A compressed air cooling rapid cooling device for a probe station

Abstract

The present invention relates to a compressed air-cooled rapid cooling device for a probe station, comprising a supporting connection block connected to an air-floating motion platform and a supporting base fixed above the supporting connection block, wherein a polytetrafluoroethylene ring belt is installed inside the supporting base, and an air-cooling plate is installed in the inner cavity of the supporting base through a threaded sleeve assembly. The present invention relates to the technical field of probe stations. The compressed air-cooled rapid cooling device for a probe station controls the temperature of the suction cup through the air-cooling plate, has a simple overall structure, convenient operation, a high degree of integration, reduces space occupancy, introduces external compressed air, and guides the air through an air outlet groove and then evenly disperses it through the air outlet groove, thereby completing the air cooling of the probe station, greatly reducing the investment cost, and facilitating use. At the same time, the closed chamber can effectively isolate the external air, prevent a large amount of water vapor from liquefying to form dripping dew, and form a dry working environment.

Description

Technical Field

[0001] The invention relates to the technical field of probe stations, in particular to a compressed air cooling rapid cooling device for a probe station. Background Art

[0002] A probe station is a device used for testing and measuring microelectronic devices. It usually consists of a platform and multiple fine-tuning probes. The main function of the probe station is to accurately contact the microprobes to the pins or electrodes on the chip or device to be tested for electrical performance testing, signal analysis, radio frequency testing, etc. By controlling the position and pressure of the probe, accurate measurement and manipulation of the device can be achieved. The probe station is widely used in the semiconductor industry, integrated circuit design and production, micro-nanoelectronics research and other fields. It is very important for verifying chip performance, detecting circuit faults, optimizing device design, etc.

[0003] When the probe station performs long-term testing, heat and thermal noise will be generated, which will interfere with the accuracy of the test. In the prior art, when cooling the probe station, most of them are cooled by liquid nitrogen or by a refrigerator. This cooling method has the following disadvantages:

[0004] (1) The overall investment cost of the equipment is greatly increased, and when there is no need to cool below room temperature, the cost performance is low.

[0005] (2) The refrigerant will evaporate and needs to be added regularly to maintain the cooling effect. Pipeline leakage will cause damage to the equipment circuit board. Summary of the invention

[0006] In view of the deficiencies in the prior art, the present invention provides a compressed air-cooled rapid cooling device for a probe station, which solves the above-mentioned problems.

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a compressed air-cooled rapid cooling device for a probe station, comprising a supporting connection block connected to an air-floating motion platform and a supporting base fixed above the supporting connection block, a polytetrafluoroethylene ring belt is installed inside the supporting base, an air-cooling plate is installed in the inner cavity of the supporting base through a threaded sleeve assembly, a sintering plate is arranged on the top of the air-cooling plate, a heating plate is arranged on the top of the sintering plate, an aluminum pad separated by two upper and lower ceramic plates is arranged on the top of the heating plate, and a suction cup is arranged on the top of the ceramic plate;

[0008] The inner cavity of the air cooling plate is provided with a plurality of air outlet grooves, and the middle sections of the plurality of air outlet grooves are intersected and combined with each other with the center of the air cooling plate as the center, and one side of the air cooling plate is provided with an air inlet connected with the air outlet grooves located at 0 degrees and 180 degrees of the air cooling plate, and the air inlet is connected with an external air source through a filter assembly;

[0009] The plurality of gas outlet slots are all located below the sintering disk, and the gas outlet directions are all toward the bottom of the sintering disk.

[0010] As a further solution of the present invention: the filter assembly comprises a filter box and connecting pipes located on both sides of the filter box that are respectively connected to the air inlet and the electromagnetic three-way valve, the connecting pipe penetrating and extending to the inner cavity of the filter box, the connecting pipe is located at one end of the filter box and is connected to a telescopic pipe, one end of the telescopic pipe is connected to a connecting ring, one side of the connecting ring is fixedly connected to a filter screen, the inner cavity of the filter box is rotatably connected to a rotating shaft driven by a motor, the surface of the rotating shaft is respectively fixedly connected to a connecting sleeve docking with one side of the connecting ring and a wiping plate abutting against the filter screen, the connecting pipe is provided with four, and two are grouped together, and are coaxially arranged on both sides of the connecting sleeve, and when in use, the air blown out by the air pump passes through After cooling, the super-refrigeration component is transported to the electromagnetic three-way valve, and then transported to a combination of a connecting pipe and a connecting ring according to the switching of the electromagnetic three-way valve, and then enters the air-cooled plate and blown out through the air outlet slot to cool the sintering plate above the air-cooled plate, and then the heated air is extracted. The overall structure is simple, the operation is convenient, the degree of integration is high, and the space occupancy is reduced. The external compressed air is introduced, and the air is guided through the air outlet slot and then evenly dispersed through the air outlet slot, thereby completing the air cooling of the probe station, which greatly reduces the investment cost and is convenient for use. When in use, the air is filtered through the two filters inside the connecting sleeve, which can effectively filter impurities in the air and prevent the air outlet slot from being damaged. The filter screen is affected internally, and after being used for a period of time, it is blocked. By switching another connecting pipe to supply air through the electromagnetic three-way valve, the frequency of cleaning the filter screen can be reduced. When the filter screen needs to be cleaned, the air intake is stopped, and the driving shaft is driven to rotate, driving the connecting sleeve and the wiping plate to rotate. At this time, the connecting sleeve rotates on the side to squeeze the connecting ring, so that it squeezes the reset spring on both sides, and the telescopic pipes on both sides are contracted. Then the connecting sleeve is separated from the connecting ring, and then the reset spring drives the telescopic pipe to reset, driving the filter screen to reset. At this time, the wiping plate moves to wipe the surface of the filter screen, and wipes off the impurities attached to the surface of the filter screen. At this time, the impurities can be quickly extracted and separated through the negative pressure port. To prevent impurities from polluting the air again, the wiping plate continues to rotate, and the arc-shaped guide plate abuts against the connecting ring on the side of the connecting pipe, squeezing the reset spring to cause the telescopic pipe to shrink, and a gap sufficient for the connecting sleeve to move is reserved between the two connecting rings. Then, as the rotating shaft rotates, the connecting sleeve moves between the two connecting rings. At this time, the arc-shaped guide plate loses its abutment against the connecting ring. At this time, the reset spring resets and pushes the two connecting rings to be squeezed on both sides of the connecting sleeve. At this time, the filter enters the inner cavity of the connecting sleeve to connect, forming a passage to complete the cleaning. While being able to filter the air, the filter can be effectively cleaned automatically without manual operation, and the cleaning can be completed, and the filter can be reused to increase its service life.

[0011] As a further solution of the present invention: two of the connecting sleeves and wiping plates are provided, and are symmetrically arranged on the surface of the rotating shaft and staggered with each other, can be switched for use, and can quickly wipe the filter screens on both sides at the same time by their own rotation, and can continue to be used after wiping.

[0012] As a further solution of the present invention: a fixing ring is sleeved on the surface of the connecting pipe, a push rod is fixedly connected to the surface of the connecting ring, one end of the push rod passes through and extends to one side of the fixing ring, an inner cavity of the fixing ring is provided with a guide groove which is slidably connected to the surface of the push rod, a reset spring sleeved on the surface of the push rod is fixedly connected to the surface of the connecting ring, one end of the reset spring is fixedly connected to one side of the fixing ring, and the fixing ring is guided by the setting of the push rod to ensure that under the action of the reset spring, the telescopic pipes can move along a straight line when they are telescopic, thereby ensuring that the two telescopic pipes are always in a coaxial state.

[0013] As a further solution of the present invention: an arc-shaped guide plate is fixedly connected between two adjacent connecting sleeves and wiping plates, a protrusion is provided in the middle section of the arc-shaped guide plate, and both ends are flush with the surfaces of the connecting sleeve and the wiping plate. Through the setting of the arc-shaped guide plate, when rotating, the arc-shaped guide plate abuts against the connecting ring on the side of the connecting pipe, and squeezes the reset spring to shrink the telescopic pipe. A gap sufficient for the connecting sleeve to move is reserved between the two connecting rings, and then with the rotation of the rotating shaft, the connecting sleeve moves between the two connecting rings. At this time, the arc-shaped guide plate loses its abutment against the connecting ring. At this time, the reset spring resets and pushes the two connecting rings to squeeze on both sides of the connecting sleeve. At this time, the filter enters the inner cavity of the connecting sleeve for connection to form a passage.

[0014] As a further solution of the present invention: a negative pressure port connected to an external negative pressure mechanism is opened on one side of the filter box. Through the setting of the negative pressure port, dust falling after the wiping plate wipes the filter net can be quickly drawn out and separated through the negative pressure port to prevent impurities from polluting the air again.

[0015] As a further solution of the present invention, the two ends of the connecting pipes located on one side of the air inlet are connected together and connected to the air inlet.

[0016] As a further solution of the present invention: the external air source connected to the connecting pipeline located on one side of the electromagnetic three-way valve is an air pump connected to the refrigeration component.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] The present invention controls the temperature of the suction cup through an air cooling plate, has a simple overall structure, is easy to operate, has a high degree of integration, reduces space occupancy, introduces external compressed air, and guides the air through an air outlet groove and then evenly disperses the air through the air outlet groove, thereby completing air cooling of the probe station, greatly reducing investment costs, and is convenient for use. At the same time, the closed chamber can effectively isolate the external air, prevent a large amount of water vapor from liquefying to form dew, and form a dry working environment.

[0019] In the present invention, air is filtered through two filter screens inside the connecting sleeve, which can effectively filter impurities in the air and prevent the inside of the air outlet groove from being affected. After being used for a period of time, if it is blocked, the electromagnetic three-way valve is used to switch to another connecting pipe for air supply, which can reduce the frequency of cleaning the filter screen.

[0020] According to the present invention, when the filter needs to be cleaned, the air intake is stopped, and the driving shaft is rotated to drive the connecting sleeve and the wiping plate to rotate. At this time, the connecting sleeve rotates sideways to squeeze the connecting ring, so that it squeezes the reset springs on both sides, and the telescopic pipes on both sides are contracted. Then the connecting sleeve is separated from between the connecting rings, and then the reset spring drives the telescopic pipe to reset, and drives the filter to reset. At this time, the wiping plate moves to wipe the surface of the filter, and wipes off impurities attached to the surface of the filter. At this time, the impurities can be quickly extracted and separated through the negative pressure port to prevent the impurities from secondary pollution of the air. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the present invention;

[0022] Figure 2 It is a structural front view of the present invention;

[0023] Figure 3 It is a schematic diagram of the structure of the air cooling plate of the present invention;

[0024] Figure 4 A top view of the structure of the air cooling plate of the present invention;

[0025] Figure 5 It is a structural cross-sectional view of the filter box of the present invention;

[0026] Figure 6 It is a structural side view of the rotating shaft of the present invention.

[0027] In the figure: 1. Support base; 2. Support connecting block; 3. Teflon ring belt; 4. Air cooling plate; 5. Sintering plate; 6. Heating plate; 7. Ceramic plate; 8. Aluminum pad; 9. Suction cup; 10. Air inlet; 11. Air outlet groove; 12. Filter box; 13. Connecting pipe; 14. Fixed ring; 15. Telescopic pipe; 16. Connecting ring; 17. Reset spring; 18. Push rod; 19. Guide groove; 20. Rotating shaft; 21. Connecting sleeve; 22. Wiping plate; 23. Negative pressure port; 24. Filter; 25. Arc guide plate; 26. Solenoid three-way valve. DETAILED DESCRIPTION

[0028] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0029] See also Figure 1-6 The present invention provides a technical solution: a compressed air-cooled rapid cooling device for a probe station, comprising a support connection block 2 connected to an air-floating motion platform and a support base 1 fixed above the support connection block 2, a polytetrafluoroethylene ring belt 3 is installed inside the support base 1, an air-cooling plate 4 is installed in the inner cavity of the support base 1 through a threaded sleeve assembly, a sintering plate 5 is arranged on the top of the air-cooling plate 4, a heating plate 6 is arranged on the top of the sintering plate 5, an aluminum pad 8 separated by two upper and lower ceramic plates 7 is arranged on the top of the heating plate 6, and a suction cup 9 is arranged on the top of the ceramic plate 7;

[0030] The inner cavity of the air cooling plate 4 is provided with a plurality of air outlet grooves 11, and the middle sections of the plurality of air outlet grooves 11 are mutually crossed and combined with the center of the air cooling plate 4 as the center. An air inlet 10 connected to the air outlet grooves 11 located at 0 degrees and 180 degrees of the air cooling plate is provided on one side of the air cooling plate 4, and the air inlet 10 is connected to the external air source through the filter assembly;

[0031] The plurality of gas outlet slots 11 are all located below the sintering disk 5 , and the gas outlet directions are all toward the bottom of the sintering disk 5 .

[0032] The filter assembly includes a filter box 12 and a connecting pipe 13 located on both sides of the filter box 12 and connected to the air inlet 10 and the electromagnetic three-way valve 26 respectively. The connecting pipe 13 penetrates and extends to the inner cavity of the filter box 12. The connecting pipe 13 is located at one end of the filter box 12 and is connected to a telescopic pipe 15. One end of the telescopic pipe 15 is connected to a connecting ring 16. One side of the connecting ring 16 is fixedly connected to a filter screen 24. The inner cavity of the filter box 12 is rotatably connected to a rotating shaft 20 driven by a motor. The surface of the rotating shaft 20 is respectively fixedly connected to a connecting sleeve 21 docked with one side of the connecting ring 16 and a wiping plate 22 abutting against the filter screen 24. There are four connecting pipes 13, and they are arranged in groups of two, coaxially on both sides of the connecting sleeve 21. When in use, the air passes through the connecting pipes 13. The air blown out by the pump is cooled by the refrigeration component and then transported to the electromagnetic three-way valve 26. According to the switching of the electromagnetic three-way valve 26, it is transported to a combination of a connecting pipe 13 and a connecting ring 16, and then enters the air-cooled plate 4 and is blown out through the air outlet groove 11 to cool the sintering plate 5 above the air-cooled plate 4. Then the heated air is extracted. The overall structure is simple, the operation is convenient, the degree of integration is high, the space occupancy is reduced, the external compressed air is introduced, and the air is evenly dispersed through the air outlet groove 11 after being guided through the air outlet groove 11, thereby completing the air-cooling of the probe station, which greatly reduces the investment cost and is convenient for use. When in use, the air is filtered through the two filters 24 inside the connecting sleeve 21, which can effectively Impurities in the air are filtered to prevent the inside of the air outlet groove 11 from being affected. After a period of use, if it is blocked, the electromagnetic three-way valve 26 is used to switch to another connecting pipe 13 for air supply, which can reduce the cleaning frequency of the filter screen 24. When the filter screen 24 needs to be cleaned, the air intake is stopped. At this time, the driving shaft 20 is driven to rotate, driving the connecting sleeve 21 and the wiping plate 22 to rotate. At this time, the connecting sleeve 21 rotates sideways to squeeze the connecting ring 16, so that it squeezes the reset spring 17 on both sides, and the telescopic pipes 15 on both sides are contracted, and then the connecting sleeve 21 is separated from between the connecting rings 16. Then the reset spring 17 drives the telescopic pipe 15 to reset, and drives the filter screen 24 to reset. At this time, the movement of the wiping plate 22 presses the surface of the filter screen 24 Wipe and wipe off the impurities attached to the surface of the filter 24. At this time, the impurities can be quickly extracted and separated through the negative pressure port 23 to prevent the impurities from secondary contamination of the air. Then the wiping plate 22 continues to rotate, and the arc guide plate 25 abuts against the connecting ring 16 on the side of the connecting pipe 13, squeezing the reset spring 17 to shrink the telescopic pipe 15. A gap sufficient for the connecting sleeve 21 to move is reserved between the two connecting rings 16. Then, with the rotation of the rotating shaft 20, the connecting sleeve 21 moves between the two connecting rings 16. At this time, the arc guide plate 25 loses its abutment against the connecting ring 16. At this time, the reset spring 17 resets and pushes the two connecting rings 16 to squeeze on both sides of the connecting sleeve 21. At this time, the filter 24 enters the inner cavity of the connecting sleeve 21 for connection to form a passage.After the cleaning is completed, the filter 24 can be automatically cleaned effectively while filtering the air, without manual operation, and the filter 24 can be reused to increase its service life.

[0033] There are two connecting sleeves 21 and two wiping plates 22, which are symmetrically arranged on the surface of the rotating shaft 20 and staggered with each other, and can be switched for use. The rotation of the two plates can quickly wipe the filter screens 24 on both sides at the same time, and the two plates can continue to be used after wiping.

[0034] A fixing ring 14 is sleeved on the surface of the connecting pipe 13, and a push rod 18 is fixedly connected to the surface of the connecting ring 16. One end of the push rod 18 passes through and extends to one side of the fixing ring 14. The inner cavity of the fixing ring 14 is provided with a guide groove 19 which is slidably connected to the surface of the push rod 18. A reset spring 17 sleeved on the surface of the push rod 18 is fixedly connected to the surface of the connecting ring 16. One end of the reset spring 17 is fixedly connected to one side of the fixing ring 14. The fixing ring 14 is guided by the setting of the push rod 18 to ensure that under the action of the reset spring 17, the telescopic pipe 15 can move along a straight line when it is extended and retracted, thereby ensuring that the two telescopic pipes 15 are always in a coaxial state.

[0035] An arc-shaped guide plate 25 is fixedly connected between two adjacent connecting sleeves 21 and wiping plates 22. A protrusion is provided in the middle section of the arc-shaped guide plate 25, and both ends are flush with the surfaces of the connecting sleeve 21 and the wiping plate 22. Through the setting of the arc-shaped guide plate 25, when rotating, the arc-shaped guide plate 25 abuts against the connecting ring 16 on the side of the connecting pipe 13, squeezing the reset spring 17 to shrink the telescopic pipe 15, and a gap sufficient for the connecting sleeve 21 to move is reserved between the two connecting rings 16. Then, with the rotation of the rotating shaft 20, the connecting sleeve 21 moves between the two connecting rings 16. At this time, the arc-shaped guide plate 25 loses its abutment against the connecting ring 16. At this time, the reset spring 17 resets and pushes the two connecting rings 16 to squeeze on both sides of the connecting sleeve 21. At this time, the filter screen 24 enters the inner cavity of the connecting sleeve 21 for connection to form a passage.

[0036] A negative pressure port 23 connected to an external negative pressure mechanism is provided on one side of the filter box 12. Through the setting of the negative pressure port 23, dust falling after the wiping plate 22 wipes the filter screen 24 can be quickly drawn out and separated through the negative pressure port 23 to prevent impurities from polluting the air again.

[0037] The ends of the two communication pipes 13 located on one side of the air inlet 10 are connected together and communicated with the air inlet 10 .

[0038] The external air source connected to the communication pipe 13 located at one side of the electromagnetic three-way valve 26 is an air pump connected to the refrigeration component.

[0039] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A compressed air cooling rapid cooling device for a probe station, comprising a support connection block (2) connected to an air floating motion platform and a support base (1) fixed above the support connection block (2), characterized in that: A polytetrafluoroethylene ring belt (3) is installed inside the support base (1); an air cooling plate (4) is installed in the inner cavity of the support base (1) through a threaded sleeve assembly; a sintering plate (5) is arranged on the top of the air cooling plate (4); a heating plate (6) is arranged on the top of the sintering plate (5); an aluminum pad (8) separated by two upper and lower ceramic plates (7) is arranged on the top of the heating plate (6); and a suction cup (9) is arranged on the top of the ceramic plate (7); The inner cavity of the air cooling plate (4) is provided with a plurality of air outlet grooves (11), and the middle sections of the plurality of air outlet grooves (11) are formed by intersecting with each other with the center of the air cooling plate (4) as the center, and one side of the air cooling plate (4) is provided with an air inlet (10) connected to the air outlet grooves (11) located at 0 degrees and 180 degrees of the air cooling plate, and the air inlet (10) is connected to an external air source through a filter component; The plurality of gas outlet slots (11) are all located below the sintering disk (5), and the gas outlet directions are all toward the bottom of the sintering disk (5).

2. A compressed air rapid cooling device for a probe station according to claim 1, characterized in that: The filter assembly comprises a filter box (12) and a communication pipe (13) located on both sides of the filter box (12) and connected to the air inlet (10) and the electromagnetic three-way valve (26) respectively, the communication pipe (13) passing through and extending to the inner cavity of the filter box (12), one end of the communication pipe (13) located on the filter box (12) is connected to a telescopic pipe (15), one end of the telescopic pipe (15) is connected to a communication ring (16), one side of the communication ring (16) is fixedly connected to a filter screen (24), and the filter box (12) is connected to the air inlet (10) and the electromagnetic three-way valve (26). 2) is rotatably connected to an inner cavity thereof with a rotating shaft (20) driven by a motor, and the surface of the rotating shaft (20) is respectively fixedly connected to a connecting sleeve (21) connected to one side of the connecting ring (16) and a wiping plate (22) connected to the filter screen (24), and the connecting pipes (13) are provided with four, two by two, and are respectively coaxially arranged on both sides of the connecting sleeve (21), and the surface of the connecting pipe (13) is sleeved with a fixing ring (14), and the surface of the connecting ring (16) is fixedly connected to a push rod (18), One end of the push rod (18) passes through and extends to one side of the fixing ring (14); the inner cavity of the fixing ring (14) is provided with a guide groove (19) slidably connected to the surface of the push rod (18); the surface of the connecting ring (16) is fixedly connected to a return spring (17) sleeved on the surface of the push rod (18); one end of the return spring (17) is fixedly connected to one side of the fixing ring (14); when the filter screen (24) needs to be cleaned, air intake is stopped, the rotating shaft (20) is driven to rotate, and the connecting sleeve is driven to rotate. The cylinder (21) and the wiping plate (22) rotate, and the connecting sleeve (21) rotates to squeeze the connecting ring (16) so that the connecting ring (16) is squeezed toward the two sides of the reset spring (17), and the telescopic pipes (15) on both sides are contracted, and then the connecting sleeve (21) is separated from the connecting ring (16), and then the reset spring (17) drives the telescopic pipe (15) to reset, and drives the filter (24) to reset, and the wiping plate (22) moves to wipe the surface of the filter (24), so as to wipe off the impurities attached to the surface of the filter (24).

3. A compressed air cooling rapid cooling device for a probe station according to claim 2, characterized in that: The communicating sleeves (21) and the wiping plates (22) are each provided in plurality and are symmetrically arranged on the surface of the rotating shaft (20) and staggered with each other.

4. A compressed air cooling rapid cooling device for a probe station according to claim 2, characterized in that: An arc-shaped guide plate (25) is fixedly connected between two adjacent connecting sleeves (21) and wiping plates (22). A protrusion is provided in the middle of the arc-shaped guide plate (25), and both ends are flush with the surfaces of the connecting sleeve (21) and the wiping plate (22).

5. The compressed air rapid cooling device for a probe station according to claim 2, characterized in that: A negative pressure port (23) communicating with an external negative pressure mechanism is provided on one side of the filter box (12).

6. A compressed air rapid cooling device for a probe station according to claim 2, characterized in that: The ends of the two communication pipes (13) located on one side of the air inlet (10) are connected together and are in communication with the air inlet (10).

7. The compressed air rapid cooling device for a probe station according to claim 2, characterized in that: The external air source located on one side of the electromagnetic three-way valve (26) and connected to the connecting pipe (13) is an air pump connected to the refrigeration component.

Images