Half-cell product processing equipment, passivation production line, solar cell production line and production process

Abstract

The present application relates to the fields of photovoltaic and semiconductor technology, and in particular to a half-cut product processing equipment, a passivation production line, a solar cell production line and a production process, which solves the problem of low production efficiency of the half-cut product processing equipment. The half-cut product processing equipment includes a slicing device, a box forming device, a box moving device, a reactor and a boat transport device. The slicing device is used to cut the product to be processed into half-cut products to be processed, the box forming device is used to load the half-cut products to be processed into a material box, the box moving device is used to transport the material box loaded with the half-cut product to be processed to the boat structure, or to unload the material box loaded with the processed half-cut product from the boat structure, the reactor is used to coat the half-cut product, and the boat transport device is used to transport the boat structure loaded with the half-cut product to be processed to the reactor. The half-cut product processing equipment integrates the above-mentioned various devices together, realizes the automated processing of half-cut products, and improves production efficiency.

Description

Technical Field

[0001] The present application relates to the fields of photovoltaic and semiconductor technology, and in particular to a half-cell product processing equipment, a passivation production line, a solar cell production line and a production process. Background Art

[0002] Semiconductor and photovoltaic materials are widely used in electronics, new energy and other industries, and semiconductor and photovoltaic materials usually need to undergo chemical treatment before they can be applied to products. At present, the industry has more diversified demands for the size of semiconductor and photovoltaic materials. Since the raw materials are all standard sizes, in order to obtain smaller-sized materials, the original standard-sized materials will be cut. The half-sheet materials obtained after cutting the original standard-sized materials will produce cross-sections, which will have a negative impact on the performance of the materials. Therefore, the cross-sections need to be coated and passivated. Atomic layer deposition (ALD) is a coating passivation technology that has been widely used in the processing of semiconductor and photovoltaic materials. The corresponding processing equipment needs to be selected according to specific processing requirements.

[0003] However, at present, the cutting devices and coating devices for semiconductor and photovoltaic materials are set up independently of each other, and mechanisms such as transport vehicles are needed to realize the flow of materials between the devices. At the same time, the degree of automation of the half-wafer product processing equipment is low, resulting in low production efficiency of the half-wafer product processing equipment. Summary of the Invention

[0004] In view of this, the embodiments of the present application provide a half-cell product processing equipment, a passivation production line, a solar cell production line and a production process, which solve the problem of low production efficiency of the half-cell product processing equipment.

[0005] In a first aspect, an embodiment of the present application provides a half-sheet product processing device, comprising: a slicing device, configured to cut a whole sheet of product into at least two half-sheet products to be processed; a box-forming device, arranged adjacent to the slicing device, at least one side of the box-forming device being provided with a material box placement space, the material box placement space being configured to accommodate a material box, the box-forming device being configured to load the half-sheet product to be processed into the material box located in the material box placement space; a box-moving device, arranged adjacent to the box-moving device, at least one side of the box-moving device being provided with a boat structure placement space, the boat structure placement space being configured to accommodate a boat structure, the box-moving device being configured to place the half-sheet product to be processed into the material box located in the material box placement space The material box loaded with the half-sheet product to be processed in the material box placement space is moved to the boat structure located in the boat structure placement space, or the material box loaded with the processed half-sheet product is unloaded from the boat structure located in the boat structure placement space; the reaction furnace is configured to coat the half-sheet product; the boat transportation device is arranged between the box moving device and the reaction furnace, and is configured to transport the boat structure loaded with the half-sheet product to be processed to the reaction furnace, so that the reaction furnace coats the half-sheet product carried by the boat structure, or transports the boat structure loaded with the processed half-sheet product out of the reaction furnace.

[0006] In some embodiments, the half-sheet product processing equipment further includes: at least two material box circulation devices, which are arranged adjacent to the box moving device and spaced apart in the vertical direction, wherein one of the material box circulation devices is configured to transport the empty material box, and the other material box circulation device is configured to transport the material box loaded with the processed half-sheet product; a lower box device, which is arranged adjacent to the material box circulation device and is configured to transport the empty material box from the material box circulation device to the material box placement space; wherein the box moving device is further configured to transport the material box loaded with the processed half-sheet product carried by the boat structure from the boat structure to the material box circulation device.

[0007] In some embodiments, there are multiple reaction furnaces; wherein the boat transport device includes: at least one boat pushing device, which is arranged adjacent to the multiple reaction furnaces and is configured to send the boat structure into any one of the reaction furnaces or transport the boat structure out of any one of the reaction furnaces; multiple boat structure cache devices, which are arranged adjacent to the boat pushing device and are configured to cache the boat structure; a boat moving device, which is arranged adjacent to the boat pushing device, the boat structure cache device and the boat structure placement space, and is configured to move the boat structure from the boat structure placement space to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat pushing device, or move the boat structure from the boat pushing device to the boat structure cache device, and move the boat structure from the boat structure cache device to the boat structure placement space.

[0008] In some embodiments, there are multiple boat pushing devices; multiple reaction furnaces are arranged along a first direction, multiple boat pushing devices are arranged along the first direction, multiple boat structure cache devices are arranged along the first direction, the boat structure cache device, the boat pushing device and the reaction furnace are arranged along a second direction, and the second direction intersects with the first direction; and / or, the boat moving device is arranged above the boat structure cache device and the boat pushing device.

[0009] In some embodiments, there are multiple boat pushing devices, and the multiple boat pushing devices are arranged along the first direction; the multiple reaction furnaces are arranged along the first direction and arranged into multiple layers along the vertical direction, and the boat pushing device can move along the vertical direction to send the boat structure into any layer of the reaction furnace or transport the boat structure out of any layer of the reaction furnace.

[0010] In some embodiments, the boat moving device includes: a first linear motion mechanism, configured to be able to move along the second direction; a second linear motion mechanism, connected to the first linear motion mechanism, configured to be able to move along the first direction, wherein the second linear motion mechanism can also move along the second direction under the drive of the first linear motion mechanism; a boat grasping mechanism, connected to the second linear motion mechanism, configured to grasp the boat structure, wherein the boat grasping mechanism can move along the first direction and the second direction under the drive of the second linear motion mechanism.

[0011] In some embodiments, the half-piece product processing equipment also includes: a cleaning device, which is arranged between the splitting device and the box-forming device, and is configured to receive the half-piece product to be processed on the splitting device and clean the half-piece product to be processed; wherein, the box-forming device is further configured to load the cleaned half-piece product to be processed into the material box located in the material box placement space.

[0012] In some embodiments, the slicing device includes: at least one material receiving mechanism, configured to receive the whole product; at least two slicing mechanisms, each material receiving mechanism is connected to at least one slicing mechanism, and the slicing mechanism is configured to receive the product to be processed conveyed by the material receiving mechanism, and cut the product to be processed into at least two half-piece products to be processed; wherein, the cleaning device includes: at least two cleaning mechanisms, respectively connected to at least two of the slicing mechanisms, configured to receive the half-piece products to be processed on the slicing mechanisms, and clean the half-piece products to be processed; wherein, the boxing device includes: at least two boxing mechanisms, respectively connected to at least two of the cleaning mechanisms, configured to receive the cleaned half-piece products to be processed on the cleaning mechanisms, and load the cleaned half-piece products to be processed into the material box located in the material box placement space.

[0013] In some embodiments, the half-sheet product processing equipment also includes: a material box cache device, which is arranged adjacent to the material box circulation device and is configured to cache the material box loaded with the processed half-sheet product; a unloading device, which is arranged above the material box circulation device and the material box cache device, and is configured to transport the material box loaded with the processed half-sheet product from the material box circulation device to the material box cache device; a product transportation device, which is configured to transport the processed half-sheet product; a sheet guide device, which is arranged adjacent to the unloading device and the product transportation device, and is configured to obtain the processed half-sheet product in the material box carried by the material box cache device, and place the processed half-sheet product on the product transportation device.

[0014] In some embodiments, the half-sheet product processing equipment also includes: an optical detection device, which is arranged adjacent to the product transport device, configured to receive the processed half-sheet product conveyed by the product transport device, and perform optical detection on the processed half-sheet product; an electroluminescent detection device, which is arranged adjacent to the optical detection device, configured to receive the processed half-sheet product after optical detection, and perform electroluminescent detection on the processed half-sheet product after optical detection.

[0015] In some embodiments, the half-wafer product processing equipment also includes: an infrared imaging detection device, which is arranged adjacent to the electroluminescent detection device, configured to receive the processed half-wafer product after electroluminescent detection, and perform infrared imaging detection on the processed half-wafer product after electroluminescent detection.

[0016] In some embodiments, the half-sheet product processing equipment further includes: a sorting device, which is arranged adjacent to the infrared imaging detection device, and is configured to receive the processed half-sheet products after infrared imaging detection, and sort the processed half-sheet products after infrared imaging detection into multiple grades; and multiple unloading devices, which are arranged adjacent to the sorting device, and are respectively configured to receive multiple grades of the half-sheet products.

[0017] In some embodiments, the material box circulation device for transporting the material box loaded with the processed half-sheet product includes: a material box circulation mechanism for transporting the material box loaded with the processed half-sheet product; a first material box steering mechanism, arranged adjacent to the material box circulation mechanism, configured to receive the material box loaded with the processed half-sheet product and rotate the material box in a horizontal plane; wherein the unloading device is further configured to transport the material box loaded with the processed half-sheet product from the first material box steering mechanism to the material box cache device.

[0018] In some embodiments, the box-forming device includes: a box-forming mechanism, which is arranged adjacent to the slicing device and is configured to load the half-sheet product to be processed into the material box located in the material box placement space; a second material box steering mechanism, which is arranged adjacent to the box-forming mechanism and is configured to obtain the material box located in the material box placement space and rotate the material box in a horizontal plane; wherein, the box-moving device is further configured to transport the material box loaded with the half-sheet product to be processed located in the second material box steering mechanism to the boat structure located in the boat structure placement space.

[0019] In a second aspect, an embodiment of the present application provides a passivation production line, comprising: at least one half-wafer product processing device as described in the first aspect; wherein, when the passivation production line includes a plurality of the half-wafer product processing devices, the plurality of the half-wafer product processing devices are arranged in a matrix in a horizontal plane, and / or, the plurality of the half-wafer product processing devices are arranged in a matrix in a vertical plane.

[0020] In a third aspect, an embodiment of the present application provides a solar cell production line, comprising: at least one half-cell product processing device as described in the first aspect.

[0021] In a fourth aspect, an embodiment of the present application provides a solar cell production process, wherein the solar cell production process adopts: at least one half-cell product processing device as described in the first aspect.

[0022] The half-wafer product processing equipment provided in the embodiment of the present application integrates a slicing device, a box forming device, a box moving device, a reaction furnace and a boat transport device, thereby realizing the automated processing of half-wafer products without the need for an Automatic Guided Vehicle (AGV) cart for circulation and transportation. The integrated equipment greatly improves space utilization and increases production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0024] Figure 1 Shown is a structural schematic diagram of a half-wafer product processing equipment provided in one embodiment of the present application.

[0025] Figure 2 The figure shows a schematic structural diagram of a boat transport device, a reaction furnace, a vacuum device and a material box circulation device provided in one embodiment of the present application.

[0026] Figure 3 Shown is a side view of a boat transport device, a boat, and a reaction furnace provided in one embodiment of the present application.

[0027] Figure 4 Shown is a structural schematic diagram of a boat moving device provided in one embodiment of the present application.

[0028] Figure 5 Shown is a side view of a boat moving device provided in one embodiment of the present application.

[0029] Figure 6 Shown is a schematic structural diagram of a splitting device and a cleaning device provided in one embodiment of the present application.

[0030] Figure 7 Shown is a schematic structural diagram of a cleaning device, a box forming device and a box unloading device provided in one embodiment of the present application.

[0031] Figure 8 Shown is a structural schematic diagram of a box moving device, a material box circulation device and a boat structure provided in one embodiment of the present application.

[0032] Figure 9 Shown is a structural schematic diagram of half-wafer product processing equipment provided by another embodiment of the present application.

[0033] Figure 10The figure shows a schematic structural diagram of a material box circulation device, a material box buffer device and a material discharge device, a product transport device and a guide device provided in one embodiment of the present application.

[0034] Figure 11 Shown is a schematic structural diagram of a product transport mechanism, a detection device, a sorting device and a sheet unloading device provided in one embodiment of the present application.

[0035] Figure 12 Shown is a schematic structural diagram of a passivation production line provided in one embodiment of the present application.

[0036] Figure 13 Shown is a structural schematic diagram of a solar cell production line provided in one embodiment of the present application.

[0037] Reference numerals:

[0038] 1. Passivation production line; 10. Semi-wafer product processing equipment; 100. Slicing device; 110. Material receiving mechanism; 120. Slicing mechanism; 200. Box forming device; 210. Box forming mechanism; 220. Second material box steering mechanism; 300. Box moving device; 400. Reactor; 410. Furnace body; 4101. Reaction chamber; 420. Support structure; 500. Boat transport device; 510. Boat pushing device; 5110. Paddle ; 5120, push boat drive; 520, boat structure buffer device; 530, boat moving device; 5310, first linear motion mechanism; 5320, second linear motion mechanism; 5330, boat grabbing mechanism; 5340, support frame; 600, material box circulation device; 610, material box circulation mechanism; 620, first material box steering mechanism; 700, unloading device; 800, cleaning device; 810, cleaning mechanism; 900, Material box buffer device; 910, material box buffer position; 1000, unloading device; 1100, product transportation device; 1110, product transportation mechanism; 1200, sheet guide device; 1210, sheet guide mechanism; 1300, optical detection device; 1310, optical detection mechanism; 1400, electroluminescent detection device; 1410, electroluminescent detection mechanism; 1500, infrared imaging detection device; 1510, infrared imaging detection mechanism; 1600, sorting device; 1610, sorting mechanism; 1700, sheet unloading device; 1800, material box conveying device; 1900, vacuum pumping device; 2000, rejection device; 101, material box placement space; 102, boat structure placement space; X1, first direction; X2, second direction; 2, product; 21, half-sheet product; 3, material box; 4, boat structure; 11, solar cell production line. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0040] The specific structure of the half-sheet product processing equipment is described below with reference to an embodiment.

[0041] Figure 1 The figure shows a schematic diagram of the structure of a half-sheet product processing device provided by an embodiment of the present application. Figure 1 As shown, the half-wafer product processing equipment 10 includes: a wafer splitting device 100 , a box forming device 200 , a box moving device 300 , a reaction furnace 400 and a boat transport device 500 .

[0042] The slicing device 100 is configured to cut a whole product 2 into at least two half-products 21 to be processed. The boxing device 200 is disposed adjacent to the slicing device 100. A cassette placement space 101 is provided on at least one side of the boxing device 200. The cassette placement space 101 is configured to accommodate a cassette 3. The boxing device 200 is configured to load the half-products 21 to be processed into the cassette 3 located in the cassette placement space 101. A box moving device 300 is disposed adjacent to the boxing device 200. A boat placement space 102 is provided on at least one side of the box moving device 300. The boat placement space 102 is configured to accommodate a boat 4. The box moving device 300 is configured to move the cassette 3 containing the half-products 21 to be processed in the cassette placement space 101 to the boat 4 located in the boat placement space 102, or to unload the cassette 3 containing the processed half-products 21 from the boat 4 located in the boat placement space 102. The reactor 400 is configured to coat the half-wafer products 21. The boat transport device 500 is disposed between the box moving device 300 and the reactor 400 and is configured to transport the boat structure 4 carrying the half-wafer products 21 to be processed to the reactor 400 so that the reactor 400 can coat the half-wafer products 21 carried by the boat structure 4, or to transport the boat structure 4 carrying the processed half-wafer products 21 out of the reactor 400.

[0043] The half-sheet product processing equipment 10 integrates a splitting device 100, a box forming device 200, a box moving device 300, a reaction furnace 400 and a boat transport device 500, thereby realizing the automated processing of the half-sheet product 21 without the need for AGV carts for circulation and transportation. The integrated equipment greatly improves space utilization and increases production efficiency.

[0044] Exemplarily, the splitting device 100 uses laser splitting to cut the whole product 2 into at least two half-sheet products 21 to be processed.

[0045] Illustratively, the cartoning device 200 may include a robotic arm, a linear module, or other driving structure capable of providing a driving force, and a gripping structure connected to the driving structure. The driving structure drives the gripping structure to move, so that the gripping structure can grip the half-sheet product 21 to be processed and load the half-sheet product 21 to be processed into the magazine 3 located in the magazine placement space 101. Illustratively, the gripping structure may be a gripper, a suction cup, or other structure with a gripping function.

[0046] Exemplarily, the box moving device 300 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a box grabbing structure connected to the driving structure, and the driving structure drives the box grabbing structure to move so that the box grabbing structure can grab the material box 3.

[0047] For example, the product 2 may be a silicon wafer, a solar panel, a glass substrate, etc. For example, the half-wafer product 21 may be a silicon wafer with a cross section, the cross section of the silicon wafer with a cross section being passivated by a coating.

[0048] In some embodiments, the semi-cut product processing equipment 10 further includes at least two material box circulation devices 600 and a lower box device 700. The at least two material box circulation devices 600 are disposed adjacent to the box moving device 300 and spaced apart in the vertical direction. One material box circulation device 600 is configured to transport empty material boxes 3, and the other material box circulation device 600 is configured to transport material boxes 3 loaded with processed semi-cut products 21. The lower box device 700 is disposed adjacent to the material box circulation device 600 and is configured to transport empty material boxes 3 from the material box circulation device 600 to the material box placement space 101. The box moving device 300 is further configured to transport material boxes 3 loaded with processed semi-cut products 21 carried by the boat structure 4 from the boat structure 4 to the material box circulation device 600.

[0049] For example, the half-sheet product processing equipment 10 further includes two magazine transfer devices 600 , which are vertically spaced apart and used to transport empty magazines 3 and magazines 3 loaded with processed half-sheet products 21 , respectively.

[0050] The lower box device 700 is used in cooperation with a material box circulation device 600 to transport the empty material box 3 from the material box circulation device 600 to the material box placement space 101, and the half-piece product 21 to be processed is loaded into the material box 3 located in the material box placement space 101 by using the box forming device 200, and the material box 3 loaded with the half-piece product 21 to be processed located in the material box placement space 101 is transported to the boat structure 4 located in the boat structure placement space 102 by using the box moving device 300, thereby realizing the loading process of the half-piece product 21 to be processed in the boat structure 4.

[0051] The box moving device 300 is used to unload the material box 3 loaded with the processed half-sheet product 21 from the boat structure 4 located in the boat structure placement space 102, and transport it to another material box circulation device 600, thereby realizing the unloading process of the processed half-sheet product 21 in the boat structure 4.

[0052] The above-mentioned devices of the half-sheet product processing equipment 10 cooperate with each other to realize the automated and synchronous loading and unloading processes of the half-sheet products 21 in the boat structure 4, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0053] Exemplarily, the lower box device 700 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a box grabbing structure connected to the driving structure, and the driving structure drives the box grabbing structure to move so that the box grabbing structure can grab the material box 3.

[0054] Exemplarily, the material box circulation device 600 includes a conveyor belt circulation line, and the material box circulation device 600 extends along the second direction X2.

[0055] In some embodiments, there are multiple reactors 400, and the boat transport device 500 includes at least one boat pushing device 510, multiple boat structure buffer devices 520, and a boat moving device 530. The at least one boat pushing device 510 is disposed adjacent to the reactor 400 and is configured to send the boat structure 4 into or out of any reactor 400. The multiple boat structure buffer devices 520 are disposed adjacent to the boat pushing device 510 and are configured to buffer the boat structure 4. The boat moving device 530 is disposed adjacent to the boat pushing device 510, the boat structure buffer devices 520, and the magazine placement space 101 and is configured to move the boat structure 4 from the boat structure placement space 101 to the boat structure buffer devices 520, and then move the boat structure 4 from the boat structure buffer devices 520 to the boat pushing device 510, or to move the boat structure 4 from the boat pushing device 510 to the boat structure buffer devices 520, and then move the boat structure 4 from the boat structure buffer devices 520 to the boat placement space 101.

[0056] For example, Figure 3As shown, the reactor 400 includes a furnace body 410 and a support structure 420. The furnace body 410 has a reaction chamber 4101. The support structure 420 is disposed in the reaction chamber 4101 and is configured to support the boat structure 4. The boat pusher device 510 includes a paddle 5110 and a boat pusher drive 5120. The paddle 5110 is configured to support the boat structure 4. The boat pusher drive 5120 is connected to the paddle 5110 to drive the paddle 5110 to transport the boat structure 4 to the support structure 420 and to drive the paddle 5110 out of the reaction chamber 4101. When the reactor 400 is processing the half-wafer product 21, the paddle 5110 is withdrawn from the reaction chamber 4101, which can prevent the process gas from corroding the paddle 5110, thereby increasing the service life of the paddle 5110.

[0057] In some embodiments, as Figure 1 and Figure 2 As shown, multiple reaction furnaces 400 are arranged along the first direction X1, multiple boat pushing devices 510 are arranged along the first direction X1, multiple boat structure buffer devices 520 are arranged along the first direction X1, the boat structure buffer devices 520, the boat pushing devices 510 and the reaction furnaces 400 are arranged along the second direction X2, and the second direction X2 intersects with the first direction X1.

[0058] In some embodiments, a plurality of boat pushers 510 are arranged along a first direction X1, and a plurality of reaction furnaces 400 are arranged along the first direction X1 and arranged in multiple layers in a vertical direction. The boat pushers 510 can move in a vertical direction to send the boat structure 4 into or out of the reaction furnaces 400 on any layer.

[0059] In some embodiments, the boat moving device 530 is disposed above the boat structure buffer device 520 and the boat pushing device 510 .

[0060] The boat structure buffer device 520, the boat pushing device 510 and the reaction furnace 400 are regularly arranged to more reasonably utilize the space, thereby improving the production efficiency of the half-wafer product processing equipment 10 in a limited space.

[0061] In addition, the space in the vertical direction is rationally utilized to shorten the distance between the boat structure buffer device 520 and the boat pushing device 510, and reduce the circulation time of the boat structure 4 between the boat structure buffer device 520 and the boat pushing device 510, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0062] In some embodiments, the second direction X2 is perpendicular to the first direction X1, and the second direction X2 and the first direction X1 are both horizontal directions, so that the arrangement of the various devices of the half-sheet product processing equipment 10 is more regular, thereby more reasonably utilizing the space and further improving the production efficiency of the half-sheet product processing equipment 10 in a limited space.

[0063] In some embodiments, the number of boat structure buffer devices 520 is greater than the number of boat pushing devices 510 , and the number of boat pushing devices 510 is greater than the number of boat moving devices 530 .

[0064] In some embodiments, the number of the boat structure buffer devices 520 is greater than or equal to four, and the number of the boat pushing devices 510 is greater than or equal to three.

[0065] By properly setting the number of each device, the reactor 400 is provided with enough boat structures 4 loaded with half-wafer products 21 to be processed, thereby avoiding the reactor 400 having to wait for the half-wafer products 21 to be processed.

[0066] In other words, the boat moving devices 530 have a high boat moving efficiency and can be used in relatively small numbers. However, the boat pushing devices 510 need to correspond one-to-one with each reactor 400, so there are more boat pushing devices 510 than boat moving devices 530. The boat structure buffer devices 520 need to buffer as many boat structures 4 as possible to provide sufficient boat structures 4 for the boat pushing devices 510, so there are more boat structure buffer devices 520 than there are boat pushing devices 510.

[0067] In some embodiments, as Figure 4 and Figure 5 As shown, the boat moving device 530 includes a first linear motion mechanism 5310, a second linear motion mechanism 5320, and a boat grabbing mechanism 5330. The first linear motion mechanism 5310 is configured to move in the second direction X2. The second linear motion mechanism 5320 is connected to the first linear motion mechanism 5310 and is configured to move in the first direction X1. Driven by the first linear motion mechanism 5310, the second linear motion mechanism 5320 can also move in the second direction X2. The boat grabbing mechanism 5330 is connected to the second linear motion mechanism 5320 and is configured to grasp the boat structure 4. Driven by the second linear motion mechanism 5320, the boat grabbing mechanism 5330 can move in both the first direction X1 and the second direction X2.

[0068] The second linear motion mechanism 5320 of the boat moving device 530 is capable of moving in a first direction X1. Driven by the first linear motion mechanism 5310, the second linear motion mechanism 5320 is also capable of moving in a second direction X2, thereby achieving bidirectional motion of the second linear motion mechanism 5320. This allows the boat grasping mechanism 5330 to grasp the boat structure 4 at different positions on the boat structure buffer device 520 and the boat pushing device 510. The boat moving device 530 has a simple structure and a simple driving method, which can further simplify the structure of the semi-sheet product processing equipment 10.

[0069] Illustratively, the boat moving device 530 further includes a support frame 5340, which is connected to the first linear motion mechanism 5310 and is configured to support the first linear motion mechanism 5310. Illustratively, the support frame 5340 can be placed on the ground or hoisted on the roof of a factory building.

[0070] In some embodiments, as Figure 1 As shown, the semi-cut product processing equipment 10 further includes a cleaning device 800, which is disposed between the splitting device 100 and the cartoning device 200 and is configured to receive the semi-cut product 21 to be processed from the splitting device 100 and clean the semi-cut product 21. The cartoning device 200 is further configured to load the cleaned semi-cut product 21 to be processed into the magazine 3 located in the magazine placement space 101.

[0071] The cleaning device 800 is used to clean the half-wafer product 21 to be processed to remove dust on the surface of the half-wafer product 21.

[0072] For example, the cleaning device 800 may use an immersion or spray cleaning method to clean the half-wafer product 21 to be processed.

[0073] In some embodiments, as Figure 6 As shown, the splitting device 100 includes at least one receiving mechanism 110 and at least two splitting mechanisms 120. The receiving mechanism 110 is configured to receive a whole product 2. Each receiving mechanism 110 is connected to at least one splitting mechanism 120. The splitting mechanism 120 is configured to receive the product 2 to be processed from the receiving mechanism 110 and cut the product 2 to be processed into at least two half-products 21 to be processed. The cleaning device 800 includes at least two cleaning mechanisms 810, each connected to the at least two splitting mechanisms 120. The at least two cleaning mechanisms 810 are configured to receive the half-products 21 to be processed from the splitting mechanisms 120 and clean them.

[0074] like Figure 7 As shown, the box-forming device 200 includes at least two box-forming mechanisms 210, and the at least two box-forming mechanisms 210 are respectively connected to at least two cleaning mechanisms 810, and are configured to receive the cleaned half-sheet products 21 to be processed on the cleaning mechanisms 810, and load the cleaned half-sheet products 21 to be processed into the material box 3 located in the material box placement space 101.

[0075] The production efficiency of the half-sheet product processing equipment 10 is further improved by utilizing the cooperation of multiple material receiving mechanisms 110 , multiple sheet splitting mechanisms 120 and multiple box forming mechanisms 210 .

[0076] For example, Figure 7 and Figure 8As shown, a cassette conveying device 1800 is provided on one side of the box-forming mechanism 210 and is configured to receive cassettes 3 loaded with semi-cut products 21 to be processed, conveyed by the box-forming mechanism 210. The cassette moving device 300 is further configured to receive cassettes 3 loaded with semi-cut products 21 to be processed, conveyed by the cassette conveying device 1800, and to move the cassettes 3 loaded with semi-cut products 21 to be processed to the boat structures 4 located in the boat structure placement spaces 102. For example, boat structure placement spaces 102 are provided on both sides of the cassette moving device 300. Each boat structure placement space 102 can accommodate at least one boat structure 4. The boat transport device 500 is disposed adjacent to the boat structure placement spaces 102.

[0077] In some embodiments, as Figure 9 As shown, the semi-cut product processing equipment 10 further includes a magazine buffer device 900, a feeding device 1000, a product transport device 1100, and a sheet guide device 1200. The magazine buffer device 900 is located adjacent to the magazine circulation device 600 and is configured to buffer magazines 3 loaded with processed semi-cut products 21. The feeding device 1000 is located above the magazine circulation device 600 and the magazine buffer device 900 and is configured to transfer magazines 3 loaded with processed semi-cut products 21 from the magazine circulation device 600 to the magazine buffer device 900. The product transport device 1100 is configured to transport the processed semi-cut products 21. The sheet guide device 1200 is located adjacent to the feeding device 1000 and the product transport device 1100 and is configured to receive the processed semi-cut products 21 from the magazine 3 carried by the magazine buffer device 900 and place the processed semi-cut products 21 on the product transport device 1100. The above-mentioned devices can realize the automated unloading process of the processed half-sheet products 21 loaded in the material box 3, so as to further improve the automation level of the half-sheet product processing equipment 10.

[0078] Exemplarily, the unloading device 1000 may include a robotic arm, a linear module or other driving structure capable of providing driving force, and a box picking structure connected to the driving structure. The driving structure drives the box picking structure to move so that the box picking structure can grab the material box 3 loaded with processed half-sheet products 21 on the material box circulation device 600, and transport the material box 3 loaded with processed half-sheet products 21 from the material box circulation device 600 to the material box cache device 900.

[0079] In some embodiments, as Figure 9As shown, the semi-cut product processing equipment 10 further includes an optical inspection device 1300 and an electroluminescent inspection device 1400. The optical inspection device 1300 is positioned adjacent to the product transport device 1100 and is configured to receive processed semi-cut products 21 conveyed by the product transport device 1100 and perform optical inspection on the processed semi-cut products 21. The electroluminescent inspection device 1400 is positioned adjacent to the optical inspection device 1300 and is configured to receive processed semi-cut products 21 after optical inspection and perform electroluminescent inspection on the processed semi-cut products 21 after optical inspection. For example, the optical inspection device 1300 may be an automatic optical inspection (AOI) device, a manual optical inspection device, or the like.

[0080] The optical inspection device 1300 is used to perform automated optical inspection on the processed half-wafer product 21 , and the electroluminescent inspection device 1400 is used to perform automated electroluminescent inspection on the processed half-wafer product 21 , so as to further improve the automation level of the half-wafer product processing equipment 10 .

[0081] In some embodiments, as Figure 9 As shown, the half-wafer product processing equipment 10 also includes an infrared imaging detection device 1500. The infrared imaging detection device 1500 is arranged adjacent to the electroluminescence detection device 1400, and is configured to receive the processed half-wafer product 21 after electroluminescence detection, and perform infrared imaging detection on the processed half-wafer product 21 after electroluminescence detection.

[0082] The infrared imaging detection device 1500 is used to perform automatic infrared imaging detection on the processed half-wafer product 21 to further improve the automation level of the half-wafer product processing equipment 10.

[0083] In some embodiments, as Figure 9 As shown, the semi-cut product processing equipment 10 further includes a sorting device 1600 and multiple unloading devices 1700. The sorting device 1600 is disposed adjacent to the infrared imaging detection device 1500 and is configured to receive processed semi-cut products 21 after infrared imaging detection and sort the processed semi-cut products 21 into multiple grades. The multiple unloading devices 1700 are disposed adjacent to the sorting device 1600 and are each configured to receive the multiple grades of semi-cut products 21.

[0084] The sorting device 1600 is used to automatically sort the processed half-sheet products 21 into multiple grades, and the unloading device 1700 is used to automatically unload the multiple grades of half-sheet products 21, so as to further improve the automation level of the half-sheet product processing equipment 10.

[0085] In some embodiments, as Figure 9 and Figure 10 As shown, the magazine buffer device 900 includes at least four magazine buffer positions 910, each of which is configured to buffer magazines 3 loaded with processed half-sheet products 21. The product transport device 1100 includes at least two product transport mechanisms 1110, each of which is disposed adjacent to at least two magazine buffer positions 910 and configured to transport processed half-sheet products 21. The sheet guide device 1200 includes at least two sheet guide mechanisms 1210, each of which is disposed adjacent to at least two magazine buffer positions 910, and the at least two sheet guide mechanisms 1210 are disposed in a one-to-one correspondence with the at least two product transport mechanisms 1110. The sheet guide mechanisms 1210 are configured to place the processed half-sheet products 21 in the magazines 3 of the at least two magazine buffer positions 910 onto the product transport mechanism 1110 corresponding to the sheet guide mechanism 1210.

[0086] The multiple material box cache positions 910 of the material box cache device 900 are used to cache multiple material boxes 3 loaded with processed half-sheet products 21, and at least two guide mechanisms 1210 and at least two product transport mechanisms 1110 are used to respectively carry and transport the processed half-sheet products 21 in the material boxes 3 of the multiple material box cache positions 910, so as to further improve the transportation efficiency of the processed half-sheet products 21, thereby further improving the production efficiency of the half-sheet product processing equipment 10.

[0087] The product transport mechanism 1110 includes a conveyor belt flow line.

[0088] The sheet guide mechanism 1210 may include a robotic arm, a linear module or other driving structure capable of providing driving force and a sheet picking structure connected to the driving structure. The driving structure drives the sheet picking structure to move so that the sheet picking structure can grab the processed half-sheet product 21 in the material box 3 of the material box cache position 910.

[0089] Exemplarily, the sheet unloading device 1700 includes a conveyor belt flow line.

[0090] Exemplarily, the half-sheet product processing equipment 10 further includes a rejection device 2000 , which is disposed adjacent to the product transport mechanism 11100 and is configured to carry unqualified processed half-sheet products 21 .

[0091] In some embodiments, the optical inspection device 1300 includes at least two optical inspection mechanisms 1310, each disposed adjacent to the at least two product transport mechanisms 1110. The at least two optical inspection mechanisms 1310 are configured to receive processed half-wafer products 21 conveyed by the product transport mechanisms 1110 and perform optical inspection on the processed half-wafer products 21. The electroluminescence inspection device 1400 includes at least two electroluminescence inspection mechanisms 1410, each disposed adjacent to the at least two optical inspection mechanisms 1310. The at least two electroluminescence inspection mechanisms 1410 are configured to receive processed half-wafer products 21 after optical inspection and perform electroluminescence inspection on the processed half-wafer products 21 after optical inspection. The infrared imaging inspection device 1500 includes at least two infrared imaging inspection mechanisms 1510, each disposed adjacent to the at least two optical inspection mechanisms 1310. The at least two infrared imaging inspection mechanisms 1510 are configured to receive processed half-wafer products 21 after electroluminescence inspection and perform infrared imaging inspection on the processed half-wafer products 21 after electroluminescence inspection. The sorting device 1600 includes at least two sorting mechanisms 1610, each positioned adjacent to at least two infrared imaging inspection mechanisms 1510. These mechanisms are configured to receive processed semi-cut products 21 after infrared imaging inspection and sort the processed semi-cut products 21 into multiple grades. One sorting mechanism 1610 is positioned adjacent to at least two unloading devices 1700.

[0092] A product transport mechanism 1110, an optical inspection mechanism 1310, an electroluminescent inspection mechanism 1410, an infrared imaging inspection mechanism 1510, a sorting mechanism 1610, and at least two unloading devices 1700 form a set of product inspection, sorting, and unloading lines. The at least two product inspection, sorting, and unloading lines simultaneously inspect, sort, and unload processed half-cut products 21, further improving the production efficiency of the half-cut product processing equipment 10.

[0093] For example, Figure 11As shown, the optical inspection device 1300 includes two optical inspection mechanisms 1310 arranged along a first direction X1, the electroluminescent inspection device 1400 includes two electroluminescent inspection mechanisms 1410 arranged along the first direction X1, the infrared imaging inspection device 1500 includes two infrared imaging inspection mechanisms 1510 arranged along the first direction X1, the sorting device 1600 includes two sorting mechanisms 1610 arranged along the first direction X1, and four unloading devices 1700 are arranged along the first direction X1. One sorting mechanism 1610 is positioned adjacent to two unloading devices 1700. Furthermore, the optical inspection mechanism 1310, the electroluminescent inspection mechanism 1410, the infrared imaging inspection mechanism 1510, the sorting mechanism 1610, and the unloading devices 1700 are arranged along a second direction X2, ensuring a regular arrangement of the aforementioned mechanisms and more efficient use of space, thereby improving the production efficiency of the semi-cut product processing equipment 10 within a limited space.

[0094] In some embodiments, as Figure 10 As shown, the cassette circulation device 600 for transporting cassettes 3 loaded with processed half-cut products 21 includes a cassette circulation mechanism 610 and a first cassette diverting mechanism 620. The cassette circulation mechanism 610 is configured to transport cassettes 3 loaded with processed half-cut products 21. The first cassette diverting mechanism 620, disposed adjacent to the cassette circulation mechanism 610, is configured to receive cassettes 3 loaded with processed half-cut products 21 and rotate them within a horizontal plane. The unloading device 1000 is further configured to transfer cassettes 3 loaded with processed half-cut products 21 from the first cassette diverting mechanism 620 to the cassette buffer device 900.

[0095] The first material box steering mechanism 620 is used to rotate the material box 3 , so that the box moving device 300 can move the material box 3 to the boat structure 4 .

[0096] In some embodiments, as Figures 6 to 8 As shown, the box-forming device 200 includes a box-forming mechanism 210 and a second magazine diverting mechanism 220. The box-forming mechanism 210 is positioned adjacent to the slicing device 100 and is configured to load the semi-cut products 21 to be processed into the magazine 3 located in the magazine placement space 101. The second magazine diverting mechanism 220 is positioned adjacent to the box-forming mechanism 210 and is configured to receive the magazine 3 located in the magazine placement space 101 and rotate the magazine 3 within a horizontal plane. The box-moving device 300 is further configured to move the magazine 3 loaded with the semi-cut products 21 to be processed from the second magazine diverting mechanism 220 to the boat structure 4 located in the boat structure placement space 102.

[0097] The second magazine steering mechanism 220 is used to rotate the magazine 3 to facilitate the sheet guiding device 1200 to take sheets from the magazine 3 .

[0098] In some embodiments, as Figure 2 As shown, the half-wafer product processing equipment 10 also includes a plurality of vacuum pumping devices 1900. The plurality of vacuum pumping devices 1900 are respectively arranged in a one-to-one correspondence with the plurality of reaction furnaces 400 and are configured to extract gas from the interior space of the reaction furnaces 400 so that the pressure of the interior space of the reaction furnaces 400 meets the process production requirements. Exemplarily, the plurality of vacuum pumping devices 1900 are arranged on a side of the reaction furnaces 400 away from the boat pusher device 510. The plurality of vacuum pumping devices 1900 are arranged along a first direction X1, and the vacuum pumping devices 1900 and the reaction furnaces 400 are arranged along a second direction X2. The regular arrangement of the vacuum pumping devices 1900 and the reaction furnaces 400 allows for more rational use of space, thereby improving the passivation efficiency of the half-wafer product processing equipment 10 within a limited space.

[0099] Exemplarily, the working process of the half-wafer product processing equipment 10 is as follows:

[0100] During the process: The receiving mechanism 110 of the slicing device 100 receives the whole product 2 and conveys the whole product 2 to the slicing mechanism 120. The slicing mechanism 120 receives the whole product 2 and cuts it into at least two half-products 21 to be processed. The cleaning mechanism 810 receives and cleans the half-products 21 to be processed. The box-forming mechanism 210 receives the cleaned half-products 21 to be processed and loads them into the cassette 3 located in the cassette placement space 101. The box-moving device 300 moves the cassette 3 containing the half-products 21 to be processed from the cassette placement space 101 to the boat structure 4 located in the boat structure placement space 102. The boat moving device 530 transports the boat structure 4 carrying the half-sheet product 21 to be processed to the boat structure buffer device 520 and the boat pushing device 510 in sequence. The boat pushing device 510 sends the boat structure 4 carrying the half-sheet product 21 to be processed into the reactor 400, and the reactor 400 processes the half-sheet product 21.

[0101] After the process is completed, the boat pushing device 510 transports the boat structure 4 carrying the processed half-sheet products 21 from the reactor 400. The boat moving device 530 then moves the boat structure 4 carrying the processed half-sheet products 21 from the boat pushing device 510 to the boat structure buffer device 520. After the processed half-sheet products 21 in the boat structure 4 have cooled, the boat moving device 530 moves the boat structure 4 carrying the processed half-sheet products 21 from the boat structure buffer device 520 to the boat structure placement space 102. The box moving device 300 unloads the material box 3 containing the processed half-sheet products 21 from the boat structure 4 and moves it to the material box circulation device 600.

[0102] The magazine circulation device 600 transports the magazine 3 containing the processed semi-cut products 21 to a position near the unloading device 1000. The unloading device 1000 transfers the magazine 3 containing the processed semi-cut products 21 from the magazine circulation device 600 to the magazine buffer device 900. The sheet guide device 1200 retrieves the processed semi-cut products 21 from the magazine 3 carried by the magazine buffer device 900 and places them on the product transport device 1100. The product transport device 1100 transports the processed semi-cut products 21 to the optical inspection mechanism 1310, which performs optical inspection on the processed semi-cut products 21. After optical inspection, the processed semi-cut products 21 enter the electroluminescence inspection mechanism 1410, which performs electroluminescence inspection on the processed semi-cut products 21. After electroluminescence testing, the processed half-wafer products 21 enter the infrared imaging inspection mechanism 1510, which performs infrared imaging testing on the processed half-wafer products 21. After infrared imaging testing, the processed half-wafer products 21 enter the sorting mechanism 1610, which sorts the processed half-wafer products 21 into multiple grades. The processed half-wafer products 21 of different grades pass through the sorting mechanism 1610 and enter the unloading device 1700, which unloads the processed half-wafer products 21.

[0103] In addition, the empty material box 3 carried by the material box cache device 900 is sent to the unloading device 1000 by the material box cache device 900, and the unloading device 1000 conveys the empty material box 3, and then is transported to a place near the unloading device 700 by another material box circulation device 600. The unloading device 700 moves the empty material box 3 from the material box circulation device 600 to the material box placement space 101 to wait for loading the next batch of half-sheet products 21 to be processed.

[0104] Figure 12 The figure shows a schematic diagram of the structure of the passivation production line provided in one embodiment of the present application. Figure 12 As shown, the passivation line 1 includes at least one half-wafer product processing device 10 as mentioned in the above embodiment. When the passivation line 1 includes multiple half-wafer product processing devices 10, the multiple half-wafer product processing devices 10 are arranged in a matrix in a horizontal plane, or in a matrix in a vertical plane, or in a matrix in both a horizontal and vertical plane.

[0105] Since the passivation production line 1 includes the half-wafer product processing equipment 10, all technical features and technical effects of the passivation production line 1 including the half-wafer product processing equipment 10 are not repeated here.

[0106] Figure 13The figure shows a schematic diagram of the structure of a solar cell production line provided by an embodiment of the present application. Figure 13 As shown, the solar cell production line 11 includes at least one half-cell product processing device 10 as mentioned in the above embodiment.

[0107] For example, when the solar cell production line 11 includes multiple half-wafer product processing equipment 10, the multiple half-wafer product processing equipment 10 are arranged in a matrix in the horizontal plane, or the multiple half-wafer product processing equipment 10 are arranged in a matrix in the vertical plane, or the multiple half-wafer product processing equipment 10 are arranged in a matrix in the horizontal plane and the vertical plane.

[0108] Since the solar cell production line 11 includes the half-cell product processing equipment 10 , the solar cell production line 11 includes all the technical features and technical effects of the half-cell product processing equipment 10 , which will not be described in detail here.

[0109] An embodiment of the present application provides a solar cell production process, which uses at least one half-cell product processing device 10 as mentioned in the above embodiment.

[0110] In the various embodiments of the present application, unless otherwise specified, the connection may be in the form of a detachable connection using bolts, nuts, screws, snaps, magnets, etc. In some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.

[0111] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.

[0112] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0113] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0114] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0115] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A half-sheet product processing equipment, characterized in that: include: a splitting device configured to cut a whole product into at least two half products to be processed; a box-forming device, disposed adjacent to the slicing device, wherein at least one side of the box-forming device is provided with a cassette placement space, the cassette placement space being configured to accommodate a cassette, and the box-forming device being configured to load the half-sheet product to be processed into the cassette located in the cassette placement space; a box moving device, disposed adjacent to the box forming device, wherein at least one side of the box moving device is provided with a boat structure placement space, the boat structure placement space being configured to accommodate a boat structure, and the box moving device being configured to move the material box loaded with the half-sheet product to be processed located in the material box placement space to the boat structure located in the boat structure placement space, or to unload the material box loaded with the processed half-sheet product from the boat structure located in the boat structure placement space; a reaction furnace configured to coat the half-wafer product; The boat transport device is arranged between the box moving device and the reaction furnace, and is configured to transport the boat structure loaded with the half-sheet product to be processed to the reaction furnace so that the reaction furnace can coat the half-sheet product carried by the boat structure, or to transport the boat structure loaded with the processed half-sheet product out of the reaction furnace.

2. The half-sheet product processing equipment according to claim 1, characterized in that: Also includes: At least two material box circulation devices are arranged adjacent to the box moving device and spaced apart in the vertical direction, wherein one of the material box circulation devices is configured to transport empty material boxes, and the other material box circulation device is configured to transport material boxes loaded with processed half-sheet products; a box unloading device, disposed adjacent to the material box circulation device, and configured to transport the empty material box from the material box circulation device to the material box placement space; The box moving device is further configured to move the material box loaded with the processed half-sheet product carried by the boat structure from the boat structure to the material box circulation device.

3. The half-sheet product processing equipment according to claim 1, characterized in that: There are multiple reactors; Wherein, the boat transport device comprises: at least one boat pushing device, disposed adjacent to the plurality of reaction furnaces, and configured to push the boat structure into any one of the reaction furnaces or to move the boat structure out of any one of the reaction furnaces; a plurality of boat structure buffering devices, disposed adjacent to the boat pushing device and configured to buffer the boat structure; A boat moving device is arranged adjacent to the boat pushing device, the boat structure buffer device and the boat structure placement space, and is configured to move the boat structure from the boat structure placement space to the boat structure buffer device, and move the boat structure from the boat structure buffer device to the boat pushing device, or move the boat structure from the boat pushing device to the boat structure buffer device, and move the boat structure from the boat structure buffer device to the boat structure placement space.

4. The half-sheet product processing equipment according to claim 3, characterized in that: There are multiple boat pushing devices; The plurality of reaction furnaces are arranged along a first direction, the plurality of boat pushers are arranged along the first direction, the plurality of boat structure buffer devices are arranged along the first direction, the boat structure buffer devices, the boat pushers and the reaction furnaces are arranged along a second direction, and the second direction intersects the first direction; And / or, the boat moving device is arranged above the boat structure buffer device and the boat pushing device.

5. The half-sheet product processing equipment according to claim 3, characterized in that: There are multiple boat pushing devices, and the multiple boat pushing devices are arranged along a first direction; The plurality of reaction furnaces are arranged along the first direction and arranged in multiple layers along the vertical direction. The boat pushing device can move along the vertical direction to send the boat structure into or out of the reaction furnace at any layer.

6. The half-sheet product processing equipment according to claim 4, characterized in that: The boat moving device comprises: a first linear motion mechanism, configured to be movable along the second direction; a second linear motion mechanism connected to the first linear motion mechanism and configured to be movable along the first direction, wherein the second linear motion mechanism is further movable along the second direction under the drive of the first linear motion mechanism; The boat grabbing mechanism is connected to the second linear motion mechanism and is configured to grab the boat structure, wherein the boat grabbing mechanism is driven by the second linear motion mechanism to move along the first direction and the second direction.

7. The half-sheet product processing equipment according to any one of claims 1 to 6, characterized in that: Also includes: a cleaning device, disposed between the splitting device and the boxing device, configured to receive the half-sheet product to be processed from the splitting device and clean the half-sheet product to be processed; Wherein, the box-forming device is further configured to load the cleaned half-sheet product to be processed into the material box located in the material box placement space.

8. The half-sheet product processing equipment according to claim 7, characterized in that: The splitting device comprises: at least one receiving mechanism configured to receive a whole piece of the product; at least two splitting mechanisms, each of the material receiving mechanisms being connected to at least one of the splitting mechanisms, the splitting mechanisms being configured to receive the product to be processed conveyed by the material receiving mechanisms and cut the product to be processed into at least two half-pieces of product to be processed; Wherein, the cleaning device comprises: at least two cleaning mechanisms, respectively connected to the at least two splitting mechanisms, and configured to receive the half-sheet products to be processed from the splitting mechanisms and clean the half-sheet products to be processed; Wherein, the box-forming device comprises: At least two box-forming mechanisms are respectively connected to at least two of the cleaning mechanisms, and are configured to receive the cleaned half-sheet products to be processed on the cleaning mechanisms, and load the cleaned half-sheet products to be processed into the material box located in the material box placement space.

9. The half-sheet product processing equipment according to any one of claims 2 to 6, characterized in that: Also includes: a material box buffer device, disposed adjacent to the material box circulation device, and configured to buffer the material boxes loaded with the processed half-sheet products; a feeding device, disposed above the magazine circulation device and the magazine buffer device, and configured to transport the magazine loaded with the processed half-sheet products from the magazine circulation device to the magazine buffer device; a product transport device configured to transport the processed half-sheet product; The sheet guide device is arranged adjacent to the unloading device and the product transport device, and is configured to obtain the processed half-sheet products in the material box carried by the material box buffer device, and place the processed half-sheet products on the product transport device.

10. The half-sheet product processing equipment according to claim 9, characterized in that: Also includes: an optical inspection device, disposed adjacent to the product transport device, configured to receive the processed half-sheet product conveyed by the product transport device and perform optical inspection on the processed half-sheet product; The electroluminescent detection device is disposed adjacent to the optical detection device and is configured to receive the processed half-wafer product after optical detection and perform electroluminescent detection on the processed half-wafer product after optical detection.

11. The half-sheet product processing equipment according to claim 10, characterized in that: Also includes: The infrared imaging detection device is arranged adjacent to the electroluminescence detection device, and is configured to receive the processed half-wafer product after the electroluminescence detection and perform infrared imaging detection on the processed half-wafer product after the electroluminescence detection.

12. The half-sheet product processing equipment according to claim 11, characterized in that: Also includes: a sorting device, disposed adjacent to the infrared imaging detection device, configured to receive the processed half-sheet products after infrared imaging detection, and sort the processed half-sheet products after infrared imaging detection into a plurality of grades; A plurality of unloading devices are arranged adjacent to the sorting device and are respectively configured to receive the half-sheet products of multiple grades.

13. The half-sheet product processing equipment according to claim 9, characterized in that: The magazine transfer device for transporting the magazine loaded with the processed half-sheet product includes: A material box circulation mechanism for transporting the material box loaded with the processed half-sheet product; a first magazine turning mechanism, disposed adjacent to the magazine circulation mechanism, configured to receive the magazine loaded with the processed half-sheet products and rotate the magazine in a horizontal plane; Wherein, the unloading device is further configured to transport the material box loaded with the processed half-sheet product from the first material box turning mechanism to the material box buffer device.

14. The half-sheet product processing equipment according to any one of claims 1 to 6, characterized in that: The box-forming device comprises: a box-forming mechanism, disposed adjacent to the slicing device, and configured to load the half-sheet products to be processed into the magazine located in the magazine placement space; a second magazine turning mechanism, disposed adjacent to the magazine forming mechanism, configured to obtain the magazine located in the magazine placement space and rotate the magazine in a horizontal plane; Wherein, the box moving device is further configured to move the material box loaded with the half-sheet product to be processed located at the second material box turning mechanism to the boat structure located at the boat structure placement space.

15. A passivation production line, characterized in that: include: At least one half-sheet product processing device according to any one of claims 1 to 14; Wherein, when the passivation production line includes a plurality of the half-wafer product processing equipment, the plurality of the half-wafer product processing equipment are arranged in a matrix in a horizontal plane, and / or the plurality of the half-wafer product processing equipment are arranged in a matrix in a vertical plane.

16. A solar cell production line, characterized in that: include: At least one half-sheet product processing device according to any one of claims 1 to 14.

17. A solar cell production process, characterized in that: The solar cell production process adopts: at least one half-cell product processing device according to any one of claims 1 to 14.

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