Air flow velocity detection device inside reaction chamber

Abstract

The present invention provides a device for detecting the airflow velocity inside a reaction chamber, wherein the airflow detection device is arranged on a heater inside the reaction chamber and is connected to a communication device for calculating the airflow velocity; the movement of a conductor sliding mechanism in the airflow detection device under the action of gas flow causes a change in resistance, and then the current change data is collected through the detection circuit of the airflow detection device, and the local gas flow velocity inside the reaction chamber is calculated based on the gas flow velocity detection algorithm. This device can directly and accurately measure the local gas flow velocity inside the reaction chamber, solving the problem that the prior art cannot accurately control and optimize the gas flow, and provides strong support for the accurate control and optimization of the semiconductor degumming process.

Description

Technical Field

[0001] The invention relates to the field of semiconductor process technology, and in particular to a device for detecting air flow velocity inside a reaction chamber. Background Art

[0002] In the reaction chamber of the semiconductor stripping process, the gas flow is complex, and the change of local gas flow velocity may have a significant impact on the stripping effect. However, most of the existing technologies measure the gas flow velocity in the pipeline, and cannot directly and accurately measure the local gas flow velocity inside the reaction chamber, which makes it impossible for process personnel to accurately control and optimize the gas flow. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a device for detecting the gas flow velocity inside a reaction chamber, so as to solve the technical problem that the prior art cannot directly and accurately measure the local gas flow velocity inside the reaction chamber.

[0004] To achieve the above-mentioned purpose and other related purposes, the present invention provides a device for detecting the airflow velocity inside a reaction chamber, the device comprising: an airflow detection device and an airflow velocity calculation device; wherein the airflow detection device is arranged on a heater inside the reaction chamber and is communicatively connected with the airflow velocity calculation device; the airflow detection device comprises: a conductor sliding mechanism, a fixed voltage power supply and an ammeter; the conductor sliding mechanism, the fixed voltage power supply and the ammeter are connected in series in sequence to form a detection circuit; the conductor sliding mechanism is used to drive the conductor to move on a guide rail when the gas flows inside the reaction chamber, causing the resistance of the conductor sliding mechanism to change, so that the current of the detection circuit changes; the fixed voltage power supply is used to provide a fixed voltage for the detection circuit; the ammeter is used to collect current data of the detection circuit in real time; the airflow velocity calculation device is used to calculate and obtain the local gas flow velocity inside the reaction chamber according to the current data of the ammeter based on a gas flow velocity detection algorithm.

[0005] In one embodiment of the present invention, the conductor sliding mechanism includes a guide rail structure, a conductor, an elastic component and an insulating fixed block; the guide rail structure has a guide rail extending from the bottom end to the top end, and the bottom end of the guide rail is fixed on the insulating fixed block; the conductor is slidably connected to the guide rail to slide along the sliding track direction; the two ends of the elastic component are respectively connected to the insulating fixed block and the conductor, and can be deformed under the action of the conductor; when the wind force generated by the airflow inside the reaction chamber acts on the conductor, the elastic component is driven to deform, so that the conductor slides to the corresponding position on the guide rail along the sliding track direction.

[0006] In one embodiment of the present invention, the conductor has an active contact surface for allowing wind forces in different directions formed by the airflow inside the reaction chamber to act thereon, so as to be driven to move along the corresponding track sliding direction.

[0007] In one embodiment of the present invention, the conductor is a rectangular conductor, and the two side surfaces parallel to the sliding direction of the track are sliding surfaces in contact with the guide rail, and the two side surfaces parallel to and perpendicular to the sliding track direction are active contact surfaces; the two active contact surfaces include: a first active contact surface and a second active contact surface; wherein the first active contact surface is connected to the elastic component, and the first active contact surface, the guide rail and the fixed surface of the insulating fixed block form a accommodating space, and the size of the accommodating space can change with the movement of the rectangular conductor.

[0008] In one embodiment of the present invention, the guide rail structure includes: two identical and parallel guide rails, and the bottom ends of the two guide rails are fixed on the fixed surface of the fixed object block; the two sliding surfaces of the rectangular conductor are respectively in contact with the two guide rails, so that the rectangular conductor slides along the sliding track direction.

[0009] In one embodiment of the present invention, the elastic component is a spring, the deformation direction of which is parallel to the sliding direction of the track, and the elastic component maintains an initial shape when there is no gas flow in the reaction chamber.

[0010] In one embodiment of the present invention, when the wind force generated by the gas flow inside the reaction chamber acts on the first active contact surface of the rectangular conductor to drive the rectangular conductor to move toward the top end of the guide rail, the spring stretches, causing the rectangular conductor to slide on the guide rail to the corresponding position in the direction of the top end of the guide rail, causing the resistance of the conductor sliding mechanism to increase; when the wind force generated by the gas flow inside the reaction chamber acts on the second active contact surface of the rectangular conductor to drive the rectangular conductor to move toward the bottom end of the guide rail, the spring is compressed, causing the rectangular conductor to slide on the guide rail to the corresponding position in the direction of the bottom end of the guide rail, causing the resistance of the conductor sliding mechanism to decrease; when there is no gas flow inside the reaction chamber, the spring is in its initial shape and the rectangular conductor is at its initial position.

[0011] In one embodiment of the present invention, the airflow velocity calculation device includes: a data acquisition module, used to obtain device design parameters and the current current indication of the ammeter; wherein the device design parameters include: the fixed voltage, the initial resistance of the detection circuit, the rectangular conductor parameters, the spring parameters, the airflow density and the guide rail parameters; the airflow velocity calculation module is connected to the data acquisition module, and is used to calculate the current local gas flow rate inside the reaction chamber based on the gas flow rate detection algorithm, according to the device design parameters and the current current indication of the ammeter.

[0012] In one embodiment of the present invention, the gas flow rate detection algorithm includes:

[0013] ;in, is the current local gas flow rate inside the reaction chamber, A fixed voltage provided by the fixed voltage power supply, is the current reading of the ammeter, is the initial resistance of the conductor sliding mechanism, is the mass of the rectangular conductor, is the spring stiffness coefficient, t is the current time, is the air flow density, is the area of ​​the effective contact surface of the rectangular conductor, is the conductivity of the rail and is the cross-sectional area of ​​the rail.

[0014] In one embodiment of the present invention, the insulating fixing block is a rectangular parallelepiped structure.

[0015] As described above, the present invention is a device for detecting the airflow velocity inside a reaction chamber, which has the following beneficial effects: the present invention sets the airflow detection device on the heater inside the reaction chamber, and communicates with the airflow velocity calculation device; utilizes the movement of the conductor sliding mechanism in the airflow detection device under the action of gas flow to cause resistance change, and then collects current change data through the detection circuit of the airflow detection device, and calculates the local gas flow velocity inside the reaction chamber based on the gas flow velocity detection algorithm. This device can directly and accurately measure the local gas flow velocity inside the reaction chamber, solves the problem that the prior art cannot accurately control and optimize the gas flow, and provides strong support for the accurate control and optimization of the semiconductor degumming process. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram showing the electrical connection of a device for detecting the airflow velocity inside a reaction chamber according to one embodiment of the present invention.

[0017] Figure 2 Shown is a side view of an airflow detection device in one embodiment of the present invention.

[0018] Figure 3 Shown is a top view of an airflow detection device in one embodiment of the present invention.

[0019] Figure 4 It is a front view showing an elastic member connected to a rectangular conductor in one embodiment of the present invention.

[0020] Figure 5 It is a schematic diagram of a rectangular conductor under wind force in one embodiment of the present invention.

[0021] Figure 6It is a schematic diagram of a rectangular conductor under wind force in one embodiment of the present invention.

[0022] Figure 7 Shown is a schematic structural diagram of an electronic terminal in an embodiment of the present invention. DETAILED DESCRIPTION

[0023] The following describes the embodiments of the present invention by specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0024] It should be noted that in the following description, reference is made to the accompanying drawings, which describe several embodiments of the present invention. It should be understood that other embodiments may also be used, and that mechanical composition, structure, electrical and operational changes may be made without departing from the spirit and scope of the present invention. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present invention is limited only by the claims of the published patents. The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. Spatially related terms, such as "upper", "lower", "left", "right", "below", "below", "lower", "above", "upper", etc., may be used in the text to facilitate the description of the relationship between an element or feature shown in the figure and another element or feature.

[0025] Throughout the specification, when a part is said to be "connected" to another part, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a part is said to "include" a certain constituent element, unless otherwise stated, it does not exclude other constituent elements, but means that other constituent elements may be included.

[0026] The terms first, second and third mentioned herein are used to describe various parts, components, regions, layers and / or segments, but are not limited thereto. These terms are only used to distinguish a certain part, component, region, layer or segment from other parts, components, regions, layers or segments. Therefore, the first part, component, region, layer or segment described below may refer to the second part, component, region, layer or segment within the scope of the present invention.

[0027] Furthermore, as used in this article, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless there is an indication to the contrary in the context. It should be further understood that the terms "comprise", "include" indicate the presence of the described features, operations, elements, components, items, kinds, and / or groups, but do not exclude the presence, occurrence or addition of one or more other features, operations, elements, components, items, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" means "any of the following: A; B; C". "A, B and / or C" means "any of the following: A and B; A and C; B and C; A, B and C". Exceptions to this definition will only occur when the combination of elements, functions or operations is inherently mutually exclusive in some way.

[0028] The present invention provides a device for detecting the airflow velocity inside a reaction chamber, wherein the airflow detection device is arranged on a heater inside the reaction chamber and is connected to a communication device for calculating the airflow velocity; the movement of a conductor sliding mechanism in the airflow detection device under the action of gas flow causes a change in resistance, and then the current change data is collected through the detection circuit of the airflow detection device, and the local gas flow velocity inside the reaction chamber is calculated based on the gas flow velocity detection algorithm. This device can directly and accurately measure the local gas flow velocity inside the reaction chamber, solving the problem that the prior art cannot accurately control and optimize the gas flow, and provides strong support for the accurate control and optimization of the semiconductor degumming process.

[0029] The following is a detailed description of the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.

[0030] like Figure 1 A schematic diagram showing electrical connections of a device for detecting air flow velocity inside a reaction chamber according to an embodiment of the present invention is shown.

[0031] The airflow velocity detection device inside the reaction chamber comprises: an airflow detection device 1 and an airflow velocity calculation device 2; the airflow detection device 1 is in communication connection with the airflow velocity calculation device 2;

[0032] The airflow detection device 1 is specially arranged on the heater in the reaction chamber. An air pump is arranged at the center of the heater. The air pump draws air, causing the gas above the heater to flow, that is, the airflow inside the reaction chamber begins to flow. The airflow detection device 1 is arranged on the side of the heater and can sense the wind force formed by the airflow on the air pump side. Figure 2It is a side cross-sectional view of the airflow detection device 1 arranged on the heater. If the airflow detection device 1 is arranged on the left side of the heater, when the air pump of the heater is pumping air, the airflow detection device 1 can sense the wind force blowing from the right to the left formed by the airflow on its right side; similarly, if the airflow detection device 1 is arranged on the right side of the heater, when the air pump of the heater is pumping air, the airflow detection device 1 can sense the wind force blowing from the left to the right formed by the airflow on its left side; this special layout ensures that the detection device can directly sense the flow changes of the local gas in the reaction chamber and respond accordingly to the local gas flow conditions inside the reaction chamber.

[0033] The airflow detection device 1 comprises: a conductor sliding mechanism 10, a fixed voltage power supply 11 and an ammeter 12; the conductor sliding mechanism 10, the fixed voltage power supply 11 and the ammeter 12 are sequentially connected in series to form a closed detection circuit;

[0034] The conductor sliding mechanism 10 is used to drive the conductor to move on the guide rail when the gas flows inside the reaction chamber, causing the resistance of the conductor sliding mechanism to change, so that the current of the detection circuit changes;

[0035] The fixed voltage power supply 11 is used to provide a fixed voltage for the detection circuit, thereby ensuring the normal operation of the detection circuit and the accurate collection of current data.

[0036] The ammeter 12 is responsible for collecting and recording the current data in the detection circuit in real time. These data will be transmitted to the air flow velocity calculation device 2 for subsequent gas flow velocity calculation.

[0037] The gas flow velocity calculation device 2 is used to calculate the local gas flow velocity inside the reaction chamber according to the current data of the ammeter based on the gas flow velocity detection algorithm.

[0038] The working process of the device for detecting the airflow velocity inside the reaction chamber includes:

[0039] When the gas inside the reaction chamber starts to flow, it interacts with the conductor of the conductor sliding mechanism 10 to generate a force. This force drives the conductor to move on the guide rail; as the conductor moves on the guide rail, it changes the resistance value in the detection circuit. The change in resistance value will further cause the change in the current in the detection circuit. In this way, the mechanical quantity of gas flow is converted into an electrical quantity. Next, by measuring the magnitude of the current and using the kinetic equation to calculate the gas flow rate at that location.

[0040] The specific mechanical structure of the airflow detection device is now described in conjunction with the following specific embodiments.

[0041] In one embodiment, if Figure 3As shown, the conductor sliding mechanism 10 includes a guide rail structure 101 , a conductor 102 , an elastic component 103 and an insulating fixing block 104 .

[0042] The guide rail structure 101 has a guide rail extending from the bottom to the top, and the bottom of the guide rail is fixed on the insulating fixed object block 104. This structure provides a sliding path for the conductor 102. And the sliding track direction includes two directions from the bottom to the top of the guide rail and from the top to the bottom of the guide rail. The guide rail structure 101 is made of conductive material, such as copper.

[0043] The conductor 102 is slidably connected to the sliding track of the guide rail structure 101 and can slide on the guide rail along the direction of the sliding track. The conductor 102 is made of a conductive material, such as copper.

[0044] The two ends of the elastic component 103 are respectively connected to the insulating fixed object block 104 and the conductor 102. When the conductor 102 moves under the action of an external force, a force will be generated to act on the elastic component, and the elastic component will be deformed, thereby causing the conductor to slide to a corresponding position on the guide rail.

[0045] The insulating fixing block 104 has a fixing surface, which is used to fix the bottom end of the guide rail structure 101 and the elastic component 103 on the fixing surface and provide a stable support. The working principle of this conductor sliding mechanism is:

[0046] When the wind force generated by the airflow inside the reaction chamber acts on the conductor 102, the conductor 102 moves. Since the conductor 102 is connected to the elastic component 103, the conductor 102 gives the elastic component 103 a thrust or a pull, so that the elastic component 103 is deformed. Since the conductor 102 is subjected to the combined action of the wind force and the spring elastic force, it slides to the corresponding position along the sliding track direction on the guide rail. Because a variable resistance connection is formed between the guide rail of the guide rail structure 101 and the conductor, when the conductor 102 moves, the resistance value of this connection will change accordingly. As the conductor 102 slides on the guide rail, this movement process not only changes the relative position between the conductor 102 and the guide rail, but also causes the change of the guide rail length in the access circuit. Since the guide rail itself has a certain resistance characteristic, the change of the guide rail length in the access circuit will directly affect the resistance value of the entire conductor sliding mechanism 10. This change in resistance value further causes the change of the current in the detection circuit. Since the detection circuit is a closed loop, which contains components such as a fixed voltage power supply and an ammeter, the change in resistance value will directly affect the current size in the circuit. The ammeter can capture this current change in real time and convert it into electrical signals for transmission and processing.

[0047] In one embodiment, in the device for detecting the airflow velocity inside the reaction chamber, the design of the conductor 102 is also crucial. Regarding the contact direction between the airflow and the airflow detection device 1, the heater is evacuated by the air pump, and the airflow from all directions is generated above the air pump. The conductor senses the airflow on the air pump side to form a wind force in the corresponding direction acting on the conductor, thereby moving the conductor. In order to ensure that the conductor 102 can accurately respond to the airflow in different directions inside the reaction chamber, we specially designed a plurality of effective contact surfaces for the conductor 102 to sense the wind force in the corresponding direction formed by the airflow on the air pump side. They enable the wind force formed by the airflow in different directions inside the reaction chamber to act on them. The effective contact surface is generally a surface perpendicular to the guide rail.

[0048] In one embodiment, the conductor 102 is a rectangular conductor, and the two side surfaces parallel to the sliding direction of the track are sliding surfaces in contact with the guide rail, and the side surfaces parallel to and perpendicular to the sliding track direction are two functional contact surfaces including: a first functional contact surface and a second functional contact surface. Preferably, when designing a rectangular conductor, the first functional contact surface and the second functional contact surface are designed as surfaces with relatively large areas in the side surfaces of the rectangular conductor. For example, the length and width of a rectangular conductor have larger values ​​than its height, and the length of the two functional contact surfaces will be equal to the length of the rectangle, and the width will be equal to the width of the rectangle, to ensure that they are sides with larger areas.

[0049] The first active contact surface is connected to the elastic component 103. Preferably, the specific connection position may be the middle part of the edge of the first active contact surface, such as Figure 4 , a front view of the elastic component 103 connected to the rectangular conductor. The first active contact surface, the guide rail and the fixed surface of the insulating fixed object block 104 form a receiving space, the size of which can change with the movement of the rectangular conductor; that is, when the rectangular conductor slides along the direction from the bottom end to the top end of the guide rail, it will expand the receiving space, and when the rectangular conductor slides along the direction from the top end to the bottom end of the guide rail, it will compress the receiving space, thereby further changing the resistance value of the entire conductor sliding mechanism 10.

[0050] like Figure 5 When the wind force formed by the airflow inside the reaction chamber blows toward the first contact surface, the conductor is pushed to slide on the guide rail in the direction from the bottom end to the top end of the guide rail. Figure 6 When the wind force formed by the airflow inside the reaction chamber blows toward the second active contact surface, the conductor is pushed to slide on the guide rail in a direction from the bottom end to the top end of the guide rail.

[0051] In one embodiment, the guide rail structure 101 includes: two identical and parallel guide rails, and the bottom ends of the guide rails are fixed to the fixed surface of the fixed object; the two sliding surfaces of the rectangular conductor are in contact with the two guide rails respectively, and the two ends of the rectangular conductor are slidably connected with the two guide rails. The two ends of the rectangular conductor slide synchronously on the two guide rails so that the rectangular conductor slides along the direction of the sliding track. When the rectangular conductor slides to the middle position of the guide rail, it forms an H-shaped structure with the two guide rails. The design of the guide rail is set according to specific requirements, such as the material, weight and size of the guide rail.

[0052] In one embodiment, the insulating fixing block 104 is a rectangular parallelepiped structure.

[0053] In one embodiment, the elastic component 103 is a spring, the deformation direction of which is parallel to the sliding direction of the track, and the elastic component 103 maintains its initial shape when there is no gas flow in the reaction chamber.

[0054] In one embodiment, when the wind force generated by the gas flow inside the reaction chamber acts on the first active contact surface of the rectangular conductor and thereby drives the rectangular conductor to move toward the top end of the guide rail, the spring stretches, causing the rectangular conductor to slide on the guide rail toward the top end of the guide rail to a corresponding position, causing the resistance of the conductor sliding mechanism to increase; when the wind force generated by the gas flow inside the reaction chamber acts on the second active contact surface of the rectangular conductor and drives the rectangular conductor to move toward the bottom end of the guide rail, the spring compresses, causing the rectangular conductor to slide on the guide rail toward the bottom end of the guide rail to a corresponding position, causing the resistance of the conductor sliding mechanism to decrease; when there is no gas flow inside the reaction chamber, the spring returns to its initial shape, and the rectangular conductor is located at the initial position.

[0055] Specifically, when the air pump of the heater is pumping air, the wind force formed by the airflow on the air pump side blowing from the air pump side to the direction of the rectangular conductor acts on the first action contact surface of the rectangular conductor, and the spring stretches, causing the rectangular conductor to slide to the corresponding position toward the top of the guide rail, causing the resistance of the conductor sliding mechanism to increase. Similarly, when the air pump of the heater is pumping air, the wind force formed by the airflow on the air pump side blowing from the air pump side to the direction of the rectangular conductor acts on the second action contact surface of the rectangular conductor, and the spring is compressed, causing the rectangular conductor to slide to the corresponding position toward the bottom of the guide rail, causing the resistance of the conductor sliding mechanism to decrease. That is, no matter which side of the heating plate the airflow detection device is on, the wind force from the air pump side can be sensed through only one action contact surface, and the airflow velocity can be detected.

[0056] In one embodiment, the air flow velocity calculation device 2 comprises:

[0057] The data acquisition module is used to obtain the device design parameters and the current current reading of the ammeter; wherein the device design parameters are related to the specific design of the conductor sliding mechanism and can be obtained in advance. The device design parameters include: the fixed voltage, the initial resistance of the detection circuit, the rectangular conductor parameters, the spring parameters, the airflow density and the guide rail parameters; specifically, the rectangular conductor parameters include the mass of the rectangular conductor and the area of ​​the effective contact surface of the rectangular conductor; the spring parameters are the spring coefficient; the guide rail parameters include the conductivity of the guide rail and the cross-sectional area of ​​the guide rail.

[0058] The gas flow velocity calculation module is connected to the data acquisition module and is used to calculate the current local gas flow velocity inside the reaction chamber based on the gas flow velocity detection algorithm, according to the device design parameters and the current current reading of the ammeter.

[0059] In a specific embodiment, the gas flow rate detection algorithm is obtained by derivation. The following is the formula required for our derivation:

[0060] From Ohm's law we get:

[0061] ; (1)

[0062] Where I is the current, U is the voltage, is the initial resistance, and R is the resistance increment.

[0063] The kinetic equation is:

[0064] ; (2)

[0065] Among them, x is the sliding distance of the rectangular conductor, a is the acceleration of the rectangular conductor after being blown by the wind, and t is the time.

[0066] From the mass equation:

[0067] ; (3)

[0068] Where m is the mass of gas acting on the rectangular conductor, ρ is the gas flow density, S is the cross-sectional area of ​​the guide rail, is the air flow velocity, is the area of ​​the effective contact surface of the rectangular conductor;

[0069] ; (4)

[0070] Where σ is the conductivity of the rail.

[0071] From Newton's second law:

[0072] ; (5)

[0073] in, is the mass of the rectangular conductor, and k is the spring constant.

[0074] ; (6)

[0075] ; (7)

[0076] ; (8)

[0077] Based on the above formula derivation, the gas flow rate detection algorithm includes:

[0078] ; (9)

[0079] That is, the current local gas flow rate inside the reaction chamber is calculated by the fixed voltage provided by the fixed voltage power supply, the current current reading of the ammeter, the initial resistance of the conductor sliding mechanism, the mass of the rectangular conductor, the spring constant, the current time, the air flow density, the area of ​​the effective contact surface of the rectangular conductor, the conductivity of the guide rail, and the cross-sectional area of ​​the guide rail.

[0080] It should be noted that the conductor will generate friction force when sliding, but since the air pump of the heater has a relatively strong suction force, the friction force can be ignored compared to the wind force generated by the suction airflow, and is therefore not considered.

[0081] The airflow velocity calculation device provided in the embodiment of the present invention can be implemented on the terminal side or the server side. As for the hardware structure of the electronic terminal, please refer to Figure 7 , is an optional hardware structure diagram of an electronic terminal 1000 provided in an embodiment of the present invention. The electronic terminal 1000 may be a mobile phone, a computer device, a tablet device, a personal digital processing device, a factory background processing device, etc. The electronic terminal 1000 includes: at least one processor 1001, a memory 1002, at least one network interface 10010 and a user interface 1009. The various components in the device are coupled together through a bus system 1005. It can be understood that the bus system 1005 is used to achieve connection and communication between these components. In addition to the data bus, the bus system 1005 also includes a power bus, a control bus and a status signal bus. However, for the sake of clarity, in Figure 7 In the specification, various buses are labeled as bus systems.

[0082] The user interface 1009 may include a display, a keyboard, a mouse, a trackball, a click gun, keys, buttons, a touch pad or a touch screen.

[0083] It is understood that the memory 1002 can be a volatile memory or a non-volatile memory, and can also include both volatile and non-volatile memories. Among them, the non-volatile memory can be a read-only memory (ROM), a programmable read-only memory (PROM), which is used as an external cache. By way of exemplary but not limiting explanation, many forms of RAM are available, such as static random access memory (SRAM), synchronous static random access memory (SSRAM). The memory described in the embodiments of the present invention is intended to include but is not limited to these and any other suitable categories of memory.

[0084] The memory 1002 in the embodiment of the present invention is used to store various types of data to support the operation of the electronic terminal 1000. Examples of these data include: any executable program used to operate on the electronic terminal 1000, such as an operating system 10021 and an application 10022; the operating system 10021 includes various system programs, such as a framework layer, a core library layer, a driver layer, etc., for implementing various basic services and processing hardware-based tasks. The application 10022 can include various applications, such as a media player (MediaPlayer), a browser (Browser), etc., for implementing various application services. The prostatitis ultrasound drug treatment planning system provided by the embodiment of the present invention can be included in the application 10022.

[0085] The method disclosed in the above embodiment of the present invention can be applied to the processor 1001, or implemented by the processor 1001. The processor 1001 may be an integrated circuit chip with signal processing capabilities. In the implementation process, each step of the above method can be completed by the hardware integrated logic circuit in the processor 1001 or the instruction in the form of software. The above processor 1001 may be a general processor, a digital signal processor (DSP, Digital Signal Processor), or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. The processor 1001 can implement or execute the various methods, steps and logic block diagrams disclosed in the embodiment of the present invention. The general processor 1001 can be a microprocessor or any conventional processor, etc. In combination with the steps of the accessory optimization method provided in the embodiment of the present invention, it can be directly embodied as a hardware decoding processor to execute, or it can be executed by a combination of hardware and software modules in the decoding processor. The software module can be located in a storage medium, which is located in a memory, and the processor reads the information in the memory and completes the steps of the above method in combination with its hardware.

[0086] In an exemplary embodiment, the electronic terminal 1000 may be implemented by one or more application specific integrated circuits (ASIC), DSP, programmable logic device (PLD), complex programmable logic device (CPLD) to execute the aforementioned method.

[0087] Those skilled in the art can understand that all or part of the steps of implementing the above-mentioned method embodiments can be completed by hardware related to the computer program. The aforementioned computer program can be stored in a computer-readable storage medium. When the program is executed, the steps of the above-mentioned method embodiments are executed; and the aforementioned storage medium includes: ROM, RAM, magnetic disk or optical disk and other media that can store program codes.

[0088] In the embodiments provided in the present application, the computer readable and writable storage medium may include a read-only memory, a random access memory, an EEPROM, a CD-ROM or other optical disk storage device, a disk storage device or other magnetic storage device, a flash memory, a USB flash drive, a mobile hard disk, or any other medium that can be used to store the desired program code in the form of an instruction or data structure and can be accessed by a computer. In addition, any connection can be appropriately referred to as a computer-readable medium. For example, if the instruction is sent from a website, a server or other remote source using a coaxial cable, an optical fiber cable, a twisted pair, a digital subscriber line (DSL), or wireless technologies such as infrared, radio, and microwaves, the coaxial cable, optical fiber cable, twisted pair, DSL, or wireless technologies such as infrared, radio, and microwaves are included in the definition of the medium. However, it should be understood that computer readable and writable storage media and data storage media do not include connections, carriers, signals, or other temporary media, but are intended to be non-temporary, tangible storage media. Disk and disc, as used in this application, includes compact disc (CD), laser disc, optical disc, digital versatile disc (DVD), floppy disk and Blu-ray disc where disks usually reproduce data magnetically, while discs reproduce data optically with lasers.

[0089] In summary, the device for detecting the airflow velocity inside the reaction chamber of the present invention sets the airflow detection device on the heater inside the reaction chamber and communicates with the airflow velocity calculation device; the movement of the conductor sliding mechanism in the airflow detection device under the action of gas flow causes resistance change, and then the current change data is collected through the detection circuit of the airflow detection device, and the local gas flow velocity inside the reaction chamber is calculated based on the gas flow velocity detection algorithm. This device can directly and accurately measure the local gas flow velocity inside the reaction chamber, solves the problem that the prior art cannot accurately control and optimize the gas flow, and provides strong support for the accurate control and optimization of the semiconductor degumming process. Therefore, the present invention effectively overcomes the various shortcomings in the prior art and has a high industrial utilization value.

[0090] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present invention. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A device for detecting air flow velocity inside a reaction chamber, characterized in that: The device comprises: an airflow detection device and an airflow velocity calculation device; Wherein, the airflow detection device is arranged on the heater in the reaction chamber and is in communication connection with the airflow velocity calculation device; The airflow detection device comprises: a conductor sliding mechanism, a fixed voltage power supply and an ammeter; the conductor sliding mechanism, the fixed voltage power supply and the ammeter are connected in series in sequence to form a detection circuit; The conductor sliding mechanism is used for causing the conductor to be driven to move on the guide rail when the gas flows inside the reaction chamber, causing the resistance of the conductor sliding mechanism to change, so that the current of the detection circuit changes; the conductor sliding mechanism includes a guide rail structure, a conductor, an elastic component and an insulating fixed object block; the guide rail structure has a guide rail extending from the bottom end to the top end, and the bottom end of the guide rail is fixed on the insulating fixed object block; the conductor is slidably connected to the guide rail to slide along the sliding track direction; the two ends of the elastic component are respectively connected to the insulating fixed object block and the conductor, and can be deformed under the action of the conductor; when the wind force generated by the airflow inside the reaction chamber acts on the conductor, the elastic component is driven to deform, so that the conductor slides on the guide rail along the sliding track direction to the corresponding position; the guide rail structure includes: two identical and parallel arranged guide rails, and the bottom ends of the two guide rails are fixed to the fixed surface of the fixed object block; a rectangular guide The two sliding surfaces of the body are respectively in contact with two guide rails, so that the rectangular conductor slides along the sliding track direction; the elastic component is a spring, the deformation direction of which is parallel to the sliding direction of the track, and maintains the initial shape when there is no gas flow inside the reaction chamber; the conductor has an active contact surface, which is used to make the wind force of different directions formed by the airflow inside the reaction chamber act on it, so as to be driven to move along the corresponding sliding direction of the track; the conductor is a rectangular conductor, the two side surfaces parallel to the sliding direction of the track are sliding surfaces in contact with the guide rails, and the two side surfaces parallel to and perpendicular to the sliding track direction are active contact surfaces; the two active contact surfaces include: a first active contact surface and a second active contact surface; wherein the first active contact surface is connected to the elastic component, and the first active contact surface, the guide rail and the fixed surface of the insulating fixed object block form a accommodating space, the size of which can change with the movement of the rectangular conductor; The fixed voltage power supply is used to provide a fixed voltage for the detection circuit; The ammeter is used to collect current data of the detection circuit in real time; The gas flow velocity calculation device is used to calculate the local gas flow velocity inside the reaction chamber according to the current data of the ammeter based on the gas flow velocity detection algorithm; Wherein, the gas flow rate detection algorithm includes: Wherein, v is the current local gas flow rate inside the reaction chamber, U is the fixed voltage provided by the fixed voltage power supply, I is the current current reading of the ammeter, R0 is the initial resistance of the conductor sliding mechanism, M is the mass of the rectangular conductor, k is the spring constant, t is the current time, ρ is the airflow density, S0 is the area of ​​the active contact surface of the rectangular conductor, σ is the conductivity of the guide rail, and S is the cross-sectional area of ​​the guide rail.

2. The device for detecting the airflow velocity inside a reaction chamber according to claim 1, characterized in that: When the wind force generated by the gas flow inside the reaction chamber acts on the first active contact surface of the rectangular conductor to drive the rectangular conductor to move toward the top end of the guide rail, the spring stretches, causing the rectangular conductor to slide on the guide rail to the corresponding position in the direction of the top end of the guide rail, causing the resistance of the conductor sliding mechanism to increase; when the wind force generated by the gas flow inside the reaction chamber acts on the second active contact surface of the rectangular conductor to drive the rectangular conductor to move toward the bottom end of the guide rail, the spring is compressed, causing the rectangular conductor to slide on the guide rail to the corresponding position in the direction of the bottom end of the guide rail, causing the resistance of the conductor sliding mechanism to decrease; when there is no gas flow inside the reaction chamber, the spring is in the initial shape and the rectangular conductor is at the initial position.

3. The device for detecting the airflow velocity inside a reaction chamber according to claim 2, characterized in that: The air flow velocity calculation device comprises: A data acquisition module, used to acquire device design parameters and the current current reading of the ammeter; wherein the device design parameters include: the fixed voltage, the initial resistance of the detection circuit, rectangular conductor parameters, spring parameters, airflow density and guide rail parameters; The gas flow velocity calculation module is connected to the data acquisition module and is used to calculate the current local gas flow velocity inside the reaction chamber based on the gas flow velocity detection algorithm, according to the device design parameters and the current current reading of the ammeter.

4. The device for detecting the airflow velocity inside a reaction chamber according to claim 1, characterized in that: The insulating fixing block is a rectangular parallelepiped structure.

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