Automatic disassembly and assembly system for graphite boat

Abstract

The invention discloses an automatic disassembly and assembly system for a graphite boat, which is characterized in that the disassembly and assembly working position of the graphite boat is calibrated through a positioning device so as to fix the graphite boat, and a first detection device detects the position information of a plurality of boat pages, a plurality of spacer bushes, a plurality of boat feet and a plurality of connecting pieces; the disassembling and assembling device is used for disassembling and assembling the multiple connecting pieces, the multiple boat pages, the multiple boat feet and the multiple spacer bushes according to the corresponding position information in the first detection device, the lifting device correspondingly lifts the graphite boat according to the disassembling and assembling progress of the disassembling and assembling device, full-automatic disassembling and assembling of the graphite boat are achieved, the production efficiency is improved, manual intervention is reduced, and the production cost is reduced. And the risk that graphite dust damages a human body is effectively avoided.

Description

Technical Field

[0001] The invention relates to the technical field of automated equipment, and in particular to an automatic disassembly and assembly system for a graphite boat. Background Art

[0002] There is a process called PECVD coating in the production and processing of solar silicon wafers, which is used to improve the solar energy conversion rate of silicon wafers. This process uses graphite boats. Graphite boats are used as a carrier when anti-reflection coating is applied to solar cells. The structure and size of graphite boats directly affect the conversion efficiency and production efficiency of silicon wafers.

[0003] After the graphite boat goes in and out of the PECVD process many times, the thickness and size of the graphite boat surface will change due to multiple coatings. Among them, the size of the groove between the protrusion at the end of the graphite card point and the graphite boat page will become smaller due to multiple coatings. When the size of the groove is reduced to a certain extent, the uncoated silicon wafer can no longer be placed in this groove. At the same time, since the diameter of the groove of the graphite card point is very small, after repeated placement and removal of silicon wafers, the diameter of this groove will be worn, and in severe cases, the graphite card point will break from the groove.

[0004] Therefore, after multiple coatings, the graphite boat must be taken out from the PECVD process or the automatic loading and unloading machine regularly and put into a special cleaning device to clean the excess coating on the surface. Therefore, this situation requires a large number of operators to disassemble and replace the graphite boat, which brings great labor costs to customers. In addition, graphite dust has extremely strong pollution characteristics and is easy to cause harm to the life safety of workers. Summary of the invention

[0005] The purpose of the present invention is to provide an automatic disassembly and assembly system for a graphite boat in view of the technical problems existing in the background technology.

[0006] In order to achieve the above technical objectives, the technical solution adopted in the first aspect of the present invention is as follows:

[0007] A system for automatically disassembling and assembling a graphite boat, the graphite boat comprising a plurality of connecting parts, a plurality of boat leaves, a plurality of boat feet and a plurality of spacers. The system for automatically disassembling and assembling a graphite boat comprises a main frame and a positioning device, a lifting device, a first detection device and a disassembling and assembling device all mounted on the main frame. The positioning device is used to fix the graphite boat and calibrate the disassembling and assembling working position of the graphite boat. The lifting device is used to lift the graphite boat. The first detection device is used to detect the position information of the plurality of boat leaves, the plurality of spacers, the plurality of boat feet and the plurality of connecting parts. The disassembling and assembling device is used to respectively disassemble and assemble the plurality of connecting parts, the plurality of boat leaves, the plurality of boat feet and the plurality of spacers according to the corresponding position information in the first detection device, wherein the lifting device lifts and lowers the graphite boat in accordance with the disassembling and assembling progress of the disassembling and assembling device.

[0008] Preferably, the positioning device includes a calibration mechanism, which includes a placement table and a plurality of retractable calibration components. The placement table is used to carry the graphite boat. The plurality of calibration components are respectively installed on the main frame and arranged around the placement table. The plurality of calibration components are used to push the graphite boat from multiple angles to drive the graphite boat to the disassembly and assembly working position of the placement table.

[0009] Preferably, the graphite boat includes a plurality of positioning posts inserted in the boat pages, a plurality of holes corresponding to the plurality of positioning posts are provided on the placement table, and the clamping mechanism includes a plurality of retractable clamping members installed on the main frame, and the plurality of clamping members are inserted into the corresponding holes to clamp the corresponding positioning posts.

[0010] Preferably, the lifting device includes multiple lifting mechanisms and synchronizers, the synchronizers are respectively driven and connected to the multiple lifting mechanisms to drive the multiple lifting mechanisms to operate synchronously, the lifting mechanism includes a longitudinal drive rod and a lifting plate, the first end of the lifting plate is driven and connected to the longitudinal drive rod, the second end of the lifting plate is placed under the placement table, and the longitudinal drive rod is driven and connected to the synchronizer.

[0011] Preferably, the disassembly and assembly device includes a connecting piece disassembly and assembly mechanism, a spacer sleeve disassembly and assembly mechanism, a boat foot disassembly and assembly mechanism and a boat leaf disassembly and assembly mechanism. The connecting piece disassembly and assembly mechanism is used to disassemble and assemble multiple connecting pieces, the spacer sleeve disassembly and assembly mechanism is used to disassemble and assemble multiple spacers, the boat foot disassembly and assembly mechanism is used to disassemble and assemble multiple boat feet, and the boat leaf disassembly and assembly mechanism is used to disassemble and assemble multiple boat leaves. The connecting piece disassembly and assembly mechanism, the spacer sleeve disassembly and assembly mechanism, the boat foot disassembly and assembly mechanism and the boat leaf disassembly and assembly mechanism are electrically connected to the first detection device, respectively.

[0012] Preferably, the disassembly and assembly device also includes an XY axis driving mechanism installed on the main frame. A plurality of connecting member disassembly and assembly mechanisms are provided and are respectively driven and connected to the XY axis driving mechanism. The plurality of connecting member disassembly and assembly mechanisms are driven by the XY axis driving mechanism to move synchronously in the X-axis and Y-axis directions.

[0013] Preferably, the connector disassembly and assembly mechanism comprises a first Y-axis drive assembly, a frame, and a floater, a clamping member and a first drive member all mounted on the frame, the first Y-axis drive assembly being drive-connected to the XY-axis drive mechanism, the floater being mounted on the first Y-axis drive assembly and drive-connected to the first Y-axis drive assembly, wherein when the clamping member clamps the connector, the clamping member is driven by the first drive member to drive the connector to rotate so as to disassemble the connector, and the floater is used to improve the fault tolerance of the clamping member in performing the action of clamping the connector.

[0014] Preferably, the spacer sleeve disassembly and assembly mechanism includes a two-dimensional drive assembly and a plurality of retractable grabbing members, the two-dimensional drive assembly is mounted on the main frame, and the plurality of grabbing members are respectively drive-connected to the two-dimensional drive assembly for disassembly and assembly of the spacer sleeve.

[0015] Preferably, the boat page disassembly and assembly mechanism includes a second Y-axis drive assembly, a beam and multiple suction pieces. The second Y-axis drive assembly is drivingly connected to the XY-axis drive mechanism, the beam is drivingly connected to the second Y-axis drive assembly, and multiple suction pieces are evenly arranged on the beam for disassembling the boat pages.

[0016] Preferably, the automatic disassembly and assembly system for graphite boats further comprises a second detection device installed on the main frame, and the second detection device is used to detect damage to the plurality of boat leaves.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects: the disassembly and assembly working position of the graphite boat is calibrated by a positioning device to fix the graphite boat, the first detection device detects the position information of multiple boat pages, multiple spacers, multiple boat feet and multiple connecting parts, the disassembly and assembly device is used to respectively disassemble and assemble multiple connecting parts, multiple boat pages, multiple boat feet and multiple spacers according to the corresponding position information in the first detection device, and the lifting device lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device, thereby realizing fully automated disassembly and assembly of the graphite boat, improving production efficiency, reducing manual intervention, and effectively avoiding the risk of graphite dust causing harm to the human body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of an embodiment of the present invention;

[0019] Figure 2 A top view of an embodiment of the present invention;

[0020] Figure 3 It is a schematic diagram of the structure of the calibration component in an embodiment of the present invention;

[0021] Figure 4 It is a structural schematic diagram of a lifting device in an embodiment of the present invention;

[0022] Figure 5 It is a structural schematic diagram of a lifting device in an embodiment of the present invention;

[0023] Figure 6 It is a schematic structural diagram of a connecting member disassembly and assembly mechanism and a first detection device in an embodiment of the present invention;

[0024] Figure 7 It is a structural schematic diagram of the spacer sleeve disassembly and assembly mechanism in an embodiment of the present invention;

[0025] Figure 8 It is a structural schematic diagram of the boat leaf disassembly and assembly mechanism in an embodiment of the present invention;

[0026] Fig. 9 It is a structural schematic diagram of the boat leg disassembly and assembly mechanism in an embodiment of the present invention;

[0027] Fig.10 Schematic diagram of the structure of the second detection device in an embodiment of the present invention.

[0028] Figure numbers: 100 main frame, 200 positioning device, 201 calibration mechanism, 2011 placement table, 2011a hole position, 2012 calibration component, 202 clamping mechanism, 2021 clamping member, 300 lifting device, 301 lifting mechanism, 3011 longitudinal axis drive rod, 3012 lifting plate, 302 synchronizer, 400 first detection device, 500 disassembly and assembly device, 501 connecting part disassembly and assembly mechanism, 5012 frame, 5013 floater, 5014 clamping member, 5015 first driving member, 502 spacer sleeve disassembly and assembly mechanism, 5021 two-dimensional driving assembly, 5022 grabbing member, 503 boat leaf disassembly and assembly mechanism, 5031 second Y-axis driving assembly, 5032 beam, 5033 multiple suction members, 504 XY axis driving mechanism, 505 boat foot disassembly and assembly mechanism, 600 second detection device. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or a specific connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0032] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0033] like Figure 1-Figure 10As shown, the present invention provides an automatic disassembly and assembly system for a graphite boat, wherein the graphite boat comprises a plurality of connectors, a plurality of positioning posts, a plurality of boat pages, a plurality of boat feet, and a plurality of spacers, wherein the plurality of positioning posts are matched with a plurality of connectors to stack the plurality of boat pages together, and the plurality of spacers are respectively and alternately nested between the plurality of boat pages;

[0034] It should be noted that, in the present embodiment, the connecting piece adopts a nut structure. Of course, according to the actual assembly structure of the graphite boat or the production process and cost considerations, the connecting piece may also adopt other component structures such as a fastener.

[0035] Specifically, the graphite boat is a carrier for anti-reflection coating of solar cells. Its structure and size directly affect the conversion efficiency and production efficiency of silicon wafers. The graphite boat is a cubic structure assembled by boat pages, positioning columns (ceramic sleeves, ceramic rods, graphite rods), spacers (ceramic sleeves), connectors (graphite nuts) and other graphite accessories. A graphite boat is composed of a large number of boat pages, each of which is divided into a varying number of slots. The boat page is a rectangular thin sheet with a thickness of about 2.0mm to 4.0mm, with several square holes in the middle. The boat pages are separated by ceramic sleeves, and finally all the boat pages are fixed by positioning columns, and nuts are installed at both ends of the positioning columns.

[0036] The automatic disassembly and assembly system for a graphite boat comprises a main frame 100, and a positioning device 200, a lifting device 300, a first detection device 400 and a disassembly and assembly device 500, all of which are installed on the main frame 100;

[0037] The positioning device 200 is used to fix the graphite boat and calibrate the disassembly and assembly working position of the graphite boat, the lifting device 300 is used to lift the graphite boat, the first detection device 400 is used to detect the position information of multiple boat pages, multiple spacers and multiple connecting parts, and the disassembly and assembly device 500 is used to respectively disassemble and assemble multiple connecting parts, multiple boat pages, multiple boat feet and multiple spacers according to the corresponding position information in the first detection device 400, wherein the lifting device 300 lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device 500.

[0038] The positioning device 200 includes a calibration mechanism 201 and a clamping mechanism 202 .

[0039] The disassembly and assembly device 500 includes a connecting piece disassembly and assembly mechanism 501, a spacer sleeve disassembly and assembly mechanism 502, a boat foot disassembly and assembly mechanism 505 and a boat leaf disassembly and assembly mechanism 503. The connecting piece disassembly and assembly mechanism 501 is used to disassemble and assemble multiple connecting pieces, the spacer sleeve disassembly and assembly mechanism 502 is used to disassemble and assemble multiple spacers, the boat foot disassembly and assembly mechanism 505 is used to disassemble and assemble multiple boat feet, and the boat leaf disassembly and assembly mechanism 503 is used to disassemble and assemble multiple boat leaves. The connecting piece disassembly and assembly mechanism 501, the spacer sleeve disassembly and assembly mechanism 502, the boat foot disassembly and assembly mechanism 505 and the boat leaf disassembly and assembly mechanism 503 are respectively electrically connected to the first detection device 400.

[0040] Among them, the calibration mechanism 201 is used to calibrate the disassembly and assembly working position of the graphite boat, so that the clamping mechanism 202 clamps multiple positioning columns to fix the graphite boat, the first detection device 400 detects the position information of multiple boat leaves, multiple spacers, multiple boat feet and multiple connecting parts, the connecting part disassembly and assembly mechanism 501 disassembles and assembles the multiple connecting parts according to the position information of the multiple connecting parts, the boat foot disassembly and assembly mechanism 505 disassembles and assembles the multiple boat feet according to the position information of the multiple boat feet, the boat leaf disassembly and assembly mechanism 503 and the spacer sleeve disassembly and assembly mechanism 502 alternately disassemble and assemble the multiple boat leaves and the multiple spacers, wherein it should be noted that the function of the boat foot is to clamp the two boat leaves so that each boat leaf has a stable connection relationship, so after the connecting part disassembly and assembly mechanism 501 executes the disassembly of the connecting part, the boat foot disassembly and assembly mechanism 505 follows it to disassemble and assemble the boat feet, and the lifting mechanism 301 specifically lifts and lowers the graphite boat according to the disassembly and assembly progress of the boat leaf disassembly and assembly mechanism 503.

[0041] The specific implementation method is that the work performed by the automatic disassembly and assembly system for the graphite boat includes the disassembly and installation of the graphite boat. When performing the disassembly, the graphite boat is placed in the automatic disassembly and assembly system. It should be noted here that in the embodiment, an external device, such as a conveying machine, can be used to transport the graphite boat to the automatic disassembly and assembly system, and the calibration mechanism 201 receives and performs the calibration of the disassembly and assembly working position of the graphite boat, wherein the disassembly and assembly working position is a pre-configured position area, and the position area is a position where other mechanisms can accurately dock the graphite boat and operate the graphite boat. Therefore, after receiving the graphite boat, the first execution mechanism identifies the calibration mechanism 201 to calibrate the position of the graphite boat for subsequent work;

[0042] After completing the calibration work, the clamping mechanism 202 starts to clamp the multiple positioning columns. At this time, the position information of the multiple boat leaves, multiple spacers and multiple connectors is detected by the first detection device 400. It should be noted here that the first detection device 400 is provided with multiple ones, and is respectively installed on the connector disassembly and assembly mechanism 501, the boat leaf disassembly and assembly mechanism 503 and the spacer disassembly and assembly mechanism 502. The corresponding detection function is also the same as the function of the mechanism where it is located. For example, the first detection device 400 is on the connector disassembly and assembly mechanism 501, and what it detects is the position information of multiple connectors. The connector disassembly and assembly mechanism 501 disassembles the connectors according to the position information of the multiple connectors. The disassembled connectors are uniformly placed on the connector placement platform for subsequent use during installation.

[0043] After the connector is disassembled, the boat leaves can be disassembled one by one. Since the boat leaves and the spacers are spaced apart from each other, the boat leaf disassembly and assembly mechanism 503 and the spacer disassembly and assembly mechanism 502 are disassembled and assembled alternately. The boat leaves and the spacers also have corresponding placement platforms for easy access during subsequent installation.

[0044] After the above disassembly is completed and the parts on the graphite boat are cleaned, maintained or updated, these parts need to be reassembled, and the above steps are performed in reverse to complete the reassembly of the graphite boat.

[0045] Furthermore, the calibration mechanism 201 includes a placement table 2011 and a plurality of retractable calibration components 2012. The placement table 2011 is used to carry the graphite boat. The plurality of calibration components 2012 are respectively installed on the main frame 100 and arranged around the placement table 2011. The plurality of calibration components 2012 are used to push the graphite boat from multiple angles to drive the graphite boat to be in the disassembly and assembly working position of the placement table 2011.

[0046] Specifically, the retractable calibration components 2012 are actually retractable cylinders, and their setting positions are fixed. Once the graphite boat enters the calibration area of ​​these calibration components 2012, these calibration components 2012 push the graphite boat on the placement table 2011 to move to the disassembly and assembly working position.

[0047] Furthermore, the placement table 2011 is provided with a plurality of holes 2012a corresponding to the plurality of positioning columns respectively, and the clamping mechanism 202 includes a plurality of retractable clamping members 2021 installed on the main frame 100, and the plurality of clamping members 2021 penetrate into the corresponding holes 2012a to clamp the corresponding positioning columns.

[0048] Specifically, the retractable clamping member 2021 is actually composed of a lifting cylinder and a clamping cylinder. In the present embodiment, the clamping member 2011 needs to tighten the end of the positioning column so that the connector disassembly and assembly mechanism 501 can stably disassemble and assemble the connector. Therefore, the clamping member 2021 also includes an overhead cylinder. After the clamping cylinder clamps the end of the positioning column, the overhead cylinder supports the end of the positioning column to further enhance the tightening effect. It should also be noted that the multiple retractable clamping members 2021 are not only arranged under the placement table, but also arranged on the side of the placement table to clamp the positioning columns at the two ends of the graphite boat.

[0049] Furthermore, the lifting device 300 includes multiple lifting mechanisms 301 and synchronizers 302. The synchronizers 302 are respectively connected to the multiple lifting mechanisms 301 to drive the multiple lifting mechanisms 301 to operate synchronously. The lifting mechanisms 301 include a longitudinal drive rod 3011 and a lifting plate 3012. The first end of the lifting plate 3012 is connected to the longitudinal drive rod 3011. The second end of the lifting plate 3012 is placed under the placement table 2011. The longitudinal drive rod 3011 is connected to the synchronizer 302.

[0050] Specifically, the longitudinal drive rods 3011 in the plurality of lifting mechanisms 301 are evenly arranged on one side of the placement table 2011, and the lifting plate 3012 extends to the bottom of the placement table 2011. It should be noted that if the lifting plate 3012 alone contacts the bottom of the placement table 2011 and performs a lifting or lowering operation, the placement table 2011 will be offset due to the lack of other restrictions, resulting in the subsequent lifting plate 3012 being unable to put the placement table 2011 back into the disassembly and assembly working position after putting it down. At this time, the calibration mechanism 201 may need to be used again for secondary calibration. Therefore, in the present embodiment, a limiting block is provided on the lifting plate 3012, which may specifically adopt a triangular wedge structure. , and a wedge-shaped groove is correspondingly provided at the bottom of the placement table 2011. When the lifting plate 3012 is close to and fits against the bottom of the placement table 2011, the triangular wedge-shaped structure will be interlocked with the wedge-shaped groove, while achieving stable lifting and lowering work, it also avoids the placement table 2011 from deviating on the lifting plate 3012. Since the overall length of the graphite boat is relatively long, it is necessary to adopt multiple lifting mechanisms 301 and arrange them at various positions in the length direction of the graphite boat to share the pressure. In this embodiment, a synchronizer 302 is used to synchronously drive the multiple lifting mechanisms 301, so that each lifting mechanism 301 can lift and lower the work synchronously to avoid deviations and errors in the work.

[0051] Furthermore, the disassembly and assembly device 500 also includes an XY axis driving mechanism 504 installed on the main frame 100. A plurality of connecting member disassembly and assembly mechanisms 501 are provided, and are respectively driven and connected to the XY axis driving mechanism 504. The plurality of connecting member disassembly and assembly mechanisms 501 are driven by the XY axis driving mechanism 504 to move synchronously in the X-axis and Y-axis directions.

[0052] Furthermore, the connector disassembly and assembly mechanism 501 includes a first Y-axis drive assembly, a frame 5012, and a floater 5013, a clamping member 5014 and a first driving member 5015 all mounted on the frame 5012. The first Y-axis drive assembly is drivingly connected to the XY-axis drive mechanism 504. The floater 5013 is mounted on the first Y-axis drive assembly and drivingly connected to the first Y-axis drive assembly. The clamping member 5014 is drivingly connected to the first driving member 5015. When the clamping member 5014 clamps the connector, the clamping member 5014 drives the connector to rotate to disassemble the connector through the drive of the first driving member 5015. The floater 5013 is used to improve the fault tolerance of the clamping member 5014 in performing the action of clamping the connector.

[0053] Specifically, the clamping member 5013 is also a clamping cylinder, and its end is connected to the first driving member 5015 by a belt. Driven by the first driving member 5015, the clamping member 5014 drives the connecting member to rotate to disassemble the connecting member, and under the drive of the first Y-axis driving assembly and the XY-axis driving mechanism 504, the clamping member 5013 can move freely in three-dimensional space, and clamp and tighten the connecting member as well as loosen and remove it. In the connecting member disassembly and assembly mechanism 501, a floater 5013 is also provided. The floater 5013 is a prior art, and the specific structure will not be repeated. Its function is to improve the fault tolerance of the connecting member disassembly and assembly mechanism 501 to the contacting connecting member.

[0054] Furthermore, the spacer sleeve disassembly and assembly mechanism 502 includes a two-dimensional driving component 5021 and a plurality of retractable grabbing members 5022. The two-dimensional driving component 5021 is installed on the main frame 100. The plurality of grabbing members 5022 are respectively connected to the two-dimensional driving component 5021 for disassembly and assembly of the spacer sleeve.

[0055] Specifically, multiple retractable grabbing members 5022 also adopt the combination of retractable cylinders and clamping cylinders. The two-dimensional drive component 5021 is actually the two-dimensional drive of the XY axis. Multiple grabbing members 5022 grab the spacers on the graphite boat respectively to realize the disassembly and assembly function. It should be noted that the spacer disassembly and assembly mechanism 502 also includes multiple spacer loading tubes, which are used to stack and store multiple spacers, and each spacer loading tube corresponds to a positioning column on the graphite boat, that is, only all the spacers on the positioning column are stacked and stored, so that each spacer can be re-grabbed and reassembled later. A discharge port is provided at the bottom of the spacer loading tube, which can output a spacer. The grabbing member 5022 can obtain the spacers from the discharge port in turn and reassemble them.

[0056] Furthermore, the boat leaf disassembly and assembly mechanism 503 includes a second Y-axis drive component 5031, a beam 5032 and a plurality of suction components 5033. The second Y-axis drive component 5031 is drivingly connected to the XY-axis drive mechanism 504. The beam 5032 is drivingly connected to the second Y-axis drive component 5031. The plurality of suction components 5033 are evenly arranged on the beam 5032 for disassembling and assembling the boat leaf.

[0057] Specifically, the suction piece 5033 is actually an air nozzle structure, and the boat leaf disassembly and assembly mechanism 503 is also specifically provided with a corresponding air pump to provide a negative air pressure corresponding to the suction piece 5033, wherein the boat leaf disassembly and assembly mechanism 503 is also provided with a positioning structure for positioning each boat leaf, and its specific function is to align the outer contour of the boat leaf.

[0058] Furthermore, the graphite boat also includes a plurality of boat feet arranged between the ends of the plurality of boat leaves, and is characterized in that the disassembly and assembly device 500 also includes two boat foot disassembly and assembly mechanisms 505, which are respectively arranged at both ends of the placement table 2011 for disassembling and assembling the plurality of boat feet on both ends of the graphite boat.

[0059] Specifically, the boat leg disassembly and assembly mechanism 505 also includes a three-dimensional driving mechanism and a clamping cylinder, and also includes a placement platform for storing multiple boat legs. Since multiple boat legs are provided with uniform through holes, longitudinal rods are provided on the corresponding placement platforms. Each boat leg is inserted into the longitudinal rod one by one and stacked together, which is also convenient for disassembly and assembly.

[0060] Furthermore, the automatic disassembly and assembly system for the graphite boat also includes a second detection device 600 installed on the main frame 100, and the second detection device 600 is used to detect damage to the multiple boat leaves.

[0061] The above is an automatic disassembly and assembly system or multiple implementations for graphite boats provided in combination with specific content, and it is not considered that the specific implementation of the present invention is limited to these descriptions. Any similarity or similarity with the method, structure, etc. of the present invention, or a number of technical deductions or replacements made under the premise of the concept of the present invention, should be regarded as the protection scope of the present invention.

Claims

1. An automatic disassembly and assembly system for a graphite boat, the graphite boat comprising a plurality of connectors, a plurality of boat leaves, a plurality of boat feet and a plurality of spacers, characterized in that: include: A main frame (100), and A positioning device (200) for fixing the graphite boat and calibrating the disassembly and assembly working position of the graphite boat; A lifting device (300) for lifting the graphite boat; A first detection device (400) is used to detect position information of a plurality of the connecting members, a plurality of the boat leaves, a plurality of the boat feet and a plurality of the spacers; a disassembly and assembly device (500), used for respectively disassembling and assembling a plurality of the connecting members, a plurality of the boat leaves, a plurality of the boat feet, and a plurality of the spacers according to the corresponding position information in the first detection device (400); The lifting device (300) lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device (500).

2. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: The positioning device (200) comprises a calibration mechanism (201), wherein the calibration mechanism (201) comprises a placement table (2011) and a plurality of retractable calibration components (2012), wherein the placement table (2011) is used to carry the graphite boat, wherein the plurality of calibration components (2012) are respectively mounted on the main frame (100) and arranged around the placement table (2011), and wherein the plurality of calibration components (2012) are used to push the graphite boat from multiple angles to drive the graphite boat to a disassembly and assembly working position of the placement table (2011).

3. An automatic disassembly and assembly system for a graphite boat according to claim 2, wherein the graphite boat comprises a plurality of positioning posts inserted through the boat leaves, characterized in that: The positioning device (200) further comprises a clamping mechanism (202); the placement platform (2011) is provided with a plurality of hole positions (2012a) respectively corresponding to the plurality of positioning columns; the clamping mechanism (202) comprises a plurality of retractable clamping members (2021) mounted on the main frame (100); the plurality of clamping members (2021) penetrate into the corresponding hole positions (2012a) to clamp the corresponding positioning columns.

4. The automatic disassembly and assembly system for a graphite boat according to claim 3, characterized in that: The lifting device (300) comprises a plurality of lifting mechanisms (301) and a synchronizer (302), wherein the synchronizer (302) is respectively connected to the plurality of lifting mechanisms (301) in driving relation to drive the plurality of lifting mechanisms (301) to operate synchronously, and the lifting mechanism (301) comprises a longitudinal drive rod (3011) and a lifting plate (3012), wherein a first end of the lifting plate (3012) is connected to the longitudinal drive rod (3011) in driving relation, and a second end of the lifting plate (3012) is placed below the placing platform (2011), and the longitudinal drive rod (3011) is connected to the synchronizer (302) in driving relation.

5. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: The disassembly and assembly device (500) includes a connecting piece disassembly and assembly mechanism (501), a spacer sleeve disassembly and assembly mechanism (502), a boat foot disassembly and assembly mechanism (505) and a boat leaf disassembly and assembly mechanism (503). The connecting piece disassembly and assembly mechanism (501) is used to disassemble and assemble a plurality of the connecting pieces, the spacer sleeve disassembly and assembly mechanism (502) is used to disassemble and assemble a plurality of the spacers, the boat foot disassembly and assembly mechanism (505) is used to disassemble and assemble a plurality of the boat feet, and the boat leaf disassembly and assembly mechanism (503) is used to disassemble and assemble a plurality of the boat leaves. The connecting piece disassembly and assembly mechanism (501), the spacer sleeve disassembly and assembly mechanism (502), the boat foot disassembly and assembly mechanism (505) and the boat leaf disassembly and assembly mechanism (503) are respectively electrically connected to the first detection device (400).

6. The automatic disassembly and assembly system for a graphite boat according to claim 5, characterized in that: The disassembly and assembly device (500) further comprises an XY axis driving mechanism (504) mounted on the main frame (100); a plurality of the connecting piece disassembly and assembly mechanisms (501) are provided and are respectively drivingly connected to the XY axis driving mechanism (504); and the plurality of connecting piece disassembly and assembly mechanisms (501) are driven by the XY axis driving mechanism (504) to move synchronously in the X-axis and Y-axis directions.

7. The automatic disassembly and assembly system for a graphite boat according to claim 6, characterized in that: The connecting member disassembly and assembly mechanism (501) comprises a first Y-axis driving assembly, a frame (5012), a floater (5013), a clamping member (5014) and a first driving member (5015) all mounted on the frame (5012), wherein the first Y-axis driving assembly is drivingly connected to the XY-axis driving mechanism (504), the floater (5013) is mounted on the first Y-axis driving assembly and drivingly connected to the first Y-axis driving assembly, the clamping member (5014) is drivingly connected to the first driving member (5015), wherein when the clamping member (5014) clamps the connecting member, the clamping member (5014) drives the connecting member to rotate to disassemble the connecting member through the driving of the first driving member (5015), and the floater (5013) is used to improve the fault tolerance of the clamping member (5014) in performing the action of clamping the connecting member.

8. The automatic disassembly and assembly system for a graphite boat according to claim 5, characterized in that: The spacer sleeve disassembly and assembly mechanism (502) comprises a two-dimensional drive component (5021) and a plurality of retractable grabbing members (5022); the two-dimensional drive component (5021) is mounted on the main frame (100); the plurality of grabbing members (5022) are respectively connected to the two-dimensional drive component (5021) for disassembly and assembly of the spacer sleeve.

9. The automatic disassembly and assembly system for a graphite boat according to claim 6, characterized in that: The boat leaf disassembly and assembly mechanism (503) includes a second Y-axis drive component (5031), a crossbeam (5032) and a plurality of suction members (5033), wherein the second Y-axis drive component (5031) is drivingly connected to the XY-axis drive mechanism (504), the crossbeam (5032) is drivingly connected to the second Y-axis drive component (5031), and the plurality of suction members (5033) are evenly arranged on the crossbeam (5032) for disassembling and assembling the boat leaf.

10. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: It also comprises a second detection device (600) installed on the main frame (100), wherein the second detection device (600) is used to detect damage to a plurality of boat leaves.

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