Airlock valve performance detection device and performance test method

Abstract

The invention relates to the field of instrument equipment, in particular to an airlock valve performance detection device and a performance test method. The device comprises a first gas circuit, one end of the first gas circuit is a gas source tank connector, and the other end of the first gas circuit is connected with a second gas circuit and a third gas circuit; a first pressure gauge and an isolating valve are arranged on the first gas path; a first pressure regulating valve, a second pressure gauge and a first three-way valve are arranged on the second gas path; a gas source interface is arranged at the tail end of the second gas path; a second pressure regulating valve and a second three-way valve are arranged on the third gas path; the tail end of the third gas path is provided with a first gas inlet connector and a second gas inlet connector. The first air outlet connector and the second air outlet connector are connected with two cavities of the working cavity through air paths respectively, and different cavities of the working cavity are connected with the third pressure gauge and the fourth pressure gauge respectively. The performance of the airlock valve can be detected by using the device. According to the invention, various working conditions can be simulated, and the performance of two airlock valves can be detected.

Description

Technical Field

[0001] The present invention relates to the field of instrumentation equipment, and in particular to a gas lock valve performance detection device and a performance testing method. Background Art

[0002] The air lock valve is an auxiliary device for pneumatic valves. When the air source fails and stops supplying air, the air lock valve is used to cut off the air source control channel of the valve to keep the valve position at the position before the air loss to ensure the normal progress of the process. The air lock valve will not open the channel to restore normal control until the accident in the system is eliminated and air is supplied again.

[0003] Gas lock valves are divided into double-acting gas lock valves and single-acting gas lock valves.

[0004] The working principle of the dual-channel air lock valve is as follows:

[0005] When the pressure of the gas source pressure gauge of the air lock valve is lower than the set value, the air lock valve will be activated to cut off the gas control channel. The first outlet pressure and the second outlet pressure of the air lock valve remain unchanged. Since the air cavity pressure remains unchanged, the valve position remains at the position before the air loss. The working principle diagram of the dual-channel air lock valve is as follows Figure 1 shown.

[0006] The working principle of the single-channel air lock valve is:

[0007] When the pressure of the gas source pressure gauge of the air lock valve is lower than the set value, the air lock valve will be activated to cut off the gas control channel. The first outlet pressure of the air lock valve remains unchanged. Since the air cavity pressure remains unchanged, the valve position remains at the position before the air loss. The working principle diagram of the single-channel air lock valve is as follows: Figure 2 shown.

[0008] Therefore, the air lock valve must have accurate operating pressure and good sealing performance, that is, the air pressure in the air chamber can be maintained unchanged, so as to ensure that the working valve remains in the valve position before the air loss after the pressure of the air source drops suddenly, and ensure the normal operation of the process system. However, there is currently no performance detection device for air lock valves. Summary of the invention

[0009] The technical problem to be solved by the present invention is to provide a gas lock valve performance detection device and a performance testing method, which can detect the pressure action value and sealing performance of the gas lock valve, and can detect the performance of the gas lock valve under the condition of sudden air loss in the simulated gas circuit.

[0010] The present invention provides a gas valve lock performance detection device, comprising:

[0011] A first gas circuit, one end of which is a gas source tank interface, and the other end of which is respectively connected to the second gas circuit and the third gas circuit;

[0012] A first pressure gauge and an isolation valve are provided on the first gas line;

[0013] The second gas circuit is provided with a first pressure regulating valve, a second pressure gauge, and a first three-way valve; and a gas source interface is provided at the end of the second gas circuit;

[0014] The third gas circuit is provided with a second pressure regulating valve and a second three-way valve; the ends of the third gas circuit are provided with a first gas inlet interface and a second gas inlet interface respectively;

[0015] The first air outlet interface and the second air outlet interface are respectively connected to two chambers of the working chamber through air paths, and different chambers of the working chamber are respectively connected to the third pressure gauge and the fourth pressure gauge.

[0016] Preferably, it also includes a gas source tank, which is connected to the gas source tank interface.

[0017] The present invention provides a method for detecting performance of an air lock valve, comprising the following steps:

[0018] Step 1: Connect the air lock valve and the gas source tank to the air lock valve detection device;

[0019] Step 2: Check the pressure of the gas source tank and confirm that it is within the normal range;

[0020] Step 3: Open the first gas circuit and the second gas circuit to establish normal working air pressure, and open the gas circuit of the gas lock valve;

[0021] Step 4: The gas is injected into the working chamber through the gas lock valve to establish normal working pressure in the working chamber;

[0022] Step 5: Slowly reduce the air inlet pressure of the air source port to check whether the air lock valve can be locked normally. If the air lock valve is locked, monitor the operating pressure of the air lock valve;

[0023] If the operating pressure of the air lock valve is within ±3% of the set pressure, proceed to the next step;

[0024] If the operating pressure of the air lock valve is not within the above range, the air lock valve is judged to be unqualified;

[0025] Step 6: exhaust the air inlet pressure of the air lock valve and test the sealing performance of the air lock valve;

[0026] If the working chamber pressure of the air lock valve is within ±3% of the set pressure, proceed to the next step;

[0027] If the working chamber pressure of the air lock valve is not within the above range, it is judged as unqualified;

[0028] Step 7: Open the first gas circuit, the second gas circuit and the third gas circuit, confirm that the gas lock valve is open, and the gas cavity gas circuit establishes normal working pressure;

[0029] Step 8: Rapidly reduce the air inlet pressure at the air source port to check whether the air lock valve is locked. If so, exhaust the pressure at the two air inlets, observe the working chamber pressure, and determine the airtightness of the air lock valve.

[0030] If the working chamber pressure is within ±3% of the set pressure, the performance of the air lock valve is considered qualified;

[0031] If the working chamber pressure is not within ±3% of the set pressure, the performance of the air lock valve is judged to be unqualified.

[0032] Preferably, if the air lock valve is a dual-channel air lock valve, step one specifically comprises: connecting the dual-channel air lock valve to the first air inlet interface, the second air inlet interface, the air source interface, the first air outlet interface, and the second air outlet interface; and connecting the air source tank to the air source tank interface:

[0033] If the air lock valve is a single-channel air lock valve, step one is specifically: connect the single-channel air lock valve to the first air inlet interface, the air source interface, and the first air outlet interface; connect the air source tank to the air source tank interface: close the second air inlet interface, and close the second air outlet interface.

[0034] Preferably, the step two is specifically as follows: closing the first pressure regulating valve and the second pressure regulating valve, setting the positions of the first three-way valve and the second three-way valve to a state where the left and right pipelines are connected, and opening the isolation valve; and using a first pressure gauge to detect the pressure value of the gas source tank.

[0035] Preferably, the step three is specifically:

[0036] Slowly open the first pressure regulating valve and observe the value of the second pressure gauge until it is close to the value of the first pressure gauge. Then the first and second gas circuits are opened, normal working air pressure is established, and the gas circuit of the gas lock valve is opened.

[0037] Preferably, if the air lock valve is a dual-channel air lock valve, the step 4 specifically comprises: slowly opening the second pressure gauge regulating valve, observing the pressure values ​​of the third pressure gauge and the fourth pressure gauge, until the pressure values ​​of the third pressure gauge and the fourth pressure gauge do not exceed the upper limit of the pressure of the working chamber;

[0038] If the air lock valve is a single-channel air lock valve, the step four is specifically: slowly open the second pressure gauge regulating valve, and observe the pressure value of the third pressure gauge until the pressure value of the third pressure gauge does not exceed the upper pressure limit of the working chamber.

[0039] Preferably, the step five is specifically:

[0040] Slowly reduce the opening of the first pressure regulating valve to check whether the air lock valve can be locked normally. If the air lock valve is locked, record the value of the second pressure gauge;

[0041] If the value of the second pressure gauge meets the set pressure, it is judged that the operating pressure of the air lock valve meets the set pressure.

[0042] Preferably, if the air lock valve is a dual-channel air lock valve, step six is ​​specifically as follows:

[0043] Quickly open the second three-way valve to the drain position and observe whether the value changes of the third and fourth pressure gauges are within ±3% of the set pressure;

[0044] If the air lock valve is a dual-channel air lock valve, step six is ​​specifically as follows:

[0045] Quickly open the second three-way valve to the drain position and observe whether the value change of the third pressure gauge is within ±3% of the set pressure.

[0046] Preferably, if the air lock valve is a dual-channel air lock valve, step eight is specifically as follows:

[0047] Quickly open the first three-way valve to the emptying position to check whether the air lock valve is locked. If it is locked, quickly open the second three-way valve to the emptying position and observe the values ​​of the third and fourth pressure gauges to determine the working chamber pressure.

[0048] If the air lock valve is a dual-channel air lock valve, step eight is specifically as follows:

[0049] Quickly open the first three-way valve to the drain position and check whether the air lock valve has a locking action. If a locking action occurs, quickly open the second three-way valve to the drain position and observe the value of the third pressure gauge to determine the working chamber pressure.

[0050] Compared with the prior art, the gas valve lock performance detection device and performance testing method of the present invention have the following beneficial effects:

[0051] (1) It can simulate the process of slow decrease of gas source pressure and detect the operating pressure value of the gas lock valve;

[0052] (2) The three-way valve can be used to simulate the sudden drop in gas source pressure and detect whether the gas lock valve can operate correctly;

[0053] (3) It is designed with multiple interfaces to test the performance of single-channel gas lock valves and dual-channel gas lock valves;

[0054] (4) The sealing effect of the gas lock valve can be detected according to the change in air pressure in the working chamber after the gas lock valve is actuated;

[0055] (5) The device is modular in design, easy to process and install, compact in structure and convenient to install. BRIEF DESCRIPTION OF THE DRAWINGS

[0056] Figure 1 It shows the working principle diagram of the dual-channel gas lock valve;

[0057] Figure 2 It shows the working principle diagram of single channel air lock valve;

[0058] Figure 3 A schematic diagram showing the structure of a gas lock valve performance testing device;

[0059] Figure 4 It shows the installation diagram of dual-channel air lock valve detection;

[0060] Figure 5 It shows the installation diagram of the single-channel air lock valve test;

[0061] In the figure,

[0062] 1-gas source tank, 2-first air lock valve, 3-working chamber, 4-isolating valve, 5-second pressure gauge, 6-first pressure regulating valve, 7-second pressure regulating valve, 8-third pressure gauge, 9-fourth pressure gauge, 10-first pressure gauge, 11-first gas circuit, 12-gas source tank interface, 13-second gas circuit, 14-third gas circuit, 15-first three-way valve, 16-gas source interface, 17-second three-way valve, 18-first air inlet interface, 19-second air inlet interface, 20-first air outlet interface, 21-second air outlet interface. DETAILED DESCRIPTION

[0063] In order to further understand the present invention, the embodiments of the present invention are described below in conjunction with examples, but it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention, rather than limiting the present invention.

[0064] The embodiment of the present invention discloses a gas valve lock performance detection device, such as Figure 3 As shown, including:

[0065] A first gas circuit 11, one end of which is a gas source tank interface 12, and the other end of which is respectively connected to a second gas circuit 13 and a third gas circuit 14;

[0066] The first gas circuit 11 is provided with a first pressure gauge 10 and an isolation valve 4;

[0067] The second gas circuit 13 is provided with a first pressure regulating valve 6, a second pressure gauge 5, and a first three-way valve 15; the end of the second gas circuit 13 is provided with a gas source interface 16;

[0068] The third gas circuit 14 is provided with a second pressure regulating valve 7 and a second three-way valve 17; the ends of the third gas circuit 14 are provided with a first gas inlet interface 18 and a second gas inlet interface 19 respectively;

[0069] The first gas outlet interface 20 and the second gas outlet interface 21 are respectively connected to two chambers of the working chamber 3 through gas paths, and different chambers of the working chamber are respectively connected to the third pressure gauge 8 and the fourth pressure gauge 9 .

[0070] It also includes a gas source tank 1 , which is connected to a gas source tank interface 12 .

[0071] The gas source interface 16, the first gas inlet interface 18, the second gas inlet interface 19, the first gas outlet interface 20, and the second gas outlet interface 21 are respectively used to connect the gas source port, the gas inlet port, and the gas outlet port of the gas lock valve.

[0072] The detection device of the present invention can be used to detect a dual-channel air lock valve, and can also be used to detect a single-channel air lock valve.

[0073] The present invention also provides a method for detecting the performance of an air lock valve, comprising the following steps:

[0074] Step 1: Connect the air lock valve and the gas source tank to the air lock valve detection device;

[0075] Step 2: Check the pressure of the gas source tank and confirm that it is within the normal range;

[0076] Step 3: Open the first gas circuit and the second gas circuit to establish normal working air pressure, and open the gas circuit of the gas lock valve;

[0077] Step 4: The gas is injected into the working chamber through the gas lock valve to establish normal working pressure in the working chamber;

[0078] Step 5: Slowly reduce the air inlet pressure of the air source port to check whether the air lock valve can be locked normally. If the air lock valve is locked, monitor the operating pressure of the air lock valve;

[0079] If the operating pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0080] If the operating pressure of the air lock valve is not within the above range, the air lock valve is judged to be unqualified;

[0081] Step 6: exhaust the air inlet pressure of the air lock valve and test the sealing performance of the air lock valve;

[0082] If the working chamber pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0083] If the working chamber pressure of the air lock valve is not within the above range, it is judged as unqualified;

[0084] Step 7: Open the first gas circuit, the second gas circuit and the third gas circuit, confirm that the gas lock valve is open, and the gas cavity gas circuit establishes normal working pressure;

[0085] Step 8: Rapidly reduce the air inlet pressure at the air source port to check whether the air lock valve is locked. If so, exhaust the pressure at the two air inlets, observe the working chamber pressure, and determine the airtightness of the air lock valve.

[0086] If the working chamber pressure is within ±3% of the set pressure, the performance of the air lock valve is considered qualified;

[0087] If the working chamber pressure is not within ±3% of the set pressure, the performance of the air lock valve is judged to be unqualified.

[0088] In the present invention, the set pressure refers to the factory set pressure of the air lock valve.

[0089] When testing the performance of a dual-channel air lock valve, the connection method is as follows Figure 4 As shown, the detection method specifically comprises the following steps:

[0090] Step 1: Connect the air lock valve and the gas source tank to the air lock valve detection device;

[0091] Specifically, connect the dual-channel air lock valve to the first air inlet interface, the second air inlet interface, the air source interface, the first air outlet interface, and the second air outlet interface; connect the air source tank to the air source tank interface:

[0092] Step 2: Check the pressure of the gas source tank and confirm that it is within the normal range;

[0093] Specifically, close the first pressure regulating valve and the second pressure regulating valve, set the positions of the first three-way valve and the second three-way valve to the left and right pipeline connected state, open the isolation valve; use a first pressure gauge to detect the pressure value of the gas source tank.

[0094] The function of step 2 is to use the first pressure gauge to detect the pressure value of the gas source tank.

[0095] Step 3: Open the first gas circuit and the second gas circuit to establish normal working air pressure, and open the gas circuit of the gas lock valve;

[0096] Specifically:

[0097] Slowly open the first pressure regulating valve and observe the value of the second pressure gauge until it is close to the value of the first pressure gauge. Then the first and second gas circuits are opened, normal working air pressure is established, and the gas circuit of the gas lock valve is opened.

[0098] Step 4: The gas is injected into the working chamber through the gas lock valve to establish normal working pressure in the working chamber;

[0099] Specifically, slowly open the second pressure gauge regulating valve, and observe the pressure values ​​of the third pressure gauge and the fourth pressure gauge until the pressure values ​​of the third pressure gauge and the fourth pressure gauge do not exceed the upper pressure limit of the working chamber;

[0100] Step 5: Slowly reduce the air inlet pressure of the air source port to check whether the air lock valve can be locked normally. If the air lock valve is locked, monitor the operating pressure of the air lock valve;

[0101] Specifically:

[0102] Slowly reduce the opening of the first pressure regulating valve to check whether the air lock valve can be locked normally. If the air lock valve is locked, record the value of the second pressure gauge;

[0103] If the value of the second pressure gauge meets the set pressure, it is judged that the operating pressure of the air lock valve meets the set pressure.

[0104] This step five simulates the situation where the pressure of the gas source pipeline slowly decreases, detects the air lock valve locking action pressure value, and verifies whether the air lock valve is actuated at the specified pressure value.

[0105] The value of the second pressure gauge represents the operating pressure of the air lock valve.

[0106] If the operating pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0107] If the operating pressure of the air lock valve is not within the above range, the air lock valve is judged to be unqualified;

[0108] Step 6: exhaust the air inlet pressure of the air lock valve and test the sealing performance of the air lock valve;

[0109] Specifically:

[0110] After 3 to 5 minutes, quickly open the second three-way valve to the drain position and observe whether the value changes of the third and fourth pressure gauges are within ±3% of the set pressure;

[0111] The purpose of this step is to monitor the sealing performance of the air lock valve. If the value changes of the third pressure gauge and the fourth pressure gauge are within the specified range, the sealing performance of the air lock valve is good, and an additional step of detection is performed;

[0112] The criteria are:

[0113] If the working chamber pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0114] If the working chamber pressure of the air lock valve is not within the above range, it is judged as unqualified;

[0115] Step 7: Open the first gas circuit, the second gas circuit and the third gas circuit, confirm that the gas lock valve is open, and the gas cavity gas circuit establishes normal working pressure;

[0116] Step 8: Rapidly reduce the air inlet pressure at the air source port to check whether the air lock valve is locked. If so, exhaust the pressure at the two air inlets, observe the working chamber pressure, and determine the airtightness of the air lock valve.

[0117] The purpose of this step is: (1) to simulate the damage of the gas source pipeline, that is, when the gas source pressure value suddenly drops to 0, to test whether the gas lock valve can be locked normally; (2) to test the sealing performance of the gas lock valve.

[0118] Specifically:

[0119] Quickly open the first three-way valve to the emptying position to check whether the air lock valve is locked. If it is locked, quickly open the second three-way valve to the emptying position and observe the values ​​of the third and fourth pressure gauges to determine the working chamber pressure.

[0120] The values ​​of the third pressure gauge and the fourth pressure gauge represent the working chamber pressure.

[0121] If the working chamber pressure is within ±3% of the set pressure, the performance of the air lock valve is considered qualified;

[0122] If the working chamber pressure is not within ±3% of the set pressure, the performance of the air lock valve is judged to be unqualified.

[0123] When testing the performance of a single-channel airlock valve, the connection method is as follows Figure 5 As shown, the detection method specifically comprises the following steps:

[0124] Step 1: Connect the air lock valve and the gas source tank to the air lock valve detection device;

[0125] Specifically: connect the single-channel air lock valve to the first air inlet interface, the air source interface, and the first air outlet interface; connect the air source tank to the air source tank interface: close the second air inlet interface, and close the second air outlet interface.

[0126] Step 2: Check the pressure of the gas source tank and confirm that it is within the normal range;

[0127] Specifically, close the first pressure regulating valve and the second pressure regulating valve, set the positions of the first three-way valve and the second three-way valve to the left and right pipeline connected state, open the isolation valve; use a first pressure gauge to detect the pressure value of the gas source tank.

[0128] The function of step 2 is to use the first pressure gauge to detect the pressure value of the gas source tank.

[0129] Step 3: Open the first gas circuit and the second gas circuit to establish normal working air pressure, and open the gas circuit of the gas lock valve;

[0130] Specifically:

[0131] Slowly open the first pressure regulating valve and observe the value of the second pressure gauge until it is close to the value of the first pressure gauge. Then the first and second gas circuits are opened, normal working air pressure is established, and the gas circuit of the gas lock valve is opened.

[0132] Step 4: The gas is injected into the working chamber through the gas lock valve to establish normal working pressure in the working chamber;

[0133] Specifically: slowly open the second pressure gauge regulating valve and observe the pressure value of the third pressure gauge until the pressure value of the third pressure gauge does not exceed the upper limit of the pressure of the working chamber.

[0134] Step 5: Slowly reduce the air inlet pressure of the air source port to check whether the air lock valve can be locked normally. If the air lock valve is locked, monitor the operating pressure of the air lock valve;

[0135] Specifically:

[0136] Slowly reduce the opening of the first pressure regulating valve to check whether the air lock valve can be locked normally. If the air lock valve is locked, record the value of the second pressure gauge;

[0137] If the value of the second pressure gauge meets the set pressure, it is judged that the operating pressure of the air lock valve meets the set pressure.

[0138] This step five simulates the situation where the pressure of the gas source pipeline slowly decreases, detects the air lock valve locking action pressure value, and verifies whether the air lock valve is actuated at the specified pressure value.

[0139] The value of the second pressure gauge represents the operating pressure of the air lock valve.

[0140] If the operating pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0141] If the operating pressure of the air lock valve is not within the above range, the air lock valve is judged to be unqualified;

[0142] Step 6: exhaust the air inlet pressure of the air lock valve and test the sealing performance of the air lock valve;

[0143] Specifically:

[0144] After 3 to 5 minutes, quickly open the second three-way valve to the drain position and observe whether the value changes of the third and fourth pressure gauges are within ±3% of the set pressure;

[0145] The purpose of this step is to monitor the sealing performance of the air lock valve. If the value change of the third pressure gauge is within the specified range, the sealing performance of the air lock valve is good, and an additional step of detection is performed;

[0146] The criteria are:

[0147] If the working chamber pressure of the air lock valve is within ±3% of the set pressure, the next step is executed;

[0148] If the working chamber pressure of the air lock valve is not within the above range, it is judged as unqualified;

[0149] Step 7: Open the first gas circuit, the second gas circuit and the third gas circuit, confirm that the gas lock valve is open, and the gas cavity gas circuit establishes normal working pressure;

[0150] Step 8: Rapidly reduce the air inlet pressure at the air source port to check whether the air lock valve is locked. If so, exhaust the pressure at the two air inlets, observe the working chamber pressure, and determine the airtightness of the air lock valve.

[0151] The purpose of this step is: (1) to simulate the damage of the gas source pipeline, that is, when the gas source pressure value suddenly drops to 0, to test whether the gas lock valve can be locked normally; (2) to test the sealing performance of the gas lock valve.

[0152] Specifically:

[0153] Quickly open the first three-way valve to the drain position and check whether the air lock valve has a locking action. If a locking action occurs, quickly open the second three-way valve to the drain position and observe the value of the third pressure gauge to determine the working chamber pressure.

[0154] The value of the third pressure gauge represents the working chamber pressure.

[0155] If the working chamber pressure is within ±3% of the set pressure, the performance of the air lock valve is considered qualified;

[0156] If the working chamber pressure is not within ±3% of the set pressure, the performance of the air lock valve is judged to be unqualified.

[0157] The above embodiments are only used to help understand the method and core idea of ​​the present invention. It should be noted that, for those skilled in the art, several improvements and modifications can be made to the present invention without departing from the principles of the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

[0158] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. The gas valve lock performance detection device is characterized by: include: A first gas circuit, one end of which is a gas source tank interface, and the other end of which is respectively connected to the second gas circuit and the third gas circuit; A first pressure gauge and an isolation valve are provided on the first gas line; The second gas circuit is provided with a first pressure regulating valve, a second pressure gauge, and a first three-way valve; and a gas source interface is provided at the end of the second gas circuit; The third gas circuit is provided with a second pressure regulating valve and a second three-way valve; the ends of the third gas circuit are provided with a first gas inlet interface and a second gas inlet interface respectively; The first air outlet interface and the second air outlet interface are respectively connected to two chambers of the working chamber through air paths, and different chambers of the working chamber are respectively connected to the third pressure gauge and the fourth pressure gauge.

2. The gas lock valve performance detection device according to claim 1, characterized in that: Also included is a gas source tank, which is connected to the gas source tank interface.

3. The gas lock valve performance detection method is characterized by: The following steps are involved: Step 1: Connect the air lock valve and the gas source tank to the air lock valve detection device; Step 2: Check the pressure of the gas source tank and confirm that it is within the normal range; Step 3: Open the first gas circuit and the second gas circuit to establish normal working air pressure, and open the gas circuit of the gas lock valve; Step 4: The gas is injected into the working chamber through the gas lock valve to establish normal working pressure in the working chamber; Step 5: Slowly reduce the air inlet pressure of the air source port to check whether the air lock valve can be locked normally. If the air lock valve is locked, monitor the operating pressure of the air lock valve; If the operating pressure of the air lock valve is within ±3% of the set pressure, proceed to the next step; If the operating pressure of the air lock valve is not within the above range, the air lock valve is judged to be unqualified; Step 6: exhaust the air inlet pressure of the air lock valve and test the sealing performance of the air lock valve; If the working chamber pressure of the air lock valve is within ±3% of the set pressure, proceed to the next step; If the working chamber pressure of the air lock valve is not within the above range, it is judged as unqualified; Step 7: Open the first gas circuit, the second gas circuit and the third gas circuit, confirm that the gas lock valve is open, and the gas cavity gas circuit establishes normal working pressure; Step 8: Rapidly reduce the air inlet pressure at the air source port to check whether the air lock valve is locked. If so, exhaust the pressure at the two air inlets, observe the working chamber pressure, and determine the airtightness of the air lock valve. If the working chamber pressure is within ±3% of the set pressure, the performance of the air lock valve is considered qualified; If the working chamber pressure is not within ±3% of the set pressure, the performance of the air lock valve is judged to be unqualified.

4. The gas lock valve performance detection method according to claim 3 is characterized in that: If the air lock valve is a dual-channel air lock valve, step one specifically includes: connecting the dual-channel air lock valve to the first air inlet interface, the second air inlet, the air source interface, the first air outlet interface, and the second air outlet interface; connecting the air source tank to the air source tank interface: If the air lock valve is a single-channel air lock valve, step one is specifically: connect the single-channel air lock valve to the first air inlet interface, the air source interface, and the first air outlet interface; connect the air source tank to the air source tank interface: close the second air inlet interface, and close the second air outlet interface.

5. The gas lock valve performance detection method according to claim 3, characterized in that: The step 2 specifically includes: closing the first pressure regulating valve and the second pressure regulating valve, setting the positions of the first three-way valve and the second three-way valve to a state where the left and right pipelines are connected, and opening the isolation valve; and using a first pressure gauge to detect the pressure value of the gas source tank.

6. The gas lock valve performance detection method according to claim 3, characterized in that: The step three is specifically as follows: Slowly open the first pressure regulating valve and observe the value of the second pressure gauge until it is close to the value of the first pressure gauge. Then the first and second gas circuits are opened, normal working air pressure is established, and the gas circuit of the gas lock valve is opened.

7. The gas lock valve performance detection method according to claim 3, characterized in that: If the air lock valve is a dual-channel air lock valve, the step 4 is specifically: slowly open the second pressure gauge regulating valve, and observe the pressure values ​​of the third pressure gauge and the fourth pressure gauge until the pressure values ​​of the third pressure gauge and the fourth pressure gauge do not exceed the upper limit of the pressure of the working chamber; If the air lock valve is a single-channel air lock valve, the step four is specifically: slowly open the second pressure gauge regulating valve, and observe the pressure value of the third pressure gauge until the pressure value of the third pressure gauge does not exceed the upper pressure limit of the working chamber.

8. The gas lock valve performance detection method according to claim 3, characterized in that: The step five is specifically as follows: Slowly reduce the opening of the first pressure regulating valve to check whether the air lock valve can be locked normally. If the air lock valve is locked, record the value of the second pressure gauge; If the value of the second pressure gauge meets the set pressure, it is judged that the operating pressure of the air lock valve meets the set pressure.

9. The gas lock valve performance detection method according to claim 3, characterized in that: If the air lock valve is a dual-channel air lock valve, step six is ​​specifically as follows: Quickly open the second three-way valve to the drain position and observe whether the value changes of the third and fourth pressure gauges are within ±3% of the set pressure; If the air lock valve is a dual-channel air lock valve, step six is ​​specifically as follows: Quickly open the second three-way valve to the drain position and observe whether the value change of the third pressure gauge is within ±3% of the set pressure.

10. The gas lock valve performance detection method according to claim 3, characterized in that: If the air lock valve is a dual-channel air lock valve, step eight is specifically as follows: Quickly open the first three-way valve to the emptying position to check whether the air lock valve is locked. If it is locked, quickly open the second three-way valve to the emptying position and observe the values ​​of the third and fourth pressure gauges to determine the working chamber pressure. If the air lock valve is a dual-channel air lock valve, step eight is specifically as follows: Quickly open the first three-way valve to the drain position and check whether the air lock valve has a locking action. If a locking action occurs, quickly open the second three-way valve to the drain position and observe the value of the third pressure gauge to determine the working chamber pressure.

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