Semiconductor wafer box automatic storage management system and method

Abstract

This invention provides an automated warehouse management system and operating method for the storage and management of semiconductor wafer cassettes, aiming to address the low efficiency, high error rate, and environmental control difficulties inherent in traditional manual management methods. The system utilizes multiple components, including an automated guided vehicle (AGV), an overhead crane, a warehouse management system, a barcode reader, sensors, a conveyor system, and an operation control system, to achieve automated storage, retrieval, and management of wafer cassettes. The system's automated operation significantly improves wafer cassette storage and retrieval efficiency while reducing manual intervention. A comprehensive sensor system and environmental monitoring capabilities ensure a stable wafer cassette storage environment, minimizing human error.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and in particular to an automated warehouse management system for storing and managing semiconductor wafer boxes and an operating method thereof. Background Art

[0002] As the cornerstone of modern information technology, the semiconductor industry plays a vital role in global economic and technological development. With the continuous advancement of integrated circuit technology, the manufacturing and management of semiconductor wafer cassettes has become increasingly complex and sophisticated. Against this backdrop, automated warehouse management systems for semiconductor wafer cassettes have become a key factor in ensuring production efficiency, improving product quality, and reducing costs.

[0003] Traditional warehouse management of semiconductor wafer cassettes relies primarily on manual operations, which presents numerous problems and challenges. Manual operations require significant time and resources, requiring workers to manually locate, place, and transport the cassettes. This is not only time-consuming and labor-intensive, but also struggles to meet the demands of rapid turnover in large-scale production environments. Semiconductor wafer cassettes are extremely delicate and fragile, making them susceptible to damage due to carelessness or improper handling. Even minor scratches or contamination can render an entire batch of products scrapped, resulting in significant financial losses. Furthermore, manual management makes it difficult to accurately monitor inventory status in real time, easily leading to under- or overstocking. This not only impacts production planning but also can lead to unnecessary capital investment.

[0004] Semiconductor wafer cassettes have extremely stringent storage environment requirements, including temperature, humidity, and cleanliness. Manual operation makes it difficult to consistently maintain ideal environmental conditions, potentially impacting the quality and performance of the cassettes. Frequent manual operation also increases the risk of worker exposure to hazardous substances and workplace injuries, as well as the possibility of cassette theft and the disclosure of confidential information. In the long term, manual operation not only requires significant labor costs but also significant resources for training and management, resulting in low economic returns.

[0005] To address these issues, automated warehouse management systems came into being. Early automation systems focused primarily on improving a single function, such as the application of automated storage and retrieval systems (AS / RS). Although these systems have improved efficiency to a certain extent, they still have many limitations. Early automation systems often operated independently and were difficult to seamlessly integrate with other production links, leading to the formation of information islands. Most systems could only execute simple preset instructions, lacking flexibility and adaptability, and were unable to cope with complex and changing production needs. Due to technical limitations, early systems had a relatively high failure rate and high maintenance costs. Many automated equipment were unable to adapt to the strict environmental control requirements required for semiconductor wafer box storage. In addition, early systems did not provide comprehensive considerations for data security and physical security, posing potential security risks.

[0006] With the rapid development of the semiconductor industry, warehouse management systems need to be highly scalable to accommodate growing production capacity and evolving technical requirements. While automation continues to increase, the human role remains indispensable. Designing a robust human-machine interface to achieve efficient collaboration between humans and machines is a key consideration in system design. Ensuring long-term stable operation of highly complex automated systems and enabling rapid fault diagnosis and repair to minimize downtime are key challenges in system reliability design. Key to improving system versatility and portability is achieving standardized system design while meeting individual needs and ensuring compatibility with equipment and systems from different suppliers. Summary of the Invention

[0007] The object of the present invention is to provide a semiconductor wafer box automatic storage management system and method thereof to solve the above-mentioned problems in the prior art.

[0008] The semiconductor wafer box automatic storage management system of the present invention includes:

[0009] Automatic guided vehicle: equipped with positioning and navigation system and barcode reading function;

[0010] Overhead crane: used to move the wafer box in the vertical and horizontal directions;

[0011] Warehouse management system: Able to receive and process wafer box location information and status data sent by automated guided vehicles and overhead cranes in real time, and has fault diagnosis and maintenance prompt functions;

[0012] Barcode readers: installed in key locations in the warehouse, capable of automatically scanning the ID and batch of wafer boxes;

[0013] Sensors: including height limit detection sensors and environmental monitoring sensors;

[0014] Conveying system: including conveyor belt and rotating table connecting the automatic guided vehicle and overhead crane, equipped with anti-static protection device;

[0015] Operation control system: including control interface and safety light curtain;

[0016] The AGV travels along a predetermined path under the control of the warehouse management system and scans the wafer box ID at a designated location using a barcode reader. The access operation is performed after the information is matched with the warehouse management system.

[0017] The overhead crane, under the control of the warehouse management system, moves horizontally and vertically to transfer wafer boxes from one location to another, and cooperates with the automatic guided vehicle to achieve efficient transfer;

[0018] The barcode reader is installed on the operating path of the automatic guided vehicle and the overhead crane to ensure that the ID and batch information can be accurately read during the wafer box storage, retrieval and transfer process, and the information is fed back to the warehouse management system in real time;

[0019] The sensors are installed at key locations in the warehouse. The height limit detection sensor ensures the height limit of the wafer box during storage, access and transportation to avoid collision and interference. The environmental monitoring sensor monitors the temperature, humidity and dust particle concentration in the warehouse;

[0020] The conveying system connects the automatic guided vehicle and the overhead crane, and realizes seamless connection between the wafer boxes between different equipment through the conveyor belt and the rotating table. The anti-static protection device prevents static electricity from damaging the wafer boxes.

[0021] The operation control system displays the system operation status and wafer box storage information through the control interface, and the safety grating detects the safety status in the operation area to ensure the safety of personnel and equipment.

[0022] Furthermore, the automated guided vehicle has an obstacle avoidance function and is equipped with ultrasonic sensors, infrared sensors and lidars. These sensors can detect obstacles ahead and potential risks in the path in real time. It has an autonomous navigation algorithm and can automatically analyze the optimal driving path based on the data provided by the sensors. It can adjust the driving direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device, which can stop running immediately when an unavoidable obstacle is detected.

[0023] Furthermore, the overhead crane is equipped with a precise positioning system and an automatic calibration function. The precise positioning system includes a high-precision laser positioning sensor and an inertial navigation unit, which can determine the current position and height of the overhead crane in real time. The automatic calibration function can automatically adjust the height and position of the operating level of the overhead crane according to the instructions of the warehouse management system to ensure the accurate storage and transfer of wafer boxes. The overhead crane also has a load detection function, which can monitor the weight of the wafer boxes being transported in real time and automatically adjust the transportation speed and path according to the weight.

[0024] Furthermore, the warehouse management system has data analysis and optimization scheduling functions. The data analysis function includes a big data analysis module and a machine learning algorithm, which can analyze the historical operating data of the automatic guided vehicles and overhead cranes, identify potential efficiency improvements and fault prevention opportunities, and the optimization scheduling function can dynamically adjust the operating paths and task allocations of the automatic guided vehicles and overhead cranes based on the analysis results to achieve optimal scheduling of warehousing operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts the maintenance needs of the equipment based on the equipment's operating status and historical data, and automatically generates maintenance tasks.

[0025] Furthermore, the barcode reader is equipped with a multi-angle scanning function and a high-speed data transmission module. The multi-angle scanning function uses barcode scanning devices in multiple directions to achieve rapid identification of barcode information on wafer boxes at any position and angle. The high-speed data transmission module uses wireless communication technology to transmit the scanned ID and batch information to the warehouse management system in real time, ensuring instant updating and accurate synchronization of information. The barcode reader also integrates automatic calibration and fault detection functions, which can automatically adjust scanning parameters according to environmental changes and send an alarm to the warehouse management system when a fault is detected.

[0026] Furthermore, the sensors include vibration monitoring sensors and light monitoring sensors. The vibration monitoring sensors can monitor the vibration conditions in the warehouse in real time and send an alarm to the warehouse management system when abnormal vibration is detected. The light monitoring sensors are used to monitor the light intensity in the warehouse to ensure that the ambient light is suitable for the storage and operation of wafer boxes. The sensors are also integrated with an automatic calibration function, which can automatically adjust the detection parameters according to the actual environmental conditions in the warehouse. The data of all sensors can be transmitted to the warehouse management system in real time.

[0027] Furthermore, the conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device can automatically adjust the height and angle of the conveyor belt and turntable according to the size and weight of the wafer cassette to ensure the stability and safety of the wafer cassette during transportation. The automatic alignment system uses a camera and laser positioning device to monitor the position and orientation of the wafer cassette in real time, and automatically adjusts the position of the conveyor belt and turntable during transportation to ensure precise docking of the wafer cassette between different devices. The conveying system is also equipped with an electrostatic protection device and a soft start control device to effectively prevent static damage to the wafer cassette and reduce impact force during startup and shutdown.

[0028] The present invention also provides a method for accessing a semiconductor wafer box using the above system, comprising the following steps:

[0029] Issue access request: The warehouse management system receives the operation request and determines the access task of the wafer box.

[0030] Automatic guided vehicle pick and place: Under the control of the warehouse management system, the automatic guided vehicle travels along a predetermined path to the designated location, scans the wafer box ID through a barcode reader, and after confirming that the information matches the warehouse management system, performs the wafer box pick and place operation.

[0031] Overhead crane operation: Under the dispatch of the warehouse management system, the overhead crane adjusts the height and position of the operating level according to the requirements of the wafer box access task, and transfers the wafer box from one location to another.

[0032] Automatic identification and information feedback: When a wafer box passes through the barcode reader scanning area, the ID and batch of the wafer box are automatically scanned, and after confirmation, the data is fed back to the warehouse management system in real time.

[0033] Environmental monitoring and adjustment: Sensors monitor the environmental parameters in the warehouse in real time, including temperature, humidity, vibration and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer boxes.

[0034] Seamless connection of the conveying system: The conveying system uses conveyor belts and turntables to achieve seamless connection and transmission of wafer boxes between the automatic guided vehicle and the overhead crane. The height adjustment device is adjusted according to the size and weight of the wafer box.

[0035] Operator intervention: The operator performs necessary operations through the operating control system at the manual operation port. The control interface displays the system's operating status and the storage information of the wafer box.

[0036] Safety monitoring: The safety light grid monitors the safety status of the operating area in real time. When unauthorized entry is detected, an alarm is triggered and the operation of related equipment is stopped.

[0037] Final confirmation: When the wafer box is moved to the final storage location or shipped out of the warehouse, the barcode reader scans the wafer box ID again. After confirmation, the warehouse management system records the relevant information and completes the storage and retrieval operation.

[0038] Beneficial effects

[0039] The beneficial effects of the present invention are as follows:

[0040] Improve efficiency: The automated storage and transfer system greatly improves the storage and retrieval efficiency of wafer boxes and reduces the time and cost of manual operations.

[0041] Reduce errors: Through the cooperation of automatic guided vehicles, overhead cranes and barcode readers, the system can accurately identify and access wafer boxes, reducing human errors.

[0042] Ensure storage safety: Environmental monitoring sensors and anti-static protection devices ensure the safety of wafer boxes during storage and operation, preventing damage to the wafer boxes caused by improper environment and electrostatic damage.

[0043] Optimized scheduling: The warehouse management system has data analysis and optimized scheduling functions, which can dynamically adjust the system operation path and task allocation to achieve optimal scheduling.

[0044] Prevent failures in advance: Through data analysis and predictive maintenance modules, the system can identify potential failures and maintenance needs in advance, reducing downtime and maintenance costs.

[0045] Improved positioning accuracy: The precise positioning system and automatic calibration function of the overhead crane ensure high precision during the wafer box storage, retrieval and transportation process, avoiding positioning errors.

[0046] Enhanced safety: The safety light grid and safety protection equipment of the operating control system ensure the safety of system operation and prevent accidental damage to personnel and equipment.

[0047] Adaptability to complex environments: The obstacle avoidance function and autonomous navigation algorithm of the automated guided vehicle enable it to operate safely in complex warehouse environments, avoiding collisions and obstacles.

[0048] Real-time data synchronization: The barcode reader's high-speed data transmission module ensures instant update and accurate synchronization of information, improving the system's response speed and data consistency.

[0049] Through the improvements and optimizations in the above aspects, the present invention provides an efficient, accurate and safe semiconductor wafer box automatic warehouse management system and its operation method, which can significantly improve the storage and management efficiency of semiconductor wafer boxes, reduce costs and improve product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] Figure 1It is a structural diagram of the automatic storage management system for semiconductor wafer boxes of the present invention.

[0051] Figure 2 It is a top view of the semiconductor wafer box automatic storage management system of the present invention.

[0052] Figure 3 The flowchart of the access method of the semiconductor wafer box of the present invention is shown. DETAILED DESCRIPTION

[0053] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0054] Example: System Structure

[0055] like Figure 1 As shown, the semiconductor wafer box automatic warehouse management system 1 of the present invention includes an automatic guided vehicle, an overhead crane 2, a warehouse management system (the software part is not shown), a barcode reader, a sensor, a conveying system 3 and an operation control system (the software part is not shown).

[0056] The AGV is equipped with a positioning and navigation system and barcode reading capabilities. Controlled by the warehouse management system, it travels along a predetermined path to a designated location. A barcode reader scans the wafer cassette's ID, and after matching the information with the warehouse management system, access is performed. The AGV also features obstacle avoidance capabilities, equipped with ultrasonic sensors, infrared sensors, and lidar, enabling real-time detection of obstacles ahead and potential risks along the path. It also employs an autonomous navigation algorithm that automatically analyzes the optimal route, adjusting direction and speed in real time to avoid collisions. It also comes with an emergency stop feature that halts operations immediately upon detecting an unavoidable obstacle.

[0057] Overhead crane 2, shown here, is used to move wafer cassettes 4 longitudinally and transversely. It can be dispatched by the warehouse management system to perform horizontal and vertical movement, transferring wafer cassettes 4 from one location to another, and working with automated guided vehicles for efficient transfer. The overhead crane is also equipped with a precise positioning system and automatic calibration capabilities, including high-precision laser positioning sensors and an inertial navigation unit. These systems determine the crane's current position and height in real time. The automatic calibration function automatically adjusts the height and position of the crane's operating platform according to the warehouse management system's instructions, ensuring precise access and transfer of wafer cassettes.

[0058] As shown, the warehouse management system features data analysis and optimized scheduling capabilities, including a big data analysis module and machine learning algorithms. This module analyzes historical operating data for automated guided vehicles (AGVs) and overhead cranes (OCRs) to identify potential efficiency improvements and fault prevention opportunities. Based on these analysis results, the optimized scheduling function dynamically adjusts the AGV and overhead crane routes and task allocations to achieve optimal scheduling of warehouse operations. The warehouse management system also includes a predictive maintenance module that predicts equipment maintenance needs based on equipment operating status and historical data, and automatically generates maintenance tasks.

[0059] Barcode readers, shown here, are installed in strategic locations in the warehouse and automatically scan wafer cassette IDs and batches. Equipped with multi-angle scanning capabilities and a high-speed data transmission module, these readers enable rapid identification of barcode information on wafer cassettes at any position and angle. The high-speed data transmission module utilizes wireless communication technology to transmit the scanned ID and batch information to the warehouse management system in real time, ensuring immediate and accurate synchronization. The barcode readers also incorporate automatic calibration and fault detection capabilities, automatically adjusting scanning parameters based on environmental changes and sending alerts to the warehouse management system if a fault is detected.

[0060] The sensors shown include height limit detection sensors and environmental monitoring sensors, installed at key locations within the warehouse. Height limit detection sensors ensure that wafer cassettes maintain a height limit during storage, access, and transfer, preventing collisions and interference. Environmental monitoring sensors monitor temperature, humidity, and dust particle concentration within the warehouse to ensure the stability of the wafer cassette storage environment. Sensors also include vibration monitoring sensors and light monitoring sensors. The vibration monitoring sensors monitor vibration conditions within the warehouse in real time and send alerts to the warehouse management system when abnormal vibrations are detected. The light monitoring sensors monitor light intensity within the warehouse to ensure that the ambient light is suitable for the storage and operation of wafer cassettes. Data from all sensors can be transmitted to the warehouse management system in real time.

[0061] The conveying system shown here includes a conveyor belt and turntable connecting the automated guided vehicle (AGV) and overhead crane. Equipped with anti-static protection, the conveyor belt and turntable enable seamless connection between wafer cassettes and different devices. The conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device automatically adjusts the height and angle of the conveyor belt and turntable based on the size and weight of the wafer cassette, ensuring the stability and safety of the wafer cassette during transportation. The automatic alignment system uses cameras and laser positioning equipment to monitor the position and orientation of the wafer cassette in real time and automatically adjusts the position of the conveyor belt and turntable during transportation to ensure precise docking of the wafer cassette between different devices. The conveying system is also equipped with an anti-static protection device and a soft-start control device to effectively prevent static damage to the wafer cassette and reduce impact force during startup and shutdown.

[0062] The operational control system shown here includes a control interface and safety light barriers. The control interface displays the system's operating status and wafer cassette storage information. The safety light barriers monitor the safety status within the operating area, ensuring the safety of personnel and equipment. If unauthorized entry is detected, an alarm is triggered and the relevant equipment is shut down.

[0063] Example: System Operation Method

[0064] This embodiment describes a method for accessing a semiconductor wafer cassette using the above system, including the following steps:

[0065] Issue access request: The warehouse management system receives the operation request and determines the access task of the wafer box.

[0066] Automatic guided vehicle pick and place: Under the control of the warehouse management system, the automatic guided vehicle travels along a predetermined path to the designated location, scans the wafer box ID through a barcode reader, and after confirming that the information matches the warehouse management system, performs the wafer box pick and place operation.

[0067] Overhead crane operation: Under the dispatch of the warehouse management system, the overhead crane adjusts the height and position of the operating level according to the requirements of the wafer box access task, and transfers the wafer box from one location to another.

[0068] Automatic identification and information feedback: When a wafer box passes through the barcode reader scanning area, the ID and batch of the wafer box are automatically scanned, and after confirmation, the data is fed back to the warehouse management system in real time.

[0069] Environmental monitoring and adjustment: Sensors monitor the environmental parameters in the warehouse in real time, including temperature, humidity, vibration and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer boxes.

[0070] Seamless connection of the conveying system: The conveying system uses conveyor belts and turntables to achieve seamless connection and transmission of wafer boxes between the automatic guided vehicle and the overhead crane. The height adjustment device is adjusted according to the size and weight of the wafer box.

[0071] Operator intervention: The operator performs necessary operations through the operating control system at the manual operation port. The control interface displays the system's operating status and the storage information of the wafer box.

[0072] Safety monitoring: The safety light grid monitors the safety status of the operating area in real time. When unauthorized entry is detected, an alarm is triggered and the operation of related equipment is stopped.

[0073] Final confirmation: When the wafer box is moved to the final storage location or shipped out of the warehouse, the barcode reader scans the wafer box ID again. After confirmation, the warehouse management system records the relevant information and completes the storage and retrieval operation.

[0074] Example: System improvement and optimization

[0075] This embodiment describes the improvement and optimization scheme of the system in practical application to further improve the efficiency and reliability of the system.

[0076] Improving obstacle avoidance for automated guided vehicles: The introduction of more sensor types, such as millimeter-wave radar and depth cameras, enhances the perception capabilities of the AGV's obstacle avoidance system. Furthermore, the optimization of the autonomous navigation algorithm enables it to calculate optimal paths more quickly and operate safely in more complex environments.

[0077] Enhance the precise positioning system of the overhead crane: Binocular vision sensors are introduced into the positioning system of the overhead crane to improve positioning accuracy. Improved automatic calibration algorithms enable faster calibration and achieve sub-millimeter positioning accuracy.

[0078] Optimize the data analysis function of the warehouse management system: In the data analysis module of the warehouse management system, add more data collection points to improve the granularity of data analysis. Introduce more machine learning algorithms, such as deep learning and reinforcement learning, to improve the accuracy and predictive ability of data analysis.

[0079] Upgraded barcode reader scanning and transmission modules: The barcode reader is equipped with a higher-resolution camera and a more powerful processing chip to speed up barcode scanning and improve recognition accuracy. The wireless transmission module protocol has been optimized to improve data transmission speed and stability.

[0080] Strengthen the environmental monitoring capabilities of sensors: Add gas monitoring sensors and more types of environmental monitoring sensors to comprehensively monitor the warehouse environment. Improve the data processing algorithms of sensors to enable them to respond more quickly to environmental changes.

[0081] Improving the stability and precision of the conveyor system: Improvements to the control algorithms for the height adjustment and automatic alignment systems enable more precise adjustment of the conveyor belt and turntable positions. Furthermore, optimizations to the design of the electrostatic protection device and soft-start control system further reduce potential damage to the wafer cassettes.

[0082] Optimize the human-computer interaction interface of the operation control system: Introduce more visualization tools, such as three-dimensional models and real-time status monitoring, in the control interface of the operation control system to improve the operator's operating efficiency and safety. Add more safety gratings and safety protection equipment to ensure the safety of system operation. Finally, it should be noted that the above implementation methods are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned implementation methods, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned implementation methods, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various implementation methods of the present invention.

Claims

1. A semiconductor wafer box automatic storage management system, comprising: Automatic guided vehicles, equipped with positioning and navigation systems and barcode reading capabilities; An overhead crane is used to move the wafer cassette in the vertical and horizontal directions; The warehouse management system can receive and process real-time wafer cassette location and status data sent by automated guided vehicles and overhead cranes, and has fault diagnosis and maintenance prompt functions; Barcode readers, installed in key locations in the warehouse, can automatically scan the ID and batch of wafer boxes; Sensors, including height limit detection sensors and environmental monitoring sensors; The conveying system, including the conveyor belt and turntable connecting the automatic guided vehicle and the overhead crane, is equipped with anti-static protection devices; Operation control system, including control interface and safety light curtain; Its characteristics are: The AGV travels along a predetermined path under the control of the warehouse management system and scans the wafer box ID at a designated location using a barcode reader. The access operation is performed after the information is matched with the warehouse management system. The overhead crane, under the control of the warehouse management system, moves horizontally and vertically to transfer wafer boxes from one location to another, and cooperates with the automatic guided vehicle to achieve efficient transfer; The barcode reader is installed on the operating path of the automatic guided vehicle and the overhead crane to ensure that the ID and batch information can be accurately read during the wafer box storage, retrieval and transfer process, and the information is fed back to the warehouse management system in real time; The sensors are installed at key locations in the warehouse. The height limit detection sensor ensures the height limit of the wafer box during storage, access and transportation to avoid collision and interference. The environmental monitoring sensor monitors the temperature, humidity and dust particle concentration in the warehouse; The conveying system connects the automatic guided vehicle and the overhead crane, and realizes seamless connection between the wafer boxes between different equipment through the conveyor belt and the turntable. The anti-static protection device prevents static electricity from damaging the wafer boxes. The operation control system displays the system operation status and wafer box storage information through the control interface. The safety grating detects the safety status in the operation area to ensure the safety of personnel and equipment.

2. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The automated guided vehicle has an obstacle avoidance function and is equipped with ultrasonic sensors, infrared sensors and lidars. These sensors can detect obstacles ahead and potential risks in the path in real time. It has an autonomous navigation algorithm and can automatically analyze the optimal driving path based on the data provided by the sensors. It can adjust the driving direction and speed in real time to avoid collisions. It is also equipped with an emergency stop device, which can stop running immediately when an unavoidable obstacle is detected.

3. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The overhead crane is equipped with a precise positioning system and automatic calibration function. The precise positioning system includes a high-precision laser positioning sensor and an inertial navigation unit, which can determine the current position and height of the overhead crane in real time. The automatic calibration function can automatically adjust the height and position of the operating level of the overhead crane according to the instructions of the warehouse management system to ensure the accurate storage and transfer of wafer boxes. The overhead crane also has a load detection function, which can monitor the weight of the wafer boxes being transported in real time and automatically adjust the transportation speed and path according to the weight.

4. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The warehouse management system has data analysis and optimization scheduling functions. The data analysis function includes a big data analysis module and a machine learning algorithm, which can analyze the historical operating data of automatic guided vehicles and overhead cranes to identify potential efficiency improvements and fault prevention opportunities. The optimization scheduling function can dynamically adjust the operating paths and task allocations of automatic guided vehicles and overhead cranes based on the analysis results to achieve optimal scheduling of warehousing operations. The warehouse management system is also equipped with a predictive maintenance module, which predicts the maintenance needs of equipment based on the equipment's operating status and historical data, and automatically generates maintenance tasks.

5. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The barcode reader is equipped with a multi-angle scanning function and a high-speed data transmission module. The multi-angle scanning function uses barcode scanning devices in multiple directions to quickly identify barcode information on wafer boxes at any position and angle. The high-speed data transmission module uses wireless communication technology to transmit the scanned ID and batch information to the warehouse management system in real time, ensuring instant updating and accurate synchronization of information. The barcode reader also integrates automatic calibration and fault detection functions, which can automatically adjust scanning parameters according to environmental changes and send an alarm to the warehouse management system when a fault is detected.

6. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The sensors include vibration monitoring sensors and light monitoring sensors. The vibration monitoring sensors can monitor the vibration conditions in the warehouse in real time and send an alarm to the warehouse management system when abnormal vibration is detected. The light monitoring sensors are used to monitor the light intensity in the warehouse to ensure that the ambient light is suitable for the storage and operation of wafer boxes. The sensors also have an integrated automatic calibration function, which can automatically adjust the detection parameters according to the actual environmental conditions in the warehouse. The data of all sensors can be transmitted to the warehouse management system in real time.

7. The semiconductor wafer box automatic storage management system according to claim 1, characterized in that: The conveying system includes a height adjustment device and an automatic alignment system. The height adjustment device can automatically adjust the height and angle of the conveyor belt and the turntable according to the size and weight of the wafer box to ensure the stability and safety of the wafer box during the transmission process. The automatic alignment system uses a camera and a laser positioning device to monitor the position and direction of the wafer box in real time, and automatically adjusts the position of the conveyor belt and the turntable during the transmission process to ensure that the wafer box is accurately docked between different devices. The conveying system is also equipped with an electrostatic protection device and a soft start control device to effectively prevent static electricity from damaging the wafer box and reduce impact force during starting and stopping.

8. A method for storing and accessing semiconductor wafer boxes using the semiconductor wafer box automatic storage management system according to claim 1, comprising the following steps: issue Access request: The warehouse management system receives the operation request and determines the wafer box access task; Automated guided vehicle pick-up and placement: Under the control of the warehouse management system, the AGV drives along a predetermined path to the designated location, scans the wafer box ID with a barcode reader, and after confirming that the information matches the warehouse management system, performs the wafer box pick-up and placement operation; Overhead crane dispatching: Under the dispatch of the warehouse management system, the overhead crane adjusts the height and position of the operating platform according to the requirements of the wafer box access task, and transfers the wafer box from one location to another; Automatic identification and information feedback: When a wafer box passes through the barcode reader scanning area, the ID and batch of the wafer box are automatically scanned, and after confirmation, the data is fed back to the warehouse management system in real time; Environmental monitoring and adjustment: Sensors monitor the warehouse's environmental parameters in real time, including temperature, humidity, vibration, and light intensity. The warehouse management system adjusts the environment based on the monitoring data to ensure the safe storage of wafer boxes. Seamless connection of the conveying system: The conveying system uses conveyor belts and a rotary table to achieve seamless connection and transfer of wafer cassettes between the automatic guided vehicle and the overhead crane. The height adjustment device is adjusted according to the size and weight of the wafer cassette; Operator intervention: The operator performs necessary operations through the control system at the manual operation port. The control interface displays the system's operating status and the storage information of the wafer box; Safety monitoring: The safety light grid monitors the safety status of the operating area in real time. When unauthorized entry is detected, an alarm is triggered and the operation of related equipment is stopped. Final confirmation: When the wafer box is moved to the final storage location or shipped out of the warehouse, the barcode reader scans the wafer box ID again. After confirmation, the warehouse management system records the relevant information and completes the storage and retrieval operation.

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