A detection device and method based on laser intensity in a vacuum environment

Abstract

The application discloses a kind of based on vacuum environment laser intensity detection device and detection method, including cavity, photoelectric sensor and detector;The periphery of cavity is provided with at least two through holes and one air extraction hole;Wherein, two through holes form channel for laser transmission between them, and two through holes can be communicated with external device by pipeline;Air extraction hole is connected with external vacuumizing equipment;Photoelectric sensor is movably installed in cavity, and can be switched to the middle part of channel, to cut off the measurement state of optical path or switch to the idle state of channel optical path unblocked;Detector is electrically connected with photoelectric sensor.The application relates to the technical field of laser intensity detection, by the above setting, the intensity of laser formed under vacuum environment is detected by switching the position state of photoelectric sensor, without breaking vacuum or changing optical path, to realize the detection of light intensity without interfering with the original optical path in the device.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of optical propagation, and relates to a laser intensity detection device and method. BACKGROUND

[0002] In a specific scenario, people often need to detect the intensity of a specific waveband laser in the current environment to cooperate with debugging to ensure that the specific laser can be applied while not interfering with other components, i.e., the intensity of the specific laser is within a certain threshold range. Specifically, in the semiconductor manufacturing industry, as the manufacturing requirements and precision of chips gradually increase, it is often necessary to control a laser to emit a laser pulse to bombard a metal target droplet to obtain extreme ultraviolet light, and then perform subsequent photolithography work through the extreme ultraviolet light. However, since the extreme ultraviolet light can only propagate in a vacuum, how to quickly obtain extreme ultraviolet light that meets the application requirements without damaging other components in the device during debugging and use has become a technical problem to be solved. Similarly, in the optical research and work in the vacuum ultraviolet waveband to soft X-ray waveband and special atmosphere, it is also necessary to detect the light intensity without affecting the vacuum or low-pressure atmosphere.

[0003] Therefore, a laser intensity detection device and method based on a vacuum environment are needed to solve the above problems. SUMMARY

[0004] The present application aims to at least solve one of the technical problems in the prior art of measuring laser intensity in a vacuum; for this purpose, the present application proposes a laser intensity detection device and method based on a vacuum environment to enable detection of the intensity of the laser formed in the vacuum environment without destroying the vacuum or changing the optical path, so as to quickly obtain the required specific intensity laser. The present application sets a cavity and a photoelectric sensor, and the cavity is provided with two through holes for forming a laser passage and an air extraction hole, and the two through holes can be connected with an external device to form a sealed chamber, so that a vacuum device can be connected to the air extraction hole to form a vacuum environment, thereby meeting the requirements of specific laser transmission and intensity detection. The position relationship between the photoelectric sensor and the passage is used to respectively complete the conversion of laser intensity into an electrical signal and the output of the laser, and then a detector electrically connected to the photoelectric sensor is used to indirectly reflect the laser intensity through the detector reading. In the above process, the laser intensity in the vacuum environment can be detected by switching the position state of the photoelectric sensor without destroying the vacuum or changing the optical path, so as to complete the detection of the light intensity without interfering with the original optical path in the device, thereby achieving the purpose of quickly obtaining the specific intensity laser.

[0005] To achieve the above object, the first aspect of the present application provides a detection device based on the intensity of laser in vacuum environment, comprising a cavity, a photoelectric sensor and a detector.

[0006] The cavity is provided with at least two through holes and one air outlet hole in the same horizontal plane.

[0007] The two through holes form a channel for laser transmission, and the two through holes can be connected with external devices through pipelines, so that the cavity forms a sealed chamber with the air outlet hole.

[0008] The air outlet hole is connected with an external vacuum equipment to form a vacuum environment inside the sealed chamber.

[0009] The photoelectric sensor is movably installed in the cavity and can be switched to a measurement position of the middle section of the channel to cut off the light path or to an idle state of the channel with an open light path.

[0010] When the photoelectric sensor is switched to the middle section of the channel, it is used to receive the laser transmitted into the channel and form corresponding parameter information.

[0011] The detector is electrically connected with the photoelectric sensor for visual reading of the parameter information.

[0012] Further, the top of the cavity is provided with a rotary switching component.

[0013] One end of the rotary switching component extends into the cavity and is connected with the photoelectric sensor for switching the relative position between the photoelectric sensor and the channel.

[0014] Further, the rotary switching component comprises a magnetic fluid rotary sealing device and a support connecting plate.

[0015] The output end of the magnetic fluid rotary sealing device extends into the cavity and is fixedly connected with the support connecting plate to drive the support connecting plate to rotate in the vacuum environment.

[0016] The photoelectric sensor is arranged on one side of the support connecting plate.

[0017] The side of the support connecting plate on which the photoelectric sensor is installed can be rotated to be perpendicular or parallel to the channel.

[0018] The support connecting plate is made of polytetrafluoroethylene material, and the connection between the support connecting plate and the photoelectric sensor is provided with insulating glue.

[0019] Further, a limiting plate is fixedly installed in the cavity.

[0020] When the support connecting plate rotates to abut against the limiting plate, the support connecting plate is just perpendicular to the channel.

[0021] Further, the cavity comprises a top-opened shell and a knife-edge flange;

[0022] The shell is made of stainless steel, and the through hole and the air extraction hole are arranged on the shell.

[0023] The knife-edge flange is sealingly connected with the shell.

[0024] One end of the rotary switching assembly extends to the inside of the shell through the knife-edge flange to be connected with the photoelectric sensor.

[0025] Further, the upper surface of the knife-edge flange is formed with a connecting port connected with the detector.

[0026] The connecting port is made of insulating ceramic material.

[0027] Further, the photoelectric sensor is a photodiode.

[0028] The detector is a high-precision current reading meter.

[0029] Further, the three through holes include two through holes for forming channels for laser transmission, and the other through hole is internally provided with an observation window, and the outer side of the observation window is provided with a cover plate.

[0030] Further, the bottom of the cavity is provided with a lifting assembly for adjusting the height of the cavity, so that the laser transmission into the channel can be received by the photoelectric sensor.

[0031] In another aspect, the application also provides a detection method based on laser intensity in a vacuum environment, which uses the detection device based on laser intensity in a vacuum environment as described in the above embodiments, and specifically includes the following steps:

[0032] The two through holes for forming channels are respectively communicated with two external devices, so that the cavity forms a sealed chamber with the air extraction hole.

[0033] The air extraction hole is connected with an external vacuum equipment, so that the sealed chamber forms a vacuum environment.

[0034] A specific laser is formed in one of the external devices, and the specific laser is transmitted into the channel and received by the photoelectric sensor.

[0035] The photoelectric sensor inputs parameter information of the received specific laser into the detector, and the intensity of the specific laser is reflected according to the indication of the detector.

[0036] Compared with the prior art, the present application has the following advantages:

[0037] By setting the cavity and the photoelectric sensor, and setting two through holes and a gas extraction hole around the cavity to form a laser passing channel, and the two through holes being able to communicate with external devices to form a sealed cavity, a vacuum environment can be formed by connecting a vacuum extraction device to the gas extraction hole, thereby meeting the requirements of specific laser transmission and intensity detection. The position relationship between the photoelectric sensor and the channel is used to respectively complete the conversion of laser intensity into an electric signal and the output of laser. Then, the detector electrically connected to the photoelectric sensor is used, so that the laser intensity can be indirectly reflected through the indication of the detector, thereby achieving the purpose of quickly obtaining specific laser within a certain threshold through multiple adjustments by the operator. In this way, the obtained specific laser meets the application requirements while ensuring that it will not cause damage to the internal components.

[0038] In the above process, the laser intensity formed in the vacuum environment can be detected by switching the position state of the photoelectric sensor, without breaking the vacuum or changing the optical path. The detection of light intensity is completed without interfering with the original optical path in the device, achieving the purpose of quickly obtaining specific intensity laser, and ensuring that the laser will not cause damage to the internal device in subsequent applications. BRIEF DESCRIPTION OF DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or the prior art description. Obviously, the drawings in the following description only constitute some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0040] Figure 1 FIG. 1 is a structural schematic diagram of a detection device based on laser intensity in a vacuum environment according to an embodiment of the present application;

[0041] Figure 2 FIG. 2 is a front view of a photoelectric sensor placed in the middle of the channel in the detection device based on laser intensity in a vacuum environment according to an embodiment of the present application;

[0042] Figure 3 FIG. 3 is a side view of a photoelectric sensor placed in the middle of the channel in the detection device based on laser intensity in a vacuum environment according to an embodiment of the present application;

[0043] Figure 4Figure 1 is a front view of the idle state of the photoelectric sensor and the unblocked channel light path in the detection device based on the intensity of the laser in the vacuum environment according to an embodiment of the present application;

[0044] Figure 5 Figure 2 is a flowchart of the method for detecting the intensity of the laser in the vacuum environment according to another embodiment of the present application.

[0045] Reference signs:

[0046] 1, cavity; 11, shell; 12, knife flange; 2, photoelectric sensor; 3, detector; 4, through hole; 5, air exhaust hole; 6, rotary switching assembly; 61, magnetic fluid rotary sealing device; 62, support connecting plate; 7, connecting port; 8, limiting plate. DETAILED DESCRIPTION

[0047] The technical solutions of the present application will be described in detail below with reference to the embodiments. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0048] Embodiment one

[0049] Please refer to Figures 1 to 4 The first aspect of the present application provides a detection device based on the intensity of the laser in the vacuum environment, which comprises a cavity 1, a photoelectric sensor 2 and a detector 3.

[0050] Among them, the cavity 1 is provided with at least two through holes 4 located in the same horizontal plane and an air exhaust hole 5.

[0051] It should be noted that a channel for laser transmission is formed between the two through holes 4, and the two through holes 4 can be connected with external devices through pipelines, so that the cavity 1 forms a sealed chamber with the air exhaust hole 5, so that subsequent air exhaust can be carried out through the air exhaust hole 5 to form a vacuum environment in the sealed chamber for the transmission of specific laser (extreme ultraviolet light).

[0052] Specifically, the air exhaust hole 5 is connected with an external vacuumizing equipment for forming a vacuum environment inside the sealed chamber.

[0053] It should be noted that the air exhaust hole 5 and the through hole 4 are connected with the external vacuumizing equipment or external devices through flanges to ensure the stability of the vacuum environment in the sealed chamber.

[0054] In addition, the photoelectric sensor 2 is movably installed in the cavity 1 and can be switched to a measuring state of cutting off the light path in the middle of the channel or switched to an idle state of unblocking the light path of the channel to receive or output specific laser respectively.

[0055] Specifically, when the photoelectric sensor 2 is switched to the middle of the channel, the laser transmitted into the channel (i.e. specific laser formed in a vacuum environment) is received and corresponding parameter information is formed.

[0056] The detector 3 is electrically connected with the photoelectric sensor 2 for visual reading of the parameter information, converts the light intensity signal into an electric signal by the photoelectric sensor 2, and reads the electric signal by the detector 3. The size of the specific laser intensity is indirectly reflected by the number displayed by the detector 3 (i.e. the larger the laser intensity, the larger the number, and the smaller the laser intensity, the smaller the number), so that the operator can adjust the laser intensity according to the number, so as to quickly obtain the specific intensity laser to ensure that the laser meets the application requirements and does not damage the internal equipment.

[0057] The device sets the cavity 1 and the photoelectric sensor 2, and the cavity 1 is provided with two through holes 4 for forming a laser passing channel and a gas extraction hole 5, and the two through holes 4 can be communicated with external devices to form a sealed chamber, so that a vacuum environment can be formed by connecting a vacuum extraction device through the gas extraction hole 5, thereby meeting the requirements of specific laser transmission and intensity detection. The position relationship between the photoelectric sensor 2 and the channel (i.e. the measuring state when the photoelectric sensor 2 is located in the middle of the channel or the idle state when the light path of the channel is unblocked) is used to respectively complete the conversion of laser intensity into an electric signal and the output of laser. Then, the detector 3 electrically connected with the photoelectric sensor 2 can indirectly reflect the laser intensity through the number displayed by the detector 3, so that the operator can quickly obtain the specific laser within a certain threshold value through multiple adjustments, so that the obtained specific laser meets the application requirements and does not damage the internal components.

[0058] In the above process, the intensity of the laser formed in the vacuum environment can be detected by switching the position state of the photoelectric sensor 2 without breaking the vacuum or changing the light path, so that the light intensity can be detected without interfering with the original light path of the device.

[0059] In further embodiments, a rotary switching component 6 is added to facilitate the switching of the position relationship between the photoelectric sensor 2 and the channel.

[0060] Specifically, the top of the cavity 1 is provided with a rotary switching assembly 6, one end of the rotary switching assembly 6 extends to the inside of the cavity 1 and is connected with the photoelectric sensor 2, for switching the relative position between the photoelectric sensor 2 and the channel.

[0061] The rotary switching assembly 6 includes a magnetic fluid rotary sealing device 61 and a support connecting plate 62.

[0062] The output end of the magnetic fluid rotary sealing device 61 extends into the cavity 1 and is fixedly connected with the support connecting plate 62, so as to drive the support connecting plate 62 to rotate in the vacuum environment.

[0063] Specifically, the photoelectric sensor 2 is arranged on one side of the support connecting plate 62.

[0064] It should be noted that the magnetic fluid rotary sealing device 61 uses the characteristics of magnetic fluid, and the magnet fixes the magnetic fluid around the rotating shaft to form a liquid "O-shaped sealing ring". A magnetic circuit is formed by the magnet, the magnetic pole and the shaft, and the magnetic fluid is injected between the magnetic pole and the shaft to form several liquid sealing rings. Therefore, even if the shaft is rotating at high speed, there is no friction between solids, and it is a dynamic sealing part with very long service life. It is commonly used for sealing of vacuum equipment such as single crystal silicon furnace, vacuum brazing furnace, vacuum melting furnace, chemical vapor deposition, ion plating, liquid crystal regeneration, and sealing of high temperature and high pressure equipment and equipment with high environmental requirements. This is the prior art. By providing the magnetic fluid rotary sealing device 61, the vacuum inside the cavity 1 can be ensured while the position switching of the photoelectric sensor 2 can be realized.

[0065] In this embodiment, the side of the support connecting plate 62 on which the photoelectric sensor 2 is installed can be rotated to be perpendicular or parallel to the channel. When the support connecting plate 62 is perpendicular to the channel, the photoelectric sensor 2 can just receive a specific laser (for example, as shown in Figure 2 and Figure 3 , at this time the photoelectric sensor 2 is in a measuring state), and when the support connecting plate 62 is parallel to the channel, the laser can pass out of the channel smoothly and does not contact the photoelectric sensor 2 (for example, as shown in Figure 4 , at this time the photoelectric sensor 2 is in an idle state).

[0066] The support connecting plate 62 is made of polytetrafluoroethylene, and the connection between the support connecting plate 62 and the photoelectric sensor 2 is provided with insulating glue. By providing insulating glue at the connection between the support connecting plate 62 and the photoelectric sensor 2, the generation of electric charge by the magnetic fluid rotary sealing device 61 when driving the support connecting plate 62 to rotate is prevented, so as to affect the electric signal formed by the photoelectric sensor 2 when receiving the laser, and to cause the problem of inaccurate reading of the detection instrument 3.

[0067] In this embodiment, a limiting plate 8 is fixedly installed inside the cavity 1.

[0068] When the supporting connecting plate 62 rotates to abut against the limiting plate 8, the supporting connecting plate 62 is just perpendicular to the channel. The limiting plate 8 limits the supporting connecting plate 62, ensuring that after the supporting connecting plate 62 rotates to a specific position, the photoelectric sensor 2 can just receive the specific laser (that is, the photoelectric sensor 2 is located in the middle of the channel and is in a measurement state with the light path cut off), thus ensuring the detection effect of the laser intensity.

[0069] In other embodiments, the cavity 1 includes a housing 11 with a top opening and a knife-edge flange 12.

[0070] The housing 11 is made of stainless steel, and the through hole 4 and the air extraction hole 5 are both provided on the housing 11. The knife-edge flange 12 is sealed to the housing 11 to improve the sealing effect.

[0071] Furthermore, one end of the rotary switching assembly 6 extends from the knife-edge flange 12 into the interior of the housing 11 to connect with the photoelectric sensor 2.

[0072] In addition, such as Figure 2 As shown, the upper surface of the knife-edge flange 12 has a connection port 7 that is connected to the detector 3, and the connection port 7 is made of insulating ceramic material to ensure that the parameter information received by the detector 3 is not affected by charged particles in the air, thus ensuring measurement accuracy.

[0073] The photoelectric sensor 2 is configured as a photodiode, and the detector 3 is configured as a high-precision current reading meter.

[0074] In a further embodiment, three through holes 4 are provided, two of which form channels for laser transmission, and the other through hole 4 has an observation window (not shown in the figure) inside, and a cover plate is provided on the outside of the observation window.

[0075] Preferably, the bottom of the cavity 1 is provided with a lifting component (not shown in the figure) for adjusting the height of the cavity 1 so that when the laser beam passes through the channel, it can be received by the photoelectric sensor 2.

[0076] Example 2

[0077] like Figure 5As shown, the embodiment is based on the first embodiment and further proposes a detection method based on laser intensity in a vacuum environment, so as to facilitate the operator to debug and quickly obtain the specific laser within the predetermined threshold range, so that the specific laser can meet the application requirements and ensure that it will not cause damage to the internal components.

[0078] A detection method based on laser intensity in a vacuum environment, specifically comprising the following steps:

[0079] Two through holes 4 for forming the channel are respectively communicated with two external devices, so that the cavity 1 forms a sealed chamber with one suction hole 5.

[0080] The suction hole 5 is connected with an external vacuum device, so that the sealed chamber forms a vacuum environment, meeting the requirements of specific laser transmission and application.

[0081] The specific laser is formed in one of the external devices, and the specific laser is transmitted into the channel and received by the photoelectric sensor 2. It should be noted that the external device should be loaded with a filter to transmit a specific waveband of laser (i.e. specific laser) into the channel, so as to be received by the photoelectric sensor 2 and perform intensity measurement of the thickness.

[0082] The photoelectric sensor 2 inputs the parameter information of the received specific laser to the detector 3, and reflects the intensity of the specific laser according to the indication of the detector 3. Therefore, the specific laser with corresponding intensity can be obtained by setting the indication of the detector 3, such as recording the intensity of the specific laser when it meets the application requirements and does not damage the internal components, converting the intensity into the indication of the detector 3, and then debugging the specific laser according to the indication of the detector 3 to quickly obtain the specific laser that meets the application requirements and does not damage the internal components, achieving the purpose of convenient detection and debugging.

[0083] In addition, in the above process, the detection of laser intensity in a vacuum environment is only completed by controlling the position state of the switching photoelectric sensor 2, that is, the original optical path and vacuum environment of the device are not damaged, so that the function of light intensity detection is realized without interfering with the original optical path in the device.

[0084] The above embodiments are only used to illustrate the technical method of the present application and are not limited. Although the present application has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical method of the present application can be modified or replaced equivalently without departing from the spirit and scope of the technical method of the present application.

Claims

1. A detection device for laser intensity in a vacuum environment, characterized in that, It includes a cavity (1), a photoelectric sensor (2), and a detector (3); The periphery of the cavity (1) is provided with at least two through holes (4) located in the same horizontal plane and one air extraction hole (5). Among them, a channel for laser transmission is formed between the two through holes (4), and the two through holes (4) can be connected to an external device through a pipe, so that the cavity (1) forms a sealed chamber with one of the air extraction holes (5); The air extraction port (5) is connected to an external vacuum pumping device to create a vacuum environment inside the sealed chamber; The photoelectric sensor (2) is movably installed inside the cavity (1) and can be switched to the middle of the channel to be in a measurement state with the optical path cut off or to an idle state with the optical path of the channel open. When the photoelectric sensor (2) is switched to the middle of the channel, it is used to receive the laser transmitted to the channel and form corresponding parameter information; The detector (3) is electrically connected to the photoelectric sensor (2) for visual reading of the parameter information; A rotary switching assembly (6) is provided on the top of the cavity (1). One end of the rotary switching assembly (6) extends into the cavity (1) and is connected to the photoelectric sensor (2) for switching the relative position between the photoelectric sensor (2) and the channel; The rotary switching assembly (6) includes a magnetic fluid rotary sealing device (61) and a support connecting plate (62); the output end of the magnetic fluid rotary sealing device (61) extends into the cavity (1) and is fixedly connected to the support connecting plate (62) to drive the support connecting plate (62) to rotate in the vacuum environment. The photoelectric sensor (2) is disposed on one side of the support connecting plate (62); The side of the support connecting plate (62) on which the photoelectric sensor (2) is installed can be rotated to be perpendicular or parallel to the channel; The support connecting plate (62) is made of polytetrafluoroethylene, and an insulating colloid is provided at the connection between the support connecting plate (62) and the photoelectric sensor (2); A limiting plate (8) is fixedly installed inside the cavity (1); When the support connecting plate (62) rotates to abut against the limiting plate (8), the support connecting plate (62) is just perpendicular to the channel; When the support connecting plate (62) is perpendicular to the channel, the photoelectric sensor (2) can just receive a specific laser. At this time, the photoelectric sensor (2) is in the measurement state. When the support connecting plate (62) is parallel to the channel, the laser can pass smoothly out of the channel and does not contact the photoelectric sensor (2). At this time, the photoelectric sensor (2) is in the idle state. By setting an insulating colloid at the connection between the support connecting plate (62) and the photoelectric sensor (2), it is prevented that the magnetic fluid rotating sealing device (61) generates a charge when it drives the support connecting plate (62) to rotate, thereby affecting the electrical signal formed by the photoelectric sensor (2) when receiving laser, which leads to the problem of inaccurate readings by the detector (3). The limiting plate (8) limits the support connecting plate (62) to ensure that after the support connecting plate (62) rotates to a specific position, the photoelectric sensor (2) can just receive the specific laser. The photoelectric sensor (2) is located in the middle of the channel and is in the measurement state of cutting off the optical path, ensuring the detection effect of the laser intensity.

2. The detection device based on laser intensity in a vacuum environment according to claim 1, characterized in that, The cavity (1) includes a shell (11) with a top opening and a knife-edge flange (12). The housing (11) is made of stainless steel, and the through hole (4) and the air extraction hole (5) are both provided on the housing (11); The knife-edge flange (12) is sealed to the housing (11); One end of the rotary switching assembly (6) extends from the knife-edge flange (12) into the housing (11) to connect with the photoelectric sensor (2).

3. The detection device based on laser intensity in a vacuum environment according to claim 2, characterized in that, The upper surface of the blade flange (12) has a connection port (7) that is connected to the detector (3). The connection port (7) is made of insulating ceramic material.

4. The detection device based on laser intensity in a vacuum environment according to claim 1, characterized in that, The photoelectric sensor (2) is configured as a photodiode; The detector (3) is configured as a high-precision current reading meter.

5. The detection device based on laser intensity in a vacuum environment according to claim 1, characterized in that, The through hole (4) is provided in three parts, two of which form a channel for laser transmission, and the other through hole (4) has an observation window inside, and the observation window has a cover plate on the outside.

6. The detection device based on laser intensity in a vacuum environment according to claim 1, characterized in that, The bottom of the cavity (1) is provided with a lifting assembly for adjusting the height of the cavity (1) so that when the laser is transmitted into the channel, it can be received by the photoelectric sensor (2).

7. A method for detecting laser intensity in a vacuum environment, characterized in that, The detection device based on laser intensity in a vacuum environment according to any one of claims 1-6 specifically includes the following steps: Two through holes (4) for forming channels are respectively connected to two external devices, so that the cavity (1) forms a sealed chamber with one of the air extraction holes (5); Connect the evacuation port (5) to an external vacuum device to create a vacuum environment in the sealed chamber; A specific laser is formed in one of the external devices and transmitted into the channel and received by the photoelectric sensor (2); The photoelectric sensor (2) inputs the parameter information of the received specific laser into the detector (3), and reflects the intensity of the specific laser based on the reading of the detector (3).

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