Decoupled displacement parallel driven flexible hinge two-dimensional platform

Abstract

The present application relates to the technical field of precision operating equipment, and discloses a displacement decoupling parallel driving flexible hinge two-dimensional platform, which comprises a base, a first voice coil motor located at one side of the interior of the base, a symmetrical flexible hinge vertically installed in the interior of the base, the symmetrical flexible hinge being located at one side of the first voice coil motor, and the output end of the first voice coil motor being fixedly installed with the middle part of one of the symmetrical flexible hinge, a first-stage flexible platform connected with the symmetrical flexible hinge, the first-stage flexible platform being connected with a second-stage flexible platform through a single / symmetrical flexible hinge, the single / symmetrical flexible hinge being vertically arranged with the symmetrical flexible hinge, and the second-stage flexible platform being provided with a second voice coil motor on the top. The present application adopts a double-pole flexible hinge series mechanism, improves the utilization efficiency of standard elements, reduces the manufacturing cost, simultaneously realizes the decoupling of two-stage driving and feedback, and significantly reduces the control complexity.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of precision operation equipment, in particular to a displacement decoupling parallel driving flexible hinge two-dimensional platform. BACKGROUND

[0002] The crystal piercing device requires high-frequency motion in the transverse and longitudinal directions, the transverse direction is used for positioning, and the longitudinal direction is used for completing the crystal piercing operation, the speed is as high as 100Hz, and the entire motion cycle is 10ms. The prior art proposes a single-side flexible hinge scheme, which can realize a larger stroke. However, the transverse and longitudinal displacements are coupled, and it is difficult to compensate for the coupled displacement in a short time. In addition, the motion inertia of the first-stage flexible hinge is much larger than that of the second flexible hinge, if the first-stage flexible hinge also generates parasitic displacement, a circular voice coil motor with the maximum thrust density cannot be used, resulting in that the acceleration of the first-stage flexible hinge platform does not match that of the second stage.

[0003] Based on this, the present application designs a displacement decoupling parallel driving flexible hinge two-dimensional platform with symmetrical arrangement of the first-stage flexible hinge, adopts a cylindrical voice coil motor for large thrust driving, and uses a mountain-shaped voice coil motor allowing transverse motion for the second stage, so as to solve the above problems. SUMMARY

[0004] The present application aims to provide a displacement decoupling parallel driving flexible hinge two-dimensional platform to solve the problems proposed in the background.

[0005] To achieve the above-mentioned purpose, the present application provides the following technical scheme:

[0006] The displacement decoupling parallel driving flexible hinge two-dimensional platform provided by the present application comprises a base and a first voice coil motor located on one side of the base inside;

[0007] The symmetrical flexible hinge is vertically installed in the base inside, the symmetrical flexible hinge is located on one side of the first voice coil motor, and the output end of the first voice coil motor is fixedly installed with the middle part of one of the symmetrical flexible hinges;

[0008] The first-stage flexible platform is connected with the symmetrical flexible hinge, the first-stage flexible platform is connected with the second-stage flexible platform through the single-sided / symmetrical flexible hinge, the single-sided / symmetrical flexible hinge is vertically arranged with the symmetrical flexible hinge, the second voice coil motor is installed on the top of the second-stage flexible platform, and the operation head is installed on the bottom of the second-stage flexible platform.

[0009] Optionally, the first voice coil motor is a circular voice coil motor with high thrust density, and the second voice coil motor is a mountain-shaped voice coil motor allowing the moving element to move in the transverse direction, which has a gap in the width direction.

[0010] Optionally, the second voice coil motor is fixed on the top of the base.

[0011] Optionally, a first grating is arranged in the moving direction of the symmetrical flexible hinge, the first grating is fixed on the first-stage flexible platform, and the moving position of the first-stage flexible platform is measured.

[0012] A second grating is arranged in the moving direction of the single-sided / symmetrical flexible hinge, the second grating is fixed on the second-stage flexible platform, and the moving position of the second-stage flexible platform is measured.

[0013] Optionally, the first grating is a standard grating ruler, and the second grating adopts a grating ruler with a grating line width greater than that of the first grating.

[0014] Optionally, the single-sided / symmetrical flexible hinge is horizontally installed at the middle of the symmetrical flexible hinge.

[0015] Optionally, the single-sided / symmetrical flexible hinge is horizontally installed at the side of the symmetrical flexible hinge away from the first voice coil motor.

[0016] Compared with the prior art, the present application has the following beneficial effects:

[0017] In order to reduce the coupling degree of the operation platform, a two-dimensional flexible hinge platform is installed on the operation platform, the operation head adopts a double-pole flexible hinge series mechanism, the first-stage flexible hinge adopts a standard circular voice coil motor with high thrust density and a standard grating ruler, the utilization efficiency of the standard components is improved, and the manufacturing cost is reduced.

[0018] Further, the second-stage flexible hinge adopts a decoupling voice coil motor and a wide grating line grating ruler, the decoupling of driving and feedback is realized, the displacement coupling control difficulty is reduced, and the processing efficiency is significantly improved.

[0019] Of course, implementing any product of the present application does not necessarily need to achieve all the advantages described above at the same time. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0021] Figure 1 It is a perspective view of the embodiment one of the present application;

[0022] Figure 2 It is a front view of the embodiment one;

[0023] Figure 3elevation view of example two.

[0024] Figure 4 elevation view of example two.

[0025] In the drawings, the list of components represented by each reference numeral is as follows:

[0026] 1 - base;

[0027] 2 - first voice coil motor;

[0028] 3 - symmetric flexure hinge;

[0029] 4 - first stage flexure platform;

[0030] 5 - second voice coil motor;

[0031] 6 - single-sided / symmetric flexure hinge;

[0032] 7 - second stage flexure platform;

[0033] 8 - operating head;

[0034] 9 - first grating;

[0035] 10 - second grating. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0037] Embodiment one

[0038] See Figures 1-2The application provides a displacement decoupling parallel driving flexible hinge two-dimensional platform, which comprises a base 1, a first voice coil motor 2, symmetrical flexible hinges 3, a first flexible platform 4, a second voice coil motor 5, a single-sided / symmetrical flexible hinge 6 and a second flexible platform 7. The first voice coil motor 2 is fixed to the inner side of the base 1. The symmetrical flexible hinges 3 are two flexible hinge plates arranged in parallel and vertically installed on one side of the first voice coil motor 2. The output end of the first voice coil motor 2 is fixedly installed in the middle of one of the symmetrical flexible hinges 3. The symmetrical flexible hinges 3 are connected with the single-sided / symmetrical flexible hinge 6 through the first flexible platform 4. The single-sided / symmetrical flexible hinge 6 is connected with the second voice coil motor 5 through the second flexible platform 7. The single-sided / symmetrical flexible hinge 6 is also two flexible hinge plates arranged in parallel and horizontally installed in the middle of the symmetrical flexible hinges 3 in a symmetrical structure, forming an H-shaped stable guide structure. An operating head 8 is installed at the bottom of the second flexible platform 7 to process products.

[0039] The first voice coil motor 2 is a circular voice coil motor with high thrust density. The second voice coil motor 5 is a mountain-shaped voice coil motor allowing the moving part to move horizontally and has a gap in the width direction. A first grating 9 is arranged in the moving direction of the symmetrical flexible hinges 3. The first grating 9 is fixed on the first flexible platform 4 and measures the moving position of the first flexible platform 4. The first grating 9 is a standard grating ruler. The first flexible platform 4 is matched with a standard circular voice coil motor with high thrust density and a standard grating ruler, thereby improving the utilization efficiency of the standard components and reducing the manufacturing cost. In addition, a second grating 10 is arranged in the moving direction of the single-sided / symmetrical flexible hinge 6. The second grating 10 is fixed on the second flexible platform 7 and measures the moving position of the second flexible platform 7. The second grating 10 is a grating ruler with a grating line width greater than that of the first grating 9. The second flexible platform 7 is matched with a decoupling mountain-shaped voice coil motor and a wide grating line grating ruler, thereby realizing the decoupling of driving and feedback, reducing the difficulty of displacement coupling control and significantly improving the processing efficiency.

[0040] As described above in detail, in the two-dimensional platform, the first flexible platform 4 adopts a symmetrical arrangement flexible hinge guide mechanism, i.e. the symmetrical flexible hinges 3, which has no vertical parasitic displacement and can use a circular voice coil motor with high thrust density, i.e. the first voice coil motor 2. Therefore, only a standard grating ruler needs to be installed to realize displacement measurement. The second flexible platform 7 also adopts parallel arrangement flexible hinges, i.e. the single-sided / symmetrical flexible hinge 6, which has no horizontal parasitic displacement. A voice coil motor with a gap in the width direction, i.e. the second voice coil motor 5, needs to be installed, and a grating ruler with a wide grating line needs to be installed, so that the second flexible platform 7 can work normally when the first flexible platform 4 moves.

[0041] The single-stage flexible hinge mechanism is adopted, and single mode is easier to control. In addition, the inertia of the first flexible platform 4 is greater than that of the second flexible platform 7, and a circular voice coil motor with large thrust density is used, so that the equal working frequency design is realized. In addition, the first flexible platform 4 has a larger space, and a longer symmetrical flexible hinge 3 is arranged symmetrically to avoid transverse parasitic displacement, and the longer flexible hinge is used to reduce the stress stiffening phenomenon.

[0042] Embodiment two

[0043] Please refer to Figure 3 、 Figure 4 , compared with the two-dimensional platform of embodiment one, wherein the single-sided / symmetrical flexible hinge 6 is horizontally installed on the side of the symmetrical flexible hinge 3 away from the first voice coil motor 2, and the remaining structure and connection relationship are the same. On the far side, the single-sided / symmetrical flexible hinge 6 is connected with the second voice coil motor 5 through the second flexible platform 7, and the single-sided / symmetrical flexible hinge 6 is also two parallel flexible hinge pieces, which are horizontally installed between the first flexible platform 3 and the second flexible platform 7. The second voice coil motor 5 is located at the top of the second flexible platform 7, and the operating head 8 is installed at the bottom of the second flexible platform 7 to process products, such as transferring chips on a wafer disc to a chip substrate.

[0044] In order to reduce the coupling degree of the probe platform and reduce the manufacturing cost, the two-dimensional flexible hinge probe mechanism composed of the above-mentioned first symmetrical flexible hinge 3 and the second single-sided / symmetrical flexible hinge 6 adopts single-sided guide large-stroke flexible hinge parallel arrangement or symmetrical arrangement to form a flexible hinge structure with nonlinear stiffness.

[0045] In the above, the preferred embodiments are described in detail with reference to the preferred embodiments of the application, however, those skilled in the art can understand that various modifications and improvements can be made to the above-mentioned specific embodiments without departing from the concept of the application, and various technical features and structures of the application can be combined without departing from the protection scope of the application, and the protection scope of the application is determined by the appended claims.

Claims

1. A two-dimensional platform of displacement decoupled parallel driven flexible hinges, characterized in that, The utility model relates to a high-precision micro-motion platform, comprising: a base (1) and a first voice coil motor (2) located at one side inside the base (1), the first voice coil motor (2) being a circular voice coil motor with high thrust density; a symmetrical flexible hinge (3) vertically installed inside the base (1), the symmetrical flexible hinge (3) being located at one side of the first voice coil motor (2), and the output end of the first voice coil motor (2) being fixedly installed with the middle part of one of the symmetrical flexible hinge (3); a first-stage flexible platform (4) connected with the symmetrical flexible hinge (3), the first-stage flexible platform (4) being connected with a second-stage flexible platform (7) through a single-sided / symmetrical flexible hinge (6), the single-sided / symmetrical flexible hinge (6) being vertically arranged with the symmetrical flexible hinge (3), the top of the second-stage flexible platform (7) being installed with a second voice coil motor (5), the second voice coil motor (5) being a mountain-shaped voice coil motor allowing the transverse movement of a moving element, having a gap in the width direction, and the bottom of the second-stage flexible platform (7) being installed with an operating head (8); a first grating (9) being arranged in the moving direction of the symmetrical flexible hinge (3), the first grating (9) being fixed on the first-stage flexible platform (4) to measure the moving position of the first-stage flexible platform (4); a second grating (10) being arranged in the moving direction of the single-sided / symmetrical flexible hinge (6), the second grating (10) being fixed on the second-stage flexible platform (7) to measure the moving position of the second-stage flexible platform (7); the first grating (9) being a standard grating ruler, and the second grating (10) being a grating ruler with a grating line width greater than that of the first grating (9).

2. The decoupled displacement parallel-driven flexible-hinge two-dimensional platform according to claim 1, characterized in that: the second voice coil motor (5) being fixed on the top of the base (1).

3. The decoupled displacement parallel-driven flexible-hinge two-dimensional platform according to claim 1 or 2, characterized in that: the single-sided / symmetrical flexible hinge (6) adopting a symmetrical structure and being horizontally installed at the middle part of the symmetrical flexible hinge (3).

4. The decoupled displacement parallel-driven flexible-hinge two-dimensional platform according to claim 1 or 2, characterized in that: the single-sided / symmetrical flexible hinge (6) adopting a single-sided structure and being horizontally installed at one side of the symmetrical flexible hinge (3) away from the first voice coil motor (2).

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