Light spot shaping device

Abstract

The present invention discloses a light spot shaping device, which belongs to the technical field of semiconductor processing equipment. The light spot shaping device includes a base, a rotating base, a first lens, a second lens, a first aperture, a second aperture, a first locking screw and a second locking screw; the base has a first locking surface and a second locking surface, the first locking screw and the second locking screw are both threadedly connected to the rotating base, and the rotating base is rotatably mounted on the base; the first lens and the second lens are slidably arranged on the rotating base along the rotating axis direction of the rotating base; the first aperture and the second aperture are mounted on the base; the first aperture, the first lens, the second lens, and the second aperture are sequentially arranged along the rotating axis direction of the rotating base, and the first locking screw and the second locking screw are respectively correspondingly locked with the first locking surface and the second locking surface to lock the rotating base. The light spot shaping device of the present invention can adjust the angle of the lens and the distance between the two lenses, so as to achieve better shaping of the laser spot.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor processing equipment, and in particular to a light spot shaping device. Background Art

[0002] With the continuous advancement of semiconductor manufacturing processes, the internal integrated circuits of wafers are becoming more and more dense, and the size of wafers is getting smaller and smaller. Traditional wheel cutting has limited cutting capabilities for small-sized wafers, while laser processing technology is fully capable of processing small-sized wafers. At present, laser processing technology has become the development focus of wafer processing in the semiconductor field. A variety of laser processing technologies have been developed to process wafers. Since the unshaped laser spot is an irregular shape when it is hit on a plane, the adjustment in a certain direction may exceed the adjustment capacity of the lens. Therefore, laser spot shaping is an important part of laser processing technology. Spot shaping refers to adjusting an irregularly shaped spot into a regular shape, and accurately calibrating the light and adjusting the spot size. Existing laser processing equipment has a single function and cannot better shape the laser spot. Summary of the invention

[0003] The purpose of the embodiment of the present invention is to provide a light spot shaping device that can adjust the angle of the lens and the distance between the two lenses, so as to achieve better shaping of the laser light spot.

[0004] To achieve the above object, the present invention adopts the following technical solutions:

[0005] A light spot shaping device, comprising:

[0006] A base having a first locking surface and a second locking surface;

[0007] A rotating seat, rotatably mounted on the base;

[0008] The first locking screw and the second locking screw are both threadedly connected to the rotating seat;

[0009] A first lens and a second lens are slidably disposed on the rotating seat along the rotating axis direction of the rotating seat;

[0010] A first aperture and a second aperture are mounted on the base;

[0011] The first aperture, the first lens, the second lens, and the second aperture are arranged in sequence along the rotation axis direction of the rotating seat, and the first locking screw and the second locking screw are respectively and correspondingly locked with the first locking surface and the second locking surface to lock the rotating seat.

[0012] Optionally, the light spot shaping device further comprises a first guide rail mounted on the rotating seat, and a first mirror seat and a second mirror seat both slidably mounted on the first guide rail; the first lens is mounted on the first mirror seat, and the second lens is mounted on the second mirror seat.

[0013] Optionally, the light spot shaping device also includes a first adjusting screw and a second adjusting screw both rotatably mounted on the rotating seat; the first adjusting screw is threadedly connected to the first mirror seat for adjusting the position of the first mirror seat on the first guide rail, and the second adjusting screw is threadedly connected to the second mirror seat for adjusting the position of the second mirror seat on the first guide rail.

[0014] Optionally, the light spot shaping device further comprises a first pressing block and a second pressing block; the first adjusting screw is rotatably mounted on the rotating seat via the first pressing block, and the second adjusting screw is rotatably mounted on the rotating seat via the second pressing block.

[0015] Optionally, the light spot shaping device further comprises a first positioning member, a second positioning member, a third locking screw having a first locking head, and a fourth locking screw having a second locking head;

[0016] The first positioning member is provided with a first strip hole and is mounted on the rotating seat, the third locking screw passes through the first strip hole and is threadedly connected to the first mirror seat, and the first positioning member is located between the first locking head and the first mirror seat;

[0017] The second positioning member is provided with a second strip hole and is mounted on the rotating seat. The fourth locking screw passes through the second strip hole and is threadedly connected to the second mirror seat. The second positioning member is located between the second locking head and the second mirror seat.

[0018] Optionally, the base includes a substrate, a first bracket, a first support member, a second support member, and a second bracket arranged at intervals along the rotation axis direction of the rotating base; the first support member and the second support member are both arranged on the substrate;

[0019] The first diaphragm is mounted on the first bracket, the second diaphragm is mounted on the second bracket, one end of the rotating seat is rotatably mounted on the first supporting member, and the other end of the rotating seat is rotatably mounted on the second supporting member.

[0020] Optionally, a third positioning member and a fourth positioning member are provided on the rotating seat; the first locking screw is threadedly connected to the third positioning member, the second locking screw is threadedly connected to the fourth positioning member, the first locking surface and the second locking surface are both located on the second support member, the first locking surface is located on the rotation path of the first locking screw, and the second locking surface is located on the rotation path of the second locking screw.

[0021] Optionally, the base further includes a bottom plate; the base plate is slidably disposed on the bottom plate, and a sliding direction of the base plate is perpendicular to a rotation axis of the rotating base.

[0022] Optionally, an adjustment seat is provided on the bottom plate, a third adjustment screw is rotatably mounted on the adjustment seat, and the third adjustment screw is threadedly connected to the base plate for adjusting the position of the base plate on the bottom plate.

[0023] Optionally, a second guide rail is provided on the bottom plate, a slide table is slidably provided on the second guide rail, and the base plate is mounted on the slide table.

[0024] The beneficial effects of the present invention are as follows: the first lens and the second lens of the light spot shaping device are slidably mounted on the rotating seat, and the distance between the first lens and the second lens can be adjusted by sliding the first lens and the second lens, so as to realize the light adjustment functions such as laser collimation, light spot shaping, and beam expansion. At the same time, the rotating seat of the present application can rotate relative to the first aperture and the second aperture, so as to adjust the angle of the first lens and the second lens relative to the first aperture and the second aperture, so as to adjust the irregular light spot into a regular shape and hit it on a plane. By adjusting the angle of the lens and the distance between the two lenses, the laser light spot can be better shaped. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] The present invention is further described in detail below based on the accompanying drawings and embodiments.

[0026] Figure 1 It is a structural schematic diagram of a light spot shaping device;

[0027] Figure 2 An exploded view of the light spot shaping device;

[0028] Figure 3 It is a front view of the light spot shaping device;

[0029] Figure 4 is a top view of the light spot shaping device;

[0030] Figure 5 is a side view of the spot shaping device;

[0031] Figure 6It is a schematic diagram of the structure of a base, a rotating base, a first lens, a second lens, a first guide rail, a first lens seat, and a second lens seat;

[0032] Figure 7 It is a structural schematic diagram of the base, the second guide rail, the slide, the adjustment seat, and the third adjustment screw.

[0033] Description of the accompanying drawings:

[0034] 11. Base; 12. Rotating seat; 13. First lens; 14. Second lens; 15. First aperture; 16. Second aperture; 17. First guide rail; 18. First lens seat; 19. Second lens seat; 20. First adjusting screw; 21. Second adjusting screw; 22. First clamping block; 23. Second clamping block; 24. First positioning member; 25. Second positioning member; 26. Third locking screw; 27. Fourth locking screw; 28. Adjusting seat; 29. ​​Third adjusting screw; 30. Second guide rail; 31. Slide; 32. Third positioning member; 33. Fourth positioning member; 34. First locking screw; 35. Second locking screw;

[0035] 111, substrate; 112, first bracket; 113, first support member; 114, second support member; 115, second bracket; 116, bottom plate;

[0036] 241, first strip hole;

[0037] 251, second strip hole;

[0038] 1141, first locking surface; 1142, second locking surface; 1143, separation groove; 1144, locking groove; 1145, locking screw hole; 1146, locking shaft hole. DETAILED DESCRIPTION

[0039] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.

[0040] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "fixed", "connected", "communicated", "abutted", "clamped" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0041] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0042] In the description of this article, it should be understood that the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0043] In the description of this specification, the description with reference to the terms "an embodiment", "example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example.

[0044] In addition, it should be understood that although this specification is described according to implementation methods, not every implementation method contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation methods that can be understood by those skilled in the art.

[0045] Unless specifically stated or defined otherwise, the term "and / or" used in the present invention includes any and all combinations of one or more of the associated listed items.

[0046] For the convenience of description, unless otherwise specified, the up and down directions mentioned below are the same as Figure 3 The up and down directions are consistent with the left and right directions mentioned below. Figure 3 The left and right directions are consistent with the Figure 4 The up and down directions are consistent.

[0047] In the existing field of semiconductor technology, as the size of wafers becomes smaller and smaller and the integrated circuits inside wafers become more and more dense, laser processing technology has become the development focus of semiconductor wafer processing. Since the unshaped laser spot is irregularly shaped when it is projected on a plane, the adjustment in a certain direction may exceed the adjustment capacity of the lens. Therefore, spot shaping is required to adjust the irregular spot into a regular shape, and to accurately calibrate the light and accurately adjust the spot size. Laser spot shaping is an important part of laser processing technology. Existing laser processing equipment has a single function and can only adjust the distance between lenses, and cannot perform fine dimming. The spot shaping device of the present application can be used in existing laser processing equipment or laser processing technology. The spot shaping device can adjust the angle of the lens and the distance between the two lenses, so as to achieve better shaping of the laser spot.

[0048] like Figures 1 to 7 As shown, this embodiment provides a light spot shaping device, including a base 11, a rotating seat 12, a first lens 13, a second lens 14, a first aperture 15, a second aperture 16, a first locking screw 34 and a second locking screw 35. The first locking screw 34 and the second locking screw 35 are both directly connected to the rotating seat 12 by thread or are both installed on the rotating seat 12 by thread connection with other components on the rotating seat 12. The light adjustment functions such as laser collimation, light spot shaping, and beam expansion are realized by combining the first lens 13 and the second lens 14 with different functions. In optical equipment, the aperture is a physical aperture or opening used to limit and adjust the light beam. By controlling the shape and size of the aperture, the cross-sectional shape and size of the light beam can be adjusted to achieve specific optical properties. The shape and size of the light beam can be adjusted by using the first aperture 15 and the second aperture 16. The first aperture 15 and the second aperture 16 are also used to assist in determining the optical axis, and a straight line is determined by two points of the first aperture 15 and the second aperture 16.

[0049] The rotating seat 12 is rotatably mounted on the base 11. The first lens 13 and the second lens 14 are slidably mounted on the rotating seat 12 along the rotation axis direction of the rotating seat 12, and the first diaphragm 15 and the second diaphragm 16 are mounted on the base 11. The first diaphragm 15, the first lens 13, the second lens 14, and the second diaphragm 16 are all located on the rotation axis of the rotating seat 12 and are arranged in sequence along the rotation axis direction of the rotating seat 12. The first lens 13 and the second lens 14 are different optical lenses. In this way, the ideal effect is achieved by finely adjusting the distance between the first lens 13 and the second lens 14, and dimming functions such as laser collimation, spot shaping, and beam expansion are realized. When the rotating seat 12 rotates, it can drive the first lens 13 and the second lens 14 to rotate to adjust the angles of the first lens 13 and the second lens 14 at the same time, so that different position areas on the first lens 13 are aligned with the first aperture 15, and different position areas on the second lens 14 are aligned with the second aperture 16. By adjusting the overall angle of the first lens 13 and the second lens 14, the laser spot can be better shaped, so that the spot shaping device can more accurately shape the spot and control the direction when shaping the irregular light beam. The first locking screw 34 and the second locking screw 35 are respectively corresponding to the first locking surface 1141 and the second locking surface 1142 to lock the rotating seat 12. After the overall angle of the first lens 13 and the second lens 14 is adjusted, the first locking screw 34 and the second locking screw 35 are respectively abutted against the first locking surface 1141 and the second locking surface 1142 to achieve the locking of the rotating seat 12 to prevent the rotating seat 12 from rotating.

[0050] In one embodiment, the light spot shaping device further includes a first guide rail 17 mounted on the rotating seat 12, a first mirror seat 18 and a second mirror seat 19 both slidably mounted on the first guide rail 17. The first guide rail 17 is horizontally arranged on the rotating seat 12, the first lens 13 is mounted on the first mirror seat 18, and the second lens 14 is mounted on the second mirror seat 19. The first mirror seat 18 is provided with a first mirror hole, and the second mirror seat 19 is provided with a second mirror hole. The first mirror hole and the second mirror hole are provided for the light beam to pass through. The first lens 13 covers the first mirror hole, and the second lens 14 covers the second mirror hole. The light beam passes through the first aperture 15, the first lens 13, the second lens 14, and the second aperture 16 in sequence to irradiate on the plane to form a light spot. By driving the first lens holder 18 and the second lens holder 19 to slide along the first guide rail 17, the first lens 13 and the second lens 14 are moved closer to or farther away from each other. Not only the distance between the first lens 13 and the second lens 14 can be adjusted, but also the distance between the first lens 13 and the first aperture 15 and the distance between the second lens 14 and the second aperture 16 can be adjusted, so that the function of the spot shaping device is more abundant, the accuracy of the spot adjustment is higher, and the laser spot can be better shaped.

[0051] Optionally, the first lens 13 and the second lens 14 are both cylindrical lenses. The present application can adjust the light spot shape by driving the rotating seat 12 to rotate and driving the first lens 13 and the second lens 14 to slide, that is, adjusting the unidirectional width of the light spot shape and the rotation angle of the first lens 13 and the second lens 14. Since the first lens 13 and the second lens 14 of the present application are both cylindrical lenses, the lens generatrix must be perpendicular or parallel to the light spot shape adjustment direction. The rotation of the lens can adjust the light spot shape to a certain extent. Therefore, by adjusting the distance between the first lens 13 and the second lens 14 and the rotation angle of the first lens 13 and the second lens 14, a strip light spot is finally obtained.

[0052] Furthermore, a first slider integrally formed with the first mirror seat 18 and a second slider integrally formed with the second mirror seat 19 are slidably provided on the first guide rail 17. The first mirror seat 18 is slidably provided on the first guide rail 17 via the first slider, and the second mirror seat 19 is slidably provided on the first guide rail 17 via the second slider.

[0053] Optionally, the light spot shaping device further includes a first adjusting screw 20 and a second adjusting screw 21 both rotatably mounted on the rotating seat 12. The first adjusting screw 20 is threadedly connected to the first lens seat 18, and the first adjusting screw 20 is used to adjust the position of the first lens seat 18 on the first guide rail 17. The second adjusting screw 21 is threadedly connected to the second lens seat 19, and the second adjusting screw 21 is used to adjust the position of the second lens seat 19 on the first guide rail 17. The first lens seat 18 slides along the first guide rail 17 by driving the first adjusting screw 20 to rotate, and the second lens seat 19 slides along the first guide rail 17 by driving the second adjusting screw 21 to rotate. The external threads of the first adjusting screw 20 and the second adjusting screw 21 are fine threads, so that the distance between the first lens 13 and the second lens 14 can be finely adjusted.

[0054] Furthermore, the light spot shaping device further comprises a first pressing block 22 and a second pressing block 23. The first adjusting screw 20 is rotatably mounted on the rotating seat 12 via the first pressing block 22, and the second adjusting screw 21 is rotatably mounted on the rotating seat 12 via the second pressing block 23.

[0055] The first adjusting screw 20 is provided with a first rod head and a first positioning ring. The first rod head is located at the end of the first adjusting screw 20. The first positioning ring is arranged on the first adjusting screw 20 and is spaced apart from the first rod head. The first clamping block 22 is mounted on the rotating seat 12. The first clamping block 22 has a first arc groove. The first adjusting screw 20 is mounted on the first clamping block 22 and abuts against the inner wall of the first arc groove. The first clamping block 22 is clamped between the first rod head and the first positioning ring to realize the axial positioning of the first adjusting screw 20. The first adjusting screw 20 rotates in the first arc groove, thereby driving the first mirror seat 18 to slide along the first guide rail 17.

[0056] The second adjusting screw 21 is provided with a second rod head and a second positioning ring. The second rod head is located at the end of the second adjusting screw 21. The second positioning ring is arranged on the second adjusting screw 21 and is spaced apart from the second rod head. The second clamping block 23 is installed on the rotating seat 12. The second clamping block 23 has a second arc groove. The second adjusting screw 21 is installed on the second clamping block 23 and abuts against the inner wall of the second arc groove. The second clamping block 23 is clamped between the second rod head and the second positioning ring to realize the axial positioning of the second adjusting screw 21. The second adjusting screw 21 rotates in the second arc groove, thereby driving the second mirror seat 19 to slide along the first guide rail 17.

[0057] In one embodiment, the light spot shaping device further comprises a first positioning member 24, a second positioning member 25, a third locking screw 26 having a first locking head, and a fourth locking screw 27 having a second locking head. The first positioning member 24 and the second positioning member 25 are mounted on the upper end of the rotating seat 12.

[0058] The first positioning member 24 defines a first strip hole 241 and is mounted on the rotating base 12 . The third locking screw 26 passes through the first strip hole 241 and is threadedly connected to the first lens base 18 . The first positioning member 24 is located between the first locking head and the first lens base 18 .

[0059] The second positioning member 25 is provided with a second strip hole 251 and is mounted on the rotating base 12 . The fourth locking screw 27 passes through the second strip hole 251 and is threadedly connected to the second lens base 19 . The second positioning member 25 is located between the second locking head and the second lens base 19 .

[0060] The third locking screw 26 is installed in the first strip hole 241 of the first positioning member 24, and the fourth locking screw 27 is installed in the second strip hole 251 of the first positioning member 24. When the position adjustment of the first mirror seat 18 and the second mirror seat 19 is completed, the first mirror seat 18 is locked by rotating the third locking screw 26 so that the first locking head abuts against the first positioning member 24, and the second mirror seat 19 is locked by rotating the fourth locking screw 27 so that the second locking head abuts against the second positioning member 25.

[0061] Furthermore, the rotating base 12 is provided with a plurality of mounting holes arranged at intervals along the rotating axis of the rotating base 12. The first positioning member 24 and the second positioning member 25 can be installed at different positions of the rotating base 12 by cooperating with the mounting holes through connecting parts such as threaded fasteners. In this way, the lengths of the first positioning member 24, the second positioning member 25, the first strip hole 241, and the second strip hole 251 can be reduced. By installing the first positioning member 24 and the second positioning member 25 at different positions of the rotating base 12, the adjustment range is increased, so that the first mirror seat 18 and the second mirror seat 19 are positioned at different positions of the rotating base 12.

[0062] Optionally, a scale can be set on the rotating seat 12, or mounting holes at different positions can be used as scales, so that the positions of the first mirror seat 18 and the second mirror seat 19 can be accurately known, the accuracy of adjustment is improved, and the distance between the first mirror seat 18 and the second mirror seat 19 corresponding to different dimming functions can be quickly determined.

[0063] Furthermore, the base 11 includes a base plate 111, a first bracket 112, a first support member 113, a second support member 114, and a second bracket 115 arranged at intervals along the rotation axis direction of the rotating seat 12. The first support member 113 and the second support member 114 are both arranged on the base plate 111, and the first support member 113 and the second support member 114 are installed at intervals at both ends of the base plate 111 along the rotation axis direction of the rotating seat 12. The first support member 113, the second support member 114, and the base plate 111 are all located between the first bracket 112 and the second bracket 115. The first support member 113 is provided with a first avoidance groove for the first adjusting screw 20 to pass through, and the second support member 114 is provided with a second avoidance groove for the second adjusting screw 21 to pass through. The first bracket 112, the first support member 113, the second support member 114, and the second bracket 115 are all provided with beam holes for light beams to pass through. The first diaphragm 15 is mounted on the first bracket 112 and covers the beam hole on the first bracket 112. The second diaphragm 16 is mounted on the second bracket 115 and covers the beam hole on the second bracket 115. The left and right sides of the rotating seat 12 are provided with rotating tubes, which are connected with the beam hole on the rotating seat 12. The left and right sides of the rotating seat 12 are respectively rotatably mounted on the first support member 113 and the second support member 114 through the rotating tubes. The two rotating tubes are respectively rotatably mounted on the beam holes of the first support member 113 and the second support member 114. In this way, by driving the rotating seat 12 to rotate, the entire rotating seat 12 together with the first lens 13 and the second lens 14 mounted thereon can be rotated at a certain angle.

[0064] Optionally, the spot shaping device further includes a third positioning member 32 and a fourth positioning member 33. The third positioning member 32 and the fourth positioning member 33 may be integrally formed with the rotating seat 12, or may be detachably mounted on the rotating seat 12. The first locking screw 34 is threadedly connected to the third positioning member 32, and the second locking screw 35 is threadedly connected to the fourth positioning member 33, so that the first locking screw 34 and the second locking screw 35 are respectively mounted on the rotating seat 12. The third positioning member 32 and the fourth positioning member 33 are respectively mounted on the rotating seat 12 through the third positioning member 32 and the fourth positioning member 33, and the second support member 114 has a first locking surface 1141 and a second locking surface 1142.

[0065] The first locking screw 34 and the second locking screw 35 are respectively correspondingly locked with the first locking surface 1141 and the second locking surface 1142 to lock the rotating seat 12 in the current rotation position. The first locking screw 34 and the second locking screw 35 are arranged axially along the rotation axis of the rotating seat 12. The first locking surface 1141 and the second locking surface 1142 are arranged axially along the rotation axis of the rotating seat 12. The first locking surface 1141 is located on the rotation path of the first locking screw 34, and the second locking surface 1142 is located on the rotation path of the second locking screw 35. When the rotating seat 12 rotates along the first direction, the first locking surface 1141 is located on the moving path of the first locking screw 34. When the rotating seat 12 rotates along the second direction, the second locking surface 1142 is located on the moving path of the second locking screw 35. The first direction is opposite to the second direction. For example, when the first direction is the direction in which the rotating seat 12 rotates clockwise, the second direction is the direction in which the rotating seat 12 rotates counterclockwise.

[0066] The first locking screw 34 is a tightening bolt and is threadedly connected to the third positioning member 32, the second locking screw 35 is a positioning column and is threadedly connected to the fourth positioning member 33, and the external threads of the first locking screw 34 and the second locking screw 35 are both fine threads. After the rotating seat 12 rotates at a certain angle, the first locking screw 34 and the second locking screw 35 are rotated so that the first locking screw 34 abuts against the first locking surface 1141 and the second locking screw 35 abuts against the second locking surface 1142, thereby limiting the rotation of the rotating seat 12, achieving the locking and fixing of the rotating seat 12, and ensuring that the light spot shaping device can maintain the shaping effect after adjustment.

[0067] Furthermore, the first locking surface 1141 and the second locking surface 1142 are both inner arc surfaces, which can prevent the first locking screw 34 from sliding relative to the first locking surface 1141 and the second locking screw 35 from sliding relative to the second locking surface 1142, thereby improving the stability of the rotating seat 12 when locked and ensuring that the rotating seat 12 will not rotate when locked.

[0068] In one embodiment, the second support member 114 is plate-shaped. A separation groove 1143 is provided on the second support member 114. The separation groove 1143 is located on the upper end surface of the second support member 114 and extends downward but does not penetrate the lower end of the second support member 114. The lower end of the second support member 114 is mounted on the upper surface of the substrate 111. The second support member 114 is divided into a first locking portion and a second locking portion by the separation groove 1143. The first locking portion and the second locking portion are arranged at intervals along the axial direction of the rotating seat 12. The first locking portion is close to the first bracket 112, that is, the first bracket 112, the first locking portion, the second locking portion, and the second bracket 115 are arranged at intervals along the axial direction of the rotating seat 12. The first locking surface 1141 and the second locking surface 1142 are located at the first locking portion. The first locking part is provided with a beam hole, and the second locking part is provided with a locking shaft hole 1146 connected to the beam hole. The locking shaft hole 1146 extends along the axial direction of the rotating seat 12, and the right end of the rotating seat 12 is installed in the beam hole of the first locking part through a rotating tube.

[0069] The second locking portion is also provided with a locking groove 1144 and a locking screw hole 1145. The locking groove 1144 is located on the upper end surface of the second locking portion and extends downward to be connected with the locking shaft hole 1146. The locking screw hole 1145 extends from front to back through the second locking portion, and the locking screw hole 1145 is connected with the locking groove 1144. In this way, when installing the rotating seat 12, the left end of the rotating seat 12 is installed on the first support member 113 through the rotating tube, and the right end of the rotating seat 12 is installed on the second support member 114 through the rotating tube. The rotating tube at the right end of the rotating seat 12 passes through the light beam hole of the first locking portion and the locking shaft hole 1146 of the second locking portion in turn, and then a bolt is installed in the locking screw hole 1145 to reduce the distance of the locking groove 1144 and reduce the diameter of the locking shaft hole 1146, thereby realizing the installation and locking of the rotating seat 12, which is convenient for the quick installation of the rotating seat 12.

[0070] In one embodiment, the base 11 further includes a bottom plate 116. The bottom plate 116 is used to support the entire light spot shaping device. The substrate 111 is slidably arranged on the bottom plate 116, and the sliding direction of the substrate 111 is perpendicular to the rotation axis of the rotating seat 12. The rotation axis of the rotating seat 12 extends horizontally from left to right. The first mirror seat 18 and the second mirror seat 19 slide horizontally from left to right, and the substrate 111 slides horizontally forward and backward. By driving the substrate 111 to slide forward and backward, the substrate 111, the rotating seat 12 mounted on the substrate 111, and the first lens 13 and the second lens 14 mounted on the rotating seat 12 can be moved, so that the positions of the substrate 111, the rotating seat 12, the first lens 13 and the second lens 14 can be adjusted to adjust the position of the light output. The overall structure of the light spot shaping device is compact, and the spatial volume of the dimming area can be reduced. The light spot shaping device of the present application can realize the distance adjustment between the first lens 13 and the second lens 14, and can also adjust the angle of the first lens 13 and the second lens 14. It can also adjust the position of the light output, and the adjustment function is more diversified and the adjustment effect is better.

[0071] Optionally, an adjustment seat 28 is provided on the bottom plate 116, and a third adjustment screw 29 is rotatably mounted on the adjustment seat 28. The third adjustment screw 29 is threadedly connected to the base plate 111, and the third adjustment screw 29 is used to adjust the position of the base plate 111 on the bottom plate 116. By rotating the third adjustment screw 29, the base plate 111 can be driven to slide forward and backward. The external thread of the third adjustment screw 29 is a fine pitch thread, which can achieve precise adjustment of the position of the base plate 111.

[0072] Furthermore, a second guide rail 30 is disposed on the bottom plate 116 , a slide table 31 is slidably disposed on the second guide rail 30 , and the base plate 111 is mounted on the slide table 31 , so that the base plate 111 can slide smoothly.

[0073] In general, when the spot shaping device of the present application performs spot shaping, the laser generating device emits a light beam, and the light beam passes through the first aperture, the first lens, the second lens, and the second aperture in sequence to form a light spot and hit the plane. The light spot hit on the plane can be adjusted into a regular shape by using the spot shaping device. The spot shaping device enables the first lens 13 and the second lens 14 of the spot shaping device to obtain multi-degree-of-freedom adjustment through the slidable substrate 111, the first lens seat 18, the second lens seat 19, and the rotatable rotating seat 12, so that the spot shaping device can use different optical lens combinations according to the actual dimming situation and finely adjust the distance between the optical lenses. The spot shaping device can ensure the versatility of installation adjustment and the functionality of multi-degree-of-freedom adjustment, and the overall structure remains compact while ensuring multi-degree-of-freedom adjustment.

[0074] The technical principle of the present invention is described above in conjunction with specific embodiments. These descriptions are only for explaining the principle of the present invention and cannot be interpreted as limiting the scope of protection of the present invention in any way. Based on the explanations herein, those skilled in the art can associate other specific implementations of the present invention without paying creative labor, and these methods will fall within the scope of protection of the present invention.

Claims

1. A light spot shaping device, characterized in that: include: A base (11) having a first locking surface (1141) and a second locking surface (1142); A rotating seat (12) rotatably mounted on the base (11); The first locking screw (34) and the second locking screw (35) are both threadedly connected to the rotating seat (12); A first lens (13) and a second lens (14) are slidably mounted on the rotating seat (12) along the rotation axis direction of the rotating seat (12); A first aperture (15) and a second aperture (16) are mounted on the base (11); The first aperture (15), the first lens (13), the second lens (14), and the second aperture (16) are arranged in sequence along the rotation axis direction of the rotating seat (12); the first locking screw (34) and the second locking screw (35) are respectively and correspondingly locked with the first locking surface (1141) and the second locking surface (1142) to lock the rotating seat (12); The base (11) comprises a substrate (111), a first bracket (112) arranged at intervals along the rotation axis direction of the rotating base (12), a first support member (113), a second support member (114), and a second bracket (115); the first support member (113) and the second support member (114) are both arranged on the substrate (111); The first diaphragm (15) is mounted on the first bracket (112), the second diaphragm (16) is mounted on the second bracket (115), one end of the rotating seat (12) is rotatably mounted on the first support member (113), and the other end of the rotating seat (12) is rotatably mounted on the second support member (114); A third positioning member (32) and a fourth positioning member (33) are provided on the rotating seat (12); the first locking screw (34) is threadedly connected to the third positioning member (32), and the second locking screw (35) is threadedly connected to the fourth positioning member (33); the first locking surface (1141) and the second locking surface (1142) are both located on the second supporting member (114); the first locking surface (1141) is located on the rotation path of the first locking screw (34), and the second locking surface (1142) is located on the rotation path of the second locking screw (35).

2. The light spot shaping device according to claim 1, characterized in that: It also comprises a first guide rail (17) mounted on the rotating seat (12), a first mirror seat (18) and a second mirror seat (19) both slidably mounted on the first guide rail (17); the first lens (13) is mounted on the first mirror seat (18), and the second lens (14) is mounted on the second mirror seat (19).

3. The light spot shaping device according to claim 2, characterized in that: It also comprises a first adjusting screw (20) and a second adjusting screw (21) both rotatably mounted on the rotating seat (12); the first adjusting screw (20) is threadedly connected to the first mirror seat (18) for adjusting the position of the first mirror seat (18) on the first guide rail (17); the second adjusting screw (21) is threadedly connected to the second mirror seat (19) for adjusting the position of the second mirror seat (19) on the first guide rail (17).

4. The light spot shaping device according to claim 3, characterized in that: It also includes a first pressing block (22) and a second pressing block (23); the first adjusting screw (20) is rotatably mounted on the rotating seat (12) via the first pressing block (22), and the second adjusting screw (21) is rotatably mounted on the rotating seat (12) via the second pressing block (23).

5. The light spot shaping device according to claim 2, characterized in that: It also includes a first positioning member (24), a second positioning member (25), a third locking screw (26) having a first locking head, and a fourth locking screw (27) having a second locking head; The first positioning member (24) is provided with a first strip-shaped hole (241) and is mounted on the rotating seat (12); the third locking screw (26) passes through the first strip-shaped hole (241) and is threadedly connected to the first mirror seat (18); the first positioning member (24) is located between the first locking head and the first mirror seat (18); The second positioning member (25) is provided with a second strip-shaped hole (251) and is mounted on the rotating seat (12); the fourth locking screw (27) passes through the second strip-shaped hole (251) and is threadedly connected to the second mirror seat (19); the second positioning member (25) is located between the second locking head and the second mirror seat (19).

6. The light spot shaping device according to claim 1, characterized in that: The base (11) further comprises a bottom plate (116); the base plate (111) is slidably arranged on the bottom plate (116), and the sliding direction of the base plate (111) is perpendicular to the rotation axis of the rotating base (12).

7. The light spot shaping device according to claim 6, characterized in that: An adjustment seat (28) is provided on the bottom plate (116), a third adjustment screw (29) is rotatably mounted on the adjustment seat (28), and the third adjustment screw (29) is threadedly connected to the base plate (111) for adjusting the position of the base plate (111) on the bottom plate (116).

8. The light spot shaping device according to claim 6, characterized in that: A second guide rail (30) is provided on the bottom plate (116), a slide platform (31) is slidably provided on the second guide rail (30), and the base plate (111) is mounted on the slide platform (31).

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