An automatic disassembly and assembly system for graphite boats

By designing an automatic disassembly and assembly system for graphite boats, fully automated disassembly and assembly of graphite boats is achieved, solving the high cost and safety hazards caused by manual disassembly and assembly, improving production efficiency and reducing graphite dust pollution.

CN119159345BActive Publication Date: 2025-10-03SHENZHEN ZHISHANG GREEN ENERGY TECH CO LTD
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Patent Information

Application Number
CN202411298888.1
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-09-18
Publication Date
2025-10-03
Estimated Expiration
2044-09-18

AI Technical Summary

Technical Problem

In the prior art, the graphite boat needs to be manually disassembled and assembled after multiple coatings, which results in high labor costs, safety hazards, and serious graphite dust pollution.

Method used

An automatic disassembly and assembly system for graphite boats is designed, which includes a main frame, a positioning device, a lifting device, a detection device and a disassembly and assembly device to achieve fully automated disassembly and assembly of the graphite boat. Through the coordinated work of positioning calibration, detection of position information and the disassembly and assembly device, the connectors, boat leaves, boat feet and spacers of the graphite boat are automatically disassembled and assembled.

Benefits of technology

The fully automated disassembly and assembly of the graphite boat is realized, which reduces manual intervention, improves production efficiency, avoids the harm of graphite dust to the human body, and reduces labor costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses an automatic disassembly and assembly system for a graphite boat, which calibrates the disassembly and assembly working position of the graphite boat through a positioning device and fixes the graphite boat. A first detection device detects the position information of multiple boat pages, multiple spacers, multiple boat feet and multiple connecting parts. The disassembly and assembly device is used to disassemble and assemble the multiple connecting parts, multiple boat pages, multiple boat feet and multiple spacers respectively according to the corresponding position information in the first detection device. The lifting device lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device, thereby realizing fully automated disassembly and assembly of the graphite boat, improving production efficiency, reducing manual intervention, and effectively avoiding the risk of graphite dust causing harm to the human body.
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Description

Technical Field

[0001] The present invention relates to the technical field of automated equipment, and in particular to an automatic disassembly and assembly system for a graphite boat. Background Art

[0002] The production and processing of solar silicon wafers involves a process called PECVD coating, which aims to improve the wafer's solar energy conversion efficiency. This process utilizes a graphite boat. The graphite boat serves as a carrier for anti-reflection coating on solar cells, and its structure and size directly impact the wafer's conversion efficiency and production efficiency.

[0003] After the graphite boat repeatedly enters and exits the PECVD process, the surface thickness and dimensions of the graphite boat change due to repeated coating. The groove between the protrusion at the end of the graphite card and the graphite boat page becomes smaller due to repeated coating. When the groove size decreases to a certain extent, uncoated silicon wafers can no longer fit into this groove. Furthermore, because the diameter of the graphite card groove is very small, it will wear out after repeated insertion and removal of silicon wafers. In severe cases, the graphite card groove may break from the groove.

[0004] Therefore, after multiple coating cycles, the graphite boat must be regularly removed from the PECVD process or the automatic loading and unloading machine and cleaned in dedicated cleaning equipment to remove excess coating from the surface. This requires a large number of operators to disassemble and replace the graphite boat, which incurs significant labor costs for customers. Furthermore, graphite dust is highly polluting and can easily endanger workers' lives. Summary of the Invention

[0005] The purpose of the present invention is to address the technical problems existing in the background technology and to provide an automatic disassembly and assembly system for a graphite boat.

[0006] In order to achieve the above technical objectives, the technical solutions adopted in the first aspect of the present invention are as follows:

[0007] A system for automatically disassembling and assembling a graphite boat, wherein the graphite boat includes a plurality of connecting parts, a plurality of boat pages, a plurality of boat feet, and a plurality of spacers. The system for automatically disassembling and assembling a graphite boat includes a main frame and a positioning device, a lifting device, a first detection device, and a disassembling device, all of which are installed on the main frame. The positioning device is used to fix the graphite boat and calibrate the disassembly and assembly working position of the graphite boat. The lifting device is used to lift the graphite boat. The first detection device is used to detect the position information of the plurality of boat pages, a plurality of spacers, a plurality of boat feet, and a plurality of connecting parts. The disassembling device is used to respectively disassemble and assemble the plurality of connecting parts, a plurality of boat pages, a plurality of boat feet, and a plurality of spacers according to the corresponding position information in the first detection device. The lifting device lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembling device.

[0008] Preferably, the positioning device includes a calibration mechanism, which includes a placement table and a plurality of retractable calibration components. The placement table is used to carry the graphite boat. The plurality of calibration components are respectively installed on the main frame and arranged around the placement table. The plurality of calibration components are used to push the graphite boat from multiple angles to drive the graphite boat to the disassembly and assembly working position of the placement table.

[0009] Preferably, the graphite boat includes a plurality of positioning posts inserted into the boat pages, a plurality of holes corresponding to the plurality of positioning posts are provided on the placement table, and the clamping mechanism includes a plurality of retractable clamping members installed on the main frame, and the plurality of clamping members are inserted into the corresponding holes to clamp the corresponding positioning posts.

[0010] Preferably, the lifting device includes multiple lifting mechanisms and synchronizers, which are respectively driven and connected to the multiple lifting mechanisms to drive the multiple lifting mechanisms to operate synchronously. The lifting mechanism includes a longitudinal drive rod and a lifting plate. The first end of the lifting plate is driven and connected to the longitudinal drive rod, and the second end of the lifting plate is placed under the placement table. The longitudinal drive rod is driven and connected to the synchronizer.

[0011] Preferably, the disassembly and assembly device includes a connecting piece disassembly and assembly mechanism, a spacer disassembly and assembly mechanism, a boat foot disassembly and assembly mechanism and a boat leaf disassembly and assembly mechanism. The connecting piece disassembly and assembly mechanism is used to disassemble and assemble multiple connecting pieces, the spacer disassembly and assembly mechanism is used to disassemble and assemble multiple spacers, the boat foot disassembly and assembly mechanism is used to disassemble and assemble multiple boat feet, and the boat leaf disassembly and assembly mechanism is used to disassemble and assemble multiple boat leaves. The connecting piece disassembly and assembly mechanism, the spacer disassembly and assembly mechanism, the boat foot disassembly and assembly mechanism and the boat leaf disassembly and assembly mechanism are respectively electrically connected to the first detection device.

[0012] Preferably, the disassembly and assembly device also includes an XY-axis drive mechanism installed on the main frame. There are multiple connecting part disassembly and assembly mechanisms, which are respectively driven and connected to the XY-axis drive mechanism. The multiple connecting part disassembly and assembly mechanisms are driven by the XY-axis drive mechanism to move synchronously in the X-axis and Y-axis directions.

[0013] Preferably, the connector disassembly and assembly mechanism includes a first Y-axis drive assembly, a frame, and a floater, a clamping member, and a first drive member all mounted on the frame. The first Y-axis drive assembly is drive-connected to the XY-axis drive mechanism. The floater is mounted on the first Y-axis drive assembly and drive-connected to the first Y-axis drive assembly. When the clamping member clamps the connector, the clamping member drives the connector to rotate to disassemble the connector through the drive of the first drive member. The floater is used to improve the fault tolerance of the clamping member in performing the action of clamping the connector.

[0014] Preferably, the spacer sleeve disassembly and assembly mechanism includes a two-dimensional drive assembly and a plurality of retractable grabbing members. The two-dimensional drive assembly is mounted on the main frame, and the plurality of grabbing members are respectively connected to the two-dimensional drive assembly for disassembly and assembly of the spacer sleeve.

[0015] Preferably, the boat page disassembly and assembly mechanism includes a second Y-axis drive assembly, a beam and multiple suction parts. The second Y-axis drive assembly is driven and connected to the XY-axis drive mechanism, the beam is driven and connected to the second Y-axis drive assembly, and multiple suction parts are evenly arranged on the beam for disassembling the boat page.

[0016] Preferably, the automatic disassembly and assembly system for the graphite boat further comprises a second detection device installed on the main frame, and the second detection device is used to detect damage to the plurality of boat leaves.

[0017] Compared with the prior art, the present invention has the following beneficial technical effects: the disassembly and assembly working position of the graphite boat is calibrated by a positioning device to fix the graphite boat, the first detection device detects the position information of multiple boat pages, multiple spacers, multiple boat feet and multiple connecting parts, the disassembly and assembly device is used to disassemble and assemble multiple connecting parts, multiple boat pages, multiple boat feet and multiple spacers according to the corresponding position information in the first detection device, and the lifting device lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device, thereby realizing fully automated disassembly and assembly of the graphite boat, improving production efficiency, reducing manual intervention, and effectively avoiding the risk of graphite dust causing harm to the human body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 Schematic diagram of the structure of an embodiment of the present invention;

[0019] Figure 2 A top view of an embodiment of the present invention;

[0020] Figure 3 Schematic diagram of the structure of the calibration component in an embodiment of the present invention;

[0021] Figure 4 Schematic diagram of the structure of the lifting device in an embodiment of the present invention;

[0022] Figure 5 Schematic diagram of the structure of the lifting device in an embodiment of the present invention;

[0023] Figure 6 A schematic structural diagram of a connector assembly and disassembly mechanism and a first detection device according to an embodiment of the present invention;

[0024] Figure 7 Schematic diagram of the structure of the spacer disassembly and assembly mechanism in an embodiment of the present invention;

[0025] Figure 8 This is a structural diagram of the boat and leaf disassembly mechanism in an embodiment of the present invention;

[0026] Figure 9 Schematic diagram of the structure of the boat leg disassembly and assembly mechanism in an embodiment of the present invention;

[0027] Figure 10 Schematic diagram of the structure of the second detection device in an embodiment of the present invention.

[0028] Figure numbers: 100 main frame, 200 positioning device, 201 calibration mechanism, 2011 placement table, 2011a hole position, 2012 calibration component, 202 clamping mechanism, 2021 clamping part, 300 lifting device, 301 lifting mechanism, 3011 longitudinal axis drive rod, 3012 lifting plate, 302 synchronizer, 400 first detection device, 500 disassembly and assembly device, 501 connecting part disassembly and assembly mechanism, 5012 frame, 5013 floater, 5014 clamping part, 5015 first driving part, 502 spacer sleeve disassembly and assembly mechanism, 5021 two-dimensional driving assembly, 5022 grabbing part, 503 boat leaf disassembly and assembly mechanism, 5031 second Y-axis driving assembly, 5032 crossbeam, 5033 multiple suction parts, 504XY axis driving mechanism, 505 boat foot disassembly and assembly mechanism, 600 second detection device. DETAILED DESCRIPTION

[0029] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed or detachable connections, or specific connections; they may refer to mechanical or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0032] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0033] like Figures 1-10As shown, the present invention provides an automatic disassembly and assembly system for a graphite boat, wherein the graphite boat includes a plurality of connectors, a plurality of positioning posts, a plurality of boat pages, a plurality of boat legs, and a plurality of spacers. The plurality of positioning posts are used in conjunction with the plurality of connectors to stack the plurality of boat pages together, and the plurality of spacers are alternately nested between the plurality of boat pages.

[0034] It should be noted that, in this embodiment, the connecting piece adopts a nut structure. Of course, according to the actual assembly structure of the graphite boat or the production process and cost considerations, the connecting piece may also adopt other component structures such as fasteners.

[0035] Specifically, the graphite boat serves as a carrier for anti-reflection coating on solar cells. Its structure and size directly impact the conversion efficiency and production efficiency of the silicon wafers. A graphite boat is a cubic structure assembled from graphite components such as boat leaves, positioning posts (ceramic sleeves, ceramic rods, graphite rods), spacers (ceramic sleeves), and connectors (graphite nuts). A graphite boat is composed of numerous boat leaves, each of which is divided into a varying number of slots. A boat leaf is a rectangular thin sheet approximately 2.0mm to 4.0mm thick, with several square holes cut into the center. The boat leaves are separated by ceramic sleeves and secured by positioning posts, each of which is then secured with nuts.

[0036] The automatic disassembly and assembly system for a graphite boat includes a main frame 100 and a positioning device 200, a lifting device 300, a first detection device 400 and a disassembly and assembly device 500, all of which are installed on the main frame 100;

[0037] The positioning device 200 is used to fix the graphite boat and calibrate the disassembly and assembly working position of the graphite boat, the lifting device 300 is used to lift the graphite boat, the first detection device 400 is used to detect the position information of multiple boat pages, multiple spacers and multiple connecting parts, and the disassembly and assembly device 500 is used to disassemble and assemble multiple connecting parts, multiple boat pages, multiple boat feet and multiple spacers according to the corresponding position information in the first detection device 400, wherein the lifting device 300 lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device 500.

[0038] The positioning device 200 includes a calibration mechanism 201 and a clamping mechanism 202 .

[0039] The disassembly and assembly device 500 includes a connecting piece disassembly and assembly mechanism 501, a spacer disassembly and assembly mechanism 502, a boat foot disassembly and assembly mechanism 505, and a boat leaf disassembly and assembly mechanism 503. The connecting piece disassembly and assembly mechanism 501 is used to disassemble and assemble multiple connecting pieces, the spacer disassembly and assembly mechanism 502 is used to disassemble and assemble multiple spacers, the boat foot disassembly and assembly mechanism 505 is used to disassemble and assemble multiple boat feet, and the boat leaf disassembly and assembly mechanism 503 is used to disassemble and assemble multiple boat leaves. The connecting piece disassembly and assembly mechanism 501, the spacer disassembly and assembly mechanism 502, the boat foot disassembly and assembly mechanism 505, and the boat leaf disassembly and assembly mechanism 503 are respectively electrically connected to the first detection device 400.

[0040] Among them, the calibration mechanism 201 is used to calibrate the disassembly and assembly working position of the graphite boat, so that the clamping mechanism 202 clamps multiple positioning columns to fix the graphite boat, and the first detection device 400 detects the position information of multiple boat pages, multiple spacers, multiple boat feet and multiple connecting parts. The connecting part disassembly and assembly mechanism 501 disassembles and assembles multiple connecting parts according to the position information of the multiple connecting parts, and the boat foot disassembly and assembly mechanism 505 disassembles and assembles multiple boat feet according to the position information of the multiple boat feet. The boat page disassembly and assembly mechanism 503 and the spacer disassembly and assembly mechanism 502 alternately disassemble and assemble multiple boat pages and multiple spacers. It should be noted that the function of the boat foot is to clamp the two boat pages so that each boat page has a stable connection relationship. Therefore, after the connecting part disassembly and assembly mechanism 501 executes the disassembly of the connecting parts, the boat foot disassembly and assembly mechanism 505 follows it to disassemble and assemble the boat feet. The lifting mechanism 301 specifically lifts and lowers the graphite boat according to the disassembly and assembly progress of the boat page disassembly and assembly mechanism 503.

[0041] The specific implementation method is that the work performed by the automatic disassembly and assembly system for the graphite boat includes disassembly and installation of the graphite boat. When disassembly is performed, the graphite boat is placed in the automatic disassembly and assembly system. It should be noted that, in the embodiment, an external device, such as a conveyor machine, can be used to transport the graphite boat to the automatic disassembly and assembly system, and the calibration mechanism 201 receives and calibrates the disassembly and assembly working position of the graphite boat. The disassembly and assembly working position is a pre-configured position area, which is a position where other mechanisms can accurately dock the graphite boat and operate the graphite boat. Therefore, after receiving the graphite boat, the first execution mechanism identifies the calibration mechanism 201 to calibrate the position of the graphite boat to facilitate subsequent work.

[0042] After completing the calibration work, the clamping mechanism 202 begins to clamp the multiple positioning columns. At this time, the position information of the multiple boat pages, multiple spacers and multiple connectors is detected by the first detection device 400. It should be noted here that the first detection device 400 is provided in plurality and is respectively installed on the connector disassembly and assembly mechanism 501, the boat page disassembly and assembly mechanism 503 and the spacer disassembly and assembly mechanism 502. The corresponding detection function is also the same as the function of the mechanism where it is located. For example, the first detection device 400 is on the connector disassembly and assembly mechanism 501, and what it detects is the position information of the multiple connectors. The connector disassembly and assembly mechanism 501 disassembles the connectors according to the position information of the multiple connectors. The disassembled connectors are uniformly placed on the connector placement platform for subsequent use during installation.

[0043] After the connector is disassembled, the boat pages can be disassembled one by one. Since the boat pages and the spacers are spaced apart from each other, the boat page disassembly mechanism 503 and the spacer disassembly mechanism 502 are disassembled and assembled alternately. The boat pages and the spacers also have corresponding placement platforms for easy access during subsequent installation.

[0044] After completing the above disassembly and cleaning, maintaining or updating the components on the graphite boat, it is necessary to reassemble these components, and the above steps are performed in reverse to complete the reassembly of the graphite boat.

[0045] Furthermore, the calibration mechanism 201 includes a placement table 2011 and a plurality of retractable calibration components 2012. The placement table 2011 is used to carry the graphite boat. The plurality of calibration components 2012 are respectively installed on the main frame 100 and arranged around the placement table 2011. The plurality of calibration components 2012 are used to push the graphite boat from multiple angles to drive the graphite boat to the disassembly and assembly working position of the placement table 2011.

[0046] Specifically, the retractable calibration components 2012 are actually retractable cylinders, and their setting positions are fixed. Once the graphite boat enters the calibration area of ​​these calibration components 2012, these calibration components 2012 will push the graphite boat on the placement table 2011 to move to the disassembly and assembly working position.

[0047] Furthermore, the placement table 2011 is provided with a plurality of holes 2012a corresponding to the plurality of positioning columns respectively. The clamping mechanism 202 includes a plurality of retractable clamping members 2021 installed on the main frame 100. The plurality of clamping members 2021 penetrate into the corresponding holes 2012a to clamp the corresponding positioning columns.

[0048] Specifically, the retractable clamping member 2021 is actually composed of a lifting cylinder and a clamping cylinder. In this embodiment, the clamping member 2011 needs to tighten the end of the positioning column so that the connecting member disassembly and assembly mechanism 501 can stably disassemble and assemble the connecting member. Therefore, the clamping member 2021 also includes a top cylinder. After the clamping cylinder clamps the end of the positioning column, the top cylinder supports the end of the positioning column to further enhance the tightening effect. It should also be noted that multiple retractable clamping members 2021 are not only arranged under the placement table, but also arranged on the side of the placement table to clamp the positioning columns at the two ends of the graphite boat.

[0049] Furthermore, the lifting device 300 includes multiple lifting mechanisms 301 and synchronizers 302. The synchronizers 302 are respectively driven and connected to the multiple lifting mechanisms 301 to drive the multiple lifting mechanisms 301 to operate synchronously. The lifting mechanism 301 includes a longitudinal drive rod 3011 and a lifting plate 3012. The first end of the lifting plate 3012 is driven and connected to the longitudinal drive rod 3011. The second end of the lifting plate 3012 is placed under the placement table 2011. The longitudinal drive rod 3011 is driven and connected to the synchronizer 302.

[0050] Specifically, the longitudinal drive rods 3011 in the multiple lifting mechanisms 301 are evenly arranged on one side of the placement table 2011, and the lifting plate 3012 extends to the bottom of the placement table 2011. It should be noted that if the lifting plate 3012 alone contacts the bottom of the placement table 2011 and performs lifting or lowering operations, the placement table 2011 will be offset due to the lack of other restrictions. As a result, after the subsequent lifting plate 3012 lowers the placement table 2011, it will not be able to be put back to the disassembly and assembly working position. At this time, it may be necessary to use the calibration mechanism 201 again for secondary calibration. Therefore, in this embodiment, a limiting block is provided on the lifting plate 3012, which can specifically adopt a triangular wedge structure. , and a wedge-shaped groove is correspondingly provided at the bottom of the placement table 2011. When the lifting plate 3012 approaches and fits against the bottom of the placement table 2011, the triangular wedge structure will be interlocked with the wedge-shaped groove, while achieving stable lifting and lowering work, it also prevents the placement table 2011 from deviating on the lifting plate 3012. Since the overall length of the graphite boat is relatively long, it is necessary to adopt multiple lifting mechanisms 301 and arrange them at various positions in the length direction of the graphite boat to share the pressure. In this embodiment, a synchronizer 302 is used to synchronously drive the multiple lifting mechanisms 301, so that each lifting mechanism 301 can perform lifting and lowering work synchronously to avoid deviations and work errors.

[0051] Furthermore, the disassembly and assembly device 500 also includes an XY-axis drive mechanism 504 installed on the main frame 100. A plurality of connecting part disassembly and assembly mechanisms 501 are provided, and are respectively driven and connected to the XY-axis drive mechanism 504. The plurality of connecting part disassembly and assembly mechanisms 501 are driven by the XY-axis drive mechanism 504 to move synchronously in the X-axis and Y-axis directions.

[0052] Furthermore, the connector disassembly and assembly mechanism 501 includes a first Y-axis drive assembly, a frame 5012, and a floater 5013, a clamping member 5014, and a first driving member 5015, all of which are installed on the frame 5012. The first Y-axis drive assembly is drive-connected to the XY-axis drive mechanism 504, the floater 5013 is installed on the first Y-axis drive assembly and drive-connected to the first Y-axis drive assembly, and the clamping member 5014 is drive-connected to the first driving member 5015. When the clamping member 5014 clamps the connector, the clamping member 5014 drives the connector to rotate to disassemble the connector through the drive of the first driving member 5015. The floater 5013 is used to improve the fault tolerance of the clamping member 5014 in performing the action of clamping the connector.

[0053] Specifically, the clamping member 5013 is also a clamping cylinder, and its end is connected to the first driving member 5015 through a belt. Driven by the first driving member 5015, the clamping member 5014 drives the connecting member to rotate to disassemble the connecting member, and under the drive of the first Y-axis driving assembly and the XY-axis driving mechanism 504, the clamping member 5013 can move freely in three-dimensional space, and clamp, tighten, and loosen the connecting member. A floater 5013 structure is also provided in the connecting member disassembly and assembly mechanism 501. The floater 5013 is a prior art technology, and the specific structure will not be repeated. Its function is to improve the fault tolerance of the connecting member disassembly and assembly mechanism 501 to the contact connecting member.

[0054] Furthermore, the spacer disassembly and assembly mechanism 502 includes a two-dimensional drive component 5021 and a plurality of retractable grabbing members 5022. The two-dimensional drive component 5021 is mounted on the main frame 100. The plurality of grabbing members 5022 are respectively connected to the two-dimensional drive component 5021 for disassembly and assembly of the spacer.

[0055] Specifically, multiple retractable grabbing parts 5022 also adopt the combination of retractable cylinders and clamping cylinders. The two-dimensional drive assembly 5021 is actually the two-dimensional drive of the XY axis. Multiple grabbing parts 5022 grab the spacers on the graphite boat respectively to realize the disassembly and assembly function. It should be noted that the spacer disassembly and assembly mechanism 502 also includes multiple spacer loading tubes, which are used to stack and store multiple spacers, and each spacer loading tube corresponds to a positioning column on the graphite boat, that is, only all the spacers on the positioning column are stacked and stored, so that the spacers can be re-grabbed and reassembled later. A discharge port is provided under the spacer loading tube, which can output a spacer. The grabbing parts 5022 can obtain the spacers from the discharge port in turn and reassemble them.

[0056] Furthermore, the boat page disassembly and assembly mechanism 503 includes a second Y-axis drive component 5031, a beam 5032 and a plurality of suction components 5033. The second Y-axis drive component 5031 is driven and connected to the XY-axis drive mechanism 504. The beam 5032 is driven and connected to the second Y-axis drive component 5031. The plurality of suction components 5033 are evenly arranged on the beam 5032 for disassembling the boat page.

[0057] Specifically, the suction member 5033 is actually an air nozzle structure, and the boat page disassembly and assembly mechanism 503 is also specifically provided with a corresponding air pump to provide the suction member 5033 with a corresponding negative air pressure, wherein the boat page disassembly and assembly mechanism 503 is also provided with a positioning structure for positioning each boat page, and its specific function is to align the outer contour of the boat page.

[0058] Furthermore, the graphite boat also includes a plurality of boat feet arranged between the ends of a plurality of boat leaves, and is characterized in that the disassembly and assembly device 500 also includes two boat foot disassembly and assembly mechanisms 505, which are respectively arranged at both ends of the placement table 2011 for disassembling and assembling the plurality of boat feet on both ends of the graphite boat.

[0059] Specifically, the boat leg disassembly and assembly mechanism 505 also includes a three-dimensional driving mechanism and a clamping cylinder, and also includes a placement platform for storing multiple boat legs. Since multiple boat legs are provided with uniform through holes, longitudinal rods are provided on the corresponding placement platforms. Each boat leg is inserted into the longitudinal rod one by one and stacked together, which is also convenient for disassembly and assembly.

[0060] Furthermore, the automatic disassembly and assembly system for the graphite boat further includes a second detection device 600 installed on the main frame 100, and the second detection device 600 is used to detect damage to the multiple boat pages.

[0061] The above description provides a system for automatically disassembling and assembling a graphite boat, or various embodiments thereof, in combination with specific content. The specific implementation of the present invention is not limited to these descriptions. Any similarity or similarity to the methods and structures of the present invention, or any technical deduction or substitution based on the concepts of the present invention, shall be considered within the scope of protection of the present invention.

Claims

1. An automatic disassembly and assembly system for a graphite boat, wherein the graphite boat comprises a plurality of connectors, a plurality of boat leaves, a plurality of boat legs, and a plurality of spacers, characterized in that: include: A main frame (100), and A positioning device (200) for fixing the graphite boat and calibrating the disassembly and assembly working position of the graphite boat; A lifting device (300) for lifting the graphite boat; A first detection device (400) is used to detect position information of a plurality of the connecting members, a plurality of the boat leaves, a plurality of the boat feet, and a plurality of the spacers; a disassembly and assembly device (500), used for respectively disassembling and assembling a plurality of the connecting members, a plurality of the boat leaves, a plurality of the boat feet, and a plurality of the spacers according to the corresponding position information in the first detection device (400); The lifting device (300) lifts and lowers the graphite boat according to the disassembly and assembly progress of the disassembly and assembly device (500); The disassembly and assembly device (500) includes a connecting piece disassembly and assembly mechanism (501), a spacer sleeve disassembly and assembly mechanism (502), a boat foot disassembly and assembly mechanism (505), and a boat leaf disassembly and assembly mechanism (503). The connecting piece disassembly and assembly mechanism (501) is used to disassemble and assemble a plurality of the connecting pieces, the spacer sleeve disassembly and assembly mechanism (502) is used to disassemble and assemble a plurality of the spacers, the boat foot disassembly and assembly mechanism (505) is used to disassemble and assemble a plurality of the boat feet, and the boat leaf disassembly and assembly mechanism (503) is used to disassemble and assemble a plurality of the boat leaves. The connecting piece disassembly and assembly mechanism (501), the spacer sleeve disassembly and assembly mechanism (502), the boat foot disassembly and assembly mechanism (505), and the boat leaf disassembly and assembly mechanism (503) are electrically connected to the first detection device (400) respectively. The disassembly and assembly device (500) further comprises an XY-axis driving mechanism (504) mounted on the main frame (100); a plurality of the connecting member disassembly and assembly mechanisms (501) are provided and are respectively connected to the XY-axis driving mechanism (504); the plurality of connecting member disassembly and assembly mechanisms (501) are driven by the XY-axis driving mechanism (504) to move synchronously in the X-axis and Y-axis directions; The connector assembly and disassembly mechanism (501) includes a first Y-axis drive assembly, a frame (5012), a floater (5013), a clamping member (5014), and a first drive member (5015), all of which are mounted on the frame (5012); the first Y-axis drive assembly is drive-connected to the XY-axis drive mechanism (504); the floater (5013) is mounted on the first Y-axis drive assembly and drive-connected to the first Y-axis drive assembly; the clamping member (5014) is drive-connected to the first drive member (5015); when the clamping member (5014) clamps the connector, the clamping member (5014) drives the connector to rotate to disassemble the connector through the drive of the first drive member (5015); and the floater (5013) is used to improve the fault tolerance of the clamping member (5014) in performing the action of clamping the connector.

2. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: The positioning device (200) comprises a calibration mechanism (201), the calibration mechanism (201) comprises a placement table (2011) and a plurality of retractable calibration components (2012), the placement table (2011) is used to carry the graphite boat, the plurality of calibration components (2012) are respectively mounted on the main frame (100) and arranged around the placement table (2011), and the plurality of calibration components (2012) are used to push the graphite boat from multiple angles to drive the graphite boat to a disassembly and assembly working position of the placement table (2011).

3. The automatic disassembly and assembly system for a graphite boat according to claim 2, characterized in that: The graphite boat includes a plurality of positioning posts inserted into the boat pages, the positioning device (200) also includes a clamping mechanism (202), the placement table (2011) is provided with a plurality of holes (2012a) corresponding to the plurality of positioning posts respectively, the clamping mechanism (202) includes a plurality of retractable clamping members (2021) installed on the main frame (100), and the plurality of clamping members (2021) are inserted into the corresponding holes (2012a) to clamp the corresponding positioning posts.

4. The automatic disassembly and assembly system for a graphite boat according to claim 3, characterized in that: The lifting device (300) includes a plurality of lifting mechanisms (301) and a synchronizer (302). The synchronizer (302) is respectively connected to the plurality of lifting mechanisms (301) to drive the plurality of lifting mechanisms (301) to operate synchronously. The lifting mechanism (301) includes a longitudinal drive rod (3011) and a lifting plate (3012). The first end of the lifting plate (3012) is connected to the longitudinal drive rod (3011). The second end of the lifting plate (3012) is placed below the placement platform (2011). The longitudinal drive rod (3011) is connected to the synchronizer (302).

5. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: The spacer sleeve disassembly and assembly mechanism (502) comprises a two-dimensional drive assembly (5021) and a plurality of retractable grabbing members (5022), wherein the two-dimensional drive assembly (5021) is mounted on the main frame (100), and the plurality of grabbing members (5022) are respectively connected to the two-dimensional drive assembly (5021) for disassembly and assembly of the spacer sleeve.

6. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: The boat leaf disassembly and assembly mechanism (503) includes a second Y-axis drive component (5031), a crossbeam (5032) and a plurality of suction members (5033), wherein the second Y-axis drive component (5031) is driven and connected to the XY-axis drive mechanism (504), and the crossbeam (5032) is driven and connected to the second Y-axis drive component (5031), and the plurality of suction members (5033) are evenly arranged on the crossbeam (5032) for disassembling and assembling the boat leaf.

7. The automatic disassembly and assembly system for a graphite boat according to claim 1, characterized in that: It also includes a second detection device (600) installed on the main frame (100), and the second detection device (600) is used to detect damage to the plurality of boat leaves.

Citation Information

Patent Citations

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