Micro-electro-mechanical actuator structure and structural element

Abstract

The invention relates to a microelectromechanical actuator arrangement having a microelectromechanical chip, which has a chip frame and a drive arrangement. The driving structure has a material that can be doped. The drive structure has a first drive unit and a second drive unit. The first driving unit has a first substrate and a first electrode structure. The first substrate has a first doping. The first electrode structure has a doping opposite the first doping. The second driving unit has a second substrate and a second electrode structure. The second substrate has a second doping. The second electrode structure has a doping opposite the second doping. That is, a pn junction is formed between the substrate and the second electrode structure. The first electrode structure has at least two first electrodes. The second electrode structure has at least one second electrode. The first electrodes are arranged side by side in a planar manner in a first electrode plane. The second electrode is arranged in a planar manner in a second electrode plane.

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