A free stop control system, method and device for semiconductor production process

Abstract

The embodiment of the present application relates to the field of semiconductor manufacturing control technology, and discloses a free shutdown control system, method and device for a semiconductor production process. The system includes: a signal monitoring module for monitoring the shutdown signal; a thread calling module for calling the shutdown thread; a thread blocking module for blocking the shutdown thread; a scheduling monitoring module for monitoring the state of the process node instance in the process scheduling node instance pool; a process engine for updating the state of the process node instance, and for controlling the process scheduling node instance pool according to the state of the process node instance; a state judgment module for judging the state of the node instance according to the number of "to be scheduled" and "running" node instances in the node instance pool, and for judging the release of the shutdown thread. It can at least be used to solve the technical problem of low efficiency of traditional free shutdown control.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing control technology, and in particular to a free shutdown control system, method and equipment for a semiconductor production process. Background Art

[0002] Semiconductor wafer manufacturing is highly precise, production scenarios are numerous and complex, and the production line has specific requirements for the subsequent impact of the startup and shutdown operations of the process system. At the same time, in the actual production process of semiconductor factories, it may involve scenarios such as hardware equipment failure replacement and software iteration updates on the production line. Therefore, the semiconductor production system requires a process engine system that can not only meet the complex semiconductor scenarios and stability requirements, but also can be shut down freely in the production environment. The current mainstream process engines known on the market have the following practices for shutting down the production environment: 1. Directly shut down the process engine application, but this approach does not pay attention to and process the node tasks being executed, which will cause the memory computing tasks to be directly terminated and the external call task response results cannot be obtained. In addition, because the execution status of the tasks at the time of shutdown is not recorded, the tasks are repeated after the application is restarted; 2. Wait for the node tasks running in the process to complete execution before closing the process engine application However, when the process node instance is executed and scheduled to the subsequent node, it needs to determine whether the current application is being shut down, which increases the logical complexity and cost of the process scheduling. The process trigger is not closed, and a large number of node instances to be scheduled will still be generated during the shutdown of the process engine, and may cause the external trigger system to obtain an erroneous trigger result response. There may still be a stock of process node instances to be scheduled in the scheduling data source, and it is impossible to shut down freely to upgrade and replace the software and hardware equipment of the scheduling data source. In addition, the previous and next nodes in the process may be related within a certain time range. After the current node is executed, the shutdown of the process engine will cause the process to be interrupted. The scheduling of subsequent nodes after the application is restarted in the future may exceed the time range of this correlation, resulting in uncontrollable impacts. Therefore, how to better meet the complex scenarios and stability requirements of semiconductors and achieve elegant shutdown in a production environment is a key issue that needs to be solved at present.

[0003] Chinese Patent Publication No.: CN110233122A discloses a semiconductor production line MES system, including: an MES core, wherein the MES core includes: a process flow control module that communicates with a device communication terminal, a master data management module, a scheduler, and a scheduler module respectively, wherein an experiment management module is also included, wherein the experiment management module communicates with the master data management module and the process flow control module. An experimental method for a semiconductor production line MES system, wherein the experiment management module obtains the main process flow in the MES system, and the experiment management module replaces one or more process steps in the main process flow with experimental process steps. However, this solution still cannot solve the problem of free shutdown control in the semiconductor production process, and cannot effectively improve the efficiency of free shutdown control in the semiconductor production process. Summary of the invention

[0004] One purpose of the present application is to provide a free shutdown control system, method and equipment for a semiconductor production process, at least to solve the problems in the prior art where when shutdown is required, shutdown causes loss or repeated execution of node instance task data in progress, and switching of shutdown equipment hardware and software causes data loss.

[0005] To achieve the above objectives, some embodiments of the present application provide the following aspects:

[0006] In a first aspect, some embodiments of the present application provide a free stop control system for a semiconductor production process, including:

[0007] A signal monitoring module is used to monitor the shutdown signal;

[0008] A thread calling module is used to call the shutdown thread according to the monitoring result of the shutdown signal;

[0009] The thread blocking module is used to block the shutdown thread according to the calling situation of the shutdown thread and close the trigger;

[0010] The scheduling monitoring module is used to monitor the status of process node instances in the process scheduling node instance pool;

[0011] The process engine is used to update the state of the process node instance and control the process scheduling node instance pool according to the state of the process node instance;

[0012] The status judgment module is used to judge the node instance status according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread.

[0013] Furthermore, the signal monitoring module monitors the shutdown signal through the JVM, wherein:

[0014] When the JVM monitors a non-shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that there is no shutdown signal;

[0015] When the JVM monitors the shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that the shutdown signal exists.

[0016] Furthermore, the thread calling module determines the calling status of the shutdown thread according to the monitoring result of the shutdown signal, wherein:

[0017] When the monitoring result of the shutdown signal is determined to be that there is no shutdown signal, the thread calling module determines not to call the shutdown thread;

[0018] When it is determined that the monitoring result of the shutdown signal is that there is a shutdown signal, the thread calling module determines to call the shutdown thread and executes the shutdown thread.

[0019] Furthermore, when the thread calling module determines to call the shutdown thread, the thread blocking module determines whether there are "running" or "to be scheduled" node instances in the node instance pool through the dead loop in the blocking thread, and closes the trigger.

[0020] Furthermore, the state judgment module monitors the state of the process node instances in the process scheduling node instance pool, wherein:

[0021] When the process node instance scheduling operation in the process scheduling node instance pool is completed, the process engine module sets the process node instance state to running;

[0022] When the process node instance in the process scheduling node instance pool starts scheduling and running, the process engine module sets the state of the process node instance to running;

[0023] When the process node instance generated by the new scheduling in the process scheduling node instance pool is to be scheduled, the process engine module sets the state of the process node instance to be scheduled.

[0024] Furthermore, the process engine updates the state of the process node instance according to the execution status of the node instance, wherein:

[0025] When the node instance to be scheduled starts scheduling execution, the process engine updates the state of the process node instance to running;

[0026] When the running node instance is executed, the process engine updates the state of the process node instance to running.

[0027] Furthermore, the process engine controls the process scheduling node instance pool according to the process node instance state, wherein:

[0028] When the state of the process node instance is to be scheduled, the process engine does not delete the process node instance from the process scheduling node instance pool;

[0029] When the process node instance state is in running, the process engine does not delete the process node instance from the process scheduling node instance pool;

[0030] When the process node instance status is running, the process engine deletes the process node instance from the process scheduling node instance pool.

[0031] Furthermore, the state judgment module judges the node instance state according to the number N of "to be scheduled" and "in operation" node instances in the node instance pool, wherein:

[0032] When N=0, the state judgment module determines that all node instances have been executed and releases the shutdown thread;

[0033] When N≠0, the state judgment module determines that there is an unfinished node instance, does not release the shutdown thread, and triggers a release shutdown signal.

[0034] In a second aspect, some embodiments of the present application further provide a free stop control method for a semiconductor production process, which is applied to a free stop control system for a semiconductor production process described in the first aspect, and the method comprises:

[0035] Monitor the shutdown signal through the signal monitoring module;

[0036] The shutdown thread is called through the thread calling module according to the monitoring result of the shutdown signal;

[0037] The thread blocking module blocks the shutdown thread according to the calling situation of the shutdown thread and closes the trigger;

[0038] Monitor the status of process node instances in the process scheduling node instance pool through the scheduling monitoring module;

[0039] The process engine is used to update the process node instance status and control the process scheduling node instance pool according to the process node instance status;

[0040] The state judgment module is used to judge the state of the node instance according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread.

[0041] In a third aspect, some embodiments of the present application further provide an electronic device, comprising: one or more processors; and a memory storing computer program instructions, wherein the computer program instructions, when executed, cause the processor to perform the steps of the method described in the first aspect.

[0042] Compared with the prior art, the beneficial effects of the present invention are that the system ensures that relevant information can be captured in time when shutdown is required through a signal monitoring module, the system ensures that the shutdown operation can be performed in an appropriate thread through a thread calling module, and the system blocks relevant threads through a thread blocking module at the beginning of the shutdown operation to prevent data inconsistency and operation conflicts. The system continuously monitors the scheduling of the production process through a scheduling monitoring module to ensure that the shutdown operation does not affect other important production tasks. The system determines whether a shutdown operation needs to be performed by judging the current system status through a status judgment module, thereby improving the accuracy and rationality of the shutdown decision and ensuring the smooth progress of the shutdown process and the stability of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0044] Figure 1 This is a schematic diagram of the structure of a free stop control system for a semiconductor production process according to an embodiment of the present application;

[0045] Figure 2 A schematic flow chart of a method for controlling a free stop of a semiconductor production process according to an embodiment of the present application;

[0046] Figure 3 This is a schematic diagram of node instance state changes during a complete process scheduling process of an embodiment of the present application;

[0047] Figure 4 This is the overall design diagram of the free stop of the embodiment of the present application;

[0048] Figure 5 An exemplary structural diagram of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0049] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0050] The following terms are used in this article.

[0051] The present invention aims to combine the actual situation of cloud-controlled data computing and study how to ensure that the information content is not exposed, based on homomorphic encryption technology, to encrypt the computing tasks from the trusted domain to the computing domain, and then return to the trusted domain to restore the computing results to plain text after the calculation is completed safely.

[0052] First embodiment

[0053] See also Figure 1 As shown, it is a schematic diagram of the structure of the free stop control system of the semiconductor production process of this embodiment, and the system includes:

[0054] A signal monitoring module is used to monitor the shutdown signal;

[0055] A thread calling module is used to call the shutdown thread according to the monitoring result of the shutdown signal;

[0056] The thread blocking module is used to block the shutdown thread according to the calling situation of the shutdown thread and close the trigger;

[0057] The scheduling monitoring module is used to monitor the status of process node instances in the process scheduling node instance pool;

[0058] The process engine is used to update the state of the process node instance and control the process scheduling node instance pool according to the state of the process node instance;

[0059] The status judgment module is used to judge the node instance status according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread. Specifically, the system is set in the semiconductor production process management terminal, and controls the shutdown process of the semiconductor production process to achieve free shutdown when production is stopped in the production process, and each node instance can achieve efficient connection when shutting down. Through JVM's support for the operating system signal mechanism, the design is based on the shutdown thread logic and process node instance scheduling of the process engine to achieve the effect of free shutdown operation of the process engine in the production environment, so as to solve the problem that the current mainstream process engine will cause process scheduling interruption and task interruption after free shutdown in the production environment, and the consequences of the interruption are uncontrollable, and the process engine in the semiconductor production environment can be freely shut down for maintenance and replacement of hardware and software. The system uses a signal monitoring module to ensure that relevant information can be captured in time when shutdown is required. The system uses a thread calling module to ensure that the shutdown operation can be performed in an appropriate thread. The system uses a thread blocking module to block relevant threads at the beginning of the shutdown operation to prevent data inconsistency and operation conflicts. The system uses a scheduling monitoring module to continuously monitor the scheduling of the production process to ensure that the shutdown operation will not affect other important production tasks. The system uses a status judgment module to judge the current system status and decide whether a shutdown operation is needed, thereby improving the accuracy and rationality of the shutdown decision and ensuring the smooth progress of the shutdown process and the stability of the system.

[0060] Specifically, the signal monitoring module monitors the shutdown signal through the JVM, wherein:

[0061] When the JVM monitors a non-shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that there is no shutdown signal;

[0062] When the JVM monitors the shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that the shutdown signal exists.

[0063] Specifically, the JVM refers to a fictitious computer realized by simulating various computer functions on an actual computer. It is a standard JVM for computing devices, which is the abbreviation of Java Virtual Machine. The shutdown signal refers to a signal sent by the operating system to instruct the termination of the production process.

[0064] Specifically, the signal monitoring module monitors the shutdown signal through the JVM to ensure that the system can respond quickly to potential shutdown requirements, thereby improving the agility and response speed of the system. When the JVM monitors a non-shutdown signal, the signal monitoring module can accurately determine that there is no shutdown requirement at present, avoiding unnecessary shutdown operations, thereby maintaining the continuity and efficiency of the production process and reducing production interruptions and losses caused by misjudgment. When the JVM monitors a shutdown signal, the signal monitoring module can promptly identify and determine the existence of a shutdown signal, ensuring that the system can quickly enter the shutdown process and prevent possible accidents and risks, thereby improving the safety and reliability of the production process. By clearly distinguishing between shutdown signals and non-shutdown signals, the signal monitoring module effectively reduces the risk of misoperation, ensures the accuracy and necessity of shutdown operations, further optimizes resource utilization efficiency, and reduces unnecessary downtime.

[0065] Specifically, the thread calling module determines the calling status of the shutdown thread according to the monitoring result of the shutdown signal, wherein:

[0066] When the monitoring result of the shutdown signal is determined to be that there is no shutdown signal, the thread calling module determines not to call the shutdown thread;

[0067] When it is determined that the monitoring result of the shutdown signal is that there is a shutdown signal, the thread calling module determines to call the shutdown thread and executes the shutdown thread.

[0068] Specifically, the shutdown thread refers to a thread used to perform cleanup operations when the application receives a shutdown signal, including releasing resources, saving status, closing files, disconnecting database connections, etc., to ensure that the application can terminate gracefully. The shutdown thread is usually implemented through a "shutdown hook" in the JVM environment.

[0069] Specifically, the thread calling module accurately controls the shutdown operation. When the monitoring result shows that there is no shutdown signal, the thread calling module will not call the shutdown thread to avoid unnecessary shutdown operations, thereby maintaining the normal operation of the system and improving production efficiency. When the monitoring result shows that there is a shutdown signal, the thread calling module will call and execute the shutdown thread in time to ensure that the system quickly enters the shutdown state, effectively prevent potential risks and accidents, protect system safety, effectively avoid waste of resources due to misoperation, ensure that system resources are reasonably utilized, and improve overall operating efficiency.

[0070] Specifically, when the thread calling module determines to call the shutdown thread, the thread blocking module determines whether there is a "running" or "to be scheduled" node instance in the node instance pool through an infinite loop in the blocking thread, and closes the trigger.

[0071] Specifically, the calling situation of the shutdown thread refers to the situation in which the thread calling module determines whether to call the shutdown thread, including not calling the shutdown thread and calling the shutdown thread. The process engine refers to a software tool that manages and coordinates the execution of multiple steps or tasks based on workflow technology, and is used to define, execute and monitor business processes. The trigger refers to a mechanism that is triggered based on certain events or conditions, such as time intervals, specific signals, state changes, etc., and is used to automatically start specific operations or tasks.

[0072] Specifically, the thread blocking module blocks the shutdown thread and closes the trigger to prevent new process instances from being triggered, paving the way for processing existing process node instances in the subsequent shutdown logic, thereby avoiding erroneous trigger responses to external trigger systems during the shutdown process. The process instance refers to a specific, executable process created based on a process template. The process template is a model of a workflow, which defines elements such as steps, participants, conditions and rules in the workflow. The workflow refers to a series of ordered activities, tasks or steps, which are usually carried out according to predetermined rules and sequence. The process node instance is a specific step or activity in the process instance. The node instance refers to a specific task instance generated after the process node instance is executed, representing the process node instantiation of the process node instance under a specific execution in a specific process instance.

[0073] Specifically, the state judgment module monitors the state of the process node instance in the process scheduling node instance pool, wherein:

[0074] When the process node instance scheduling operation in the process scheduling node instance pool is completed, the process engine module sets the process node instance state to running;

[0075] When the process node instance in the process scheduling node instance pool starts scheduling and running, the process engine module sets the state of the process node instance to running;

[0076] When the process node instance generated by the new scheduling in the process scheduling node instance pool is to be scheduled, the process engine module sets the state of the process node instance to be scheduled.

[0077] Specifically, the process scheduling node instance pool refers to a collection of all process node instances, which is used to store, manage and schedule node instances. The process node instance refers to a status identifier that describes the current execution status of the process node instance, including "running", "running" and "to be scheduled".

[0078] Specifically, the process engine updates the state of the process node instance according to the execution status of the node instance, wherein:

[0079] When the node instance to be scheduled starts scheduling execution, the process engine updates the state of the process node instance to running;

[0080] When the running node instance is executed, the process engine updates the state of the process node instance to running.

[0081] Specifically, the process engine controls the process scheduling node instance pool according to the process node instance state, wherein:

[0082] When the state of the process node instance is to be scheduled, the process engine does not delete the process node instance from the process scheduling node instance pool;

[0083] When the process node instance state is in running, the process engine does not delete the process node instance from the process scheduling node instance pool;

[0084] When the process node instance status is running, the process engine deletes the process node instance from the process scheduling node instance pool.

[0085] Specifically, the state judgment module judges the node instance state according to the number N of "to be scheduled" and "running" node instances in the node instance pool, where:

[0086] When N=0, the state judgment module determines that all node instances have been executed and releases the shutdown thread;

[0087] When N≠0, the state judgment module determines that there is an unfinished node instance, does not release the shutdown thread, and triggers a release shutdown signal.

[0088] Specifically, the remaining number of process node instances refers to the number of process node instances to be scheduled and running in the process scheduling node instance pool, and the release shutdown signal refers to a control signal that indicates whether the system can perform a shutdown operation after ensuring that the system is shut down in a safe state. This embodiment does not limit the triggering method of the release shutdown signal. Technical personnel in this field can freely set it according to actual conditions, and only need to meet the triggering requirements of the release shutdown signal, such as being set to be triggered by software, hardware, and a hybrid method.

[0089] It is worth mentioning that all modules involved in this embodiment are logic modules. In practical applications, a logic unit can be a physical unit, a part of a physical unit, or a combination of multiple physical units. In addition, in order to highlight the innovative part of this application, this embodiment does not introduce units that are not closely related to solving the technical problems proposed by this application, but this does not mean that there are no other units in this embodiment.

[0090] Second embodiment

[0091] See also Figure 2 As shown, it is a flow chart of the free stop control method of the semiconductor production process of this embodiment, and the method is applied to the system described in the first embodiment, including:

[0092] Monitor the shutdown signal through the signal monitoring module;

[0093] The shutdown thread is called through the thread calling module according to the monitoring result of the shutdown signal;

[0094] The thread blocking module blocks the shutdown thread according to the calling situation of the shutdown thread and closes the trigger;

[0095] Monitor the status of process node instances in the process scheduling node instance pool through the scheduling monitoring module;

[0096] The process engine is used to update the process node instance status and control the process scheduling node instance pool according to the process node instance status;

[0097] The state judgment module is used to judge the state of the node instance according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread.

[0098] Third embodiment

[0099] See also Figure 3-Figure 4 As shown, the process scheduling node instance pool refers to a collection of all process node instances, which is used to store, manage and schedule node instances. The process node instance status refers to a status identifier that describes the current execution status of the process node instance, including "running", "running" and "to be scheduled".

[0100] The step division of the above methods is only for the purpose of clear description. When implemented, they can be combined into one step or some steps can be split and decomposed into multiple steps. As long as they include the same logical relationship, they are all within the scope of protection of this patent; adding insignificant modifications to the algorithm or process or introducing insignificant designs without changing the core design of the algorithm and process are all within the scope of protection of this patent.

[0101] It is not difficult to find that this embodiment is a method embodiment corresponding to the first embodiment, and this embodiment can be implemented in conjunction with the first embodiment. The relevant technical details mentioned in the first embodiment are still valid in this embodiment, and in order to reduce repetition, they are not repeated here. Accordingly, the relevant technical details mentioned in this embodiment can also be applied in the first embodiment.

[0102] Fourth embodiment

[0103] In addition, some embodiments of the present application also provide an electronic device. The electronic device may be a digital computer in various forms, such as a laptop computer, a desktop computer, a workbench, a personal digital assistant, a server, a blade server, a mainframe computer, etc. The electronic device may also be a mobile device in various forms, such as a personal digital processing, a cellular phone, a smart phone, a wearable device, and other similar computing devices.

[0104] The electronic device includes: one or more processors; and a memory storing computer program instructions, wherein when the computer program instructions are executed, the processor executes the steps of the method provided in any one or more of the above embodiments. Figure 5 An exemplary structural diagram of the electronic device is disclosed. Figure 5 As shown, the electronic device includes: one or more processors 1101, a memory 1102, and interfaces for connecting various components, including high-speed interfaces and low-speed interfaces. The various components are connected to each other using different buses and can be installed on a common motherboard or installed in other ways as needed. The processor can process instructions executed in the electronic device, including instructions stored in or on the memory to display graphical information of the GUI on an external input / output device (such as a display device coupled to the interface). In some other embodiments, if necessary, multiple processors and / or multiple buses can be used with multiple memories and multiple memories. Similarly, multiple electronic devices can be connected, and each device provides some necessary operations (for example, as a server array, a group of blade servers, or a multi-processor system). Among them, the components shown in this article, their connections and relationships, and their functions are only examples, and are not intended to limit the implementation of the present application described and / or required herein.

[0105] The electronic device may further include: an input device 1103 and an output device 1104. The processor 1101, the memory 1102, the input device 1103 and the output device 1104 may be connected via a bus or other means. Figure 2 The example of connecting through bus is taken in the following.

[0106] The input device 1103 can receive input digital or character information, and generate key signal input related to the user settings and function control of the electronic device, such as a touch screen, a keypad, a mouse, a track pad, a touch pad, an indicator rod, one or more mouse buttons, a trackball, a joystick and other input devices. The output device 1104 may include a display device, an auxiliary lighting device (e.g., an LED) and a tactile feedback device (e.g., a vibration motor), etc. The display device may include, but is not limited to, a liquid crystal display (LCD), a light emitting diode (LED) display and a plasma display. In some embodiments, the display device may be a touch screen.

[0107] To provide interaction with a user, the electronic device may be a computer. The computer has: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and a pointing device (e.g., a mouse or a trackball), through which the user can provide input to the computer. Other types of devices may also be used to provide interaction with a user; for example, the feedback provided to the user may be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user may be received in any form (including acoustic input, voice input, or tactile input).

[0108] In the embodiments of the present application, a computer program / instruction is stored on a computer-readable medium, and when the computer program / instruction is executed by a processor, the steps of the method provided by any one or more of the above embodiments are implemented. The computer-readable medium may be included in the electronic device described in the above embodiments; or it may exist independently without being assembled into the device. The above computer-readable medium carries one or more computer-readable instructions.

[0109] The memory 1102 can be used as a non-transient computer-readable storage medium, which can be used to store non-transient software programs, non-transient computer executable programs and modules. The processor 1101 executes various functional applications and data processing of the server by running the non-transient software programs, instructions and modules stored in the memory 1102, so as to implement the program instructions / modules corresponding to the method provided by any one or more embodiments in the embodiments of the present application.

[0110] The memory 1102 may include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the electronic device, etc. In addition, the memory 1102 may include a high-speed random access memory, and may also include a non-transient memory, such as at least one disk storage device, a flash memory device, or other non-transient solid-state storage device. In some embodiments, the memory 1102 may optionally include a memory remotely arranged relative to the processor 1101, and these remote memories may be connected to the electronic device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0111] It should be noted that the computer-readable medium described in this application may be a computer-readable signal medium or a computer-readable storage medium or any combination of the above two. The computer-readable medium may be, for example, but not limited to, an electrical, magnetic, optical, electromagnetic, infrared or semiconductor system, device or device, or any combination of the above. More specific examples of computer-readable storage media may include, but are not limited to: an electrical connection with one or more wires, a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), an optical fiber, a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination of the above. In this application, a computer-readable medium may be any tangible medium containing or storing a program that can be used by or in combination with an instruction execution system, device or device.

[0112] Computer readable media include permanent and non-permanent, removable and non-removable media, and can be implemented by any method or technology to store information. Information can be computer readable instructions, data structures, modules of programs or other data. Examples of computer storage media include, but are not limited to, phase change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technology, read-only compact disk (CD-ROM), digital versatile disk (DVD) or other optical storage, magnetic cassettes, magnetic tape disk storage or other magnetic storage devices or any other non-transmission medium that can be used to store information that can be accessed by a computing device.

[0113] Computer program code for performing the operations of the present application may be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages, such as Java, Smalltalk, C++, and conventional procedural programming languages, such as "C" or similar programming languages. The program code may be executed entirely on the user's computer, partially on the user's computer, as a separate software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In the case of a remote computer, the remote computer may be connected to the user's computer through any type of network, including a local area network (LAN) or a wide area network (WAN), or may be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0114] In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. For example, an application specific integrated circuit (ASIC), a general-purpose computer or any other similar hardware device may be used to implement the embodiments. In some embodiments, the software program of the present application may be executed by a processor to implement the above steps or functions. Similarly, the software program of the present application (including related data structures) may be stored in a computer-readable recording medium, such as a RAM memory, a magnetic or optical drive or a floppy disk and the like. In addition, some steps or functions of the present application may be implemented by hardware, for example, as a circuit that cooperates with a processor to perform various steps or functions.

[0115] The computer program product provided in the embodiment of the present application includes one or more computer programs / instructions, which, when executed by the processor, generate in whole or in part the process or function described in the embodiment of the present application. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website site, a computer, a server, or a data center to another website site, a computer, a server, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that a computer can access or a data storage device such as a server or a data center that includes one or more available media integrated. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a tape), an optical medium (e.g., a DVD), or a semiconductor medium (e.g., a solid state disk (SSD)), etc.

[0116] The flow chart or block diagram in the accompanying drawings shows the possible architecture, function and operation of the equipment, method and computer program product according to various embodiments of the present application. In this regard, each box in the flow chart or block diagram can represent a module, a program segment or a part of a code, and the module, the program segment or a part of the code contains one or more executable instructions for realizing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box can also occur in a different order from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram and / or flow chart, and the combination of the boxes in the block diagram and / or flow chart can be implemented with a dedicated system for hardware that performs a specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions.

[0117] The scope of the present application is defined by the appended claims rather than the above description, and it is intended that all changes that fall within the meaning and scope of the equivalent elements of the claims are included in the present application. Any figure mark in the claims should not be regarded as limiting the claims involved. In addition, it is clear that the word "comprising" does not exclude other units or steps, and the singular does not exclude the plural. Multiple units or devices stated in the device claim may also be implemented by one unit or device through software or hardware. The words "first", "second", etc. are only used to distinguish the description, and do not indicate any particular order, nor can they be understood as indicating or implying relative importance.

[0118] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily mention changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims, and the above embodiments should be regarded as exemplary and non-restrictive.

Claims

1. A free stop control system for a semiconductor production process, characterized in that: include: A signal monitoring module is used to monitor the shutdown signal; The signal monitoring module monitors the shutdown signal through the JVM, wherein: when the JVM monitors a non-shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that there is no shutdown signal; when the JVM monitors a shutdown signal, the signal monitoring module determines that the monitoring result of the shutdown signal is that there is a shutdown signal; A thread calling module is used to call the shutdown thread according to the monitoring result of the shutdown signal; the thread calling module judges the calling status of the shutdown thread according to the monitoring result of the shutdown signal, wherein: when it is judged that the monitoring result of the shutdown signal is that there is no shutdown signal, the thread calling module determines not to call the shutdown thread; when it is judged that the monitoring result of the shutdown signal is that there is a shutdown signal, the thread calling module determines to call the shutdown thread and execute the shutdown thread; The thread blocking module is used to block the shutdown thread according to the calling situation of the shutdown thread and close the trigger; when the thread calling module determines to call the shutdown thread, the thread blocking module determines whether there is a "running" or "to be scheduled" node instance in the node instance pool through the dead loop in the blocking thread, and closes the trigger; The scheduling monitoring module is used to monitor the status of process node instances in the process scheduling node instance pool; The process engine is used to update the state of the process node instance and control the process scheduling node instance pool according to the state of the process node instance; A status judgment module is used to judge the node instance status according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread; the status judgment module monitors the process node instance status in the process scheduling node instance pool, wherein: when the process node instance in the process scheduling node instance pool is scheduled and run, the process engine module sets the process node instance status to run; when the process node instance in the process scheduling node instance pool starts to be scheduled, the process engine module sets the process node instance status to running; when the newly scheduled process node instance in the process scheduling node instance pool is to be scheduled, the process engine module sets the process node instance status to to be scheduled.

2. The free stop control system for semiconductor production process according to claim 1, characterized in that: The process engine updates the state of the process node instance according to the execution status of the node instance, wherein: When the node instance to be scheduled starts scheduling execution, the process engine updates the state of the process node instance to running; When the running node instance is executed, the process engine updates the state of the process node instance to running.

3. The free stop control system for semiconductor production process according to claim 2, characterized in that: The process engine controls the process scheduling node instance pool according to the process node instance state, wherein: When the state of the process node instance is to be scheduled, the process engine does not delete the process node instance from the process scheduling node instance pool; When the process node instance state is in running, the process engine does not delete the process node instance from the process scheduling node instance pool; When the process node instance status is running, the process engine deletes the process node instance from the process scheduling node instance pool.

4. The free stop control system for semiconductor production process according to claim 3, characterized in that: The state judgment module judges the node instance state according to the number N of "to be scheduled" and "in operation" node instances in the node instance pool, wherein: When N=0, the state judgment module determines that all node instances have been executed and releases the shutdown thread; When N≠0, the state judgment module determines that there is an unfinished node instance, does not release the shutdown thread, and triggers a release shutdown signal.

5. A method for controlling a free stop of a semiconductor production process, characterized in that: Applied to a free stop control system of a semiconductor production process as claimed in any one of claims 1 to 4, the method comprises: Monitor the shutdown signal through the signal monitoring module; The shutdown thread is called through the thread calling module according to the monitoring result of the shutdown signal; The thread blocking module blocks the shutdown thread according to the calling situation of the shutdown thread and closes the trigger; Monitor the status of process node instances in the process scheduling node instance pool through the scheduling monitoring module; The process engine is used to update the process node instance status and control the process scheduling node instance pool according to the process node instance status; The state judgment module is used to judge the state of the node instance according to the number of "to be scheduled" and "running" node instances in the node instance pool, and is also used to judge the release of the shutdown thread.

6. An electronic device, characterized in that: The electronic device comprises: one or more processors; and A memory storing computer program instructions which, when executed, cause the processor to perform the steps of the method as claimed in claim 5.

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