Multi-angle efficient calibration compensation method for a triggered probe

By individually calibrating and compensating each measuring swing angle of the trigger probe and utilizing standard spherical slice division and interpolation algorithms, the time-consuming problem of traditional calibration is solved, calibration efficiency and equipment utilization are improved, and production costs are reduced.

CN118913167BActive Publication Date: 2025-10-17CHENGDU AIRCRAFT INDUSTRY GROUP
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Patent Information

Application Number
CN202410969397.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-07-19
Publication Date
2025-10-17
Estimated Expiration
2044-07-19

AI Technical Summary

Technical Problem

The multi-angle calibration process of traditional trigger probes is time-consuming, affecting the utilization rate of measurement equipment and increasing production costs.

Method used

By individually calibrating and compensating each measuring swing angle of the trigger probe and utilizing standard spherical slice division and interpolation algorithms, the number of calibration points can be reduced and the calibration efficiency can be improved.

Benefits of technology

Reduce calibration process time, improve equipment utilization, and reduce production costs while maintaining measurement accuracy.

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Abstract

The present application belongs to the technical field of mechanical detection, and particularly relates to a multi-angle efficient calibration compensation method of a trigger type probe, comprising the following steps: sorting measurement points to obtain measurement results of the measurement points; obtaining a measurement vector with a length of 1; calculating corresponding points to be calibrated of the measurement points on a standard sphere surface; dividing the surface of the standard sphere into longitude and latitude surface patches, determining patch vertices, and obtaining coordinates of the patch vertices; obtaining a set of points to be calibrated; judging whether the points to be calibrated are in the set of points to be calibrated, if yes, obtaining a compensation value based on the corresponding points to be calibrated, and if no, calculating the compensation value in an interpolation manner; and finally compensating the measurement results using the compensation value to obtain compensated measurement results. The technical scheme reduces the number of calibration points, does not reduce the calibration accuracy, reduces the time occupied in the calibration process, improves the calibration efficiency, and has important significance for improving the utilization rate of measurement equipment and reducing the production cost of products.
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Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of mechanical detection, and particularly relates to a multi-angle efficient calibration compensation method for a trigger type probe. BACKGROUND

[0002] Mechanical detection technology provides protection for product quality and is an important link in production. Among them, digital measurement equipment such as three-coordinate measuring machines uses a trigger type probe to contact a product to measure a space point. Since the trigger type coordinate measurement can complete complex measurement under computer control and obtain accurate geometric measurement data of the product through mathematical calculation, the trigger type coordinate measurement has a wide application in industrial production.

[0003] However, due to the structure and principle of the trigger type probe, the trigger type probe must be calibrated to obtain accurate measurement results. The traditional probe calibration method is to measure a plurality of measurement points on a standard ball, calculate compensation values of the points, and use an interpolation algorithm to calculate compensation values of uncalibrated parts of the probe to obtain accurate measurement results. The defect is that when the measurement task is complex and a large number of angles are required, a long time must be spent on multi-angle calibration of the probe to obtain accurate measurement results. The calibration process consumes a large amount of time, reduces the utilization rate of the measurement equipment, and increases the product production cost. SUMMARY

[0004] The present application aims to solve the problem of long time occupation of multi-angle calibration of the probe, and proposes a multi-angle efficient calibration compensation method for a trigger type probe, which can improve the calibration efficiency, reduce the time occupation in the calibration process, improve the utilization rate of the measurement equipment, and reduce the product production cost.

[0005] The technical scheme adopted to achieve the above-mentioned purpose is as follows:

[0006] A multi-angle efficient calibration compensation method for a trigger type probe is used when a trigger type probe is used to measure a product to be measured. Each measurement swing angle of the trigger type probe is calibrated and compensated individually, including the following steps:

[0007] S1, all measurement points corresponding to any single measurement swing angle in a measurement task are sorted, wherein the first measurement point is represented as S2, the measurement result of the measurement point is recorded as ; wherein, , , , and respectively represent the coordinate values of the X axis, the Y axis and the Z axis of the measurement axis system of the trigger type probe when the measurement point is measured;

[0008] S2, based on measurement results Get a measurement vector of length 1 , and the measurement vector Indicates that the measured product is at the measuring point The normal to the surface at the theoretical position; where, 、 and Represents the measurement points The X-axis, Y-axis and Z-axis components of the measurement vector in the measurement axis system;

[0009] S3, based on the measurement vector Calculate and obtain measurement points The corresponding point to be calibrated on the surface of the standard sphere , then the calibration point The coordinates are marked as ;in, represents the radius of the standard sphere;

[0010] S4, divide the surface of the standard sphere into longitude and latitude patches and determine the patch vertices , and obtain the patch vertices based on whether the trigger probe measures the swing angle coordinates of

[0011] S5, based on the point to be calibrated and patch vertices Obtain the point set that needs to be calibrated on the standard sphere in the current measurement swing angle state, recorded as the point set to be calibrated {Z};

[0012] S6, for each measuring point at the current measuring angle in the measurement task Corresponding points to be calibrated , determine whether it is in the set of points to be calibrated {Z}; if so, obtain the compensation value based on the corresponding point to be calibrated If not, then according to the point to be calibrated The compensation value is calculated by interpolation at the longitude and latitude positions on the surface of the standard sphere ;

[0013] S7, using compensation value Measurement results Perform compensation and obtain compensated measurement results , that is, the compensation measurement result The coordinates in the measurement axis system are:

[0014] .

[0015] Preferably, in step S4, dividing the surface of the standard sphere into longitude and latitude patches includes the following steps:

[0016] S41-1, let the measurement vector The angle between the Z axis and the calibration axis is the measuring point Latitude, let the measurement vector The angle between the projection on the XY plane of the calibration axis system and the X axis of the calibration axis system is the measuring point longitude;

[0017] S41-2, the standard sphere is divided into equal intervals of 90° from the pole to below the pole along the latitude direction. Layer, then each Distribute a latitude line; divide the standard ball into 0-360° along the longitude direction Each Distribute a meridian;

[0018] S41-3, the closed figure formed by adjacent longitude and latitude lines is regarded as a patch, and Indicates the latitude direction Layer, longitude direction Noodles, use Representing patches The intersection of the corresponding longitude and latitude lines is the vertex of the patch, Indicates the The latitude and The vertices of the patch formed by the intersection of meridians, all meridians intersect at the pole The vertices that make up a special patch.

[0019] Preferably, in step S4, when the trigger probe does not have a measurement swing angle, the surface vertex is obtained. The coordinates include the following steps:

[0020] S42-11, obtaining the extreme point Coordinates of the pole The coordinates are expressed as:

[0021] ;

[0022] in, 、 and Represents the extreme points The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system;

[0023] S42-12, pole-based The coordinates of the patch are recorded as follows: ignoring the longitude direction and only considering the latitude direction, the patch vertex is recorded as , patch vertices The coordinates are expressed as:

[0024] ;

[0025] in, 、 and Respectively represent Patch vertices on the strip The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system;

[0026] S42-13, based on patch vertices The coordinates of The latitude and Patch vertices on the meridian , patch vertices The coordinates are expressed as:

[0027] ;

[0028] in, 、 and Respectively indicate the The latitude and Patch vertices on the meridian The coordinate values ​​on the X-axis, Y-axis, and Z-axis in the calibrated axis system.

[0029] Preferably, in step S4, when the trigger probe has a measuring swing angle, the surface vertex is obtained The coordinates include the following steps:

[0030] S42-21, establish the calibration axis direction matrix ;in, Indicates the The measured swing angle corresponds to the direction matrix of the calibration axis system;

[0031] S42-22, get patch vertices Coordinates when no swing angle measurement is present ;

[0032] S42-23, using the calibration axis direction matrix To patch vertices Coordinates without measuring the swing angle Transform to get patch vertices Coordinates at the corresponding measured pendulum angle.

[0033] Preferably, in step S42-21, the axis direction matrix is ​​calibrated is the basic direction matrix when there is no measurement of the swing angle , obtained by rotating around the X-axis, Y-axis, and Z-axis of the basic calibration axis system when there is no measurement swing angle, and expressed as: ;in, , and Respectively expressed as The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the X-axis direction of the calibration axis system; , and Respectively represent The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the Y-axis direction of the calibration axis system; , and Respectively represent The measured swing angles correspond to the X-axis, Y-axis and Z-axis components of the Z-axis direction of the calibration axis system.

[0034] Preferably, in step S42-22, the facet vertices are obtained In the process of corresponding coordinates under the measured swing angle, when representing all patch vertices under a single measured swing angle, the measured swing angle parameters are hidden. , then:

[0035] ;

[0036] in, Indicates the The patch vertices under the measured swing angle , hide the measured swing angle parameters After that, the patch vertices are still express; 、 and Represents the patch vertices In the The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system under the measured swing angle.

[0037] Preferably, in step S4, when the trigger probe has a measuring swing angle, the surface vertex is obtained The process of coordinates also includes step S42-24, calculating the face vertex The corresponding measurement vector represents the measurement vector of all patch vertices under a single measurement swing angle, and the measurement swing angle parameter is hidden. , then:

[0038] ;

[0039] in, Indicates the Measure the top of the plate below the pendulum angle The measurement vector of the hidden measurement angle parameter After that, the measurement vector is recorded as ; 、 and Represents the patch vertices The corresponding measurement vector In the The X-axis, Y-axis and Z-axis components of the swing angle calibration axis system are measured.

[0040] Preferably, in step S5, obtaining the set of points to be calibrated {Z} includes the following steps:

[0041] S51, obtain all patch vertices under the current measured swing angle To form the uncalibrated vertex set {B1}; at the same time, define an empty set and name it the vertex set to be calibrated {B2};

[0042] S52, define an empty set, named measurement point set {A}, and set each measurement point of the current swing angle Corresponding points to be calibrated Put it into the measurement point set {A};

[0043] S53, intersecting the measurement point set {A} with the uncalibrated vertex set {B1} to obtain the measurement vertex point set {X}, i.e., {X}={A∩B1};

[0044] S54, remove all points existing in the measured vertex point set {X} from the measured point set {A} and the uncalibrated vertex set {B1}, and obtain a new measured point set to be calibrated {A0} and an uncalibrated vertex set {B0}, i.e., {A0}={AX}, {B0}={BX};

[0045] S55, adding all points in the measured vertex point set {X} to the vertex set to be calibrated {B2};

[0046] S56, traverse all patches , based on the vertices of the patch and the points to be calibrated within the patch , update the vertex set to be calibrated {B2}, the measurement point set to be calibrated {A0} and the uncalibrated vertex set {B0};

[0047] S57, traverse all patch boundaries , based on the endpoints of the boundary and the points to be calibrated on the boundary , combined with the updated uncalibrated vertex set {B0}, the vertex set to be calibrated {B2} and the measurement point set to be calibrated {A0} are updated again;

[0048] S58: The union of the updated measurement point set to be calibrated {A0} and the updated vertex set to be calibrated {B2} is used as the point set to be calibrated {Z}.

[0049] Preferably, in the step S52, the current swing angle of each measuring point corresponding to-be-calibrated points The following steps are included in the step of putting the measuring point set {A}:

[0050] S521, obtaining each measuring point under the current swing angle corresponding to-be-calibrated points , a total of S to-be-calibrated points are obtained ;

[0051] S522, let ;

[0052] S523, for the current to-be-calibrated point , it is judged whether there is a measuring point in the measuring point set {A} that coincides with the current to-be-calibrated point ; if yes, the current to-be-calibrated point is discarded ; if no, the step S523 is entered; wherein represents the measuring point label in the measuring point set {A};

[0053] S524, the current to-be-calibrated point is supplemented into the measuring point set {A} as a new measuring point , so as to update the measuring point set {A}; wherein ;

[0054] S526, it is judged whether is equal to S; if yes, the current step is ended; if no, the step S526 is entered;

[0055] S526, for the to-be-calibrated point after , the step S523 is returned based on the updated measuring point set {A}.

[0056] Preferably, in the step S56, the updating of the to-be-calibrated vertex set {B2}, the to-be-calibrated measuring point set {A0} and the non-calibrated vertex set {B0} includes the following steps:

[0057] S561, all patches on the standard sphere surface are traversed, for a single patch , to-be-calibrated points that are inside the current patch and belong to the to-be-calibrated measuring point set {A0} form a set {APQ};

[0058] S562, vertices of the current patch that belong to the non-calibrated vertex set {B0} form a set {BPQ};

[0059] S563, judging whether the capacity of the set {APQ} is greater than the capacity of the set {BPQ}; if yes, then letting {B2}={B2+BPQ}, {B0}={B0-BPQ} and {A0}={A0-APQ}, and entering step S564; if no, then directly entering step S564;

[0060] S564, judging whether steps S561 to S563 are implemented for all patches of the standard sphere surface; if no, then returning to step S561 for the patch not implemented with steps S561 to S563; if yes, then determining that the updating is completed, and outputting the final sets of the vertices to be calibrated {B2}, the measuring points to be calibrated {A0} and the vertices not to be calibrated {B0}.

[0061] Preferably, in the step S57, the re-updating of the sets of the vertices to be calibrated {B2} and the measuring points to be calibrated {A0} comprises the following steps:

[0062] S571, obtaining the sets of the vertices to be calibrated {B2}, the measuring points to be calibrated {A0} and the vertices not to be calibrated {B0} in step S564;

[0063] S572, traversing all patch boundaries of the standard sphere surface, and for a single boundary , obtaining the vertices to be calibrated , which are on the current boundary and belong to the set of the measuring points to be calibrated {A0}, to form a set {API};

[0064] S573, obtaining the vertices not to be calibrated, which are on the current boundary and belong to the set of the vertices not to be calibrated {B0}, to form a set {BPI};

[0065] S574, judging whether the capacity of the set {API} is greater than the capacity of the set {BPI}; if yes, then letting {B2}={B2+BPI}, {B0}={B0-BPI} and {A0}={A0-API}, and entering step S575; if no, then directly entering step S575;

[0066] S575, judging whether steps S572 to S574 are implemented for all patch boundaries of the standard sphere surface; if no, then returning to step S572 for the patch boundary not implemented with steps S572 to S574; if yes, then determining that the updating is completed, and outputting the final sets of the vertices to be calibrated {B2} and the measuring points to be calibrated {A0}.

[0067] Preferably, in the step S6, if the corresponding vertices to be calibrated exist in the set of the vertices to be calibrated {Z}, then a compensation value is obtained based on the corresponding vertices to be calibrated, which comprises the following steps:

[0068] S61-1 Sorts the calibration points in the calibration point set {Z}, and measures each calibration point in the calibration point set {Z} along the normal direction of the standard sphere surface using the trigger probe at the current measurement swing angle;

[0069] S61-2, the measured point represents the measurement result of the th calibration point in the calibration point set {Z}, and the coordinates of the measured point are ; wherein, , and respectively represent the measured coordinate values of the th calibration point on the X-axis, Y-axis and Z-axis of the calibration axis system;

[0070] S61-3, calculates the compensation value of all calibration points in the calibration point set {Z}, and obtains the compensation set {C}; wherein, represents the compensation value of the th calibration point in the calibration point set {Z}, and the formula for calculating the compensation value is: ;

[0071] S61-4, finds the same calibration point as the to-be-calibrated point in the calibration point set {Z}, and extracts the compensation value of the calibration point in the compensation set {C} , replaces with , and is recorded as , which represents the compensation value of the to-be-calibrated point .

[0072] Preferably, in step S6, if the corresponding to-be-calibrated point does not exist in the calibration point set {Z}, the compensation value of the to-be-calibrated point is calculated in an interpolation manner , which includes the following steps:

[0073] S62-1, calculates the position of the to-be-calibrated point in the longitudinal direction and the position in the latitudinal direction on the calibration sphere at the current measurement swing angle:

[0074] ;

[0075] ;

[0076] S62-2, judges whether the to-be-calibrated point Is it on the patch boundary, that is: if An integer multiple of the equal interval of longitude or is an integer multiple of the latitude interval, then the point to be calibrated is determined On the patch boundary, whether to determine the points to be calibrated Not on the patch boundary;

[0077] S62-3, according to the point to be calibrated Position calculation compensation value , that is: if the point to be calibrated If it is on the boundary of the patch, then based on the point to be calibrated Calculate the compensation value at the boundary endpoint If the calibration point If it is not on the patch boundary, then based on the point to be calibrated Calculate compensation value of patch vertex .

[0078] Preferably, in step S62-3, based on the point to be calibrated Calculate the compensation value at the boundary endpoint The following steps are involved:

[0079] Retrieve the points to be calibrated in the vertex set {B2} The two endpoints of the patch boundary are represented as and ;

[0080] make and Respectively and Latitude, and Respectively and longitude;

[0081] The endpoint and Get the compensation value as the point to be calibrated in the set of points to be calibrated {Z} and ;

[0082] Calculate compensation value ,Right now ;in, represents the interpolation coefficient; when hour, ;when hour, .

[0083] Preferably, in step S62-3, based on the point to be calibrated Calculate compensation value of patch vertex comprising the following steps:

[0084] searching for a point to be calibrated in the set of points to be calibrated {B2} all vertices of the face sheet where the point to be calibrated is located, respectively denoted as , , and ;

[0085] confirming the longitude and latitude of each vertex, calculating a compensation value based on the longitude and latitude of the selected vertex , that is ; wherein:

[0086] denotes the interpolation coefficient in the longitude direction, and ; and are respectively denoted as the longitude of vertex and vertex ;

[0087] and are respectively two compensation values in the latitude direction; and , ;

[0088] denotes the interpolation coefficient in the latitude direction, and ; and are respectively denoted as the latitude of vertex and vertex ;

[0089] 、 、 and are respectively the compensation values of each vertex of the face sheet where the point to be calibrated is located, and the corresponding compensation values are obtained by taking each vertex as a point to be calibrated in the set of points to be calibrated {Z}.

[0090] The present application has the following beneficial effects:

[0091] This technical solution discloses a multi-angle, efficient calibration and compensation method for a trigger probe. The method uses measurement points selected on a standard sphere as vertices, divides the standard sphere into facets, and then analyzes the contact areas between the trigger probe and the product being measured during the measurement task. When a facet contains a large number of measurement points, the facet vertices are calibrated. When a facet contains a small number of measurement points, the measurement points are calibrated. When a facet contains no measurement points, no calibration is performed, thereby minimizing the number of calibration points. Depending on the complexity of the measurement task, the maximum calibration time of this technical solution is no longer than the time required for traditional calibration by selecting several measurement points on a standard sphere. Furthermore, since this technical solution calibrates all areas of the trigger probe used in the measurement task, this method does not reduce calibration accuracy. In summary, this method reduces the time taken up by the calibration process, improves calibration efficiency, and is of great significance for improving the utilization rate of measurement equipment and reducing product production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0092] Figure 1 This is the basic implementation flow chart of this technical solution;

[0093] Figure 2 Schematic diagram of the relationship between various parameters of this technical solution;

[0094] Figure 3 This is a schematic diagram of a standard spherical surface patch partitioning structure;

[0095] Figure 4 The measured point , compensation value Schematic diagram of the relationship between the points to be calibrated.

[0096] In the picture:

[0097] 1. Surface of the product being measured; 2. Standard sphere; 3. Pole; 4. Longitude; 5. Latitude; 6. Surface; 7. Vertex; 8. Points to be calibrated on the latitude boundary ; 9. Points to be calibrated on the meridian boundary ; 10. Points to be calibrated within the patch ; 11. Points to be calibrated on the vertex ; 12. Calibration points are required. DETAILED DESCRIPTION

[0098] In order to make the purpose, technical solutions and advantages of the invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the drawings in the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.

[0099] Therefore, the following detailed description of the application provided in the drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the application.

[0100] Embodiment 1

[0101] The embodiment discloses a multi-angle efficient calibration compensation method of a trigger type probe, which is a preferred embodiment of the application. When a trigger type probe is used to perform trigger type space measurement on a product to be measured, each measurement swing angle of the trigger type probe is calibrated and compensated individually, and the method specifically comprises the following steps:

[0102] S1, all measurement points corresponding to any single measurement swing angle in a measurement task are sorted, wherein the first measurement point is represented as , the second measurement point is represented as , and the last measurement point is represented as , and the measurement result of the measurement point is recorded as ; wherein , and respectively represent the coordinate values of the trigger type probe on the X axis, the Y axis and the Z axis of the measurement axis system when the measurement point is measured.

[0103] S2, based on the measurement result , a measurement vector with a length of 1 is obtained, and the measurement vector represents the normal of the surface of the product to be measured at the theoretical position of the measurement point ; wherein , and respectively represent the X axis, Y axis and Z axis components of the measurement vector of the measurement point .

[0104] S3, based on the measurement vector , the corresponding calibration point of the measurement point on the standard sphere is calculated and obtained, and the coordinates of the calibration point are recorded as ; wherein represents the radius of the standard sphere.

[0105] S4, the surface of the standard sphere is divided into longitude and latitude surface patches, the coordinates of the patch vertex are determined, and the coordinates of the patch vertex are obtained according to whether the trigger type probe has a measurement swing angle.

[0106] S5, based on the point to be calibrated and the patch vertex Obtain the point set that needs to be calibrated on the standard sphere under the current measurement swing angle state, denoted as the calibrated point set {Z}.

[0107] S6, for each measurement point in the measurement task under the current measurement swing angle the corresponding point to be calibrated , determine whether it is in the calibrated point set {Z}; if so, obtain the compensation value based on the corresponding calibrated point ; if not, calculate the compensation value in the way of interpolation according to the longitudinal and latitudinal positions of the point to be calibrated on the surface of the standard sphere .

[0108] S7, use the compensation value to compensate the measurement result , and obtain the compensated measurement result , that is, the compensated measurement result under the measurement axis system is:

[0109] .

[0110] The method of using a trigger probe for trigger measurement in this paper is to use a point driving measurement device with a direction to feed along the specified direction from a measurement preparation position (usually a coordinate near the theoretical position of the measured point), and when the trigger probe contacts the measured product, a trigger signal is generated, and the coordinate of the trigger probe when the trigger signal is received by the measurement device is recorded as the measurement result, and after compensation, the final coordinate value of the point is obtained. Based on this, is the theoretical position of the measured part, which is used to drive the measurement device to measure, and is not used in this patent; is the coordinate of the probe when the trigger signal is received by the measurement device, which needs to be compensated to obtain the actual coordinate of the measured point. The relationship between , , , and is shown in Figure 2 .

[0111] Example 2

[0112] This embodiment discloses a multi-angle efficient calibration compensation method of a trigger probe, which is a preferred embodiment of the present application. When a trigger probe is used for trigger space measurement of a measured product, each measurement swing angle of the trigger probe is calibrated and compensated separately, which specifically includes the following steps:

[0113] S1, all the measurement points corresponding to any single measurement swing angle in the measurement task are sorted, and the first measurement point is expressed as , the measurement result of the measurement point is recorded as ; wherein, , and respectively represent the coordinate values of the trigger probe on the X axis, Y axis and Z axis under the measurement axis system when the measurement point is measured.

[0114] S2, based on the measurement result , a measurement vector with a length of 1 is obtained , and the measurement vector represents the normal of the surface of the measured product at the theoretical position of the measurement point ; wherein, , and respectively represent the X axis, Y axis and Z axis components of the measurement vector of the measurement point under the measurement axis system.

[0115] S3, based on the measurement vector , the corresponding to-be-calibrated point of the measurement point on the standard sphere is calculated, and the coordinates of the to-be-calibrated point are recorded as ; wherein, represents the radius of the standard sphere.

[0116] S4, the surface of the standard sphere is divided into longitude and latitude patches, the patch vertex is determined, and the coordinates of the patch vertex are obtained according to whether the trigger probe has a measurement swing angle. Wherein, as shown in Figure 2 , the surface of the standard sphere is divided into longitude and latitude patches, including the following steps:

[0117] S41-1, the angle between the measurement vector and the Z axis of the calibration axis system is the latitude of the measurement point , and the angle between the projection of the measurement vector on the XY plane of the calibration axis system and the X axis of the calibration axis system is the longitude of the measurement point .

[0118] S41-2, the standard sphere is divided into layers along the latitude direction from the pole to 90° below the pole at equal intervals, and a latitude line is distributed every ; the standard sphere is divided into parts, then each A meridian line is distributed. Among them, And Generally, according to the measurement accuracy expected to be achieved and the accuracy of the trigger probe, it is determined by experiment, by measuring a sample of known specifications, constantly adjusting And The value until the measurement error is acceptable.

[0119] S41-3, the closed figure composed of adjacent meridians and latitudes is taken as a patch, and represents the latitude direction layer, the longitude direction Patch, and represents the boundary of the patch The intersection of the corresponding meridian and latitude is the vertex of the patch, and represents the vertex of the patch formed by the intersection of the Meridian and the The intersection of all meridians at the pole point Constitute a special patch vertex.

[0120] S5, based on the to-be-calibrated point And the vertex of the patch Get the point set that needs to be calibrated on the standard sphere in the current measurement swing state, denoted as the calibration point set {Z}.

[0121] S6, for each measurement point Corresponding to-be-calibrated point In the current measurement swing of the measurement task, judge whether it is in the calibration point set {Z}; if so, get the compensation value Based on the corresponding calibration point; if not, according to the longitude and latitude position of the to-be-calibrated point On the surface of the standard sphere, the compensation value Is calculated in an interpolation manner.

[0122] S7, use the compensation value Compensate the measurement result Obtain the compensated measurement result The coordinates of the compensated measurement result Under the measurement axis system are:

[0123] .

[0124] Example 3

[0125] This embodiment discloses a multi-angle efficient calibration and compensation method for a trigger probe. As a preferred embodiment of the present invention, when using the trigger probe to perform trigger-type spatial measurement of a product to be measured, each measurement swing angle of the trigger probe is individually calibrated and compensated. Specifically, the method includes the following steps:

[0126] S1, for all measurement points corresponding to any single measurement angle in the measurement task Sort by The measurement points are represented as , the measurement point The measurement results are recorded as ;in, 、 and Respectively represent the measurement points When measuring, the trigger probe measures the coordinate values ​​of the X, Y, and Z axes in the measuring axis system.

[0127] S2, based on measurement results Get a measurement vector of length 1 , and the measurement vector Indicates that the measured product is at the measuring point The normal to the surface at the theoretical position; where, 、 and Represents the measurement points The X-axis, Y-axis, and Z-axis components of the measurement vector in the measurement axis system.

[0128] S3, based on the measurement vector Calculate and obtain measurement points The corresponding point to be calibrated on the surface of the standard sphere , then the calibration point The coordinates are marked as ;in, Represents the radius of a standard sphere.

[0129] S4, divide the surface of the standard sphere into longitude and latitude patches and determine the patch vertices , and obtain the patch vertices based on whether the trigger probe measures the swing angle 's coordinates.

[0130] The longitude and latitude patch division of the surface of the standard sphere includes the following steps:

[0131] S41-1, let the measurement vector The angle between the Z axis and the calibration axis is the measuring point Latitude, let the measurement vector The angle between the projection on the XY plane of the calibration axis system and the X axis of the calibration axis system is the measuring point longitude.

[0132] S41-2, the standard sphere is divided into equal intervals of 90° from the pole to below the pole along the latitude direction. Layer, then each Distribute a latitude line; divide the standard ball into 0-360° along the longitude direction Each Distribute a meridian.

[0133] S41-3, the closed figure formed by adjacent longitude and latitude lines is regarded as a patch, and Indicates the latitude direction Layer, longitude direction Noodles, use Representing patches The intersection of the corresponding longitude and latitude lines is the vertex of the patch, Indicates the The latitude and The vertices of the patch formed by the intersection of meridians, all meridians intersect at the pole The vertices that make up a special patch.

[0134] S42-11, obtaining the pole Coordinates of the pole The coordinates are expressed as:

[0135] ;

[0136] in, 、 and Represents the extreme points The coordinate values ​​on the X-axis, Y-axis, and Z-axis in the calibrated axis system.

[0137] S42-12, pole-based The coordinates of the patch are recorded as follows: ignoring the longitude direction and only considering the latitude direction, the patch vertex is recorded as , patch vertices The coordinates are expressed as:

[0138] ;

[0139] in, 、 and Respectively represent Patch vertices on the strip The coordinate values ​​on the X-axis, Y-axis, and Z-axis in the calibrated axis system.

[0140] S42-13, based on patch vertices The coordinates of The latitude and Patch vertices on the meridian , patch vertices The coordinates are expressed as:

[0141] ;

[0142] in, 、 and Respectively indicate the The latitude and Patch vertices on the meridian The coordinate values ​​on the X-axis, Y-axis, and Z-axis in the calibrated axis system.

[0143] When the trigger probe has a measurement swing angle, obtain the patch vertex The coordinates include the following steps:

[0144] S42-21, establish the calibration axis direction matrix ;in, Indicates the The measured swing angle corresponds to the direction matrix of the calibration axis system. is the basic direction matrix when there is no measurement of the swing angle , obtained by rotating around the X-axis, Y-axis, and Z-axis of the basic calibration axis system when there is no measurement swing angle, and expressed as: ;in, , and Respectively expressed as The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the calibration axis system; , and Respectively represent The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the Y-axis direction of the calibration axis system; , and Respectively represent The measured swing angles correspond to the X-axis, Y-axis and Z-axis components of the Z-axis direction of the calibration axis system.

[0145] S42-22, get patch vertices Coordinates when no swing angle measurement is present Among them, when representing all the patch vertices under a single measurement swing angle, the measurement swing angle parameter is hidden. , then:

[0146] ;

[0147] wherein, represents the face vertex at the th measurement swing angle , the measurement swing angle parameter is hidden after the face vertex , and respectively represent the coordinate values of the face vertex on the X-axis, Y-axis and Z-axis of the calibration axis system at the th measurement swing angle.

[0148] S42-23, the coordinate of the face vertex without measurement swing angle is transformed by using the calibration axis system direction matrix to obtain the coordinate of the face vertex at the corresponding measurement swing angle.

[0149] Further, it further includes a step S42-24 of calculating the corresponding measurement vector of the face vertex , which can be used to eliminate the measurement points coinciding with the vertex when obtaining the point set to be calibrated according to the measurement task subsequently. Further, when representing the measurement vector of all face vertices at a single measurement swing angle, the measurement swing angle parameter is hidden, then:

[0150] ;

[0151] wherein, represents the measurement vector of the face vertex at the th measurement swing angle, the measurement swing angle parameter is hidden after the measurement vector is denoted as ; , and respectively represent the X-axis, Y-axis and Z-axis components of the measurement vector of the face vertex at the th measurement swing angle calibration axis system.

[0152] S5, based on the point to be calibrated and the face vertex , a point set to be calibrated is obtained on the standard sphere at the current measurement swing angle, denoted as the point set to be calibrated {Z}.

[0153] S6, for each measurement point corresponding to the point to be calibrated , determine whether it is in the set of points to be calibrated {Z}; if so, obtain the compensation value based on the corresponding point to be calibrated If not, then according to the point to be calibrated The compensation value is calculated by interpolation at the longitude and latitude positions on the surface of the standard sphere .

[0154] S7, using compensation value Measurement results Perform compensation and obtain compensated measurement results , that is, the compensation measurement result The coordinates in the measurement axis system are:

[0155] .

[0156] Example 4

[0157] This embodiment discloses a multi-angle efficient calibration and compensation method for a trigger probe. As a preferred embodiment of the present invention, when using the trigger probe to perform trigger-type spatial measurement of a product to be measured, each measurement swing angle of the trigger probe is individually calibrated and compensated. Specifically, the method includes the following steps:

[0158] S1, for all measurement points corresponding to any single measurement angle in the measurement task Sort by The measurement points are represented as , the measurement point The measurement results are recorded as ;in, 、 and Respectively represent the measurement points When measuring, the trigger probe measures the coordinate values ​​of the X, Y, and Z axes in the measuring axis system.

[0159] S2, based on measurement results Get a measurement vector of length 1 , and the measurement vector Indicates that the measured product is at the measuring point The normal to the surface at the theoretical position; where, 、 and Represents the measurement points The X-axis, Y-axis, and Z-axis components of the measurement vector in the measurement axis system.

[0160] S3, based on the measurement vector Calculate and obtain measurement points The corresponding point to be calibrated on the surface of the standard sphere , then the calibration point The coordinates are denoted as ; wherein, represents the radius of the standard sphere.

[0161] S4, the surface of the standard sphere is divided into longitudinal and latitudinal patches to determine the patch vertex , and the coordinates of the patch vertex are obtained according to whether the trigger probe measures the swing angle. Wherein, as shown in Figure 2 , the surface of the standard sphere is divided into longitudinal and latitudinal patches, including the following steps:

[0162] S41-1, the angle between the measurement vector and the calibration axis system Z-axis is the latitude of the measurement point , and the angle between the projection of the measurement vector on the calibration axis system XY plane and the calibration axis system X-axis is the longitude of the measurement point .

[0163] S41-2, the standard sphere is divided into layers along the latitude direction from the pole to 90° below the pole at equal intervals, and then one latitude line is distributed every ; the standard sphere is divided into parts along the longitude direction from 0 to 360°, and then one longitude line is distributed every . Wherein, and are usually determined by experiment according to the desired measurement accuracy and the accuracy of the trigger probe, and by measuring the sample of known specifications, adjusting the values of and until the measurement error is acceptable.

[0164] S41-3, the closed figure formed by adjacent longitude and latitude lines is taken as a patch, and is used to represent the layer in the latitude direction and the patch in the longitude direction, and is used to represent the boundary of the patch ; the intersection of the corresponding longitude and latitude lines is the patch vertex, and is used to represent the patch vertex formed by the intersection of the latitude line and the longitude line, and all longitude lines intersect at the pole to form a special patch vertex.

[0165] S5, based on the to-be-calibrated point and the patch vertex , the point set that needs to be calibrated on the standard sphere in the current measurement swing angle state is obtained, denoted as the to-be-calibrated point set {Z}, including the following steps:

[0166] S51, get all the facet vertices under the current measured swing angle to form the uncalibrated vertex set {B1}; meanwhile, define an empty set and name it as the to-be-calibrated vertex set {B2}.

[0167] S52, define an empty set and name it as the measured point set {A}, put every measured point under the current swing angle into the measured point set {A}, including the following steps:

[0168] S521, get every measured point under the current swing angle , and get the corresponding to-be-calibrated point .

[0169] S522, let .

[0170] S523, for the current to-be-calibrated point , judge whether there is a measured point in the measured point set {A} which coincides with the current to-be-calibrated point ; if yes, discard the current to-be-calibrated point ; if no, go to step S523; wherein represents the measured point label in the measured point set {A}.

[0171] S524, put the current to-be-calibrated point into the measured point set {A} as a new measured point , and update the measured point set {A}; wherein .

[0172] S525, judge whether is equal to S; if yes, end the current step; if no, go to step S526.

[0173] S526, for the to-be-calibrated point after , go back to step S523 based on the updated measured point set {A}.

[0174] Through all the sub-steps of step S52, the final measured point set {A} will only contain all the uncoincided to-be-calibrated points under the current swing angle .

[0175] S53, intersect the measured point set {A} with the uncalibrated vertex set {B1} to obtain the measured vertex point set {X}, i.e. {X} = {A∩B1}.

[0176] ​S54, remove all points in the measured vertex point set {X} from the measured point set {A} and the uncalibrated vertex set {B1} to obtain a new measured point set {A0} to be calibrated and an uncalibrated vertex set {B0}, that is, {A0} = {A-X}, {B0} = {B-X}.

[0177] S55, add all points in the measured vertex point set {X} to the vertex set {B2} to be calibrated.

[0178] S56, traverse all facets based on the vertices of the facets and the measured points to be calibrated in the facets , update the vertex set {B2} to be calibrated, the measured point set {A0} to be calibrated and the uncalibrated vertex set {B0}, including the following steps:

[0179] S561, traverse all facets of the standard sphere surface, for a single facet , the measured points to be calibrated in the current facet interior, and belonging to the measured point set {A0} to be calibrated form a set {APQ}.

[0180] S562, form a set {BPQ} from the vertices in the vertices of the current facet that belong to the uncalibrated vertex set {B0}.

[0181] S563, determine whether the capacity of the set {APQ} is greater than the capacity of the set {BPQ}; if yes, let {B2} = {B2+BPQ}, {B0} = {B0-BPQ} and {A0} = {A0-APQ}, then enter step S564, if not, directly enter step S564.

[0182] S564, determine whether steps S561 to S563 have been implemented for all facets of the standard sphere surface; if not, return to step S561 for the facets for which steps S561 to S563 have not been implemented; if yes, determine that the update is complete, and output the final vertex set {B2} to be calibrated, the measured point set {A0} to be calibrated and the uncalibrated vertex set {B0}.

[0183] S57, traverse all boundary edges based on the end points of the edges and the measured points to be calibrated on the edges , update the vertex set {B2} to be calibrated and the measured point set {A0} to be calibrated again in combination with the updated uncalibrated vertex set {B0}, including the following steps:

[0184] S571, obtain the vertex set {B2} to be calibrated, the measured point set {A0} to be calibrated and the uncalibrated vertex set {B0} in step S564.

[0185] S572, traversing all the boundaries of the facets of the standard sphere surface, for a single boundary , if the current boundary is above and belongs to the set of points to be calibrated {A0} , the end point of the current boundary , which belongs to the set of uncalibrated vertices {B0}, forms the set {BPI}.

[0186] S573, judging whether the capacity of the set {API} is greater than that of the set {BPI}; if yes, then let {B2} = {B2 + BPI}, {B0} = {B0 - BPI} and {A0} = {A0 - API}, and go to step S575; if no, go to step S575 directly.

[0187] S574, judging whether the capacity of the set {API} is greater than that of the set {BPI}; if yes, then let {B2} = {B2 + BPI}, {B0} = {B0 - BPI} and {A0} = {A0 - API}, and go to step S575; if no, go to step S575 directly.

[0188] S575, judging whether steps S572 to S574 have been implemented for all the boundaries of the facets of the standard sphere surface; if no, go back to step S572 for the facets for which steps S572 to S574 have not been implemented; if yes, then determine that the updating is completed, and output the final set of points to be calibrated {B2} and the final set of points to be measured {A0}.

[0189] S58, taking the union of the updated set of points to be calibrated {A0} and the updated set of points to be calibrated {B2} as the set of points to be calibrated {Z}.

[0190] S6, for each point to be measured corresponding to the point to be calibrated , judging whether it is in the set of points to be calibrated {Z}; if yes, then obtaining the compensation value based on the corresponding point to be calibrated; if no, then calculating the compensation value in an interpolation manner according to the longitude and latitude positions of the point to be calibrated on the standard sphere surface.

[0191] S7, compensating the measurement result using the compensation value to obtain the compensated measurement result , i.e., the coordinates of the compensated measurement result in the measurement axis system are:

[0192]

[0193] ​The technical solution updates the vertex set {B2} to be calibrated and the measuring point set {A0} to be calibrated twice in step S5, and finally uses the union of the updated vertex set {B2} to be calibrated and the measuring point set {A0} to be calibrated as the point set {Z} to be calibrated, thereby greatly reducing the parts that do not need to be calibrated.

[0194] In the technical solution, because there is a sequence in traversing the facets and there are shared vertices in different facets, the vertices of the facets that are later in the traversal process are moved into the vertex set {B2} to be calibrated, which may change the relationship between the capacity of the set {APQ} corresponding to the facets that have been traversed and the set {BPQ}. In order to minimize the total number of points to be calibrated, the step of traversing all the facets of the standard spherical surface (i.e., the process of traversing all the facets of the standard spherical surface in step S561) needs to be repeated multiple times. Correspondingly, because there is a sequence in traversing the boundaries of the facets and there are shared end points in different boundaries, the end points of the boundaries that are later in the traversal process are moved into the vertex set {B2} to be calibrated, which may change the relationship between the capacity of the set {API} corresponding to the boundaries of the facets that have been traversed and the set {BPI}. In order to minimize the total number of points to be calibrated, the step of traversing all the boundaries of the facets of the standard spherical surface (i.e., the process of traversing all the boundaries of the facets of the standard spherical surface in step S572) needs to be repeated multiple times.

[0195] In the technical solution, the following purposes can be achieved through all the sub-steps under step S56: if there are more points to be calibrated in a facet, the vertices of the facet are calibrated; if there are fewer points to be calibrated in a facet, the points to be calibrated in the facet are directly calibrated, thereby minimizing the number of points to be calibrated. Correspondingly, for the points to be calibrated on the meridian boundary and the points to be calibrated on the parallel boundary, if there are more points to be calibrated, the end points of the boundary are calibrated; if there are fewer points to be calibrated, the points to be calibrated on the boundary are directly calibrated, also in order to minimize the number of points to be calibrated.

[0196] In the technical solution, the point set {Z} to be calibrated is the final point set to be calibrated obtained by using the method described in the patent, and by calibrating all the points in the point set {Z} to be calibrated, the compensation values of all the points in the measuring point set {A} can be obtained by direct calculation or interpolation. In the worst case, the capacity of the point set {Z} to be calibrated will be the same as the number of facet vertices, and in actual application, the capacity of the point set {Z} to be calibrated is usually much smaller than the number of facet vertices.

[0197] Example 5

[0198] ​​​​​​​​The embodiment discloses a multi-angle efficient calibration compensation method of a trigger type probe, and as a preferred embodiment of the application, the method is used for trigger type space measurement of a product to be measured by separately calibrating and compensating each measurement swing angle of the trigger type probe, and specifically comprises the following steps:

[0199] S1, all measurement points corresponding to any single measurement swing angle in a measurement task are sorted, wherein the first measurement point is represented as The measurement result of the measurement point is recorded as ; wherein, , and respectively represent the coordinate values of the trigger type probe on the X axis, the Y axis and the Z axis of the measurement axis system when the measurement point is measured.

[0200] S2, a measurement vector with a length of 1 is obtained based on the measurement result , and the measurement vector represents the normal of the surface of the product to be measured at the theoretical position of the measurement point ; wherein, , and respectively represent the X axis, the Y axis and the Z axis components of the measurement vector of the measurement point .

[0201] S3, the corresponding calibration point of the measurement point on the standard sphere is calculated and obtained based on the measurement vector , and the coordinates of the calibration point are recorded as ; wherein, represents the radius of the standard sphere.

[0202] S4, the surface of the standard sphere is divided into longitude and latitude patches, the patch vertex is determined, and the coordinates of the patch vertex are obtained according to whether the trigger type probe has a measurement swing angle. As shown in Figure 2 , the surface of the standard sphere is divided into longitude and latitude patches, and the following steps are included:

[0203] S41-1, the angle between the measurement vector and the Z axis of the calibration axis system is the latitude of the measurement point , and the angle between the projection of the measurement vector on the XY plane of the calibration axis system and the X axis of the calibration axis system is the longitude of the measurement point .​​

[0204] S41-2, divide the standard sphere into 90 equal parts along the latitude direction from the pole to 90° below the pole layer, then each distribution of a parallel; the standard sphere is divided into 360 equal parts along the longitude direction layer, then each distribution of a meridian. Among them, and Usually according to the desired measurement accuracy and the accuracy of the trigger probe is determined by experiment, by measuring the known size of the sample, constantly adjusting and The value until the measurement error can be acceptable.

[0205] S41-3, the closed figure formed by adjacent meridians and parallels as a patch, with represent the latitude direction of the layer, the longitude direction of the patch, with represent the boundary of the patch The intersection of the corresponding meridian and parallel is the vertex of the patch, with represent the intersection of the parallel and the meridian to form a patch vertex, all meridians intersect at the pole Constitute a special patch vertex.

[0206] S5, based on the to-be-calibrated point and the patch vertex Get the point set that needs to be calibrated on the standard sphere under the current measurement swing state, denoted as the calibration point set {Z}.

[0207] S6, for each measurement point in the measurement task under the current measurement swing, judge whether the corresponding to-be-calibrated point is in the calibration point set {Z}; if so, get the compensation value based on the corresponding calibration point; if not, according to the longitude and latitude position of the to-be-calibrated point on the surface of the standard sphere, the compensation value is calculated by interpolation.

[0208] If the corresponding to-be-calibrated point exists in the calibration point set {Z}, get the compensation value based on the corresponding calibration point, including the following steps:

[0209] S61-1 Sort the calibration points in the calibration point set {Z}, and use the trigger probe to touch each calibration point in the calibration point set {Z} along the normal direction of the standard sphere surface at the current measurement swing angle.

[0210] S61-2, the measured point represents the measurement result of the i-th calibration point in the calibration point set {Z}, and the coordinates of the measured point are denoted as ; wherein , and respectively represent the measured coordinate values of the i-th calibration point on the X-axis, Y-axis and Z-axis under the calibration axis system.

[0211] S61-3, calculate the compensation value of all calibration points in the calibration point set {Z}, and obtain the compensation set {C}; wherein represents the compensation value of the i-th calibration point in the calibration point set {Z}, and the formula for calculating the compensation value is as follows: .

[0212] S61-4, find the same calibration point as the to-be-calibrated point in the calibration point set {Z}, and extract the compensation value of the calibration point in the compensation set {C} , replace with , and denote it as , which represents the compensation value of the to-be-calibrated point . Figure 4 The relationship between , and the calibration point is shown in FIG.

[0213] If the corresponding to-be-calibrated does not exist in the calibration point set {Z}, the compensation value of the to-be-calibrated point is calculated by interpolation, and the compensation value includes the following steps:

[0214] S62-1, calculate the position of the to-be-calibrated point in the longitudinal direction and the position in the latitudinal direction on the calibration sphere at the current measurement swing angle:

[0215] ;

[0216] ;

[0217] ​​​S62-2, determine the point to be calibrated Is it on the patch boundary, that is: if An integer multiple of the equal interval of longitude or is an integer multiple of the latitude interval, then the point to be calibrated is determined On the patch boundary, whether to determine the points to be calibrated Not on the patch boundary.

[0218] S62-3, according to the point to be calibrated Position calculation compensation value , that is: if the point to be calibrated If it is on the boundary of the patch, then based on the point to be calibrated Calculate the compensation value at the boundary endpoint If the calibration point If it is not on the patch boundary, then based on the point to be calibrated Calculate compensation value of patch vertex .

[0219] S7, using compensation value Measurement results Perform compensation and obtain compensated measurement results , that is, the compensation measurement result The coordinates in the measurement axis system are:

[0220] .

[0221] Example 7

[0222] This embodiment discloses a multi-angle efficient calibration and compensation method for a trigger probe. As a preferred embodiment of the present invention, when using the trigger probe to perform trigger-type spatial measurement of a product to be measured, each measurement swing angle of the trigger probe is individually calibrated and compensated. Specifically, the method includes the following steps:

[0223] S1, for all measurement points corresponding to any single measurement angle in the measurement task Sort by The measurement points are represented as , the measurement point The measurement results are recorded as ;in, 、 and Respectively represent the measurement points When measuring, the trigger probe measures the coordinate values ​​of the X, Y, and Z axes in the measuring axis system.

[0224] S2, based on measurement results Get a measurement vector of length 1 , and the measurement vector represents the measured product at the measurement point represents the normal of the surface at the theoretical position; wherein, , and respectively represent the X-axis, Y-axis and Z-axis components of the measurement vector of the measurement point under the measurement axis system.

[0225] S3, based on the measurement vector , the measurement point corresponding to the to-be-calibrated point on the standard sphere is calculated , and the to-be-calibrated point is marked as ; wherein, represents the radius of the standard sphere.

[0226] S4, the surface of the standard sphere is divided into longitude and latitude patches, the patch vertexes are determined, and the coordinates of the patch vertexes are obtained according to whether the trigger probe measures the swing angle. Wherein, as shown in Figure 2 , the surface of the standard sphere is divided into longitude and latitude patches, including the following steps:

[0227] S41-1, the angle between the measurement vector and the Z-axis of the calibration axis system is the latitude of the measurement point , and the angle between the projection of the measurement vector on the XY plane of the calibration axis system and the X-axis of the calibration axis system is the longitude of the measurement point .

[0228] S41-2, the standard sphere is divided into layers along the latitude direction at equal intervals from the pole to 90° below the pole, and then one latitude line is distributed every ; the standard sphere is divided into parts along the longitude direction from 0 to 360°, and then one longitude line is distributed every . Wherein, and are usually determined through experiments according to the desired measurement accuracy and the accuracy of the trigger probe, and the values of and are adjusted until the measurement error is acceptable by continuously adjusting the values of and through measurement of a sample with known specifications.

[0229] S41-3, the closed figure formed by adjacent longitude and latitude lines is taken as a patch, and is used to represent the layer in the latitude direction and the patch in the longitude direction, and is used to represent the patch The intersection of the corresponding longitude and latitude lines is the vertex of the patch, Indicates the The latitude and The vertices of the patch formed by the intersection of meridians, all meridians intersect at the pole The vertices that make up a special patch.

[0230] S5, based on the point to be calibrated and patch vertices Obtain the point set that needs to be calibrated on the standard sphere under the current measurement swing angle state, which is recorded as the point set to be calibrated {Z}.

[0231] S6, for each measuring point at the current measuring angle in the measurement task Corresponding points to be calibrated , determine whether it is in the set of points to be calibrated {Z}; if so, obtain the compensation value based on the corresponding point to be calibrated If not, then according to the point to be calibrated The compensation value is calculated by interpolation at the longitude and latitude positions on the surface of the standard sphere .

[0232] If the corresponding point to be calibrated Exists in the set of points to be calibrated {Z}, and the compensation value is obtained based on the corresponding points to be calibrated The following steps are involved:

[0233] S61-1 sorts the points to be calibrated in the set of points to be calibrated {Z}, and uses a trigger probe to touch each point to be calibrated in the set of points to be calibrated {Z} along the normal direction of the standard sphere at the current measurement swing angle.

[0234] S61-2, using actual measurement points Indicates the first The measurement results of the points to be calibrated are as follows: The coordinates of ;in, 、 and Respectively expressed as The measured coordinate values ​​of the points to be calibrated on the X-axis, Y-axis and Z-axis in the calibration axis system.

[0235] S61-3, calculate the compensation values ​​of all points to be calibrated in the set of points to be calibrated {Z} , obtain compensation collection {C}; among which, Indicates the first Compensation value of the point to be calibrated, calculate the compensation value The formula is: .

[0236] S61-4, find the point to be calibrated in the set of points to be calibrated {Z} The same point to be calibrated is extracted from the compensation set {C}. ,use replace , denoted as the point to be calibrated Compensation value . Figure 4 Shown in 、 The relationship between the points to be calibrated.

[0237] If the corresponding Does not exist in the set of points to be calibrated {Z}, and the points to be calibrated are calculated by interpolation Compensation value The following steps are involved:

[0238] S62-1, calculate the points to be calibrated Position along the longitude direction on the calibration sphere at the current measurement pendulum angle and latitude position :

[0239] ;

[0240] ;

[0241] S62-2, determine the point to be calibrated Is it on the patch boundary, that is: if An integer multiple of the equal interval of longitude or is an integer multiple of the latitude interval, then the point to be calibrated is determined On the patch boundary, whether to determine the points to be calibrated Not on the patch boundary.

[0242] S62-3, according to the point to be calibrated Position calculation compensation value , that is: if the point to be calibrated If it is on the boundary of the patch, then based on the point to be calibrated Calculate the compensation value at the boundary endpoint If the calibration point If it is not on the patch boundary, then based on the point to be calibrated Calculate compensation value of patch vertex . .

[0243] Based on the points to be calibrated Calculate the compensation value at the boundary endpoint The following steps are involved:

[0244] Retrieve the points to be calibrated in the vertex set {B2} The two endpoints of the patch boundary are represented as and ;

[0245] make and Respectively and Latitude, and Respectively and longitude;

[0246] The endpoint and Get the compensation value as the point to be calibrated in the set of points to be calibrated {Z} and ;

[0247] Calculate compensation value ,Right now ;in, represents the interpolation coefficient; when hour, ;when hour, .

[0248] Based on the points to be calibrated Calculate compensation value of patch vertex The following steps are involved:

[0249] Retrieve the points to be calibrated in the vertex set {B2} All vertices of the patch are represented as 、 、 and ;

[0250] Confirm the longitude and latitude of each vertex and calculate the compensation value based on the longitude and latitude of the selected vertex ,Right now ;in:

[0251] represents the interpolation coefficient in the longitude direction, and ; and Represented as vertices and vertices longitude;

[0252] and Respectively represent the compensation values ​​in two latitude directions; and , ;

[0253] denote the interpolation coefficients in the latitude direction, and ; and denote the latitude of the vertex and the vertex , respectively;

[0254] , , and are the compensation values of the vertices of the patch where the point to be calibrated is located, and the compensation values of the vertices are obtained as the points to be calibrated in the set of points to be calibrated {Z}.

[0255] S7, using the compensation values , the measured results are compensated to obtain the compensated measured results , i.e. the compensated measured results in the coordinate system of the measuring axis are:

[0256] .

Claims

1. A multi-angle efficient calibration and compensation method for a trigger probe, characterized in that: When using a trigger probe to perform trigger-type spatial measurement on the product to be measured, each measurement swing angle of the trigger probe is individually calibrated and compensated, including the following steps: S1, for all measurement points corresponding to any single measurement angle in the measurement task Sort by The measurement points are represented as , the measurement point The measurement results are recorded as ;in, 、 and Respectively represent the measurement points When measuring, the coordinate values ​​of the trigger probe on the X-axis, Y-axis and Z-axis in the measuring axis system; S2, based on measurement results Get a measurement vector of length 1 , and the measurement vector Indicates that the measured product is at the measuring point The normal to the surface at the theoretical position; where, 、 and Represents the measurement points The X-axis, Y-axis and Z-axis components of the measurement vector in the measurement axis system; S3, based on the measurement vector Calculate and obtain measurement points The corresponding point to be calibrated on the surface of the standard sphere , then the calibration point The coordinates are marked as ;in, represents the radius of the standard sphere; S4, divide the surface of the standard sphere into longitude and latitude patches and determine the patch vertices , and obtain the patch vertices based on whether the trigger probe measures the swing angle coordinates of S5, based on the point to be calibrated and patch vertices Obtain the point set that needs to be calibrated on the standard sphere in the current measurement swing angle state, recorded as the point set to be calibrated {Z}; S6, for each measuring point at the current measuring angle in the measurement task Corresponding points to be calibrated , determine whether it is in the set of points to be calibrated {Z}; if so, obtain the compensation value based on the corresponding point to be calibrated If not, then according to the point to be calibrated The compensation value is calculated by interpolation at the longitude and latitude positions on the surface of the standard sphere ; S7, using compensation value Measurement results Perform compensation and obtain compensated measurement results , that is, the compensation measurement result The coordinates in the measurement axis system are: 。 2. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 1, characterized in that: In step S4, dividing the surface of the standard sphere into longitude and latitude patches includes the following steps: S41-1, let the measurement vector The angle between the Z axis and the calibration axis is the measuring point Latitude, let the measurement vector The angle between the projection on the XY plane of the calibration axis system and the X axis of the calibration axis system is the measuring point longitude; S41-2, the standard sphere is divided into equal intervals of 90° from the pole to below the pole along the latitude direction. Layer, then each Distribute a latitude line; divide the standard ball into 0-360° along the longitude direction Each Distribute a meridian; S41-3, the closed figure formed by adjacent longitude and latitude lines is regarded as a patch, and Indicates the latitude direction Layer, longitude direction Noodles, use Representing patches The intersection of the corresponding longitude and latitude lines is the vertex of the patch, Indicates the The latitude and The vertices of the patch formed by the intersection of meridians, all meridians intersect at the pole The vertices that make up a special patch.

3. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 2, characterized in that: In step S4, when the trigger probe does not have a measurement swing angle, the surface vertex is obtained. The coordinates include the following steps: S42-11, obtaining the extreme point Coordinates of the pole The coordinates are expressed as: ; in, 、 and Represents the extreme points The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system; S42-12, pole-based The coordinates of the patch are recorded as follows: ignoring the longitude direction and only considering the latitude direction, the patch vertex is recorded as , patch vertices The coordinates are expressed as: ; in, 、 and Respectively represent Patch vertices on the strip The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system; S42-13, based on patch vertices The coordinates of The latitude and Patch vertices on the meridian , patch vertices The coordinates are expressed as: ; in, 、 and Respectively indicate the The latitude and Patch vertices on the meridian The coordinate values ​​on the X-axis, Y-axis, and Z-axis in the calibrated axis system.

4. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 3, characterized in that: In step S4, when the trigger probe has a measuring swing angle, the surface vertex is obtained. The coordinates include the following steps: S42-21, establish the calibration axis direction matrix ;in, Indicates the The measured swing angle corresponds to the direction matrix of the calibration axis system; S42-22, get patch vertices Coordinates when no swing angle measurement is present ; S42-23, using the calibration axis direction matrix To patch vertices Coordinates without measuring the swing angle Transform to get patch vertices Coordinates at the corresponding measured pendulum angle.

5. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 4, characterized in that: In step S42-21, the axis direction matrix is ​​calibrated is the basic direction matrix when there is no measurement of the swing angle , obtained by rotating around the X-axis, Y-axis, and Z-axis of the basic calibration axis system when there is no measurement swing angle, and expressed as: ;in, , and Respectively expressed as The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the X-axis direction of the calibration axis system; , and Respectively represent The measured swing angle corresponds to the X-axis, Y-axis and Z-axis components of the Y-axis direction of the calibration axis system; , and Respectively represent The measured swing angles correspond to the X-axis, Y-axis and Z-axis components of the Z-axis direction of the calibration axis system.

6. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 5, characterized in that: In step S42-22, the facet vertices are obtained. In the process of corresponding coordinates under the measured swing angle, when representing all patch vertices under a single measured swing angle, the measured swing angle parameters are hidden. , then: ; in, Indicates the The patch vertices under the measured swing angle , hide the measured swing angle parameters After that, the patch vertices are still express; 、 and Represents the patch vertices In the The coordinate values ​​on the X-axis, Y-axis and Z-axis in the calibration axis system under the measured swing angle.

7. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 6, characterized in that: In step S4, when the trigger probe has a measuring swing angle, the surface vertex is obtained. The process of coordinates also includes step S42-24, calculating the face vertex The corresponding measurement vector represents the measurement vector of all patch vertices under a single measurement swing angle, and the measurement swing angle parameter is hidden. , then: ; in, Indicates the Measure the top of the plate below the pendulum angle The measurement vector of the hidden measurement angle parameter After that, the measurement vector is recorded as ; 、 and Represents the patch vertices The corresponding measurement vector In the The X-axis, Y-axis and Z-axis components of the swing angle calibration axis system are measured.

8. The multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 2, characterized in that: In step S5, obtaining the set of points to be calibrated {Z} includes the following steps: S51, obtain all patch vertices under the current measured swing angle To form the uncalibrated vertex set {B1}; at the same time, define an empty set and name it the vertex set to be calibrated {B2}; S52, define an empty set, named measurement point set {A}, and set each measurement point of the current swing angle Corresponding points to be calibrated Put it into the measurement point set {A}; S53, intersecting the measurement point set {A} with the uncalibrated vertex set {B1} to obtain the measurement vertex point set {X}, i.e., {X}={A∩B1}; S54, remove all points existing in the measured vertex point set {X} from the measured point set {A} and the uncalibrated vertex set {B1}, and obtain a new measured point set to be calibrated {A0} and an uncalibrated vertex set {B0}, i.e., {A0}={AX}, {B0}={BX}; S55, adding all points in the measured vertex point set {X} to the vertex set to be calibrated {B2}; S56, traverse all patches , based on the vertices of the patch and the points to be calibrated within the patch , update the vertex set to be calibrated {B2}, the measurement point set to be calibrated {A0} and the uncalibrated vertex set {B0}; S57, traverse all patch boundaries , based on the endpoints of the boundary and the points to be calibrated on the boundary , combined with the updated uncalibrated vertex set {B0}, the vertex set to be calibrated {B2} and the measurement point set to be calibrated {A0} are updated again; S58: The union of the updated measurement point set to be calibrated {A0} and the updated vertex set to be calibrated {B2} is used as the point set to be calibrated {Z}.

9. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 8, characterized in that: In step S52, each measurement point of the current swing angle is Corresponding points to be calibrated Putting into the measurement point set {A} includes the following steps: S521, obtain each measurement point under the current swing angle Corresponding points to be calibrated , a total of S points to be calibrated are obtained ; S522, order ; S523, for the current point to be calibrated , determine whether there is a measurement point in the measurement point set {A} With the current point to be calibrated If yes, the current point to be calibrated is discarded. ; If not, proceed to step S523; wherein, Indicates the measurement point number in the measurement point set {A}; S524, the current point to be calibrated As a new measuring point Add to the measurement point set {A} to update the measurement point set {A}; ; S525, judgment Is it equal to S? If so, end the current step; if not, go to step S525; S526, for The next point to be calibrated , return to step S523 based on the updated measurement point set {A}.

10. The multi-angle efficient calibration and compensation method for a trigger probe according to claim 8, characterized in that: In step S56, updating the to-be-calibrated vertex set {B2}, the to-be-calibrated measurement point set {A0}, and the uncalibrated vertex set {B0} includes the following steps: S561, traverse all the patches on the surface of the standard sphere, for a single patch , will be in the current patch Internal and belongs to the set of measurement points to be calibrated {A0} The composition set {APQ}; S562, the current patch The vertices belonging to the uncalibrated vertex set {B0} in the vertices constitute the set {BPQ}; S563, determine whether the capacity of the set {APQ} is greater than the capacity of the set {BPQ}; if so, set {B2} = {B2 + BPQ}, {B0} = {B0 - BPQ}, and {A0} = {A0 - APQ}, and then proceed to step S564; if not, directly proceed to step S564; S564, determine whether steps S561 to S563 have been implemented for all the patches on the surface of the standard sphere; if not, return to step S561 for the patches that have not implemented steps S561 to S563; if so, determine that the update is complete, and output the final set of vertices to be calibrated {B2}, the set of measurement points to be calibrated {A0}, and the set of uncalibrated vertices {B0}.

11. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 10, characterized in that: In step S57, updating the vertex set {B2} to be calibrated and the measurement point set {A0} to be calibrated again includes the following steps: S571, obtaining the to-be-calibrated vertex set {B2}, the to-be-calibrated measurement point set {A0}, and the uncalibrated vertex set {B0} in step S564; S572, traverse all the facet boundaries of the standard sphere surface, for a single boundary , will be at the current boundary The points to be calibrated on the set of measurement points to be calibrated {A0} compose a collection {API}; S573, the current boundary The two endpoints of that belong to the uncalibrated vertex set {B0} constitute the set {BPI}; S574, determine whether the capacity of the set {API} is greater than the capacity of the set {BPI}; if so, set {B2} = {B2 + BPI}, {B0} = {B0 - BPI}, and {A0} = {A0 - API}, and then proceed to step S575; if not, directly proceed to step S575; S575, determine whether steps S572 to S574 have been implemented on all patch boundaries on the surface of the standard sphere; if not, return to step S572 for the patches that have not implemented steps S572 to S574; if so, determine that the update is complete, and output the final set of vertices to be calibrated {B2} and the set of measurement points to be calibrated {A0}.

12. The multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 2, characterized in that: In step S6, if the corresponding point to be calibrated Exists in the set of points to be calibrated {Z}, and the compensation value is obtained based on the corresponding points to be calibrated The following steps are involved: S61-1 sorts the points to be calibrated in the set of points to be calibrated {Z}, and uses a trigger probe to touch each point to be calibrated in the set of points to be calibrated {Z} along the normal direction of the surface of the standard ball at the current measurement swing angle; S61-2, using actual measurement points Indicates the first The measurement results of the points to be calibrated are as follows: The coordinates of ;in, 、 and Respectively expressed as The measured coordinate values ​​of the points to be calibrated on the X-axis, Y-axis and Z-axis in the calibration axis system; S61-3, calculate the compensation values ​​of all points to be calibrated in the set of points to be calibrated {Z} , obtain compensation collection {C}; among which, Indicates the first Compensation value of the point to be calibrated, calculate the compensation value The formula is: ; S61-4, find the point to be calibrated in the set of points to be calibrated {Z} The same point to be calibrated is extracted from the compensation set {C}. ,use replace , denoted as the point to be calibrated Compensation value .

13. The multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 2, characterized in that: In step S6, if the corresponding point to be calibrated Does not exist in the set of points to be calibrated {Z}, and the points to be calibrated are calculated by interpolation Compensation value The following steps are involved: S62-1, calculate the points to be calibrated Position along the longitude direction on the calibration sphere at the current measurement pendulum angle and latitude position : ; ; S62-2, determine the point to be calibrated Is it on the patch boundary, that is: if An integer multiple of the equal interval of longitude or is an integer multiple of the latitude interval, then the point to be calibrated is determined On the patch boundary, whether to determine the points to be calibrated Not on the patch boundary; S62-3, according to the point to be calibrated Position calculation compensation value , that is: if the point to be calibrated If it is on the boundary of the patch, then based on the point to be calibrated Calculate the compensation value at the boundary endpoint If the calibration point If it is not on the patch boundary, then based on the point to be calibrated Calculate compensation value of patch vertex .

14. A multi-angle efficient calibration and compensation method for a trigger probe as claimed in claim 13, characterized in that: In step S62-3, based on the point to be calibrated Calculate the compensation value at the boundary endpoint The following steps are involved: Retrieve the points to be calibrated in the vertex set {B2} The two endpoints of the patch boundary are represented as and ; make and Respectively and Latitude, and Respectively and longitude; The endpoint and Get the compensation value as the point to be calibrated in the set of points to be calibrated {Z} and ; Calculate compensation value ,Right now ;in, represents the interpolation coefficient; when hour, ;when hour, .

15. The multi-angle efficient calibration and compensation method for a trigger probe according to claim 13, characterized in that: In step S62-3, based on the point to be calibrated Calculate compensation value of patch vertex The following steps are involved: Retrieve the points to be calibrated in the vertex set {B2} All vertices of the patch are represented as 、 、 and ; Confirm the longitude and latitude of each vertex and calculate the compensation value based on the longitude and latitude of the selected vertex ,Right now ;in: represents the interpolation coefficient in the longitude direction, and ; and Represented as vertices and vertices longitude; and Respectively represent the compensation values ​​in two latitude directions; and , ; represents the interpolation coefficient in the latitude direction, and ; and Represented as vertices and vertices Latitude; 、 、 and Points to be calibrated The compensation value of each vertex of the face is obtained by taking each vertex as the point to be calibrated in the set of points to be calibrated {Z} to obtain the corresponding compensation value.

Citation Information

Patent Citations

  • Method for calibrating axial prestroke of touch-type measuring head

    CN103659467A

  • Position compensation method for calibration plate of direct writing type exposure machine

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