Cleaning machine with built-in wafer box sealing ring independent mounting structure and use method of cleaning machine

Abstract

The invention relates to a cleaning machine with a built-in wafer box sealing ring independent installation structure and a using method of the cleaning machine. The cleaning machine comprises a rotary loading frame rotating along a vertical center shaft, and a plurality of suspension frames which are arranged at intervals and used for suspending wafer boxes are installed on the periphery of the rotary loading frame; the suspension frame comprises a frame body extending vertically and a plurality of hanging rods vertically distributed on the frame body, a sealing ring fixing device is arranged on the outer side wall of the frame body, and the sealing ring fixing device comprises an upper limiting part, a lower limiting part and a middle limiting part, the upper limiting part and the lower limiting part are oppositely fixed to the outer side wall of the frame body at intervals, and the middle limiting part is arranged between the upper limiting part and the lower limiting part and fixed to the outer side wall of the frame body; the upper limiting part and the lower limiting part tighten the sealing ring up and down and lock the sealing ring through the middle limiting part.

Description

Technical Field

[0001] The invention relates to the field of semiconductor wafers, and in particular to a cleaning machine with a built-in wafer box sealing ring independent installation structure and a use method thereof. Background Art

[0002] Silicon polished wafers and silicon epitaxial wafers need to be cleaned in a series of chemical liquid tanks in the cleaning machine to remove particles and impurities. During cleaning, they are loaded in a wafer box made of Teflon material that is resistant to acid and alkali corrosion. Since the wafer box needs to be used to transport and place wafers and the structure inside the wafer box itself is complex, it is necessary to ensure that the wafer box is sufficiently clean when using it.

[0003] In the prior art, when cleaning the various parts of the film box, there is a lack of a fixing device specifically for the film box sealing ring in the cleaning machine. The film box sealing ring in the prior art is only suspended on two fixed fulcrums inside the cleaning machine, which makes the suspension of the film box sealing ring unstable. Since the cleaning principle of the cleaning machine is to clean with pure water and nitrogen through high-speed rotation, the film box sealing ring is easily thrown into the cleaning machine when the cleaning machine is rotating for cleaning, which causes the film box sealing ring to get stuck in the cleaning machine, causing the equipment to get stuck and be forced to stop for maintenance, which seriously affects the cleaning efficiency and cleaning quality. Summary of the invention

[0004] The present invention aims to solve the above problems existing in the prior art and provides a cleaning machine with a built-in film box sealing ring independent installation structure, which is provided with a fixing structure dedicated to the film box sealing ring and ensures that the film box sealing ring is effectively cleaned.

[0005] The present invention adopts a technical solution to solve its technical problems: the cleaning machine with a built-in film box sealing ring independent installation structure comprises a rotating loading frame rotating along a vertical central axis, a plurality of suspension frames arranged at intervals and used for hanging film boxes are installed around the rotating loading frame, the suspension frame comprises a frame body extending vertically and a plurality of hanging rods vertically distributed on the frame body, a sealing ring fixing device is provided on the outer wall of the frame body, the sealing ring fixing device comprises upper and lower limit parts fixed at relative intervals on the outer wall of the frame body, and an intermediate limit part arranged between the upper and lower limit parts and fixed on the outer wall of the frame body; the upper and lower limit parts tighten the sealing ring up and down and lock the sealing ring through the intermediate limit part, and the upper and lower limit parts are arranged on the outer wall of the frame body, so that the film box sealing ring can be tightened and fixed between the upper and lower limit parts, so as to ensure that the rotating loading frame is not thrown off during operation, and at the same time, the film box sealing ring is arranged at the side wall position so as not to form an obstruction with other parts or devices on the suspension frame, so as to fully ensure the cleaning effect of the film box sealing ring.

[0006] Preferably, the upper and lower limit parts include a first connection part fixedly connected to the outer side wall of the frame body, a limit block arranged on the first connection part and protruding outward, and a limit slot provided on the limit block relatively away from the upper and lower limit parts on the other side.

[0007] Preferably, the middle limiting portion includes a second connecting portion fixedly connected to the outer side wall of the frame body, a pair of limiting plates extending outward and spaced apart to form an accommodating space, and blocking blocks respectively arranged on the inner sides of the limiting plates and extending toward the accommodating space. The limiting plates pull the sealing ring inward and limit the sealing ring to the inner side of the accommodating space through the blocking blocks. The accommodating space and the blocking blocks are provided to further prevent the sealing ring from detaching from the sealing ring fixing device, and at the same time make the limiting plates pull the sealing ring inward to ensure that the sealing ring will not detach from the upper and lower limiting portions.

[0008] Preferably, the rotating loading frame includes a cylindrical frame body, which includes a pair of upper and lower outer frame plates that are relatively spaced apart and a connecting column connected between the upper and lower outer frame plates, and the suspension frame is rotatably connected between the upper and lower outer frame plates.

[0009] Preferably, the frame body includes a pair of upper and lower connecting plates respectively arranged on the edges of the upper and lower outer frame plates and a support plate connected between the upper and lower connecting plates to form a side wall. The cross-section of the support plate on the horizontal plane is arranged along the diameter direction of the vertical center axis of the rotating loading frame, and the sealing ring fixing device is arranged on the outer side surface of the support plate.

[0010] Preferably, a blocking reflective surface is provided at one end of the outer side surface of the support plate away from the central axis, which is located on the outside of the sealing ring fixing device and protrudes outward. A blocking reflective surface is provided on the outer side surface of the support plate, so that the cleaning liquid that is not sprayed onto the sealing ring is rebounded onto the sealing ring to further enhance the cleaning quality of the sealing ring. At the same time, the side of the sealing ring away from the internal cleaning nozzle can also be rinsed with the cleaning liquid.

[0011] Preferably, the middle limiting part includes a cleaning shaft arranged on the support plate and an extended traction rod arranged outside the cleaning shaft and stretching and pulling one side of the sealing ring outward, the cleaning shaft is rotatably connected to the support plate and horizontally extended along the diameter direction of the vertical center axis of the rotating loading frame, the extended traction rod includes an extension plate fixed to the outside of the cleaning shaft, a rotating part rotatably connected to the outside of the extension plate for limiting the sealing ring, the rotation plane of the extension plate is arranged to coincide with the diameter direction of the vertical center axis of the rotating loading frame, a rotating driving surface is arranged on the outside of the extension plate and is gradually inclined to the left or right from top to bottom, and a channel space higher than the upper and lower limiting parts is arranged between the extension plate and the support plate; an extension plate with a rotating driving surface is arranged, so that when the rotating loading frame rotates, the extension plate can rotate around the cleaning shaft by wind force, and then one side of the sealing ring is stretched out outward by the extension plate and the rotating part, so as to avoid that part of the inner side surface of the sealing ring is in contact with the outer surface of the sealing ring fixing device for a long time, thereby affecting the cleaning effect of the sealing ring.

[0012] Preferably, an auxiliary balancing plate is provided on the cleaning shaft, which is arranged opposite to the extension plate and extends in the opposite direction of the extension plate. The auxiliary balancing plate is provided with an auxiliary rotating plate. The auxiliary rotating plate is provided with an auxiliary driving surface which is arranged opposite to the rotating driving surface. A rotation gap is provided between the auxiliary driving surface and the outer side of the support plate in the vertical direction. The auxiliary rotating plate and the auxiliary driving surface are provided, which are used to balance and stabilize the extension plate while assisting in driving the rotation of the extension plate.

[0013] Preferably, the rotating part includes an outer side cleaning roller rotatably connected to the outer end of the extension plate, a pair of supporting rollers rotatably connected to the extension plate, and an inner side cleaning roller rotatably connected to the extension plate and located between the supporting rollers. An installation space for accommodating a sealing ring is provided between the outer side cleaning roller and the supporting rollers, and the inner side cleaning roller is arranged away from the sealing ring relative to the supporting roller. Cleaning bristles are provided on the outer side cleaning roller and the inner side cleaning roller, and a limiting table limited to the outer side of the sealing ring is provided on the outer side of the supporting roller. The outer side of the limiting table contacts with the inner side cleaning roller and drives the inner side cleaning roller to rotate. When the extension plate rotates, an inner side cleaning roller is provided which is driven to rotate by the supporting roller, thereby realizing brushing of the inner contact extrusion surface of the sealing ring to ensure the cleaning quality of the inner extrusion surface of the sealing ring.

[0014] A method for using a cleaning machine with a built-in film box sealing ring independent installation structure comprises the following steps: Step 1: Remove the sealing ring from the film box, stretch the sealing ring in the vertical direction and make the two ends of the sealing ring respectively clamped in the limit clamping grooves of the upper and lower limit parts, and then stretch one side of the sealing ring and clamp it in the installation space between the support roller and the outer side cleaning roller, so that the sealing ring is tightened as a whole and arranged on the upper and lower limit parts and the outer side of the support roller; Step 2: Start the cleaning machine so that the rotating loading frame is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface and the rotating driving surface drive the extension plate and the rotating part to rotate under the drive of wind force; so that when the extension plate rotates to different positions, the side of the sealing ring at the corresponding position is stretched outward for spraying, and at the same time, the supporting roller rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller to rotate through the limiting table, so that the inner side cleaning roller rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

[0015] The beneficial effects of the present invention are as follows: the present invention is provided with upper and lower limit parts located on the outer side wall of the frame body, so that the film box sealing ring can be tightened and fixed between the upper and lower limit parts, ensuring that the rotating loading frame is not thrown off when working, and at the same time, the film box sealing ring is arranged at the side wall position and will not be blocked by other parts or devices on the suspension frame, which can fully ensure the cleaning effect of the film box sealing ring; at the same time, an intermediate limit part is provided to further lock the sealing ring, so that the sealing ring is more firmly limited on the upper and lower limit parts, ensuring that the sealing ring is fixed more firmly, and avoiding the falling of the sealing ring to affect the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the present invention; Figure 2 This is a schematic diagram of the installation of the suspension bracket; Figure 3 is a structural schematic diagram of the suspension frame; Figure 4 for Figure 3 A magnified view of part A; Figure 5 It is a structural schematic diagram of the upper and lower limit parts; Figure 6 It is a structural schematic diagram of the middle limiting part; Figure 7 It is a schematic diagram of the installation of the sealing ring, the upper and lower limit parts and the middle limit part; Figure 8 It is a schematic diagram of the structure of the suspension frame when an extended towing rod is provided; Fig. 9 It is a schematic diagram of the installation of the sealing ring, the upper and lower limit parts and the extended traction rod; Fig.10 Schematic diagram of the installation of cleaning shaft, extended traction rod and auxiliary rotating plate; Fig.11 for Fig.10 A magnified view of part B; Fig.12 It is a schematic diagram of the installation of the inner side cleaning roller, the supporting roller and the outer side cleaning roller; Description of reference numerals: 1. Rotating loading rack, 2-1. Upper limit part, 2-2. Lower limit part, 3. Intermediate limit part, 3-1. Second connecting part, 3-2. Accommodating space, 3-3. Limiting plate, 3-4. Blocking block, 4. Cylindrical frame, 4-1. Upper outer frame plate, 4-2. Lower outer frame plate, 4-3. Connecting column, 5. Suspension rack, 5-1. Frame, 5-1-1. Connecting plate, 5-1-2. Support plate, 5-2. Hanging rod, 6. Cleaning the rotating shaft; 7. Extending the traction rod; 7-1. Extension plate; 7-2. Rotating part; 7-2-1. Supporting roller; 7-2-2. Inner side cleaning roller; 7-2-3. Outer side cleaning roller; 8. Rotating driving surface; 9. Auxiliary balancing plate; 10. Auxiliary rotating plate; 11. Auxiliary driving surface; 13. Limiting table; 14. Blocking reflection surface; 15. First connecting part; 16. Limiting block; 17. Limiting slot. DETAILED DESCRIPTION

[0017] In order to further explain the technical means and effects adopted by the present invention to achieve the predetermined invention purpose, the specific implementation mode, structure, characteristics and effects of the present invention are described in detail below in combination with the accompanying drawings and preferred embodiments.

[0018] Embodiment 1 See attached Figure 1-Figure 7 : The present embodiment discloses a cleaning machine with a built-in film box sealing ring independent installation structure, including a rotating loading frame 1 rotating along a vertical central axis, and a plurality of suspension frames 5 arranged at intervals and used to suspend the film box are installed around the rotating loading frame 1, and the suspension frame 5 includes a frame body 5-1 extending vertically and a plurality of hanging rods 5-2 distributed vertically on the frame body 5-1; during use, the film box and other materials in the composition of the Shin-Etsu film box can be fixedly installed through the existing hanging rods 5-2, and then firmly fixed inside the cleaning machine, and the cleaning machine is provided with a spray pipeline fixedly installed relative to the rotating loading frame 1 at the center position of the rotating loading frame 1, and then the cleaning liquid is sprayed outward through the spray pipeline to clean the film box in a rotating state; in this embodiment, for the fixing and cleaning of the film box sealing ring, in order to prevent the sealing ring from falling into the cleaning machine and causing the sealing ring to be stuck in the cleaning machine so that the equipment is stuck and forced to be shut down for maintenance, a sealing ring fixing device is provided on the outer wall of the frame body 5-1, and the sealing ring is fixed by the sealing ring fixing device while ensuring the effective cleaning of the sealing ring; specifically, Figure 1As shown, the sealing ring fixing device in this embodiment includes upper and lower limit parts 2-1, 2-2 fixed at relative intervals on the outer wall of the frame 5-1, and an intermediate limit part 3 arranged between the upper and lower limit parts 2-1, 2-2 and fixed on the outer wall of the frame 5-1; the sealing ring is tightened up and down by the upper and lower limit parts 2-1, 2-2 and then tightened and fixed on the upper and lower limit parts 2-1, 2-2, and the sealing ring is further locked by the intermediate limit part 3, thereby further improving the installation stability of the sealing ring.

[0019] Furthermore, Figure 2 As shown, the rotating loading frame 1 in this embodiment includes a cylindrical frame body 4, the cylindrical frame body 4 includes a pair of upper and lower outer frame plates 4-1, 4-2 arranged relatively spaced apart and a connecting column 4-3 connected between the upper and lower outer frame plates 4-1, 4-2, and a plurality of suspension frames 5 surround the cylindrical frame body 4 and are rotatably connected between the upper and lower outer frame plates 4-1, 4-2; wherein, as shown in FIG. Figure 2 and Figure 3 As shown, the frame body 5-1 in this embodiment includes a pair of upper and lower connecting plates 5-1-1 respectively arranged at the edges of the upper and lower outer frame plates 4-1 and 4-2, and a support plate 5-1-2 connected between the upper and lower connecting plates 5-1-1 to form a side wall. In this embodiment, a rotating shaft rotatably connected to the outer frame plates 4-1 and 4-2 is arranged on the outer side of the connecting plate 5-1-1, so that the hanging frame 5 can be rotated before cleaning to hang other components such as the film box on the inner side of the hanging frame 5. At the same time, in order to avoid the rotation of the hanging frame 5 during the rotation and cleaning process of the rotating loading frame 1, a fixing pin can be installed between the hanging frame 5 and the rotating loading frame 1.

[0020] Furthermore, Figure 5 As shown, the upper and lower limit parts 2-1, 2-2 in this embodiment include a first connection part 15 fixedly connected to the outer wall of the frame body 5-1, a limit block 16 arranged on the first connection part 15 and protruding outward, and a limit slot 17 provided on the limit block 16 and relatively far away from the upper and lower limit parts 2-1, 2-2 on the other side; wherein, the first connection part 15 in this embodiment is a flat plate structure, and the first connection part 15 is fixed to the outer wall of the frame body 5-1, that is, fixed to the outer surface of the support plate 5-1-2 by screws, and the first connection part 15 in this embodiment is fixed to the outer wall of the frame body 5-1, that is, fixed to the outer surface of the support plate 5-1-2 ... The connecting part 15 and the limit block 16 are made of plastic and are integrally injection molded. The upper limit part 2-1 and the lower limit part 2-2 are vertically opposite to each other, and the limit slot 17 on the limit part is opened on the side away from each other, so that when the sealing ring is installed, the sealing ring is in a state of being straightened up and down, and the upper end of the sealing ring is inserted into the limit slot 17 of the upper limit part 2-1, and the lower end of the sealing ring is inserted into the limit slot of the lower limit part 2-2, so that the sealing rings installed on the upper limit part 2-1 and the lower limit part 2-2 are in a fixed state of being tightened up and down.

[0021] Furthermore, Figure 6 and 7 As shown, the middle limiting portion 3 in this embodiment includes a second connecting portion 3-1 fixedly connected to the outer wall of the frame body 5-1, a pair of limiting plates 3-3 extending outward and spaced to form an accommodating space 3-2, and blocking blocks 3-4 respectively arranged on the inner side of the limiting plates 3-3 and extending toward the accommodating space 3-2; specifically, the second connecting portion 3-1 in this embodiment is also a flat plate-shaped structure and is also fixedly connected to the outer wall of the frame body 5-1 by screws. The second connecting portion 3-1, the limiting plates 3-3 and the blocking blocks 3-4 in this embodiment are also It is made of plastic and is molded by integral injection molding; wherein, the distance between the limit plates 3-3 is smaller than the width of the upper limit portion 2-1, so that when in use, a pair of limit plates 3-3 are respectively located at the left and right ends of the vertical sealing ring, and at the same time, the limit plates 3-3 and the single side of the sealing ring are stuck on the inner side of the blocking block 3-4, while contacting and tightening the sealing ring, so that the sealing ring is locked and further tightened and fixed in the accommodating space 3-2, thereby further preventing the sealing ring from detaching from the upper and lower limit portions 2-1, 2-2.

[0022] Furthermore, Figure 3 and Figure 4 As shown, the cross-section of the support plate 5-1-2 in this embodiment on the horizontal plane is arranged along the diameter direction of the vertical central axis of the rotating loading frame 1; the sealing ring fixing device in this embodiment is arranged on the outer surface of the support plate 5-1-2, so that when the sealing ring arranged on the sealing ring fixing device is rotated and cleaned with the rotating loading frame 1, the installation of the sealing ring will not cause obstruction to other cleaning parts, and the sealing ring can also be fully sprayed with the cleaning liquid without being blocked; on this basis, in order to further improve the cleaning effect of the sealing ring in this embodiment, a blocking reflection surface 14 is provided on the end of the outer side surface of the support plate 5-1-2 away from the central axis, which is located on the outside of the sealing ring fixing device and protrudes outward and extends. The blocking reflection surface 14 in this embodiment is arranged on the outer surface of the support plate 5-1-2 and is located on the outside of the sealing ring after installation, so that part of the cleaning liquid that is not hit on the sealing ring can be splashed onto the sealing ring by the corresponding sputtering of the blocking reflection surface 14, so that more cleaning liquid can be sprayed on the sealing ring during cleaning, and at the same time, the outside of the sealing ring can also be sprayed with the cleaning liquid, thereby ensuring the cleaning effect of the sealing ring.

[0023] Embodiment 2 like Figure 8-Figure 12As shown, in order to further increase the cleaning effect of the sealing ring, the difference between this embodiment and the first embodiment is that the structure of the intermediate limiting part 3 is different, and at the same time, the outer side of the support plate 5-1-2 in this application is not provided with a blocking reflection surface 14; the intermediate limiting part 3 in this embodiment includes a cleaning shaft 6 arranged on the support plate 5-1-2 and an extended traction rod 7 arranged outside the cleaning shaft 6 and stretching one side of the sealing ring outward, the cleaning shaft 6 is rotatably connected to the support plate 5-1-2 and extends horizontally along the diameter direction of the vertical center axis of the rotating loading frame 1, the extended traction rod 7 includes an extension plate 7-1 fixed to the outer side of the cleaning shaft 6, and a rotating part 7-2 rotatably connected to the outer side of the extension plate 7-1 for limiting the sealing ring. The rotation plane of the extension plate 7-1 coincides with the diameter direction of the vertical center axis of the rotating loading frame 1, and the outer side of the extension plate 7-1 is provided with a gradually leftward rotation from top to bottom. Or a rotating driving surface 8 tilted to the right, a channel space higher than the upper and lower limit parts 2-1 and 2-2 is set between the extension plate 7-1 and the support plate 5-1-2; wherein, the extension plate 7-1 in this embodiment extends outward and is tightened and limited on the rotating part 7-2 through the rotating part 7-2 and one side edge of the sealing ring, and then when the cleaning machine drives the rotating loading frame 1 to rotate during operation, the intermediate limit part 3 installed on the rotating loading frame 1 rotates accordingly, and then the extension plate 7-1 rotates around the cleaning shaft 6 under the action of the inclined rotating driving surface 8, so that when the extension plate 7-1 rotates, the sealing rings at different positions are tightened and extended outward, thereby avoiding long-term contact between some positions on the sealing ring and the sealing ring fixing device during cleaning, so that all parts of the sealing ring can be effectively rinsed, thereby ensuring the cleaning quality of the sealing ring; further, as Figure 10-12As shown, in order to further improve the cleaning quality of the sealing ring while ensuring the firm fixation of the sealing ring, the rotating part 7-2 in this embodiment includes an outer side cleaning roller 7-2-3 rotatably connected to the outer end of the extension plate 7-1, a pair of support rollers 7-2-1 rotatably connected to the extension plate 7-1, and an inner side cleaning roller 7-2-2 rotatably connected to the extension plate 7-1 and located between the support rollers 7-2-1. An installation space for accommodating the sealing ring is provided between the outer side cleaning roller 7-2-3 and the support rollers 7-2-1. The inner side cleaning roller 7-2-2 is arranged away from the sealing ring relative to the support rollers 7-2-1. Cleaning bristles are provided on the outer side cleaning roller 7-2-3 and the inner side cleaning roller 7-2-2. A limiting truncated cone 13 is provided on the outer side of the support roller 7-2-1, and the outer side of the limiting truncated cone 13 is contacted with the inner side cleaning roller 7-2-2. The roller 7-2-2 contacts and drives the inner side cleaning roller 7-2-2 to rotate; one side edge corresponding to the sealing ring is stuck in the installation space, and the inner side of the sealing ring is tightened and limited on the outer surface of the support roller 7-2-1, and then when the extension plate 7-1 rotates, the support roller 7-2-1 rotates under the action of the friction force of the sealing ring, and then the inner side cleaning roller 7-2-2 is driven to rotate by the limiting table 13 on the support roller 7-2-1, so that the squeezed contact surface on the inner side of the sealing ring is scrubbed; because the sealing ring is tightened and limited by the upper and lower limit parts 2-1 and 2-2 when it is tightened, part of the inner surface of the sealing ring is squeezed and contacted with the upper and lower limit parts 2-1 and 2-2, making it more difficult to rinse the stains on the corresponding surface, and then it can be effectively scrubbed by the above-mentioned self-driven inner side cleaning roller 7-2-2, thereby ensuring the cleaning quality of the sealing ring.

[0024] At the same time, further, Fig. 9 and Fig.10 As shown, the cleaning shaft 6 in this embodiment is provided with an auxiliary balancing plate 9 which is arranged opposite to the extension plate 7-1 and extends in the opposite direction to the extension plate 7-1, and the auxiliary balancing plate 9 is provided with an auxiliary rotating plate 10, and the auxiliary rotating plate 10 is provided with an auxiliary driving surface 11 which is arranged opposite to the rotating driving surface 8, and a rotation gap is provided between the auxiliary driving surface 11 and the outer side of the support plate 5-1-2 in the vertical direction; in this application, an auxiliary rotating plate 10 is provided, which can counterweight the extension plate 7-1 and further assist the rotation of the extension plate 7-1 through the auxiliary driving surface 11.

[0025] Correspondingly, this embodiment also discloses a method for using a cleaning machine with a built-in cassette sealing ring independent installation structure, comprising the following steps: Step 1: Remove the sealing ring from the film box, stretch the sealing ring in the vertical direction and make the two ends of the sealing ring respectively clamped in the limit clamping grooves 17 of the upper and lower limit parts 2-1 and 2-2, and then stretch one side of the sealing ring to clamp it in the installation space between the support roller 7-2-1 and the outer side cleaning roller 7-2-3, so that the sealing ring is tightened as a whole and arranged on the outer side of the upper and lower limit parts 2-1, 2-2 and the support roller 7-2-1; Step 2: Start the cleaning machine so that the rotating loading frame 1 is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface 11 and the rotating driving surface 8 drive the extension plate 7-1 and the rotating part 7-2 to rotate under the drive of wind force; so that the extension plate 7-1 can extend the side of the sealing ring at the corresponding position outward for spraying when rotating to different positions, and at the same time, the supporting roller 7-2-1 rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller 7-2-2 to rotate through the limiting table 13, so that the inner side cleaning roller 7-2-2 rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

[0026] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technical personnel in this field can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A cleaning machine with a built-in film box sealing ring independent installation structure, comprising a rotating loading frame (1) rotating along a vertical central axis, a plurality of suspension frames (5) arranged at intervals and used to suspend film boxes are installed around the rotating loading frame (1), the suspension frame (5) comprising a frame body (5-1) extending vertically and a plurality of hanging rods (5-2) vertically distributed on the frame body (5-1), wherein: A sealing ring fixing device is provided on the outer wall of the frame (5-1), and the sealing ring fixing device comprises upper and lower limiting parts (2-1, 2-2) fixed to the outer wall of the frame (5-1) at a relative interval, and an intermediate limiting part (3) arranged between the upper and lower limiting parts (2-1, 2-2) and fixed to the outer wall of the frame (5-1); the upper and lower limiting parts (2-1, 2-2) tighten the sealing ring up and down and lock the sealing ring through the intermediate limiting part (3).

2. A cleaning machine with a built-in film box sealing ring independent installation structure according to claim 1, characterized in that: The upper and lower limiting parts (2-1, 2-2) comprise a first connecting part (15) fixedly connected to the outer side wall of the frame body (5-1), a limiting block (16) arranged on the first connecting part (15) and protruding outward, and a limiting slot (17) provided on the limiting block (16) and relatively far away from the upper and lower limiting parts (2-1, 2-2) on the other side.

3. A cleaning machine with a built-in film box sealing ring independent installation structure according to claim 1 or 2, characterized in that: The intermediate limiting portion (3) comprises a second connection portion (3-1) fixedly connected to the outer wall of the frame body (5-1), a pair of limiting plates (3-3) extending outwards and spaced apart to form an accommodation space (3-2), and blocking blocks (3-4) respectively arranged on the inner sides of the limiting plates (3-3) and extending towards the accommodation space (3-2), wherein the limiting plates (3-3) tighten the sealing ring inwards and limit the sealing ring inside the accommodation space (3-2) through the blocking blocks (3-4).

4. The cleaning machine with a built-in film box sealing ring independent installation structure according to claim 3 is characterized by: The rotating loading frame (1) comprises a cylindrical frame body (4), the cylindrical frame body (4) comprises a pair of upper and lower outer frame plates (4-1, 4-2) arranged relatively spaced apart and a connecting column (4-3) connected between the upper and lower outer frame plates (4-1, 4-2), and the hanging frame (5) is rotatably connected between the upper and lower outer frame plates (4-1, 4-2).

5. The cleaning machine with a built-in film box sealing ring independent installation structure according to claim 4, characterized in that: The frame body (5-1) comprises a pair of upper and lower connecting plates (5-1-1) respectively arranged at the edges of the upper and lower outer frame plates (4-1, 4-2) and a support plate (5-1-2) connected between the upper and lower connecting plates (5-1-1) to form a side wall, the cross section of the support plate (5-1-2) on the horizontal plane being arranged along the diameter direction of the vertical center axis of the rotating loading frame (1), and the sealing ring fixing device being arranged on the outer side surface of the support plate (5-1-2).

6. A cleaning machine with a built-in film box sealing ring independent installation structure according to claim 5, characterized in that: An end of the outer side surface of the support plate (5-1-2) away from the central axis is provided with a blocking reflection surface (14) located outside the sealing ring fixing device and extending outwardly.

7. A cleaning machine with a built-in film box sealing ring independent installation structure according to claim 1 or 2, characterized in that: The intermediate limiting portion (3) comprises a cleaning shaft (6) arranged on the support plate (5-1-2) and an extended traction rod (7) arranged outside the cleaning shaft (6) and pulling one side of the sealing ring outwardly. The cleaning shaft (6) is rotatably connected to the support plate (5-1-2) and horizontally extended along the diameter direction of the vertical center axis of the rotating loading frame (1). The extended traction rod (7) comprises an extension plate (7-1) fixed to the outside of the cleaning shaft (6) and a rotating portion (7-2) rotatably connected to the outside of the extension plate (7-1) and used for limiting the sealing ring. The rotation plane of the extension plate (7-1) is arranged to coincide with the diameter direction of the vertical center axis of the rotating loading frame (1). The outside of the extension plate (7-1) is provided with a rotating driving surface (8) which is gradually inclined to the left or right from top to bottom. A channel space higher than the upper and lower limiting portions (2-1, 2-2) is provided between the extension plate (7-1) and the support plate (5-1-2).

8. The cleaning machine with a built-in film box sealing ring independent installation structure according to claim 7, characterized in that: The cleaning shaft (6) is provided with an auxiliary balancing plate (9) which is arranged opposite to the extension plate (7-1) and extends in the opposite direction to the extension plate (7-1); the auxiliary balancing plate (9) is provided with an auxiliary rotating plate (10); the auxiliary rotating plate (10) is provided with an auxiliary driving surface (11) which is arranged opposite to the rotating driving surface (8); and a rotating gap is provided between the auxiliary driving surface (11) and the outer side of the supporting plate (5-1-2) in the vertical direction.

9. A cleaning machine with a built-in film box sealing ring independent installation structure according to claim 8, characterized in that: The rotating part (7-2) comprises an outer side cleaning roller (7-2-3) rotatably connected to the outer end of the extension plate (7-1), a pair of supporting rollers (7-2-1) rotatably connected to the extension plate (7-1), and an inner side cleaning roller (7-2-2) rotatably connected to the extension plate (7-1) and located between the supporting rollers (7-2-1), and a mounting member for accommodating a sealing ring is provided between the outer side cleaning roller (7-2-3) and the supporting roller (7-2-1). The inner side cleaning roller (7-2-2) is arranged away from the sealing ring relative to the supporting roller (7-2-1), the outer side cleaning roller (7-2-3) and the inner side cleaning roller (7-2-2) are both provided with cleaning bristles, and the outer side of the supporting roller (7-2-1) is provided with a limiting truncated table (13) limited on the outer side of the sealing ring, and the outer side of the limiting truncated table (13) contacts with the inner side cleaning roller (7-2-2) and drives the inner side cleaning roller (7-2-2) to rotate.

10. A method for using a cleaning machine with a built-in film box sealing ring independent installation structure according to claim 9, comprising the following steps: Step 1: remove the sealing ring from the film box, stretch the sealing ring in the vertical direction so that the two ends of the sealing ring are respectively clamped in the limit clamping grooves (17) of the upper and lower limit parts (2-1, 2-2), and then stretch one side of the sealing ring to clamp it in the installation space between the support roller (7-2-1) and the outer side cleaning roller (7-2-3), so that the sealing ring is tightened as a whole and arranged on the outer side of the upper and lower limit parts (2-1, 2-2) and the support roller (7-2-1); Step 2: Start the cleaning machine so that the rotating loading frame (1) is driven to rotate by the driving device; during the rotation process, the auxiliary driving surface (11) and the rotating driving surface (8) drive the extension plate (7-1) and the rotating part (7-2) to rotate under the drive of wind force; so that when the extension plate (7-1) rotates to different positions, the side of the sealing ring at the corresponding position is stretched outward for spraying, and at the same time, the supporting roller (7-2-1) rotates under the action of the friction force of the sealing ring, and then drives the inner side cleaning roller (7-2-2) to rotate through the limiting truncated table (13), so that the inner side cleaning roller (7-2-2) rotates relative to the inner side of the sealing ring to brush the inner side of the sealing ring.

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