A three-dimensional vibration platform based on a flexible hinge structure

Abstract

The application discloses a three-dimensional vibration platform based on a flexible hinge structure, which comprises a three-dimensional flexible hinge platform and a base, a workbench is arranged at the center of a flexible hinge fixing frame of the three-dimensional flexible hinge platform, one moving block is arranged on each side of the workbench, the moving blocks are connected with the workbench through straight-round double-opening flexible hinges, and the two ends of the moving blocks are connected with the flexible hinge fixing frame through parallelogram hinges; an x-direction piezoelectric ceramic stack and a y-direction piezoelectric ceramic stack are arranged opposite to each other and perpendicular to two sides of the workbench, and three groups of z-direction piezoelectric ceramic stacks are distributed in a triangle shape below the workbench; and each piezoelectric ceramic stack is pre-tightened through a pre-tightening screw. The application has good decoupling performance, the vibration output trajectories in x, y and z directions have small coupling errors and parasitic motion displacements, can be coupled with a tool to generate a complex space trajectory, and can realize micro-nano structure preparation on a complex space curved surface.

Description

TECHNICAL FIELD

[0001] The present application relates to a vibration platform for micro-nano structure processing, in particular to a three-dimensional vibration platform based on a flexible hinge structure. BACKGROUND

[0002] Micro-nano structure functional surfaces can significantly improve the performance of parts and have been widely used in optical, tribology, biomedical, aviation, aerospace and other fields. At present, the main micro-nano structure surface processing methods include laser processing method, electric spark processing method, electrochemical processing method, etc. These methods are usually limited to material types, and require long process processing time, complex operation and expensive cost, making it difficult to achieve efficient and high-precision preparation of micro-nano structure surfaces.

[0003] Vibration-assisted processing of micro-nano structure functional surfaces is a technology that generates micro-nano structure functional surfaces by applying vibration to the workpiece or tool in traditional cutting, and using the superimposed tool cutting motion trajectory to remove specific shapes and distributed workpiece materials. The vibration applied on the tool side is usually driven by an ultrasonic transducer mounted on the spindle to drive the tool vibration. The vibration frequency of the resonant vibration device is fixed when it applies vibration to the spindle. Therefore, the spindle needs to work at a specific frequency in the resonant mode, which makes them unable to generate diversified and more complex micro-nano structure functional surfaces. In addition, due to the differences in tools and processing parameters, the resonant frequency of the vibration platform will be affected, thereby affecting the precision and quality of micro-nano structure processing. In addition, the resonant vibration platform also has the problems of large modification of the spindle, poor portability, and difficulty in preparing complex micro-nano structures. The vibration applied on the workpiece side usually uses non-resonant vibration platforms. These vibration platforms can work in non-resonant mode and can resist the deformation caused by cutting force during processing. Another advantage of non-resonant vibration platforms is that they can simultaneously realize multiple frequency displacement outputs to generate complex spatial trajectories, thereby preparing more complex composite micro-nano structure functional surfaces.

[0004] According to different vibration dimensions, vibration assisted cutting can be divided into one-dimensional, two-dimensional and three-dimensional vibration for manufacturing different functional textures. Correspondingly, there are one-dimensional, two-dimensional and three-dimensional vibration platforms to realize the machining of workpieces under different vibrations. One-dimensional vibration assisted cutting refers to applying vibration in a single direction of the workpiece or tool during the cutting process, and different geometric structure size micro-nano structure functional surfaces are generated by applying vibration in the cutting depth or feeding direction. The one-dimensional vibration platform usually uses a resonant ultrasonic transducer to drive the tool vibration, and works at a single resonant frequency, which is difficult to realize the preparation of complex micro-nano structures. Two-dimensional vibration assisted cutting refers to applying micro-vibration in the second direction perpendicular to the first vibration direction on the basis of one-dimensional vibration assisted cutting, so that the vibration in the two directions can be superimposed, and two-dimensional vibration cutting can realize the preparation of micro-nano structure on the plane. Three-dimensional vibration assisted cutting increases the third direction of micro-vibration perpendicular to the other two directions on the basis of two-dimensional vibration. Compared with two-dimensional vibration assisted cutting, the motion trajectory of the cutting edge relative to the workpiece is more complex. For micro-nano structure functional surfaces with complex structure, the three-dimensional vibration platform can realize more complex relative motion between the tool and the workpiece, and then can realize the preparation of complex micro-nano structure.

[0005] At present, there are design cases of separable three-dimensional ultrasonic vibration platforms, and such platforms can realize the free replacement of platforms of different dimensions and avoid the modification of the main shaft of the machine tool. However, the existing three-dimensional vibration platform still has the following problems: (1) flexible structure error accumulation and motion redundancy, complex flexible structure leads to low bandwidth and response speed; (2) there is vibration coupling effect and easy to produce parasitic motion; (3) it is difficult to regulate the micro-nano structure array generated by the complex spatial motion trajectory of the tool under three-dimensional vibration; (4) the three-degree-of-freedom vibration in x, y and z directions is difficult to meet the machining needs of spherical surface and other complex spatial curved surface micro-nano structures; (5) the separable three-dimensional ultrasonic vibration platform needs to be assembled when in use, and the assembly error will affect the output accuracy of the micron-level vibration platform. SUMMARY

[0006] The purpose of the present application is to provide a three-dimensional vibration platform based on flexible hinge structure which has good decoupling performance, small coupling error and parasitic motion displacement, and can realize the machining of complex micro-nano structure surface on curved surface.

[0007] Technical solution: The three-dimensional vibration platform based on the flexible hinge structure comprises a base and a three-dimensional flexible hinge platform assembled on the base; the three-dimensional flexible hinge platform comprises a flexible hinge fixing frame, and the inside of the flexible hinge fixing frame is provided with a workbench, a moving block, an x-direction piezoelectric ceramic stack and a y-direction piezoelectric ceramic stack; the workbench is located at the center of the flexible hinge fixing frame, the moving block is four in number and is opposite to the four sides of the workbench, the opposite end faces of the moving block and the workbench are connected through a plurality of straight circular double-opening flexible hinges, and the plurality of straight circular double-opening flexible hinges are uniformly distributed on the opposite end faces of the moving block and the workbench; the two ends of the moving block are connected with the flexible hinge fixing frame through a parallelogram hinge.

[0008] The x-direction piezoelectric ceramic stack is located between the flexible hinge fixing frame and an x-direction moving block and is pre-tightened through an x-direction pre-tightening screw installed on the flexible hinge fixing frame; the y-direction piezoelectric ceramic stack is located between the flexible hinge fixing frame and a y-direction moving block and is pre-tightened through a y-direction pre-tightening screw installed on the flexible hinge fixing frame; a piezoelectric ceramic mounting hole is formed in the center of the base, three groups of z-direction piezoelectric ceramic stacks in equilateral triangle distribution are arranged in the piezoelectric ceramic mounting hole, the z-direction piezoelectric ceramic stacks are connected with the bottom surface of the workbench through straight circular double-opening flexible hinges and are pre-tightened through z-direction pre-tightening screws installed on the base.

[0009] Further, the inner wall of the flexible hinge fixing frame has four right-angled bosses, and the parallelogram hinge connects the moving block and the right-angled boss.

[0010] Further, the parallelogram hinge is composed of a pair of parallel spring sheets in parallel.

[0011] Further, the end of the piezoelectric ceramic stack in contact with the moving block adopts ball head point contact.

[0012] The piezoelectric ceramic stack has strong compression resistance but weak shear resistance and cannot provide lateral stiffness, and is easily damaged by lateral force. In order to solve this problem, the piezoelectric ceramic stack adopts ball head point contact, so that the hinge can be driven under Hertz contact conditions to avoid lateral force.

[0013] Further, the bottom of the piezoelectric ceramic mounting hole is provided with a second piezoelectric ceramic positioning groove and a second piezoelectric ceramic positioning hole, the second piezoelectric ceramic positioning groove is used for installing and positioning the z-direction piezoelectric ceramic stack, and the z-direction pre-tightening screw passes through the second piezoelectric ceramic positioning hole.

[0014] Further, the inner wall of the flexible hinge fixing frame is provided with a first piezoelectric ceramic positioning groove and a first piezoelectric ceramic positioning hole, the first piezoelectric ceramic positioning groove is used for installing and positioning the x-direction piezoelectric ceramic stack or the y-direction piezoelectric ceramic stack, and the x-direction pre-tightening screw or the y-direction pre-tightening screw passes through the first piezoelectric ceramic positioning hole.

[0015] Further, the first piezoelectric ceramic positioning groove and the second piezoelectric ceramic positioning groove are provided with a pad, and the two ends of the pad are in close contact with the piezoelectric ceramic stack and the pre-tightening screw respectively.

[0016] Further, a screw hole is formed on the base, and a corresponding hole is formed on the flexible hinge fixing frame, and the two are fixed by a screw.

[0017] Further, a weight-reducing hole is formed on the base.

[0018] Further, the x-direction piezoelectric ceramic stack, the y-direction piezoelectric ceramic stack and the z-direction piezoelectric ceramic stack are connected with the piezoelectric driver to convert the electric signal into vibration displacement, realize the vibration displacement input in the x, y and z directions, and the vibration displacement is transmitted to the workbench through the straight and circular double-opening flexible hinge to make the workbench vibrate, and the vibration displacement in the x, y and z directions can be provided to the workbench alone or in cooperation; the amplitude and frequency of the workbench vibration are adjusted by adjusting the power and frequency of the piezoelectric driver output of the x-direction piezoelectric ceramic stack, the y-direction piezoelectric ceramic stack and the three groups of z-direction piezoelectric ceramic stacks, and linear motion along the x, y and z axes and overturning rotation around the x and y axes are realized.

[0019] Advantages: Compared with the prior art, the present application has the following obvious advantages:

[0020] (1) A group of piezoelectric ceramic stacks are arranged in the x and y directions respectively, and three groups of piezoelectric ceramic stacks are arranged in the z direction, so that linear motion along the x, y and z axes and overturning rotation around the x and y axes are realized, and a total of five degrees of freedom are achieved, and then the complex space trajectory of the tool can be coupled to realize the preparation of micro-nano structures on complex space curved surfaces.

[0021] (2) In view of the coupling effect and the problem of easy parasitic motion of the existing three-dimensional vibration platform, the present application adopts a decoupling multi-degree-of-freedom flexible hinge mechanism formed by a series connection of a parallelogram hinge and a parallel connection of a straight and circular double-opening flexible hinge, and the three-dimensional vibration platform designed by combining the parallelogram hinge and the straight and circular double-opening flexible hinge is used for cutting, so that the flexible mechanism with overall decoupling multi-dimensional motion is realized, the structural stiffness is increased, and the displacement is amplified. The vibration platform has good decoupling performance, and the vibration output trajectory in the x, y and z directions has small coupling error and parasitic motion displacement.

[0022] (3) The space mechanism composed of the parallelogram hinge and the straight and circular double-opening flexible hinge is symmetrically and orthogonally distributed and intersects at the workpiece (workbench), which reduces the difficulty of establishing the device model and calculating the tool trajectory, and avoids the internal torque of the non-harmonic vibration platform, thereby eliminating the potential parasitic motion caused by the torque.

[0023] (4) The straight circular double-opening flexible hinge itself can achieve decoupled motion in each main driving direction while reducing interference along other translation directions. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Fig. 1 1 is a schematic structural diagram of a three-dimensional vibration platform based on a flexible hinge structure provided by an embodiment of the present invention;

[0025] Fig. 2 is a top view of a three-dimensional flexible hinge platform in an embodiment of the present invention;

[0026] Fig. 3 is a front view of a three-dimensional flexible hinge platform according to an embodiment of the present invention;

[0027] Fig. 4 1 is a schematic structural diagram of a flexible hinge fixing frame according to an embodiment of the present invention;

[0028] Fig. 5 is a schematic structural diagram of a base in an embodiment of the present invention;

[0029] Fig. 6 It is a left side view of the base in the embodiment of the present invention. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings.

[0031] Attachment Figs. 1 to 6 The reference numerals in the figures are as follows:

[0032] 1. Three-dimensional flexible hinge platform; 101. Workbench; 102. Moving block; 103. Straight-circular double-opening flexible hinge; 104. Flexible hinge fixing frame; 105. Parallelogram hinge; 106. First piezoelectric ceramic positioning groove; 107. First piezoelectric ceramic positioning hole; 108. Right-angle boss; 2. Base; 201. Screw hole; 202. Piezoelectric ceramic mounting hole; 203. Second piezoelectric ceramic positioning groove; 204. Second piezoelectric ceramic positioning hole; 3. X-axis piezoelectric ceramic stack; 4. Y-axis piezoelectric ceramic stack; 5. X-axis pre-tightening screw; 6. Y-axis pre-tightening screw; 7. Z-axis piezoelectric ceramic stack; 8. Spacer; 9. Z-axis pre-tightening screw.

[0033] like Fig. 1 As shown, an embodiment of the present invention provides a three-dimensional vibration platform based on a flexible hinge structure, including a three-dimensional flexible hinge platform 1 and a base 2.

[0034] Combine Figs. 2 to 4The three-dimensional flexible hinge platform 1 comprises a flexible hinge fixing frame 104 in square and four-angle chamfer, and the flexible hinge fixing frame 104 is internally provided with a workbench 101, a moving block 102, an x-direction piezoelectric ceramic stack 3 and a y-direction piezoelectric ceramic stack 4. The workbench 101 is located at the center of the flexible hinge fixing frame 104, and the moving block 102 is four in number and opposite to the four sides of the workbench 101. The opposite end faces of the moving block 102 and the workbench 101 are connected through four straight circular double-open flexible hinges 103, and the four straight circular double-open flexible hinges 103 are distributed in four corners on the opposite end faces of the moving block 102 and the workbench 101. The straight edge inner wall of the flexible hinge fixing frame 104 has a right-angle boss 108 in the middle, and the number of the right-angle boss 108 is four in total. The two ends of the moving block 102 are connected with the corresponding right-angle boss 108 through a parallelogram hinge 105, and the parallelogram hinge 105 is composed of a pair of parallel spring sheets and is used as a guide mechanism to transfer the movement of the piezoelectric ceramic stack. The four side faces of the straight circular double-open flexible hinge 103 in the orthogonal direction have circular-arc type notches, so as to realize the rotation of the hinge around two sensitive axes (i.e. two axes in the orthogonal direction), limit the parasitic movement caused by the output of the parallelogram hinge 105 (i.e. the guide mechanism), realize the decoupling movement of each main driving direction, and reduce the interference generated in other translation directions.

[0035] The inner wall of the flexible hinge fixing frame 104 is provided with a first piezoelectric ceramic positioning groove 106 and a first piezoelectric ceramic positioning hole 107 for installing and positioning the x-direction piezoelectric ceramic stack 3 and the y-direction piezoelectric ceramic stack 4. Specifically, the first piezoelectric ceramic positioning groove 106 is matched with the x-direction piezoelectric ceramic stack 3 and the y-direction piezoelectric ceramic stack 4, the x-direction piezoelectric ceramic stack 3 is arranged between the flexible hinge fixing frame 104 and an x-direction moving block 102, the y-direction piezoelectric ceramic stack 4 is arranged between the flexible hinge fixing frame 104 and a y-direction moving block 102, and the x-direction piezoelectric ceramic stack 3 and the y-direction piezoelectric ceramic stack 4 adopt ball head point contact at the end in contact with the corresponding moving block 102. The first piezoelectric ceramic positioning groove 106 is provided with a pad 8, one end of the x-direction piezoelectric ceramic stack 3 or the y-direction piezoelectric ceramic stack 4 is installed in the first piezoelectric ceramic positioning groove 106 and is in close contact with the pad 8, and the other end is in close contact with the corresponding moving block 102. The two first piezoelectric ceramic positioning holes 107 are respectively screwed with an x-direction pre-tightening screw 5 and a y-direction pre-tightening screw 6, the x-direction pre-tightening screw 5 and the y-direction pre-tightening screw 6 are in close contact with the corresponding pad 8, and are used to apply a pre-tightening force to achieve the pre-tightening effect of the x-direction piezoelectric ceramic stack 3 and the y-direction piezoelectric ceramic stack 4 respectively.

[0036] In combination with Fig. 5 and Fig. 6The base 2 is provided with a piezoelectric ceramic mounting hole 202 in the center, the piezoelectric ceramic mounting hole 202 is opposite to the workbench 101, and four weight-reducing holes in the shape of a sector are formed around the piezoelectric ceramic mounting hole 202 on the base 2. The bottom of the piezoelectric ceramic mounting hole 202 is provided with three groups of second piezoelectric ceramic positioning grooves 203 and second piezoelectric ceramic positioning holes 204, which are used for mounting and positioning z-direction piezoelectric ceramic stacks 7. Specifically, the second piezoelectric ceramic positioning grooves 203 are matched with the z-direction piezoelectric ceramic stacks 7, and the second piezoelectric ceramic positioning grooves 203 are also provided with pads 8, one end of the z-direction piezoelectric ceramic stacks 7 is mounted in the second piezoelectric ceramic positioning grooves 203 and is in close contact with the pads 8, and the other end is connected to the bottom surface of the workbench 101 through a straight-round double-opening flexible hinge 103. The three groups of z-direction piezoelectric ceramic stacks 7 are distributed in the shape of an equilateral triangle below the workbench 101. The second piezoelectric ceramic positioning holes 204 are threadedly connected with z-direction pre-tightening screws 9, the z-direction pre-tightening screws 9 are in close contact with the pads 8, and are used for exerting a pre-tightening force to achieve the effect of pre-tightening the z-direction piezoelectric ceramic stacks 7. The three groups of z-direction piezoelectric ceramic stacks 7 can realize the tilting rotation of the workbench 101 around the x-axis or the y-axis.

[0037] The top surface of the base 2 is provided with a pair of screw holes 201, and the pair of screw holes 201 are located at two opposite right-angled bosses 108. The flexible hinge fixing frame 104 is provided with corresponding holes, and the two are fixed through screws.

[0038] The assembling method of the three-dimensional vibration platform provided by the embodiment of the present application is as follows:

[0039] Firstly, the pads 8 are placed in the second piezoelectric ceramic positioning grooves 203, the z-direction piezoelectric ceramic stacks 7 are positioned and mounted in the base 2 through the second piezoelectric ceramic positioning grooves 203, and one end of the z-direction piezoelectric ceramic stacks 7 is ensured to be in close contact with the pads 8.

[0040] Secondly, the position of the three-dimensional flexible hinge platform 1 on the base 2 is positioned through the screw holes 201, the three-dimensional flexible hinge platform 1 and the base 2 are connected, and the fixing of the three-dimensional flexible hinge platform 1 is realized.

[0041] Thirdly, the pads 8 are placed in the first piezoelectric ceramic positioning grooves 106, one end of the x-direction piezoelectric ceramic stacks 3 is placed in the first piezoelectric ceramic positioning grooves 106 and is in close contact with the pads 8, and the other end is in close contact with the moving blocks 102. One end of the y-direction piezoelectric ceramic stacks 4 is placed in the first piezoelectric ceramic positioning grooves 106 and is in close contact with the pads 8, and the other end is in close contact with the moving blocks 102. Then, the x-direction pre-tightening screws 5 and the y-direction pre-tightening screws 6 are respectively mounted in the corresponding first piezoelectric ceramic positioning holes 107, and the x-direction pre-tightening screws 5 and the y-direction pre-tightening screws 6 are respectively used for pre-tightening the x-direction piezoelectric ceramic stacks 3 and the y-direction piezoelectric ceramic stacks 4.

[0042] Fourthly, the z-direction pre-tightening screw 9 is installed on the second piezoelectric ceramic positioning hole 204, and the z-direction piezoelectric ceramic stack 7 is pre-tightened by the z-direction pre-tightening screw 9.

[0043] The working principle of the three-dimensional vibration platform provided by the embodiment of the application is as follows:

[0044] The x-direction piezoelectric ceramic stack 3 and the y-direction piezoelectric ceramic stack 4 are arranged opposite to each other and perpendicular to two sides of the worktable 101, and the three groups of z-direction piezoelectric ceramic stacks 7 are distributed directly below the worktable 101. The x-direction piezoelectric ceramic stack 3, the y-direction piezoelectric ceramic stack 4 and the z-direction piezoelectric ceramic stack 7 are connected with the piezoelectric driver to convert the electric signal into vibration displacement, realize the vibration displacement input in the three directions of x, y and z which are orthogonal in space, and the vibration displacement is transmitted to the worktable 101 through the straight-circular double-opening flexible hinge 103, so that the worktable 101 is mechanically vibrated. The vibration displacement in the three directions of x, y and z can be used to provide vibration displacement input to the worktable 101 independently or cooperatively. The amplitude and frequency of the vibration of the worktable 101 are adjusted by adjusting the power and frequency of the piezoelectric driver output of the x-direction piezoelectric ceramic stack 3, the y-direction piezoelectric ceramic stack 4 and the three groups of z-direction piezoelectric ceramic stacks 7, so as to realize the linear motion along the x, y and z axes and the overturning rotation around the x and y axes, and the micro-nano structure functional surface on the curved surface can be machined by the five-degree-of-freedom tool space trajectory.

Claims

1. A three-dimensional vibration platform based on a flexible hinge structure, characterized in that, The application relates to a three-dimensional flexible hinge platform (1) and a base (2) for assembling the three-dimensional flexible hinge platform (1); the three-dimensional flexible hinge platform (1) comprises a flexible hinge fixing frame (104), and the flexible hinge fixing frame (104) is internally provided with a workbench (101), a moving block (102), an x-direction piezoelectric ceramic stack (3) and a y-direction piezoelectric ceramic stack (4); the workbench (101) is located at the center of the flexible hinge fixing frame (104); the moving block (102) is four in number and is opposite to four sides of the workbench (101); the opposite end faces of the moving block (102) and the workbench (101) are connected through a plurality of straight circular double-opening flexible hinges (103); the plurality of straight circular double-opening flexible hinges (103) are uniformly distributed on the opposite end faces of the moving block (102) and the workbench (101); the two ends of the moving block (102) are connected with the flexible hinge fixing frame (104) through a parallelogram hinge (105). The x-direction piezoelectric ceramic stack (3) is located between the flexible hinge fixing frame (104) and an x-direction moving block (102) and is pre-tightened through an x-direction pre-tightening screw (5) installed on the flexible hinge fixing frame (104); the y-direction piezoelectric ceramic stack (4) is located between the flexible hinge fixing frame (104) and a y-direction moving block (102) and is pre-tightened through a y-direction pre-tightening screw (6) installed on the flexible hinge fixing frame (104); a piezoelectric ceramic mounting hole (202) is formed in the center of the base (2), three groups of z-direction piezoelectric ceramic stacks (7) in equilateral triangle distribution are arranged in the piezoelectric ceramic mounting hole (202), the z-direction piezoelectric ceramic stacks (7) are connected with the bottom surface of the workbench (101) through the straight circular double-opening flexible hinges (103) and are pre-tightened through z-direction pre-tightening screws (9) installed on the base (2).

2. The three-dimensional vibration platform based on a flexure-based structure according to claim 1, characterized in that, The inner wall of the flexible hinge fixing frame (104) has four right-angled bosses (108), and the parallelogram hinge (105) connects the moving block (102) and the right-angled bosses (108).

3. A three-dimensional vibration platform based on a flexure hinge structure according to claim 1 or 2, characterized in that, The parallelogram hinge (105) is composed of a pair of parallel spring sheets in parallel connection.

4. The three-dimensional vibration platform based on a flexure-based structure of claim 1, wherein, The end of the piezoelectric ceramic stack in contact with the moving block (102) adopts ball head point contact.

5. The three-dimensional vibration platform based on a flexure-based structure of claim 1, wherein, The bottom of the piezoelectric ceramic mounting hole (202) is provided with a second piezoelectric ceramic positioning groove (203) and a second piezoelectric ceramic positioning hole (204), the second piezoelectric ceramic positioning groove (203) is used for mounting and positioning the z-direction piezoelectric ceramic stack (7), and the z-direction pre-tightening screw (9) penetrates through the second piezoelectric ceramic positioning hole (204).

6. The three-dimensional vibration platform based on a flexure hinge structure according to claim 5, characterized in that, The inner wall of the flexible hinge fixing frame (104) is provided with a first piezoelectric ceramic positioning groove (106) and a first piezoelectric ceramic positioning hole (107), the first piezoelectric ceramic positioning groove (106) is used for mounting and positioning the x-direction piezoelectric ceramic stack (3) or the y-direction piezoelectric ceramic stack (4), and the x-direction pre-tightening screw (5) or the y-direction pre-tightening screw (6) penetrates through the first piezoelectric ceramic positioning hole (107).

7. The three-dimensional vibration platform based on a flexure hinge structure according to claim 6, characterized in that, The first piezoelectric ceramic positioning groove (106) and the second piezoelectric ceramic positioning groove (203) are provided with a cushion block (8), and the two ends of the cushion block (8) are in close contact with the piezoelectric ceramic stack and the pre-tightening screw respectively.

8. The three-dimensional vibration platform based on a flexure-based structure of claim 1, wherein, Screw holes (201) are formed on the base (2), and corresponding holes are formed on the flexible hinge fixing frame (104), and the two are fixed by screws.

9. The three-dimensional vibration platform based on a flexure-based structure of claim 1, wherein, The base (2) is provided with a weight-reducing hole.

10. The three-dimensional vibration platform based on a flexure- hinge structure according to claim 1, characterized in that, The x-direction piezoelectric ceramic stack (3), the y-direction piezoelectric ceramic stack (4) and the z-direction piezoelectric ceramic stack (7) are connected with piezoelectric drivers to convert electrical signals into vibration displacement, realize vibration displacement input in the x, y and z directions, and the vibration displacement is transmitted to the workbench (101) through the straight and circular double-opening flexible hinge (103) to make the workbench (101) vibrate, and the vibration displacement in the x, y and z directions can be used alone or in combination to provide vibration displacement input to the workbench (101); the amplitude and frequency of the vibration of the workbench (101) are adjusted by adjusting the power and frequency of the piezoelectric driver output of the x-direction piezoelectric ceramic stack (3), the y-direction piezoelectric ceramic stack (4) and the three groups of z-direction piezoelectric ceramic stacks (7), and linear motion in the x, y and z directions and tilting rotation around the x and y axes are realized.

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