of the second via hole 16 on the side away from the outlet section 132, and the second sealing ring 4 is provided in the second annular groove. It can also be understood that the first via hole 15 includes a first hole section and a second hole section, the second hole section is closer to the outside of the body 1 relative to the first hole section, and the aperture of the second hole section is larger than the aperture of the first hole section, thereby forming the above-mentioned first annular groove. Similarly, the second annular groove is also realized in the same way. In this example, no other components are protruding from the outer wall of the body 1 to ensure that the space it occupies is small.

[0070] Alternatively, the body 1 is provided with a first convex ring and a second convex ring, the first convex ring is arranged around the end of the first through hole 15 away from the introduction section 131, the first sealing ring 3 is embedded in the first convex ring, the second convex ring is arranged around the end of the second through hole 16 away from the lead-out section 132, and the second sealing ring 4 is embedded in the second convex ring. It should be noted that this installation method is not shown in the drawings of this application. In this embodiment, the outer wall of the body 1 needs to be provided with a first convex ring and a second convex ring, the inner diameter of the first convex ring is larger than the aperture of the first through hole 15, thereby forming a bearing surface at the junction of the two to bear the first sealing ring 3. Similarly, the second sealing ring 4 can also be installed in the same way.

[0071] Reference Figure 1 and Fig.13 In some embodiments of the present application, the present application further provides a flow measurement device including a substrate 100 and a bypass flow channel structure described in any of the above technical solutions, wherein the first wall surface 11 of the body 1 of the bypass flow channel structure is connected to the substrate 100. Among them, a first type of flow measurement component 101 and a second type of flow measurement component 102 are arranged at intervals on the wall surface of the substrate 100 facing the body 1, and after the first type of flow measurement component 101 is aligned with the accommodating section 133 and the second type of flow measurement component 102 is aligned with the receiving groove 14, the first wall surface 11 of the body 1 is connected to the substrate 100.

[0072] In this technical solution, when the first wall surface 11 of the body 1 having the above structure is connected to the substrate 100, the first type of flow measurement component 101 on the substrate 100 is accommodated in the accommodation section 133, and the second type of flow measurement component 102 on the substrate 100 is accommodated in the accommodation groove 14, so that the first type of flow measurement component 101 and the second type of flow measurement component 102 on the substrate 100 are packaged simultaneously through the same body 1, which is conducive to simplifying its process and reducing its manufacturing cost. In specific use, after a part of the fluid in the outer flow channel 200 enters the detection flow channel 13 through the introduction section 131, the first type of flow measurement will be performed through the first type of flow measurement component 101 accommodated in the accommodation section 133, and then it will be discharged from the detection flow channel 13 through the outlet section 132 and re-enter the outer flow channel 200. At the same time, the detection channel 13 is connected to the fluid of the receiving groove 14 through the inlet sub-channel 141 and the outlet sub-channel 142, so that a part of the fluid in the detection channel 13 can flow into the receiving groove 14, and perform a second type of flow measurement through the second type of flow measurement component 102 accommodated in the receiving groove 14. Thus, different types of flow measurements are performed on the fluid in the external flow channel 200 through two types of flow measurement components, which is beneficial to improving the flow measurement accuracy of the fluid and the flow measurement range ratio of the fluid (the ratio of the maximum measurable flow to the minimum measurable flow).

[0073] Based on the above embodiment, the first type flow measurement component 101 includes a thermal mass flow chip 1011, and the second type flow measurement component 102 includes a micro-differential pressure flow chip and a package 1021 that encapsulates the micro-differential pressure flow chip. The package 1021 is provided with a first channel 10211 and a second channel 10212 arranged at intervals, the inlet sub-channel 141 is aligned with and connected to the first channel 10211, and the outlet sub-channel 142 is aligned with and connected to the second channel 10212.

[0074] It should be noted that the micro differential pressure flow chip includes a diaphragm, wherein the first channel 10211 is located on one side of the diaphragm in the thickness direction, and the second channel 10212 is located on the other side of the diaphragm in the thickness direction. Since the inlet sub-channel 141 is aligned with and connected to the first channel 10211, and the outlet sub-channel 142 is aligned with and connected to the second channel 10212, the difference between the fluid pressures on both sides of the diaphragm will cause the diaphragm to deform, and convert it into an electrical signal, thereby obtaining the flow value of the fluid.

[0075] The present application can combine the advantages of two flow measurement chips by using a thermal mass flow chip 1011 and a micro differential pressure flow chip at the same time. Specifically, the thermal mass flow chip 1011 can perform accurate flow measurement in a small flow interval with high precision, and the micro differential pressure flow chip can perform accurate flow measurement in a large flow wide range interval. When the fluid flow rate is small, the thermal mass flow chip 1011 can perform high-precision detection of small flows / micro flows. When the fluid flow rate is large, the micro differential pressure flow chip can perform high-precision detection of large flows. Of course, in other embodiments, one of the above-mentioned first type flow measurement component 101 and the second type flow measurement component 102 can also be an ultrasonic flow measurement chip or an electromagnetic flow measurement chip.

[0076] Combination Figure 1 and Fig.13In some embodiments of the present application, a first overflow glue ring groove 1412 is provided on the hole wall of the inlet sub-channel 141 close to the first channel 10211, and a second overflow glue ring groove 1422 is provided on the hole wall of the outlet sub-channel 142 close to the second channel; and / or, a third overflow glue ring groove 10213 is provided on the inner wall of the first channel 10211 close to the inlet sub-channel 141, and a fourth overflow glue ring groove 10214 is provided on the inner wall of the second channel 10212 close to the outlet sub-channel 142. The connection method between the bypass channel structure and the package body 1021 of the packaged micro-differential pressure flow chip can be solid glue point bonding or solid glue strip bonding. It should be noted that the glue should cover the surface of the package body 1021 as much as possible except the first channel 10211, the third overflow glue ring groove 10213, the second channel 10212 and the fourth overflow glue ring groove 10214 to ensure the sealing effect. The provision of the overflow ring groove can effectively prevent glue from flowing into the first channel 10211, the second channel 10212, the first guide hole 1411 and the second guide hole 1421 when the glue dispensing amount is too high. This situation will cause the flow path of the flow channel to be blocked, thereby rendering the flow measurement device ineffective.

[0077] Reference Fig.13 and Fig.14 The thermal mass flow chip 1011 includes a substrate layer 1012, which is connected to the substrate 100. The substrate layer 1012 is provided with a cavity running through the thickness direction thereof. The sensitive film 1013 is provided on the side of the substrate layer 1012 facing away from the substrate 100, and the area covered by the sensitive film 1013 on the cavity is used to constitute the sensitive film area. In the sensitive film area, a micro heat source 1014 is provided on the side of the sensitive film 1013 facing away from the substrate layer, a first temperature sensor 1015 is provided on the upstream side of the micro heat source 1014, and a second temperature sensor 1016 is provided on the downstream side of the micro heat source 1014. A third temperature sensor 1017 is also provided on the side of the substrate layer 1012 facing away from the substrate 100, and the third temperature sensor 1017 is located on the upstream side of the first temperature sensor 1015. It can be understood that the third temperature sensor 1017 is directly provided on the substrate layer 1012, and is not provided in the sensitive film area.

[0078] In other words, the thermal mass flow chip 1011 includes a substrate layer 1012 and a sensitive film 1013, a micro heat source 1014, a first temperature sensor 1015, a second temperature sensor 1016, and a third temperature sensor 1017 disposed on the substrate layer 1012. When there is no airflow on the surface of the thermal mass flow chip 1011, the temperature field around the micro heat source 1014 is symmetrically distributed. When there is gas flow on the surface of the thermal mass flow chip 1011, the gas will destroy the symmetry of the temperature field around the micro heat source 1014, and the greater the flow rate of the gas, the more heat it takes away from the micro heat source 1014, and the greater the asymmetry of the temperature field around the micro heat source 1014. The flow rate of the gas is calculated by the temperature difference between the first temperature sensor 1015 and the second temperature sensor 1016. During use, since the sensitive membrane 1013 is arranged on the hole structure, that is, the bottom thereof has a hollowed-out back cavity, the design of the suspended membrane can effectively reduce the influence of the decrease in measurement sensitivity of the thermal mass flow chip 1011 caused by heat conduction.

[0079] For example, the sensitive film 1013 is made of silicon nitride or silicon oxide, or a combination of silicon nitride and silicon oxide. The first temperature sensor 1015, the second temperature sensor 1016 and the third temperature sensor 1017 can be thermal resistors made of titanium platinum metal.

[0080] In some embodiments of the present application, a plurality of pads 103 and a plurality of conductive vias 104 corresponding to and electrically connected to the plurality of pads 103 are provided on the substrate 100. The pins 1018 of the thermal mass flow chip 1011 are electrically connected to the pads 103 through leads, and the leads and both ends of the leads are wrapped with a protective adhesive layer. The conductive vias 104 are used to electrically connect to an external signal processing circuit and / or flow control circuit through leads or pin headers. Among them, the leads can be gold wires or aluminum wires, and their two ends are welded to the pins and pads, respectively. The protective adhesive layer can cover and protect the leads, pins 1018, and pads 103, and the protective adhesive layer can be silicone or epoxy resin glue.

[0081] In some embodiments of the present application, Figure 1 and Fig.15The flow measurement device also includes a control unit, and a physical parameter detection sensor electrically connected to the control unit. The physical parameter detection sensor is arranged in the detection channel 13 or the inlet sub-channel 141 or the outlet sub-channel 142. The physical parameter detection sensor includes one or more of a pressure sensor, a temperature sensor, a humidity sensor, a gas concentration sensor and a gas component sensor. The physical parameter detection sensor measures the environmental changes in real time, and the control unit performs algorithm compensation on the flow measurement to improve the detection accuracy of the flow measurement device. Furthermore, the flow control circuit, etc., improves the response speed of the thermal mass flow chip 1011 by maintaining a constant temperature difference between the temperature of the third temperature sensor 1017 and the temperature of the micro heat source 1014, and controlling the temperature of the micro heat source 1014 to be a fixed value higher than the ambient temperature measured by the third temperature sensor 1017. And by real-time detection of physical parameters and providing algorithm compensation to accurately measure the flow rate, the solenoid valve (not shown in the figure) arranged in the outer flow channel 200 is controlled through the signal processing circuit and the flow control circuit, and then the fluid flow in the outer flow channel 200 is accurately controlled and adjusted to form a closed-loop feedback.

[0082] It is understandable that, combined with Figure 1 , Fig.13 , Fig.16 When the flow measuring device is used, it is installed outside the outer flow channel 200, and the outer flow channel 200 is in fluid communication with the inlet section 131 and the outlet section 132 on the body 1. Fig.16 As shown, a resistance module 201 is provided inside the outer flow channel 200, and the resistance module 201 is used to adjust the flow ratio between the outer flow channel 200 and the bypass flow channel structure. Among them, the inlet section 131 is connected to the first fluid hole 202 of the outer flow channel 200 located on the upstream side of the resistance module 201, and the outlet section 132 is connected to the second fluid hole 203 of the outer flow channel 200 located on the downstream side of the resistance module 201. For example, the resistance module 201 can be a flow blocking grid or a control valve.

[0083] In the description of this specification, specific features, structures, materials or characteristics may be combined in an appropriate manner in any one or more embodiments or examples.

[0084] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims. In addition, the specification uses specific examples to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and its core idea of ​​the present application. The content of this specification should not be understood as a limitation on the present application.

Claims

1. A bypass channel structure, characterized in that: The invention comprises a body, wherein the body has a first wall surface and a second wall surface which are arranged opposite to each other in a first direction, a detection flow channel and a receiving groove which are recessed toward the second wall surface and are arranged at intervals are arranged on the first wall surface, the detection flow channel comprises an inlet section, an outlet section and a receiving section connected between the inlet section and the outlet section, an inlet sub-flow channel and an outlet sub-flow channel which are arranged at intervals are arranged in the receiving groove, the inlet sub-flow channel connects the inlet section with the receiving groove, and the outlet sub-flow channel connects the outlet section with the receiving groove, wherein the sides of the inlet section and the outlet section away from the receiving section are both used for communicating with an external external flow channel fluid, the first wall surface is used for connecting with a substrate, the receiving section is used for accommodating a first type of flow measurement component arranged on the substrate, and the receiving groove is used for accommodating a second type of flow measurement component arranged on the substrate; The second wall surface is provided with a flow blocking structure, and the flow blocking structure is provided with a first guide groove and a second guide groove which are not connected to each other, the bottom wall of the receiving groove is provided with a first guide hole and a second guide hole which are connected and spaced from each other, the bottom wall of the introduction section is provided with a first through hole, and the bottom wall of the outlet section is provided with a second through hole, wherein the first guide hole and the first through hole are both connected with the first guide groove to form the introduction sub-channel, and the second guide hole and the second through hole are both connected with the second guide groove to form the outlet sub-channel.

2. The bypass channel structure according to claim 1, characterized in that: The introduction section and the outlet section both extend along the second direction and are spaced apart in the third direction. The receiving groove is disposed in the space between the introduction section and the outlet section. The first direction, the second direction and the third direction are perpendicular to each other.

3. The bypass channel structure according to claim 1, characterized in that: The second wall surface is provided with a mounting groove which is recessed toward the first wall surface, and the flow blocking structure is embedded in the mounting groove and is sealed to the mounting groove.

4. The bypass channel structure according to claim 1, characterized in that: The main body is provided with a first through hole and a second through hole. The first through hole is provided on a side of the introduction section away from the accommodating section for connecting the introduction section with the external flow channel. The second through hole is provided on a side of the outlet section away from the accommodating section for connecting the outlet section with the external flow channel.

5. The bypass channel structure according to claim 4, characterized in that: The main body has an outer wall connected between the first wall surface and the second wall surface, the first via hole and the second via hole both extend along the second direction and are both located on the same outer wall, or the first via hole and the second via hole both extend along the third direction and are respectively located on two opposite outer walls, and the first direction, the second direction and the third direction are perpendicular to each other.

6. The bypass channel structure according to claim 4 or 5, characterized in that: It also includes a first joint and a second joint protruding from the main body, the first joint is connected to the side of the first via hole away from the introduction section, the second joint is connected to the side of the second via hole away from the outlet section, and the first joint and the second joint are both used to communicate with the external flow channel.

7. The bypass channel structure according to claim 4 or 5, characterized in that: A first sealing ring is disposed at one end of the first via hole away from the lead-in section, and a second sealing ring is disposed at one end of the second via hole away from the lead-out section.

8. The bypass channel structure according to claim 7, characterized in that: A first annular groove is provided on the hole wall of the first via hole on a side away from the lead-in section, and the first sealing ring is provided in the first annular groove; a second annular groove is provided on the hole wall of the second via hole on a side away from the lead-out section, and the second sealing ring is provided in the second annular groove; or, A first convex ring and a second convex ring are convexly provided on the main body, the first convex ring is arranged around one end of the first via hole away from the introduction section, the first sealing ring is embedded in the first convex ring, the second convex ring is arranged around one end of the second via hole away from the introduction section, and the second sealing ring is embedded in the second convex ring.

9. A flow measurement device, characterized in that: include: substrate; The bypass channel structure according to any one of claims 1 to 8, wherein the first wall surface of the body is connected to the substrate; Among them, a first type of flow measurement component and a second type of flow measurement component are arranged at intervals on the wall surface of the substrate facing the main body. After the first wall surface of the main body is connected to the substrate, the first type of flow measurement component is accommodated in the accommodating section, and the second type of flow measurement component is accommodated in the accommodating groove.

10. The flow measurement device according to claim 9, characterized in that: The first type of flow measurement component includes a thermal mass flow chip, and the second type of flow measurement component includes a micro-differential pressure flow chip and a packaging body that encapsulates and fixes the micro-differential pressure flow chip, and the packaging body is provided with a first channel and a second channel that are not connected to each other, the inlet sub-channel is aligned with and connected to the first channel, and the outlet sub-channel is aligned with and connected to the second channel.

11. The flow measurement device according to claim 10, characterized in that: A first overflow glue ring groove is provided on the hole wall of the inlet sub-flow channel close to the first channel, and a second overflow glue ring groove is provided on the hole wall of the outlet sub-flow channel close to the second channel; and / or, A third overflow glue ring groove is provided on the inner wall of the first channel close to the inlet sub-flow channel, and a fourth overflow glue ring groove is provided on the inner wall of the second channel close to the outlet sub-flow channel.

12. The flow measurement device according to claim 10, characterized in that: The thermal mass flow chip includes a substrate layer and a sensitive film, wherein a cavity penetrating along the thickness direction of the substrate layer is provided on the substrate layer, the substrate layer is connected to the substrate, the sensitive film is arranged on the side of the substrate layer facing away from the substrate, and covers the cavity to form a sensitive film area, in which a micro heat source is arranged on the side of the sensitive film facing away from the substrate layer, a first temperature sensor is arranged on the upstream side of the micro heat source, and a second temperature sensor is arranged on the downstream side of the micro heat source, and a third temperature sensor is also arranged on the side of the substrate layer facing away from the substrate, and the third temperature sensor is located on the upstream side of the first temperature sensor.

13. The flow measurement device according to claim 10, characterized in that: The substrate is provided with a plurality of solder pads and a plurality of conductive vias corresponding to and electrically connected to the plurality of solder pads one by one. The pins of the thermal mass flow chip are electrically connected to the solder pads through leads. The leads and both connecting ends of the leads are wrapped with a protective adhesive layer. The conductive vias are used to electrically connect to an external signal processing circuit and / or a flow control circuit.

14. The flow measurement device according to claim 11, characterized in that: It also includes a control unit, and a physical property parameter detection sensor electrically connected to the control unit, wherein the physical property parameter detection sensor is arranged in the detection channel or the inlet sub-channel or the outlet sub-channel, and the physical property parameter detection sensor includes one or more of a pressure sensor, a temperature sensor, a humidity sensor, a gas concentration sensor and a gas component sensor.

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