Anti-collision device of semiconductor element cleaning equipment

Abstract

The invention relates to the technical field of semiconductor processing, and discloses a semiconductor element cleaning equipment anti-collision device which comprises a cleaning cabinet, a cabinet door is hinged to the front side face of the cleaning cabinet, a controller is fixedly connected to the top face of the cleaning cabinet, a mounting base is fixedly connected to the bottom face of the cleaning cabinet, an anti-collision base is arranged below the mounting base, and the anti-collision base is fixedly connected to the bottom face of the cleaning cabinet. Side connecting plates are fixedly connected to the two sides of the anti-collision seat, a pressing plate is fixedly connected to the lower surface of the mounting seat, the anti-collision seat clamps and fixes the mounting seat through the pressing plate, then the cleaning cabinet is rapidly fixed to the anti-collision seat, the use convenience of the device is improved, a clamping plate is clamped between an abutting block and the pressing plate, and the clamping plate is clamped between the abutting block and the pressing plate; the installation base and the anti-collision base are locked, the installation stability is improved, then the safety of the cleaning cabinet is improved, the telescopic rod drives the clamping plate to be separated from the tooth-shaped clamping groove after stretching out and drawing back, and at the moment, the pressing plate and the installation base are separated from limitation of the clamping plate.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor processing, in particular to an anti-collision device for semiconductor element cleaning equipment. Background Art

[0002] During semiconductor production, components must be strictly cleaned. Even trace amounts of contamination can cause semiconductor components to fail. The purpose of cleaning is to remove contaminants on the surface of components, including organic and inorganic substances. Some of these impurities are in atomic or ionic state, and some are in the form of thin films or particles on the surface of silicon wafers, which can cause various defects. There are two methods for removing contamination: physical cleaning and chemical cleaning. During the cleaning process of semiconductor components, the cleaning equipment needs to be protected to prevent the cleaning equipment from being hit and damaging the internal semiconductor components. In the prior art, the process of installing the cleaning equipment on the anti-collision equipment is inconvenient, time-consuming and labor-intensive.

[0003] The patent with the announcement number CN110185888B discloses a semiconductor component cleaning equipment anti-collision device, including a cleaning equipment body, a protective device connected to the bottom edge of the cleaning equipment body, the protective device is composed of a pair of symmetrically distributed protective mechanisms, the two protective mechanisms are slidably connected by a sliding rod, and each protective mechanism is installed with a corner plate. The semiconductor component cleaning equipment anti-collision device, through the protective device, blocks the mobile device such as a cart driving towards the cleaning equipment body to prevent the mobile device such as the cart from colliding with the cleaning equipment body, and the corner plate is provided to protect the front corner of the cleaning equipment body, and the distance between the front end of the protective device and the cleaning equipment body can be adjusted by enabling the sliding sleeve rod to slide relative to the front baffle. Although the patent solves the above problems, there are still problems that the cleaning equipment cannot be quickly installed on the anti-collision device and the convenience of use is low, so a semiconductor component cleaning equipment anti-collision device is proposed to solve the above problems. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide an anti-collision device for semiconductor component cleaning equipment in view of the deficiencies in the above-mentioned prior art.

[0005] The cleaning machine of claim 1, wherein the cleaning machine has a plurality of cleaning members, each of which is adapted to clean the cleaning machine from a plurality of obstacles. The cleaning machine has a plurality of cleaning members, each of which is adapted to clean the cleaning machine from a plurality of obstacles. The bottom surface of the pressing block is brought into contact with the friction block after the clamping plate is reset and rotated, so that the clamping plate is clamped between the friction block and the pressing plate, so that the mounting seat and the anti-collision seat are locked. When the cleaning cabinet needs to be disassembled, the telescopic rod is pulled, and the telescopic rod is extended and retracted to drive the clamping plate to disengage from the toothed slot. At this time, the pressing plate and the mounting seat are separated from the restriction of the clamping plate, so that the cleaning cabinet can be quickly lifted from the anti-collision seat through the mounting seat to complete the disassembly.

[0006] Preferably, the supporting device includes a bottom plate, a pull rod, a fan-shaped side plate, a guide rod, and an arcuate slide rail, wherein the bottom plate is hinged at a side of the anti-collision seat away from the pressure plate, the pull rod is fixedly connected to the inner surface of the bottom plate, the fan-shaped side plates are fixedly connected at both sides of the bottom plate, the guide rod is fixedly connected to a side of the fan-shaped side plate close to the side connecting plate, the arcuate slide rail is fixedly connected to the top surface of the side connecting plate, and the supporting device also includes a trapezoidal pressure block, a U-shaped card block, a connecting plate, a first elastic rod, and a limit plate, and the trapezoidal pressure block is fixedly connected to the pressure plate. The plate is close to the side connecting plate, the connecting plate is fixedly connected to the side of the side connecting plate close to the trapezoidal pressure block, the first elastic rod is fixedly connected to the front and rear sides of the connecting plate, the limit plate is fixedly connected to the front and rear sides of the connecting plate, the U-shaped block is fixedly connected to the end of the first elastic rod away from the connecting plate, the U-shaped block and the side of the side connecting plate close to the trapezoidal pressure block are in contact with each other, the upper and lower sides of the U-shaped block are in contact with the limit plate, the inclined surface of the trapezoidal pressure block away from the anti-collision seat and the end of the U-shaped block away from the connecting plate The inclined surfaces are in contact with each other, the guide rod and the inner surface of the arc slide rail are slidably connected, and two torsion springs are arranged at the hinge of the bottom plate and the anti-collision seat. The bottom plate is vertically arranged at the front and rear sides of the anti-collision seat. The bottom plate is quickly lifted by the pull rod, so that the fan-shaped side plate rotates along the hinge of the bottom plate and the anti-collision seat, and the fan-shaped side plate drives the guide rod to slide in the arc slide rail. When the guide rod slides to the bottom end of the arc slide rail, the bottom plate fits with the anti-collision seat. When the guide rod slides to the bottom end of the arc slide rail, the U-shaped block clamps the guide rod, making it impossible for the guide rod to move The U-shaped block loses the limit of the trapezoidal pressure block, and the elastic reset action of the first spring rod drives the U-shaped block to reset and clamp the guide rod again.

[0007] Preferably, the elastic protection device includes a protection frame, a second elastic rod, an elastic contact frame, and a connecting rod, wherein the protection frame is arranged on the outer side of the top of the cleaning cabinet, the second elastic rod is fixedly connected to the inner wall of the protection frame, the elastic contact frame is fixedly connected to one end of the second elastic rod away from the protection frame, and the connecting rod is fixedly connected to the bottom surface of the protection frame, and the elastic protection device also includes a slide groove transmission member, a resistance shaft, a connecting block, a limit shaft, and a slide groove limit frame, the slide groove transmission member is fixedly connected to the bottom end of the connecting rod, the resistance shaft is fixedly connected to the side of the fan-shaped side plate away from the side connecting plate, the connecting block is fixedly connected to the lower surface of the slide groove transmission member, the limit shaft is fixedly connected to the side of the connecting block close to the side connecting plate, the slide groove limit frame is fixedly connected to the top of the side connecting plate, the resistance shaft is slidably connected to the inner surface of the slide groove transmission member, and the limit shaft is slidably connected to the inner surface of the slide groove limit frame, and the cleaning cabinet can adjust the cleaning data through the controller before cleaning the semiconductor components, and there are many components inside the controller. It is necessary to avoid hard contact with the object to prevent its internal damage. When the object hits the controller, it is blocked by the protective frame. The protective frame avoids direct contact between the object and the controller. When the impact generates vibration, the vibration force is transmitted to the second elastic rod through the protective frame and absorbed by the second elastic rod, so that the vibration transmitted to the elastic contact frame is weakened. In the process of installing the cleaning cabinet on the anti-collision seat through the mounting seat, the torsion spring drives the bottom plate and the fan-shaped side plate to rotate, and the fan-shaped side plate drives the resistance shaft to rotate along the circumference of the hinge between the bottom plate and the anti-collision seat. When the resistance shaft rotates circumferentially, it drives the slide groove transmission member to move upward through the rotation radius, and the slide groove transmission member drives the connecting rod to move upward, and the connecting rod drives the protective frame to move upward. The protective frame then drives the elastic contact frame to move upward through the second elastic rod and blocks the controller, so that the controller is immediately protected by the protective frame after the control is completed. In the process of lifting the bottom plate after disassembling the cleaning cabinet, the resistance shaft drives the slide groove transmission member and the connecting rod to move downward, and the connecting rod drives the protective frame to move downward to expose the controller.

[0008] The present invention adopts the above technical solution to bring the following beneficial effects: 1. The anti-collision device of the semiconductor component cleaning equipment, the anti-collision seat clamps and fixes the mounting seat through the pressure plate, so that the cleaning cabinet can be quickly fixed on the anti-collision seat, which improves the convenience of using the device. The clamping plate is clamped between the resistance block and the pressure plate, so that the mounting seat and the anti-collision seat are locked, which improves the installation stability and thus improves the safety of the cleaning cabinet. After the telescopic rod is extended and retracted, it drives the clamping plate to disengage from the toothed slot. At this time, the pressure plate and the mounting seat are free from the restriction of the clamping plate, so that the cleaning cabinet can be quickly lifted from the anti-collision seat through the mounting seat to complete the disassembly, which further improves the convenience of use. 2. The anti-collision device of the semiconductor component cleaning equipment has a bottom plate vertically arranged on the front and rear sides of the anti-collision seat, which increases the contact area between the anti-collision seat and the ground, thereby increasing the supporting area of ​​the anti-collision seat, avoiding the cleaning cabinet from tipping over after being hit, and improving the safety of the cleaning cabinet when cleaning semiconductor components. The bottom plate fits with the anti-collision seat, so that the bottom plate can be quickly folded up to prevent the device from occupying storage space when not in use. After the bottom plate fits with the anti-collision seat, the staff can quickly lift the cleaning cabinet for movement by the pull rod, which improves the mobility of the device. The elastic reset action of the first spring rod drives the U-shaped block to reset and jams the guide rod again, which improves the ease of use of the support device. 3. The anti-collision device of the semiconductor component cleaning equipment has a protective frame that prevents direct contact between objects and the controller, reducing the risk of damage to the controller. When vibration is generated by impact, the force of the vibration is transmitted to the second elastic rod through the protective frame and absorbed by the second elastic rod, so that the vibration transmitted to the elastic contact frame is weakened, further improving the safety of the controller. The connecting rod drives the protective frame to move downward to expose the controller, thereby turning off the controller, or re-adjusting the controller for the next semiconductor component cleaning, thereby facilitating the staff to operate the controller and improving the ease of use of the elastic protective device. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 It is a schematic diagram of the three-dimensional overall structure of the present invention; Figure 2 It is a schematic diagram of the front side cross-sectional three-dimensional structure of the present invention; Figure 3 It is a schematic diagram of the front side cross-sectional three-dimensional structure of the mounting seat of the present invention; Figure 4 It is a schematic diagram of the front side three-dimensional structure of the bottom plate of the present invention; Figure 5 It is a schematic diagram of the front side cross-sectional three-dimensional structure of the support device of the present invention; Figure 6 For the present invention Figure 5 A is a schematic diagram of the enlarged structure of the middle part; Figure 7 It is a schematic diagram of the front side cross-sectional three-dimensional structure of the elastic protective device of the present invention; Figure 8 For the present invention Figure 7Schematic diagram of the enlarged structure of B.

[0010] In the figure: 1, cleaning cabinet; 2, cabinet door; 3, controller; 4, mounting seat; 5, anti-collision seat; 51, side connecting plate; 52, conflict block; 53, telescopic rod; 54, clamping plate; 55, pressing block; 56, pressing plate; 57, toothed slot; 6, supporting device; 61, bottom plate; 62, pull rod; 63, fan-shaped side plate; 64, guide rod; 65, arc-shaped slide rail; 66, trapezoidal pressure block; 67, U-shaped clamping block; 68, connecting plate; 69, first spring rod; 610, limit plate; 7, elastic protective device; 71, protective frame; 72, second spring rod; 73, elastic contact frame; 74, connecting rod; 75, slide transmission member; 76, conflict shaft; 77, connecting block; 78, limit shaft; 79, slide limit frame. DETAILED DESCRIPTION

[0011] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0012] See also Figure 1-Figure 8, one embodiment of the present invention is: a semiconductor element cleaning equipment anti-collision device, comprising a cleaning cabinet 1, a cabinet door 2 is hingedly connected to the front side of the cleaning cabinet 1, a controller 3 is fixedly connected to the top surface of the cleaning cabinet 1, a mounting seat 4 is fixedly connected to the bottom surface of the cleaning cabinet 1, an anti-collision seat 5 is arranged below the mounting seat 4, side connecting plates 51 are fixedly connected to both sides of the anti-collision seat 5, a pressing plate 56 is fixedly connected to the lower surface of the mounting seat 4, a side of the anti-collision seat 5 close to the pressing plate 56 is fixedly connected to a resistance block 52, a side of the anti-collision seat 5 close to the pressing plate 56 is fixedly connected to a telescopic rod 53, a circumferential surface of the telescopic rod 53 is hingedly connected to a clamping plate 54, a side of the clamping plate 54 away from the side connecting plate 51 is fixedly connected to a pressing block 55, a side of the pressing plate 56 close to the clamping plate 54 is provided with a toothed clamping groove 57, the anti-collision seat 5 clamps and fixes the mounting seat 4 through the pressing plate 56, so that the cleaning cabinet 1 is quickly fixed in The anti-collision seat 5 is on the anti-collision seat, which improves the convenience of use of the device. The clamping plate 54 is clamped between the resistance block 52 and the pressure plate 56, so that the mounting seat 4 and the anti-collision seat 5 are locked, which improves the installation stability and thus improves the safety of the cleaning cabinet 1. A supporting device 6 is arranged at the bottom of the cleaning cabinet 1, and an elastic protective device 7 is arranged on the periphery of the cleaning cabinet 1. A torsion spring 1 is arranged at the hinge of the clamping plate 54 and the telescopic rod 53. The lower surface of the pressing block 55 and the upper surface of the resistance block 52 are in contact with each other, the clamping plate 54 and the inner surface of the toothed groove 57 are in contact with each other, the bottom end of the mounting seat 4 and the top end of the anti-collision seat 5 are in contact with each other, and the telescopic rod 53 drives the clamping plate 54 to disengage from the toothed groove 57 after extension and contraction. At this time, the pressure plate 56 and the mounting seat 4 are separated from the restriction of the clamping plate 54, so that the cleaning cabinet 1 can be quickly lifted from the anti-collision seat 5 through the mounting seat 4 to complete the disassembly, which further improves the convenience of use.

[0013] Working principle: put the mounting seat 4 on the anti-collision seat 5, the mounting seat 4 drives the pressure plate 56 to be inserted between the anti-collision seats 5, the anti-collision seat 5 clamps the mounting seat 4 through the pressure plate 56, and then the cleaning cabinet 1 is quickly fixed on the anti-collision seat 5, which improves the convenience of use of the device. The pressure plate 56 moves downward during the insertion of the anti-collision seat 5. When the pressure plate 56 moves downward, its bottom end contacts the inclined surface of the clamping plate 54, so that the clamping plate 54 rotates. When the mounting seat 4 and the anti-collision seat 5 are in contact, the pressure plate 56 stops, and the torsion spring drives the clamping plate 54 to rotate and reset and clamp it into the toothed clamping groove 57, and the clamping plate 54 is restored. After the rotation and reset, the bottom surface of the pressing block 55 is driven to contact the resistance block 52, so that the clamping plate 54 is clamped between the resistance block 52 and the pressing plate 56, so that the mounting seat 4 and the anti-collision seat 5 are locked, thereby improving the installation stability and thus improving the safety of the cleaning cabinet 1. When the cleaning cabinet 1 needs to be disassembled, the telescopic rod 53 is pulled, and the telescopic rod 53 is extended and retracted to drive the clamping plate 54 to disengage from the toothed slot 57. At this time, the pressing plate 56 and the mounting seat 4 are separated from the restriction of the clamping plate 54, so that the cleaning cabinet 1 can be quickly lifted from the anti-collision seat 5 through the mounting seat 4 to complete the disassembly, further improving the convenience of use.

[0014] See also Figure 1-Figure 8 On the basis of the above embodiment, in another embodiment of the present invention, the supporting device 6 includes a bottom plate 61, a pull rod 62, a fan-shaped side plate 63, a guide rod 64, and an arcuate slide rail 65. The bottom plate 61 is hinged on the side of the anti-collision seat 5 away from the pressure plate 56, the pull rod 62 is fixedly connected to the inner surface of the bottom plate 61, the fan-shaped side plate 63 is fixedly connected to both sides of the bottom plate 61, the guide rod 64 is fixedly connected to the side of the fan-shaped side plate 63 close to the side connecting plate 51, the arcuate slide rail 65 is fixedly connected to the top surface of the side connecting plate 51, and the bottom plate 61 is vertically arranged At the front and rear sides of the anti-collision seat 5, the contact area between the anti-collision seat 5 and the ground is increased, thereby increasing the support area of ​​the anti-collision seat 5, avoiding the cleaning cabinet 1 from tipping over after being hit, and improving the safety of the cleaning cabinet 1 when cleaning semiconductor components. The bottom plate 61 fits with the anti-collision seat 5, so that the bottom plate 61 can be quickly retracted to prevent the device from occupying storage space when not in use. The supporting device 6 also includes a trapezoidal pressing block 66, a U-shaped card block 67, a connecting plate 68, a first elastic rod 69, and a limiting plate 610. The trapezoidal pressing block 66 is fixedly connected to the pressing block 66. The plate 56 is close to the side connecting plate 51, the connecting plate 68 is fixedly connected to the side of the side connecting plate 51 close to the trapezoidal pressure block 66, the first elastic rod 69 is fixedly connected to the front and rear sides of the connecting plate 68, the limiting plate 610 is fixedly connected to the front and rear sides of the connecting plate 68, the U-shaped block 67 is fixedly connected to the end of the first elastic rod 69 away from the connecting plate 68, the U-shaped block 67 and the side of the side connecting plate 51 close to the trapezoidal pressure block 66 are in contact with each other, the upper and lower sides of the U-shaped block 67 are in contact with the limiting plate 610, and the trapezoidal pressure block 66 is away from the anti- The inclined surface at one end of the collision seat 5 and the inclined surface at one end of the U-shaped block 67 away from the connecting plate 68 are in contact with each other, the guide rod 64 and the inner surface of the arc slide rail 65 are slidably connected, and a torsion spring 2 is arranged at the hinge of the bottom plate 61 and the anti-collision seat 5. After the bottom plate 61 is fitted with the anti-collision seat 5, the staff can quickly lift the cleaning cabinet 1 for movement by the pull rod 62, which improves the mobility of the device. The elastic reset action of the first spring rod 69 drives the U-shaped block 67 to reset and clamp the guide rod 64 again, which improves the convenience of use of the support device 6.

[0015] Working principle: the bottom plate 61 is vertically arranged on the front and rear sides of the anti-collision seat 5, which increases the contact area between the anti-collision seat 5 and the ground, thereby increasing the supporting area of ​​the anti-collision seat 5, avoiding the cleaning cabinet 1 from tipping over after being hit, and improving the safety of the cleaning cabinet 1 when cleaning semiconductor components. The bottom plate 61 is quickly lifted by the pull rod 62, so that the fan-shaped side plate 63 rotates along the hinge between the bottom plate 61 and the anti-collision seat 5, and the fan-shaped side plate 63 drives the guide rod 64 to slide in the arc slide rail 65. When the guide rod 64 slides to the bottom end of the arc slide rail 65, the bottom plate 61 fits with the anti-collision seat 5, so that the bottom plate 61 is quickly retracted to prevent the device from occupying storage space when not in use. After the bottom plate 61 fits with the anti-collision seat 5, the staff can quickly lift the cleaning cabinet 1 for movement through the pull rod 62, which improves the movement convenience of the device. The U-shaped block 67 loses the limit of the trapezoidal block 66, and the elastic reset action of the first spring rod 69 drives the U-shaped block 67 to reset and lock the guide rod 64 again, thereby improving the convenience of use of the support device 6.

[0016] See also Figure 1-Figure 8On the basis of the above embodiment, in another embodiment of the present invention, the elastic protection device 7 includes a protection frame 71, a second elastic rod 72, an elastic contact frame 73, and a connecting rod 74. The protection frame 71 is arranged on the outer side of the top of the cleaning cabinet 1, and the second elastic rod 72 is fixedly connected to the inner wall of the protection frame 71. The elastic contact frame 73 is fixedly connected to the end of the second elastic rod 72 away from the protection frame 71. The connecting rod 74 is fixedly connected to the bottom surface of the protection frame 71. The protection frame 71 avoids direct contact between the object and the controller 3, reducing the risk of damage to the controller 3. When the impact generates vibration, the vibration force is transmitted to the second elastic rod 72 through the protection frame 71 and absorbed by the second elastic rod 72, so that the vibration transmitted to the elastic contact frame 73 is weakened, further improving the safety of the controller 3. The elastic protection device 7 also includes a slide groove transmission member 75 and a resistance shaft The locking cam 76 is fixedly connected to the bottom end of the connecting rod 74, the abutment shaft 76 is fixedly connected to the side of the fan-shaped side plate 63 away from the side connecting plate 51, the connecting block 77 is fixedly connected to the lower surface of the connecting rod 75, the abutment shaft 78 is fixedly connected to the side of the connecting block 77 close to the side connecting plate 51, the abutment shaft 76 is slidably connected to the inner surface of the connecting rod 75, the abutment shaft 78 is slidably connected to the inner surface of the connecting rod 79, the connecting rod 74 drives the protective frame 71 to move downward to expose the controller 3, thereby turning off the controller 3, or re-adjusting the controller 3 for the next semiconductor component cleaning, thereby facilitating the staff to operate the controller 3, thereby improving the convenience of using the elastic protective device 7. Working principle: Before the cleaning cabinet 1 cleans the semiconductor components, the cleaning data can be adjusted through the controller 3. The controller 3 has many components inside and needs to avoid hard contact with objects to prevent internal damage. When the object hits the controller 3, it is blocked by the protective frame 71. The protective frame 71 avoids direct contact between the object and the controller 3, reducing the risk of damage to the controller 3. When the impact generates vibration, the vibration force is transmitted to the second elastic rod 72 through the protective frame 71 and absorbed by the second elastic rod 72, so that the vibration transmitted to the elastic contact frame 73 is weakened, further improving the safety of the controller 3. In the process of installing the cleaning cabinet 1 on the anti-collision seat 5 through the mounting seat 4, the torsion spring 2 drives the bottom plate 61 and the fan-shaped side plate 63 to rotate, and the fan-shaped side plate 63 drives the resistance shaft 76 to rotate along the circle at the hinge between the bottom plate 61 and the anti-collision seat 5. The locking cam 73 is pressed against the locking cam 74 to lock the locking cam 73. The locking cam 73 is pressed against the locking cam 73 and the locking cam 73 is pressed against the locking cam 73. The locking cam 73 is pressed against the locking cam 73 to lock the locking cam 73.

[0017] The present invention provides a semiconductor component cleaning equipment anti-collision device. There are many methods and ways to implement the technical solution. The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present invention. These improvements and modifications should also be regarded as the protection scope of the present invention. All components not specified in this embodiment can be implemented by existing technologies.

Claims

1. A semiconductor component cleaning equipment anti-collision device, comprising a cleaning cabinet (1), characterized in that: The front side of the cleaning cabinet (1) is hingedly connected with a cabinet door (2); the top surface of the cleaning cabinet (1) is fixedly connected with a controller (3); the bottom surface of the cleaning cabinet (1) is fixedly connected with a mounting seat (4); an anti-collision seat (5) is arranged below the mounting seat (4); side connecting plates (51) are fixedly connected to both sides of the anti-collision seat (5); a pressing plate (56) is fixedly connected to the lower surface of the mounting seat (4); a side of the anti-collision seat (5) close to the pressing plate (56) is fixedly connected with a resisting block (52); a side of the anti-collision seat (5) close to the pressing plate (56) is fixedly connected with a telescopic rod (53); a circumferential surface of the telescopic rod (53) is hingedly connected with a clamping plate (54); a side of the clamping plate (54) away from the side connecting plate (51) is fixedly connected with a pressing block (55); a side of the clamping plate (56) close to the clamping plate (54) is provided with a toothed clamping groove (57); A supporting device (6) is provided below the cleaning cabinet (1), and an elastic protective device (7) is provided on the periphery of the cleaning cabinet (1).

2. The anti-collision device for semiconductor element cleaning equipment according to claim 1, characterized in that: A torsion spring is provided at the hinged joint between the clamping plate (54) and the telescopic rod (53); the lower surface of the pressing block (55) and the upper surface of the abutting block (52) are in contact with each other; the clamping plate (54) and the inner surface of the toothed clamping groove (57) are in contact with each other; and the bottom end of the mounting seat (4) and the top end of the anti-collision seat (5) are in contact with each other.

3. The anti-collision device for semiconductor element cleaning equipment according to claim 2, characterized in that: The supporting device (6) comprises a bottom plate (61), a pull rod (62), a fan-shaped side plate (63), a guide rod (64), and an arc-shaped slide rail (65); the bottom plate (61) is hinged on a side of the anti-collision seat (5) away from the pressure plate (56); the pull rod (62) is fixedly connected to the inner surface of the bottom plate (61); the fan-shaped side plate (63) is fixedly connected to both sides of the bottom plate (61); the guide rod (64) is fixedly connected to a side of the fan-shaped side plate (63) close to the side connecting plate (51); and the arc-shaped slide rail (65) is fixedly connected to the top surface of the side connecting plate (51).

4. The anti-collision device for semiconductor element cleaning equipment according to claim 3, characterized in that: The supporting device (6) further comprises a trapezoidal pressing block (66), a U-shaped clamping block (67), a connecting plate (68), a first elastic rod (69), and a limiting plate (610); the trapezoidal pressing block (66) is fixedly connected to a side of the pressing plate (56) close to the side connecting plate (51); the connecting plate (68) is fixedly connected to a side of the side connecting plate (51) close to the trapezoidal pressing block (66); the first elastic rod (69) is fixedly connected to the front and rear sides of the connecting plate (68); the limiting plate (610) is fixedly connected to the front and rear sides of the connecting plate (68); and the U-shaped clamping block (67) is fixedly connected to an end of the first elastic rod (69) away from the connecting plate (68).

5. The anti-collision device for semiconductor element cleaning equipment according to claim 4, characterized in that: The U-shaped clamping block (67) and the side of the side connecting plate (51) close to the trapezoidal pressure block (66) are in contact with each other, the upper and lower sides of the U-shaped clamping block (67) and the limit plate (610) are in contact with each other, the inclined surface of the end of the trapezoidal pressure block (66) away from the anti-collision seat (5) and the inclined surface of the end of the U-shaped clamping block (67) away from the connecting plate (68) are in contact with each other, the guide rod (64) and the inner surface of the arc-shaped slide rail (65) are slidably connected, and a second torsion spring is provided at the hinge between the bottom plate (61) and the anti-collision seat (5).

6. The anti-collision device for semiconductor element cleaning equipment according to claim 5, characterized in that: The elastic protective device (7) comprises a protective frame (71), a second elastic rod (72), an elastic contact frame (73), and a connecting rod (74); the protective frame (71) is arranged on the outer side of the top of the cleaning cabinet (1); the second elastic rod (72) is fixedly connected to the inner wall of the protective frame (71); the elastic contact frame (73) is fixedly connected to an end of the second elastic rod (72) away from the protective frame (71); and the connecting rod (74) is fixedly connected to the bottom surface of the protective frame (71).

7. The anti-collision device for semiconductor element cleaning equipment according to claim 6, characterized in that: The elastic protection device (7) further comprises a slide groove transmission member (75), a resistance shaft (76), a connecting block (77), a limit shaft (78), and a slide groove limit frame (79), wherein the slide groove transmission member (75) is fixedly connected to the bottom end of the connecting rod (74), the resistance shaft (76) is fixedly connected to the side of the fan-shaped side plate (63) away from the side connecting plate (51), the connecting block (77) is fixedly connected to the lower surface of the slide groove transmission member (75), the limit shaft (78) is fixedly connected to the side of the connecting block (77) close to the side connecting plate (51), and the slide groove limit frame (79) is fixedly connected to the top end of the side connecting plate (51).

8. The anti-collision device for semiconductor element cleaning equipment according to claim 7, characterized in that: The abutment shaft (76) is slidably connected to the inner surface of the slide groove transmission member (75), and the limit shaft (78) is slidably connected to the inner surface of the slide groove limit frame (79).

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