A double-end machining center and a control method thereof

By using bidirectional drilling technology and a tool setter in a dual-head machining center, the problems of low drilling quality and breakage caused by drill bit vibration have been solved, achieving a high-precision and fast drilling process.

CN119159418BActive Publication Date: 2026-02-03HANGZHOU ZHIDIAN IND CO LTD
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Patent Information

Application Number
CN202411689495.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-11-25
Publication Date
2026-02-03
Estimated Expiration
2044-11-25

AI Technical Summary

Technical Problem

When drilling deep holes in semiconductor materials, traditional machining centers are prone to problems such as low drilling quality and drill bit breakage due to excessive drill bit vibration.

Method used

A dual-head machining center is used, which drills by moving two coaxial drill bits synchronously relative to each other, reducing drill bit length and vibration, improving drilling accuracy and speed, and ensuring the verticality of the worktable by using a tool setter.

Benefits of technology

It achieves high-precision and fast drilling, reduces the risk of drill bit breakage, extends the service life of drill bits, and simplifies the process of workpiece fixing and tool setting.

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Abstract

The application relates to a double-head machining center and a control method thereof. The machining center comprises a machining center body, the machining center body comprises a bed body and a workbench, the workbench is installed on the bed body, a clamp is arranged on the workbench, one machine head is horizontally slidably installed on the bed body at opposite sides of the clamp, the two machine heads slide in parallel, a drill bit is rotatably installed on the machine head, and the two drill bits are coaxial. After a workpiece is clamped and fixed on the workbench through the clamp, the two machine heads are relatively moved to synchronously relatively drill holes on two sides of the workpiece, one machine head is retracted after the hole depths on the two sides reach a specified depth, and the other machine head continuously advances to drill through the hole. Compared with one-way drilling, the length of the drill bit required by two-way drilling is shorter, the drill bit shakes less during drilling, the drilled hole is more accurate, the drilling speed is faster, and the drill bit is less prone to breaking during high-speed rotation drilling due to the small shaking.
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Description

Technical Field

[0001] This application relates to the field of high-precision machine tools, and in particular to a dual-head machining center and its control method. Background Technology

[0002] During the processing of semiconductor materials, especially when drilling small-diameter holes, the drill bit used for drilling is relatively thin. When drilling deep holes, the drilling quality is easily affected by excessive vibration of the long drill bit, resulting in an excessively large hole diameter. Moreover, due to the high hardness of semiconductor materials, the drill bit rotates at a high speed, and excessive vibration of the drill bit can easily cause it to break or be damaged. Summary of the Invention

[0003] To address the problem that traditional machining centers often suffer from low drilling quality due to excessive drill bit vibration when drilling deep holes in semiconductor materials, this application provides a dual-head machining center and its control method.

[0004] Firstly, the dual-head machining center provided in this application adopts the following technical solution:

[0005] A dual-head machining center includes a machining center body, which includes a bed and a worktable. The worktable is mounted on the bed and a fixture is provided on the worktable. A machine head is horizontally slidably mounted on each side of the bed opposite to the fixture. The two machine heads slide parallel to each other and a drill bit is rotatably mounted on the machine head. The two drill bits are coaxial.

[0006] After the workpiece is clamped and fixed on the worktable by the fixture, the two drill heads move relative to each other to drill holes on both sides of the workpiece simultaneously. When the hole depth on both sides reaches the specified depth, one drill head retracts while the other drill head continues to advance to drill through the hole. Compared with unidirectional drilling, bidirectional drilling requires a shorter drill bit, the drill bit vibrates less during drilling, the drilled hole has higher precision, and the drilling speed is faster. Moreover, because the drill bit vibrates less, it is less likely to break when drilling at high speed.

[0007] Optionally, the bed is provided with a first mounting seat, a second mounting seat, and an indexing plate. The first mounting seat is horizontally slidably mounted on the bed, the second mounting seat is vertically lifted and lowered on the first mounting seat, the indexing plate is mounted on the second mounting seat, and the worktable is mounted on the indexing plate. The axis of the indexing plate is parallel to the sliding direction of the first mounting seat, and the sliding direction of the first mounting seat is perpendicular to the sliding direction of the machine head.

[0008] Optionally, the worktable has a through-hole for mounting. The fixture includes an annular clamping plate and multiple clamping members. The clamping plate is mounted on the worktable and communicates with the mounting hole. The clamping members are mounted on the clamping plate and distributed around the inner hole of the clamping plate. The workpiece is located in the enclosed area of ​​the clamping members. The clamping members clamp and fix the workpiece on the clamping plate, and the workpiece is located in the mounting hole.

[0009] Optionally, a positioning element is installed on one side of the clamping plate.

[0010] Optionally, the mounting hole is circular, the clamping plate is annular, and an annular boss is coaxially provided on one side of the clamping plate. The boss is slidably installed in the mounting hole.

[0011] Optionally, two tool setters are installed on the side wall of the worktable. The two tool setters are coaxial and are used to set the two drill bits respectively. The tool setting direction of the tool setter is parallel to the normal of the worktable surface.

[0012] Optionally, the clamping member includes a mounting block and a clamping block. The mounting block is mounted on the clamping plate and is provided with a fixing bolt. One end of the clamping block is mounted on the mounting block by the fixing bolt, and the other end of the clamping block abuts against the workpiece.

[0013] Optionally, the clamping member includes a mounting block and a clamping block. The mounting block is mounted on the clamping plate, and a slider is slidably mounted on the mounting block. The clamping block is slidably mounted on the slider in a direction close to or away from the clamping area of ​​the clamping plate. The slider is used to push the clamping block to press against the workpiece. A first driving member is provided in the mounting block for driving the clamping block to slide, and a second driving member is provided in the mounting block for driving the slider to slide. The second driving member is pulsatorically connected to the first driving member. A third driving member 9 is provided on the clamping plate, and the first driving member is pulsatorically connected to the third driving member 9.

[0014] Optionally, the third driving component 9 includes a third driving screw threadedly mounted on the clamping plate. One end of the third driving screw is connected to the first driving component for transmission. Two limiting nuts are threadedly mounted on the third driving screw. A limiting spring is sleeved on the third driving screw between the two limiting nuts. The two ends of the limiting spring abut against the two limiting nuts respectively.

[0015] Secondly, this application provides a dual-head drilling control method, which includes the following steps:

[0016] S1. Clamp the workpiece;

[0017] S2, setting the blade;

[0018] S3. Confirm the verticality of the workbench;

[0019] S4. Confirm the perpendicularity of the workpiece;

[0020] S5, bidirectional drilling;

[0021] In S1, the workpiece is clamped using the aforementioned worktable and fixture. In S2, the tool is set using the aforementioned tool setting device. Simultaneously, the verticality of the worktable in S3 is confirmed by comparing the actual relative distance between the two drill bits during tool setting with the relative distance between the two drill bits during standard tool setting. In S4, when drilling, when the two drill bits drill synchronously to the specified relative distance, one drill bit retracts, and the other drill bit continues drilling through before retracting.

[0022] In summary, this application, by vertically fixing the semiconductor board on the worktable and simultaneously drilling with two coaxial drill bits on both sides of the worktable, achieves a drilling depth that is half that of single-sided drilling, even with the same hole depth. This allows for drilling deeper, higher-quality holes. Furthermore, because single-sided drilling is shallower and the drill bit is shorter, the vibration during high-speed drilling is less likely to be excessive, the drill bit is less likely to break, and the drill bit has a longer service life.

[0023] Meanwhile, due to the symmetrical installation of the two tool setters, the verticality of the worktable can be calculated by comparing the difference between the actual distance and the standard distance between the two coaxial drill bits during tool setting. This makes it relatively convenient to determine and correct the verticality of the worktable.

[0024] When installing a semiconductor board, after placing the semiconductor board on the worktable, the semiconductor board can be easily counterbalanced by rotating the positioning column. At the same time, the positioning column can drive the clamping block to clamp the semiconductor board, making clamping and fixing convenient and preventing accidental contact with the semiconductor board. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the three-dimensional structure of this application.

[0026] Figure 2 This is a three-dimensional structural diagram of the bed frame and its superstructure.

[0027] Figure 3 This is a three-dimensional structural diagram of the indexing plate and worktable of this application, with the protective cover on the worktable removed in the figure.

[0028] Figure 4 This is a schematic diagram of the three-dimensional structure of the workbench of this application.

[0029] Figure 5 This is a schematic diagram of the three-dimensional structure of the fixture of this application.

[0030] Figure 6This is a schematic diagram of the three-dimensional structure of another positioning component in this application.

[0031] Figure 7 This is a three-dimensional structural diagram of the clamping member of Embodiment 1 of this application.

[0032] Figure 8 This is a three-dimensional structural diagram of the clamping member and clamping plate in Embodiment 2 of this application.

[0033] Figure 9 This is a three-dimensional structural diagram of the clamping member in Embodiment 2 of this application.

[0034] Figure 10 This is an exploded view of the clamping component in Embodiment 2 of this application.

[0035] Figure 11 This is a three-dimensional structural diagram of the clamping member in Embodiment 2 of this application from another angle, in which the mounting block is cut out.

[0036] Figure 12 This is a schematic diagram of the side of the clamping plate away from the boss in Embodiment 2 of this application.

[0037] Figure 13 This is a three-dimensional structural diagram of the third driving component 9 of this application.

[0038] Those skilled in the art will understand that the elements in the accompanying drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the size and position of some elements in the drawings may be enlarged relative to other elements to aid in understanding the embodiments of the invention.

[0039] Reference numerals: 1. Machining center body; 11. Bed; 12. Machine head; 13. Drill bit; 14. First mounting base; 15. Second mounting base; 16. Indexing plate; 17. Tool setter; 2. Worktable; 21. Mounting hole; 22. Protective groove; 3. Fixture; 31. Clamping plate; 311. Boss; 4. Clamping component; 41. Mounting block; 411. Mounting groove; 42. Clamping block; 421. Connecting block; 422. Elongated hole; 43. Fixing bolt; 44. Slider; 441. Slide groove; 442. Sliding hole; 45. First driving component; 46. 1. First gear; 4511. Damping ring; 452. First drive screw; 453. Drive block; 454. Drive gear; 455. Rack; 456. Connecting rod; 46. Second drive component; 461. Second gear; 462. Second drive screw; 5. Positioning component; 51. Positioning pin; 52. Positioning plate; 6. Bevel gear; 7. First transmission shaft; 8. Second transmission shaft; 9. Third drive component; 91. Third drive screw; 92. Bolt cap; 93. Limit nut; 94. Limit spring; 95. Baffle; 96. Warning spring. Detailed Implementation

[0040] The following is in conjunction with the appendix Figure 1-13 This application will be described in further detail.

[0041] Example 1: In a first aspect, Example 1 of this application discloses a dual-head machining center, referring to... Figure 1 and Figure 2 The machining center body 1 includes a bed 11 horizontally fixed on the ground, a first mounting base 14, a second mounting base 15, a worktable 2, and an indexing plate 16.

[0042] Reference Figure 2 Two first linear guides are horizontally fixed to the bed 11 by bolts. A first mounting base 14 is slidably mounted on the first linear guides and is driven to slide by a lead screw motor. A second linear guide is fixedly mounted vertically on the first mounting base 14. A second mounting base 15 is slidably mounted on the second linear guide and is also driven by a lead screw motor.

[0043] Reference Figure 2 and Figure 3 The indexing plate 16 is fixedly mounted on the second mounting base 15, and the axis of the indexing plate 16 is parallel to the sliding direction of the first linear guide rail. The worktable 2 is an octagonal plate, and a mounting plate is integrally provided on one end of the worktable 2. The mounting plate is coaxially fixedly mounted on the indexing plate 16, and the axis of the mounting plate is parallel to the table surface of the worktable 2. The worktable 2 is located in the middle of the mounting plate.

[0044] Reference Figure 2 A third linear guide is horizontally fixed on the bed 11 on both sides of the worktable 2. The sliding direction of the third linear guide is perpendicular to the axis of the indexing plate 16. A machine head 12 is slidably installed on the third linear guide. Both machine heads 12 are also driven to slide by a lead screw motor. At the same time, the two machine heads 12 are symmetrically distributed on both sides of the axis of the indexing plate 16.

[0045] Reference Figure 2 A horizontal spindle is rotatably mounted on the machine head 12, and a spindle motor is also fixedly mounted on the machine head 12, with the spindle motor connected to the spindle drive. The two spindles are coaxial, and tool holders are coaxially mounted on opposite ends of each spindle. The machine bed 11 has two tool magazines, each used to mate with the two machine heads 12 to mount drill bits 13 onto the tool holders. A probe is also installed in each tool magazine.

[0046] Reference Figure 2 and Figure 3Two tool setters 17 are fixedly installed on the side wall of the worktable 2. The two tool setters 17 are coaxial, and the axis of the tool setter 17 is perpendicular to the axis of the indexing plate 16. The tool setter 17 is used to zero the drill bit 13. Since the tool setter 17 is coaxial, the perpendicularity of the worktable 2 can be judged by whether the actual distance between the two drill bits 13 when they are zeroed is the same as the theoretical distance when the worktable 2 is perpendicular.

[0047] Reference Figure 3 and Figure 4 A mounting hole 21 is coaxially formed on the worktable 2. A clamp 3 is provided on the worktable 2, which coaxially fixes the circular semiconductor board to the worktable 2 along with the mounting hole 21. The clamp 3 includes a clamping plate 31 and eight clamping parts 4. The clamping plate 31 is annular. A protective groove 22 is coaxially formed on one side of the worktable 2, and the clamping plate 31 is located in the protective groove 22. This prevents the clamping plate 31 from contacting the equipment on the bed 11 when the worktable 2 rotates.

[0048] Reference Figure 3 and Figure 5 A ring-shaped boss 311 is coaxially provided on one side of the clamping plate 31. The boss 311 is slidably installed in the mounting hole 21. The clamping plate 31 is fixed to the worktable 2 by bolts.

[0049] Reference Figure 3 and Figure 5 A positioning element 5 is provided on the platform of the boss 311. The positioning element 5 includes two positioning pins 51. One end of the positioning pin 51 is fixedly installed on the clamping plate, and the axis of the positioning pin 51 is parallel to the axis of the boss 311. At the same time, the axis of the positioning pin 51 is located on the concentric circle of the clamping plate 31, and the diameter of the concentric circle is the standard diameter of the plate to be processed. When installing the clamping plate 31, first rotate the worktable 2 to vertical, and then slide the boss 311 into the mounting hole 21. When the clamping plate 31 is rotated to the point where the positioning pin 51 is directly below the clamping plate 31, the clamping plate 31 is fixed to the worktable 2. If the bolt holes on the clamping plate 31 and the bolt holes on the worktable 2 do not correspond at this time, the worktable 2 and the clamping plate 31 need to be checked.

[0050] Reference Figure 3 and Figure 5 After the clamping plate 31 is installed, the circular semiconductor plate is placed on the positioning post 51, and then the position of the semiconductor plate is adjusted to be coaxial with the clamping plate 31 by rotating the semiconductor plate.

[0051] Reference Figure 6 The positioning element 5 can also be two positioning plates 52, which are inclined relative to each other and tangent to the concentric circle of the clamping plate. The diameter of the concentric circle is the standard diameter of the circular semiconductor substrate to be processed.

[0052] Reference Figure 5 and Figure 7 Eight clamping components 4 are all disposed on one end face of the boss 311. Each clamping component 4 includes a mounting block 41 and a clamping block 42. The eight mounting blocks 41 are axially spaced and fixedly mounted on the platform of the boss 311 around the axis of the clamping plate 31. The clamping block 42 is cuboid in shape and has a through hole 422. The through hole 422 is a countersunk hole, and a fixing bolt 43 passes through the through hole 422. The through hole 422 is opened along the length direction of the clamping block 42. The clamping plate 31 is arranged radially. One end of the fixing bolt 43 passes through the elongated hole 422 and is threaded onto the mounting block 41. Two protrusions are provided on both ends of the clamping block 42 facing the mounting block 41 along its length. After the bolt is tightened to the specified capacity, the bolt cap 92 of the fixing bolt 43 abuts against the stepped surface of the elongated hole 422. The two protrusions at one end of the clamping block 42 abut against the mounting block 41, and the two protrusions at the other end of the protrusions abut against the surface of the semiconductor board, thus fixing the semiconductor board onto the clamping plate 31.

[0053] The implementation principle of a dual-head machining center in Embodiment 1 of this application is as follows: Before machining the semiconductor board, the worktable 2 is first rotated to a vertical position, and then tool setting is performed. After tool setting is completed and the verticality of the worktable 2 is corrected, the worktable 2 is rotated to a horizontal position. After placing the circular semiconductor board on the clamping plate 31, the positioning column 51 is rotated to adjust the semiconductor board to be coaxial with the clamping plate 31. Then, the eight fixing bolts 43 are tightened to complete the fixed installation of the semiconductor board. Then, the worktable 2 is rotated to a vertical position, and holes are drilled in both directions using two drill bits 13.

[0054] Secondly, Embodiment 1 of this application discloses a dual-head drilling control method, comprising the following steps:

[0055] S1. Clamp the workpiece;

[0056] S2, setting the blade;

[0057] S3. Confirm the verticality of workbench 2;

[0058] S4. Confirm the perpendicularity of the workpiece;

[0059] S5, bidirectional drilling;

[0060] In S1, the workpiece is clamped using the workbench 2 and fixture 3 from Example 1. In S2, the tool setting is performed using the aforementioned tool setting device 17. Simultaneously, the verticality of the workbench 2 in S3 is confirmed by comparing the actual relative distance between the two drill bits 13 during tool setting with the relative distance between the two drill bits 13 during standard tool setting. In S4, when drilling, when the two drill bits 13 drill synchronously to the specified relative distance, one drill bit 13 retracts, and the other drill bit 13 continues drilling through before retracting.

[0061] Example 2: Example 2 of this application discloses a dual-head machining center. The difference between Example 2 and Example 1 is that: (Refer to...) Figure 8 , Figure 9 and Figure 10 The mounting block 41 has a mounting groove 411 on the side facing away from the clamping plate 31. A slider 44 is slidably mounted in the mounting groove 411. The slider 44 slides along the axis of the clamping plate 31. A sliding groove 441 is provided on the slider 44. The sliding groove 441 is designed as a dovetail groove. A connecting block 421 is integrally provided on the clamping block 42. One end of the connecting block 421 is slidably mounted in the sliding groove 441.

[0062] Reference Figure 8 and Figure 9 The groove 441 is opened along the radial direction of the clamping plate 31.

[0063] Reference Figure 10 and Figure 11 A first driving member 45 and a second driving member 46 are provided in the mounting groove 411. The first driving member 45 includes a first gear 451 rotatably mounted on the slider 44. A damping ring 4511 is provided at the rotatable connection between the first gear 451 and the slider 44 to prevent the first gear 451 from reversing. A first driving screw 452 is rotatably mounted in the mounting groove 411. A driving block 453 is slidably mounted in the mounting groove 411. A driving gear 454 is rotatably mounted on the driving block 453. The first driving screw 452 coaxially passes through the driving gear 454 and the driving block 453. The first driving screw 452 and the driving block 453 are threadedly engaged. The driving gear 454 and the first driving screw 452 are axially slidingly engaged and radially fixed.

[0064] Reference Figure 10 and Figure 11 The first drive screw 452 is rotated to drive the drive block 453 and drive gear 454 to slide, and the drive gear 454 is also rotated. At this time, the drive gear 454 meshes with the first gear 451. A rack 455 is provided on the clamping block 42, and the rack 455 is slidably installed in the slider 44 and meshes with the drive gear 454. A sliding hole 442 is provided through the slider 44, and a connecting rod 456 is fixedly installed on the rack 455. One end of the connecting rod 456 is fixedly connected to the clamping block 42. The rotation of the drive gear 454 drives the rack 455 to slide, and in turn drives the clamping block 42 to slide.

[0065] Reference Figure 10 and Figure 11The second driving component 46 includes a second gear 461 rotatably mounted in the mounting groove 411. The first gear 451 and the second gear 461 are respectively located in the mounting grooves 411 at both ends of the first driving screw 452. When the driving block 453 slides to the point where the driving gear 454 separates from the first gear 451 and then slides for the designed length, the driving gear 454 meshes with the second gear 461, and the driving gear 454 drives the second gear 461 to rotate.

[0066] Reference Figure 10 and Figure 11 A bevel gear 6 is coaxially mounted on the second gear 461. A second drive screw 462 is rotatably mounted in the mounting slot 411. One end of the second drive screw 462 passes through the slider 44 and is threadedly engaged with the slider 44. The rotation of the second drive screw 462 drives the slider 44 to slide. A bevel gear 6 is also coaxially mounted on the second drive screw 462. The two bevel gears 6 mesh with each other. When the second gear 461 rotates, the engagement between the two bevel gears 6 drives the second drive screw 462 to rotate, which in turn drives the slider 44 to slide. The sliding of the slider 44 causes the clamping block 42 to press against or move away from the semiconductor plate.

[0067] Reference Figure 11 and Figure 12 The first driving component 45 also includes a first drive shaft 7, which is rotatably mounted in the mounting block 41, with one end of the first drive shaft 7 located in the mounting groove 411. The end of the first drive shaft 7 located in the mounting groove 411 is connected to the first driving screw 452 via a bevel gear 6, and the other end of the first drive shaft 7 passes through the mounting block 41 and the clamping plate 31 in sequence, located on the side of the clamping plate 31 away from the boss 311.

[0068] Reference Figure 8 and Figure 13 A third driving component 9 is provided on the clamping plate. The third driving component 9 includes a third driving screw 91 coaxially threaded on a positioning post 51 on the side away from the indexing plate 16. One end of the third driving screw 91 passes through the clamping plate 31 and is located on the side of the clamping plate 31 away from the boss 311. A bevel gear 6 is coaxially mounted on the end of the third driving screw 91 located on the side of the clamping plate 31 away from the boss 311. The third driving screw 91 and the bevel gear slide axially and are circumferentially fixed.

[0069] Reference Figure 12 and Figure 13Eight second drive shafts 8 are rotatably mounted on the side of the clamping plate 31 facing away from the boss 311. A bevel gear 6 is coaxially mounted on both ends of each second drive shaft 8. One of the second drive shafts 8 is connected to the third drive screw 91 via the bevel gear 6, and the other end of the second drive shaft 8 is connected to the first drive shaft 7 via the bevel gear 6. One end of the second drive shaft 8 is connected to the first drive shaft 7 via the bevel gear 6, and the other end of the second drive shaft 8 is connected to the second drive shaft via the bevel gear 6. The eight second drive shafts 8 are connected in sequence in the above manner, and the eight first drive shafts 7 are also connected to the second drive shafts 8 in the above manner to receive the power of the positioning column 51.

[0070] Reference Figure 8 and Figure 13 A cap 92 is coaxially and integrally installed on one end of the third drive screw 91 located on one side of the positioning post 51. Two limit nuts 93 are threadedly installed on the third drive screw 91 between the cap 92 and the positioning post 51. A limit spring 94 is sleeved on the third drive screw 91 between the fiber nuts. The two ends of the limit spring 94 abut against the two limit nuts 93 respectively. By adjusting the position of the limit nuts 93, the distance that the third drive screw 91 can rotate on the positioning post 51 can be adjusted. The limit spring 94 is used to prevent the limit nuts 93 from loosening.

[0071] Reference Figure 8 and Figure 13 A baffle 95 is threaded onto one end of the third drive screw 91 located on the side where the second drive shaft is mounted on the clamping plate. A warning spring 96 is sleeved on the third drive screw 91 between the baffle 95 and the bevel gear 6 on the third drive screw 91. The two ends of the warning spring 96 abut against the bevel gear 6 and the baffle 95, respectively.

[0072] The implementation principle of a dual-head machining center in Embodiment 2 of this application is as follows: After placing the semiconductor board on the boss 311, the worktable 2 is rotated until it is tilted and the positioning post 51 is located below the rotation axis of the worktable 2. The semiconductor board is rotated until it is adjusted to be coaxial with the clamping plate. Then, the third drive screw 91 is rotated. The third drive screw 91 drives the eight second transmission shafts 8 to rotate. The second transmission shafts 8 drive the first transmission shaft 7 to rotate. The first transmission shaft 7 drives the first drive screw 452 to rotate. The first drive screw 452 drives the drive block 453 to slide and drives the drive gear 454 to rotate, thus driving... Gear 454 drives the first gear 451 to rotate. The first gear 451 drives the rack 455 to slide and push a section of the clamping block 42 into the range of the semiconductor plate. At this time, the driving block 453 drives the driving gear 454 to separate from the first gear 451. After moving a fixed distance, it meshes with the second gear 461. Then, the driving gear 454 drives the second gear 461 to rotate. The second gear 461 drives the second driving screw 462 to rotate through the bevel gear 6. The rotation of the second driving screw 462 drives the slider 44 to slide. Then, the slider 44 drives the clamping block 42 to clamp the semiconductor plate.

[0073] When the clamping block 42 presses against the semiconductor board, the positioning nut presses against the positioning post 51, and the third drive screw 91 stops rotating. At the same time, when it approaches the positioning nut pressing against the positioning post 51, the warning spring 96 will push the bevel gear 6 on the third drive screw 91 to press against the bevel gear 6 on the second transmission shaft 8, increasing the force required to rotate the third drive screw 91 and issuing a warning to the operator.

[0074] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A dual-head machining center, comprising a machining center body (1), the machining center body (1) comprising a bed (11) and a worktable (2), the worktable (2) being mounted on the bed (11), and a fixture (3) being provided on the worktable (2), characterized in that: On the bed (11) on both sides of the clamp (3), a machine head (12) is horizontally slidably installed. The two machine heads (12) slide in parallel. A drill bit (13) is rotatably installed on the machine head (12). The two drill bits (13) are coaxial. The bed (11) is provided with a first mounting seat (14), a second mounting seat (15) and an indexing plate (16). The first mounting seat (14) is horizontally slidably mounted on the bed (11), and the second mounting seat (15) is vertically lifted and lowered mounted on the first mounting seat (14). The indexing plate (16) is mounted on the second mounting seat (15), and the worktable (2) is mounted on the indexing plate (16). The axis of the indexing plate (16) is parallel to the sliding direction of the first mounting seat (14), and the sliding direction of the first mounting seat (14) is perpendicular to the sliding direction of the machine head (12). The workbench (2) has a through mounting hole (21). The fixture (3) includes an annular clamping plate (31) and multiple clamping members (4). The clamping plate (31) is mounted on the workbench (2). The clamping plate (31) is connected to the mounting hole (21). The clamping members (4) are mounted on the clamping plate (31) and distributed around the inner hole of the clamping plate (31). The workpiece is located in the enclosed area of ​​the clamping members (4). The clamping members (4) clamp and fix the workpiece on the clamping plate (31). The workpiece is located in the mounting hole (21). The clamping plate (31) has a positioning element (5) installed on one side of the clamping member (4); the mounting hole (21) is circular, the clamping plate (31) is annular, and an annular boss (311) is coaxially provided on one side of the clamping plate (31), and the boss (311) is slidably installed in the mounting hole (21); The positioning component (5) includes two positioning posts (51). One end of the positioning post (51) is fixedly installed on the clamping plate, and the axis of the positioning post (51) is parallel to the axis of the boss (311). At the same time, the axis of the positioning post (51) is located on the concentric circle of the clamping plate (31), and the diameter of the concentric circle is the standard diameter of the plate to be processed. The clamping member (4) includes a mounting block (41) and a clamping block (42). The mounting block (41) has a mounting groove (411) on the side facing away from the clamping plate (31). A slider (44) is slidably mounted in the mounting groove (411). The slider (44) slides along the axial direction of the clamping plate (31). A sliding groove (441) is provided on the slider (44). The sliding groove (441) is designed as a dovetail groove. A connecting block (421) is integrally provided on the clamping block (42). One end of the connecting block (421) is slidably mounted in the sliding groove (441). The sliding groove (441) is opened along the radial direction of the clamping plate (31). A first drive member (45) and a second drive member (46) are provided in the mounting slot (411). The first drive member (45) includes a first gear (451) rotatably mounted on the slider (44). A damping ring (4511) is provided at the rotatable connection between the first gear (451) and the slider (44). A first drive screw (452) is rotatably installed in the mounting slot (411), a drive block (453) is slidably installed in the mounting slot (411), a drive gear (454) is rotatably installed on the drive block (453), the first drive screw (452) coaxially passes through the drive gear (454) and the drive block (453), the first drive screw (452) and the drive block (453) are threadedly engaged, the drive gear (454) and the first drive screw (452) are axially slidably engaged and radially fixed, at this time the drive gear (454) meshes with the first gear (451); A rack (455) is provided on the clamping block (42), the rack (455) is slidably installed in the slider (44) and meshes with the drive gear (454); a sliding hole (442) is opened through the slider (44), and a connecting rod (456) is fixedly installed on the rack (455), one end of the connecting rod (456) is fixedly connected to the clamping block (42); The second driving component (46) includes a second gear (461) rotatably mounted in a mounting groove (411). The first gear (451) and the second gear (461) are respectively located in the mounting grooves (411) at both ends of the first driving screw (452). When the driving block (453) slides to the point where the driving gear (454) separates from the first gear (451) and then slides for a designed length, the driving gear (454) meshes with the second gear (461), and the driving gear (454) drives the second gear (461) to rotate. A bevel gear (6) is coaxially mounted on the second gear (461), and a second drive screw (462) is rotatably mounted in the mounting slot (411). One end of the second drive screw (462) passes through the slider (44) and is threadedly engaged with the slider (44). A bevel gear (6) is also coaxially mounted on the second drive screw (462), and the two bevel gears (6) mesh with each other. The first drive unit (45) also includes a first drive shaft (7), which is rotatably mounted in the mounting block (41), and one end of the first drive shaft (7) is located in the mounting groove (411); the end of the first drive shaft (7) located in the mounting groove (411) is connected to the first drive screw (452) by a bevel gear (6), and the other end of the first drive shaft (7) passes through the mounting block (41) and the clamping plate (31) in sequence and is located on the side of the clamping plate (31) away from the boss (311); A third driving component is provided on the clamping plate (31). The third driving component includes a third driving screw (91) coaxially threaded on a positioning post (51) on the side away from the indexing plate (16). One end of the third driving screw (91) passes through the clamping plate (31) and is located on the side of the clamping plate (31) away from the boss (311). A bevel gear (6) is coaxially installed on the end of the third driving screw (91) on the side of the clamping plate (31) away from the boss (311). The third driving screw (91) and the bevel gear (6) slide axially and are circumferentially fixed. Eight second drive shafts (8) are rotatably mounted on the side of the clamping plate (31) away from the boss (311). A bevel gear (6) is coaxially mounted on both ends of each second drive shaft (8). One of the second drive shafts (8) is connected to the third drive screw (91) via the bevel gear (6). The other end of the second drive shaft (8) is connected to the first drive shaft (7) via the bevel gear (6). One end of the second drive shaft (8) is connected to the first drive shaft (7) via the bevel gear (6). The other end of the second drive shaft (8) is connected to the second drive shaft via the bevel gear (6). The eight second drive shafts (8) are connected in sequence in the above manner. The eight first drive shafts (7) are also connected to the second drive shafts (8) in the above manner to receive the power of the positioning column (51). A bolt cap (92) is coaxially and integrally installed on one end of the third drive screw (91) located on the side of the positioning post (51). Two limit nuts (93) are threaded on the third drive screw (91) between the bolt cap (92) and the positioning post (51). A limit spring (94) is sleeved on the third drive screw (91) between the limit nuts (93). The two ends of the limit spring (94) abut against the two limit nuts (93) respectively. The limit spring (94) is used to prevent the limit nuts (93) from loosening. A baffle (95) is threaded on one end of the third drive screw (91) located on the side of the clamp plate (31) where the second transmission shaft (8) is installed. A warning spring (96) is sleeved on the third drive screw (91) between the baffle (95) and the bevel gear (6) on the third drive screw (91). The two ends of the warning spring (96) abut against the bevel gear (6) and the baffle (95) respectively.

2. A dual-head machining center according to claim 1, characterized in that: Two tool setting devices (17) are installed on the side wall of the worktable (2). The two tool setting devices (17) are coaxial and are used to set the two drill bits (13) respectively. The tool setting direction of the tool setting device (17) is parallel to the normal line of the worktable (2) surface of the worktable (2).

3. A dual-head machining center according to claim 1, characterized in that: The clamping member (4) includes a mounting block (41) and a clamping block (42). The mounting block (41) is mounted on the clamping plate (31). A fixing bolt (43) is provided on the mounting block (41). One end of the clamping block (42) is mounted on the mounting block (41) by the fixing bolt (43), and the other end of the clamping block (42) abuts against the workpiece.

4. A dual-head drilling control method, comprising the following steps: S1. Clamp the workpiece; S2, setting the blade; S3. Confirm the verticality of the workbench (2); S4. Confirm the perpendicularity of the workpiece; S5, bidirectional drilling; The features are as follows: S1, S2 and S3 are all operated using the double-head machining center described in any of the claims 1-3. At the same time, the verticality of the worktable (2) in S3 is confirmed by comparing the actual relative distance between the two drill bits (13) during tool setting and the relative distance between the two drill bits (13) during standard tool setting. In S4, when drilling, when the two drill bits (13) drill to the specified relative distance at the same time, one drill bit (13) retracts and the other drill bit (13) continues to drill through and then retracts.

Citation Information

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