Mass spectrometer cavity airtightness detection method and device, mass spectrometer and storage medium

Abstract

The invention relates to the field of measuring instruments, and provides a mass spectrometer cavity airtightness detection method and device, a mass spectrometer and a storage medium, and the method comprises the steps: controlling a first vacuum pump to extract gas in a first-stage vacuum region, and obtaining a first vacuum degree of the first-stage vacuum region; when the first vacuum degree reaches a first preset vacuum degree, a first duration for enabling the first vacuum degree to reach the first preset vacuum degree is obtained, and a second vacuum pump and a third vacuum pump are controlled to extract gas in the second-stage vacuum area and the third-stage vacuum area; a first rotating speed of a second vacuum pump and a second rotating speed of a third vacuum pump are obtained, when the first rotating speed and the second rotating speed reach the preset rotating speed, a second duration for enabling the first rotating speed and the second rotating speed to reach the preset rotating speed is obtained, a second vacuum degree of the third-level vacuum area is obtained, and a second vacuum degree curve is obtained; and under the condition that the first duration meets a first preset condition, the second duration meets a second preset condition and the second vacuum degree curve meets a third preset condition, determining that the gas tightness of the mass spectrometer detection cavity passes the detection.

Description

Technical Field

[0001] The present application relates to the field of measuring instruments, and in particular to a method and device for detecting the air tightness of a mass spectrometer cavity, a mass spectrometer, and a storage medium. Background Art

[0002] A mass spectrometer is a highly sensitive, high-resolution three-stage vacuum instrument that is mainly used to measure the mass-to-charge ratio (m / z) of atoms, molecules or molecular fragments in a sample. In order to reduce the collision of sample molecules with gas molecules during flight, improve the mass resolution of the mass spectrometer, and reduce the background noise from gas molecules, the three-stage vacuum area and ion transmission path of the mass spectrometer need to be evacuated before use, and the mass spectrometer cavity needs to ensure good airtightness to maintain a vacuum environment. However, the technical requirements for detecting the airtightness of the mass spectrometer are high, resulting in low detection efficiency, and a more efficient cavity airtightness detection method is urgently needed. Summary of the invention

[0003] The main purpose of the present application is to provide a method and device for detecting the air tightness of a mass spectrometer cavity, a mass spectrometer cavity air tightness detection device and a computer storage medium, aiming to improve the air tightness detection efficiency of the mass spectrometer cavity.

[0004] In a first aspect, the present application provides a method for detecting the air tightness of a mass spectrometer cavity, wherein the mass spectrometer cavity comprises: a primary vacuum region, a secondary vacuum region, and a tertiary vacuum region; the primary vacuum region, the secondary vacuum region, and the tertiary vacuum region are interconnected through small holes, and the primary vacuum region is connected to a first vacuum pump, the secondary vacuum region is connected to a second vacuum pump, and the tertiary vacuum region is connected to a third vacuum pump. The method for detecting the air tightness of the mass spectrometer cavity comprises the following steps:

[0005] Controlling the first vacuum pump to extract gas in the primary vacuum zone and obtain a first vacuum degree of the primary vacuum zone;

[0006] When the first vacuum degree reaches a first preset vacuum degree, obtaining a first time required for the first vacuum degree to reach the first preset vacuum degree, and controlling the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively;

[0007] Obtaining a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, obtaining a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and obtaining a second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve;

[0008] When the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition, it is determined that the airtightness of the mass spectrometer cavity passes the detection.

[0009] In a second aspect, the present application further provides a device for detecting the air tightness of a mass spectrometer cavity, wherein the mass spectrometer cavity comprises: a primary vacuum zone, a secondary vacuum zone, and a tertiary vacuum zone; the primary vacuum zone, the secondary vacuum zone, and the tertiary vacuum zone are interconnected through small holes, and the primary vacuum zone is connected to a first vacuum pump, the secondary vacuum zone is connected to a second vacuum pump, and the tertiary vacuum zone is connected to a third vacuum pump, and the device for detecting the air tightness of the mass spectrometer cavity comprises:

[0010] A first vacuum pump control module, used for controlling the first vacuum pump to extract gas in the primary vacuum zone and obtain a first vacuum degree of the primary vacuum zone;

[0011] a second vacuum pump control module, configured to obtain, when the first vacuum degree reaches a first preset vacuum degree, a first time required for the first vacuum degree to reach the first preset vacuum degree, and control the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively;

[0012] a vacuum degree curve acquisition module, configured to acquire a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, acquire a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and acquire a second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve;

[0013] The airtightness determination module is used to determine that the airtightness of the mass spectrometer cavity has passed the detection when the first time length meets the first preset condition, the second time length meets the second preset condition, and the second vacuum degree curve meets the third preset condition.

[0014] In a third aspect, the present application also provides a mass spectrometer, wherein a mass spectrometer cavity of the mass spectrometer comprises a primary vacuum region, a secondary vacuum region, and a tertiary vacuum region interconnected by small holes, and the primary vacuum region, the secondary vacuum region, and the tertiary vacuum region are respectively connected to a vacuum pump, and the mass spectrometer further comprises: a processor, a memory, and a computer program stored in the memory and executable by the processor, wherein when the computer program is executed by the processor, the method for detecting the airtightness of the mass spectrometer cavity as described above is implemented.

[0015] In a fourth aspect, the present application further provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, the method for detecting the air tightness of the mass spectrometer cavity as described above is implemented.

[0016] The present application provides a method and device for detecting the air tightness of a mass spectrometer cavity, a detection method and a computer storage medium for detecting the air tightness of a mass spectrometer cavity, and the present application controls the first vacuum pump to extract the gas in the first-level vacuum area and obtains the first vacuum degree of the first-level vacuum area;

[0017] When the first vacuum degree reaches the first preset vacuum degree, the first time required for the first vacuum degree to reach the first preset vacuum degree is obtained, and the second vacuum pump and the third vacuum pump are controlled to extract the gas in the secondary vacuum area and the tertiary vacuum area respectively; the first rotation speed of the second vacuum pump and the second rotation speed of the third vacuum pump are obtained, and when the first rotation speed and the second rotation speed reach the preset rotation speed, the second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed is obtained, and the second vacuum degree of the tertiary vacuum area is obtained to obtain a second vacuum degree curve; when the first time meets the first preset condition, the second time meets the second preset condition, and the second vacuum degree curve meets the third preset condition, it is determined that the airtightness of the mass spectrometer cavity has passed the test. By obtaining various parameters in the process of vacuuming different areas of the cavity and comparing them with various preset values ​​determined according to qualified parts, it is determined whether the airtightness of the cavity is qualified, thereby improving the airtightness detection efficiency of the mass spectrometer cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic flow chart of a method for detecting the air tightness of a mass spectrometer cavity provided in one embodiment of the present application;

[0020] Figure 2 A diagram showing a usage scenario of a method for detecting the air tightness of a mass spectrometer cavity provided in one embodiment of the present application;

[0021] Figure 3 A vacuum degree curve diagram provided for an embodiment of the present application;

[0022] Figure 4 A schematic block diagram of a device for detecting air tightness of a mass spectrometer cavity provided in one embodiment of the present application. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0024] The flowcharts shown in the accompanying drawings are only examples and do not necessarily include all the contents and operations / steps, nor must they be executed in the order described. For example, some operations / steps may also be decomposed, combined or partially merged, so the actual execution order may change according to actual conditions.

[0025] Embodiments of the present application provide a method and device for detecting the air tightness of a mass spectrometer cavity, a mass spectrometer, and a computer-readable storage medium.

[0026] In conjunction with the accompanying drawings, some embodiments of the present application are described in detail below. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0027] Please refer to Figure 1 , Figure 1 A flow chart of a method for detecting the air tightness of a mass spectrometer cavity provided in an embodiment of the present application. The method for detecting the air tightness of a mass spectrometer cavity can be used in a mass spectrometer to improve the air tightness detection efficiency of the mass spectrometer cavity.

[0028] Please refer to Figure 2 , Figure 2 This is a usage scenario diagram provided by an embodiment of the present application. Figure 2 As shown, the mass spectrometer provided in the embodiment of the present application can be a quadrupole mass spectrometer, such as a triple quadrupole mass spectrometer, but it is certainly not limited thereto, and the type of mass spectrometer is not limited here. The mass spectrometer cavity provided in the embodiment of the present application includes: a primary vacuum zone, a secondary vacuum zone, and a tertiary vacuum zone; wherein the primary vacuum zone is also called the interface zone, which is the middle part connecting the ion source and the small hole, and has the function of focusing and purifying the ion flow, the secondary vacuum zone is also called the Q0 zone, which is used to guide the ion flow into the Q1 quadrupole, and the tertiary vacuum zone is also called the analysis zone, which is used to separate the ions transmitted from the secondary vacuum zone according to the different mass-to-charge ratios. Therefore, the primary vacuum zone, the secondary vacuum zone, and the tertiary vacuum zone are interconnected through small holes, so that the sample ions can enter the next area. It can be understood that the diameter of the small hole is extremely small; the primary vacuum zone, the secondary vacuum zone, and the tertiary vacuum zone are respectively connected to the first vacuum pump, the second vacuum pump, and the third vacuum pump, so as to extract the air in each area of ​​the mass spectrometer cavity.

[0029] like Figure 1 As shown, the method for detecting the air tightness of the mass spectrometer cavity includes steps S101 to S104.

[0030] Step S101, controlling the first vacuum pump to extract gas in the primary vacuum zone and obtaining a first vacuum degree of the primary vacuum zone.

[0031] Exemplarily, the primary vacuum zone is connected to a first vacuum pump, which controls the first vacuum pump to start extracting gas from the primary vacuum zone, and obtains a first vacuum degree in the primary vacuum zone during the operation of the first vacuum pump.

[0032] In some embodiments, controlling the first vacuum pump to extract gas in the primary vacuum zone and obtaining a first vacuum degree of the primary vacuum zone includes:

[0033] A mechanical pump connected to the primary vacuum area is controlled to extract gas in the primary vacuum area, and a first vacuum degree of the primary vacuum area is obtained through a negative pressure sensor.

[0034] Illustratively, since the primary vacuum zone is the area in the mass spectrometer cavity where the sample transitions from an atmospheric pressure environment to a low pressure environment, the vacuum degree requirement for the primary vacuum zone is lower than that for other areas of the cavity, a mechanical pump with lower installation and operating costs than a molecular pump can be used to extract the air in the primary vacuum zone, thereby reducing the cost of detecting the airtightness of the mass spectrometer cavity and the operating cost of the mass spectrometer; similarly, a negative pressure sensor with lower cost than a vacuum gauge can be used to measure the air pressure in the primary vacuum zone, thereby determining the first vacuum degree of the primary vacuum zone.

[0035] Step S102: when the first vacuum degree reaches a first preset vacuum degree, obtain a first time duration required for the first vacuum degree to reach the first preset vacuum degree, and control the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively.

[0036] Exemplarily, the time required for the first vacuum degree of the primary vacuum zone to reach the first preset vacuum degree by extracting air through the first vacuum pump is related to the airtightness of the primary vacuum zone. It can be understood that the better the airtightness of the primary vacuum zone, the faster the first vacuum degree reaches the first preset vacuum degree, and the shorter the first time length; conversely, the worse the airtightness of the primary vacuum zone, the faster the first vacuum degree reaches the first preset vacuum degree, and the longer the first time length. Therefore, the airtightness of the primary vacuum zone of the mass spectrometer cavity can be judged by obtaining the first time length.

[0037] For example, after the first vacuum degree of the first vacuum zone meets the requirement, the second vacuum pump and the third vacuum pump connected to the second vacuum zone and the third vacuum zone can be started to extract the air in the second vacuum zone and the third vacuum zone respectively.

[0038] In some embodiments, when the first vacuum degree reaches a first preset vacuum degree, obtaining a first time required for the first vacuum degree to reach the first preset vacuum degree, and controlling the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum region and the tertiary vacuum region respectively, comprises:

[0039] When the first vacuum degree reaches a first preset vacuum degree, a first time duration required for the first vacuum degree to reach the first preset vacuum degree is obtained, and a first molecular pump connected to the secondary vacuum area and a second molecular pump connected to the tertiary vacuum area are controlled to extract gas from the secondary vacuum area and the tertiary vacuum area.

[0040] Exemplarily, since the secondary vacuum zone and the tertiary vacuum zone have high requirements for vacuum degree, the second vacuum pump and the third vacuum pump connected to the secondary vacuum zone and the tertiary vacuum zone respectively can be molecular pumps, and the molecular pumps have high compression ratio and pumping efficiency when working in a molecular flow state. Among them, since the molecular pump usually requires a fore-stage pump to pre-vacuum, the first molecular pump and the second molecular pump can also be connected to the mechanical pump respectively, so that the mechanical pump serves as the fore-stage pump of the first molecular pump and the second molecular pump to provide the necessary fore-stage vacuum.

[0041] Step S103, obtaining the first rotational speed of the second vacuum pump and the second rotational speed of the third vacuum pump, and when the first rotational speed and the second rotational speed reach the preset rotational speed, obtaining the second time required for the first rotational speed and the second rotational speed to reach the preset rotational speed, and obtaining the second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve.

[0042] Exemplarily, the time required for the molecular pump to go from startup to full-speed operation is related to the change in air pressure in the secondary vacuum zone and the tertiary vacuum zone, and the air pressure in the secondary vacuum zone and the tertiary vacuum zone is related to their air tightness. Therefore, the air tightness of the secondary vacuum zone and the tertiary vacuum zone can be tested by obtaining the second time required for the first speed of the second vacuum pump and the second speed of the third vacuum pump to reach the preset speed.

[0043] In some embodiments, the obtaining of the first rotational speed of the second vacuum pump and the second rotational speed of the third vacuum pump, when the first rotational speed and the second rotational speed reach a preset rotational speed, obtaining a second time required for the first rotational speed and the second rotational speed to reach the preset rotational speed, and obtaining a second vacuum degree of the three-level vacuum region to obtain a second vacuum degree curve includes:

[0044] When the first molecular pump reaches a first preset speed and the second molecular pump reaches a second preset speed, obtaining a second time required for the first molecular pump to reach the first preset speed and the second molecular pump to reach the second preset speed;

[0045] The vacuum gauge is controlled to obtain the second vacuum degree of the third-level vacuum area, and the second vacuum degree curve is obtained.

[0046] For example, the vacuum gauge can measure the vacuum degree in the environment with high accuracy, but it also has a high cost. Since there are small holes between the primary vacuum zone, the secondary vacuum zone and the tertiary vacuum zone, the vacuum degrees of the three increase successively. The vacuum gauge can be set in the tertiary vacuum zone with the highest vacuum degree among the three. The second vacuum degree of the tertiary vacuum zone is measured by the vacuum gauge, and the relationship between the second vacuum degree and time is recorded to obtain a second vacuum degree curve.

[0047] For example, due to the difference in airtightness between the secondary vacuum zone and the tertiary vacuum zone, the first speed and the second speed may not reach the preset speed requirement at the same time. In this case, the time required for the molecular pump to reach the preset speed is the second time.

[0048] Exemplarily, the preset speed is used to determine whether the molecular pump reaches full speed operation. For the first molecular pump and the second molecular pump, there may be different first preset speeds and second preset speeds, respectively. Of course, the first preset speed and the second preset speed may be the same, which is not limited here. Specifically, the molecular pump may feed back its own speed to the controller, or may send indication information to the controller when its own speed reaches the corresponding preset speed, which is not limited here.

[0049] In some embodiments, the controlling vacuum gauge to obtain the second vacuum degree of the third-level vacuum region to obtain the second vacuum degree curve includes:

[0050] At a first moment, the vacuum gauge is controlled to obtain a second vacuum degree of the third-level vacuum area, wherein a time interval between the first moment and a second moment when the first molecular pump reaches a first preset speed and the second molecular pump reaches a second preset speed is a preset duration.

[0051] For example, since the range of the vacuum gauge is usually small, and operation when the vacuum degree exceeds the range may result in inaccurate readings or even damage to the vacuum gauge, in order to ensure that the second vacuum degree of the three-level vacuum zone is within the range of the vacuum gauge when the vacuum gauge is started, the vacuum gauge can be started after waiting for a preset time after the second moment when the first molecular pump reaches the first preset speed and the second molecular pump reaches the second preset speed. Specifically, the preset time between the second moment and the first moment when the first molecular pump reaches the first preset speed and the second molecular pump reaches the second preset speed can be, for example, 50 seconds, of course, it is not limited thereto, and the size of the preset time can be set according to the volume of the cavity and the power of the molecular pump, which is not limited here.

[0052] Step S104: when the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition, it is determined that the airtightness of the mass spectrometer cavity passes the test.

[0053] Exemplarily, the vacuuming operation and the measuring operation of step S101 to step S103 can be performed in advance on the qualified parts of the mass spectrometer cavity with good airtightness, so as to determine the first preset condition corresponding to the first duration, the second preset condition corresponding to the second duration, and the third preset condition corresponding to the second vacuum degree curve. Specifically, the first preset condition, the second preset condition, and the third preset condition can be determined based on the first duration, the second duration, and the second vacuum degree curve of multiple qualified parts, for example, the first duration of multiple qualified parts is averaged.

[0054] In some embodiments, when the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition, determining that the airtightness of the mass spectrometer cavity passes the detection includes:

[0055] determining, according to the second vacuum degree curve, a third time period required for the second vacuum degree to tend to be stable and a target vacuum degree when the second vacuum degree tends to be stable;

[0056] When the first time length satisfies the first preset condition, the second time length satisfies the second preset condition, the second vacuum degree curve satisfies the third preset condition, the third time length satisfies the fourth preset condition and the target vacuum degree satisfies the fifth preset condition, it is determined that the airtightness of the mass spectrometer cavity has passed the test.

[0057] Exemplarily, the vacuum degree that the third-level vacuum zone can eventually reach and the time required to reach the target vacuum degree can reflect the airtightness of the third-level vacuum zone. Therefore, the third time required for the second vacuum degree to stabilize and the target vacuum degree when the second vacuum degree stabilizes can be determined based on the second vacuum degree curve so as to compare with the corresponding preset conditions to determine the airtightness of the third-level vacuum zone.

[0058] Exemplarily, whether the second vacuum degree tends to be stable can be determined according to algorithms such as ANOVA, t-test or chi-square test, but it is certainly not limited thereto and is not limited here.

[0059] In some embodiments, when the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, the second vacuum degree curve satisfies a third preset condition, the third time length satisfies a fourth preset condition, and the target vacuum degree satisfies a fifth preset condition, determining that the airtightness of the mass spectrometer cavity passes the detection includes:

[0060] When the time difference between the first time length and the first preset time length is less than the first time difference, the time difference between the second time length and the second preset time length is less than the second time difference, the matching degree between the second vacuum degree curve and the preset vacuum degree curve is greater than the preset matching degree, the time difference between the third time length and the third preset time length is less than the third time difference, and the difference between the target vacuum degree and the target preset vacuum degree is less than the preset value, it is determined that the airtightness of the mass spectrometer chamber has passed the test.

[0061] Exemplarily, in order to determine whether the airtightness of the mass spectrometer cavity has passed the test, it is necessary to determine that the first time length, the second time length, and the third time length match the first preset time length, the second preset time length, and the third preset time length respectively, the target vacuum degree matches the target preset vacuum degree, and the second vacuum degree curve matches the preset vacuum degree curve.

[0062] Exemplarily, the matching degree between the second vacuum degree curve and the preset vacuum degree curve can be determined based on the Pearson correlation coefficient, but is certainly not limited thereto. It can also be determined based on the Euclidean distance, Manhattan distance or Fréchet distance between the two curves, which is not limited here.

[0063] Illustratively, when any one of the items is not satisfied, it can be determined that the airtightness of the mass spectrometer cavity is unqualified, but this is certainly not limited to this and is not limited here.

[0064] Exemplarily, when comparing the first duration with the first preset duration, a certain time difference is allowed to exist. Therefore, a reasonable first time difference can be set in advance according to actual conditions; similarly, a second time difference can be set for the second duration and the second preset duration, a third time difference can be set for the third duration and the third preset duration, and a preset value can be set for the target vacuum degree and the target preset vacuum degree.

[0065] Please refer to Figure 3 , Figure 3 A vacuum degree curve diagram provided for an embodiment of the present application.

[0066] At time t0, the first vacuum pump connected to the primary vacuum zone is started. When the first vacuum degree of the primary vacuum zone reaches the first preset vacuum degree at time t1, the second vacuum pump connected to the secondary vacuum zone and the third vacuum pump connected to the tertiary vacuum zone are started. When the second vacuum pump and the third vacuum pump reach full speed operation at time t2, the vacuum gauge is started at time T1 to obtain the second vacuum degree of the tertiary vacuum zone after waiting for the second vacuum pump and the third vacuum pump to continue to operate for a preset time T', and then a second vacuum degree curve is obtained. The target vacuum degree when the second vacuum degree tends to be stable and the corresponding time t3 are obtained according to the second vacuum degree curve, so as to judge whether the airtightness of the mass spectrometer cavity has passed the test according to the first time between time t0 and time t1, the second time between time t0 and time t2, the third time between time t0 and time t3, the second vacuum degree curve and the target vacuum degree.

[0067] The method for detecting the air tightness of the mass spectrometer cavity provided in the above embodiment controls the first vacuum pump to extract the gas in the first-level vacuum area and obtains the first vacuum degree of the first-level vacuum area;

[0068] When the first vacuum degree reaches the first preset vacuum degree, the first time required for the first vacuum degree to reach the first preset vacuum degree is obtained, and the second vacuum pump and the third vacuum pump are controlled to extract the gas in the secondary vacuum area and the tertiary vacuum area respectively; the first rotation speed of the second vacuum pump and the second rotation speed of the third vacuum pump are obtained, and when the first rotation speed and the second rotation speed reach the preset rotation speed, the second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed is obtained, and the second vacuum degree of the tertiary vacuum area is obtained to obtain a second vacuum degree curve; when the first time meets the first preset condition, the second time meets the second preset condition, and the second vacuum degree curve meets the third preset condition, it is determined that the airtightness of the mass spectrometer cavity has passed the test. The various parameters in the process of vacuuming different areas of the cavity are obtained, and compared with the various preset values ​​determined according to the qualified parts, so as to determine whether the airtightness of the cavity is qualified, thereby improving the airtightness detection efficiency of the mass spectrometer cavity.

[0069] See also Figure 4 , Figure 4 It is a schematic diagram of a mass spectrometer cavity air tightness detection device provided in one embodiment of the present application. The mass spectrometer cavity air tightness detection device can be configured in a server or a terminal to execute the aforementioned mass spectrometer cavity air tightness detection method.

[0070] like Figure 4 As shown, the device for detecting the air tightness of the mass spectrometer cavity includes: a first vacuum pump control module 110 , a second vacuum pump control module 120 , a vacuum degree curve acquisition module 130 , and an air tightness determination module 140 .

[0071] A first vacuum pump control module 110, configured to control the first vacuum pump to extract gas from the primary vacuum zone and obtain a first vacuum degree of the primary vacuum zone;

[0072] The second vacuum pump control module 120 is used to obtain a first time required for the first vacuum degree to reach the first preset vacuum degree when the first vacuum degree reaches the first preset vacuum degree, and control the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively;

[0073] A vacuum degree curve acquisition module 130 is used to acquire a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, acquire a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and acquire a second vacuum degree of the third vacuum region to obtain a second vacuum degree curve;

[0074] The airtightness determination module 140 is configured to determine that the airtightness of the mass spectrometer cavity has passed the detection when the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition.

[0075] It should be noted that those skilled in the art can clearly understand that, for the convenience and brevity of description, the specific working processes of the above-described devices and modules and units can refer to the corresponding processes in the aforementioned method embodiments and will not be repeated here.

[0076] The method and apparatus of the present application can be used in many general or special computing system environments or configurations. For example: personal computers, server computers, handheld or portable devices, tablet devices, multiprocessor systems, microprocessor-based systems, set-top boxes, programmable consumer electronic devices, network PCs, minicomputers, mainframe computers, distributed computing environments including any of the above systems or devices, etc. The present application can be described in the general context of computer-executable instructions executed by a computer, such as program modules. Generally, program modules include routines, programs, objects, components, data structures, etc. that perform specific tasks or implement specific abstract data types. The present application can also be practiced in distributed computing environments, in which tasks are performed by remote processing devices connected through a communication network. In a distributed computing environment, program modules can be located in local and remote computer storage media including storage devices.

[0077] Exemplarily, the above method and apparatus may be implemented in the form of a computer program, which may be run on a mass spectrometer.

[0078] The present application also provides a mass spectrometer, the mass spectrometer cavity of the mass spectrometer includes a primary vacuum zone, a secondary vacuum zone, and a tertiary vacuum zone interconnected by small holes, and the primary vacuum zone, the secondary vacuum zone, and the tertiary vacuum zone are respectively connected to a vacuum pump, the mass spectrometer also includes: a processor, a memory, and a computer program stored in the memory and executable by the processor, wherein when the computer program is executed by the processor, the steps of the method for detecting the air tightness of the mass spectrometer cavity as described in any one of the embodiments of the present application are implemented.

[0079] Exemplarily, the mass spectrometer may be a quadrupole mass spectrometer, such as a triple quadrupole mass spectrometer.

[0080] Exemplarily, a negative pressure sensor is provided in the first-level vacuum zone, and a vacuum gauge is provided in the third-level vacuum zone.

[0081] It should be noted that, technical personnel in the relevant field can clearly understand that, for the convenience and simplicity of description, the specific working process of the above-mentioned description of the detection of the airtightness of the mass spectrometer cavity can refer to the corresponding process in the aforementioned mass spectrometer cavity airtightness detection and control method embodiment, and will not be repeated here.

[0082] An embodiment of the present application further provides a computer-readable storage medium, on which a computer program is stored. The computer program includes program instructions. The method implemented when the program instructions are executed can refer to the various embodiments of the method for detecting the air tightness of the mass spectrometer cavity of the present application.

[0083] Wherein, the computer-readable storage medium may be an internal storage unit of the mass spectrometer described in the foregoing embodiments, such as a hard disk or memory of the mass spectrometer. The computer-readable storage medium may also be an external storage device of the mass spectrometer, such as a plug-in hard disk, a smart memory card (Smart Med ia Card, SMC), a secure digital (Secure Digital, SD) card, a flash card (Flash Card), etc. equipped on the mass spectrometer.

[0084] It should be understood that the terms used in this application specification are only for the purpose of describing specific embodiments and are not intended to limit the application. As used in this application specification and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an" and "the" are intended to include plural forms.

[0085] It should also be understood that the term "and / or" used in the specification of this application and the appended claims refers to any combination of one or more of the associated listed items and all possible combinations, including these combinations. It should be noted that, in this article, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or system. In the absence of further restrictions, an element defined by the sentence "including a..." does not exclude the presence of other identical elements in the process, method, article or system including the element.

[0086] The serial numbers of the embodiments of the present application are for description only and do not represent the advantages and disadvantages of the embodiments. The above description is only a specific implementation mode of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of various equivalent modifications or replacements within the technical scope disclosed in the present application, and these modifications or replacements should be included in the protection scope of the present application. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A method for detecting the air tightness of a mass spectrometer cavity, characterized in that: The mass spectrometer cavity comprises: a primary vacuum zone, a secondary vacuum zone, and a tertiary vacuum zone; the primary vacuum zone, the secondary vacuum zone, and the tertiary vacuum zone are interconnected through small holes, and the primary vacuum zone is connected to a first vacuum pump, the secondary vacuum zone is connected to a second vacuum pump, and the tertiary vacuum zone is connected to a third vacuum pump. The method comprises: Controlling the first vacuum pump to extract gas in the primary vacuum zone and obtain a first vacuum degree of the primary vacuum zone; When the first vacuum degree reaches a first preset vacuum degree, obtaining a first time required for the first vacuum degree to reach the first preset vacuum degree, and controlling the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively; Obtaining a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, obtaining a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and obtaining a second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve; When the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition, it is determined that the airtightness of the mass spectrometer cavity passes the detection.

2. The method for detecting the air tightness of the mass spectrometer cavity according to claim 1, characterized in that: The step of controlling the first vacuum pump to extract gas from the primary vacuum zone and obtaining a first vacuum degree of the primary vacuum zone includes: A mechanical pump connected to the primary vacuum area is controlled to extract gas in the primary vacuum area, and a first vacuum degree of the primary vacuum area is obtained through a negative pressure sensor.

3. The method for detecting the air tightness of the mass spectrometer cavity according to claim 1, characterized in that: When the first vacuum degree reaches a first preset vacuum degree, obtaining a first time required for the first vacuum degree to reach the first preset vacuum degree, and controlling the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively, comprising: When the first vacuum degree reaches a first preset vacuum degree, a first time duration required for the first vacuum degree to reach the first preset vacuum degree is obtained, and a first molecular pump connected to the secondary vacuum area and a second molecular pump connected to the tertiary vacuum area are controlled to extract gas from the secondary vacuum area and the tertiary vacuum area.

4. The method for detecting the air tightness of the mass spectrometer cavity according to claim 3, characterized in that: The step of obtaining a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, obtaining a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and obtaining a second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve includes: When the first molecular pump reaches a first preset speed and the second molecular pump reaches a second preset speed, obtaining a second time required for the first molecular pump to reach the first preset speed and the second molecular pump to reach the second preset speed; The vacuum gauge is controlled to obtain the second vacuum degree of the third-level vacuum area, and the second vacuum degree curve is obtained.

5. The method for detecting the air tightness of the mass spectrometer cavity according to claim 4, characterized in that: The controlling vacuum gauge obtains the second vacuum degree of the third-level vacuum area to obtain the second vacuum degree curve, including: At a first moment, the vacuum gauge is controlled to obtain a second vacuum degree of the third-level vacuum area, wherein a time interval between the first moment and a second moment when the first molecular pump reaches a first preset speed and the second molecular pump reaches a second preset speed is a preset duration.

6. The method for detecting the air tightness of a mass spectrometer cavity according to claim 1, characterized in that: When the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, and the second vacuum degree curve satisfies a third preset condition, determining that the airtightness of the mass spectrometer cavity passes the detection includes: determining, according to the second vacuum degree curve, a third time period required for the second vacuum degree to tend to be stable and a target vacuum degree when the second vacuum degree tends to be stable; When the first time length satisfies the first preset condition, the second time length satisfies the second preset condition, the second vacuum degree curve satisfies the third preset condition, the third time length satisfies the fourth preset condition and the target vacuum degree satisfies the fifth preset condition, it is determined that the airtightness of the mass spectrometer cavity has passed the test.

7. The method for detecting the air tightness of a mass spectrometer cavity according to claim 6, characterized in that: When the first time length satisfies a first preset condition, the second time length satisfies a second preset condition, the second vacuum degree curve satisfies a third preset condition, the third time length satisfies a fourth preset condition, and the target vacuum degree satisfies a fifth preset condition, determining that the airtightness of the mass spectrometer cavity passes the detection includes: When the time difference between the first time length and the first preset time length is less than the first time difference, the time difference between the second time length and the second preset time length is less than the second time difference, the matching degree between the second vacuum degree curve and the preset vacuum degree curve is greater than the preset matching degree, the time difference between the third time length and the third preset time length is less than the third time difference, and the difference between the target vacuum degree and the target preset vacuum degree is less than the preset value, it is determined that the airtightness of the mass spectrometer chamber has passed the test.

8. A device for detecting the air tightness of a mass spectrometer cavity, characterized in that: The mass spectrometer cavity comprises: a primary vacuum area, a secondary vacuum area, and a tertiary vacuum area; the primary vacuum area, the secondary vacuum area, and the tertiary vacuum area are interconnected through small holes, and the primary vacuum area is connected to a first vacuum pump, the secondary vacuum area is connected to a second vacuum pump, and the tertiary vacuum area is connected to a third vacuum pump. The mass spectrometer cavity airtightness detection device comprises: A first vacuum pump control module, used for controlling the first vacuum pump to extract gas in the primary vacuum zone and obtain a first vacuum degree of the primary vacuum zone; a second vacuum pump control module, configured to obtain, when the first vacuum degree reaches a first preset vacuum degree, a first time required for the first vacuum degree to reach the first preset vacuum degree, and control the second vacuum pump and the third vacuum pump to extract gas from the secondary vacuum area and the tertiary vacuum area respectively; a vacuum degree curve acquisition module, configured to acquire a first rotation speed of the second vacuum pump and a second rotation speed of the third vacuum pump, and when the first rotation speed and the second rotation speed reach a preset rotation speed, acquire a second time required for the first rotation speed and the second rotation speed to reach the preset rotation speed, and acquire a second vacuum degree of the three-level vacuum area to obtain a second vacuum degree curve; The airtightness determination module is used to determine that the airtightness of the mass spectrometer cavity has passed the detection when the first time length meets the first preset condition, the second time length meets the second preset condition, and the second vacuum degree curve meets the third preset condition.

9. A mass spectrometer, characterized in that The mass spectrometer cavity of the mass spectrometer includes a primary vacuum region, a secondary vacuum region, and a tertiary vacuum region which are interconnected through small holes, and the primary vacuum region, the secondary vacuum region, and the tertiary vacuum region are respectively connected to a vacuum pump. The mass spectrometer also includes: a processor, a memory, and a computer program stored in the memory and executable by the processor, wherein when the computer program is executed by the processor, the steps of the method for detecting the airtightness of the mass spectrometer cavity as described in any one of claims 1 to 7 are implemented.

10. A computer-readable storage medium, characterized in that: The computer-readable storage medium stores a computer program, wherein when the computer program is executed by a processor, the steps of the method for detecting the air tightness of the mass spectrometer cavity according to any one of claims 1 to 7 are implemented.

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