Temperature control device and temperature control method

Abstract

The application provides a temperature control device and a temperature control method. The temperature control device comprises a circulation system, a heating and refrigeration device and a refrigeration system. The circulation system comprises a first circulation section, a water tank, a second circulation section and a third circulation section which are connected in sequence and form a circulation. The circulating liquid of the second circulation section is used for heat exchange with a load device. The heating and refrigeration device is in heat exchange with the third circulation section. A second temperature sensor is arranged between the outlet end of the second circulation section and the third circulation section. The refrigeration system comprises the heat absorption side of a heat exchanger. The heat absorption side of the heat exchanger is communicated with the refrigerant flow path of the refrigeration system. At least part of the first circulation section forms the heat release side of the heat exchanger. The temperature control device provided by the application improves the refrigeration capacity of the temperature control device and improves the response speed and temperature control precision of the circulating liquid temperature provided by the temperature control device.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor, in particular to a temperature control device and a temperature control method. BACKGROUND

[0002] In the integrated circuit process, the temperature control device for semiconductor provides constant temperature fluid with different temperatures for the main device (also called as load device). In order to quickly meet the temperature requirement of the integrated circuit process, the temperature control device for semiconductor adopts two channels, each of which provides different circulating liquid temperature, and the channel entering the main device is switched to quickly realize the switching of different temperatures. In the two channels, one of them is generally a low temperature channel, and the other is a high temperature channel. During the switching process between the two channels, it is required to reach a stable temperature state in a very short time. During the switching process between the two channels, the low temperature channel receives a larger heat load, and the high temperature channel receives a larger cold load. In order to achieve rapid stability, the low temperature channel needs to have stronger refrigeration capacity, and the high temperature channel needs to have larger heating capacity.

[0003] With the development of the integrated circuit process, the temperature value that can be reached by the low temperature channel of the temperature control device for semiconductor is required to be lower and lower, the response speed is required to be faster and faster, and the refrigeration capacity of the semiconductor temperature control device is also required to be higher and higher.

[0004] For the temperature control device by refrigerant refrigeration, due to the characteristics of the refrigerant, there is an extreme limit cooling temperature. When the refrigerant works at the extreme temperature, the suction pressure is low, which will affect the service life of the compressor, and the refrigeration capacity is weak under the working condition. However, with the development of the integrated circuit process, the refrigeration capacity of low temperature is required to be higher and higher, and a larger compressor, a larger evaporator and the like need to be provided for the refrigeration system, resulting in that the refrigeration system occupies larger area, and the energy consumption is also increased. In addition, in the integrated circuit process, the response rate of the temperature control device for semiconductor is required to be higher and higher, and the temperature control precision is also required to be higher and higher. Under the extreme temperature of the refrigerant, it is difficult to meet the temperature control rate requirement of the main device. SUMMARY

[0005] The present application provides a temperature control device, which solves the defects of poor temperature control precision and response speed in the prior art, improves the refrigeration capacity of the temperature control device, and improves the response speed and temperature control precision of the circulating liquid temperature provided by the temperature control device.

[0006] The present application provides a temperature control device, which solves the defects of poor temperature control precision and response speed in the prior art, improves the refrigeration capacity of the temperature control device, and improves the response speed and temperature control precision of the circulating liquid temperature provided by the temperature control device.

[0007] The circulating system comprises a first circulating section, a water tank, a second circulating section and a third circulating section which are connected in sequence and form a circulation, and circulating liquid of the second circulating section is used for heat exchange with the load device.

[0008] a heating refrigeration device, which exchanges heat with the third circulation section, and a second temperature sensor arranged between the outlet end of the second circulation section and the third circulation section;

[0009] a refrigeration system, which comprises a heat absorption side of a heat exchanger, the heat absorption side of the heat exchanger being communicated with a refrigerant flow path of the refrigeration system;

[0010] at least part of the first circulation section forms a heat release side of the heat exchanger.

[0011] According to the present application, a temperature control device is provided, wherein a third temperature sensor is arranged between the third circulation section and the heat release side of the heat exchanger; and / or,

[0012] a fourth temperature sensor is arranged between the heat release side of the heat exchanger and the inlet end of the water tank; and / or,

[0013] a first temperature sensor is arranged between the outlet of the water tank and the second circulation section.

[0014] According to the present application, a temperature control device is provided, wherein a main pipeline is connected between the outlet end of the water tank and the second circulation section, a bypass pipeline is connected between a preset position of the main pipeline and an auxiliary port of the water tank, the bypass pipeline is provided with a first valve, the main pipeline is provided with a first pump, and the first pump is located between the outlet end of the water tank and the preset position.

[0015] According to the present application, a temperature control device is provided, wherein one or more of a first temperature sensor, a flow meter and a pressure sensor are arranged between the preset position and the second circulation section.

[0016] According to another aspect of the present application, a temperature control method is provided, which is applied to the temperature control device as described in any one of the above, and comprises:

[0017] obtaining an actual temperature change rate of the second temperature sensor;

[0018] in response to determining that the actual temperature change rate is greater than a set change rate, starting the heating refrigeration device.

[0019] According to the present application, a temperature control method is provided, wherein in response to determining that the actual temperature change rate is greater than a set change rate, starting the heating refrigeration device, comprises:

[0020] in response to a current temperature detected by the second temperature sensor being greater than a historical temperature detected by the second temperature sensor last time and a difference between the current temperature and the historical temperature being greater than a first preset threshold, starting a refrigeration side of the heating refrigeration device;

[0021] in response to the current temperature being less than the historical temperature and a difference between the current temperature and the historical temperature being greater than a second preset threshold, starting a heating side of the heating and refrigeration device.

[0022] According to the present application, a temperature control method is provided, further comprising:

[0023] in response to determining that a difference between the first measured temperature and the first set temperature is greater than a third preset threshold, starting the heating and refrigeration device;

[0024] wherein the first set temperature is a set temperature of a first temperature sensor between an outlet end of the water tank and the second circulation section, and the first measured temperature is a measured temperature of the first temperature sensor.

[0025] According to the present application, a temperature control method is provided, further comprising:

[0026] in response to determining that a difference between the third measured temperature and the third set temperature is greater than a fourth preset threshold, starting the heating and refrigeration device;

[0027] wherein the third set temperature is a set temperature of a third temperature sensor at an inlet end of the heat releasing side of the heat exchanger, and the third measured temperature is a measured temperature of the third temperature sensor.

[0028] According to the present application, a temperature control method is provided, further comprising:

[0029] in response to determining that the third measured temperature is higher than the third set temperature by a first threshold, decreasing a fourth set temperature at an inlet end of the water tank, starting a refrigeration side of the heating and refrigeration device, or increasing a refrigeration capacity of the heating and refrigeration device;

[0030] in response to determining that the third measured temperature is lower than the third set temperature by a second threshold, increasing the fourth set temperature, starting a heating side of the heating and refrigeration device, or increasing a heating capacity of the heating and refrigeration device.

[0031] According to the present application, a temperature control method is provided, further comprising:

[0032] in response to a second measured temperature being greater than a first measured temperature, controlling a refrigeration side of the heating and refrigeration device to be started, the first measured temperature being a measured temperature at an inlet end of the second circulation section, and the second measured temperature being a measured temperature at an outlet end of the second circulation section;

[0033] in response to the second measured temperature being less than the first measured temperature, controlling a heating side of the heating and refrigeration device to be started.

[0034] The temperature control device provided by the application adds a heating and refrigerating device between the return end of the circulating liquid of the circulating system (which can be understood as the outlet end of the circulating liquid after heat exchange with the load device) and the inlet end of the heat releasing side of the heat exchanger, and sets a second temperature sensor at the inlet end of the heating and refrigerating device, which is used for detecting the temperature of the circulating liquid flowing back. According to the temperature of the circulating liquid detected by the second temperature sensor, the heating and refrigerating device can be controlled to operate, so as to timely and quickly adjust the temperature of the circulating liquid, reduce the influence of the temperature change of the circulating liquid on the refrigerating system, and reduce the requirement for the temperature control precision of the refrigerating system. BRIEF DESCRIPTION OF DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the application or prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0036] Figure 1 is a structural schematic diagram of the temperature control device provided by an embodiment of the application;

[0037] Figure 2 is a flow schematic diagram of the temperature control method provided by an embodiment of the application;

[0038] Figure 3 is another flow schematic diagram of the temperature control method provided by an embodiment of the application.

[0039] Reference signs:

[0040] 110, second circulating section; 120, third circulating section; 130, main pipeline; 140, bypass pipeline; 200, heating and refrigerating device; 201, cooling pipeline;

[0041] TANK1, water tank; LG, liquid level meter; V1, first valve; PUMP1, first pump; T1, first temperature sensor; FS1, flow meter; P, pressure sensor; Loading, load device; T2, second temperature sensor; T3, third temperature sensor; HE1, heat exchanger; HE1-1, heat absorbing side of the heat exchanger; HE1-2, heat releasing side of the heat exchanger; T4, fourth temperature sensor; HT1, heater. DETAILED DESCRIPTION

[0042] In order to make the objects, technical solutions and advantages of the present application clearer, the following will clearly and completely describe the technical solutions in the present application with reference to the drawings in the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall into the protection scope of the present application.

[0043] The following will describe the technical solutions in the embodiments of the present application with reference to the drawings in the present application. Figure 1 The temperature control device in an embodiment of the present application is described.

[0044] The temperature control device comprises a circulating system, a refrigeration system and a heating and refrigeration device 200. The refrigeration system is used to adjust the temperature of circulating liquid in the circulating system, and the circulating liquid is used to exchange heat with a load device Loading. The heating and refrigeration device 200 is used to adjust the temperature of the circulating liquid after the circulating liquid exchanges heat with the load device Loading, for example, to heat or cool the circulating liquid. Figure 1 The refrigeration system is indicated in the left dashed box of FIG. 1, Figure 1 The circulating system and the heating and refrigeration device 200 are indicated in the right dashed box of FIG. 1.

[0045] The circulating system comprises a first circulating section, a water tank TANK1, a second circulating section 110 and a third circulating section 120 connected in sequence and forming a circulation. The circulating liquid in the second circulating section 110 is used to exchange heat with the load device Loading.

[0046] The heating and refrigeration device 200 exchanges heat with the third circulating section 120, and a second temperature sensor T2 is arranged between the outlet end of the second circulating section 110 and the heating and refrigeration device 200. The first circulating section connects the outlet end of the third circulating section 120 and the inlet end of the water tank TANK1, and the second circulating section 110 connects the outlet end of the water tank TANK1 and the inlet end of the third circulating section 120.

[0047] The first circulating section can be understood as all or part of the pipeline between the inlet end of the water tank TANK1 and the outlet end of the third circulating section 120, and the second circulating section 110 can also be understood as all or part of the pipeline between the outlet end of the water tank TANK1 and the inlet end of the third circulating section 120. The load device Loading can absorb heat from the circulating liquid, or release heat to the circulating liquid.

[0048] The second temperature sensor T2 is used to detect the temperature of the circulating liquid at the outlet end of the second circulating section 110, so as to determine the heat exchange condition of the circulating liquid and the load device Loading according to the temperature detected by the second temperature sensor T2.

[0049] The refrigeration system comprises a heat absorption side HE1-1 of a heat exchanger, the heat absorption side HE1-1 of the heat exchanger is communicated with a refrigerant flow path of the refrigeration system. At least part of the first circulation section forms a heat release side HE1-2 of the heat exchanger, so that the circulating liquid of the first circulation section exchanges heat with the refrigerant of the heat absorption side HE1-1 of the heat exchanger. The structure of the heat exchanger HE1 is not limited, such as a plate heat exchanger, a tube heat exchanger, etc.

[0050] The refrigerant flows through the heat absorption side HE1-1 of the heat exchanger to exchange heat with the circulating liquid of the heat release side HE1-2 of the heat exchanger, and the temperature of the circulating liquid flowing back to the water tank TANK1 is adjusted through the heat exchange between the refrigerant and the circulating liquid.

[0051] The temperature control device of the embodiment of the present application is additionally provided with a heating and refrigeration device 200 between the outlet end of the second circulation section 110 and the heat release side HE1-2 of the heat exchanger, which can adjust the temperature of the circulating liquid in the third circulation section 120 through heating or refrigeration of the heating and refrigeration device 200, and the temperature of the circulating liquid at the outlet end of the second circulation section 110 is detected by the second temperature sensor T2. According to the change of the circulating liquid return temperature, the operation of the heating and refrigeration device 200 can be adjusted in time to quickly adjust the temperature of the circulating liquid. Compared with the temperature adjustment of the circulating liquid by only the refrigeration system and the water tank TANK1, the temperature control device has a faster response, which helps to meet the requirement of temperature control rate. In addition, when the temperature control device is running in a low-temperature channel, the refrigeration side of the heating and refrigeration device 200 can assist the refrigerant of the refrigeration system to adjust the temperature, which can reduce the requirement for the refrigeration system and the refrigerant. Based on this, the temperature control device of the embodiment of the present application improves the refrigeration capacity, the response speed and the temperature control precision, has the advantages of energy saving and small occupation area, and ensures the accuracy of the temperature of the circulating liquid (the temperature at the inlet end of the second circulation section 110) provided by the temperature control device, and ensures the stable process.

[0052] Reference Figure 1 As shown in the figure, a third temperature sensor T3 is arranged between the third circulation section 120 and the heat release side HE1-2 of the heat exchanger, and the third temperature sensor T3 is used to detect the temperature of the circulating liquid between the outlet end of the third circulation section 120 and the heat release side HE1-2 of the heat exchanger, that is, the temperature of the circulating liquid after the temperature adjustment by the heating and refrigeration device 200.

[0053] In some cases, a fourth temperature sensor T4 is arranged between the heat release side HE1-2 of the heat exchanger and the inlet end of the water tank TANK1, and the fourth temperature sensor T4 is used to detect the temperature of the circulating liquid at the inlet end of the water tank TANK1, which can also be understood as the temperature of the circulating liquid after the heat exchange with the refrigeration system.

[0054] In some cases, a first temperature sensor T1 is arranged between the outlet end of the water tank TANK1 and the second circulation section 110, and is used to detect the temperature of the circulating fluid flowing out of the water tank TANK1, or the temperature of the circulating fluid used for heat exchange with the load device Loading. For the circulating system, the temperature of the circulating fluid at the inlet end of the second circulation section 110 is the target temperature to be controlled for the entire circulating system, and it is required to ensure that the temperature of the circulating fluid at the inlet end of the second circulation section 110 is at a first set temperature, which can be a temperature value or a temperature threshold.

[0055] Reference Figure 1 As shown, the outlet end of the water tank TANK1 is connected with the main pipeline 130, the preset position of the main pipeline 130 is connected with the auxiliary port of the water tank TANK1 through the bypass pipeline 140, the bypass pipeline 140 is provided with a first valve V1, and the main pipeline 130 is provided with a first pump PUMP1, which is located between the outlet end of the water tank TANK1 and the preset position. When the first valve V1 and the first pump PUMP1 are both opened, the circulating fluid flowing out of the outlet end of the water tank TANK1 and the main pipeline 130 can flow back to the water tank TANK1 through the bypass pipeline 140 and the auxiliary port. When the first valve V1 is closed and the first pump PUMP1 is opened, the circulating fluid flowing out of the outlet end of the water tank TANK1 can flow to the second circulation section 110 through the main pipeline 130, and is used for heat exchange with the load device Loading.

[0056] In some cases, the bypass pipeline 140 can be connected with a second pump (not shown in the figure), and if the main pipeline 130 or the first pump PUMP1 fails, the second pump and the first valve V1 can be opened to communicate with the second circulation section 110 through the bypass pipeline 140 to deliver circulating fluid to the second circulation section 110.

[0057] In some cases, a first temperature sensor T1 is arranged between the outlet end of the water tank TANK1 and the second circulation section 110, and is used to detect the temperature of the circulating fluid flowing out of the water tank TANK1, or the temperature of the circulating fluid used for heat exchange with the load device Loading. For the circulating system, the temperature of the circulating fluid at the inlet end of the second circulation section 110 is the target temperature to be controlled for the entire circulating system, and it is required to ensure that the temperature of the circulating fluid at the inlet end of the second circulation section 110 is at a first set temperature, which can be a temperature value or a temperature threshold.

[0058] In some cases, a first temperature sensor T1 is arranged between the outlet end of the water tank TANK1 and the second circulation section 110, and is used to detect the temperature of the circulating fluid flowing out of the water tank TANK1, or the temperature of the circulating fluid used for heat exchange with the load device Loading. For the circulating system, the temperature of the circulating fluid at the inlet end of the second circulation section 110 is the target temperature to be controlled for the entire circulating system, and it is required to ensure that the temperature of the circulating fluid at the inlet end of the second circulation section 110 is at a first set temperature, which can be a temperature value or a temperature threshold.

[0059] In some cases, a pressure sensor P is arranged between the preset position and the second circulation section 110 to detect the pressure between the outlet end of the water tank TANK1 and the second circulation section 110, so as to ensure the safe operation of the temperature control device. Of course, the pressure sensor P can also be arranged at other positions between the outlet end of the water tank TANK1 and the inlet end of the second circulation section 110, and the position of the pressure sensor P is not limited.

[0060] In some cases, the water tank TANK1 is connected with a liquid level gauge LG for detecting the liquid level of the circulating liquid in the water tank TANK1.

[0061] In some cases, a heater HT1 is arranged in the water tank TANK1, and the heater HT1 is used to heat the circulating liquid. Of course, the heater HT1 can also not be arranged in the water tank TANK1, so as to simplify the structure of the water tank TANK1.

[0062] In some cases, the heating and refrigeration device 200 can be a device with heating and refrigeration functions, such as a semiconductor heating and refrigeration device or a thermoelectric refrigeration device. The circulating liquid in the third circulation section 120 can be heated by the heating side of the heating and refrigeration device 200, or the circulating liquid in the third circulation section 120 can be cooled by the cooling side of the heating and refrigeration device 200, so as to realize the temperature regulation of the circulating liquid. The heating and refrigeration device 200 further comprises a cooling pipeline 201, and the cooling pipeline 201 can be filled with a cooling liquid. The cooling pipeline 201 is used to cool the heating and refrigeration device 200, so as to ensure the stable operation of the heating and refrigeration device 200.

[0063] The refrigeration system generally comprises a compressor, a condenser, an electronic expansion valve, and a heat exchanger HE1. The refrigeration system can be a single-stage, cascade or triple cascade system.

[0064] Figure 1 In the figure, the left side is the refrigeration system, and the right side is the circulation system. The dashed line on the right side of the circulation system represents a load device Loading. The circulation system can comprise a first pump PUMP1, a water tank TANK1, a heater HT1, a first valve V1, a first temperature sensor T1, a flow sensor FS1, a pressure sensor P, a second circulation section, a second temperature sensor T2, a third circulation section, a heat exchanger HE1 (first circulation section), a third temperature sensor T3, and a fourth temperature sensor T4.

[0065] In the embodiments of the present application, reference is made to Figure 1 and Figure 2 The present application also provides a temperature control method, which is applied to the temperature control device according to any one of the above embodiments, and comprises the following steps.

[0066] In step 210, the actual temperature change rate of the second temperature sensor is obtained.

[0067] The second temperature sensor is located between the outlet end of the second circulation section and the inlet end of the third circulation section, and is used to detect the temperature of the circulating liquid after heat exchange with the load device. The actual temperature change rate of the second temperature sensor can be understood as the real-time change of the temperature detected by the second temperature sensor over time. The difference between the current temperature of the second temperature sensor and the historical temperature detected by the second temperature sensor last time is a calculation difference, the measurement interval between the current temperature and the historical temperature is a time interval, and the actual temperature change rate is the ratio of the calculation difference to the time interval.

[0068] In step 220, in response to determining that the actual temperature change rate is greater than the set change rate, the heating and refrigeration device is started.

[0069] The actual temperature change rate of the second temperature sensor being greater than the set change rate can be understood as that the actual temperature change rate of the circulating liquid is greater than the set change rate, and the circulating liquid has undergone heat release or heat absorption, so that the temperature fluctuation of the circulating liquid increases and exceeds the set change rate. By the actual temperature change rate measured by the second temperature sensor, the actual temperature change of the circulating liquid can be determined, and then the heating and refrigeration device can be controlled to start, so as to quickly adjust the temperature of the circulating liquid and ensure the temperature stability of the circulating liquid at the inlet end of the second circulation section, and minimize the temperature fluctuation at the inlet end of the second circulation section. The set change rate can be a point value or a numerical range.

[0070] The temperature control method of the embodiment of the present application can improve the refrigeration capacity of the semiconductor-specific temperature control device, improve the temperature regulation efficiency of the circulating liquid, shorten the cooling and heating time of the semiconductor-specific temperature control device, and improve the production efficiency.

[0071] In step 220, that is, in response to determining that the actual temperature change rate is greater than the set change rate, the heating and refrigeration device is started, which includes:

[0072] In response to the current temperature detected by the second temperature sensor being greater than the historical temperature detected by the second temperature sensor last time and the difference between the current temperature and the historical temperature being greater than a first preset threshold, the refrigeration side of the heating and refrigeration device is started.

[0073] The current temperature of the second temperature sensor being greater than the historical temperature indicates that the circulating liquid is warmed up, and the difference between the current temperature and the historical temperature being greater than the first preset threshold indicates that the actual temperature change rate is greater than the set change rate. When it is determined that the circulating liquid is warmed up and the warming rate is relatively fast, the refrigeration function of the heating and refrigeration device is started to cool down the circulating liquid. The temperature change rate of the second temperature sensor is used to determine whether to start the heating and refrigeration device, so that the temperature change of the circulating liquid can be responded to in time and quickly. The refrigeration capacity of the heating and refrigeration device can be determined according to the current temperature of the second temperature sensor or the actual temperature change rate.

[0074] In the working condition that the circulating fluid of the circulating system exchanges heat with the load device, when the temperature change rate of the second measured temperature increases and the second measured temperature rises, it can be understood that the temperature of the circulating fluid after exchanging heat with the load device rises. If the input of the power supply of the heating and refrigeration device remains unchanged, the third measured temperature at the inlet end of the heat release side of the heat exchanger rises. The controller receives the third measured temperature rising and the temperature change rate increasing, and then the controller controls the heating and refrigeration device to increase the refrigeration output, improves the refrigeration capacity of the heating and refrigeration device, reduces the third measured temperature, and realizes the temperature reduction of the circulating fluid in advance, thereby reducing the requirement on the refrigeration system. The heating and refrigeration device is used to reduce the temperature of the circulating fluid, which can reduce the requirement on the refrigeration capacity of the refrigeration system, and helps to keep the refrigeration system at a high refrigeration efficiency.

[0075] In step 220, that is, in response to determining that the actual temperature change rate is greater than the set change rate, the heating and refrigeration device is started, including:

[0076] In response to the current temperature being less than the historical temperature and the difference between the current temperature and the historical temperature being greater than a second preset threshold, the heating side of the heating and refrigeration device is started.

[0077] The current temperature of the second temperature sensor is less than the historical temperature, which indicates that the circulating fluid is being cooled. The difference between the current temperature and the historical temperature is greater than the second preset threshold, which indicates that the actual temperature change rate is greater than the set change rate. When it is determined that the circulating fluid is being cooled and the cooling rate is relatively fast, the heating function of the heating and refrigeration device is started to warm up the circulating fluid. The temperature change rate of the second temperature sensor is used to determine whether to start the heating and refrigeration device, which can respond to the temperature change of the circulating fluid in time and quickly. The heating capacity of the heating and refrigeration device can be determined according to the current temperature of the second temperature sensor or the actual temperature change rate.

[0078] The first preset threshold and the second preset threshold described above can be the same or different, and can be set according to the temperature control requirement of the circulating fluid.

[0079] In the working condition that the circulating fluid of the circulating system exchanges heat with the load device, when the temperature change rate of the second measured temperature increases and the second measured temperature rises, it can be understood that the temperature of the circulating fluid after exchanging heat with the load device rises. If the input of the power supply of the heating and refrigeration device remains unchanged, the third measured temperature at the inlet end of the heat release side of the heat exchanger rises. The controller receives the third measured temperature rising and the temperature change rate increasing, and then the controller controls the heating and refrigeration device to increase the refrigeration output, improves the refrigeration capacity of the heating and refrigeration device, reduces the third measured temperature, and realizes the temperature reduction of the circulating fluid in advance, thereby reducing the requirement on the refrigeration system. The heating and refrigeration device is used to reduce the temperature of the circulating fluid, which can reduce the requirement on the refrigeration capacity of the refrigeration system, and helps to keep the refrigeration system at a high refrigeration efficiency.

[0080] In some embodiments, the temperature control method further includes:

[0081] in response to determining that the difference between the first measured temperature and the first set temperature is greater than the third preset threshold, starting the heating and refrigeration device;

[0082] The first set temperature is the set temperature of the first temperature sensor between the outlet and the outlet end of the water tank, and the first measured temperature is the measured temperature of the first temperature sensor.

[0083] The third preset threshold can be understood as the allowable deviation of the first measured temperature. If the first measured temperature exceeds the allowable deviation, the difference between the first measured temperature and the first set temperature is greater than the third preset threshold, which means that the target temperature for controlling the circulating liquid in the circulating system changes. At this time, at least one of the refrigeration system, the heating and refrigeration device, and the heater is used to adjust the temperature of the circulating liquid.

[0084] When the set temperature of the circulating liquid in the circulating system (which can be understood as the set temperature of the inlet end of the second circulating section) decreases, for example, from -20°C to -40°C, the first set temperature decreases from -20°C to -40°C. At this time, the first measured temperature is around -20°C, and the first measured temperature is higher than the first set temperature. At this time, the difference between the first measured temperature and the first set temperature is greater than the third preset threshold, and the refrigeration side of the heating and refrigeration device can be started to cool the circulating liquid. Therefore, during the cooling process of the circulating system, the heating and refrigeration device is used for refrigeration to accelerate the cooling speed and save the cooling time. During the cooling process of the circulating system, the refrigeration capacity of the entire system is improved, the advantage of rapid cooling of the heating and refrigeration device is exerted, the response rate to the load device is improved, the demand for rapid switching of the temperature of the circulating liquid in the circulating system is met, and energy saving is achieved.

[0085] When the set temperature of the circulating liquid in the circulating system (which can be understood as the set temperature of the inlet end of the second circulating section) increases, for example, from -40°C to -20°C, the first set temperature decreases from -40°C to -20°C. At this time, the first measured temperature is around -40°C, and the first measured temperature is lower than the first set temperature. At this time, the difference between the first measured temperature and the first set temperature is greater than the third preset threshold, and the heating side of the heating and refrigeration device can be started to heat the circulating liquid. Therefore, during the heating process of the circulating system, the heating and refrigeration device is used for heating to accelerate the heating speed and save the heating time.

[0086] The temperature regulation process of the circulating liquid in the above-mentioned circulating system can exchange heat with the load device or not exchange heat with the load device, which is not limited here.

[0087] When the difference between the first measured temperature and the first set temperature is within the third preset threshold and the circulating system is in an unloaded state, that is, the circulating liquid does not exchange heat with the load device, the heating and refrigeration device does not work.

[0088] The temperature control method further comprises:

[0089] In response to determining that the first set temperature of the inlet end of the second circulation section is reduced, the third set temperature of the inlet end of the heat releasing side of the heat exchanger is reduced, the heating side of the heating and refrigeration device is started, or the heating capacity of the heating and refrigeration device is increased, so that the third measured temperature of the inlet end of the heat releasing side meets the third set temperature.

[0090] The first set temperature reduction can be understood as that the circulating liquid of the circulation system needs to supply more cold energy to the load device, and the set temperature of the circulating liquid at the inlet end of the second circulation section is reduced, for example, from -20℃ to -40℃, and the first set temperature is reduced from -20℃ to -40℃.

[0091] Based on the first set temperature reduction, the third set temperature of the inlet end of the heat releasing side of the heat exchanger is reduced, the third set temperature is the set temperature of the circulating liquid at the inlet end of the heat releasing side of the heat exchanger, and the third measured temperature is the measured temperature of the circulating liquid at the inlet end of the heat releasing side of the heat exchanger.

[0092] The third set temperature is positively correlated with the first set temperature, and the third set temperature is adjusted according to the change of the first set temperature. The start-stop of the heating and refrigeration device and the cold energy provided by the heating and refrigeration device are controlled according to the relationship between the third set temperature and the third measured temperature, so that the temperature of the circulating liquid can be more timely and accurately regulated.

[0093] In the case of regulating the heating and refrigeration device according to the third set temperature through the controller, the third measured temperature of the circulating liquid detected by the third temperature sensor is fed back to the controller, and the controller regulates the start-stop or power of the heating and refrigeration device according to the measured temperature of the third temperature sensor. The third measured temperature can accurately feedback the temperature of the circulating liquid. By detecting the temperature of the circulating liquid at the outlet end of the third circulation section, it can be found whether the cold energy or heat provided by the heating and refrigeration device meets the demand of the circulating liquid, that is, by the deviation between the third measured temperature and the third set temperature, the operation of the heating and refrigeration device is controlled, so that the temperature of the circulating liquid entering the heat releasing side of the heat exchanger can be kept constant as much as possible, the requirement of temperature regulation of the refrigeration system can be reduced, the refrigeration system can be kept in the best working condition as much as possible, and the influence of temperature regulation of the circulation system on the refrigeration system can be reduced.

[0094] Similarly, the temperature control method further comprises:

[0095] In response to determining that the first set temperature is increased, the third set temperature is increased, the heating side of the heating and refrigeration device is started, or the heating capacity of the heating and refrigeration device is increased.

[0096] The first set temperature is increased, which means that the circulating fluid of the circulating system needs to supply less cold energy to the load device. The set temperature of the circulating fluid at the inlet end of the second circulating section is increased, for example, from -40°C to -20°C, and the first set temperature is increased from -40°C to -20°C.

[0097] In the case where the heating and refrigeration device is controlled according to the third set temperature, the third measured temperature of the circulating fluid detected by the third temperature sensor is fed back to the controller, and the controller controls the start-stop or power of the heating and refrigeration device according to the measured temperature of the third temperature sensor. The third measured temperature can accurately feedback the temperature of the circulating fluid. By detecting the temperature of the circulating fluid at the outlet end of the third circulating section, it can be found in time whether the cold or heat provided by the heating and refrigeration device meets the demand of the circulating fluid, that is, by the deviation between the third measured temperature and the third set temperature, the operation of the heating and refrigeration device is controlled, which can ensure that the temperature of the circulating fluid entering the heat releasing side of the heat exchanger is as constant as possible, and the requirement for temperature control of the refrigeration system is reduced, so that the refrigeration system can be operated in the best working condition, and the influence of temperature control of the circulating system on the refrigeration system is reduced.

[0098] Reference Figure 3 In some embodiments, the temperature control method further comprises:

[0099] In response to determining that the difference between the third measured temperature and the third set temperature exceeds the fourth preset threshold, the heating and refrigeration device is started;

[0100] The third set temperature is the set temperature of the third temperature sensor at the inlet end of the heat releasing side of the heat exchanger, and the third measured temperature is the measured temperature of the third temperature sensor.

[0101] When the difference between the third measured temperature and the third set temperature exceeds the fourth preset threshold, the fourth preset threshold can be understood as the fluctuation range allowed by the third measured temperature. For example, the fourth preset threshold can be between -1°C and 1°C. When the difference between the third measured temperature and the third set temperature exceeds the fourth preset threshold, the temperature fluctuation of the circulating fluid exceeds the allowed range, and the heating and refrigeration device needs to be controlled.

[0102] In the case where the low-temperature channel of the circulating system is running, when the third measured temperature is greater than the third set temperature, and the difference between the two exceeds the fourth preset threshold, the refrigeration side of the heating and refrigeration device is started or the refrigeration capacity is increased; when the third measured temperature is less than the third set temperature, and the difference between the two exceeds the fourth preset threshold, the refrigeration side of the heating and refrigeration device is turned off, the heating side is started or the refrigeration capacity is reduced.

[0103] The control target of the circulating system is a third measured temperature. When the third measured temperature is higher than a third set temperature, the controller controls the refrigeration output of the heating and refrigeration device to increase, the heating output to be 0, the heating and refrigeration device to refrigerate, and the third measured temperature to be lowered to be the same as the third set temperature. When the third measured temperature is lower than the third set temperature, the controller controls the refrigeration output of the heating and refrigeration device to be 0, the heating output to increase, and the heating and refrigeration device to heat, so that the third measured temperature is raised until the third measured temperature is the same as the third set temperature. The third set temperature is higher than a fourth set temperature of an outlet end of the heat releasing side of the heat exchanger, and the circulating liquid in the first circulating section meets the fourth set temperature after being adjusted in temperature by the refrigeration system.

[0104] The temperature control method further comprises:

[0105] In response to determining that the third measured temperature of the inlet end of the heat releasing side of the heat exchanger is higher than a first threshold value of the third set temperature, the fourth set temperature of the inlet end of the water tank is lowered, the refrigeration side of the heating and refrigeration device is turned on, or the refrigeration capacity of the heating and refrigeration device is increased.

[0106] When the third measured temperature is higher than the third set temperature, the temperature of the circulating liquid is higher than the set temperature, the target temperature of the circulating liquid in the circulating system is lowered, the fourth set temperature is lowered according to this situation, and the circulating liquid is cooled by the heating and refrigeration device. The heating and refrigeration device cooperates with the refrigeration system to cool the circulating liquid. The first threshold value can be understood as the maximum range of the temperature fluctuation of the circulating liquid at the inlet end of the heat releasing side of the heat exchanger. The first threshold value can be a point value or a range.

[0107] The temperature control method further comprises:

[0108] In response to determining that the third measured temperature is lower than a second threshold value of the third set temperature, the fourth set temperature is raised, the heating side of the heating and refrigeration device is turned on, or the heating capacity of the heating and refrigeration device is increased.

[0109] When the third measured temperature is lower than the third set temperature, the temperature of the circulating liquid is lower than the set temperature, the target temperature of the circulating liquid in the circulating system is raised, the fourth set temperature is raised according to this situation, and the circulating liquid is heated by the heating and refrigeration device. The heating and refrigeration device cooperates with the refrigeration system to heat the circulating liquid. The second threshold value can be understood as the maximum range of the temperature fluctuation of the circulating liquid at the inlet end of the heat releasing side of the heat exchanger. The second threshold value can be a point value or a range. The second threshold value and the first threshold value can be the same or different. The second threshold value and the first threshold value can be understood as two end values of the fourth preset threshold value.

[0110] In some cases, the first set temperature of the control circulation system is decreased, the fourth set temperature of the outlet end of the heat releasing side of the heat exchanger is decreased, and the third set temperature of the inlet end of the heat releasing side of the heat exchanger is also decreased. When the third measured temperature is higher than the third set temperature, the controller controls the heating and refrigeration device to increase the refrigeration output, to increase the refrigeration capacity of the heating and refrigeration device, to decrease the third measured temperature, and to achieve the cooling.

[0111] The first set temperature of the control circulation system is increased, the fourth set temperature of the outlet end of the heat releasing side of the heat exchanger is increased, and the third set temperature of the inlet end of the heat releasing side of the heat exchanger is also increased. When the third measured temperature is lower than the third set temperature, the controller controls the heating and refrigeration device to increase the heating output, to achieve the heating function of the heating and refrigeration device, and to increase the third measured temperature, and to achieve the heating.

[0112] In some embodiments, the temperature control method further comprises:

[0113] In response to the second measured temperature being greater than the first measured temperature, the refrigeration side of the heating and refrigeration device is turned on to precool the circulating liquid. The first measured temperature is the measured temperature of the inlet end of the second circulation section. The second measured temperature is the measured temperature of the outlet end of the second circulation section. The second measured temperature can be understood as the current temperature of the second temperature sensor.

[0114] The second measured temperature being greater than the first measured temperature can be understood as that the load device releases heat to the circulating liquid in the second circulation section, and the circulating liquid increases in temperature after absorbing the heat. When it is determined that the temperature of the circulating liquid increases, the refrigeration side of the heating and refrigeration device is turned on to precool the circulating liquid before the refrigeration system, so that the response speed is fast, the requirement for the response sensitivity of the refrigeration system is reduced, the temperature control precision is improved, and the production efficiency is improved.

[0115] In some embodiments, the temperature control method further comprises:

[0116] In response to the second measured temperature being less than the first measured temperature, the heating side of the heating and refrigeration device is turned on to preheat the circulating liquid.

[0117] In some embodiments, the temperature control method further comprises: determining whether the entire temperature control device is in an idle state according to the first measured temperature and a deviation between the first measured temperature and the second measured temperature. When the temperature control device is in the idle state, the power supply of the heating and refrigeration device is turned off to stop working, and energy saving is achieved. When the deviation is less than a fifth preset threshold, the temperature control device is in the idle state.

[0118] It should be pointed out finally that the above embodiments are only used to illustrate the technical solutions of the present application, but not to limit the same; and although the present application has been described in detail with reference to the foregoing embodiments, it should be appreciated by those skilled in the art that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features thereof can be replaced equivalently; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A temperature control device, characterized by, The application relates to a temperature control device, comprising: a circulating system, comprising a first circulating section, a water tank, a second circulating section and a third circulating section connected in sequence and forming a circulation, circulating liquid of the second circulating section being used for heat exchange with a load device; a heating and refrigeration device, which is used for heat exchange with the third circulating section, and a second temperature sensor is arranged between an outlet end of the second circulating section and the third circulating section; a refrigeration system, comprising a heat absorption side of a heat exchanger, the heat absorption side of the heat exchanger being communicated with a refrigerant flow path of the refrigeration system; at least part of the first circulating section forms a heat release side of the heat exchanger; a third temperature sensor is arranged between the third circulating section and the heat release side of the heat exchanger; a fourth temperature sensor is arranged between the heat release side of the heat exchanger and an inlet end of the water tank; a third set temperature is a set temperature of the third temperature sensor of the inlet end of the heat release side of the heat exchanger, and a third measured temperature is a measured temperature of the third temperature sensor; in response to determining that the third measured temperature is higher than the third set temperature by a first threshold value, the fourth set temperature of the inlet end of the water tank is lowered, a refrigeration side of the heating and refrigeration device is started, or the refrigeration amount of the heating and refrigeration device is increased; in response to determining that the third measured temperature is lower than the third set temperature by a second threshold value, the fourth set temperature is raised, a heating side of the heating and refrigeration device is started, or the heating amount of the heating and refrigeration device is increased.

2. The temperature-controlled device of claim 1, wherein, A first temperature sensor is arranged between an outlet of the water tank and the second circulating section.

3. The temperature-controlled device of claim 1, wherein, A main pipeline is connected between the outlet end of the water tank and the second circulating section, a bypass pipeline is connected between a preset position of the main pipeline and an auxiliary port of the water tank, the bypass pipeline is provided with a first valve, the main pipeline is provided with a first pump, and the first pump is located between the outlet end of the water tank and the preset position.

4. Temperature control apparatus according to claim 3, characterised in that One or more of a first temperature sensor, a flow meter and a pressure sensor are arranged between the preset position and the second circulating section.

5. A temperature control method, characterized by, The application is applied to the temperature control device in any one of claims 1 to 4, comprising: an actual temperature change rate of the second temperature sensor is obtained; in response to determining that the actual temperature change rate is greater than a set change rate, the heating and refrigeration device is started; the third set temperature is a set temperature of the third temperature sensor of the inlet end of the heat release side of the heat exchanger, and the third measured temperature is a measured temperature of the third temperature sensor; in response to determining that the third measured temperature is higher than the third set temperature by a first threshold value, the fourth set temperature of the inlet end of the water tank is lowered, a refrigeration side of the heating and refrigeration device is started, or the refrigeration amount of the heating and refrigeration device is increased; in response to determining that the third measured temperature is lower than the third set temperature by a second threshold value, the fourth set temperature is raised, a heating side of the heating and refrigeration device is started, or the heating amount of the heating and refrigeration device is increased.

6. The temperature control method of claim 5, wherein, the response to determining that the actual temperature change rate is greater than a set change rate, and the heating and refrigeration device is started, comprises: in response to the current temperature detected by the second temperature sensor being greater than a historical temperature detected by the second temperature sensor last time and a difference between the current temperature and the historical temperature being greater than a first preset threshold, starting a cooling side of the heating and refrigeration device; in response to the current temperature being less than the historical temperature and a difference between the current temperature and the historical temperature being less than a second preset threshold, starting a heating side of the heating and refrigeration device.

7. The temperature control method of claim 5, wherein, Further comprising: in response to determining that a difference between a first measured temperature and a first set temperature is greater than a third preset threshold, starting the heating and refrigeration device; wherein the first set temperature is a set temperature of a first temperature sensor between an outlet end of the water tank and the second circulation section, and the first measured temperature is a measured temperature of the first temperature sensor.

8. The temperature control method of claim 5, wherein, Further comprising: in response to determining that a difference between a third measured temperature and a third set temperature is greater than a fourth preset threshold, starting the heating and refrigeration device.

9. The temperature control method according to any one of claims 5 to 8, characterized in that, Further comprising: in response to a second measured temperature being greater than a first measured temperature, controlling a cooling side of the heating and refrigeration device to be started, the first measured temperature being a measured temperature of an inlet end of the second circulation section, and the second measured temperature being a measured temperature of an outlet end of the second circulation section; in response to the second measured temperature being less than the first measured temperature, controlling a heating side of the heating and refrigeration device to be started.

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