A system for adjusting a light beam

Abstract

The application provides a system for adjusting a light beam, which can be applied to an optical system with high requirements for a reflected wave front. The system comprises a mirror, a surface shape detection device, a calculation and analysis device, and a compensation light generating device. The mirror is used to receive incident light from a first light source and emit reflected light. The surface shape detection device is used to obtain information about an initial surface shape of the mirror after the incident light is incident. The calculation and analysis device is used to generate first indication information according to the information about the initial surface shape, the first indication information indicating that the compensation light generating device emits first compensation light to the mirror. The compensation light generating device is used to emit the first compensation light to the mirror according to the first indication information, the first compensation light being used to change the initial surface shape of the mirror into a first surface shape. The system of the application not only can maintain the wave front of the reflected light, but also can improve the accuracy of regulating and controlling the direction and divergence angle of the reflected light.

Description

Technical Field

[0001] This application relates to the field of space optics technology, and more specifically, to a system for adjusting a light beam. Background Technology

[0002] In optical systems requiring precise control of beam divergence and pointing (such as large optical imaging systems, lasers, or accelerators), mirrors are typically used to receive the beam from the light source and reflect it to the subsequent optical system. However, because the distance between the light source exit and the subsequent optical system in such systems is often considerable (e.g., tens or even hundreds of meters in some systems), the front-end mirror receiving the beam is crucial for high-quality beam propagation. To minimize energy loss, the beam is often grazing-incidence, requiring a large mirror size. Furthermore, to maintain the wavefront of the reflected light, the mirror's surface shape accuracy often needs to be at the nanometer level, posing a significant challenge to high-precision optical fabrication. In addition, the mirror body must withstand high-power, non-uniform photothermal radiation, and the resulting thermal deformation affects the quality of the reflected light. Therefore, efficiently adjusting the mirror's surface shape to more effectively control the beam's pointing and divergence angle is a problem that needs to be solved. Summary of the Invention

[0003] This application provides a system for adjusting a light beam, which can achieve real-time control of the shape of the reflecting mirror. It can not only maintain the wavefront of the reflected wave and achieve high-precision control of the beam direction, but also achieve beam divergence angle control at the micro-radius or even micro-nano-radius level.

[0004] In a first aspect, embodiments of this application provide a system for adjusting a light beam. The system includes: a reflector, a surface shape detection device, a calculation and analysis device, and a compensation light generator. Wherein: the reflector is used to receive incident light from a first light source and emit reflected light; the surface shape detection device is used to acquire information about the initial surface shape of the reflector after the incident light has entered; the calculation and analysis device is used to generate first indication information based on the initial surface shape information, the first indication information being used to instruct the compensation light generator to emit first compensation light towards the reflector; the compensation light generator is used to emit the first compensation light towards the reflector based on the first indication information, the first compensation light being used to change the initial surface shape of the reflector to a first surface shape.

[0005] Based on the solution provided in this application, by acquiring information about the surface shape of the reflector, compensation light is used to illuminate the surface of the reflector, causing a preset non-uniform deformation of the surface after illumination. This changes the initial surface shape to a first surface shape, thereby altering the direction and divergence angle of the incident light after reflection from the deformed surface. This achieves the purpose of adjusting the direction and divergence angle of the reflected light. Compared with existing technologies, this solution eliminates the need for complex reflector design and high-precision optical processing. Furthermore, the system does not require a temperature sensor, thus avoiding the accuracy and resolution limitations imposed by temperature sensors and similar components, enabling high-precision real-time beam adjustment.

[0006] In conjunction with the first aspect, in some implementations of the first aspect, the compensation light generating device is further configured to feed back power information and position information of the first compensation light to the computing and analysis device, wherein the power information is the power magnitude and power distribution of the first compensation light, and the position information is the distance from which the first compensation light is transmitted to the surface of the reflector; the surface shape detection device is further configured to acquire information of the first surface shape; the computing and analysis device is further configured to generate second indication information based on the power information, the position information, and the information of the first surface shape, wherein the second indication information is used to instruct the compensation light generating device to emit a second compensation light toward the reflector; the compensation light generating device is further configured to emit a second compensation light toward the reflector based on the second indication information, wherein the second compensation light is used to change the first surface shape into a second surface shape.

[0007] Based on this scheme, by feeding back the power and position information of the compensation light, the surface shape of the reflector can be dynamically and in real time adjusted according to the characteristics of the compensation light, thereby improving the efficiency and reliability of the system.

[0008] In conjunction with the first aspect, in some implementations of the first aspect, the first compensation light is used to change the initial surface shape of the reflector to a first surface shape, including: the first compensation light is used together with the incident light to homogenize the optical thermal field of the surface of the reflector, or the compensation light is used to heat a local area of ​​the reflector to cause thermal deformation in the local area of ​​the reflector.

[0009] The solution proposed in this application can solve the problem of maintaining the reflected wavefront of high-power optical devices by adjusting the surface shape of the reflector through thermal neutralization of the compensation light and the incident light. At the same time, it can actively distort the surface by heating the local area of ​​the reflector, so that the accuracy of the divergence angle of the reflected light can be adjusted at the micro-radian or even micro-nano-radian level, thereby improving the adjustment accuracy.

[0010] In conjunction with the first aspect, in some implementations of the first aspect, the information of the initial surface shape is at least one of the peak-valley PV value of the initial surface shape, the root mean square (RMS) value of the initial surface shape, and the surface slope of the initial surface shape; the information of the first surface shape is at least one of the peak-valley PV value of the first surface shape, the root mean square (RMS) value of the first surface shape, and the surface slope of the first surface shape.

[0011] In conjunction with the first aspect, in some implementations of the first aspect, the system further includes: an environmental control device, wherein: the environmental control device is used to acquire environmental information of the reflector and change the environment of the reflector.

[0012] In conjunction with the first aspect, in some implementations of the first aspect, the computational analysis device generates the environmental control information based on the environmental information, the environmental control information instructs a change to the environment in which the reflector is located, and the environmental control device changes the environment in which the reflector is located based on the environmental control information.

[0013] In conjunction with the first aspect, in some implementations of the first aspect, the environmental information is at least one of the temperature, humidity, and vacuum level of the reflector.

[0014] In conjunction with the first aspect, in some implementations of the first aspect, the computational analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, and the environmental information.

[0015] In conjunction with the first aspect, in some implementations of the first aspect, the system further includes: a temperature detection device, wherein: the temperature detection device is used to acquire temperature distribution information of the reflector surface; and the calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, the environmental information, and the temperature distribution information.

[0016] In conjunction with the first aspect, in some implementations of the first aspect, the system further includes: a temperature detection device, wherein: the temperature detection device is used to acquire temperature distribution information of the reflector surface; and the calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, and the temperature distribution information.

[0017] Based on the above scheme, by obtaining at least one of the environmental information of the reflector and the temperature distribution information of the reflector surface, the accuracy and reliability of the generated indication information can be further improved, thereby achieving the goal of improving system performance.

[0018] In conjunction with the first aspect, in some implementations of the first aspect, the compensation light generating device includes: a second light source, a beam splitter, a light source generating device, and a power measuring device, wherein: the second light source is used to generate a first light beam; the beam splitter is used to split the first light beam into a first portion of light and a second portion of light, and output the first portion of light to the light source generating device, and output the second portion of light to the power measuring device; the light source generating device generates the first compensation light based on the first portion of light; and the power measuring device acquires the power information based on the second portion of light.

[0019] In conjunction with the first aspect, in some implementations of the first aspect, the compensating light generating device further includes: a beam expander / contractor located between the second light source and the beam splitter, for changing the spot diameter of the first light beam.

[0020] In conjunction with the first aspect, in some implementations of the first aspect, the compensation light generating device further includes: a ranging device for acquiring the position information.

[0021] In conjunction with the first aspect, in some implementations of the first aspect, the compensation light generating device is further used to generate a second compensation light. Specifically, the second light source is used to output a third beam to the beam expander / contractor; the beam expander / contractor is used to change the spot diameter of the third beam and output the third beam to the beam splitter; the beam splitter is used to split the third beam into a first part and a second part, and output the first part of the third beam to the light source generating device and the second part of the third beam to the power measuring device; the light source generating device generates the second compensation light based on the first part of the third beam; the power measuring device obtains the power information of the second compensation light based on the second part of the third beam; and the ranging device is used to obtain the distance the second compensation light travels to the surface of the reflector.

[0022] In conjunction with the first aspect, in some implementations of the first aspect, when the reflector is in a vacuum environment, the system further includes a vacuum cavity, the vacuum cavity including a porthole for transmitting detection light from the surface shape detection device; the reflector is also used to reflect the detection light to the surface shape detection device through the porthole; the surface shape detection device is specifically used to acquire information about the initial surface shape through the detection light reflected by the reflector.

[0023] In conjunction with the first aspect, in some implementations of the first aspect, the system further includes: a shaping module located on the optical path between the compensation light generator and the reflector, for shaping the first compensation light.

[0024] In conjunction with the first aspect, in some implementations of the first aspect, the shaping module is also used to shape the second compensation light. Attached Figure Description

[0025] Figure 1 A schematic structural diagram of a system 100 for adjusting a light beam, provided in an embodiment of this application, is shown.

[0026] Figure 2 A schematic structural diagram of a compensating light generating device 140 provided in an embodiment of this application is shown.

[0027] Figure 3 A schematic architectural diagram of a transmission-type beam expander / contractor 300 provided in an embodiment of this application is shown.

[0028] Figure 4 A schematic diagram 400 of the coupling architecture of a beam splitter and a light source generating device provided in an embodiment of this application is shown.

[0029] Figure 5 The light control scenario using two beams of compensation light for mirror correction is provided in the embodiments of this application.

[0030] Figure 6 The distortion of the mirror surface before and after compensation light correction is shown.

[0031] Figure 7 The light control scene using four beams of compensation light for mirror correction is provided in the embodiments of this application.

[0032] Figure 8 It shows the use of Figure 7 The distortion of the mirror surface after mirror correction using the four compensating beams is shown.

[0033] Figure 9 Schematic diagrams of several possible flat-top lights, irregularly shaped lights, or light field arrays are shown.

[0034] Figure 10 This illustration shows a beam expansion scenario of a thermo-convex mirror provided in an embodiment of this application.

[0035] Figure 11 This illustration shows a beam expansion scenario of a thermo-induced concave mirror provided in an embodiment of this application.

[0036] Figure 12A schematic structural diagram of a system 1200 for adjusting a beam, provided in an embodiment of this application, is shown.

[0037] Figure 13 The diagram illustrates two possible positional relationships between the porthole and the surface shape detection device provided in this application embodiment. Detailed Implementation

[0038] The technical solutions in this application will now be described with reference to the accompanying drawings.

[0039] The following description is provided to facilitate understanding of the embodiments of this application.

[0040] First, the terms "first," "second," etc., and various numerical designations in the text descriptions or drawings of the embodiments of this application shown below are merely distinctions for ease of description and are not necessarily used to describe a specific order or sequence, nor are they intended to limit the scope of the embodiments of this application. For example, distinguishing different light sources, different light beams, or different surface shapes, or distinguishing information about different surface shapes, etc.

[0041] Second, the term "comprising" and any variations thereof in the embodiments of this application shown below are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such processes, methods, products, or devices.

[0042] Third, in the embodiments of this application, the words "exemplary" or "for example" are used to indicate examples, illustrations, or descriptions. Embodiments or designs described as "exemplary" or "for example" should not be construed as being more preferred or advantageous than other embodiments or designs. The use of words such as "exemplary" or "for example" is intended to present the relevant concepts in a specific manner for ease of understanding.

[0043] Fourth, in the accompanying drawings of this application, the thickness, size, and shape of the lenses have been slightly exaggerated for ease of explanation. Specifically, the shapes of the spherical or aspherical surfaces shown in the drawings are illustrated by way of example, meaning that the shapes of the spherical or aspherical surfaces are not limited to those shown in the drawings. Furthermore, the drawings are merely illustrative and not strictly drawn to scale.

[0044] Fifth, in this application, "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone, where A and B can be singular or plural. The character " / " generally indicates that the related objects before and after it have an "or" relationship.

[0045] The system provided in this application can be applied to all optical systems that require beam divergence angle and pointing control. Examples include optical imaging systems and large scientific facilities (including but not limited to free electron laser (FEL) or synchrotron radiation (SR) experimental systems).

[0046] For optical systems that require control over beam divergence and direction, a mirror is needed to reflect the light beam emitted from the light source to the back-end optical system. To minimize energy loss during reflection, besides controlling the incident beam angle to grazing incidence, a crucial factor is controlling the surface accuracy of the mirror to maintain the wavefront of the reflected light. However, nanometer-level precision requirements place extremely high demands on optical fabrication capabilities, making them difficult to achieve. Furthermore, with continuous illumination from the incident light, the non-uniform photothermal radiation of the incident beam on the mirror further deforms its surface. Therefore, effectively controlling the beam's direction and divergence angle by adjusting the mirror's surface shape is a problem that needs to be solved.

[0047] Currently, methods for controlling beam divergence angle and direction include concentric stacking of Wolter-like mirrors, Kirkpatric-Baez (KB) mirrors, and thermal compensation of optical elements using electrothermal actuators. However, the concentric stacking of Wolter-like mirrors does not consider errors caused by thermal distortion, failing to meet the requirements of high-precision imaging. Furthermore, multiple reflections cause energy loss, affecting imaging efficiency. KB mirrors, due to their extremely high requirements for assembly and fabrication and low degree of controllability, have limited applicability. The method of using electrothermal actuators for thermal compensation of optical elements corrects thermal distortion by changing the element's temperature distribution, thereby controlling beam divergence angle and direction. However, this method involves complex fabrication and connection of the electrothermal coupling structure, making ultra-smooth polishing difficult, and the placement of the electrothermal conductors restricts the degree of freedom in thermal compensation, resulting in poor portability.

[0048] Currently, the mainstream solutions for correcting the surface shape of reflectors include those using temperature sensors and correction actuators for surface shape control, and those using piezoelectric modules. In the solution using temperature sensors and correction actuators, the temperature sensors have low accuracy and resolution, which cannot meet the requirements of high-precision imaging. Furthermore, the mirror layout of the temperature sensor has significant limitations, easily blocking light, affecting heat flow, and causing connection stress. In addition, because it cannot capture surface shape data and only corrects the reflector's surface shape through the temperature field, this solution has a relatively large error. In the solution using piezoelectric modules, piezoelectric deformable mirror technology, due to its compact design, faces bottlenecks in manufacturing and heat dissipation, and is limited by the constraints of the mechanical structure, resulting in low control resolution.

[0049] To address the aforementioned problems, this application proposes a system for adjusting a light beam. In conjunction with a surface shape detection device, compensating light is used to illuminate a reflector, causing a preset non-uniform deformation of the mirror body, thereby adjusting the direction and divergence angle of the emitted light beam. This application's solution, through thermal neutralization and surface shape adjustment, not only maintains the reflected wavefront of high-power optical devices but also, through active distortion of the optical surface, adjusts the divergence angle at the micro-radian or even nanoradian level, thereby improving adjustment accuracy.

[0050] Figure 1 This diagram illustrates a schematic structural representation of a beam-adjusting system 100 (hereinafter referred to as system 100, or beam-adjusting device 100) according to an embodiment of this application. Specifically, system 100 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, and a compensation light generator 140. The reflector 110 reflects incident light from a first light source into the optical system. The surface shape detection device 120 detects the surface shape of the reflector 110 and acquires information about its surface shape. The calculation and analysis device 130 generates instruction information based on the surface shape information of the reflector acquired by the surface shape detection device 120. The compensation light generator 140 emits compensation light to the reflector according to the instruction information, controlling the surface shape of the reflector through the compensation light, thereby adjusting the outgoing direction and divergence angle of the reflected light.

[0051] It should be noted that, in this application, the information on the surface shape of the reflector (including the information on the initial surface shape and the information on the first and second surface shapes described below) includes, but is not limited to, at least one of the following: the surface shape error of the reflector 110 before and after the surface shape change, such as the root mean square (RMS) and peak-to-valley (PV) values ​​(the difference between the peak and valley values), the surface slope of the reflector 110, or other surface topology information. For example, the information on the first surface shape may be the PV value and / or RMS of the first surface shape relative to the initial surface shape when the reflector 110 changes from the initial surface shape to the first surface shape.

[0052] Furthermore, in this application, the indication information generated by the calculation and analysis device 130 (including the first indication information described above and the second and third indication information described below) is indication information corresponding to the corresponding compensation light. Specifically, the first indication information is used to instruct the compensation light generating device 140 to emit the first compensation light to the reflector 110. The content indicated by the first indication information includes, but is not limited to, at least one of the following: the direction, power, spot size, spot shape, projection position, and duration of the compensation light. For example, when the first indication information instructs the compensation light generating device 140 to emit the first compensation light, the first indication information may include the direction, power, spot size, and duration of the first compensation light.

[0053] It should also be noted that, in the scheme of this application, the method by which the reflector receives the incident light emitted by the first light source is not limited. For example, in some embodiments, the incident light emitted by the first light source is directly incident on the reflector in the system in a grazing incidence manner. Alternatively, in other embodiments, the incident light emitted by the first light source received by the reflector in the system is redirected by optical elements such as lenses or reflectors, and then incident on the reflector in the system in a grazing incidence manner. It can be understood that, in this case, there is still a refractive element in the optical path between the first light source and the reflector 110.

[0054] Specifically, after the first light source emits incident light, the incident light is incident on the reflector 110. Simultaneously, the surface shape detection device 120 detects the change in the reflector 110 after receiving the incident light and obtains information about the initial surface shape of the reflector 110 after the incident light. After obtaining the initial surface shape information of the reflector 110, the calculation and analysis device 130 generates first indication information based on the initial surface shape information. Subsequently, the compensation light generating device 140 emits first compensation light to the reflector 110 according to the first indication information to change the surface shape of the reflector 110 to the first surface shape, thereby changing the direction and divergence angle of the reflected light on the reflector 110.

[0055] It should be noted that in some embodiments, the initial surface shape information acquired by the calculation and analysis device 130 is preset in the calculation and analysis device 130. That is, the initial surface shape information of the reflector 110 can be set in the calculation and analysis device 130 instead of being acquired by the surface shape detection device 120. In other words, when the calculation and analysis device 130 generates the first indication information, it can generate it based on the initial surface shape information of the reflector 110 stored within it. It is understood that in this application, the preset may include predefined information. The "predefined information" can be implemented by pre-storing corresponding data, parameters, tables, or other methods that can be used to indicate relevant information in the device. This application does not limit the specific implementation method.

[0056] It should be understood that the adjustment of the surface shape of the reflector 110 using compensation light is dynamic. In some scenarios, for example, after the first compensation light illuminates the reflector 110 at a specific angle and power for a period of time, the surface shape of the reflector 110 may no longer be the first surface shape due to thermal radiation. Or, the optical system needs to continuously change the direction and / or divergence angle of the reflected light emitted from the reflector over time. Alternatively, the compensation light generating device 140 may be unable to generate the compensation light indicated by the calculation and analysis device 130, for example, when the optical power of the compensation light indicated by the first indication information exceeds the optical power of the compensation light generating device 140 that it can generate. Therefore, in order for the system for adjusting the beam provided in this application to provide real-time dynamic adjustment, the compensation light generating device 140 is also used to feed back the power information and position information of the first compensation light to the calculation and analysis device 130, so that the calculation and analysis device 130 can use the power information and position information of the first compensation light to generate new indication information, thereby controlling the compensation light generating device 140 to continue generating new compensation light, thereby changing the direction and divergence angle of the reflected light.

[0057] It should be noted that, in this application, the power information of the compensation light (including the power information of the first compensation light mentioned above and the power information of the second compensation light mentioned below) refers to the power distribution and power magnitude of the compensation light. For example, the power information of the first compensation light refers to the power distribution and power magnitude of the first compensation light.

[0058] In addition, the position information of the compensation light (including the position information of the first compensation light mentioned above and the position information of the second compensation light mentioned below) is the distance of the compensation light (including the first compensation light and the second compensation light) transmitted to the surface of the reflector 110, or the distance and divergence angle of the compensation light transmitted to the surface of the reflector 110.

[0059] Specifically, after the compensation light generating device 140 emits the first compensation light to the reflector 110, the compensation light generating device 140 feeds back the power information and position information of the first compensation light to the calculation and analysis device 130. Simultaneously, the surface shape detection device 120 acquires information about the surface shape of the reflector 110 after it has been altered by the first compensation light; this surface shape information is the information of the first surface shape corresponding to the first surface shape. At the same time, the calculation and analysis device 130 generates second instruction information based on the power information, position information, and first surface shape information of the first compensation light, so that the compensation light generating device 140 emits the second compensation light to the reflector 110 according to the second instruction information, and uses the second compensation light to change the first surface shape of the reflector 110 to the second surface shape.

[0060] It should be understood that the above adjustment process only describes the process of changing the initial surface shape of the reflector 110 to the first surface shape, and the process of changing the first surface shape of the reflector 110 to the second surface shape. Subsequent adjustments to the reflected light by the system can refer to the above process of changing the first surface shape of the reflector 110 to the second surface shape. For example, after the compensation light generating device 140 has emitted the second compensation light, it can feed back the power information and position information of the second compensation light to the calculation and analysis device 130. Simultaneously, the calculation and analysis device, based on the second surface shape information obtained by the surface shape detection device 120, generates third indication information to instruct the compensation light generating device 140 to generate a third compensation light corresponding to the third indication information.

[0061] It should be noted that this application does not limit the first light source or the incident light emitted by the first light source. For example, the first light source can be a synchrotron radiation source or a free electron laser source, etc. The incident light can be a Gaussian beam or a near-Gaussian non-flat-top beam, etc.

[0062] Furthermore, this application does not limit the material and shape of the reflector 110. The reflector 110 can be a long, narrow plane mirror or a long, narrow cylindrical mirror, etc. Its material can be silicon-based, metal, glass, etc., with a metal film (e.g., ruthenium, rhodium, gold, etc.) coated on the surface. It should be noted that the reflector 110 is part of an optical system that requires beam divergence angle and pointing control. For example, if the beam adjustment system provided in this application is used in an accelerator, the reflector 110 is a reflector already present in the accelerator system, and the optical system in system 100 is the back-end optical system of the accelerator system.

[0063] Optionally, the surface shape detection device 120 is an interferometer, such as a large-aperture Fizeau interferometer and a matching detection environment, which can provide real-time full-aperture surface shape detection of the mirror.

[0064] Optionally, in the optical system 100 provided in this application embodiment, the calculation and analysis device 130 is a processing device, which may include a central control processor and a memory, such as a central control computer. In this case, the surface shape information acquired by the surface shape detection device 120 and the instruction information generated by the calculation and analysis device 130 based on the surface shape information can both be stored in the memory, allowing each device in the system to perform corresponding operations based on the contents of the memory. For example, when the surface shape detection device 120 acquires the information of the first surface shape, the information of the first surface shape will be stored in the memory, enabling the calculation and analysis device 130 to directly use the information of the first surface shape to generate the first instruction information, and simultaneously enabling the compensation light generating device 140 to generate the corresponding first compensation light based on the first instruction information. Alternatively, the calculation and analysis device 130 in this system can be an independent calculation and control device. When the surface shape detection device 120 acquires the information of the first surface shape, it needs to send the information of the first surface shape to the calculation and analysis device 130. Similarly, after the calculation and analysis device 130 generates the first instruction information, it sends the first instruction information to the compensation light generating device 140.

[0065] Figure 2 A schematic structural diagram of a compensating light generating device 140 provided in an embodiment of this application is shown. Figure 2 As shown, the compensation light generating device 140 includes a second light source 141, a beam expander / contractor 142, a beam splitter 143, a light source generating device 144, a ranging device 145, and a power measuring device 146. The second light source 141 generates a first beam and outputs it to the beam expander / contractor 142. The beam expander / contractor 142 changes the spot diameter of the first beam to generate a second beam and outputs it to the beam splitter 143. The beam splitter 143 splits the second beam into a first portion and a second portion, outputting the first portion to the light source generating device 144 and the second portion to the power measuring device 146. The light source generating device 144 generates compensation light (including the first compensation light or second compensation light described above) based on the first portion of the received second beam. The power measuring device 145 acquires the power information of the compensation light generated by the light source generating device 144 based on the second portion of the second beam. The ranging device 145 acquires position information. It should be understood that the description of the power information and position information of the compensation light can be found above. Figure 1 The relevant parts are not elaborated here.

[0066] Optionally, in one possible implementation, the compensation light generating device 140 may further include a compensation light projection control device 147 for controlling the direction, power, etc., of the compensation light projection. In another possible implementation, the compensation light projection control device 147 may also be integrated into the computing and analysis device 130, which is not limited in this application.

[0067] Optionally, to reduce the size of the compensation light generating device 140, in one possible implementation, the compensation light generating device 140 may not include at least one of the aforementioned beam expander / contractor 142 and ranging device 145. For example, when the beam spot generated by the second light source 141 meets the requirements, the first beam generated by the second light source 141 can be directly split by the beam splitter 143. A portion of the split beam is used by the light source generating device 144 to generate corresponding compensation light, and another portion is used by the power measuring device 145 to measure the optical power of the compensation light. When the compensation light generating device 140 does not include the ranging device, the distance the compensation light travels to the reflector and the divergence angle of the compensation light can be obtained, for example, by manual measurement, and the measured distance and divergence angle are input into the calculation and analysis device 130.

[0068] It is understood that, in some embodiments, the power measurement device 146 may include a power distribution measurement device 1461 and a power value measurement device 1462 (e.g., an optical power meter). The power distribution measurement device 1461 is used to acquire the intensity distribution or projection angle of the compensation light, etc. The power value measurement device 1462 is used to acquire the optical power of the compensation light.

[0069] Specifically, when the system requires the compensation light generator 140 to emit compensation light to the reflector 110, after receiving the instruction information, the second light source 141 generates a first beam according to the instruction information. This first beam is expanded or contracted by the beam expander / contractor 142 and then divided into a first part and a second part by the beam splitter 143. Simultaneously, the beam splitter 143 outputs the first part of the second beam to the light source generator 144 and the second part to the power measuring device 145. The light source generator 144 generates compensation light based on the first part of the received second beam and incident it onto the surface of the reflector 110 via grazing incidence. The power measuring device 145 obtains the optical power of the second beam based on the second part of the second beam. It should be understood that since the light source generator 144 does not change the optical power of the second beam (i.e., the optical power of the compensation light is the same as the optical power of the second beam), the power measuring device 145 can obtain the optical power of the compensation light generated by the light source generator 144 by measuring the optical power of the second beam.

[0070] When the compensation light generating device 140 feeds back the power and position information of the compensation light to the calculation and analysis device 130, the power measuring device 146 feeds back the power distribution and power magnitude of the compensation light emitted by the light source generating device 144 to the calculation and analysis device 130. At the same time, the ranging device 145 feeds back the acquired position information to the calculation and analysis device 130.

[0071] It should be noted that when the compensation light projection control device 147 is part of the compensation light generator 140, after the compensation light generator 140 receives the instruction information, it needs to determine whether it can generate the compensation light specified by the calculation and analysis device 130, and generate the compensation light based on the determination result. When the compensation light projection control device 147 is coupled into the calculation and analysis device 130, the compensation light generator 140 can feed back its own parameters to the calculation and analysis device 130 in advance, so that when the calculation and analysis device 130 generates the instruction information, it can fully consider the performance of the compensation light generator 140 and avoid resource waste.

[0072] Optionally, the second light source is a laser, such as a laser that generates near-infrared light (760-1500nm), has a Gaussian energy distribution, and is capable of generating continuous light or high repetition rate light (e.g., 1kHz to 1MHz).

[0073] Optionally, the beam expander / contractor 142 is a transmission-type or reflection-type device. For example, Figure 3 A schematic architectural diagram of a transmission-type beam expander / contractor 300 provided in an embodiment of this application is shown. Figure 3 As shown, the transmissive beam expander / contractor 300 includes a convex lens 310, a concave lens 320, and a convex lens 330. Specifically, when expanding or contracting a first beam, the first beam enters through the convex lens 310, passes through the concave lens 320, and exits through the convex lens 330 as a second beam. The spacing between the lenses is movable, thereby achieving beam expansion or contraction of the first beam. It should be noted that this application does not limit the surface shape of the convex lens 310, concave lens 320, and convex lens 330; they can be spherical or aspherical. Furthermore, the surface shapes of the three lenses can be set to be completely identical, partially identical, or completely different, depending on the application scenario and requirements. Since the surface shape of the lenses is mainly determined by the relative ratio of the adjustable spot size of the second beam to the spot size of the first beam, if only a single beam contraction or expansion effect is required, the lenses can be of the same type. If both beam contraction and expansion are required simultaneously, the lenses in the lens group are generally selected from different types.

[0074] Figure 4A schematic diagram of a coupling architecture 400 between a beam splitter and a light source generating device provided in an embodiment of this application is shown. Specifically, the coupling architecture 400 includes a beam splitter 410, a plano-concave cylindrical mirror 420, a first plano-convex cylindrical mirror 430, and a second plano-convex cylindrical mirror 440, wherein the plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430, and the second plano-convex cylindrical mirror 440 constitute the light source generating device. Specifically, the beam splitter 410 is a semi-reflective half-lens with a calibrated splitting rate, which can reflect most of the light in the received second beam (i.e., the aforementioned first portion of light) to the light source generating device 144, while transmitting a small portion of the light (e.g., 1%) to the power measuring device 145. The plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430, and the second plano-convex cylindrical mirror 440 constitute the light source generating device mainly for unidirectional beam expansion of the light spot to simulate a grazing incidence scene. When the second beam is infrared light, the plano-concave cylindrical mirror 420, the first plano-convex cylindrical mirror 430 and the second plano-convex cylindrical mirror 440 can be coated with an infrared anti-reflection film to enhance the transmittance, thereby achieving the purpose of reducing energy loss.

[0075] It is understandable that the above Figure 4 The light source generating device described is merely an example, and this application does not limit the configuration of the light source generating device. For example, the light source generating device may not be configured as described above. Figure 4 The order of arrangement shown is not limited, and the number of lenses constituting the light source generating device can also be other numbers. Furthermore, the relative angle of the cylindrical mirrors can be rotated as needed to achieve anisotropic beam shaping. It should be noted that although this application does not limit the number of lenses included in the light source generating device, the light source generating device should include at least one plano-concave cylindrical mirror to achieve the function of beam expansion or contraction.

[0076] It should be noted that, in this embodiment, the light source generating device 144 can emit one or more beams of compensation light onto the surface of the reflector 110, with an incident angle of a small angle (e.g., less than or equal to 30°). Furthermore, the position of the compensation light can be changed according to the application scenario and requirements. For example, when the beam adjustment system provided in this application is applied to an accelerator, the compensation light can illuminate only the light-transmitting area of ​​the accelerator light source, or it can illuminate the area around the light-transmitting area.

[0077] In some embodiments, the compensation light emitted from the light source generating device 144 is used to correct the surface deformation of the reflector 110, thereby optimizing the wavefront of the reflected light. For example... Figure 5The image shows a light control scene using two compensation beams for mirror correction. The center of the reflector is a long, strip-shaped light spot projected by the first light source. On either side of this long, strip-shaped light spot are Gaussian-like long, strip-shaped light spots emitted by the light source generator 144, which generate a long, strip-shaped light field with a significant power distribution gradient on the reflector 110. Specifically, the surface shape correction near the area where the light spot of the first light source is located on the reflector can be achieved by adjusting the parameters shown in Table 1 below: the average light power of the compensation beam, the standard deviation of the Gaussian distribution of the compensation beam, the relative offset distance, and the incident angle. The relative offset distance is the offset distance of the compensation beam spot on the reflector relative to the incident light spot emitted from the first light source on the reflector. The incident angle is the angle of incidence of the compensation beam on the reflector, which can be normal incidence or grazing incidence; this application does not limit this. Specifically, Figure 6 The distortion of the mirror surface before and after optical correction is shown. Figure 6 In the diagram, (a) represents the distortion on the surface of the mirror 110 that has not undergone optical compensation correction. Figure 6 (b) in the figure represents the distortion of the surface of the reflector 110 after optical compensation correction, according to Figure 6 The comparison shows that, after the compensation light is used for correction, the surface distortion of the reflector 110 is smoother than before the compensation light was emitted.

[0078] Table 1

[0079]

[0080] It is understood that the compensation light parameters in Table 1 above are merely examples, and similarly, the parameter values ​​for each parameter are also merely examples; this application is not limited thereto.

[0081] Furthermore, to enhance the homogenization effect of the surface deformation field of the reflector 110, the amount of compensation light can be increased, i.e., more beams can be used to correct the surface of the reflector. For example, the following can be employed: Figure 7 The four compensating beams shown indicate that the surface deformation of the reflector 110 is as follows: Figure 8 As shown, by Figure 8 and Figure 6 As can be seen from (b) in the figure, using four compensating beams can reduce the surface deformation slope of the reflector 110 by an order of magnitude, which means that the wavefront of the reflected wave can be maintained to the greatest extent, thereby achieving high-precision control of the beam direction.

[0082] It should be noted that the compensation light emitted by the light source generator 144, in addition to the above... Figure 5 or Figure 7 Besides the Gaussian-like light fields listed, other examples include... Figure 9The flat-top light, irregular light, or light field array shown can achieve the desired light field by replacing different cylindrical mirror groups (or arrays), masks, or gratings in the light source generating device 144.

[0083] In some embodiments, the compensation light emitted from the light source generating device 144 is used to actively distort the reflector 110, causing thermal deformation at the micro- and nano-radian level, thereby achieving beam divergence angle control at the micro- and even micro-nano-radian level. For example, Figure 10 This illustration shows a beam expansion scenario of a thermo-convex mirror provided in an embodiment of this application. Specifically, in Figure 10 In this process, the reflector 110 undergoes deformation along the optical axis of the incident light (the beam generated by the first light source) under the irradiation of the compensation light emitted by the light source generator 144. When a Gaussian-distributed compensation light is used, the coverage area of ​​the compensation light is larger than the area of ​​the light spot of the first light source on the reflector. Therefore, in some scenarios, a shaping module 1001 can be added to the optical path between the compensation light generator 140 and the reflector 110 as needed. The shaping module 1001 includes, but is not limited to, apertures, masks, gratings, etc. It should be noted that in Figure 10 In the scenario shown, the high point of deformation of the reflector 110 intersects with the edge of the incident light or is tangential to or grazing the incident light (e.g., the incident angle of the incident light is less than 10°).

[0084] It should be noted that the above Figure 10 This is merely one example of using active distortion correction with compensating light. It is understood that, in addition to causing convexity at the first light source irradiation point, the compensating light can also illuminate the edge of the mirror, achieving relative concavity at the light source spot, such as... Figure 11 As shown, this scheme provides more possibilities for adjusting the divergence angle and direction of reflected light, and can be applied to optical systems that require beam expansion.

[0085] It should also be noted that when the compensation light emitted from the light source generator 144 is used to correct the surface deformation of the reflector 110, the light field of the compensation light partially overlaps or does not overlap at all with the light field of the incident light generated by the first light source. When the compensation light emitted from the light source generator 144 is used to perform active thermal deformation of the reflector 110, the light field of the compensation light fully overlaps or partially overlaps with the light field of the incident light generated by the first light source.

[0086] To improve the accuracy and efficiency of beam adjustment, ensure the reliability of beam adjustment, and further optimize system performance, Figure 1 Based on the system 100 shown, embodiments of this application also provide several possible systems 1200 for adjusting the beam, such as... Figure 12 As shown.

[0087] In the first feasible implementation, system 1200 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, a compensation light generator 140, and an environmental control device 1210. The environmental control device 1210 acquires environmental information about the reflector 110, enabling the calculation and analysis device 130 to generate indication information (including the aforementioned first and second indication information) based not only on the power and position information of the compensation light and the surface shape information of the reflector 110, but also further considering the environmental information surrounding the reflector 110. This allows for the determination of more reliable indication information, thereby improving system performance. The descriptions of the reflector 110, surface shape detection device 120, calculation and analysis device 130, and compensation light generator 140 can be found above. Figure 1 The relevant explanations will not be repeated here.

[0088] For example, when the system begins to adjust the reflected light, the calculation and analysis device 130 generates first indication information based on the initial surface shape information obtained by the surface shape detection device 120 and the environmental information obtained by the environmental control device 1210. When the system adjusts the environment of the reflector 110, the calculation and analysis device 130 generates environmental control information, causing the environmental control device 1210 to change the environment of the reflector 110 according to the environmental control information to meet the system requirements.

[0089] It should be noted that in a non-vacuum environment, the environmental information includes, but is not limited to, at least one of the temperature and humidity of the environment in which the reflector 110 is located. In this case, the environmental control device 1210 may include modules for measuring and controlling temperature and / or humidity. For example, it may include a humidifier (to increase ambient humidity), a dehumidifier (to decrease ambient humidity), a refrigerator (to decrease temperature), or a heater (to increase temperature). Correspondingly, the environmental control information includes, but is not limited to, temperature and / or humidity information. That is, in a non-vacuum scenario, the environmental control device 1210 mainly provides feedback and regulation on the temperature and / or humidity of the environment in which the reflector 110 is located. In one possible implementation, the temperature and / or humidity information included in the environmental control information can be the temperature and / or humidity required by the system. When the environmental control device 1210 receives such environmental control information, it can directly modify the temperature and / or humidity of the environment in which the reflector 110 is located to the temperature and / or humidity indicated in the environmental control information. In another possible implementation, the temperature and / or humidity information included in the environmental control information can be the change in temperature and / or humidity relative to the current environment where the reflector 110 is located. In this case, the environmental control device 1210 needs to first calculate the target temperature and / or humidity required by the system, and then modify the temperature and / or humidity of the environment where the reflector 110 is located to the calculated target temperature and / or humidity. It should be understood that this application does not limit the form of the temperature and / or humidity information included in the environmental control information, and other forms of temperature and / or humidity information may also exist, which should also be within the scope of protection of this application.

[0090] Additionally, when the reflector 110 is in a vacuum environment, it is arranged within a vacuum chamber. In this case, the environmental information may also include the vacuum level within the vacuum chamber. The environmental control device 1210 may further include a module for measuring and controlling the vacuum level, such as a vacuum pump. Accordingly, the environmental control information primarily regulates the vacuum level within the vacuum chamber. For example, it is generally required that the pressure within the vacuum chamber be less than or equal to 10⁻⁶. 2 Pa. In order for the surface shape detection device to detect the surface shape of the reflector 110, a porthole larger than the size of the reflector 110 needs to be provided on the cavity wall of the vacuum chamber. This porthole is used to transmit the detection light from the surface shape detection device. It should be understood that when all the devices in the beam adjustment system 1200 can be in a vacuum environment, the reflector 110 does not need to be placed in the vacuum chamber.

[0091] Specifically, Figure 13 This illustration shows two positional relationships between the porthole and the surface shape detection device provided in an embodiment of this application. Specifically, in Figure 13In (a), the porthole 1310 on the wall of the vacuum chamber 1300 is positioned parallel to the surface shape detection standard mirror 1320 of the surface shape detection device. Figure 13 In (b), the position of the porthole 1310 is at a certain angle relative to the surface shape detection standard mirror 1320 of the surface shape detection device, which can increase the measurement range. It should be noted that when using... Figure 13 When placing the surface shape detection standard mirror 1320 of the surface shape detection device in (b) of the system, the system also includes a plane reflection standard mirror 1330 for reflecting the detection light. Exemplarily, the deflection angle can be set to 45° to optimize the maximum detection aperture. It should also be noted that the porthole material needs to be determined based on the detection light used by the surface shape detection device 120. Exemplarily, when the detection light used by the surface shape detection device 120 is 632.8 nm visible light, the porthole material can be quartz, sapphire, or other materials with high transmittance to 632.8 nm light. To further reduce the loss of detection light by the porthole material, a dielectric film can be coated on both sides of the porthole so that the residual reflectivity on one side for 632.8 nm wavelength light is less than or equal to 1%.

[0092] In the second possible implementation, system 1200 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, a compensation light generator 140, and a temperature detection device 1220. The temperature detection device 1220 acquires temperature distribution information of the surface of the reflector 110 and sends this information to the calculation and analysis device 130. This allows the calculation and analysis device 130 to generate indication information (including the aforementioned first and second indication information) based not only on the power and position information of the compensation light and the surface shape information of the reflector 110, but also further considering the temperature distribution information of the reflector 110 surface, thereby determining more reliable indication information and improving system performance. The descriptions of the reflector 110, the surface shape detection device 120, the calculation and analysis device 130, and the compensation light generator 140 can be found above. Figure 1 The relevant explanations will not be repeated here.

[0093] Optionally, the temperature detection device 1220 can be a high-precision infrared thermal imager or a thermocouple-type temperature measuring device; this application does not impose any limitations on this.

[0094] In the third possible implementation, system 1200 includes a reflector 110, a surface shape detection device 120, a calculation and analysis device 130, a compensation light generator 140, and a reflector heat dissipation device 1230. The reflector heat dissipation device 1230 is directly or indirectly connected to the reflector 110. The reflector heat dissipation device 1230 receives temperature control information from the calculation and analysis device 130 and controls the temperature of the reflector 110 according to the control information. It should be noted that the implementation form of the reflector heat dissipation device 1230 is not limited in this application. It can be implemented using a contact heat sink, for example, by using heat sinks, fans, or other heat dissipation devices to increase the heat dissipation area and increase the airflow speed, thereby increasing the heat dissipation rate. Alternatively, a liquid cooling system can be used, where heat is transferred to water and then dissipated through a radiator. For example, when the reflector heat dissipation device 1230 is a contact heat sink, the temperature control information may include parameters such as refrigerant temperature and flow rate, so that the reflector heat dissipation device 1230 controls the refrigerant temperature, flow rate, and other parameters according to the control information. It should be understood that the descriptions of the reflector 110, the surface shape detection device 120, the calculation and analysis device 130, and the compensation light generation device 140 can be found above. Figure 1 The relevant explanations will not be repeated here.

[0095] It should be understood that the above Figure 12 The three beam adjustment systems 1200 shown are merely examples and not limitations. The three beam adjustment systems can be implemented independently or in combination. For example, the beam adjustment system 1200 can simultaneously include at least two of the following: environmental control device 1210, temperature detection device 1220, and reflector heat dissipation device 1230.

[0096] Based on the above embodiments, this application also provides a computer-readable storage medium. This storage medium stores a software program, which, when read and executed by one or more processors, can implement the operations performed by the computing and analysis device in any one or more of the above embodiments. The computer-readable storage medium may include various media capable of storing program code, such as a USB flash drive, portable hard drive, read-only memory, random access memory, magnetic disk, or optical disk.

[0097] Based on the above embodiments, this application also provides a chip. The chip includes a processor for implementing the functions involved in any one or more of the above embodiments, such as acquiring or processing instruction information or control information involved in the above embodiments. Optionally, the chip further includes a memory for storing necessary program instructions and data executed by the processor. The chip can be composed of individual chips or can include chips and other discrete devices.

[0098] Obviously, those skilled in the art can make various modifications and variations to the embodiments of this application without departing from the scope of the embodiments of this application. Therefore, if these modifications and variations to the embodiments of this application fall within the scope of the claims of this application and their equivalents, this application also intends to include these modifications and variations.

[0099] It should be understood that the processor mentioned in the embodiments of this application can be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. A general-purpose processor can be a microprocessor or any conventional processor.

[0100] It should also be understood that the memory mentioned in the embodiments of this application can be volatile memory and / or non-volatile memory. Non-volatile memory can be read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), or flash memory. Volatile memory can be random access memory (RAM). For example, RAM can be used as an external cache. By way of example and not limitation, RAM can include various forms such as: static random access memory (SRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), synchronous linked dynamic random access memory (SLDRAM), and direct rambus RAM (DR RAM). It should be noted that when the processor is a general-purpose processor, DSP, ASIC, FPGA or other programmable logic device, discrete gate or transistor logic device, or discrete hardware component, the memory can be integrated into the processor.

[0101] Those skilled in the art will recognize that the units and steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application; such implementations should not be considered beyond the scope of protection of this application.

[0102] In the embodiments provided in this application, it should be understood that the disclosed system can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the mutual coupling or direct coupling or communication connection shown or discussed may be through some interfaces, and the indirect coupling or communication connection of devices or units may be electrical, mechanical, or other forms.

[0103] In the above embodiments, implementation can be achieved entirely or partially through software, hardware, firmware, or any combination thereof. When implemented using software, it can be implemented entirely or partially in the form of a computer program product. The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. For example, the computer can be a personal computer, a server, or a network device, etc. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., coaxial cable, fiber optic, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that integrates one or more available media. The available media can be magnetic media (e.g., floppy disks, hard disks, magnetic tapes), optical media (e.g., DVDs), or semiconductor media (e.g., solid-state disks, SSDs). For example, the aforementioned available media can include, but are not limited to, various media capable of storing program code, such as USB flash drives, portable hard drives, ROM, RAM, magnetic disks, or optical disks.

[0104] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A system for adjusting a light beam, characterized in that, include: The system comprises a reflector, a surface shape detection device, a calculation and analysis device, and a compensation light generator, wherein: The reflector is used to receive incident light from the first light source and to emit reflected light. The surface shape detection device is used to obtain information about the initial surface shape of the reflector after the incident light is incident; The calculation and analysis device is used to generate first indication information based on the information of the initial surface shape. The first indication information is used to instruct the compensation light generating device to emit first compensation light toward the reflector. The compensation light generating device is used to emit the first compensation light to the reflector according to the first instruction information, and to feed back the power information and position information of the first compensation light to the calculation and analysis device. The first compensation light is used to change the initial surface shape of the reflector to a first surface shape. The power information is the power magnitude and power distribution of the first compensation light, and the position information is the distance from which the first compensation light is transmitted to the surface of the reflector. The calculation and analysis device is also used to instruct the compensation light generator to adjust the surface shape of the reflector based on the power information and the position information.

2. The system according to claim 1, characterized in that, The surface shape detection device is also used to acquire information about the first surface shape; The calculation and analysis device is further configured to instruct the compensation light generator to adjust the surface shape of the reflector based on the power information and the position information, including: The calculation and analysis device generates second indication information based on the power information, the position information, and the information of the first surface shape. The second indication information is used to instruct the compensation light generator to emit second compensation light toward the reflector. The compensation light generating device emits a second compensation light to the reflector according to the second instruction information. The second compensation light is used to change the first surface shape into a second surface shape.

3. The system according to claim 1 or 2, characterized in that, The first compensation light is used to change the initial surface shape of the reflector to a first surface shape, including: the first compensation light is used together with the incident light to homogenize the optical thermal field of the surface of the reflector, or the compensation light is used to heat a local area of ​​the reflector to cause thermal deformation in the local area of ​​the reflector.

4. The system according to claim 1 or 2, characterized in that, The information of the initial surface shape is at least one of the peak-valley PV value of the initial surface shape, the root mean square RMS of the initial surface shape, and the surface slope of the initial surface shape. The information of the first surface shape is at least one of the peak-valley PV value of the first surface shape, the root mean square (RMS) value of the first surface shape, and the surface slope of the first surface shape.

5. The system according to claim 2, characterized in that, The system further includes: an environmental control device, wherein: The environmental control device is used to acquire environmental information about the reflector and change the environment in which the reflector is located.

6. The system according to claim 5, characterized in that, The calculation and analysis device generates environmental control information based on the environmental information, and the environmental control information instructs to change the environment in which the reflector is located. The environmental control device changes the environment in which the reflector is located based on the environmental control information.

7. The system according to claim 5, characterized in that, The environmental information is at least one of the following: temperature, humidity, and vacuum level at which the reflector is located.

8. The system according to any one of claims 5 to 7, characterized in that, The calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, and the environmental information.

9. The system according to any one of claims 5 to 7, characterized in that, The system further includes: a temperature detection device, wherein: The temperature detection device is used to acquire temperature distribution information on the surface of the reflector; The calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, the environmental information, and the temperature distribution information.

10. The system according to claim 2, characterized in that, The system further includes: a temperature detection device, wherein: The temperature detection device is used to acquire temperature distribution information on the surface of the reflector; The calculation and analysis device is specifically used to generate the second indication information based on the power information, the position information, the information of the first surface shape, and the temperature distribution information.

11. The system according to claim 1 or 2, characterized in that, The compensation light generating device includes: a second light source, a beam splitter, a light source generating device, and a power measuring device, wherein: The second light source is used to generate the first light beam; The beam splitter is used to split the first beam into a first part of light and a second part of light, and output the first part of light to the light source generating device and the second part of light to the power measuring device; The light source generating device generates the first compensation light based on the first portion of light; The power measurement device acquires the power information based on the second portion of light.

12. The system according to claim 11, characterized in that, The compensation light generating device further includes a beam expander / contractor, which is located between the second light source and the beam splitter and is used to change the spot diameter of the first beam.

13. The system according to claim 11, characterized in that, The compensation light generating device further includes a ranging device, which is used to acquire the position information.

14. The system according to claim 1 or 2, characterized in that, When the reflector is in a vacuum environment, the system also includes a vacuum cavity, which includes a porthole. The porthole is used to transmit detection light from the surface shape detection device; The reflector is also used to reflect the detection light through the porthole to the surface shape detection device; The surface shape detection device is specifically used to obtain the initial surface shape information through the detection light reflected by the mirror.

15. The system according to claim 1 or 2, characterized in that, The system further includes a shaping module located on the optical path between the compensation light generator and the reflector, for shaping the first compensation light.

Images