Mild and efficient water-based chip cleaning agent as well as preparation method and application thereof

Abstract

The invention relates to the technical field of industrial cleaning agents, in particular to a mild and efficient water-based chip cleaning agent and a preparation method and application thereof.The cleaning agent is prepared from, by mass, 55-65 parts of organic solvent, 4-6 parts of acid builder, 2-4 parts of organic amine builder, 1-3 parts of salt builder and 28-35 parts of deionized water. Wherein under the combined action of the acid builder, the organic amine builder and the salt builder, a complexing salt component is formed, oxide skin on the surface of a chip can be removed, and the surface of the chip cleaned by the cleaning agent is not prone to being oxidized in air; by adding the organic solvent, impurities such as oil stains and scaling powder can be effectively removed, so that the impurities such as oil stains, oxide skin and scaling powder on the surface of the chip are efficiently removed, and the surface cleanliness of the chip is remarkably improved.

Description

Technical Field

[0001] The invention relates to the technical field of industrial cleaning agents, and in particular to a mild and efficient water-based chip cleaning agent and a preparation method and application thereof. Background Art

[0002] Although industrial cleaning products are developing rapidly, they are still facing very serious problems. Cleaning products are mainly divided into two categories: water-based cleaning agents and solvent-based cleaning agents. Among them, solvent-based cleaning agents are mainly based on organic solvents. Due to the high price of organic solvents, the cost of solvent-based cleaning agents also remains at a high level. As far as the current solvent-based cleaning agents are concerned, they can usually only be used to remove organic substances such as solder paste, rosin and red glue, but cannot remove the oxide scale on copper materials. The two functions cannot be combined; and there are problems such as strong odor, fast volatility, low flash point, high pH value, difficult wastewater treatment and easy corrosion of workpieces during use, which can easily cause adverse effects on the environment and users. Water-based cleaning agents are mainly based on water, and through the compounding of inorganic salt detergents, surfactants and other additives, they play the role of degreasing and deashing. Compared with solvent-based cleaning agents, water-based cleaning agents have less odor, less pollution and higher safety.

[0003] Water-based cleaning agents are mainly divided into acidic water-based cleaning agents, alkaline water-based cleaning agents and neutral water-based cleaning agents according to different pH values. Among them, alkaline water-based cleaning agents have the characteristics of good permeability and emulsification, but when used for chip cleaning, after reacting with rosin for a period of time and recycling, a large amount of foam will be generated, which will overflow in the tank and cannot be cleaned. Acidic water-based cleaning agents contain more strong acid substances, have a strong pungent smell and are easy to corrode workpieces. In comparison, neutral water-based cleaning agents are safer and have less environmental pollution, but they have poor degreasing performance, poor rust prevention ability and cannot remove rust and scale, and the problem of residues during the cleaning process needs to be solved. Summary of the invention

[0004] In view of the problems existing in the prior art, the present invention proposes a mild and efficient water-based chip cleaning agent and a preparation method and application thereof.

[0005] In order to solve the above technical problems, the technical solution proposed by the present invention is: a mild and efficient water-based chip cleaning agent, which includes the following raw materials in mass fractions: 55-65 parts of organic solvent, 4-6 parts of acid builder, 2-4 parts of organic amine builder, 1-3 parts of salt builder, and 28-35 parts of deionized water.

[0006] Furthermore, the organic solvent is at least one of diethylene glycol butyl ether, propylene glycol phenyl ether, diethylene glycol ethyl ether, tripropylene glycol monobutyl ether, and dipropylene glycol monobutyl ether.

[0007] In the present invention, the organic solvent is prepared by compounding propylene glycol phenyl ether, diethylene glycol ethyl ether and tripropylene glycol monobutyl ether in a mass ratio of 1:1-3:0-3.

[0008] Furthermore, the acid builder is at least one of octylphosphonic acid, EDTA, DTPA, citric acid and malic acid.

[0009] Furthermore, the organic amine builder is at least one of tetramethylethylenediamine, diethylenetriamine, N-butyltriethanolamine and methyldiethanolamine.

[0010] Furthermore, the salt builder is sodium tripolyphosphate or sodium dihydrogen phosphate.

[0011] Furthermore, the cleaning agent also includes a wetting agent, and the wetting agent is at least one of Triton X-100, sodium dodecylbenzene sulfonate, sodium dodecyl sulfate, fatty alcohol polyoxyethylene ether or 1-dodecyl-3-methylimidazolium bromide.

[0012] In the present invention, the above-mentioned wetting agent components are all non-toxic, harmless, and less irritating, and have certain surface activity, effectively reducing the surface tension of the aqueous solution. In order to achieve a better compounding effect, the above-mentioned components are compounded, and the wetting agent of the present invention is preferably a combination of fatty alcohol polyoxyethylene ether and 1-dodecyl-3-methylimidazolium bromide, or a combination of sodium dodecylbenzene sulfonate, fatty alcohol polyoxyethylene ether and Triton X-100.

[0013] Furthermore, the mass ratio of the fatty alcohol polyoxyethylene ether and 1-dodecyl-3-methylimidazolium bromide is 8-9: 1. The wetting properties of the fatty alcohol polyoxyethylene ether can be improved by compounding 1-dodecyl-3-methylimidazolium bromide with the fatty alcohol polyoxyethylene ether, and the two have a synergistic effect in reducing the surface tension of the aqueous solution.

[0014] Furthermore, the mass ratio of sodium dodecylbenzene sulfonate, fatty alcohol polyoxyethylene ether and Triton X-100 is 2:2:1-2. Among them, fatty alcohol polyoxyethylene ether and Triton X-100 are non-ionic surfactants, which can partially shield the negative charge through the action of the two, effectively disperse the anionic electrostatic repulsion brought by sodium dodecylbenzene sulfonate, and further enhance the wetting performance of the compound wetting agent on semiconductor chips.

[0015] The present invention also discloses a method for preparing a mild and efficient water-based chip cleaning agent, comprising the following steps:

[0016] (1) adding an acid builder, an organic amine builder and a salt builder into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution;

[0017] (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

[0018] The present invention discloses an application of a mild and efficient water-based chip cleaning agent prepared by the above method in cleaning semiconductor chips. The method of using the cleaning agent for cleaning semiconductor chips is as follows: the water-based chip cleaning agent is prepared into a diluent with a mass concentration of 20-30% with deionized water, and then the diluent is added to 50-60°C, and the semiconductor chip is immersed in the diluent for ultrasonic treatment for 5-20 minutes. After the treatment, the semiconductor chip is rinsed with deionized water for multiple times, and the cleaned semiconductor chip is obtained after drying.

[0019] In summary, compared with the prior art, the present invention achieves the following technical effects:

[0020] (1) The present invention provides a mild and efficient water-based chip cleaning agent, which uses environmentally friendly, non-toxic and pollution-free raw materials, has a neutral pH, will not damage or corrode workpieces, and is environmentally friendly, safe and gentle to use. It is used for cleaning semiconductor chips, and can remove impurities such as oil, oxide scale and flux on the chip surface to a high degree, significantly improving the surface cleanliness of the chip.

[0021] (2) In the present invention, a complexing salt component is formed through the joint action of an acid builder, an organic amine builder and a salt builder, which can remove the oxide scale on the chip surface and make the chip surface not easily oxidized in the air after being cleaned by a cleaning agent, thereby playing a protective role. The addition of an organic solvent can effectively remove impurities such as oil stains and flux, thereby achieving a high surface cleanliness of the chip cleaning.

[0022] (3) In the present invention, by adding the composite wetting agent, the synergistic effect of each component is utilized to effectively reduce the surface tension of the aqueous solution and significantly improve the wetting effect of the cleaning agent on the chip surface. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention are clearly and completely described below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0024] The present invention uses a mild and efficient water-based chip cleaning agent prepared by the following embodiments and comparative examples in cleaning semiconductor chips. The method of using the cleaning agent for cleaning semiconductor chips is specifically as follows: the water-based chip cleaning agent is prepared into a diluent with a mass concentration of 20-30% with deionized water, and then the diluent is added to 50-60°C, and the semiconductor chip is immersed in the diluent for ultrasonic treatment for 5-20 minutes. After the end, the semiconductor chip is rinsed with deionized water for multiple times, and the cleaned semiconductor chip is obtained after drying.

[0025] Example 1

[0026] The present embodiment provides a mild and efficient water-based chip cleaning agent, which comprises the following raw materials in mass fractions: 55 parts of organic solvent, 4 parts of acid builder, 2 parts of organic amine builder, 1 part of salt builder, and 30 parts of deionized water.

[0027] Furthermore, the organic solvent is prepared by compounding propylene glycol phenyl ether and diethylene glycol ethyl ether in a mass ratio of 1:1-3.

[0028] Furthermore, the acid builder is octylphosphonic acid.

[0029] Furthermore, the organic amine builder is methyldiethanolamine.

[0030] Furthermore, the salt builder is sodium dihydrogen phosphate.

[0031] The method for preparing a mild and efficient water-based chip cleaning agent provided in this embodiment comprises the following steps:

[0032] (1) adding an acid builder, an organic amine builder and a salt builder into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution;

[0033] (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

[0034] Example 2

[0035] The present embodiment provides a mild and efficient water-based chip cleaning agent, which includes the following raw materials in mass fractions: 60 parts of organic solvent, 5 parts of acid builder, 3 parts of organic amine builder, 2 parts of salt builder, 2 parts of wetting agent, and 32 parts of deionized water.

[0036] Furthermore, the organic solvent is prepared by compounding propylene glycol phenyl ether, diethylene glycol ethyl ether and tripropylene glycol monobutyl ether in a mass ratio of 1:2:1.

[0037] Furthermore, the acid builder is EDTA.

[0038] Furthermore, the organic amine builder is tetramethylethylenediamine.

[0039] Furthermore, the salt builder is sodium tripolyphosphate.

[0040] Furthermore, the wetting agent is fatty alcohol polyoxyethylene ether.

[0041] The method for preparing a mild and efficient water-based chip cleaning agent provided in this embodiment comprises the following steps:

[0042] (1) adding an acid builder, an organic amine builder, a salt builder and a wetting agent into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution;

[0043] (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

[0044] Example 3

[0045] The present embodiment provides a mild and efficient water-based chip cleaning agent, which includes the following raw materials in mass fractions: 63 parts of organic solvent, 5 parts of acid builder, 4 parts of organic amine builder, 3 parts of salt builder, 2 parts of wetting agent, and 35 parts of deionized water.

[0046] Furthermore, the organic solvent is prepared by compounding propylene glycol phenyl ether, diethylene glycol ethyl ether and tripropylene glycol monobutyl ether in a mass ratio of 1:2:1.

[0047] Furthermore, the acid builder is DTPA.

[0048] Furthermore, the organic amine builder is diethylenetriamine.

[0049] Furthermore, the salt builder is sodium tripolyphosphate.

[0050] Furthermore, the wetting agent is compounded by fatty alcohol polyoxyethylene ether and 1-dodecyl-3-methylimidazolium bromide in a mass ratio of 8.5:1.

[0051] The method for preparing a mild and efficient water-based chip cleaning agent provided in this embodiment comprises the following steps:

[0052] (1) adding an acid builder, an organic amine builder, a salt builder and a wetting agent into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution;

[0053] (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

[0054] Example 4

[0055] This embodiment provides a mild and efficient water-based chip cleaning agent, which includes the following raw materials in mass fractions: 65 parts of organic solvent, 6 parts of acid builder, 3 parts of organic amine builder, 3 parts of salt builder, 2 parts of wetting agent, and 33 parts of deionized water.

[0056] Furthermore, the organic solvent is prepared by compounding propylene glycol phenyl ether, diethylene glycol ethyl ether and tripropylene glycol monobutyl ether in a mass ratio of 1:2:1.

[0057] Furthermore, the acid builder is DTPA.

[0058] Furthermore, the organic amine builder is diethylenetriamine.

[0059] Furthermore, the salt builder is sodium tripolyphosphate.

[0060] Furthermore, the wetting agent is compounded by sodium dodecylbenzene sulfonate, fatty alcohol polyoxyethylene ether and Triton X-100 in a mass ratio of 2:2:1.

[0061] The method for preparing a mild and efficient water-based chip cleaning agent provided in this embodiment comprises the following steps:

[0062] (1) adding an acid builder, an organic amine builder, a salt builder and a wetting agent into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution;

[0063] (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

[0064] Comparative Example 1

[0065] The difference between this comparative example and Example 3 is that the cleaning agent in this comparative example uses N-methylpyrrolidone instead of the organic solvent in Example 3.

[0066] Comparative Example 2

[0067] The difference between this comparative example and Example 3 is that no salt builder is added to the cleaning agent in this comparative example, and the other raw material compositions are adjusted in equal proportions.

[0068] Comparative Example 3

[0069] The difference between this comparative example and Example 3 is that the penetrant JFC is used in this comparative example to replace the wetting agent in Example 3.

[0070] The present invention conducts index tests on the chip cleaning agents prepared in the above-mentioned embodiments 1-4 and comparative examples 1-3. The test process is: use the chip cleaning agent to dilute it into a 30% dilution solution to open a groove, increase the temperature to 55°C, turn on the ultrasonic treatment for 10 minutes, clean 400 pieces of chip products, dry and cool the chip products after cleaning, randomly inspect 10%, observe the surface cleanliness (such as oil stains, oxide scale or flux residue) under a 50x magnifying glass, and then measure the water drop angle; the specific test results are shown in the following table.

[0071]

[0072] It can be seen from the data in the above table that the mild and efficient water-based chip cleaning agent provided by Examples 1-4 of the present invention is used for cleaning semiconductor chips. It has good cleaning ability for impurities such as oil, oxide scale and flux on the chip surface, significantly improves the surface cleanliness of the chip, and the water drop angle test is all below 65°, indicating that the cleaning agent has a good wetting effect on the chip surface, which helps to improve the cleaning effect and reduce residual impurities.

[0073] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A mild and efficient water-based chip cleaning agent, characterized by: The cleaning agent comprises the following raw materials in mass fractions: 55-65 parts of organic solvent, 4-6 parts of acid builder, 2-4 parts of organic amine builder, 1-3 parts of salt builder and 28-35 parts of deionized water.

2. The mild and efficient water-based chip cleaning agent according to claim 1 is characterized by: The organic solvent is at least one of diethylene glycol butyl ether, propylene glycol phenyl ether, diethylene glycol ethyl ether, tripropylene glycol monobutyl ether, and dipropylene glycol monobutyl ether.

3. The mild and efficient water-based chip cleaning agent according to claim 2 is characterized in that: The organic solvent is prepared by compounding propylene glycol phenyl ether, diethylene glycol ethyl ether and tripropylene glycol monobutyl ether in a mass ratio of 1:1-3:0-3.

4. The mild and efficient water-based chip cleaning agent according to claim 1 is characterized in that: The acid builder is at least one of octylphosphonic acid, EDTA, DTPA, citric acid and malic acid.

5. The mild and efficient water-based chip cleaning agent according to claim 1 is characterized by: The organic amine builder is at least one of tetramethylethylenediamine, diethylenetriamine, N-butyltriethanolamine and methyldiethanolamine.

6. The mild and efficient water-based chip cleaning agent according to claim 1 is characterized by: The salt builder is sodium tripolyphosphate or sodium dihydrogen phosphate.

7. The mild and efficient water-based chip cleaning agent according to claim 1 is characterized by: The cleaning agent also includes a wetting agent, and the wetting agent is at least one of Triton X-100, sodium dodecylbenzene sulfonate, sodium dodecyl sulfate, fatty alcohol polyoxyethylene ether or 1-dodecyl-3-methylimidazolium bromide.

8. The mild and efficient water-based chip cleaning agent according to claim 7 is characterized by: The wetting agent is a combination of fatty alcohol polyoxyethylene ether and 1-dodecyl-3-methylimidazolium bromide, or a combination of sodium dodecylbenzene sulfonate, fatty alcohol polyoxyethylene ether and Triton X-100.

9. The method for preparing a mild and efficient water-based chip cleaning agent according to any one of claims 1 to 8, characterized in that: The preparation method comprises the following steps: (1) adding an acid builder, an organic amine builder and a salt builder into deionized water in sequence according to the formula ratio, stirring and mixing thoroughly to obtain a mixed solution; (2) Adding an organic solvent to the mixed solution obtained in step (1) and stirring thoroughly to obtain the water-based chip cleaning agent.

10. Use of the mild and efficient water-based chip cleaning agent as described in any one of claims 1 to 8 in cleaning semiconductor chips.

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