Boost device for electrostatic chuck power supply system

Abstract

The invention relates to the technical field of switching power supplies, and discloses a boosting device for an electrostatic chuck power supply system, which comprises a voltage input module, an information processing module, a voltage boosting module, a voltage monitoring module, an overcurrent protection module and a voltage output module. The voltage boosting module is used for amplifying the input voltage by fixedly amplifying and stably outputting the input direct-current power supply voltage; the information processing module is used for receiving instruction information input by a user; the voltage monitoring module is used for monitoring an actual voltage value in a boosting device circuit; and the overcurrent protection module is used for receiving a current value set by a user, protecting a circuit of the direct-current voltage boosting device according to the current value, and if the current value in the circuit is monitored to be greater than a preset current value, notifying the circuit to be disconnected so as to protect the safety of the circuit or the device connected with the direct-current voltage boosting device.

Description

Technical Field

[0001] The invention relates to the technical field of switching power supplies, in particular to a voltage boosting device for an electrostatic chuck power supply system. Background Art

[0002] During the production and processing of semiconductor equipment, it is necessary to use a linear power supply to power the equipment. When a linear power supply is used to power semiconductor equipment, the linear power supply needs to first reduce the voltage amplitude of the input AC power through a transformer, and then rectify it through a rectifier circuit to obtain pulsed DC power, and then filter it to obtain a DC voltage with a small ripple voltage, and finally output a DC voltage to power the semiconductor equipment connected to the linear power supply.

[0003] Existing linear power supply devices have the disadvantages of large size, high cost, low efficiency and slow heat dissipation. In particular, the working process of semiconductor equipment requires stable DC voltage input, and the performance of linear equipment must be higher. Existing linear power supplies cannot meet the working requirements of semiconductor equipment. For example, the working process of the electrostatic chuck requires a DC high-voltage power supply to provide it with stable DC high voltage to ensure the stability of the suction of the electrostatic chuck. If the linear power supply device itself converts the input AC voltage into DC voltage and then boosts the DC voltage, and provides a stable high-voltage DC power input to the electrostatic chuck, the volume and heat dissipation performance requirements of the linear power supply device itself are too high, resulting in an increase in the cost of the linear power supply device; in view of this, we propose a boost device for the electrostatic chuck power supply system. Summary of the invention

[0004] The object of the present invention is to provide a voltage boosting device for an electrostatic chuck power supply system to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a boosting device for an electrostatic chuck power supply system, the DC voltage boosting device is applied to a DC voltage boosting system, the DC voltage boosting system includes a linear power supply and a DC voltage boosting device, the DC voltage boosting device includes a voltage input module, an information processing module, a voltage boosting module, a voltage monitoring module, and a voltage output module, the voltage input module is used to connect to the linear power supply and receive the DC voltage output by the linear power supply; the voltage boosting module is used to expand the input DC voltage to a preset voltage value, the voltage monitoring module is used to monitor the actual voltage value in the boosting device circuit; the voltage output module circuit is used to output the expanded voltage.

[0006] Optionally, the DC voltage boosting device also includes an overcurrent protection module, which includes an overcurrent protection circuit. The overcurrent protection module user obtains the actual current value in the production device circuit and sends the actual current value to the information processing module.

[0007] Furthermore, the instruction information includes an input voltage value, a preset current value, an output voltage value, and a pressure expansion factor, wherein the pressure expansion factor is the amplification factor of the input voltage.

[0008] Optionally, the information processing module includes a signal processing unit, which determines whether the input voltage value is consistent with the actual voltage value, and outputs an error ratio if they are inconsistent. The information processing module adjusts the duty cycle of the waveform based on the error ratio.

[0009] Optionally, the voltage input module includes a voltage input circuit, and the voltage input module circuit includes a resistor R45, one end of the resistor R45 is electrically connected to one end of a resistor R46, the other end of the resistor R46 is grounded, and the other end of the resistor R45 is electrically connected to a resistor R42.

[0010] Optionally, the voltage boost module includes a voltage boost circuit, and the current boost module circuit includes an operational amplifier U2A, terminal 3 of the operational amplifier U2A is electrically connected to resistor R42, terminal 4 of the operational amplifier U2A is grounded, terminal 8 of the operational amplifier U2A is electrically connected to the VIN terminal, terminal 2 of the operational amplifier U2A is electrically connected to one end of capacitor C3, the other end of capacitor C3 is electrically connected to resistor R13, the resistor R13 is electrically connected to terminal 1 of the operational amplifier U2A, and the resistor R13 is connected in parallel with relay NC13.

[0011] Optionally, the current boost circuit also includes a fuse F1, one end of the fuse F1 is electrically connected to the resistor R32, the other end of the fuse F1 is electrically connected to the 1 end of the optical isolator U5, the model of the optical isolator U5 is ACPL217500E, the 3 end of the optical isolator U5 is electrically connected to the positive end of the diode Q3, the negative end of the diode Q3 is electrically connected to the base end of the transistor Q5, the emitter of the transistor Q5 is electrically connected to one end of the resistor R15, the other end of the resistor R15 is grounded, the emitter of the transistor Q5 is electrically connected to one end of the resistor R16, and the other end of the resistor R16 is grounded.

[0012] Optionally, the overcurrent protection module includes an overcurrent protection circuit, and the overcurrent protection module circuit includes a reference source chip U1, the 6 end of the reference source chip U1 is electrically connected to one end of the resistor R36, the other end of the resistor R36 is electrically connected to one end of the capacitor C5, the other end of the capacitor C5 is electrically connected to one end of the resistor R9, the other end of the resistor R9 is electrically connected to the 7 end of the operational amplifier U3B, the 7 end of the operational amplifier U3B is electrically connected to the positive end of the diode Q9, and the negative end of the diode Q9 is electrically connected to one end of the resistor R38. The other end of the resistor R38 is electrically connected to the base end of the transistor Q12, the emitter end of the transistor Q12 is grounded, the resistor R38 is electrically connected to one end of the resistor R39, the other end of the resistor R39 is grounded, the 5 end of the operational amplifier U3B is electrically connected to one end of the resistor R35, the other end of the resistor R35 is electrically connected to the 1 end of the operational amplifier U3A, the 2 ends of the operational amplifier U3A are electrically connected to the resistor R29, the resistor R29 is electrically connected to one end of the resistor R12, and the other end of the resistor R12 is grounded.

[0013] Optionally, the voltage detection module includes a voltage detection circuit, and the voltage detection module circuit includes a rectifier bridge U7. The model of the rectifier bridge U7 is KMB12F. The 4th end of the rectifier bridge U7 is electrically connected to one end of the capacitor C17, and the other end of the capacitor C17 is electrically connected to the 3rd end of the rectifier bridge U7. The capacitor C17 is connected in parallel with the resistor R51 and the capacitor C15. The capacitor C17 is electrically connected to the resistor R52, and the resistor R52 is electrically connected to one end of the resistor R14. The other end of the resistor R14 is electrically connected to one end of the relay NC14, and the relay NC14 is electrically connected to the 1st end of the operational amplifier U2A.

[0014] Optionally, the voltage output module includes a voltage output circuit, which includes a diode D3, a diode D4 and a diode D5, wherein the diode D3, the diode D4 and the diode D5 are connected in parallel, the cathode terminal of the diode D5 is electrically connected to the capacitor C9, the anode terminal of the diode D5 is electrically connected to the cathode terminal of the diode D6, and the diode D6 is connected in parallel with the diode D2 and the diode D1.

[0015] Compared with the prior art, the present invention provides a DC voltage boost circuit, which has the following beneficial effects:

[0016] The DC voltage boost circuit can realize fixed expansion of the input DC power supply voltage and stable output through the DC high-voltage circuit. The voltage boost module is used to expand the input voltage, and the constant voltage monitoring module is used to monitor whether the output voltage value is consistent with the input voltage value. If they are inconsistent, a signal is sent to adjust the input voltage value. The overcurrent protection module is used to receive the current value set by the user and protect the circuit of the DC voltage boost device according to the current value. If the current value in the circuit is detected to be greater than the preset current value, the circuit is notified to disconnect to protect the safety of the circuit or equipment connected to the DC boost device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is the overall circuit diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of a voltage input circuit of the present invention;

[0019] Figure 3 This is a schematic diagram of a voltage detection circuit of the present invention;

[0020] Figure 4 This is a schematic diagram of a current boosting circuit of the present invention;

[0021] Figure 5 This is a schematic diagram of an overcurrent protection circuit of the present invention;

[0022] Figure 6 This is a schematic diagram of a voltage detection circuit of the present invention;

[0023] Figure 7 This is a schematic diagram of a voltage output circuit of the present invention;

[0024] Figure 8 It is a schematic diagram of a DC boost device module of the present invention. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0026] like Figure 1-Figure 8As shown, the present invention provides a technical solution: a boosting device for an electrostatic chuck power supply system, which is applied to the electrostatic chuck power supply system, and the electrostatic chuck power supply system includes a linear power supply and a boosting device. Among them, the DC voltage boosting device can be arranged inside the linear power supply, the linear power supply is connected to the semiconductor device, the internal circuit of the linear power supply converts the input AC power supply into a DC power supply, and transmits it to the DC voltage boosting device, the DC voltage boosting device expands the DC voltage to a predetermined voltage value and then transmits the linear power supply to the semiconductor device; the boosting device can also be directly connected to the linear power supply, that is, the linear power supply is connected to the boosting device, the DC voltage boosting device is connected to the semiconductor device, the linear voltage outputs the DC voltage to the boosting device, the boosting device expands the voltage value of the input DC voltage to a preset voltage value based on the expansion multiple set by the user, and outputs the expanded DC voltage to the semiconductor device.

[0027] The DC voltage boosting device disclosed in the embodiment of the present invention includes a voltage input module, an information processing module, a voltage boosting module, a voltage monitoring module, an overcurrent protection module, and a voltage output module.

[0028] Among them, the voltage input module includes a voltage input circuit, which is used to receive the input DC voltage and receive the output DC voltage value set by the user. The voltage boost module circuit is used to amplify the received DC voltage, the voltage monitoring module is used to monitor the voltage value in the DC voltage boost device circuit, the error amplifier outputs a numerical adjustment signal based on the difference, and the information processing module adjusts the duty cycle of the waveform according to the adjustment information. The overcurrent protection module is used to receive the current value set by the user and protect the circuit of the DC voltage boost device according to the current value. If the current value in the circuit is greater than the preset current value, the circuit is notified to disconnect to protect the safety of the circuit or equipment connected to the DC boost device. The voltage output module circuit is used to output the amplified voltage to the connected filter circuit or semiconductor device. The overcurrent protection module circuit is also provided with an internal voltage compensation mechanism, which is connected to the voltage input module to form a circuit closed loop, so that the input voltage can be adjusted more accurately. In this embodiment, the voltage input module receives the DC voltage input by the linear power supply, obtains the voltage value of the input DC voltage, receives the expansion multiple set by the user, and the DC boost device automatically confirms the corresponding output voltage value according to the input voltage value, that is, confirms the output voltage value according to the set DC voltage expansion multiple; the voltage boost module expands the input DC voltage to a voltage value of the corresponding multiple; the voltage output module outputs the expanded DC voltage to an external device; the voltage detection module circuit monitors whether the output voltage value meets the demand according to the ratio of the input voltage to the output voltage. If the output voltage value is too small, a signal to increase the input voltage value is sent; if the output voltage value is too large,

[0029] Sending a signal to reduce the input voltage value, this voltage adjustment method forms an oscillation circuit of the boost device, achieving the technical effect of stable output of the high voltage after expansion.

[0030] The overcurrent protection module receives the current protection value input by the user, such as 1mA. The system monitors whether the current value of the circuit is greater than the preset current value based on the current value input by the user. If it is greater, the system controls the circuit to be disconnected to protect the equipment or circuit connected to the DC boost device. Furthermore, the overcurrent protection module is also provided with a voltage compensation mechanism for compensating the input voltage value to ensure the accuracy of the input voltage; the voltage adjustment module adjusts the input voltage value.

[0031] The boost device includes a voltage input module, an information processing module, a voltage boost module, a voltage monitoring module, and a voltage output module. The voltage input module is used to connect to a linear power supply and receive a DC voltage output by the linear power supply; the information processing module is used to receive instruction information input by a user; the voltage boost module is used to expand the input DC voltage to a preset voltage value, and the voltage monitoring module is used to monitor the actual voltage value in the boost device circuit; the voltage output module circuit is used to output the expanded voltage;

[0032] The DC voltage boost device also includes an overcurrent protection module, which includes an overcurrent protection circuit. The overcurrent protection module is used to obtain the actual current value in the boost device circuit and send the actual current value to the information processing module; the instruction information includes an input voltage value, a preset current value, an output voltage value, and a pressure expansion multiple;

[0033] The information processing module includes a signal processing unit, which determines whether the input voltage value is consistent with the actual voltage value. If not, the signal processing unit outputs an error ratio. The information processing module adjusts the duty cycle of the waveform based on the error ratio.

[0034] It is worth noting that the boost device will produce certain losses due to its own circuit during the voltage boosting process, so the output voltage value will change. It is necessary to constantly adjust the actual voltage in the DC voltage boost device circuit to meet the user's preset output voltage requirements. Figure 3 As shown, the information processing module includes a signal processing unit, a voltage monitoring module obtains the actual voltage value in the DC voltage boost device circuit, the information processing module receives the input voltage value preset by the user, the signal processing unit determines whether the input voltage value is consistent with the actual voltage value, and if not, outputs an error ratio, and the information processing module adjusts the duty cycle of the waveform according to the error ratio, thereby achieving a stable output of the voltage. Furthermore, by setting a voltage monitoring module and an overcurrent protection module, the technical effect of dual detection of a stable output voltage is achieved.

[0035] Furthermore, in one embodiment, a linear power supply is connected to a semiconductor device, and the linear power supply is used to provide a stable DC high voltage power supply to the semiconductor device. A DC voltage boosting device is disposed inside the linear power supply to boost the internal DC voltage of the linear power supply device, thereby achieving the technical effect of reducing the volume of the linear power supply.

[0036] In another embodiment, the linear power supply is connected to the DC boost device and transmits the DC voltage to the DC boost device, and the DC boost device boosts the input DC voltage and outputs it to the semiconductor device. The technical effect of boosting and stabilizing voltage is achieved. The voltage input module includes a voltage input circuit, and the voltage input circuit includes a resistor R45, one end of the resistor R45 is electrically connected to one end of the resistor R46, the other end of the resistor R46 is grounded, and the other end of the resistor R45 is electrically connected to the resistor R42.

[0037] The voltage boost module includes a voltage boost circuit, which includes an operational amplifier U2A, wherein terminal 3 of the operational amplifier U2A is electrically connected to resistor R42, terminal 4 of the operational amplifier U2A is grounded, terminal 8 of the operational amplifier U2A is electrically connected to the VIN terminal, terminal 2 of the operational amplifier U2A is electrically connected to one end of capacitor C3, the other end of capacitor C3 is electrically connected to resistor R13, resistor R13 is electrically connected to terminal 1 of the operational amplifier U2A, and resistor R13 is connected in parallel with relay NC13.

[0038] The voltage boosting module includes a voltage boosting circuit, which includes a fuse F1, one end of the fuse F1 is electrically connected to the resistor R32, the other end of the fuse F1 is electrically connected to the end 1 of the optical isolator U5, the model of the optical isolator U5 is ACPL217500E, the three ends of the optical isolator U5 are electrically connected to the positive end of the diode Q3, the negative end of the diode Q3 is electrically connected to the base end of the transistor Q5, the emitter of the transistor Q5 is electrically connected to one end of the resistor R15, the other end of the resistor R15 is grounded, the emitter of the transistor Q5 is electrically connected to one end of the resistor R16, and the other end of the resistor R16 is grounded.

[0039] The overcurrent protection module includes an overcurrent protection circuit, which includes a reference source chip U1. Terminal 6 of the reference source chip U1 is electrically connected to one end of a resistor R36, the other end of the resistor R36 is electrically connected to one end of a capacitor C5, the other end of the capacitor C5 is electrically connected to one end of a resistor R9, the other end of the resistor R9 is electrically connected to terminal 7 of an operational amplifier U3B, the terminal 7 of the operational amplifier U3B is electrically connected to the positive terminal of a diode Q9, the negative terminal of the diode Q9 is electrically connected to one end of a resistor R38, the other end of the resistor R38 is electrically connected to the base terminal of a transistor Q12, the emitter terminal of the transistor Q12 is grounded, the resistor R38 is electrically connected to one end of a resistor R39, the other end of the resistor R39 is grounded, the terminal 5 of the operational amplifier U3B is electrically connected to one end of a resistor R35, the other end of the resistor R35 is electrically connected to terminal 1 of an operational amplifier U3A, the terminal 2 of the operational amplifier U3A is electrically connected to a resistor R29, the resistor R29 is electrically connected to one end of a resistor R12, and the other end of the resistor R12 is grounded.

[0040] The voltage detection module includes a voltage monitoring circuit, which includes a rectifier bridge U7. The model of the rectifier bridge U7 is KMB12F. The 4th end of the rectifier bridge U7 is electrically connected to one end of the capacitor C17, and the other end of the capacitor C17 is electrically connected to the 3rd end of the rectifier bridge U7. The capacitor C17 is connected in parallel with the resistor R51 and the capacitor C15. The capacitor C17 is electrically connected to the resistor R52. The resistor R52 is electrically connected to one end of the resistor R14. The other end of the resistor R14 is electrically connected to one end of the relay NC14. The relay NC14 is electrically connected to the 1st end of the operational amplifier U2A.

[0041] The voltage output module includes a voltage output circuit, which includes a diode D3, a diode D4 and a diode D5. The diode D3, the diode D4 and the diode D5 are connected in parallel, the cathode terminal of the diode D5 is electrically connected to the capacitor C9, the anode terminal of the diode D5 is electrically connected to the cathode terminal of the diode D6, and the diode D6 is connected in parallel with the diode D2 and the diode D1.

[0042] As an application of this embodiment:

[0043] set up The magnitude of the transformer's magnetic flux and the direction of the electromotive force are given by The change of magnetic flux also generates a corresponding induced electromotive force on the feedback winding L3, making the same-name end of the feedback winding negative. Therefore, the base potential of Q2 decreases and the base potential of Q1 increases, resulting in positive feedback to Q1 and negative feedback to Q2, which means Getting bigger and bigger, It gets smaller and smaller, and finally Q1 is saturated and Q2 is cut off. At this time, the magnetic flux reaches its maximum value, and the rate of change of the magnetic flux is 0, so the induced electromotive force is also 0. Therefore, the induced electromotive force on the feedback winding disappears, the base potential of Q2 rises, the base potential of Q1 drops, the rising electrode current of Q2 rises, and the electrode current of Q1 drops, resulting in the reverse rate of change of the magnetic flux, and the polarity of the induced electromotive force of the feedback winding is reversed; this is repeated, and oscillation is formed in the secondary of the transformer. The existence of the resonant capacitor C2 makes the oscillation circuit oscillate at a specific frequency.

[0044] Ballast capacitor: output current, starting voltage, operating voltage and frequency are related to it.

[0045]

[0046] Turns Ratio:

[0047]

[0048] Np is connected across the resonant capacitor C, and the center tap divides the primary turns into Np=Np1=Np2.

[0049] Select the switch:

[0050] The maximum collector-emitter voltage that the switch tube can withstand (Np / NS)Vstart;

[0051] Maximum collector current:

[0052] Determine the resonant capacitor and primary inductance (resonant inductance) → the inductance value IN_min of the primary side of the transformer;

[0053] In order to obtain a sinusoidal oscillation waveform, the resonant capacitor and the resonant inductor (RL is the equivalent load); at this time, the oscillation frequency

[0054] in, In the design, in order to prevent the secondary inductance from being too large, which would result in the oscillation frequency being reduced to work properly, the primary inductance is made as small as possible, and C is as large as possible at a frequency of about 60kHz.

[0055] In actual use, the larger the C, the closer the waveform is to the sine wave, but f will decrease, the loss of the magnetic core will increase, and the efficiency will decrease. The specific heat sources are the transistor and the primary of the transformer.

[0056] Determine the base resistance:

[0057] The resistance of the base resistor affects the collector current, the primary current and voltage of the transformer, and thus the secondary voltage of the transformer. The base resistance becomes smaller, the secondary voltage becomes larger, and the static power consumption becomes larger. If the base resistance is too small, the output waveform of the double voltage rectifier is observed by the oscilloscope high-voltage differential probe as a DC component superimposed on the AC component. Adding a load will reduce the AC component, or change the switching frequency, preferably increase the switching frequency. By setting the voltage monitoring module and the overcurrent protection module, the input DC voltage can be expanded and output stably.

[0058] The above generally describes the present invention in detail, but it is obvious to a person skilled in the art that some modifications or improvements can be made to the present invention. Therefore, modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. A booster device for an electrostatic chuck power supply system, the booster device is applied to the electrostatic chuck power supply system, the electrostatic chuck power supply system comprises a linear power supply, a booster device, Features: The boost device includes a voltage input module, an information processing module, a voltage boost module, a voltage monitoring module, and a voltage output module. The voltage input module is used to connect to a linear power supply and receive a DC voltage output by the linear power supply; the information processing module is used to receive instruction information input by a user; the voltage boost module is used to increase the input DC voltage to a preset voltage value, and the voltage monitoring module is used to monitor the actual voltage value in the boost device circuit; The voltage output module circuit is used to output the amplified voltage.

2. A voltage boosting device for an electrostatic chuck power supply system according to claim 1, Features: The DC voltage boost device also includes an overcurrent protection module, which includes an overcurrent protection circuit. The overcurrent protection module is used to obtain an actual current value in the boost device circuit and send the actual current value to the information processing module.

3. A voltage boosting device for an electrostatic chuck power supply system according to any one of claims 1 to 2, Features: The instruction information includes an input voltage value, a preset current value, an output voltage value, and a voltage expansion multiple.

4. A booster device for an electrostatic chuck power supply system according to any one of claims 1 to 2, Features: The information processing module includes a signal processing unit, which determines whether the input voltage value is consistent with the actual voltage value. If not, the signal processing unit outputs an error ratio. The information processing module adjusts the duty cycle of the waveform based on the error ratio.

5. A voltage boosting device for an electrostatic chuck power supply system according to any one of claims 1 to 2, Features: The voltage input module includes a voltage input circuit, which includes a resistor R45, one end of which is electrically connected to one end of a resistor R46, the other end of which is grounded, and the other end of which is electrically connected to a resistor R42.

6. A voltage boosting device for an electrostatic chuck power supply system according to any one of claims 1 to 2, Features: The voltage boosting module includes a voltage boosting circuit, which includes an operational amplifier U2A, wherein terminal 3 of the operational amplifier U2A is electrically connected to resistor R42, terminal 4 of the operational amplifier U2A is grounded, terminal 8 of the operational amplifier U2A is electrically connected to the VIN terminal, terminal 2 of the operational amplifier U2A is electrically connected to one end of capacitor C3, the other end of capacitor C3 is electrically connected to resistor R13, resistor R13 is electrically connected to terminal 1 of the operational amplifier U2A, and resistor R13 is connected in parallel with relay NC13.

7. A voltage boosting device for an electrostatic chuck power supply system according to claim 5, Features: The current boost module circuit also includes a fuse F1, one end of the fuse F1 is electrically connected to the resistor R32, the other end of the fuse F1 is electrically connected to the 1 end of the optical isolator U5, the model of the optical isolator U5 is ACPL217500E, the 3 ends of the optical isolator U5 are electrically connected to the positive end of the diode Q3, the negative end of the diode Q3 is electrically connected to the base end of the transistor Q5, the emitter of the transistor Q5 is electrically connected to one end of the resistor R15, the other end of the resistor R15 is grounded, the emitter of the transistor Q5 is electrically connected to one end of the resistor R16, and the other end of the resistor R16 is grounded.

8. A voltage boosting device for an electrostatic chuck power supply system according to claim 2, Features: The overcurrent protection module includes an overcurrent protection circuit, which includes a reference source chip U1, a terminal 6 of the reference source chip U1 is electrically connected to one end of a resistor R36, the other end of the resistor R36 is electrically connected to one end of a capacitor C5, the other end of the capacitor C5 is electrically connected to one end of a resistor R9, the other end of the resistor R9 is electrically connected to a terminal 7 of an operational amplifier U3B, the terminal 7 of the operational amplifier U3B is electrically connected to the positive terminal of a diode Q9, the negative terminal of the diode Q9 is electrically connected to one end of a resistor R38, and the The other end of the resistor R38 is electrically connected to the base end of the transistor Q12, the emitter end of the transistor Q12 is grounded, the resistor R38 is electrically connected to one end of the resistor R39, the other end of the resistor R39 is grounded, the 5 end of the operational amplifier U3B is electrically connected to one end of the resistor R35, the other end of the resistor R35 is electrically connected to the 1 end of the operational amplifier U3A, the 2 ends of the operational amplifier U3A are electrically connected to the resistor R29, the resistor R29 is electrically connected to one end of the resistor R12, and the other end of the resistor R12 is grounded.

9. A voltage boosting device for an electrostatic chuck power supply system according to any one of claims 1 to 2, Features: The voltage detection module includes a voltage detection circuit, which includes a rectifier bridge U7. The model of the rectifier bridge U7 is KMB12F. The 4 ends of the rectifier bridge U7 are electrically connected to one end of the capacitor C17, and the other end of the capacitor C17 is electrically connected to the 3 ends of the rectifier bridge U7. The capacitor C17 is connected in parallel with the resistor R51 and the capacitor C15. The capacitor C17 is electrically connected to the resistor R52. The resistor R52 is electrically connected to one end of the resistor R14. The other end of the resistor R14 is electrically connected to one end of the relay NC14. The relay NC14 is electrically connected to the 1 end of the operational amplifier U2A.

10. A voltage boosting device for an electrostatic chuck power supply system according to claims 1-2, Features: The voltage output module includes a voltage output circuit, which includes a diode D3, a diode D4 and a diode D5. The diode D3, the diode D4 and the diode D5 are connected in parallel. The cathode terminal of the diode D5 is electrically connected to the capacitor C9, the anode terminal of the diode D5 is electrically connected to the cathode terminal of the diode D6, and the diode D6 is connected in parallel with the diode D2 and the diode D1.

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