Accelerometer

Abstract

The invention provides an accelerometer, which comprises an outer side coupling structure, a detection structure connected to the outer side coupling structure and an inner side coupling structure, and is characterized in that the detection structure comprises an anchor point connected to the outer side coupling structure, two seesaw structures elastically connected with the anchor point, and a displacement detection assembly; the two seesaw structures are oppositely arranged, and the outer side coupling structure comprises an outer side coupling structure inner ring and an outer side coupling structure outer ring, wherein the outer side coupling structure inner ring is in coupling connection with the outer sides of the two seesaw structures, and the outer side coupling structure outer ring is arranged on the periphery of the outer side coupling structure inner ring in a surrounding mode; the accelerometer is characterized in that the accelerometer also comprises a detection pole plate, and the detection pole plate is fixed at one side, close to the outer side coupling structure, of the inner side coupling structure; the anchor points are uniformly distributed at the central position of the outer side coupling structure, and the inner side coupling structure is distributed around the anchor points. Compared with the prior art, the accelerometer provided by the invention can reduce the process error and improve the robustness of the structure.

Description

[Technical field]

[0001] The invention relates to the technical field of micromechanical structures, and in particular to an accelerometer. [Background technology]

[0002] An accelerometer is a sensor that measures acceleration, a basic physical quantity. Accelerometers usually include mechanical acceleration sensitivity and displacement measurement. Common mechanical acceleration sensitivity uses the test mass that is asymmetric along the rotation axis to drive the torsion spring to rotate around the rotation axis under the action of acceleration, causing the corresponding capacitor plate area of ​​the structure to produce an out-of-plane displacement. By placing capacitor plates in the corresponding capacitor plate area above or below the structure to form a differential capacitor, the acceleration change can be obtained by detecting the capacitance change.

[0003] In the related art, the accelerometer includes a substrate and a detection structure connected to the substrate, the detection structure includes an anchor point fixed on the substrate, a seesaw structure elastically connected to the anchor point, an inner coupling structure coupled to the inner side of the seesaw structure, an outer coupling structure coupled to the outer side of the seesaw structure, and a displacement detection component arranged on the outer coupling structure and the inner coupling structure, the two seesaw structures are arranged opposite to each other, the outer coupling structure includes an outer coupling structure inner ring coupled to the outer sides of the two seesaw structures and an outer coupling structure outer ring surrounded by the outer side of the outer coupling structure inner ring, by dispersing the anchor points on the inner ring of the outer coupling structure.

[0004] However, the above-mentioned anchor points are distributed in the outer coupling structure, so that the anchor points of the overall structure are relatively dispersed, so that the entire structure is greatly affected by stress during processing, the substrate is easily deformed, and its robustness is low.

[0005] Therefore, it is necessary to provide a new accelerometer to solve the above technical problems. [Summary of the invention]

[0006] The object of the present invention is to provide an accelerometer in which an anchor point is placed in the middle of the entire structure, so that the structure is less affected by stress during processing, the process error is smaller, and the structure obtains higher robustness.

[0007] In order to achieve the above-mentioned purpose, an embodiment of the present invention provides an accelerometer, which includes an outer coupling structure, a detection structure connected to the outer coupling structure, and an inner coupling structure, wherein the detection structure includes an anchor point connected to the outer coupling structure, two seesaw structures elastically connected to the anchor point, and a displacement detection component simultaneously arranged on the outer coupling structure and the inner coupling structure; the inner sides of the two seesaw structures are coupled to the inner coupling structure, and the outer sides of the two seesaw structures are coupled to the outer coupling structure; the two seesaw structures are arranged opposite to each other, and the outer coupling structure includes an outer coupling structure inner ring that is coupled to the outer sides of the two seesaw structures respectively, and an outer coupling structure outer ring that is arranged around the outer periphery of the outer coupling structure inner ring; the accelerometer also includes a detection electrode plate, which is fixed to a side of the inner coupling structure close to the outer coupling structure; the anchor points are evenly distributed at the center of the outer coupling structure, and the inner coupling structure is distributed around the anchor points;

[0008] The detection structure also includes a first elastic member connecting the inner ring of the outer coupling structure and the corresponding seesaw structure, a second elastic member connecting the inner ring of the outer coupling structure and the outer ring of the outer coupling structure, and a third elastic member connecting the detection electrode and the corresponding seesaw structure.

[0009] Preferably, the anchor points include four and are evenly distributed at the geometric center of the outer coupling structure.

[0010] Preferably, the multiple positive and negative capacitor plates on the inner ring of the outer coupling structure and the inner coupling structure are arranged alternately.

[0011] Preferably, the inner coupling structure has a plurality of connecting beams, and the inner coupling structure is respectively connected to the two seesaw structures through the connecting beams.

[0012] Preferably, the length direction of the outer coupling structure is defined as the X-axis direction, the width direction of the outer coupling structure is defined as the Y-axis direction, and the thickness direction of the outer coupling structure is defined as the Z-axis direction; the two seesaw structures are symmetrically arranged on the outer coupling structure about the Y-axis; the displacement detection component includes a plurality of X-axis acceleration detection units and a plurality of Y-axis acceleration detection units respectively arranged on the outer coupling structure, and a plurality of Z-axis acceleration detection units arranged on the inner ring of the outer coupling structure and the inner coupling structure; the Y-axis acceleration detection unit is arranged adjacent to the X-axis acceleration detection unit;

[0013] The plurality of X-axis acceleration detection units are symmetrically distributed about the Y-axis, and the plurality of X-axis acceleration detection units are symmetrically distributed about the X-axis;

[0014] The plurality of Y-axis acceleration detection units are symmetrically distributed about the X-axis, and the plurality of Y-axis acceleration detection units are symmetrically distributed about the Y-axis;

[0015] The plurality of Z-axis acceleration detection units are centrally symmetrically distributed about the coordinate origin.

[0016] Preferably, the detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate and a tenth detection plate which are arranged in an annular manner and at intervals on the inner ring of the outer coupling structure and the inner coupling structure, and the first detection plate, the second detection plate, the third detection plate, the fourth detection plate and the fifth detection plate are respectively symmetrically distributed with the sixth detection plate, the seventh detection plate, the eighth detection plate, the ninth detection plate and the tenth detection plate about the X-axis;

[0017] The capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board and the fifth detection board are arranged in a positive and negative staggered manner;

[0018] The capacitor plates on the sixth detection board, the seventh detection board, the eighth detection board, the ninth detection board and the tenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board and the fifth detection board.

[0019] Preferably, the detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate, a tenth detection plate, an eleventh detection plate, a twelfth detection plate, a thirteenth detection plate, a fourteenth detection plate, a fifteenth detection plate and a sixteenth detection plate, which are arranged in a ring-shaped interval on the inner coupling structure; the first detection plate, the second detection plate, the third detection plate, the fourth detection plate, the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate are respectively symmetrically distributed with the ninth detection plate, the tenth detection plate, the eleventh detection plate, the twelfth detection plate, the thirteenth detection plate, the fourteenth detection plate, the fifteenth detection plate and the sixteenth detection plate about the X-axis;

[0020] The capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board are arranged in a positive and negative alternating manner;

[0021] The capacitor plates of the ninth detection board, the tenth detection board, the eleventh detection board, the twelfth detection board, the thirteenth detection board, the fourteenth detection board, the fifteenth detection board and the sixteenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board.

[0022] Preferably, the detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate and an eighth detection plate which are arranged in an annular manner and spaced apart on the inner ring of the outer coupling structure and the inner coupling structure; the first detection plate, the second detection plate, the third detection plate and the fourth detection plate are symmetrically distributed with the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate about the X-axis respectively;

[0023] The capacitor plates on the first detection board, the second detection board, the third detection board and the fourth detection board are arranged in a positive and negative staggered manner;

[0024] The capacitor plates of the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board and the fourth detection board.

[0025] Preferably, the detection plate comprises a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate and a sixth detection plate which are arranged in an annular manner at intervals on the inner ring of the outer coupling structure and the inner coupling structure; the first detection plate, the second detection plate and the third detection plate are respectively symmetrically distributed with the fourth detection plate, the fifth detection plate and the sixth detection plate about the X-axis;

[0026] The capacitor plates on the first detection board, the second detection board and the third detection board are arranged in a positive and negative staggered manner;

[0027] The fourth detection plate, the fifth detection plate and the sixth detection plate are respectively arranged opposite to the capacitor plates on the first detection plate, the second detection plate and the third detection plate.

[0028] Preferably, the detection plate comprises a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate, a tenth detection plate, an eleventh detection plate, a twelfth detection plate, a thirteenth detection plate, a fourteenth detection plate, a fifteenth detection plate and a sixteenth detection plate which are arranged side by side on the inner coupling structure along the direction of the X-axis; the first detection plate, the second detection plate, the third detection plate, the fourth detection plate, the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate are respectively symmetrically distributed with the ninth detection plate, the tenth detection plate, the eleventh detection plate, the twelfth detection plate, the thirteenth detection plate, the fourteenth detection plate, the fifteenth detection plate and the sixteenth detection plate about the X-axis;

[0029] The capacitor plates on the first detection board and the eighth detection board are the same, and the capacitor plates on the two adjacent detection boards between the second detection board and the seventh detection board are the same, and are arranged in a positive and negative staggered manner with the capacitor plates on the first detection board and the eighth detection board respectively;

[0030] The ninth detection board, the tenth detection board, the eleventh detection board, the twelfth detection board, the thirteenth detection board, the fourteenth detection board, the fifteenth detection board and the sixteenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board.

[0031] Compared with the related art, the accelerometer of the present invention arranges two seesaw structures relatively, and the outer coupling structure includes an outer coupling structure inner ring connected to the outer sides of the two seesaw structures and an outer coupling structure outer ring arranged on the outer side of the outer coupling structure inner ring; the accelerometer also includes a detection electrode plate, which is fixed to the side of the inner coupling structure close to the outer coupling structure; the anchor points are evenly distributed at the center position of the outer coupling structure, and the inner coupling structure is distributed in a ring shape around the anchor points, so that the structure is less affected by stress during processing and the process error is smaller; at the same time, when the outer coupling structure is deformed under the influence of stress, the positive and negative capacitor plates have similar deformations in the initial state (not affected by acceleration), so that their capacitance offset is smaller, and the overall structure obtains higher robustness; the detection structure also includes a first elastic member connecting the inner ring of the outer coupling structure and the corresponding seesaw structure, a second elastic member connecting the inner ring of the outer coupling structure and the outer ring of the outer coupling structure, and a third elastic member connecting the detection electrode plate and the corresponding seesaw structure; the overall detection effect is improved by setting a plurality of elastic members.

Brief Description of the Drawings

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work, among which:

[0033] Figure 1 A schematic diagram of the structure of an electronic device provided in Embodiment 1 of the present invention;

[0034] Figure 2 This is a schematic diagram of the structure of the Z-axis detection electrode plate according to the first embodiment of the present invention;

[0035] Figure 3 Schematic diagram of the X-axis detection mode of the first embodiment of the present invention;

[0036] Figure 4 Schematic diagram of the Y-axis detection mode of the first embodiment of the present invention;

[0037] Figure 5 Schematic diagram of the Z-axis detection mode of the first embodiment of the present invention;

[0038] Figure 6 A schematic diagram of the structure of an electronic device provided in Embodiment 2 of the present invention;

[0039] Figure 7 It is a structural schematic diagram of a Z-axis detection electrode plate according to a second embodiment of the present invention;

[0040] Figure 8 Schematic diagram of the X-axis detection mode of the second embodiment of the present invention;

[0041] Fig. 9 Schematic diagram of the Y-axis detection mode of the second embodiment of the present invention;

[0042] Fig.10 Schematic diagram of the Z-axis detection mode of the second embodiment of the present invention;

[0043] Fig.11 A schematic diagram of the structure of an electronic device provided in Embodiment 3 of the present invention;

[0044] Fig.12 This is a schematic diagram of the structure of the Z-axis detection electrode plate of the third embodiment of the present invention;

[0045] Fig.13 Schematic diagram of the X-axis detection mode of the third embodiment of the present invention;

[0046] Fig.14 Schematic diagram of the Y-axis detection mode of the third embodiment of the present invention;

[0047] Fig.15 Schematic diagram of the Z-axis detection mode of the third embodiment of the present invention;

[0048] Fig.16 A schematic diagram of the structure of an electronic device provided in Embodiment 4 of the present invention;

[0049] Fig.17 Schematic diagram of the structure of the Z-axis detection electrode plate of the fourth embodiment of the present invention;

[0050] Fig.18 Schematic diagram of the X-axis detection mode of the fourth embodiment of the present invention;

[0051] Fig.19 Schematic diagram of the Y-axis detection mode of the fourth embodiment of the present invention;

[0052] Fig. 20 Schematic diagram of the Z-axis detection mode of the fourth embodiment of the present invention;

[0053] Fig.21 A schematic diagram of the structure of an electronic device provided in Embodiment 5 of the present invention;

[0054] Fig. 22 This is a schematic diagram of the structure of the Z-axis detection electrode plate of the fifth embodiment of the present invention;

[0055] Fig.23 Schematic diagram of the X-axis detection mode of the fifth embodiment of the present invention;

[0056] Fig.24 Schematic diagram of the Y-axis detection mode of the fifth embodiment of the present invention;

[0057] Fig.25 Schematic diagram of the Z-axis detection mode of the fifth embodiment of the present invention;

[0058] Fig.26 Schematic diagram of the structure of an XZ dual-axis acceleration detection unit according to the second embodiment of the present invention;

[0059] Fig. 27 for Fig.26 Schematic diagram of the X-axis detection mode;

[0060] Fig.28 for Fig.26 Schematic diagram of the Z-axis detection mode;

[0061] Fig.29 Schematic diagram of the structure of a YZ dual-axis acceleration detection unit according to the second embodiment of the present invention;

[0062] Fig.30 for Fig.29 Schematic diagram of the Y-axis detection mode;

[0063] Fig.31 for Fig.29 Schematic diagram of the Z-axis detection mode.

[0064] In the figure, 100, accelerometer, 1, center line, 2, detection structure, 21, anchor point, 22, seesaw structure, 23, inner coupling structure, 24, outer coupling structure, 241, inner ring of outer coupling structure, 242, outer ring of outer coupling structure, 25, displacement detection component, 251, X-axis acceleration detection unit, 252, Y-axis acceleration detection unit, 253, Z-axis acceleration detection unit, 26, detection plate, 261', first detection plate, 262', second detection plate, 263', third detection plate Board, 264', fourth test board, 265', fifth test board, 266', sixth test board, 267', seventh test board, 268', eighth test board, 269', ninth test board, 2610', tenth test board, 261", first test board, 262", second test board, 263", third test board, 264", fourth test board, 265", fifth test board, 266", sixth test board, 267", seventh test board, 268", eighth test board, 269", ninth test board , 2610", the tenth test board, 2611", the eleventh test board, 2612", the twelfth test board, 2613", the thirteenth test board, 2614", the fourteenth test board, 2615", the fifteenth test board, 2616", the sixteenth test board, 261"', the first test board, 262"', the second test board, 263"', the third test board, 264"', the fourth test board, 265"', the fifth test board, 266'", the sixth test board, 2615, the first test board, 2625 , the second inspection plate, 2635, the third inspection plate, 2645, the fourth inspection plate, 2655, the fifth inspection plate, 2665, the sixth inspection plate, 2675, the seventh inspection plate, 2685, the eighth inspection plate, 2695, the ninth inspection plate, 26105, the tenth inspection plate, 26115, the eleventh inspection plate, 26125, the twelfth inspection plate, 26135, the thirteenth inspection plate, 26145, the fourteenth inspection plate, 3, the first elastic member, 4, the second elastic member, 5, the third elastic member, 6, the connecting beam. [Specific implementation method]

[0065] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0066] Embodiment 1

[0067] See also Figure 1-Figure 2 As shown, an embodiment of the present invention provides an accelerometer 100, which includes an outer coupling structure 24 connected to a detection structure 2 and an inner coupling structure 23, wherein the detection structure 2 includes an anchor point 21 connected to the outer coupling structure 24, two seesaw structures 22 elastically connected to the anchor point 21, and a displacement detection component 25 disposed on both the outer coupling structure 24 and the inner coupling structure 23; the inner sides of the two seesaw structures 22 are coupled to the inner coupling structure 23, and the outer sides of the two seesaw structures 22 are coupled to the outer coupling structure 23. Structure 24; the two seesaw structures 22 are arranged oppositely, the outer coupling structure 24 includes an outer coupling structure inner ring 241 coupled to the outer sides of the two seesaw structures 22 and an outer coupling structure outer ring 242 arranged around the outer periphery of the outer coupling structure inner ring 241; the accelerometer 100 also includes a detection plate 26, the detection plate 26 is fixed to the inner coupling structure 23 on one side close to the outer coupling structure 24; the anchor point 21 is evenly distributed at the center of the outer coupling structure 24, and the inner coupling structure 23 is distributed in a ring around the anchor point 21. The structure is less affected by stress during processing and has a smaller process error. At the same time, the outer coupling structure 24 and the inner coupling structure 23 are distributed in a 0-360° ring around the anchor point 21, so that when the outer coupling structure 24 of the structure is deformed under the influence of stress, the positive and negative capacitor plates have similar deformations in the initial state (not subject to acceleration), so that the capacitance offset is small, and the structure obtains higher robustness.

[0068] In this embodiment, the outer coupling structure 24 is in a rectangular structure as a whole, and the anchor points 21 are evenly distributed at the geometric center of the outer coupling structure 24 .

[0069] The detection structure 2 also includes a first elastic member 3 connecting the inner ring 241 of the outer coupling structure and the corresponding seesaw structure 22, a second elastic member 4 connecting the inner ring 241 of the outer coupling structure and the outer ring 242 of the outer coupling structure, and a third elastic member 5 connecting the detection electrode 26 and the corresponding seesaw structure 22. The inner ring 241 of the outer coupling structure is connected to the corresponding seesaw structure 22 through the first elastic member 3, so that the detection mass block of the outer coupling structure 24 has the ability to move under the acceleration of the X axis. The outer ring 242 of the outer coupling structure is connected to the inner ring 241 of the outer coupling structure through the second elastic member 4, so that the detection mass block of the outer ring 242 of the outer coupling structure has the ability to move under the acceleration of the Y axis. This elastic connection design of the XY axis within the inner and outer ring dividing surface improves the rotational modal stiffness of the inspection mass of the outer coupling structure 24, improves the cross-suppression ratio, and reduces cross-coupling. The detection electrode plate 26 is connected to the corresponding seesaw structure 22 via the third elastic member 5, so that the capacitance offset of the detection electrode plate 26 is small and the structure obtains higher robustness.

[0070] In this embodiment, the first elastic member 3 is an X-axis single-degree-of-freedom spring, the second elastic member 4 is a Y-axis single-degree-of-freedom spring, and the third elastic member 5 is a Z-axis single-degree-of-freedom spring. Among them, the first elastic member 3, the second elastic member 4 and the third elastic member 5 take torsion springs as an example, and the accelerometer 100 is a symmetrical structure, that is, the accelerometer 100 is symmetrical on both sides of the center line 1, and the two seesaw structures 22 are respectively located on both sides of the center line 1. The end of the seesaw structure 22 close to the center line 1 is connected to the inner coupling structure 23, and the end of the seesaw structure 22 away from the center line 1 is connected to the X-axis single-degree-of-freedom spring. By sharing the same sensitive mass in the three detection directions of the X-axis, Y-axis and Z-axis, the mass of the sensitive structure is increased in a limited space, and the sensitivity of the structure is improved.

[0071] In this embodiment, the anchor points 21 include 4 and are evenly distributed at the geometric center of the outer coupling structure 24. The Z-axis single-degree-of-freedom spring is connected to the seesaw structure 22 through the anchor point 21. There are 4 Z-axis single-degree-of-freedom springs, and one end of each Z-axis single-degree-of-freedom spring close to the center is connected to one of its anchor points 21, and the other end of the Z-axis single-degree-of-freedom spring is connected to the corresponding seesaw structure 22. Each anchor point 21 is arranged between the opposite ends of the corresponding seesaw structure 22, so that the two seesaw structures 22 rotate around their respective rotation axes (i.e., the rotation axes composed of the third elastic members 5 on both sides of the same seesaw structure 22 and the anchor points 21), and are symmetrical relative to the center line 1, which to a certain extent inhibits the rotation of the seesaw structure 22 around the Z axis on the plane, and reduces the cross-coupling of the structure. It should be noted that in some other embodiments, the third elastic member 5 can also be a tension spring or other types of elastic structures, which are not particularly limited here, as long as it can meet the elastic connection between the seesaw structure 22 and the anchor point 21.

[0072] In this embodiment, the detection electrode plate 26 is arranged alternately with the multiple positive and negative capacitor plates on the outer coupling structure 24. When the outer coupling structure 24 is deformed under the influence of stress, the positive and negative capacitor plates are deformed into a bowl shape due to the presence of the anchor point 21 located between the outer coupling structure 24 and the active structure; through the staggered arrangement, the positive and negative capacitor plates have similar deformations in the initial state (not subject to acceleration), so that their capacitance offset is small.

[0073] In this embodiment, the inner coupling structure 23 has a plurality of connecting beams 6, and the inner coupling structure 23 is respectively connected to the connecting beams 6 of the two seesaw structures 22 through the connecting beams 6. The inner coupling structure 23 has a stronger constraint on the seesaw structure 22, improves the stiffness of the parasitic modes such as rotation of the outer coupling structure 24, increases the cross-suppression ratio of the structure, and reduces the cross-coupling of the accelerometer 100.

[0074] In this embodiment, the length direction of the outer coupling structure 24 is defined as the X-axis direction, the width direction of the outer coupling structure 24 is defined as the Y-axis direction, and the thickness direction of the outer coupling structure 24 is defined as the Z-axis direction; the two seesaw structures 22 are symmetrically arranged on the outer coupling structure 24 about the Y-axis; the displacement detection component 25 includes a plurality of X-axis acceleration detection units 251 and a plurality of Y-axis acceleration detection units 252 respectively arranged on the outer coupling structure 24, and a plurality of Z-axis acceleration detection units 253 arranged on the inner ring 241 of the outer coupling structure and the inner coupling structure 23. The Y-axis acceleration detection unit 252 is arranged adjacent to the X-axis acceleration detection unit 251.

[0075] The plurality of X-axis acceleration detection units 251 are symmetrically distributed about the Y-axis, and the plurality of X-axis acceleration detection units 251 are symmetrically distributed about the X-axis. The X-axis acceleration detection unit 251 includes a plurality of detection capacitors arranged side by side along the Y-axis.

[0076] The plurality of Y-axis acceleration detection units 252 are symmetrically distributed about the X-axis, and the plurality of Y-axis acceleration detection units 252 are symmetrically distributed about the Y-axis. The Y-axis acceleration detection unit 252 includes a plurality of detection capacitors arranged side by side along the X-axis.

[0077] The multiple Z-axis acceleration detection units 253 are centrally symmetrically distributed about the coordinate origin.

[0078] The X-axis acceleration detection unit 251 is disposed on two sides connected to the same seesaw structure 22 .

[0079] In this embodiment, the detection plate 26 includes a first detection plate 261', a second detection plate 262', a third detection plate 263', a fourth detection plate 264', a fifth detection plate 265', a sixth detection plate 266', a seventh detection plate 267', an eighth detection plate 268', a ninth detection plate 269' and a tenth detection plate 2610' which are arranged in an annular manner and spaced apart from each other on the inner ring 241 of the outer coupling structure and the inner coupling structure 23. The first detection plate 261', the second detection plate 262', the third detection plate 263', the fourth detection plate 264' and the fifth detection plate 265' are symmetrically distributed with the sixth detection plate 266', the seventh detection plate 267', the eighth detection plate 268', the ninth detection plate 269' and the tenth detection plate 2610' about the X axis.

[0080] The capacitor plates on the first detection board 261', the second detection board 262', the third detection board 263', the fourth detection board 264' and the fifth detection board 265' are arranged in a positive and negative staggered manner;

[0081] The capacitor plates on the sixth detection board 266', the seventh detection board 267', the eighth detection board 268', the ninth detection board 269' and the tenth detection board 2610' are respectively arranged opposite to the capacitor plates on the first detection board 261', the second detection board 262', the third detection board 263', the fourth detection board 264' and the fifth detection board 265'.

[0082] like Figure 3-Figure 5As shown, the corresponding X-axis, Y-axis and Z-axis detection modes are shown. Among them, the entire accelerometer 100 is supported by two relatively arranged seesaw structures 22, the inner coupling structure 23 couples the inner sides of the two seesaw structures 22, and the outer coupling structure 24 couples the outer sides of the two seesaw structures 22, so that the rotation of the two seesaw structures 22 around their respective rotation axes is symmetrical relative to the center line 1, which to a certain extent suppresses the rotation of the seesaw structure 22 around the Z axis on the plane, and reduces the cross-coupling of the structure. The test mass of the accelerometer 100 is distributed on the coupling structure, but is mainly concentrated on the outer coupling structure 24. When the out-of-plane Z-axis acceleration arrives, the inner and outer coupling structures on both sides of the seesaw structure 22 move differentially relative to the outer coupling structure 24 and the cavity cover. As shown Figure 2 The detection masses corresponding to all the Z+ and Z- areas shown (where positive and negative are interchangeable) move in opposite directions in the Z-axis direction, resulting in a differential change in the Z-axis detection capacitance set between the inner and outer coupling structures 24 and the corresponding outer coupling structure 24 or the cavity cover, thereby detecting the Z-axis acceleration by detecting the capacitance change.

[0083] Specifically, the anchor point 21 is located in the middle of the entire structure, so that the structure is less affected by stress during processing and has smaller process errors. The in-plane displacement detection component 25 detects the translation caused by the in-plane acceleration caused by the movement of the inspection mass in the X / Y direction, and the out-of-plane capacitance detection plate 26 detects the rotation of the seesaw structure 22 caused by the movement of the inspection mass in the Z direction caused by the out-of-plane acceleration.

[0084] In this embodiment, Z+ and Z- are the corresponding capacitor plates of the outer coupling structure 24 and the detection plate 26. By comparing the detection plate 26 of the Z axis and the corresponding capacitor plates on the outer coupling structure 24 or the CAP (cavity cover) Figure 2 As shown), Z+ and Z- are symmetrically distributed along axis 1, axis 2, axis 3, and axis 4, and axis 1, axis 2, axis 3, and axis 4 intersect near the center origin of the entire structure. This arrangement can reduce the initial capacitance offset of the Z axis.

[0085] Embodiment 2

[0086] See also Figure 6-Figure 10As shown, on the basis of the first embodiment, the detection plate 26 includes a first detection plate 261", a second detection plate 262", a third detection plate 263", a fourth detection plate 264", a fifth detection plate 265", a sixth detection plate 266", a seventh detection plate 267", an eighth detection plate 268", a ninth detection plate 269", a tenth detection plate 2610", an eleventh detection plate 2611", a twelfth detection plate 2612", a thirteenth detection plate 2613", a fourteenth detection plate 2614", a fifteenth detection plate 2615", and a sixteenth detection plate the first detection board 261", the second detection board 262", the third detection board 263", the fourth detection board 264", the fifth detection board 265", the sixth detection board 266", the seventh detection board 267" and the eighth detection board 268" are symmetrically distributed with the ninth detection board 269", the tenth detection board 2610", the eleventh detection board 2611", the twelfth detection board 2612", the thirteenth detection board 2613", the fourteenth detection board 2614", the fifteenth detection board 2615" and the sixteenth detection board 2616" about the X axis;

[0087] The capacitor plates on the first detection board 261", the second detection board 262", the third detection board 263", the fourth detection board 264", the fifth detection board 265", the sixth detection board 266", the seventh detection board 267" and the eighth detection board 268" are arranged in a positive and negative alternating pattern;

[0088] The capacitor plates of the ninth detection board 269", the tenth detection board 2610", the eleventh detection board 2611", the twelfth detection board 2612", the thirteenth detection board 2613", the fourteenth detection board 2614", the fifteenth detection board 2615" and the sixteenth detection board 2616" are respectively arranged opposite to the capacitor plates on the first detection board 261", the second detection board 262", the third detection board 263", the fourth detection board 264", the fifth detection board 265", the sixth detection board 266", the seventh detection board 267" and the eighth detection board 268".

[0089] Specifically, the detection electrode plate 26 of the Z axis and the corresponding capacitor electrode plate (such as Figure 7As shown in the figure, Z1+ and Z1- are completely symmetrically distributed along axis 1, Z2+ and Z2- are completely symmetrically distributed along axis 2, Z3+ and Z3- are completely symmetrically distributed along axis 4 (Y axis), all positive and negative capacitor plates are completely symmetrically distributed along axis 3 (X axis), and axis 1, axis 2, axis 3, and axis 4 intersect at the center origin of the entire structure. This arrangement further reduces the initial capacitance offset of the Z axis.

[0090] Among them, Figure 26-Figure 28 As shown, Fig.26 is an X / Z dual-axis accelerometer derived from this embodiment, Fig. 27 , 28 They are the X-axis and Z-axis detection modes respectively; they reflect the detection modes of the X-axis and Z-axis; Figure 29-Figure 31 As shown, Fig.29 is a Y / Z dual-axis accelerometer derived from this embodiment, Fig.30 , 31 They are the Y-axis and Z-axis detection modes respectively, reflecting the detection modes of the Y-axis and Z-axis.

[0091] Embodiment 3

[0092] See also Figure 11-Figure 12 As shown, in this embodiment, the detection plate 26 includes a first detection plate 261"', a second detection plate 262"', a third detection plate 263"', a fourth detection plate 264"', a fifth detection plate 265"', a sixth detection plate 266"', a seventh detection plate 267"' and an eighth detection plate 268"' which are arranged in an annular manner and spaced apart from each other on the inner ring 241 of the outer coupling structure and the inner coupling structure 23; the first detection plate 261"', the second detection plate 262"', the third detection plate 263"' and the fourth detection plate 264"' are symmetrically distributed with the fifth detection plate 265"', the sixth detection plate 266"', the seventh detection plate 267"' and the eighth detection plate 268"' about the X-axis;

[0093] The capacitor plates on the first detection board 261'', the second detection board 262'', the third detection board 263'' and the fourth detection board 264'' are arranged in a positive and negative staggered manner;

[0094] The capacitor plates of the fifth detection board 265'', the sixth detection board 266'', the seventh detection board 267'' and the eighth detection board 268'' are respectively arranged opposite to the capacitor plates on the first detection board 261'', the second detection board 262'', the third detection board 263'' and the fourth detection board 264''.

[0095] Specifically, the detection electrode plate 26 of the Z axis and the corresponding capacitor electrode plate (such as Fig.12 As shown in the figure, it is symmetrical along the X (axis 3) and Y (axis 4), and all Z+ and Z- capacitor plates are completely symmetrically distributed along axis 1, axis 2, axis 3, and axis 4, and axis 1, axis 2, axis 3, and axis 4 intersect at the center origin of the entire structure. In addition, the distance between the center of mass of all Z+ and Z- capacitor plates and the center origin is equal. Figure 13-Figure 15 As shown in the figure, the corresponding X-axis, Y-axis and Z-axis detection modes show that this arrangement further reduces the initial capacitance offset of the Z-axis.

[0096] Embodiment 4

[0097] See also Figure 16-Figure 20 As shown, in this embodiment, the detection plate 26 includes a first detection plate 261", a second detection plate 262", a third detection plate 263", a fourth detection plate 264", a fifth detection plate 265" and a sixth detection plate 266" arranged in an annular manner at intervals on the inner ring 241 of the outer coupling structure and the inner coupling structure 23; the first detection plate 261", the second detection plate 262" and the third detection plate 263" are symmetrically distributed with the fourth detection plate 264", the fifth detection plate 265" and the sixth detection plate 266" about the X axis;

[0098] The capacitor plates on the first detection board 261", the second detection board 262" and the third detection board 263" are arranged in a positive and negative alternating pattern;

[0099] The fourth detection plate 264", the fifth detection plate 265" and the sixth detection plate 266" are respectively arranged opposite to the capacitor plates on the first detection plate 261", the second detection plate 262" and the third detection plate 263"".

[0100] Specifically, the detection electrode plate 26 of the Z axis and the corresponding capacitor electrode plate (such as Fig.17 As shown in the figure, Z1- / Z6+, Z2+ / Z5-, and Z3- / Z4+ are along axis 3 (X-axis symmetry), Z1- and Z4+ are rotationally symmetric in the quadrant formed by axis 2 and axis 3, Z3- and Z6+ are rotationally symmetric in the quadrant formed by axis 1 and axis 3, and axis 1, axis 2, and axis 3 intersect at the center origin of the entire structure. This arrangement further reduces the initial capacitance offset of the Z-axis.

[0101] Embodiment 5

[0102] See also Figure 21-22As shown, in this embodiment, the detection plate 26 includes a first detection plate 2615, a second detection plate 2625, a third detection plate 2635, a fourth detection plate 2645, a fifth detection plate 2655, a sixth detection plate 2665, a seventh detection plate 2675, an eighth detection plate 2685, a ninth detection plate 2695, a tenth detection plate 26105, an eleventh detection plate 26115, a twelfth detection plate 26125, a thirteenth detection plate 26135, a fourteenth detection plate 26145, a fifteenth detection plate 26155 and a tenth detection plate six detection plates 26165; the first detection plate 2615, the second detection plate 2625, the third detection plate 2635, the fourth detection plate 2645, the fifth detection plate 2655, the sixth detection plate 2665, the seventh detection plate 2675 and the eighth detection plate 2685 are respectively symmetrically distributed with the ninth detection plate 2695, the tenth detection plate 26105, the eleventh detection plate 26115, the twelfth detection plate 26125, the thirteenth detection plate 26135, the fourteenth detection plate 26145, the fifteenth detection plate 26155 and the sixteenth detection plate 26165 about the X axis;

[0103] The capacitor plates on the first detection board 2615 and the eighth detection board 2685 are the same, and the capacitor plates on the two adjacent detection boards between the second detection board 2625 to the seventh detection board 2675 are the same, and are arranged in a positive and negative staggered manner with the capacitor plates on the first detection board 2615 and the eighth detection board 2685 respectively; the capacitor plates on the fourth detection board 2645, the fifth detection board 2655 and the sixth detection board 2665 are arranged in a positive and negative staggered manner; the capacitor plates on the adjacent third detection board 2635 and the fourth detection board 2645 are arranged in the same manner;

[0104] The capacitor plates of the ninth detection board 2695, the tenth detection board 26105, the eleventh detection board 26115, the twelfth detection board 26125, the thirteenth detection board 26135, the fourteenth detection board 26145, the fifteenth detection board 26155 and the sixteenth detection board 26165 are respectively arranged opposite to the capacitor plates on the first detection board 2615, the second detection board 2625, the third detection board 2635, the fourth detection board 2645, the fifth detection board 2655, the sixth detection board 2665, the seventh detection board 2675 and the eighth detection board 2685.

[0105] Specifically, the detection electrode plate 26 of the Z axis and the corresponding capacitor electrode plate (such as Fig. 22As shown). Along axis 3 (X-axis), the distance between Z1+~Z4+ and axis 3 is equal to the distance between Z1-~Z4- and axis 3, and the distance between Z5+~Z8+ and axis 3 is equal to the distance between Z5-~Z8- and axis 3. Therefore, when the structure rotates or warps along axis 3, the deformations of the positive and negative capacitor plates cancel each other out, so the capacitance offset is zero. Along axis 4 (Y-axis), the distance between Z1+~Z2+ and Z5+~Z6+ and axis 4 is equal to the distance between Z1-~Z2- and Z5-~Z6-, and the distance between Z3+~Z4+ and Z7+~Z8+ and axis 4 is equal to the distance between Z1-~Z2- and Z5-~Z6-, so when the structure rotates or warps along axis 4, the deformations of the positive and negative capacitor plates cancel each other out, so the capacitance offset is zero. As shown Figure 23-Figure 25 As shown in the figure, the corresponding X-axis, Y-axis and Z-axis detection modes show that this arrangement further reduces the initial capacitance offset of the Z-axis.

[0106] Compared with the related art, the accelerometer of the present invention arranges two seesaw structures relatively, and the outer coupling structure includes an outer coupling structure inner ring connected to the outer sides of the two seesaw structures and an outer coupling structure outer ring arranged on the outer side of the outer coupling structure inner ring; the accelerometer also includes a detection electrode plate, which is fixed to the side of the inner coupling structure close to the outer coupling structure; the anchor points are evenly distributed at the center position of the outer coupling structure, and the inner coupling structure is distributed in a ring shape around the anchor points, so that the structure is less affected by stress during processing and the process error is smaller; at the same time, when the outer coupling structure is deformed under the influence of stress, the positive and negative capacitor plates have similar deformations in the initial state (not affected by acceleration), so that their capacitance offset is smaller, and the overall structure obtains higher robustness; the detection structure also includes a first elastic member connecting the inner ring of the outer coupling structure and the corresponding seesaw structure, a second elastic member connecting the inner ring of the outer coupling structure and the outer ring of the outer coupling structure, and a third elastic member connecting the detection electrode plate and the corresponding seesaw structure; the overall detection effect is improved by setting a plurality of elastic members.

[0107] The above description is only an implementation mode of the present invention. It should be pointed out that, for ordinary technicians in this field, improvements can be made without departing from the creative concept of the present invention, but these all belong to the protection scope of the present invention.

Claims

1. An accelerometer, comprising an outer coupling structure, a detection structure connected to the outer coupling structure, and an inner coupling structure, wherein the detection structure comprises an anchor point connected to the outer coupling structure, two seesaw structures elastically connected to the anchor point, and a displacement detection component simultaneously arranged on the outer coupling structure and the inner coupling structure; the inner sides of the two seesaw structures are coupled to the inner coupling structure, and the outer sides of the two seesaw structures are coupled to the outer coupling structure; the two seesaw structures are arranged opposite to each other, and the outer coupling structure comprises an outer coupling structure inner ring respectively coupled to the outer sides of the two seesaw structures and an outer coupling structure outer ring arranged around the outer periphery of the outer coupling structure inner ring; characterized in that The accelerometer further comprises a detection electrode plate, which is fixed to a side of the inner coupling structure close to the outer coupling structure; the anchor points are evenly distributed at the center of the outer coupling structure, and the inner coupling structure is distributed around the anchor points; The detection structure also includes a first elastic member connecting the inner ring of the outer coupling structure and the corresponding seesaw structure, a second elastic member connecting the inner ring of the outer coupling structure and the outer ring of the outer coupling structure, and a third elastic member connecting the detection electrode and the corresponding seesaw structure.

2. The accelerometer according to claim 1, characterized in that The anchor points include four and are evenly distributed at the geometric center of the outer coupling structure.

3. The accelerometer according to claim 1, characterized in that The multiple positive and negative capacitor plates on the inner ring of the outer coupling structure and the inner coupling structure are arranged alternately.

4. The accelerometer according to claim 1, characterized in that The inner coupling structure has a plurality of connection beams, and the inner coupling structure is respectively connected to the two seesaw structures through the connection beams.

5. The accelerometer according to claim 1, characterized in that The length direction of the outer coupling structure is defined as the X-axis direction, the width direction of the outer coupling structure is defined as the Y-axis direction, and the thickness direction of the outer coupling structure is defined as the Z-axis direction; the two seesaw structures are symmetrically arranged on the outer coupling structure about the Y-axis; the displacement detection component includes a plurality of X-axis acceleration detection units and a plurality of Y-axis acceleration detection units respectively arranged on the outer coupling structure, and a plurality of Z-axis acceleration detection units arranged on the inner ring of the outer coupling structure and the inner coupling structure; the Y-axis acceleration detection unit is arranged adjacent to the X-axis acceleration detection unit; The plurality of X-axis acceleration detection units are symmetrically distributed about the Y-axis, and the plurality of X-axis acceleration detection units are symmetrically distributed about the X-axis; The plurality of Y-axis acceleration detection units are symmetrically distributed about the X-axis, and the plurality of Y-axis acceleration detection units are symmetrically distributed about the Y-axis; The plurality of Z-axis acceleration detection units are centrally symmetrically distributed about the coordinate origin.

6. The accelerometer according to claim 5, characterized in that The detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate and a tenth detection plate which are arranged in an annular manner and at intervals on the inner ring of the outer coupling structure and the inner coupling structure, wherein the first detection plate, the second detection plate, the third detection plate, the fourth detection plate and the fifth detection plate are symmetrically distributed with the sixth detection plate, the seventh detection plate, the eighth detection plate, the ninth detection plate and the tenth detection plate about the X axis; The capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board and the fifth detection board are arranged in a positive and negative staggered manner; The capacitor plates on the sixth detection board, the seventh detection board, the eighth detection board, the ninth detection board and the tenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board and the fifth detection board.

7. The accelerometer according to claim 5, characterized in that The detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate, a tenth detection plate, an eleventh detection plate, a twelfth detection plate, a thirteenth detection plate, a fourteenth detection plate, a fifteenth detection plate and a sixteenth detection plate, which are arranged in an annular manner and spaced apart at intervals on the inner ring of the outer coupling structure and the inner coupling structure; the first detection plate, the second detection plate, the third detection plate, the fourth detection plate, the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate are symmetrically distributed with the ninth detection plate, the tenth detection plate, the eleventh detection plate, the twelfth detection plate, the thirteenth detection plate, the fourteenth detection plate, the fifteenth detection plate and the sixteenth detection plate about the X axis respectively; The capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board are arranged in a positive and negative alternating manner; The capacitor plates of the ninth detection board, the tenth detection board, the eleventh detection board, the twelfth detection board, the thirteenth detection board, the fourteenth detection board, the fifteenth detection board and the sixteenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board.

8. The accelerometer according to claim 5, characterized in that The detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate and an eighth detection plate which are arranged in an annular manner and spaced apart on the inner ring of the outer coupling structure and the inner coupling structure; the first detection plate, the second detection plate, the third detection plate and the fourth detection plate are symmetrically distributed with the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate about the X axis respectively; The capacitor plates on the first detection board, the second detection board, the third detection board and the fourth detection board are arranged in a positive and negative staggered manner; The capacitor plates of the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board and the fourth detection board.

9. The accelerometer according to claim 5, characterized in that: The detection plates include a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate and a sixth detection plate which are arranged in an annular manner and spaced apart on the inner ring of the outer coupling structure and the inner coupling structure; the first detection plate, the second detection plate and the third detection plate are symmetrically distributed with the fourth detection plate, the fifth detection plate and the sixth detection plate about the X axis respectively; The capacitor plates on the first detection board, the second detection board and the third detection board are arranged in a positive and negative staggered manner; The fourth detection plate, the fifth detection plate and the sixth detection plate are respectively arranged opposite to the capacitor plates on the first detection plate, the second detection plate and the third detection plate.

10. The accelerometer according to claim 5, characterized in that The detection plate comprises a first detection plate, a second detection plate, a third detection plate, a fourth detection plate, a fifth detection plate, a sixth detection plate, a seventh detection plate, an eighth detection plate, a ninth detection plate, a tenth detection plate, an eleventh detection plate, a twelfth detection plate, a thirteenth detection plate, a fourteenth detection plate, a fifteenth detection plate and a sixteenth detection plate which are arranged side by side on the inner ring of the outer coupling structure and the inner coupling structure along the direction of the X-axis; the first detection plate, the second detection plate, the third detection plate, the fourth detection plate, the fifth detection plate, the sixth detection plate, the seventh detection plate and the eighth detection plate are respectively symmetrically distributed with the ninth detection plate, the tenth detection plate, the eleventh detection plate, the twelfth detection plate, the thirteenth detection plate, the fourteenth detection plate, the fifteenth detection plate and the sixteenth detection plate about the X-axis; The capacitor plates on the first detection board and the eighth detection board are the same, and the capacitor plates on the two adjacent detection boards between the second detection board and the seventh detection board are the same, and are arranged in a positive and negative alternating pattern with the capacitor plates on the first detection board and the eighth detection board respectively; The ninth detection board, the tenth detection board, the eleventh detection board, the twelfth detection board, the thirteenth detection board, the fourteenth detection board, the fifteenth detection board and the sixteenth detection board are respectively arranged opposite to the capacitor plates on the first detection board, the second detection board, the third detection board, the fourth detection board, the fifth detection board, the sixth detection board, the seventh detection board and the eighth detection board.

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