A melting and spraying device with online monitoring function

Abstract

The application provides a melting equipment with an online monitoring function, which comprises a mechanical arm of a melting machine and a melting end mechanism. The melting end mechanism is controlled by the mechanical arm of the melting machine to be in different positions to realize melting of a part surface that needs to be melted. The surface of the melting end mechanism is also provided with an online monitoring system. The online monitoring system can emit monitoring laser to monitor the part surface that needs to be melted to determine whether the roughness and thickness of the melting coating meet the requirements. The online monitoring system comprises a white light interferometer and a laser confocal film thickness instrument. The application can monitor and measure the roughness and thickness of the melting coating in real time, and the control system of the melting machine can be fed back in real time according to the monitoring result to make corresponding adjustment to meet the required melting parameters.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of melting equipment, in particular to a melting equipment with online monitoring function. BACKGROUND

[0002] At present, the melting operation is difficult to be monitored online, the melting parameters are adjusted according to experience, and after the melting is completed, the roughness and thickness of the melting coating are measured, if there is an out-of-range condition, further return operation or removal of the melting coating is needed to re-melt; the existing technology is also difficult to control the thickness of the melting of different regions of the part, resulting in uneven thickness of the melting coating in different regions. SUMMARY

[0003] In view of the above problems, the present application provides a melting equipment with online monitoring function, which can monitor the roughness and thickness of the melting coating in real time, and feed back the monitoring results to the control system of the melting machine in real time, and make corresponding adjustments to meet the required melting parameters.

[0004] To solve the above problems, the technical scheme adopted by the present application is:

[0005] A melting equipment with online monitoring function, comprising a mechanical arm of a melting machine and a melting end mechanism, the mechanical arm of the melting machine controls the melting end mechanism to be in different positions to realize melting on the surface of the part to be melted, the surface of the melting end mechanism is also provided with an online monitoring system, the online monitoring system can emit monitoring laser to monitor the surface of the part to be melted and judge whether the roughness and thickness of the melting coating meet the requirements, the online monitoring system comprises a white light interferometer and a laser confocal film thickness instrument; the white light interferometer emits white light with wide spectrum to form interference fringes to judge the height and shape of the surface of the part to be melted, and the laser confocal film thickness instrument focuses the small features and surface topography of the surface of the part to be melted on the focal plane of the optical detection system to finally obtain the topography information of the object.

[0006] Preferably, the online monitoring system comprises monitoring elements for accommodating the white light interferometer and the laser confocal film thickness instrument, and the online monitoring system further comprises a sliding joint for controlling the movement of the monitoring elements along a predetermined path and a rotating joint for controlling the deflection of the monitoring elements relative to the melting end mechanism.

[0007] Preferably, the sliding joint comprises a sliding base and a sliding end, the upper end of the sliding base is an arc surface, the sliding end is electrically controlled to slide on the surface of the upper end of the sliding base, and the monitoring elements are fixedly connected with the sliding end.

[0008] Preferably, the rotating joint comprises a rotating base and a rotating end, the rotating end is sleeved outside the rotating base and is electrically controlled to rotate, and the rotating base is fixed to the outer wall of the spraying end mechanism.

[0009] Preferably, the spraying device further comprises a scanning system, an electric control system and a processing terminal; the scanning system is used to scan the shape of the part to be sprayed to form a scanning signal, and the scanning signal is transmitted to the processing terminal; the processing terminal forms a spraying path according to the scanning model and transmits the spraying path to the electric control system; the electric control system is electrically connected with the sliding joint and the monitoring element, and is used to adjust the deflection angle and the moving position of the monitoring element.

[0010] Preferably, the online monitoring system further comprises a positioning system, which is used to position the monitoring position of the surface of the part to be sprayed before the monitoring element acts, and the positioning system is electrically connected with the electric control system and is used to calibrate the monitoring position of the surface of the part to be sprayed after the monitoring element acts.

[0011] The present application has the following advantages:

[0012] Compared with the prior art, the online monitoring system can effectively monitor the surface of the part to be sprayed, and can real-time feedback the roughness and thickness of the surface of the part to be sprayed, and can make corresponding adjustment according to the monitoring result to meet the required spraying parameters; especially, the white light interferometer and the laser confocal film thickness instrument can quickly monitor the height, shape and micro features of the surface of the part to be sprayed, thereby improving the monitoring efficiency and ensuring the quality of the spraying process of the part to be sprayed. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 FIG. 1 is a structural schematic diagram of the present application.

[0014] Figure 2 FIG. 2 is a schematic diagram of the online monitoring system and the spraying end mechanism of the present application.

[0015] Figure 3 FIG. 3 is a front structural schematic diagram of the present application. Figure 2

[0016] Figure 4 FIG. 4 is a flow chart of the method of the present application.

[0017] ​In the diagram: 1. Material transfer system for the spraying machine; 2. Power supply and control system of the spraying machine; 3. Robotic arm of the spraying machine; 4. Spraying wire; 5. Online monitoring system; 510. Rotating joint; 511. Rotating base; 512. Rotating end; 520. Sliding joint; 521. Sliding base; 522. Sliding end; 530. Monitoring element; 6. Monitoring laser; 7. Spraying end mechanism; 8. Spray beam; 9. Part to be sprayed; 10. Supporting base. Detailed Implementation

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Currently, it is difficult to monitor the spraying operation online. The spraying parameters are adjusted based on experience. After the spraying is completed, the roughness and thickness of the sprayed coating are measured. If there are out-of-range conditions, further rework or removal of the sprayed coating and re-spraying is required. At present, it is also difficult to control the thickness of the sprayed coating in different areas of the component, resulting in uneven thickness of the sprayed coating in different areas.

[0020] This invention can monitor parameters such as roughness and thickness of the melt-sprayed coating online in real time, and feed the monitoring results back to the control system of the melt-spraying machine in real time to make corresponding adjustments to meet the required melt-spraying parameters.

[0021] See attached document Figure 1 -Appendix Figure 3 This invention relates to a welding equipment with online monitoring capabilities. It mainly adds an online monitoring system 5 to the existing welding machine. The main solution is to address the problem that the surface roughness and welding thickness cannot be accurately controlled during the welding process of components inside the cavity of semiconductor equipment, resulting in errors during operation.

[0022] Currently, the melting spraying machine mainly consists of a power supply system, a control system, a melting spraying material, a feeding system, and a melting spraying end mechanism 7. In order to accurately monitor and control the roughness and thickness of the coating during the melting spraying operation, an online monitoring system 5 is added to the melting spraying end. The online monitoring system 5 includes a white light interferometer and a film thickness gauge, which can monitor the roughness and thickness of the coating during the melting spraying operation.

[0023] like Figure 1 As shown, it includes a material transfer system 1, a power supply system and control system 2 for the melting machine, a robotic arm 3 for the melting machine, melting metal wires 4 (including but not limited to aluminum wires and titanium wires), an online monitoring system 5 (including a white light interferometer and a laser confocal film thickness gauge), a monitoring laser 6, a melting end mechanism 7, parts to be melted 9, and a support base 10.

[0024] The principle of the white light interferometer in the online monitoring system 5 is mainly to emit a wide-spectrum white light, irradiate the surface of the part to be fused, and then collect the light reflected by the object to form a series of interference fringes. The form and distribution of the interference fringes are related to the height and shape of the object surface. By analyzing these interference fringes, the three-dimensional topographic information of the object can be obtained.

[0025] The main principle of laser confocal is to use the high focusing ability of the laser beam to focus the micro features or surface topography on the object to the focal plane of the optical detection system, and obtain the topographic information of the object by measuring the light signal received by the detection system.

[0026] In summary, by adding the online monitoring system 5, the surface of the part 9 to be fused can be effectively monitored, and the roughness and thickness of the surface of the part 9 to be fused can be fed back in real time. According to the monitoring result, the control system of the fusion machine is fed back in real time, and appropriate adjustments are made to meet the required fusion parameters. Especially by setting the white light interferometer and the laser confocal film thickness instrument, the height, shape and micro features of the surface of the part 9 to be fused can be quickly monitored, the monitoring efficiency is improved, and the quality of the fusion processing of the part 9 to be fused is ensured.

[0027] The online monitoring system 5 includes a monitoring element 530 for accommodating the white light interferometer and the laser confocal film thickness instrument. The online monitoring system 5 also includes a sliding joint 520 for controlling the movement of the monitoring element 530 along a predetermined path, and a rotating joint 510 for controlling the deflection of the monitoring element 530 relative to the fusion end mechanism 7. By controlling the position of the monitoring element 530 through the rotating joint 510 and the sliding joint 520, the monitoring element 530 can be adjusted to different postures to monitor the surface of the part 9 to be fused, so as to improve the monitoring range and efficiency.

[0028] Through the above structural design, the fusion end mechanism 7 can move alone according to the predetermined trajectory. In the later stage of fusion, it is not necessary to move to the outside of the fusion area. The adjustment and control of the monitoring area of the online monitoring system 5 can be realized by driving the sliding joint 520 and the monitoring element 530. The monitoring element 530 can be adjusted to different positions simply and conveniently.

[0029] It should be noted that the sliding joint 520 here can control the monitoring element 530 to move along a predetermined path, that is, it can control the monitoring element 530 to monitor a wider range, thereby improving the monitoring range; at the same time, the rotating joint 510 is deflected to different positions, which can connect the linear regions monitored by the monitoring element 530 in multiple positions into a planar region, thereby forming a monitoring surface with the melting end mechanism 7 as the center, greatly improving the monitoring range. The monitoring element 530 and the melting end mechanism 7 can be controlled separately, thereby improving the monitoring efficiency.

[0030] Especially for part of the melting operation according to the S-shaped trajectory, the melting end mechanism 7 can be controlled to move along a predetermined S-shaped path, and at the bending position, only the monitoring range of the monitoring element 530 needs to be adjusted by the rotating joint 510 and the sliding joint 520, which will not affect the movement of the melting end mechanism 7.

[0031] Specifically, the sliding joint 520 includes a sliding base 521 and a sliding end 522, the upper end of the sliding base 521 is an arc surface, and the sliding end 522 is located on the upper end surface of the sliding base 521 and is controlled to slide electrically. The monitoring element 530 is fixedly connected with the sliding end 522. The upper surface of the sliding base 521 is arc-shaped, and the sliding end 522 can adjust the deflection angle of the monitoring element 530 during movement on the upper surface of the sliding base 521, thereby achieving wide-range monitoring control. By arranging the arc-shaped electric track, it is not necessary to separately design a complex deflection element, thereby simplifying the control process.

[0032] Specifically, the rotating joint 510 includes a rotating base 511 and a rotating end 512, the rotating end 512 is sleeved outside the rotating base 511 and is controlled to rotate electrically, and the rotating base 511 is fixedly connected with the outer wall of the melting end mechanism 7. The rotating joint 510 here can select a common annular electric track, and the rotating base 511 can drive the rotating end 512 to move along an annular path, thereby achieving convenient control and high response speed.

[0033] Through the above structure design, the positions of the monitoring element 530 in two directions can be controlled by the rotating joint 510 and the sliding joint 520, thereby monitoring a large area of the end, which is convenient to control, fast in response speed, and good in control effect.

[0034] Further, the scanning system, the electric control system and the processing terminal are further included; the scanning system scans the shape of the part 9 to be melted and forms a scanning signal, and transmits the scanning signal to the processing terminal; the processing terminal forms a melting path according to the scanning model and transmits the melting path to the electric control system; specifically, the melting path is comprehensively determined according to the area of the part 9 to be melted and the size of the melting beam 8; finally, the melting end mechanism 7 moves along the S-shaped or other predetermined path, and the melting of each area of the surface of the part 9 to be melted is completed, thereby improving the efficiency of melting.

[0035] The electric system is electrically connected with the sliding joint 520 and the monitoring element 530, and is used for adjusting the deflection angle and the moving position of the monitoring element 530, so that the area needing to be bent and adjusted can be determined in advance according to the melting path, and the range of the sliding joint 520 and the monitoring element 530 is adjusted and controlled in advance, thereby improving the control effect.

[0036] The monitoring element 530 is connected with the sliding joint 520 and the rotating joint 510, and is used for monitoring the surface of the part 9 to be melted. Figure 1 For example, when the melting position of the melting end mechanism 7 reaches the bottom position, the monitoring element 530 is deflected to the position below the melting end mechanism 7 through the sliding joint 520 and the rotating joint 510, and at the same time, the melting end mechanism 7 continues to move from bottom to top, so that the melting of the part 9 to be melted at different positions is completed; the monitoring element 530 deflected to the position below the melting end mechanism 7 can continue to monitor the unmonitored area of the surface of the part 9 to be melted, so that the monitoring area is fully covered.

[0037] Further, the online monitoring system 5 further includes a positioning system, which is used for positioning the monitoring position of the surface of the part 9 to be melted before the monitoring element 530 acts; the positioning system is electrically connected with the electric control system, and is used for calibrating the monitoring position of the surface of the part 9 to be melted after the monitoring element 530 acts.

[0038] The working flow chart of the melting machine including the online monitoring system in the application is as shown in the figure: Figure 4 The melting operation starts, the first step is to input the product parameters of the part to be melted, the second step is to automatically generate the melting program by the system; the third step is to start executing the melting program, and the operation starts; the fourth step is to monitor the melting layer parameters online to see whether the requirements can be met; if the requirements can be met, the operation is completed, otherwise, the second step is entered, and the melting program is adjusted again to continue the operation for the area that does not meet the requirements.

[0039] The above merely describes preferred embodiments of the present application and is not used to limit the present application, and any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A welding spraying device with online monitoring function, comprising a robotic arm (3) of a welding spraying machine and a welding spraying end mechanism (7), wherein the welding spraying end mechanism (7) is controlled by the robotic arm (3) of the welding spraying machine to be in different positions to achieve welding spraying on the surface of the part (9) to be welded, characterized in that: The surface of the melting end mechanism (7) is also equipped with an online monitoring system (5). The online monitoring system (5) emits a monitoring laser (6) to monitor the surface of the part (9) that needs to be melted, thereby determining whether the roughness and thickness of the melted coating meet the requirements. The online monitoring system (5) includes a white light interferometer and a laser confocal film thickness gauge. The height and shape of the surface of the part (9) to be melted are determined by the interference fringes formed by the wide-spectrum white light emitted by the white light interferometer. The minute features and surface morphology of the surface of the part (9) to be melted are focused onto the focal plane of the optical detection system by the laser confocal film thickness gauge, and finally the morphological information of the object is obtained. The online monitoring system (5) includes a monitoring element (530) for accommodating a white light interferometer and a laser confocal film thickness gauge. The online monitoring system (5) also includes a sliding joint (520) for controlling the movement of the monitoring element (530) along a predetermined path and a rotating joint (510) for controlling the deflection of the monitoring element (530) relative to the melting end mechanism (7). The sliding joint (520) includes a sliding base (521) and a sliding end (522). The upper end of the sliding base (521) is an arc-shaped surface. The sliding end (522) is electrically slidable on the upper surface of the sliding base (521). The monitoring element (530) is fixedly connected to the sliding end (522). The rotating joint (510) includes a rotating base (511) and a rotating end (512). The rotating end (512) is sleeved on the outside of the rotating base (511) and is electrically controlled to rotate. The rotating base (511) is fixed to the outer wall of the melt spraying end mechanism (7). The sliding joint is located on the outer side of the rotating end.

2. The melt spraying equipment with online monitoring function according to claim 1, characterized in that, The online monitoring system (5) also includes a scanning system, an electronic control system, and a processing terminal. The scanning system scans the shape of the part (9) to be welded to form a scanning signal and transmits the scanning signal to the processing terminal. The processing terminal forms a weld path based on the scanning signal and transmits the weld path to the electronic control system. The electronic control system is electrically connected to the sliding joint (520) and the monitoring element (530) to adjust the deflection angle and movement position of the monitoring element (530).

3. The melt spraying equipment with online monitoring function according to claim 2, characterized in that, The online monitoring system (5) also includes a positioning system, which can locate the monitoring position of the surface of the part (9) to be welded before the monitoring element (530) is activated. The positioning system is electrically connected to the electronic control system to calibrate the monitoring position of the surface of the part (9) to be welded after the monitoring element (530) is activated.

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