A four-way compact tunable series-parallel power combining network

Abstract

A four-way synthesized compact tunable series-parallel power combining network belongs to the field of power combining technology and solves the problems of existing power combining networks being difficult to miniaturize and unable to be used in multiple frequency bands. The present invention uses differential series power combiner transmission lines to form a fully differential transformer structure with two symmetrical double-coil windings and a double-layer metal stack. The parallel power combiner transmission lines form two symmetrical parallel planar spiral baluns. Four pairs of differential feed input terminals of the series power combiner input differential signals, which are fed through the series power combiner and the interlayer coupling of the parallel power combiner in the lower layer, and the synthesized signal is output through the intermediate output terminal of the parallel power combiner. A tunable capacitor array and the differential series power combiner transmission lines form an LC resonant network, and the port impedance of the differential feed input terminal is adjusted by the capacitor. The power combining network of the present invention has a small size and a compact structure and can be used in multiple operating frequency bands.

Description

Technical Field

[0001] The invention belongs to the technical field of power synthesis, and relates to a four-way synthesis compact tunable series-parallel power synthesis network. Background Art

[0002] Power amplifiers are key components in modern communications systems, and power combining technology is an important means of improving their performance, including output power and efficiency. To cope with the rapid development of modern communications systems and adapt to a wider range of application scenarios, the design of miniaturized circuits with scalable performance is a pressing need.

[0003] In existing power combining network designs, the power combining networks of on-chip multi-channel power amplifiers implemented using voltage combining technology generally use a transformer-type structure, and the transformer winding coil is mostly single-turn. However, the size of the transformer coil increases with decreasing frequency. As a result, in circuit designs with lower operating frequencies, the power combining network using a transformer structure consumes a large circuit area, which cannot meet the miniaturization requirements of modern communication systems. Without increasing the transformer area, using a transformer with multi-turn windings is one of the preferred solutions for reducing transformer size. However, how to implement a transformer with complex windings and multi-turn coils in a wafer-level CMOS process with multi-layer metal stacks is currently a design challenge. Summary of the Invention

[0004] The technical solution of the present invention is used to solve the problems that the existing power synthesis network occupies a large circuit area, is not conducive to miniaturization and integration, and cannot be used in multiple frequency bands.

[0005] The present invention solves the above technical problems through the following technical solutions:

[0006] A four-way synthesis compact tunable series-parallel power synthesis network is divided into four layers from top to bottom; the first layer includes: a first series power synthesizer cross-layer transmission line (101), a second series power synthesizer cross-layer transmission line (111), a third series power synthesizer cross-layer transmission line (121), and a fourth series power synthesizer cross-layer transmission line (131); the second layer includes: a first differential series power synthesizer transmission line (10), a second differential series power synthesizer transmission line (11), a third differential series power synthesizer transmission line (12), and a fourth differential series power synthesizer transmission line (131); transmission line (13), eight capacitors (30) and eight crystal switch tubes (40); the third layer includes: a parallel power combiner transmission line (20); the fourth layer includes: a first parallel power combiner cross-layer transmission line (201) and a second parallel power combiner cross-layer transmission line (202); the overlap between the first differential series power combiner transmission line (10) and the second differential series power combiner transmission line (11) is respectively connected by the first series power combiner cross-layer transmission line (101) and the second series power combiner cross-layer transmission line (111) to form a double A fully differential transformer structure with a double-layer metal stack of coil windings; the overlap between the third differential series power combiner transmission line (12) and the fourth differential series power combiner transmission line (13) is respectively connected by a third series power combiner cross-layer transmission line (121) and a fourth series power combiner cross-layer transmission line (131) to form another fully differential transformer structure with a double-layer metal stack of double coil windings; the two fully differential transformer structures with double-layer metal stack of double coil windings are bilaterally symmetrical; eight capacitors (30) and eight crystal switch tubes (40) are configured. Four pairs of tunable capacitor arrays are respectively connected to the differential feed input ends of the differential series power combiner transmission line; the parallel power combiner transmission line (20) includes: a fifth transmission line (203), a sixth transmission line (204), and a seventh transmission line (205); the overlapping parts of the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) are respectively connected by a first parallel power combiner cross-layer transmission line (201) and a second parallel power combiner cross-layer transmission line (202) to form two bilaterally symmetrical parallel planar spiral baluns.

[0007] The operating principle of the above-mentioned four-way synthesized compact tunable series-parallel power combining network is as follows: differential signals are input into the four pairs of differential feed input terminals of the series power combiner. The differential signals are fed through the interlayer coupling between the series power combiner and the parallel power combiner below, and finally the synthesized signal is output through the intermediate output terminal of the parallel power combiner. The tunable capacitor array and the differential series power combiner transmission line form an LC resonant network, and the port impedance of the differential feed input terminal is adjusted by the capacitor.

[0008] Furthermore, the first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), the fourth differential series power combiner transmission line (13) and the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) of the parallel power combiner transmission line (20) are aligned vertically at their overlapping portions.

[0009] Furthermore, the overlapping parts are connected up and down by loaded metal columns.

[0010] Preferably, the capacitor (30) is a MIM capacitor.

[0011] Preferably, the line width of the first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), and the fourth differential series power combiner transmission line (13) is 0.006 mm and the thickness is 0.0009 mm.

[0012] Preferably, the length of the first series power combiner cross-layer transmission line (101), the second series power combiner cross-layer transmission line (111), the third series power combiner cross-layer transmission line (121), and the fourth series power combiner cross-layer transmission line (131) is 0.04346 mm, the width is 0.006 mm, and the thickness is 0.00022 mm.

[0013] Preferably, the length of the first parallel power combiner cross-layer transmission line (201) and the second parallel power combiner cross-layer transmission line (202) is 0.04346 mm, the width is 0.006 mm, and the thickness is 0.000145 mm.

[0014] The advantages of the present invention are:

[0015] Compared with the series-parallel power synthesis network of a general single-turn transformer, the power synthesis network of the present invention has a compact structure and small size, and can be expanded to power synthesis networks with different operating frequency bands and different input impedances. At the same time, it has the characteristics of low loss, miniaturization, simple structure, easy integration, easy engineering implementation, suitability for mass production, low cost, and good performance. In the design of series-parallel power synthesis networks in different frequency bands, the compact transformer structure can be maintained, and it can be expanded to power synthesis of multi-channel power amplifiers operating in different frequency bands. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 1. It is a front view of the three-dimensional structure of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0017] Figure 2 1 is a top view of the structure of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0018] Figure 3 1. A front view of a three-dimensional structure of a series power combiner of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0019] Figure 4 is a top view of a series power combiner of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0020] Figure 5 1. It is a front view of the three-dimensional structure of the parallel power combiner of the four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0021] Figure 6 is a top view of a parallel power combiner of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0022] Figure 7 Schematic diagram of the passive efficiency of a four-way compact tunable series-parallel power combining network according to an embodiment of the present invention;

[0023] Figure 8 The figure is a schematic diagram of the real and imaginary impedance parts of the differential feed input ports of the four-way synthesized compact tunable series-parallel power synthesis network according to an embodiment of the present invention. DETAILED DESCRIPTION

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0025] The technical solution of the present invention is further described below with reference to the accompanying drawings and specific embodiments:

[0026] Example 1

[0027] The four-way compact tunable series-parallel power combining network of the embodiment of the present invention adopts a 65nm silicon-based CMOS process, and the size of the power combining network is 0.322mm*0.098mm.

[0028] like Figures 1 to 6As shown, the four-way synthesis compact tunable series-parallel power synthesis network of the embodiment of the present invention includes: a first differential series power synthesizer transmission line (10), a second differential series power synthesizer transmission line (11), a third differential series power synthesizer transmission line (12), a fourth differential series power synthesizer transmission line (13), a parallel power synthesizer transmission line (20), a first series power synthesizer cross-layer transmission line (101), a second series power synthesizer cross-layer transmission line (111), a third series power synthesizer cross-layer transmission line (121), a fourth series power synthesizer cross-layer transmission line (131), a first parallel power synthesizer cross-layer transmission line (201), a second parallel power synthesizer cross-layer transmission line (202), eight capacitors (30) and eight MOS switch tubes (40).

[0029] The line width of the first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), and the fourth differential series power combiner transmission line (13) is 0.006 mm and the thickness is 0.0009 mm. The line width of the parallel power combiner transmission line (20) is 0.006 mm and the thickness is 0.0034 mm. The first series power combiner cross-layer transmission line (101), the second The series power combiner cross-layer transmission line (111), the third series power combiner cross-layer transmission line (121), and the fourth series power combiner cross-layer transmission line (131) have a length of 0.04346 mm, a width of 0.006 mm, and a thickness of 0.00022 mm; the first parallel power combiner cross-layer transmission line (201) and the second parallel power combiner cross-layer transmission line (202) have a length of 0.04346 mm, a width of 0.006 mm, and a thickness of 0.000145 mm.

[0030] like Figure 1 As shown, the four-way synthesis compact tunable series-parallel power synthesis network of the embodiment of the present invention is divided into four layers from top to bottom in the z-axis direction; the first layer includes: a first series power synthesizer cross-layer transmission line (101), a second series power synthesizer cross-layer transmission line (111), a third series power synthesizer cross-layer transmission line (121), and a fourth series power synthesizer cross-layer transmission line (131); the second layer includes: a first differential series power synthesizer transmission line (10), a second differential series power synthesizer transmission line (11), a third differential series power synthesizer transmission line (12), a fourth differential series power synthesizer transmission line (13), eight capacitors (30), and eight MOS switch tubes (40); the third layer includes: a parallel power synthesizer transmission line (20); and the fourth layer includes: a first parallel power synthesizer cross-layer transmission line (201) and a second parallel power synthesizer cross-layer transmission line (202).

[0031] like Figure 2 As shown, the four-way synthesis compact tunable series-parallel power synthesis network of the embodiment of the present invention is a structure that is left-right symmetrical about the Y0 axis. The following takes the structure on the left side of the Y0 axis as an example to describe in detail the four-way synthesis compact tunable series-parallel power synthesis network of the embodiment of the present invention.

[0032] like Figure 3 and Figure 4 As shown, the first differential series power combiner transmission line (10) includes: a first transmission line (102) and a second transmission line (103); the second differential series power combiner transmission line (11) includes: a third transmission line (112) and a fourth transmission line (113).

[0033] The first transmission line (102), the second transmission line (103), the third transmission line (112), and the fourth transmission line (113) are arranged on the same plane; the first series power combiner cross-layer transmission line (101) and the second series power combiner cross-layer transmission line (111) are arranged on the same plane; and the first series power combiner cross-layer transmission line (101) and the second series power combiner cross-layer transmission line (111) are arranged above the plane where the first transmission line (102), the second transmission line (103), the third transmission line (112), and the fourth transmission line (113) are located.

[0034] One end of the first transmission line (102) serves as a differential feed input end of the first differential series power combiner transmission line (10); the other end of the first transmission line (102) and one end of the first series power combiner cross-layer transmission line (101) are connected vertically by a loaded metal column at their overlap; the other end of the first series power combiner cross-layer transmission line (101) and one end of the second transmission line (103) are connected vertically by a loaded metal column at their overlap; the other end of the second transmission line (103) serves as another differential feed input end of the first differential series power combiner transmission line (10); the third transmission line (11 2) serves as a differential feeding input end of the second differential series power combiner transmission line (11); the other end of the third transmission line (112) and the overlap of one end of the second series power combiner cross-layer transmission line (111) are connected up and down by a loaded metal column; the other end of the second series power combiner cross-layer transmission line (111) and the overlap of one end of the fourth transmission line (113) are connected up and down by a loaded metal column; the other end of the fourth transmission line (113) serves as another differential feeding input end of the second differential series power combiner transmission line (11); differential feeding can suppress common mode impedance and improve anti-interference capability.

[0035] The first transmission line (102), the second transmission line (103), the first series power combiner cross-layer transmission line (101), the third transmission line (112), the fourth transmission line (113), and the second series power combiner cross-layer transmission line (111) together constitute a compact double-layer metal stacked fully differential transformer structure with a double-coil winding. On the same area, the double-coil winding structure is more compact and more conducive to the miniaturization of the device.

[0036] The second transmission line (103) passes through the gap between the third transmission line (112) and the fourth transmission line (113), that is, passes through the bottom of the second series power combiner cross-layer transmission line (111); the third transmission line (112) passes through the gap between the first transmission line (102) and the second transmission line (103), that is, passes through the bottom of the first series power combiner cross-layer transmission line (101), and the first differential series power combiner transmission line (10) and the second differential series power combiner transmission line (11) form a cross-nested double helix structure.

[0037] like Figure 4 As shown, the projections of the first transmission line (102), the second transmission line (103), the third transmission line (112), the fourth transmission line (113), the first series power combiner cross-layer transmission line (101), and the second series power combiner cross-layer transmission line (111) on the plane are bilaterally symmetrical about the Y1 axis.

[0038] The structural arrangement of the third differential series power combiner transmission line (12) and the fourth differential series power combiner transmission line (13) is the same as that of the first differential series power combiner transmission line (10) and the second differential series power combiner transmission line (11), and will not be described in detail here; and the projections of the structures of the third differential series power combiner transmission line (12) and the fourth differential series power combiner transmission line (13) on a plane are symmetrical with respect to the Y0 axis.

[0039] like Figure 2 As shown, each differential series power combiner transmission line differential feed input end is connected to one end of a capacitor (30), and the other end of the capacitor (30) is connected to a MOS switch tube (40), wherein the capacitor (30) adopts a MIM (metal-insulator-metal) capacitor; a parallel tunable array is formed between eight capacitors (30), which can realize 2 NA tunable capacitor array with different capacitance values, wherein N is the number of different capacitance values ​​used in the tunable capacitor array, N is an integer, 1≤N≤8; the capacitor (30) and the differential series power combiner transmission line form an LC resonant network, and the port impedance of the differential feed input end is adjusted by the capacitor (30), thereby achieving impedance matching with crystal switch tubes of different impedances.

[0040] like Figure 5 and Figure 6 As shown, the parallel power combiner transmission line (20) includes: a fifth transmission line (203), a sixth transmission line (204), and a seventh transmission line (205), wherein the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) are arranged on the same plane, and the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) are arranged on the first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), and the third differential series power combiner transmission line (12). The differential series power combiner transmission line (12) and the fourth differential series power combiner transmission line (13) are arranged below the plane where the first parallel power combiner cross-layer transmission line (201) and the second parallel power combiner cross-layer transmission line (202) are arranged on the same plane, and the first parallel power combiner cross-layer transmission line (201) and the second parallel power combiner cross-layer transmission line (202) are arranged below the plane where the fifth transmission line (203), the sixth transmission line (204) and the seventh transmission line (205) are located.

[0041] like Figure 6 As shown, the left end of the fifth transmission line (203) and the overlap of one end of the first parallel power combiner cross-layer transmission line (201) are connected up and down by a loaded metal column, the other end of the first parallel power combiner cross-layer transmission line (201) and the overlap of one end of the sixth transmission line (204) are connected up and down by a loaded metal column, and the other end of the sixth transmission line (204) is grounded; the right end of the fifth transmission line (203) and the overlap of one end of the second parallel power combiner cross-layer transmission line (202) are connected up and down by a loaded metal column, and the second parallel power combiner cross-layer transmission line (201) is connected up and down by a loaded metal column. The intersection of the other end of the power synthesizer cross-layer transmission line (202) and one end of the seventh transmission line (205) is connected up and down by a loaded metal column, and the other end of the seventh transmission line (205) is grounded; the middle end of the fifth transmission line (203) serves as the output end of the four-way synthesis compact tunable series-parallel power synthesis network; the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) constitute two symmetrical parallel planar spiral baluns. On the same area, the planar spiral balun structure is more compact and more conducive to the miniaturization of the device.

[0042] The first parallel power combiner cross-layer transmission line (201) is used to connect the gap at the intersection of the left transmission line of the fifth transmission line (203) and the sixth transmission line (204), and the left transmission line of the fifth transmission line (203) and the sixth transmission line (204) form a cross-nested double helix structure; the second parallel power combiner cross-layer transmission line (202) is used to connect the gap at the intersection of the right transmission line of the fifth transmission line (203) and the seventh transmission line (205), and the right transmission line of the fifth transmission line (203) and the seventh transmission line (205) form a cross-nested double helix structure.

[0043] The first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), the fourth differential series power combiner transmission line (13) and the parallel power combiner transmission line (20) are fed by coupling; and the overlapping portions of the first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), the fourth differential series power combiner transmission line (13) and the fifth transmission line (203), the sixth transmission line (204) and the seventh transmission line (205) of the parallel power combiner transmission line (20) are aligned up and down to achieve better interlayer coupling.

[0044] The working principle of the power combining network is as follows:

[0045] The four pairs of differential feed inputs of the series power combiner input differential signals. Differential feeding can suppress common-mode impedance and improve anti-interference capability. The differential signals are fed through the interlayer coupling between the series power combiner and the lower parallel power combiner, and finally the synthesized signal is output through the intermediate output of the parallel power combiner. The series power combiner is a compact double-layer metal stacked fully differential transformer structure with dual-coil windings. The parallel power combiner is composed of two symmetrical parallel planar spiral baluns. In the same area, the dual-coil windings and planar spiral baluns are more compact and more conducive to device miniaturization. The tunable capacitor array and the differential series power combiner transmission line form an LC resonant network. The port impedance of the differential feed input is adjusted by the capacitor to achieve impedance matching with transistor switches of different impedances.

[0046] Compared to conventional single-turn transformer series-parallel power combining networks, the four-way compact tunable series-parallel power combining network designed in this invention boasts a smaller size and wider applicability. The design of series-parallel power combining networks for different frequency bands maintains a compact transformer structure, expanding its applicability to power combining for multi-way power amplifiers operating in different frequency bands. Tunable capacitors form an LC resonant network with the transformer coils, enabling impedance adjustment at the input port to match transistor switches of varying impedance. The tunable capacitor array is connected in parallel, and by controlling the switching of MOS transistors, each capacitor group can be switched on and off to achieve different capacitance values, which, combined with the transformer inductance, produce different port impedance values. The power combining network utilizes differential inputs to suppress common-mode impedance and enhance anti-interference capabilities. Ultimately, this series-parallel power combining network achieves a passive transmission efficiency of up to 70% within the 20GHz-42GHz frequency band. This series-parallel power combining network features low loss, miniaturization, a simple structure, ease of integration, and ease of engineering implementation, making it suitable for mass production at a low cost.

[0047] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the same. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A four-way compact tunable series-parallel power combining network, characterized in that: The system is divided into four layers from top to bottom; the first layer includes: a first series power combiner cross-layer transmission line (101), a second series power combiner cross-layer transmission line (111), a third series power combiner cross-layer transmission line (121), and a fourth series power combiner cross-layer transmission line (131); the second layer includes: a first differential series power combiner transmission line (10), a second differential series power combiner transmission line (11), a third differential series power combiner transmission line (12), a fourth differential series power combiner transmission line (13), eight capacitors (30), and and eight crystal switch tubes (40); the third layer includes: a parallel power combiner transmission line (20); the fourth layer includes: a first parallel power combiner cross-layer transmission line (201), a second parallel power combiner cross-layer transmission line (202); the overlap between the first differential series power combiner transmission line (10) and the second differential series power combiner transmission line (11) is respectively connected by the first series power combiner cross-layer transmission line (101) and the second series power combiner cross-layer transmission line (111) to form a double-layer metal stack of a double coil winding. The fully differential transformer structure is provided; the overlapping portions between the third differential series power combiner transmission line (12) and the fourth differential series power combiner transmission line (13) are respectively connected by the third series power combiner cross-layer transmission line (121) and the fourth series power combiner cross-layer transmission line (131) to form another fully differential transformer structure with a double-layer metal stack of double coil windings; the fully differential transformer structures with two double-layer metal stacks of double coil windings are bilaterally symmetrical; eight capacitors (30) and eight crystal switch tubes (40) constitute four pairs of adjustable The invention relates to a harmonic capacitor array, which is respectively connected to the differential feed input end of the differential series power combiner transmission line; the parallel power combiner transmission line (20) comprises: a fifth transmission line (203), a sixth transmission line (204), and a seventh transmission line (205); the overlapping parts of the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) are respectively connected by a first parallel power combiner cross-layer transmission line (201) and a second parallel power combiner cross-layer transmission line (202) to form two bilaterally symmetrical parallel planar spiral baluns.

2. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The working principle is as follows: differential signals are input into the four pairs of differential feed input terminals of the series power combiner, and the differential signals are fed through the interlayer coupling between the series power combiner and the lower parallel power combiner, and finally the synthesized signal is output through the middle output terminal of the parallel power combiner; the tunable capacitor array and the differential series power combiner transmission line form an LC resonant network, and the port impedance of the differential feed input terminal is adjusted by the capacitor.

3. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), the fourth differential series power combiner transmission line (13) and the fifth transmission line (203), the sixth transmission line (204), and the seventh transmission line (205) of the parallel power combiner transmission line (20) are aligned vertically at their overlapping portions.

4. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The overlapping parts are connected up and down by loaded metal columns.

5. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The capacitor (30) is a MIM capacitor.

6. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The first differential series power combiner transmission line (10), the second differential series power combiner transmission line (11), the third differential series power combiner transmission line (12), and the fourth differential series power combiner transmission line (13) have a line width of 0.006 mm and a thickness of 0.0009 mm.

7. The four-way synthesized compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The first series power combiner cross-layer transmission line (101), the second series power combiner cross-layer transmission line (111), the third series power combiner cross-layer transmission line (121), and the fourth series power combiner cross-layer transmission line (131) have a length of 0.04346 mm, a width of 0.006 mm, and a thickness of 0.00022 mm.

8. The four-way synthesis compact tunable series-parallel power synthesis network according to claim 1, characterized in that: The length of the first parallel power combiner cross-layer transmission line (201) and the second parallel power combiner cross-layer transmission line (202) are 0.04346 mm, the width is 0.006 mm, and the thickness is 0.000145 mm.

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