A small two-degree-of-freedom piezoelectric precision manipulator and a method for clamping and rotating an object

Abstract

A small two-degree-of-freedom piezoelectric fine manipulator and a method for achieving clamping and rotation of objects belong to the field of micro-nano manipulation and solve the problems that existing manipulators are difficult to achieve with large stroke, high precision, miniaturization, and fast response. The device described in the present invention includes a two-dimensional piezoelectric driver, a two-dimensional decoupling flexible mechanism, a flexible amplifying and guiding mechanism, etc. The bottom of the two-dimensional piezoelectric driver is fixed on a structural support component, and the top output end of the two-dimensional piezoelectric driver is fixedly connected to the input end of the two-dimensional decoupling flexible mechanism; the output end of the two-dimensional decoupling flexible mechanism is fixedly connected to the input end of the flexible amplifying and guiding mechanism; the flexible amplifying and guiding mechanism amplifies and guides the two-dimensional displacement after decoupling, and its output end is used to achieve clamping and twisting operations; a coupling compensation piezoelectric sheet is attached to the surface of the flexible amplifying and guiding mechanism; it is suitable for high-precision micro-nano two-degree-of-freedom manipulation of micro-objects such as cells.

Description

Technical Field

[0001] The present invention belongs to the field of micro-nano operation technology, and in particular relates to a small two-degree-of-freedom piezoelectric fine manipulator and a method for clamping and rotating an object. Background Art

[0002] With the rapid development of biomedical engineering, advanced optics, precision instruments and other fields, micro-manipulation technology plays an increasingly important role. The manipulator is an important tool for micro-manipulation technology. As the end effector, it directly interacts with the object being manipulated. Therefore, the performance of the manipulator is crucial to micro-manipulation. According to the driving method, there are currently mainly electrostatic, electromagnetic, electrothermal and piezoelectric types. The electrostatic type has a fast response but a complex circuit and a large structure; the electromagnetic type has a large stroke but is difficult to miniaturize and is affected by external magnetic fields; the electrothermal type has a large stroke but a high operating temperature and a slow response;

[0003] For complex micro-manipulation tasks, such as polarization-maintaining fiber alignment, the manipulator must not only have clamping capabilities but also rotation capabilities. However, traditional piezoelectric manipulators currently use piezoelectric stack drive, which mostly has a single degree of freedom and no longer meets application requirements. Summary of the Invention

[0004] The purpose of the present invention is to solve the problem in the prior art that it is difficult for manipulators to take into account the characteristics of large stroke, high precision, miniaturization, and fast response, as well as to realize two-degree-of-freedom operation. A small two-degree-of-freedom piezoelectric fine manipulator and a method for clamping and rotating objects using a small two-degree-of-freedom piezoelectric fine manipulator are provided.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] Solution 1: A small two-degree-of-freedom piezoelectric fine manipulator, comprising a two-dimensional piezoelectric actuator, a two-dimensional decoupling flexible mechanism, a flexible amplifying guide mechanism, a coupling compensation piezoelectric sheet, and a structural support component;

[0007] The bottom of the two-dimensional piezoelectric driver is fixed on the structural support component, and the top output end of the two-dimensional piezoelectric driver is fixedly connected to the input end of the two-dimensional decoupling flexible mechanism;

[0008] The output end of the two-dimensional decoupling flexible mechanism is fixedly connected to the flexible amplification guide mechanism;

[0009] The flexible amplifying and guiding mechanism amplifies and guides the two-dimensional displacement after decoupling, and its input end is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism, and its output end is used to realize clamping and twisting operations;

[0010] The coupling compensation piezoelectric sheet is attached to the surface of the flexible amplifying guide mechanism and is used to compensate for the displacement coupling error of the output end of the flexible amplifying guide mechanism;

[0011] The structural support component is used to support a two-dimensional piezoelectric driver, a two-dimensional decoupling flexible mechanism and a flexible amplification guide mechanism.

[0012] Furthermore, a preferred embodiment is provided, wherein the two-dimensional piezoelectric actuator comprises a metal component and a piezoelectric element;

[0013] The piezoelectric elements are attached to the surface of the metal parts. The piezoelectric elements in relative positions form a group. By stimulating one group of piezoelectric elements, the two-dimensional piezoelectric driver is bent and deformed to output the driving displacement. The two groups of piezoelectric elements are stimulated separately to achieve two-dimensional driving.

[0014] Furthermore, a preferred embodiment is provided, wherein the two-dimensional piezoelectric driver is any one of a patch structure, a sandwich structure and a piezoelectric tube structure.

[0015] Furthermore, a preferred embodiment is provided, in which the decoupling method of the two-dimensional decoupling flexible mechanism is: utilizing the characteristic that the longitudinal stiffness of the blade-shaped bending beam is much greater than the lateral stiffness to achieve two-dimensional motion decoupling, wherein one end outputs X-direction displacement and the other end outputs Y-direction displacement.

[0016] Furthermore, a preferred embodiment is provided, wherein the flexible amplifying guide mechanism comprises a lever structure, a flexible hinge, a clamping arm and a twisting arm;

[0017] The fixed ends of the lever structure, the clamping arm and the twisting arm are all fixed to the structural support component, the input end of the lever structure is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism, and the output end of the lever structure is connected to the input ends of the clamping arm and the twisting arm through a flexible hinge;

[0018] The lever structure performs a first-stage amplification and output of the displacement of the output end of the two-dimensional decoupling flexible mechanism, and outputs the first-stage amplified displacement to the input ends of the clamping arm and the twisting arm through the flexible hinge. The clamping arm and the twisting arm are both parallelogram structures, and the displacement is amplified and guided in a second stage. The output end of the clamping arm outputs displacement along the X direction to realize the opening and closing clamping operation, and the output end of the twisting arm outputs displacement along the Y direction to realize the twisting action.

[0019] Furthermore, a preferred embodiment is provided, wherein the shape of the flexible hinge is any one of circular, elliptical, leaf-shaped, and V-shaped.

[0020] Furthermore, a preferred embodiment is provided, in which two coupling compensation piezoelectric sheets in relative positions form a group, and the piezoelectric sheets pasted on the upper and lower sides of the clamping arm are used to compensate for the coupling displacement in the Z direction, the piezoelectric sheets pasted on the left and right sides of the clamping arm are used to compensate for the coupling displacement in the Y direction, the piezoelectric sheets pasted on the upper and lower sides of the twisting arm are used to compensate for the coupling displacement in the Z direction, and the piezoelectric sheets pasted on the left and right sides of the twisting arm are used to compensate for the coupling displacement in the X direction.

[0021] Furthermore, a preferred embodiment is provided, wherein the structural support component includes a base plate and a frame;

[0022] The base plate provides support for the frame and the two-dimensional piezoelectric driver, and the frame provides support for the two-dimensional decoupling flexible mechanism and the flexible amplification guide mechanism.

[0023] Solution 2: A method for clamping and rotating an object using a small two-degree-of-freedom piezoelectric fine manipulator, the method comprising the following steps:

[0024] S1, stimulating the two-dimensional piezoelectric actuator to open the clamping arm and place the manipulated object between the clamping arm and the end of the twisting arm;

[0025] S2, stimulating the two-dimensional piezoelectric actuator to close and clamp the clamping arm to clamp the object being manipulated;

[0026] S3, stimulating the two-dimensional piezoelectric actuator to move the twisting arm to perform a twisting action, thereby realizing a rotation operation on the object;

[0027] S4. Activate the two-dimensional piezoelectric actuator to open the clamping arm, place the manipulated object, and complete the clamping and rotation of the manipulated object.

[0028] Beneficial effects of the present invention:

[0029] The present invention proposes a small two-degree-of-freedom piezoelectric precision manipulator, which uses a piezoelectric driver for two-dimensional drive, combines a leaf-shaped bending beam mechanism for decoupling, realizes displacement amplification and guidance through a flexible mechanism, and uses a coupling compensation piezoelectric sheet to perform real-time coupling compensation of the output displacement of the two arms. It can achieve high-precision clamping and rotation operations on micro-objects and has a wide range of application backgrounds in biomedicine, micro-nano manufacturing, micro-assembly, advanced optics, precision instruments and other fields.

[0030] Compared with the micro-gripper in the prior art, the small two-degree-of-freedom piezoelectric fine manipulator of the present invention has the advantages of compact structure, low energy consumption, high precision, fast response, and no interference from magnetic fields.

[0031] The present invention is more suitable for high-precision micro-nano operations, such as cell grabbing, optical switching assembly, and micro-optoelectronic mechanical system assembly. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0033] Figure 1 This is a schematic structural diagram of the small two-degree-of-freedom piezoelectric fine manipulator described in the present invention.

[0034] Figure 2 Schematic diagrams of the two-dimensional piezoelectric actuators described in the present invention. (a) is a schematic diagram of the patch-type two-dimensional piezoelectric actuator, (b) is a schematic diagram of the sandwich-type two-dimensional piezoelectric actuator, and (c) is a schematic diagram of the piezoelectric tube-type two-dimensional piezoelectric actuator.

[0035] Figure 3 This is a schematic diagram of the flexible amplifying guide mechanism described in the present invention.

[0036] Figure 4 This is a schematic diagram of the principle of the two-dimensional decoupling flexible mechanism described in the present invention.

[0037] Figure 5 This is a schematic diagram of the principle of the flexible amplifying guide mechanism described in the present invention.

[0038] Figure 6 Schematic diagrams of the flexible hinge structures of the present invention. (a) is a schematic diagram of the circular-cut flexible hinge structure of the present invention, (b) is a schematic diagram of the elliptical-cut flexible hinge structure of the present invention, (c) is a schematic diagram of the leaf-shaped-cut flexible hinge structure of the present invention, and (d) is a schematic diagram of the V-shaped-cut flexible hinge structure of the present invention.

[0039] Figure 7 This is a schematic diagram of the principle of the coupling compensation piezoelectric piece described in the present invention.

[0040] In the figure, there are two-dimensional piezoelectric driver 1; metal component 1-1; piezoelectric element 1-2; two-dimensional decoupling flexible mechanism 2; flexible amplification guide mechanism 3; lever structure 3-1; flexible hinge 3-2; clamping arm 3-3; twisting arm 3-4; six-coupling compensation piezoelectric sheet 4; structural support component 5; base plate 5-1; frame 5-2. DETAILED DESCRIPTION

[0041] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, but are not to be construed as limiting the present invention.

[0042] Implementation Method 1: Combination Figures 1 to 7 This embodiment describes a small two-degree-of-freedom piezoelectric fine manipulator, comprising a two-dimensional piezoelectric actuator 1, a two-dimensional decoupling flexible mechanism 2, a flexible amplifying guide mechanism 3, a coupling compensation piezoelectric sheet 4, and a structural support component 5.

[0043] The two-dimensional piezoelectric driver 1 is used to generate a two-dimensional driving force, with its bottom fixed on the structural support component 5 and its top output end fixedly connected to the input end of the two-dimensional decoupling flexible mechanism 2;

[0044] The two-dimensional decoupling flexible mechanism 2 decouples the two-dimensional displacement output by the two-dimensional piezoelectric driver 1, and its output end is fixedly connected to the flexible amplifying guide mechanism 3, and its fixed end is fixed to the structural support component 5;

[0045] The flexible amplifying and guiding mechanism 3 amplifies and guides the two-dimensional displacement after decoupling, and its input end is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism 2, and its output end is used to realize the clamping and twisting operations;

[0046] The coupling compensation piezoelectric piece 4 is attached to the surface of the flexible amplifying guide mechanism 3 to compensate for the displacement coupling error at the output end of the flexible amplifying guide mechanism 3;

[0047] The structural support component 5 is used to support the two-dimensional piezoelectric driver 1 , the two-dimensional decoupling flexible mechanism 2 and the flexible amplifying guide mechanism 3 .

[0048] Embodiment 2: This embodiment further defines the small two-degree-of-freedom piezoelectric fine manipulator described in Embodiment 1. The two-dimensional piezoelectric actuator 1 includes a metal component 1-1 and a piezoelectric element 1-2.

[0049] The piezoelectric elements 1-2 are pasted on the surface of the metal part 1-1. The piezoelectric elements 1-2 are located in relative positions as a group. By stimulating one group of piezoelectric elements, the two-dimensional piezoelectric driver 1 is bent and deformed to output the driving displacement, and two groups of piezoelectric elements are stimulated separately to achieve two-dimensional driving.

[0050] Embodiment 3: This embodiment further limits the small two-degree-of-freedom piezoelectric fine manipulator described in Embodiment 2. The two-dimensional piezoelectric driver 1 is any one of a patch structure, a sandwich structure, and a piezoelectric tube structure.

[0051] See also Figure 2 This embodiment is described, wherein (a) is a schematic diagram of the structure of the patch-type two-dimensional piezoelectric driver described in the present invention, (b) is a schematic diagram of the structure of the sandwich-type two-dimensional piezoelectric driver described in the present invention, and (c) is a schematic diagram of the structure of the piezoelectric tube-type two-dimensional piezoelectric driver described in the present invention.

[0052] The piezoelectric elements 1-2 of the patch-type two-dimensional piezoelectric driver are attached to the surface of the metal component 1-1. The piezoelectric elements in relative positions form a group. When voltage excitation is applied to a group of piezoelectric elements in the X direction, one piezoelectric element extends and one shortens, thereby causing the two-dimensional piezoelectric driver 1 to bend and deform to output a driving displacement in the X direction. When voltage excitation is applied to a group of piezoelectric elements in the Y direction, the two-dimensional piezoelectric driver 1 can bend and deform to output a driving displacement in the Y direction. In this way, two-dimensional drive can be achieved.

[0053] The piezoelectric element 1-2 of the sandwich-type two-dimensional piezoelectric actuator is sandwiched between metal parts 1-1. The piezoelectric element 1-2 is divided into four polarization regions. When voltage excitation is applied to the two regions in the X direction, one region stretches and the other region shortens, causing the two-dimensional piezoelectric actuator 1 to bend and deform to output a driving displacement in the X direction. When voltage excitation is applied to the two regions in the Y direction, the two-dimensional piezoelectric actuator 1 can bend and deform to output a driving displacement in the Y direction. In this way, two-dimensional drive can be achieved.

[0054] The piezoelectric element 1-2 of the piezoelectric tube-type two-dimensional piezoelectric driver is located between the metal parts 1-1. The piezoelectric element 1-2 has a tubular structure and the excitation area is divided into four areas. When voltage excitation is applied to the two areas in the X direction, one area stretches and the other area shortens, thereby causing the two-dimensional piezoelectric driver 1 to bend and deform to output the driving displacement in the X direction. When voltage excitation is applied to the two areas in the Y direction, the two-dimensional piezoelectric driver 1 can bend and deform to output the driving displacement in the Y direction. In this way, two-dimensional drive can be achieved.

[0055] Implementation method 4. This implementation method is a further limitation of the small two-degree-of-freedom piezoelectric fine manipulator described in implementation method 1. The decoupling method of the two-dimensional decoupling flexible mechanism 2 is: utilizing the characteristic that the longitudinal stiffness of the leaf-shaped bending beam is much greater than the transverse stiffness, when the two-dimensional flexible structure inputs the X-direction displacement, the leaf-shaped bending beam arranged longitudinally along the X-direction does not deform due to its large stiffness, and transmits the input displacement to the output end, while the leaf-shaped bending beam arranged transversely bends and deforms due to its small transverse stiffness and does not transmit the displacement, and thus the output end only outputs the X-direction displacement. Similarly, when the two-dimensional flexible mechanism inputs the Y-direction displacement, the leaf-shaped bending beam arranged longitudinally along the Y-direction does not deform, and transmits the input displacement to the output end, while the leaf-shaped bending beam arranged transversely bends and deforms, which has no effect on the displacement of the output end, and thus the output end only outputs the Y-direction displacement.

[0056] Embodiment 5. This embodiment further defines the small two-degree-of-freedom piezoelectric fine manipulator described in Embodiment 1. The flexible amplifying guide mechanism 3 includes a lever structure 3-1, a flexible hinge 3-2, a clamping arm 3-3, and a twisting arm 3-4.

[0057] The fixed ends of the lever structure 3-1, the clamping arm 3-3, and the twisting arm 3-4 are all fixed to the structural support component 5. The input end of the lever structure 3-1 is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism 2. The output end of the lever structure 3-1 is connected to the input ends of the clamping arm 3-3 and the twisting arm 3-4 via a flexible hinge 3-2.

[0058] The lever structure 3-1 performs a first-stage amplification and output of the displacement of the output end of the two-dimensional decoupling flexible mechanism 2, and outputs the first-stage amplified displacement to the input ends of the clamping arm 3-3 and the twisting arm 3-4 through the flexible hinge 3-2. The clamping arm 3-3 and the twisting arm 3-4 are both parallelogram structures, and perform a second-stage amplification and guidance on the displacement. The output end of the clamping arm 3-3 outputs the displacement along the X direction to realize the opening and closing clamping operation, and the output end of the twisting arm 3-4 outputs the displacement along the Y direction to realize the twisting action.

[0059] Embodiment 6. This embodiment further limits the small two-degree-of-freedom piezoelectric fine manipulator described in embodiment 5. The shape of the flexible hinge 3-2 is any one of circular, elliptical, leaf-shaped, and V-shaped.

[0060] Implementation method seven. This implementation method is a further limitation of the small two-degree-of-freedom piezoelectric fine manipulator described in implementation method one. The two coupling compensation piezoelectric sheets 4 in relative positions are grouped together, and the piezoelectric sheets pasted on the upper and lower sides of the clamping arm 3-3 are used to compensate for the coupling displacement in the Z direction, the piezoelectric sheets pasted on the left and right sides of the clamping arm 3-3 are used to compensate for the coupling displacement in the Y direction, the piezoelectric sheets pasted on the upper and lower sides of the twisting arm 3-4 are used to compensate for the coupling displacement in the Z direction, and the piezoelectric sheets pasted on the left and right sides of the twisting arm 3-4 are used to compensate for the coupling displacement in the X direction.

[0061] Embodiment 8: This embodiment further defines the small two-degree-of-freedom piezoelectric fine manipulator described in Embodiment 1. The structural support component 5 includes a base plate 5-1 and a frame 5-2.

[0062] The base plate 5 - 1 provides support for the frame 5 - 2 and the two-dimensional piezoelectric driver 1 , and the frame 5 - 2 provides support for the two-dimensional decoupling flexible mechanism 2 and the flexible amplifying guide mechanism 3 .

[0063] Embodiment 9: This embodiment proposes a method for clamping and rotating an object using a small two-degree-of-freedom piezoelectric fine manipulator, the method comprising the following steps:

[0064] S1, stimulating the two-dimensional piezoelectric actuator 1 to open the clamping arm 3-3 and place the manipulated object between the clamping arm 3-3 and the end of the twisting arm 3-4;

[0065] S2, stimulating the two-dimensional piezoelectric actuator 1 to close and clamp the clamping arm 3-3 to clamp the object being manipulated;

[0066] S3, stimulating the two-dimensional piezoelectric actuator 1 to move the twisting arms 3-4 to perform a twisting action, thereby realizing a rotation operation on the object;

[0067] S4. Excite the two-dimensional piezoelectric driver 1 to open the clamping arm 3-3, place the manipulated object, and complete the clamping and rotation of the manipulated object.

[0068] The method for clamping and rotating the controlled object described in this embodiment is implemented based on the small two-degree-of-freedom piezoelectric fine manipulator described in embodiments one to nine.

[0069] Those skilled in the art will understand that the above description is only a preferred embodiment of the present invention, and the features described in the various embodiments and / or claims of the present disclosure can be combined or combined in various ways, even if such a combination or combination is not explicitly described in the present disclosure. It is not intended to limit the present invention. The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

[0070] Although preferred embodiments of the present invention have been described, those skilled in the art may make additional changes and modifications to these embodiments once they are aware of the basic inventive concepts. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the present invention. Obviously, those skilled in the art may make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, the present invention is intended to include such changes and modifications as fall within the scope of the claims and their equivalents.

Claims

1. A small two-degree-of-freedom piezoelectric precision manipulator, characterized in that: It includes a two-dimensional piezoelectric driver (1), a two-dimensional decoupling flexible mechanism (2), a flexible amplifying guide mechanism (3), a coupling compensation piezoelectric sheet (4) and a structural support component (5); The bottom of the two-dimensional piezoelectric driver (1) is fixed on the structural support component (5), and the top output end of the two-dimensional piezoelectric driver (1) is fixedly connected to the input end of the two-dimensional decoupling flexible mechanism (2); The output end of the two-dimensional decoupling flexible mechanism (2) is fixedly connected to the flexible amplifying guide mechanism (3); The flexible amplifying and guiding mechanism (3) amplifies and guides the two-dimensional displacement after decoupling, and its input end is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism (2), and its output end is used to realize clamping and twisting operations; The coupling compensation piezoelectric sheet (4) is adhered to the surface of the flexible amplifying guide mechanism (3) and is used to compensate for the displacement coupling error at the output end of the flexible amplifying guide mechanism (3); The structural support component (5) is used to support the two-dimensional piezoelectric driver (1), the two-dimensional decoupling flexible mechanism (2) and the flexible amplification guide mechanism (3); The two-dimensional piezoelectric driver (1) comprises a metal component (1-1) and a piezoelectric element (1-2); The piezoelectric elements (1-2) are attached to the surface of the metal component (1-1), and the piezoelectric elements (1-2) at opposite positions form a group. By stimulating one group of piezoelectric elements, the two-dimensional piezoelectric driver (1) is bent and deformed, thereby outputting a driving displacement. Two groups of piezoelectric elements are stimulated separately to achieve two-dimensional driving. The decoupling method of the two-dimensional decoupling flexible mechanism (2) is: utilizing the characteristic that the longitudinal stiffness of the blade-shaped bending beam is much greater than the transverse stiffness to achieve two-dimensional motion decoupling, wherein one end outputs X-direction displacement and the other end outputs Y-direction displacement.

2. The small two-degree-of-freedom piezoelectric fine manipulator according to claim 1, characterized in that: The two-dimensional piezoelectric driver (1) is any one of a patch structure, a sandwich structure and a piezoelectric tube structure.

3. The small two-degree-of-freedom piezoelectric fine manipulator according to claim 1, characterized in that: The flexible amplifying guide mechanism (3) comprises a lever structure (3-1), a flexible hinge (3-2), a clamping arm (3-3) and a twisting arm (3-4); The fixed ends of the lever structure (3-1), the clamping arm (3-3) and the twisting arm (3-4) are all fixed on the structural support component (5); the input end of the lever structure (3-1) is fixedly connected to the output end of the two-dimensional decoupling flexible mechanism (2); and the output end of the lever structure (3-1) is connected to the input ends of the clamping arm (3-3) and the twisting arm (3-4) via a flexible hinge (3-2); The lever structure (3-1) performs a first-stage amplification and output of the displacement at the output end of the two-dimensional decoupling flexible mechanism (2), and outputs the first-stage amplified displacement to the input ends of the clamping arm (3-3) and the twisting arm (3-4) through the flexible hinge (3-2). The clamping arm (3-3) and the twisting arm (3-4) are both parallelogram structures, and perform a second-stage amplification and guidance on the displacement. The output end of the clamping arm (3-3) outputs the displacement along the X direction to realize the opening and closing clamping operation, and the output end of the twisting arm (3-4) outputs the displacement along the Y direction to realize the twisting action.

4. The small two-degree-of-freedom piezoelectric fine manipulator according to claim 3, characterized in that: The shape of the flexible hinge (3-2) is any one of circular, elliptical, leaf-shaped and V-shaped.

5. The small two-degree-of-freedom piezoelectric fine manipulator according to claim 1, characterized in that: The two coupling compensation piezoelectric sheets (4) in relative positions form a group, and the piezoelectric sheets pasted on the upper and lower sides of the clamping arm (3-3) are used to compensate for the coupling displacement in the Z direction, the piezoelectric sheets pasted on the left and right sides of the clamping arm (3-3) are used to compensate for the coupling displacement in the Y direction, the piezoelectric sheets pasted on the upper and lower sides of the twisting arm (3-4) are used to compensate for the coupling displacement in the Z direction, and the piezoelectric sheets pasted on the left and right sides of the twisting arm (3-4) are used to compensate for the coupling displacement in the X direction.

6. The small two-degree-of-freedom piezoelectric fine manipulator according to claim 1, characterized in that: The structural support component (5) comprises a bottom plate (5-1) and a frame (5-2); The base plate (5-1) provides support for the frame (5-2) and the two-dimensional piezoelectric driver (1), and the frame (5-2) provides support for the two-dimensional decoupling flexible mechanism (2) and the flexible amplification guide mechanism (3).

7. A method for clamping and rotating an object using the small two-degree-of-freedom piezoelectric fine manipulator according to any one of claims 1 to 6, characterized in that: The clamping and rotating method comprises the following steps: S1, stimulating the two-dimensional piezoelectric actuator (1) to open the clamping arm (3-3) and place the manipulated object between the clamping arm (3-3) and the end of the twisting arm (3-4); S2, stimulating the two-dimensional piezoelectric actuator (1) to close and clamp the clamping arm (3-3) to perform a clamping action on the manipulated object; S3, stimulating the two-dimensional piezoelectric actuator (1) to move the twisting arms (3-4) to perform a twisting action, thereby realizing a rotation operation on the object; S4, stimulating the two-dimensional piezoelectric actuator (1), causing the clamping arm (3-3) to open, placing the manipulated object, and completing the clamping and rotation of the manipulated object.

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