Laser splitting system

Abstract

The invention discloses a laser splitting system, and relates to the technical field of laser optics, the laser splitting system comprises a multi-stage light splitting mechanism, a shunt reflection mechanism and a shaping mechanism, the multi-stage light splitting mechanism comprises a plurality of spectroscopes arranged at intervals along a first direction; the laser emitted in the first direction is gradually decomposed into a plurality of working light emitted in the third direction, the shunt reflection mechanism comprises a plurality of shunt reflectors arranged at intervals in the first direction, and each shunt reflector is arranged on one side of a spectroscope in the third direction so that the working light incident in the third direction can be adjusted to be emitted in the second direction; at least part of the shunt reflectors are arranged at intervals in the third direction to form multiple layers of emergent light paths, the shaping mechanism comprises a plurality of shaping lens sets arranged at intervals, the shaping lens sets are arranged on the emergent paths of the working light emitted from the shunt reflectors respectively, and the shaping lens sets are used for correcting the working light and focusing the working light. Therefore, miniaturization, light weight and systematization of a plurality of working light paths are realized.

Description

Technical Field

[0001] The present invention relates to the technical field of laser optical systems, and in particular to a laser spectroscopic system. Background Art

[0002] Laser scribing technology is a core step in the manufacturing process of solar thin-film cells. In this process, multiple stages including P1, P2, and P3 require frequent laser scribing operations on the battery substrate. As the size of the battery gradually increases, the new size brings new requirements. For example, the scribing process follows the size requirements of 1200mm*2400mm. Taking the P1 process as an example, the line width is 30um, the scribing spacing is 5mm, and 240 lines are required to be scribed based on the long side scribing. Each line is 2400mm long. If the laser head is divided into eight paths, 240 lines only need to be scribed 240 / 8=30 times. If the laser head is divided into more paths, the efficiency will be higher. At the same time, scribing multiple lines at a time has better line consistency, reduces line spacing error, and has a higher yield.

[0003] Therefore, in order to improve production efficiency and increase the yield rate, a laser scribing solution using a multi-light path system is urgently needed. In the prior art, although the multi-light path laser scribing system has been applied, its equipment structure is complex, adjustment is difficult, and it is easily disturbed by environmental factors during actual operation, and its stability is insufficient.

[0004] In the existing thin-film battery scribing process, there are two ideas for multi-light path design:

[0005] One method is to use DOE lenses for multi-channel splitting. DOE splitting lenses can split up to four channels at most. Eight channels require two sets of such lenses to be combined side by side. Similarly, 12 channels require three sets to be combined side by side. More channels require multiple DOE lenses to be combined side by side. This method can be integrated into a box. However, this method will cause greater optical path loss, and the uniformity of splitting is difficult to control, which affects the quality of marking.

[0006] Another non-integrated type is the splitter crystal splitter. With the non-integrated design, the splitter crystal splits the light and the multiple optical paths are evenly divided and arranged on the moving axis with equal width. The processing method is to move the short side of the material to adjust the battery spacing, and the optical path is flown and marked. This method improves the stability of the system to a certain extent, but it also brings the problem of large equipment size and increased cost. Summary of the invention

[0007] The main purpose of the present invention is to provide a laser spectrometer system, aiming to solve the problems of the existing spectrometer system being bulky, low in stability and difficult to control.

[0008] To achieve the above object, the laser spectrometer system proposed in the present invention comprises:

[0009] A multi-stage beam splitting mechanism, comprising a plurality of beam splitters arranged at intervals along a first direction, wherein the plurality of beam splitters are used to gradually split the laser into a plurality of working lights emitted along a third direction in a path where the laser is emitted along the first direction;

[0010] A branching reflection mechanism, comprising a plurality of branching reflection mirrors arranged at intervals along a first direction, each of the branching reflection mirrors being arranged at one side of a beam splitter along a third direction to adjust the corresponding working light incident along the third direction to be emitted along a second direction, and at least some of the branching reflection mirrors are arranged at intervals in the third direction to form a multi-layered emission light path; and

[0011] The shaping mechanism comprises a plurality of shaping mirror groups arranged at intervals, wherein the plurality of shaping mirror groups are respectively arranged on the emission path of the working light emitted from the corresponding branch reflector along the second direction, and each shaping mirror group is used for correcting and focusing the corresponding working light.

[0012] In one embodiment, the plurality of shaping lens groups include a first shaping lens group, a second shaping lens group, and a third shaping lens group;

[0013] At least one of the first shaping mirror groups and a corresponding one of the splitting reflectors form a layer of optical path structure;

[0014] At least one of the second shaping mirror groups and a corresponding one of the splitting reflectors form a two-layer optical path structure, and the two-layer optical path structure is spaced apart from the one-layer optical path structure in the first direction;

[0015] At least two of the second shaping mirror groups and the corresponding two branching reflectors form a three-layer optical path structure, and the two second shaping mirror groups of the three-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction;

[0016] At least two of the third shaping mirror groups and the corresponding two branching reflectors form a four-layer optical path structure, and the two third shaping mirror groups of the four-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction;

[0017] At least two of the third shaping mirror groups and the corresponding two branching reflectors form a five-layer optical path structure, and the two third shaping mirror groups of the five-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction;

[0018] The one-layer optical path structure, the two-layer optical path structure, the three-layer optical path structure, the four-layer optical path structure and the five-layer optical path structure are arranged in sequence in the third direction.

[0019] In one embodiment, the first shaping lens group includes a lens group first reflector, a lens group second reflector and a lens group focusing lens which are sequentially arranged along the optical path direction of the corresponding working light; wherein,

[0020] The first reflector of the mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the mirror group;

[0021] The second reflector of the first lens group is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the focusing lens of the first lens group;

[0022] The focusing lens of the lens group is movably arranged along the second direction, and is used for focusing the working light.

[0023] In one embodiment, the second shaping lens group includes a second lens group first reflector, a second lens group second reflector and a second lens group focusing lens which are sequentially arranged along the optical path direction of the corresponding working light; wherein,

[0024] The first reflector of the second mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the second mirror group;

[0025] The second reflector of the second mirror group is movably arranged along the first direction, and is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the focusing lens of the second mirror group;

[0026] The second mirror group focusing lens is movably arranged along the second direction, and is synchronously movably arranged with the second mirror of the second mirror group in the first direction, so as to focus the working light.

[0027] In one embodiment, the third shaping mirror group includes a first reflector of a three-mirror group, a second reflector of a three-mirror group, a third reflector of a three-mirror group, a focusing lens of a three-mirror group, and a fourth reflector of a three-mirror group, which are sequentially arranged along the optical path direction of the corresponding working light; wherein,

[0028] The first reflector of the three-mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the three-mirror group;

[0029] The second reflector of the three-mirror group is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the third reflector of the three-mirror group;

[0030] The third reflector of the three-mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the three-mirror group focusing lens;

[0031] The three-mirror group focusing lens is movably arranged along a first direction, and is used to focus the working light and emit the working light to the fourth reflecting mirror of the three-mirror group;

[0032] The fourth reflector of the three-mirror group is movably arranged along the first direction, and is used to adjust the working light incident along the first direction to be emitted along the second direction, and focus the working light.

[0033] In one embodiment, the laser spectrometer system further comprises:

[0034] A housing, wherein the housing has a containing cavity, and an exit port connected to the containing cavity is formed on one end of the housing along the third direction, wherein the exit port is used for emitting the plurality of working lights; and

[0035] An outgoing reflective component is disposed in the accommodating cavity and is arranged corresponding to the exit port. The outgoing reflective component includes a plurality of outgoing reflective mirrors arranged at intervals along a first direction. Each of the outgoing reflective mirrors is arranged corresponding to one of the shaping mirror groups and is used to adjust the corresponding working light to be emitted from the exit port so that the working light is focused onto the working surface.

[0036] Wherein, the multi-level light splitting mechanism, the branching reflection mechanism and the shaping mechanism are all arranged in the accommodating cavity.

[0037] In one embodiment, a plurality of the shaping lens groups all include a focusing lens, the sum of the distance between the focusing lens of any shaping lens group and the corresponding output reflector and the distance between the corresponding output reflector and the working surface is A, the sum of the distance between the focusing lens of another shaping lens group and the corresponding output reflector and the distance between the corresponding output reflector and the working surface is B, and A=B.

[0038] In one embodiment, an incident port communicating with the accommodating cavity is formed on one end of the housing in the second direction, and the incident port is used for the laser to be incident;

[0039] The laser spectrometer system further includes an incident reflector, which is disposed in the accommodating cavity and corresponding to the incident port, and is used to adjust the laser incident along the second direction to be emitted along the first direction to the multi-stage spectrometer.

[0040] In one embodiment, a carrying platform is further provided in the accommodating cavity, and the carrying platform is used to carry the shaping mechanism and the outgoing reflective component;

[0041] The laser spectrometer system further includes a driving mechanism, which is drivingly connected to the supporting platform to drive the supporting platform to move along the first direction and the second direction.

[0042] In one embodiment, the multi-stage light splitting mechanism further decomposes the laser into detection light emitted along the first direction;

[0043] The laser spectroscopic system further comprises a power detection mechanism, which is arranged on the emission path of the detection light and is used to detect the power of the laser.

[0044] In the technical solution of the present invention, the laser is first incident into the multi-level splitting mechanism along the first direction. Since the multi-level splitting mechanism includes a plurality of splitters arranged at intervals along the first direction, the laser can be incident into the plurality of splitters in sequence along the first direction, and be split at each of the splitters to obtain a plurality of working lights emitted along the third direction. Each of the working lights can be incident into the corresponding splitting reflector to adjust its own optical path from the third direction to the second direction, and then incident into the corresponding shaping mirror group to perform shaping, correction, and focusing, so that each of the working lights can be focused. Moreover, since the plurality of splitting reflectors are arranged at intervals in the third direction, and each shaping mechanism corresponds to a splitting reflector, the optical paths of the plurality of working lights can be spaced apart from each other to avoid interference between any two of the working lights. With such an arrangement, the optical paths of the plurality of working lights are miniaturized, lightweighted, and systematized, and the optical paths are highly integrated and compact, and can support the splitting design of various lasers. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying creative work.

[0046] Figure 1 A schematic diagram of the structure of an embodiment of a laser spectrometer system provided by the present invention;

[0047] Figure 2 for Figure 1 A schematic diagram of the structure of the multi-level splitting mechanism and the splitting reflection mechanism;

[0048] Figure 3 for Figure 1 A schematic diagram of the structure of the first optical path structure;

[0049] Figure 4 for Figure 1 A schematic diagram of the structure of the second optical path structure;

[0050] Figure 5 for Figure 1A schematic diagram of the structure of the third optical path structure;

[0051] Figure 6 for Figure 1 A schematic diagram of the structure of the fourth optical path structure;

[0052] Figure 7 for Figure 1 A schematic diagram of the structure of the fifth optical path structure;

[0053] Figure 8 for Figure 1 Structural diagram of the linear drive structure;

[0054] Fig. 9 for Figure 1 A schematic diagram of the structure of the middle shell;

[0055] Fig.10 A side view schematic diagram of an embodiment of a laser spectrometer system provided by the present invention;

[0056] Fig.11 A schematic top view of an embodiment of a laser spectrometer system provided by the present invention.

[0057] Description of Figure Numbers:

[0058] 100. Laser spectrometer system; 1. Multi-stage spectrometer; 11. Spectrometer; 12. First spectrometer; 13. Second spectrometer; 14. Third spectrometer; 15. Fourth spectrometer; 16. Fifth spectrometer; 17. Sixth spectrometer; 18. Seventh spectrometer; 19. Eighth spectrometer; 2. Splitting and reflecting mechanism; 21. Splitting and reflecting mirror; 3. Shaping mechanism; 31. Shaping mirror group; 32. First shaping mirror group; 321. First reflecting mirror of mirror group one; 322. Second reflecting mirror of mirror group one; 323. Focusing lens of mirror group one; 33. Second shaping mirror group; 331. First reflecting mirror of mirror group two; 332. Second reflecting mirror of mirror group two; 333. Focusing lens of mirror group two; 34. Third shaping mirror group; 341. First reflecting mirror of mirror group three Mirror; 342, the second reflector of the three-mirror group; 343, the third reflector of the three-mirror group; 344, the focusing lens of the three-mirror group; 345, the fourth reflector of the three-mirror group; 4, shell; 41, exit port; 42, entrance port; 43, support platform; 5, exit reflective assembly; 51, exit reflector; 52, the first exit reflector; 53, the second exit reflector; 54, the third exit reflector; 55, the fourth exit reflector; 56, the fifth exit reflector; 57, the sixth exit reflector; 58, the seventh exit reflector; 59, the eighth exit reflector; 6, entrance reflector; 7, driving mechanism; 8, power detection mechanism; 9, linear driving structure; 91, base; 92, guide rail; 93, slider; 94, grating ruler; 95, reader.

[0059] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0060] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0061] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0062] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of technical features indicated. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of the features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or solutions that satisfy both A and B. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0063] The present invention provides a laser spectrometer system, which aims to solve the problems of the existing spectrometer system being bulky, low in stability and difficult to control.

[0064] See also Figure 1 , Fig.10 and Fig.11In one embodiment of the present invention, the laser spectrometer system 100 includes a multi-stage spectrometer mechanism 1, a branching reflection mechanism 2 and a shaping mechanism 3. The multi-stage spectrometer mechanism 1 includes a plurality of spectrometers 11 arranged at intervals along a first direction. The plurality of spectrometers 11 are used to decompose the laser step by step into a plurality of working lights emitted along a third direction in the path of the laser being emitted along the first direction. The branching reflection mechanism 2 includes a plurality of branching reflection mirrors 21 arranged at intervals along the first direction. Each of the branching reflection mirrors 21 is correspondingly arranged on one side of the spectrometer 11 along the third direction to adjust the corresponding working light incident along the third direction to be emitted along the second direction, and at least part of the branching reflection mirrors 21 are arranged at intervals in the third direction to form a multi-layered emission light path. The shaping mechanism 3 includes a plurality of shaping mirror groups 31 arranged at intervals. The plurality of shaping mirror groups 31 are respectively arranged on the emission path of the working light emitted from the corresponding branching reflection mirror 21. Each shaping mirror group 31 is used to correct the corresponding working light and focus it.

[0065] In the technical solution of the present invention, the laser is first emitted into the multi-level spectrometer 1 along a first direction. Since the multi-level spectrometer 1 includes a plurality of spectrometers 11 arranged at intervals along the first direction, the laser can be emitted into the plurality of spectrometers 11 in sequence along the first direction, and be split at each spectrometer 11 to obtain a plurality of working lights emitted along a third direction. Each of the working lights can be emitted into the corresponding branching reflector 21 to adjust its own optical path from the third direction to the second direction, and then emitted into the corresponding shaping mirror group 31 to perform shaping, correction, and focusing, so that each of the working lights can be focused. Moreover, since the plurality of branching reflectors 21 are arranged at intervals in the third direction, and each of the shaping mechanisms 3 corresponds to one branching reflector 21, the optical paths of the plurality of working lights can be spaced apart from each other to avoid interference between any two of the working lights. Such an arrangement realizes miniaturization, lightness, systematization, high integration of optical paths, compact size, and the ability to support the spectroscopic design of multiple lasers.

[0066] It should be further explained that, since the plurality of splitting reflectors 21 are arranged at intervals in the third direction, and each shaping mechanism 3 is arranged corresponding to one splitting reflector 21, therefore, in order to further ensure the independence of the optical paths of the plurality of working lights, in the present invention, at least part of the shaping mirror groups 31 also need to be arranged at intervals in the third direction, wherein, since the plurality of splitting reflectors 21 are also arranged at intervals in the first direction, the plurality of shaping mirror groups 31 at the same height in the third direction are arranged at intervals in the first direction. In this way, it can be ensured that each shaping mirror group 31 will not interfere with the working light corresponding to any other shaping mirror group 31 when shaping, correcting, and focusing the corresponding working light, thereby ensuring the normal operation of the laser spectroscopic system 100.

[0067] It is understandable that in order to ensure the miniaturization of the laser spectrometer system 100, the multiple shaping lens groups 31 have multiple different structural forms. In the present invention, the multiple shaping lens groups 31 include a first shaping lens group 32, a second shaping lens group 33 and a third shaping lens group 34.

[0068] See also Figure 3 In one embodiment of the present invention, the first shaping lens group 32 includes a lens group first reflector 321, a lens group second reflector 322 and a lens group focusing lens 323 which are sequentially arranged along the optical path direction of the corresponding working light. The lens group first reflector 321 is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the lens group second reflector 322. The lens group second reflector 322 is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the lens group focusing lens 323. The lens group focusing lens 323 is movably arranged along the second direction to focus the working light onto the working surface. In this embodiment, the working light first enters the first reflector 321 of the mirror group to be reflected at the first reflector 321 of the mirror group and emitted along the first direction, and then enters the second reflector 322 of the mirror group to be reflected again at the second reflector 322 of the mirror group and emitted along the second direction, and finally enters the focusing lens 323 of the mirror group, and the focusing lens 323 of the mirror group focuses the working light onto the working surface.

[0069] It can be understood that the focusing lens 323 of the lens group is movably arranged in the second direction. Such an arrangement can adaptively adjust the focal position of the corresponding working light according to the specific position of the working surface to ensure that the working light can be focused on the working surface.

[0070] Specifically, the present invention does not limit the specific activity form of the lens group focusing lens 323. Fig. 9 In an embodiment of the present invention, the laser spectrometer system 100 also includes a linear drive structure 9, which includes a base 91, a guide rail 92 and a slider 93. The guide rail 92 extends along a direction and is arranged on the base 91. The slider 93 slides along a direction on the guide rail 92. The slider 93 is driven to slide by a linear drive motor.

[0071] In this embodiment, the linear drive structure is extended along the second direction, and the lens group focusing lens 323 is arranged on the slider 93. When the lens group focusing lens 323 needs to adjust the focal position of the corresponding working light, the slider 93 moves along the second direction to drive the lens group focusing lens 323 to move along the second direction to adjust its position in the second direction.

[0072] See also Figure 4 In another embodiment of the present invention, the second shaping lens group 33 includes a second-mirror group first reflector 331, a second-mirror group second reflector 332 and a second-mirror group focusing lens 333 which are sequentially arranged along the optical path direction of the corresponding working light, the second-mirror group first reflector 331 is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second-mirror group second reflector 332, the second-mirror group second reflector 332 is movably arranged along the first direction, and is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the second-mirror group focusing lens 333, the second-mirror group focusing lens 333 is movably arranged along the second direction, and is synchronously movably arranged with the second-mirror group second reflector 332 in the first direction, and is used to focus the working light onto the working surface. In this embodiment, the working light firstly enters the second mirror group first reflector 331 to be reflected at the second mirror group first reflector 331 and emitted in a first direction, and then enters the second mirror group second reflector 332 to be reflected again at the second mirror group second reflector 332 and emitted in a second direction, and finally enters the second mirror group focusing lens 333, and the second mirror group focusing lens 333 focuses the working light onto the working surface.

[0073] It can be understood that the second lens group focusing lens 333 is also movably arranged in the second direction, so that the second shaping lens group 33 can also adjust the focal position of the corresponding working light according to the specific position of the working surface to ensure that the working light can be focused on the working surface.

[0074] It is also necessary to further explain that, in the second shaping lens group 33, the second reflector 332 of the second lens group is movably arranged in the first direction, so that the emission position of the working light emitted from the second shaping lens group 33 in the first direction can be further adjusted, so that when any two working lights are focused onto the working surface, the distance between the two working lights in the first direction can be adjusted.

[0075] Of course, the present invention does not limit the specific activity forms of the second mirror group 332 and the second mirror group focusing lens 333. In one embodiment of the present invention, the linear drive structure 9 is provided with two, including a first linear drive structure and a second linear drive structure. The first linear drive structure is extended along the first direction, the base 91 of the second linear drive structure is provided on the slider 93 of the first linear drive structure, and the second linear drive structure is extended along the second direction. The second mirror group 332 is provided on the base 91 of the second linear drive structure, and the second mirror group focusing lens is provided on the slider 93 of the second linear drive structure. With such an arrangement, when the second linear drive structure needs to be adjusted, When the position of the working light emitted by the shaping lens group 33 in the first direction is adjusted to achieve the adjustment of the spacing between the two working lights in the first direction, the slider 93 of the first linear driving structure moves to drive the second mirror group 332 and the second mirror group focusing lens 333 to move along the first direction, thereby adjusting the positions of the second mirror group 332 and the second mirror group focusing lens 333 in the first direction; and when the second mirror group focusing lens 333 needs to adjust the focal position of the corresponding working light, the slider 93 of the second linear driving structure moves along the second direction to drive the second mirror group focusing lens 333 to move along the second direction to adjust its position in the second direction.

[0076] See also Figure 6In another embodiment of the present invention, the third shaping mirror group 34 includes a three-mirror group first reflector 341, a three-mirror group second reflector 342, a three-mirror group third reflector 343, a three-mirror group focusing lens 344 and a three-mirror group fourth reflector 345, which are sequentially arranged along the optical path direction of the corresponding working light. The three-mirror group first reflector 341 is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the three-mirror group second reflector 342, and the three-mirror group second reflector 342 is used to correct and adjust the working light incident along the first direction to be emitted along the first direction. The working light is emitted in the second direction to the third reflector 343 of the three-mirror group. The third reflector 343 of the three-mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the focusing lens 344 of the three-mirror group. The focusing lens 344 of the three-mirror group is movably arranged along the first direction, and is used to focus the working light and emit the working light to the fourth reflector 345 of the three-mirror group. The fourth reflector 345 of the three-mirror group is movably arranged along the first direction, and is used to adjust the working light incident along the first direction to be emitted along the second direction, and focus it onto the working surface. In this embodiment, the working light firstly strikes the first reflector 341 of the three-mirror group to be reflected at the first reflector 341 of the three-mirror group and emitted in the first direction, and then strikes the second reflector 342 of the three-mirror group to be reflected again at the second reflector 342 of the three-mirror group and emitted in the second direction, and then strikes the third reflector 343 of the three-mirror group to be reflected for the third time at the third reflector 343 of the three-mirror group and emitted in the first direction to the focusing lens 344 of the three-mirror group, and the focusing lens 344 of the three-mirror group can focus the working light and make the working light continue to be emitted in the first direction until it strikes the fourth reflector 345 of the three-mirror group and is reflected for the last time at the fourth reflector 345 of the three-mirror group to be emitted in the second direction and finally focused on the working surface.

[0077] It can be understood that the three-lens group focusing lens 344 is also movably arranged in the third direction, so that the third shaping lens group 34 can also adjust the focal position of the corresponding working light according to the specific position of the working surface to ensure that the working light can be focused on the working surface.

[0078] It should be noted that the setting of the fourth reflector 345 of the three-lens group can further adjust the emission direction of the working light, so that the emission direction of the working light incident on the third shaping lens group 34 can be the same as the emission direction of the working light incident on the first shaping lens group 32 or the second shaping lens group 33, thereby ensuring that the first shaping lens group 32, the second shaping lens group 33 and the third shaping lens group 34 can all focus the corresponding working light onto the same working surface, so as to complete synchronous scribing.

[0079] It is also necessary to further explain that, in the third shaping lens group 34, the fourth reflector 345 of the three-mirror group is movably arranged in the first direction, so that the emission position of the working light emitted from the third shaping lens group 34 in the first direction can be further adjusted, so that when any two of the working lights are focused onto the working surface, the distance between the two working lights in the first direction can be adjusted.

[0080] Similarly, the present invention does not limit the specific activity forms of the three-mirror group fourth reflector 345 and the three-mirror group focusing lens 344. In an embodiment of the present invention, the linear drive structure 9 is provided with two, including a third linear drive structure and a fourth linear drive structure. The third linear drive structure and the fourth linear drive structure are both extended along a first direction. The fourth linear drive structure is provided on the slider 93 of the third linear drive structure. The three-mirror group fourth reflector 345 is provided on the base 91 of the fourth linear drive structure. The three-mirror group focusing lens 344 is provided on the slider 93 of the fourth linear drive structure. In this way, when the third shaping mirror group 3 needs to be adjusted, When the position of the working light emitted by the three-mirror group 345 in the first direction is adjusted to realize the adjustment of the distance between the two working lights in the first direction, the slider 93 of the third linear driving structure moves to drive the third mirror group fourth reflecting mirror 345 and the third mirror group focusing lens 344 to move along the first direction, thereby adjusting the positions of the third mirror group fourth reflecting mirror 345 and the third mirror group focusing lens 344 in the first direction; and when the third mirror group focusing lens 344 needs to adjust the focal position of the corresponding working light, the slider 93 of the fourth linear driving structure moves along the first direction, thereby only driving the third mirror group focusing lens 344 to move along the first direction to adjust its position in the first direction.

[0081] It should also be noted that, in a further embodiment of the present invention, in order to improve the accuracy of the activities of multiple reflectors or focusing lenses, please refer to Fig. 9 In this embodiment, each of the linear drive structures further includes a grating ruler 94 and a reader 95. The grating ruler 94 is disposed on the base 91, and the reader 95 is disposed on the slider 93. With such a configuration, during the movement of the slider 93 along the first direction, the reading of the reader 95 will continue to change. Therefore, by determining the reading on the reader 95, the precise moving distance of the slider 93 can be determined to drive the accuracy of the movement of multiple reflectors or focusing lenses.

[0082] Specifically, see Figure 3In the first embodiment of the present invention, at least one of the first shaping mirror groups 32 and a corresponding one of the branching reflectors 21 form a layer of optical path structure, and the layer of optical path structure is configured so as to focus at least one of the working lights onto the working surface.

[0083] See also Figure 4 In the second embodiment of the present invention, at least one of the second shaping mirror groups 33 and a corresponding one of the branching reflectors 21 form a two-layer optical path structure, and the two-layer optical path structure is spaced apart from the one-layer optical path structure in the first direction and the third direction. In this way, the two-layer optical path structure can be spaced apart from the one-layer optical path structure in the first direction and the third direction to avoid mutual interference between the optical paths in the two-layer optical path structure and the one-layer optical path structure. At the same time, the second shaping mirror group 33 is adopted, and the structure of the second shaping mirror group 33 can be adapted to the structure of the first shaping mirror group 32, thereby reducing the installation space required for the two-layer optical path structure. In addition, since the second reflector 332 of the second mirror group is movably arranged in the first direction, the spacing adjustment between the working light corresponding to the one-layer optical path structure and the two-layer optical path structure can be achieved.

[0084] See also Figure 5 In the third embodiment of the present invention, at least two of the second shaping mirror groups 33 and the corresponding two branching reflectors 21 form a three-layer optical path structure, and the two second shaping mirror groups 33 of the three-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction. In this way, the three-layer optical path structure is also separated from the one-layer optical path structure in the first direction and the third direction to avoid mutual interference between the three-layer optical path structure and the optical path in the one-layer optical path structure. At the same time, the second shaping mirror group 33 is also used to further adapt the structure of the first shaping mirror group 32 to reduce the installation space required for the three-layer optical path structure, and the second reflector 332 of the second mirror group is movably arranged in the first direction to make the spacing of the multiple working lights of the three-layer optical path structure in the first direction adjustable.

[0085] It should be noted that, in order to avoid mutual interference between the light paths in the three-layer light path structure and the two-layer light path structure, in this embodiment, the three-layer light path structure is arranged on a side of the two-layer light path structure away from the one-layer light path structure in the third direction.

[0086] See also Figure 6In the fourth embodiment of the present invention, at least two of the third shaping mirror groups 34 and the corresponding two branching reflectors 21 form a four-layer optical path structure, and the two third shaping mirror groups 34 of the four-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction. Similarly, such an arrangement can also achieve that the four-layer optical path structure is spaced from the one-layer optical path structure in the first direction and the third direction, so as to avoid mutual interference between the optical paths of the four-layer optical path structure and the one-layer optical path structure. At this time, the third shaping mirror group 34 is used, and the third shaping mirror group 34 is spatially adapted to the second shaping mirror group 33, so as to further reduce the installation space required for the four-layer optical path structure. In addition, since the fourth reflector 345 of the three-mirror group is movably arranged in the first direction, the spacing of the multiple working lights of the four-layer optical path structure in the first direction can also be adjusted.

[0087] It should also be noted that, in this embodiment, in order to prevent the four-layer optical path structure from optical path interference with the two-layer optical path structure and the three-layer optical path structure, the four-layer optical path structure is arranged on the side of the three-layer optical path structure away from the two-layer optical path structure in the third direction.

[0088] See also Figure 7 In the fifth embodiment of the present invention, at least two of the third shaping mirror groups 34 and the corresponding two branching reflectors 21 form a five-layer optical path structure, and the two third shaping mirror groups 34 of the five-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction. Similarly, such an arrangement can also achieve that the five-layer optical path structure is spaced from the one-layer optical path structure in the first direction and the third direction, so as to avoid mutual interference between the optical paths of the five-layer optical path structure and the one-layer optical path structure. At this time, the third shaping mirror group 34 is used, and the third shaping mirror group 34 is spatially adapted to the second shaping mirror group 33, so as to further reduce the installation space required for the five-layer optical path structure. In addition, since the fourth reflector 345 of the three-mirror group is movably arranged in the first direction, the spacing of the multiple working lights of the five-layer optical path structure in the first direction can also be adjusted.

[0089] Of course, in order to avoid optical path interference between the five-layer optical path structure and any of the four-layer optical path structure, the three-layer optical path structure, and the two-layer optical path structure, in this embodiment, the five-layer optical path structure is arranged on the side of the four-layer optical path structure away from the three-layer optical path structure in the third direction.

[0090] It should be further explained that the present invention does not limit the positional relationship in the second direction of each shaping lens group 31 in the one-layer optical path structure, the two-layer optical path structure, the three-layer optical path structure, the four-layer optical path structure and the five-layer optical path structure. In actual setting, it can be selected according to needs.

[0091] Furthermore, when laser is used for scribing, the power of the laser needs to be strictly set. Therefore, in one embodiment of the present invention, the multi-level spectroscopic mechanism 1 also decomposes the laser into detection light emitted along the first direction, and the laser spectroscopic system 100 also includes a power detection mechanism 8, which is arranged on the emission path of the detection light and is used to detect the power of the laser. With such arrangement, the power detection mechanism 8 can always detect the power of the detection light emitted along the first direction, so that the power of multiple working lights can be calculated, thereby achieving the purpose of real-time detection of the power of the laser for scribing.

[0092] For further information, see Fig. 9 In order to prevent the multiple lenses in the multi-level light splitting mechanism 1, the branching reflection mechanism 2 and the shaping mechanism 3 from being affected by the environment, thereby causing the optical path of the working light to change, be blocked or the working light power to change, in one embodiment of the present invention, the laser light splitting system 100 also includes a housing 4, the housing 4 has a containing cavity, and the multi-level light splitting mechanism 1, the branching reflection mechanism 2 and the shaping mechanism 3 are all arranged in the containing cavity. In this way, the multi-level light splitting mechanism 1, the branching reflection mechanism 2 and the shaping mechanism 3 can be protected, thereby ensuring the normal operation of the laser light splitting system 100.

[0093] However, in order to achieve the miniaturization of the laser spectrometry system 100, the laser for emitting the laser should be arranged on the outside of the shell 4. Therefore, in order to enable the laser light of the laser to be smoothly emitted to the multi-level spectrometry mechanism 1 for spectrometry, in the present invention, the shell 4 is also provided with an incident port 42 connected to the accommodating cavity, and the incident port 42 is used for the laser to be emitted.

[0094] It can be understood that the present invention does not limit the specific setting position of the incident port 42. In one embodiment of the present invention, the incident port 42 is arranged at one end of the shell 4 in the first direction, and the incident port 42 is arranged to coincide with the projection of the multi-level splitting mechanism 1 in the first direction. In this way, it is only necessary to align the emitting end of the laser with the incident port 42 to ensure that the laser can smoothly pass through the incident port 42 and be emitted to the multi-level splitting mechanism 1.

[0095] In another embodiment of the present invention, the incident port 42 is disposed at one end of the housing 4 in the second direction. To ensure that the laser can pass through the incident port 42 and be emitted to the multi-level light splitting mechanism 1, in this embodiment, the laser light splitting system 100 further includes an incident reflector 6, which is disposed in the accommodating cavity and corresponding to the incident port 42. The incident reflector 6 is used to adjust the laser incident in the second direction to be emitted in the first direction to the multi-level light splitting mechanism 1. In this arrangement, the laser first enters the accommodating cavity from the incident port 42, and then is emitted to the incident reflector 6, so as to be reflected at the incident reflector 6, so as to be emitted in the first direction to the multi-level light splitting mechanism 1, so as to perform step-by-step light splitting.

[0096] Of course, in other embodiments of the present invention, the incident port 42 may also be provided at one end of the housing 4 in the third direction, and accordingly, the incident reflector 6 is used to adjust the laser incident along the third direction to be emitted along the first direction to the multi-stage light splitting mechanism 1. In actual settings, it can be selected according to needs.

[0097] It should be noted that in order to prevent external environmental factors from entering the accommodating cavity from the incident port 42 and affecting the normal operation of the laser spectrometer system 100, in a further embodiment of the present invention, the incident port 42 is also covered with a light-transmitting portion, which can allow the laser to pass through while ensuring the sealing of the accommodating cavity.

[0098] In addition, it is also necessary to enable the multiple working lights shaped by the shaping mechanism 3 to be smoothly emitted from the accommodating cavity and focused onto the working surface. Therefore, in the present invention, an exit port 41 is also provided on the shell 4, and the exit port 41 is used for emitting the multiple working lights.

[0099] Similarly, the present invention does not limit the specific setting position of the exit port 41. In one embodiment of the present invention, the exit port 41 is arranged at one end of the shell 4 in the second direction, and the exit port 41 is arranged to coincide with the projection of the shaping mechanism 3 in the second direction. In this way, the multiple working lights shaped and focused by the shaping mechanism 3 can smoothly pass through the exit port 41 to be focused onto the working surface.

[0100] In another embodiment of the present invention, the exit port 41 is provided at one end of the housing 4 along the third direction. Correspondingly, in order to ensure that the multiple working lights shaped and focused by the shaping mechanism 3 can pass through the exit port 41 smoothly, the laser spectroscopic system 100 further includes an exit reflector assembly 5, which is provided in the accommodating cavity and is provided corresponding to the exit port 41. The exit reflector assembly 5 includes multiple exit reflectors 51 spaced apart along the first direction, each of which corresponds to one of the shaping mirror groups 31, and is used to adjust the corresponding working light to be emitted from the exit port 41, so that the working light is focused on the working surface. In this way, the multiple shaping mirror groups 31 of the shaping mechanism 3 shape the corresponding working light to the corresponding exit reflector 51, so that the working light is reflected at the corresponding exit reflector 51, and is emitted to the working surface along the third direction and focused on the working surface.

[0101] Of course, in other embodiments of the present invention, the emission port 41 may also be provided at one end of the housing 4 in the first direction, and accordingly, the emission reflective component 5 is used to adjust the working light incident along the first direction to be emitted to the working surface along the second direction. In actual setting, it can be selected according to the needs.

[0102] It should also be noted that in order to prevent external environmental factors from entering the accommodating cavity from the exit port 41 and affecting the normal operation of the laser spectrometer system 100, in a further embodiment of the present invention, the exit port 41 is also covered with the light-transmitting portion, which can allow the working light to pass through while ensuring the sealing of the accommodating cavity.

[0103] Specifically, in the present invention, the incident port 42 is disposed through one end of the shell 4 in the second direction, and the incident port 41 is disposed through one end of the shell 4 in the third direction.

[0104] Also, see Figure 1 In the present invention, the laser spectrometer system 100 further includes a bearing structure, on which a plurality of bearing seats are arranged at intervals along a first direction, and the plurality of bearing seats can move along the first direction, each of the bearing seats is used to carry an exit reflector 51, and each of the bearing seats is used to drive the corresponding exit reflector 51 to move along the first direction, so that the exit reflector 51 can move together with the corresponding shaping lens group 31 in the first direction, so as to ensure that the working light emitted from the corresponding shaping lens group 31 can be set on the exit reflector 51 to be reflected and focused to the working surface.

[0105] Furthermore, since the multiple working lights after shaping and focusing by the multiple shaping lens groups 31 need to be focused on the same working surface, and when the position of the working surface changes, the positions of the focusing lenses of the multiple shaping lens groups 31 need to change together, in order to ensure that after the positions of the focusing lenses of the multiple shaping lens groups 31 change, the multiple working lights can still be focused on the same working surface, in the present invention, the sum of the spacing between the focusing lens of any shaping lens group 31 and the corresponding exit reflector 51 and the spacing between the corresponding exit reflector 51 and the working surface is A, and the sum of the spacing between the focusing lens of another shaping lens group 31 and the corresponding exit reflector 51 and the spacing between the corresponding exit reflector 51 and the working surface is B, and A=B. In this way, the spacing between the focusing lenses of any two shaping lens groups 31 and the working surface is always equal, so as to ensure that each shaping lens group 31 can focus the corresponding working light onto the working surface.

[0106] It should also be noted that the laser scribing work usually needs to be performed multiple times. In order to ensure that the paths of multiple laser scribings coincide with each other and to ensure the quality of laser scribing, in one embodiment of the present invention, a carrier 43 is further provided in the accommodating cavity, and the carrier 43 is used to carry the shaping mechanism 3 and the outgoing reflective component 5. The laser spectrometer system 100 also includes a driving mechanism 7, and the driving mechanism 7 is connected to the carrier 43 to drive the carrier 43 to move along the first direction and the second direction. In this way, when a laser scribing work is completed and a second laser scribing work is started, the driving mechanism 7 can drive the carrier 43 to move along the first direction and the second direction, thereby focusing the multiple working lights on the working surface, so that the trajectory of laser scribing can coincide with the scribing trajectory of a laser scribing work, thereby ensuring the stability of the scribing path, improving the repeatability of multiple scribing work, and improving the quality of laser scribing.

[0107] In summary, please refer to Figure 2-7 In a specific embodiment of the present invention, eight beam splitters 11 are provided, and eight shaping mirror groups 31 and path splitting reflectors 21 are also provided, and are arranged one-to-one corresponding to the eight beam splitters 11. The eight beam splitters 11 include a first beam splitter 12, a second beam splitter 13, a third beam splitter 14, a fourth beam splitter 15, a fifth beam splitter 16, a sixth beam splitter 17, a seventh beam splitter 18 and an eighth beam splitter 19, which are arranged in sequence along the incident direction of the laser. The eight shaping mirror groups 31 include one first shaping mirror group 32, three second shaping mirror groups 33 and four third shaping mirror groups 34.

[0108] In this embodiment, the first shaping lens group 32 and the corresponding splitting reflector 21 form a layer of optical path structure, and the layer of optical path structure is arranged corresponding to the fourth beam splitter 15, that is, the working light emitted from the fourth beam splitter 15 can be projected to the layer of optical path structure.

[0109] One of the second shaping mirror groups 33 and the corresponding splitting reflector 21 form the two-layer optical path structure, and the two-layer optical path structure is arranged corresponding to the fifth beam splitter 16, that is, the working light emitted from the fifth beam splitter 16 can be projected to the two-layer optical path structure.

[0110] The remaining two second shaping mirror groups 33 and the corresponding two branching reflectors 21 constitute the three-layer optical path structure, and the three-layer optical path structure is arranged corresponding to the third beam splitter 14 and the seventh beam splitter 18, that is, the working light emitted from the third beam splitter 14 and the seventh beam splitter 18 can be respectively projected to the two branching reflectors 21 and the second shaping mirror group 33 of the three-layer optical path structure.

[0111] The two third shaping mirror groups 34 and the corresponding two branching reflectors 21 constitute the four-layer optical path structure, and the four-layer optical path structure is arranged corresponding to the first beam splitter 12 and the sixth beam splitter 17, that is, the working light emitted from the first beam splitter 12 and the sixth beam splitter 17 can be respectively projected to the two branching reflectors 21 and the third shaping mirror group 34 of the four-layer optical path structure.

[0112] The remaining two third shaping mirror groups 34 and the corresponding two branching reflectors 21 constitute the five-layer optical path structure, and the five-layer optical path structure is arranged corresponding to the second beam splitter 13 and the eighth beam splitter 19, that is, the working light emitted from the second beam splitter 13 and the eighth beam splitter 19 can be respectively set at the two branching reflectors 21 and the third shaping mirror group 34 of the five-layer optical path structure.

[0113] In addition, in the present embodiment, eight output reflectors 51 are also provided, and the eight output reflectors 51 include a first output reflector 52, a second output reflector 53, a third output reflector 54, a fourth output reflector 55, a fifth output reflector 56, a sixth output reflector 57, a seventh output reflector 58 and an eighth output reflector 59 which are arranged in sequence along the incident direction of the laser.

[0114] The working light emitted by the one-layer optical path structure is emitted to the third exit reflector 54 to be reflected and focused on the working surface; the working light emitted by the two-layer optical path structure is set on the fifth exit reflector 56 to be reflected and focused on the working surface; the working light emitted by the three-layer optical path structure is emitted to the first exit reflector 52 and the seventh exit reflector 58 to be reflected and focused on the working surface; the working light emitted by the four-layer optical path structure is emitted to the second exit reflector 53 and the sixth exit reflector 57 to be reflected and focused on the working surface; the working light emitted by the five-layer optical path structure is emitted to the fourth exit reflector 55 and the eighth exit reflector 59 to be reflected and focused on the working surface.

[0115] The above description is only an exemplary embodiment of the present invention, and does not limit the patent scope of the present invention. All equivalent structural changes made by using the contents of the present invention specification and drawings under the technical concept of the present invention, or directly / indirectly applied in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A laser spectrometer system, characterized in that: The laser spectrometer system comprises: A multi-stage beam splitting mechanism, comprising a plurality of beam splitters arranged at intervals along a first direction, wherein the plurality of beam splitters are used to gradually split the laser into a plurality of working lights emitted along a third direction in a path where the laser is emitted along the first direction; A branching reflection mechanism, comprising a plurality of branching reflection mirrors arranged at intervals along a first direction, each of the branching reflection mirrors being arranged at one side of a beam splitter along a third direction to adjust the corresponding working light incident along the third direction to be emitted along a second direction, and at least some of the branching reflection mirrors are arranged at intervals in the third direction to form a multi-layered emission light path; and The shaping mechanism comprises a plurality of shaping mirror groups arranged at intervals, wherein the plurality of shaping mirror groups are respectively arranged on the emission path of the working light emitted from the corresponding branch reflector along the second direction, and each shaping mirror group is used for correcting and focusing the corresponding working light.

2. The laser spectrometer system according to claim 1, characterized in that: The plurality of shaping lens groups include a first shaping lens group, a second shaping lens group and a third shaping lens group; At least one of the first shaping mirror groups and a corresponding one of the splitting reflectors form a layer of optical path structure; At least one of the second shaping mirror groups and a corresponding one of the splitting reflectors form a two-layer optical path structure, and the two-layer optical path structure is spaced apart from the one-layer optical path structure in the first direction; At least two of the second shaping mirror groups and the corresponding two branching reflectors form a three-layer optical path structure, and the two second shaping mirror groups of the three-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction; At least two of the third shaping mirror groups and the corresponding two branching reflectors form a four-layer optical path structure, and the two third shaping mirror groups of the four-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction; At least two of the third shaping mirror groups and the corresponding two branching reflectors form a five-layer optical path structure, and the two third shaping mirror groups of the five-layer optical path structure are arranged on both sides of the one-layer optical path structure in the first direction; The one-layer optical path structure, the two-layer optical path structure, the three-layer optical path structure, the four-layer optical path structure and the five-layer optical path structure are arranged in sequence in the third direction.

3. The laser spectrometer system according to claim 2, characterized in that: The first shaping lens group includes a lens group first reflector, a lens group second reflector and a lens group focusing lens which are sequentially arranged along the optical path direction of the corresponding working light; wherein, The first reflector of the mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the mirror group; The second reflector of the first lens group is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the focusing lens of the first lens group; The focusing lens of the lens group is movably arranged along the second direction, and is used for focusing the working light.

4. The laser spectrometer system according to claim 2, wherein: The second shaping lens group includes a second lens group first reflector, a second lens group second reflector and a second lens group focusing lens which are sequentially arranged along the optical path direction of the corresponding working light; wherein, The first reflector of the second mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the second mirror group; The second reflector of the second mirror group is movably arranged along the first direction, and is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the focusing lens of the second mirror group; The second mirror group focusing lens is movably arranged along the second direction, and is synchronously movably arranged with the second mirror of the second mirror group in the first direction, so as to focus the working light.

5. The laser spectrometer system according to claim 2, characterized in that: The third shaping mirror group includes a first reflector of three mirror groups, a second reflector of three mirror groups, a third reflector of three mirror groups, a focusing lens of three mirror groups and a fourth reflector of three mirror groups, which are arranged in sequence along the optical path direction of the corresponding working light; wherein, The first reflector of the three-mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the second reflector of the three-mirror group; The second reflector of the three-mirror group is used to correct and adjust the working light incident along the first direction to be emitted along the second direction to the third reflector of the three-mirror group; The third reflector of the three-mirror group is used to correct and adjust the working light incident along the second direction to be emitted along the first direction to the three-mirror group focusing lens; The three-mirror group focusing lens is movably arranged along a first direction, and is used to focus the working light and emit the working light to the fourth reflecting mirror of the three-mirror group; The fourth reflector of the three-mirror group is movably arranged along the first direction, and is used to adjust the working light incident along the first direction to be emitted along the second direction, and focus the working light.

6. The laser spectrometer system according to claim 1, wherein: The laser spectrometer system further comprises: A housing, wherein the housing has a containing cavity, and an exit port connected to the containing cavity is formed on one end of the housing along the third direction, wherein the exit port is used for emitting the plurality of working lights; and An outgoing reflective component is disposed in the accommodating cavity and is arranged corresponding to the exit port. The outgoing reflective component includes a plurality of outgoing reflective mirrors arranged at intervals along a first direction. Each of the outgoing reflective mirrors is arranged corresponding to one of the shaping mirror groups and is used to adjust the corresponding working light to be emitted from the exit port so that the working light is focused onto the working surface. Wherein, the multi-level light splitting mechanism, the branching reflection mechanism and the shaping mechanism are all arranged in the accommodating cavity.

7. The laser spectrometer system according to claim 6, characterized in that: Multiple shaping lens groups all include focusing lenses, the sum of the distance between the focusing lens of any shaping lens group and the corresponding output reflector and the distance between the corresponding output reflector and the working surface is A, the sum of the distance between the focusing lens of another shaping lens group and the corresponding output reflector and the distance between the corresponding output reflector and the working surface is B, A=B.

8. The laser spectrometer system according to claim 6, characterized in that: An incident port connected to the accommodating cavity is formed on one end of the housing in the second direction, and the incident port is used for the laser to be incident; The laser spectrometer system further includes an incident reflector, which is disposed in the accommodating cavity and corresponding to the incident port, and is used to adjust the laser incident along the second direction to be emitted along the first direction to the multi-stage spectrometer.

9. The laser spectrometer system according to claim 6, wherein: A bearing platform is also provided in the accommodating cavity, and the bearing platform is used to carry the shaping mechanism and the outgoing reflective component; The laser spectrometer system further includes a driving mechanism, which is drivingly connected to the supporting platform to drive the supporting platform to move along the first direction and the second direction.

10. The laser spectrometer system according to claim 1, wherein: The multi-stage light splitting mechanism further decomposes the laser into detection light emitted along the first direction; The laser spectroscopic system further comprises a power detection mechanism, which is arranged on the emission path of the detection light and is used to detect the power of the laser.

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