Single-pixel microscopic detection system and method based on module value and qualitative phase detection

Abstract

The invention provides a single-pixel microscopic detection system and method based on module value and qualitative phase detection. The system comprises a laser, a reflector, a microscope objective, a tube lens, a spatial light modulator, an attenuation sheet, a collection lens, a photoelectric detector, a pinhole, a data acquisition card and a computer. According to the single-pixel microscopic detection system and method based on module value and qualitative phase detection (SPDM), a spatial light modulator-digital micromirror device (DMD) is used for modulating object light, and then barrel detection and zero-frequency detection are performed on two reflection light paths of the DMD, so that a module value image and a real part image are obtained at the same time. Since the phase distribution is qualitatively reflected by the real part image, the SPDM is suitable for observing various samples, including transparent samples. The SPDM can be implemented as an additional module of a common microscope, which provides convenience for its application in optical microscopes.

Description

Technical Field

[0001] The present invention relates to the field of optical detection technology, in particular to a single-pixel microscopic detection system and method based on modulus and qualitative phase detection. Background Art

[0002] In recent years, a new microscopy technique called single pixel microscopy (SPM) has emerged. This technology aims to enhance the ability to obtain microscopic information by using the principle of computational imaging. Unlike the traditional method of relying on array image sensors to record images, SPM uses only a single detector to obtain microscopic information. This method not only expands the spectral range, improves temporal resolution, and enhances flexibility, but also realizes phase imaging. However, quantitative phase imaging through digital micromirror devices (DMDs) is not ideal because it not only sacrifices the spatial resolution of imaging, but also greatly increases the complexity of the SPM system. This is quite unfavorable for SPM to move towards practical applications. In many applications (such as measuring blood cell concentration), precise phase is not critical. In this case, qualitative phase imaging is sufficient. Summary of the invention

[0003] The purpose of the present invention is to provide a single-pixel microscopic detection system and method based on modulus and qualitative phase detection to solve the problems of insufficient spatial resolution, slow imaging speed, high system complexity and so on of current detection methods, thereby effectively promoting it from the laboratory to the practical application field.

[0004] The present invention is achieved in that:

[0005] A single pixel microscopic detection system based on modulus and qualitative phase detection, comprising:

[0006] A laser, used for emitting laser light to form a coherent illumination light field;

[0007] The first reflector is arranged on the laser light path of the laser, and its function is to change the direction of the light path, and transform the horizontal light path into the vertical direction, so as to facilitate the placement of the sample in a horizontal state;

[0008] A microscope objective lens is arranged behind the target object and in the laser light path behind the first reflector, and is used to magnify the image of the object;

[0009] The second reflector is set on the laser light path behind the microscope objective lens. Its function is to change the direction of the light path and convert the vertical light path back to the horizontal direction, so as to facilitate the construction of the light path;

[0010] The tube lens is arranged in the laser light path behind the second reflector to clearly image the object light from the microscope objective lens onto the spatial light modulator;

[0011] The spatial light modulator is arranged on the laser light path behind the tube lens and is placed at a position where the object image is clear, and is used to modulate the amplified object light; the spatial light modulator has two reflected light paths, which are named as the first reflected light path and the second reflected light path;

[0012] An attenuation plate is arranged on a first reflected light path reflected by the spatial light modulator and is used to attenuate the laser light to a working range of the first photodetector;

[0013] A first collecting lens is arranged behind the attenuation plate and is placed on the first reflected light path reflected by the spatial light modulator to collect the modulated and attenuated object light;

[0014] A first photodetector is arranged on the first reflected light path reflected by the spatial light modulator and is placed near the rear focal plane of the first collecting lens to collect the total intensity of the modulated object light;

[0015] A second collecting lens is arranged on the second reflected light path reflected by the spatial light modulator to converge the modulated object light;

[0016] A pinhole is arranged on the second reflected light path reflected by the spatial light modulator and is placed at the rear focal plane of the second collecting lens, and is used to couple the zero-frequency component of the modulated object light into the pinhole;

[0017] A second photodetector is arranged on the second reflected light path reflected by the spatial light modulator and is placed behind the pinhole to collect the light passing through the pinhole and detect the intensity of the zero-frequency component of the object light;

[0018] A data acquisition card is connected to the spatial light modulator, the first photodetector and the second photodetector respectively, and is used for performing analog-to-digital conversion and data acquisition on synchronization information of the spatial light modulator, total intensity information of the object light collected by the first photodetector and intensity information of the zero-frequency component of the object light collected by the second photodetector;

[0019] The computer is electrically connected to the spatial light modulator and the data acquisition card respectively, and is used for controlling the spatial light modulator to load the substrate pattern, and processing, storing and displaying the measurement data collected by the data acquisition card.

[0020] Furthermore, the present invention can be implemented according to the following technical solutions:

[0021] The laser wavelength emitted by the laser and the photodetector are selected according to the target to be measured, that is, a suitable detection wavelength in the spectral range from ultraviolet to near infrared can be selected according to the target to be measured; and a suitable laser and photodetector can be selected according to the detection wavelength.

[0022] The microscope objective lens has a magnification of 4X, a focal length of 45 mm, and a numerical aperture of 0.1.

[0023] The focal length of the tube lens is 200 mm and the diameter is 50 mm.

[0024] The spatial light modulator is a micromirror array composed of a number of tiny reflectors. The array size is 1024×768, and the size of each micromirror is 13.6×13.6μm. 2 Each micromirror corresponds to a storage unit that can be loaded with a value of 0 or 1, thereby controlling the micromirror to flip in two directions of ±12°.

[0025] The focal length of the first collecting lens is 100 mm and the diameter is 40 mm.

[0026] The second collecting lens has a focal length of 150 mm and a diameter of 50 mm.

[0027] The diameter of the pinhole is 15 μm.

[0028] The single-pixel microscopic detection method based on modulus and qualitative phase detection provided by the present invention comprises the following steps:

[0029] (1) Building the above-mentioned single-pixel microscopic detection system;

[0030] (2) The laser emits laser light and illuminates the target object to be measured;

[0031] (3) The laser beam after passing through the target object passes through the microscope objective lens and tube lens, and then irradiates the spatial light modulator;

[0032] (4) Under the control of a computer, the spatial light modulator is loaded with a substrate pattern and forms two reflected light paths, one of which is used to detect the total intensity signal of the object light and the other is used to detect the intensity signal of the zero-frequency component of the object light;

[0033] (5) The data acquisition card collects the synchronization information, the total intensity signal of the object light, and the intensity signal of the zero-frequency component of the object light after the spatial light modulator is loaded with the base pattern;

[0034] (6) The computer processes the data collected by the data acquisition card to obtain the modulus image and real part image of the target object to be measured.

[0035] The present invention can detect static images of cells, crystals or silicon wafers, etc., and can also detect dynamic imaging.

[0036] Compared with the prior art, the present invention has the following advantages:

[0037] The present invention is based on a single-pixel microscopic detection system and method (SPDM, where D represents two imaging modes, namely, modulus value and qualitative phase) of modulus and qualitative phase detection. The object light is modulated by a spatial light modulator, and then bucket detection and zero-frequency detection are performed on two reflected light paths of the spatial light modulator, respectively, so as to simultaneously obtain a modulus image and a real image without complicated super-pixel phase shifting and chessboard reference technology. In view of the fact that the real image can qualitatively reflect the phase distribution, the present invention is suitable for observing various types of samples, including transparent samples. The single-pixel microscopic detection system has high sensitivity, so it can be applied to the field of weak light, and the sample can be detected by weak light, which greatly reduces the degree of damage to the sample.

[0038] The present invention is based on the perfect match between the Hadamard substrate pattern and the spatial light modulator, so that the structure of the device is simple and compact. By adopting a microscope objective lens, phase detection can be performed on smaller objects, such as tissues, cells, etc., and a spatial resolution of up to 1.95μm (spatial frequency is 512lp / mm) can be provided. By adopting a pinhole with a diameter of only 15μm, the zero-frequency component of the modulated object light can be filtered more purely, so that the reconstructed real image of the object is also clearer and more accurate. The detection speed of the present invention is relatively fast, and a pair of real-time video streams can be generated at a frame rate of 0.51FPS, and processes such as the dissolution and precipitation of crystals can be observed in real time. The spatial light modulator DMD can modulate any wavelength and has a high flipping speed, which can greatly improve the imaging speed. The present invention can simultaneously obtain the modulus value and the real image, optimize the imaging operation process to a certain extent, and can image and detect all types of objects, greatly broadening the detection range of samples.

[0039] The single-pixel microscopic detection system provided by the present invention can be used as an additional module of an ordinary microscope, which facilitates its application in optical microscopes. And as a typical single-pixel detection mode, it can be applied to non-visible wavelengths such as terahertz, providing new possibilities for biomedical diagnosis, target recognition and industrial detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 It is a structural schematic diagram of a single-pixel microscopic detection system based on modulus and qualitative phase detection of the present invention.

[0041] Figure 2 It is the test result after the oral epithelial cells are passed through the system as the target object; Figure 2 (a) is the modulus detection result, Figure 2 (b) is the real part detection result.

[0042] Figure 3 It is the result of an experiment on the dissolution of sugar in water; Figure 3 (a) is the module value test result of sugar dissolution. Figure 3Row (b) is the real part test result of sugar dissolution.

[0043] Figure 4 It is the test result after the crystal is taken as the target object and passed through the system; Figure 4 (a) is a picture of the crystal taken by a mobile phone. Figure 4 (b) is the result of real part detection, Figure 4 (c) is the result of modulus detection.

[0044] Figure 5 It is the test result after the silicon wafer is passed through the system. Figure 5 (a) is the result of the real part detection of silicon-based chips. Figure 5 (b) is the result of silicon-based chip module value detection. Figure 5 (c) is the result of the real part detection of the deep silicon etched wafer. Figure 5 (d) is the result of deep silicon etched wafer module value detection.

[0045] In the figure: 1. He-Ne laser; 2. first reflector; 3. target object; 4. microscope objective; 5. second reflector; 6. tube lens; 7. spatial light modulator; 8. attenuation plate; 9. first collecting lens; 10. first photodetector; 11. second collecting lens; 12. pinhole; 13. second photodetector; 14. data acquisition card; 15. computer. DETAILED DESCRIPTION

[0046] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below through specific embodiments in conjunction with the accompanying drawings.

[0047] like Figure 1 As shown, the single-pixel microscopic detection system based on modulus and qualitative phase detection of the present invention includes: a He-Ne laser 1, a first reflector 2, a microscope objective 4, a second reflector 5, a tube lens 6, a spatial light modulator 7, an attenuation plate 8, a first collecting lens 9, a first photodetector 10, a second collecting lens 11, a pinhole 12, a second photodetector 13, a data acquisition card 14 and a computer 15.

[0048] The He-Ne laser 1 is used to emit laser light to form a coherent illumination light field. The He-Ne laser 1 uses a helium-neon gas laser (Shanghai Hongyang, HN-1200), and the emitted laser wavelength is 632.8 nm.

[0049] The first reflector 2 is a 45° reflector, which is arranged on the laser optical path of the He-Ne laser 1. Its function is to change the direction of the optical path, and to convert the horizontal optical path emitted by the He-Ne laser 1 into a vertical direction, so as to facilitate the placement of the target object 3 in a horizontal state. The target object 3 is arranged on the laser optical path after being reflected by the first reflector 2, and the laser reflected by the first reflector 2 is irradiated on the target object 3.

[0050] The microscope objective lens 4 is arranged behind the target object 3 and is located in the laser light path after reflection by the first reflector 2. It is used to magnify the image of the target object so that it can detect tiny objects. The microscope objective lens 4 (Olympus, PLN 4X) has a magnification of 4X, a focal length of 45mm, and a numerical aperture of 0.1.

[0051] The second reflector 5 is a 45° reflector, which is arranged on the laser light path behind the microscope objective lens 4. Its function is to change the direction of the light path and convert the vertical light path after passing through the microscope objective lens 4 back to the horizontal direction, thereby facilitating the construction of the light path.

[0052] The tube lens 6 is arranged on the laser light path after being reflected by the second reflector 5. The focal length of the tube lens 6 is 200 mm and the diameter is 50 mm. The spatial light modulator 7 is arranged on the laser light path behind the tube lens 6 and is placed at a position where the object image is clear, and is used to modulate the amplified object light. The spatial light modulator 7 is a digital micromirror device DMD (V-7000, VIALUX). The DMD is composed of many tiny reflectors made of aluminum alloy. The array size is 1024×768, and the size of each micromirror is 13.6×13.6μm. 2 The object light from the microscope objective lens 4 passes through the second reflector 5 and then through the tube lens 6 to form a clear image of the target object onto the spatial light modulator 7.

[0053] The spatial light modulator 7 has two reflection light paths, which are named as the first reflection light path and the second reflection light path. The two reflection light paths are used for barrel signal detection and zero-frequency signal detection, respectively. An attenuation plate 8, a first collection lens 9 and a first photodetector 10 are arranged in sequence on the first reflection light path. A second collection lens 11, a pinhole 12 and a second photodetector 13 are arranged in sequence on the second reflection light path.

[0054] The attenuation plate 8 is arranged on the first reflected light path after being reflected by the spatial light modulator 7 , and is used to attenuate the laser light to within the working range allowed by the first photodetector 10 .

[0055] The first collecting lens 9 is arranged behind the attenuation plate 8 and placed on the first reflected light path after the spatial light modulator 7 is reflected, and is used to converge the modulated and attenuated object light to the first photodetector 10. The first collecting lens 9 has a focal length of 100 mm and a diameter of 40 mm.

[0056] The first photodetector 10 is arranged on the first reflected light path after the spatial light modulator 7 is reflected, and is placed near the rear focal plane of the first collecting lens 9, for collecting the total intensity of the modulated object light. The first photodetector 10 is a silicon-based single-pixel detector (PDAPC2, THORLABS), which has the advantages of spectral response of 320nm to 1100nm and high sensitivity.

[0057] The second collecting lens 11 is arranged on the second reflected light path after being reflected by the spatial light modulator 7, and is used to converge the modulated object light to the pinhole 12. The second collecting lens 11 has a focal length of 150 mm and a diameter of 50 mm.

[0058] The pinhole 12 is arranged on the second reflected light path after reflection by the spatial light modulator 7 and is placed at the rear focal plane of the second collecting lens 11, so as to couple the zero-frequency component of the modulated object light into the pinhole 12. The core diameter of the pinhole 12 is only 15 μm, which can filter the zero-frequency component of the modulated object light more purely, so that the reconstructed real image of the object is also clearer and more accurate.

[0059] The second photodetector 13 is arranged on the second reflected light path after the spatial light modulator 7 is reflected and is placed behind the pinhole 12 to collect the light passing through the pinhole 12 and detect the intensity of the zero-frequency component of the object light. The model used by the second photodetector 13 is the same as that of the first photodetector 10.

[0060] The data acquisition card 14 is connected to the spatial light modulator 7, the first photodetector 10 and the second photodetector 13 respectively, and is used to collect the synchronization information after the spatial light modulator 7 is loaded with the substrate pattern, the total intensity information of the object light collected by the first photodetector 10, and the intensity information of the zero-frequency component of the object light collected by the second photodetector 13. The data acquisition card 14 (USB-2020, MEASUREMENT COMPUTING) provides high-speed synchronous analog output channels, and the speed of each channel can reach up to 20MS / s.

[0061] The computer 15 is electrically connected to the spatial light modulator 7 and the data acquisition card 14 respectively, and is used to control the spatial light modulator 7 to load the Hadamard basis pattern, and to process, store and display the measurement data collected by the data acquisition card 14 .

[0062] The engineering principle of the single-pixel microscopic detection system of the present invention is as follows: the light source adopts a He-Ne laser 1 with a wavelength of 632.8nm. The first reflector 2 and the second reflector 5 are used to change the direction of the light beam, so as to facilitate the placement of the target object 3 in a horizontal state and the construction of the subsequent optical path. The microscope objective 4 and the tube lens 6 form an ordinary microscope, and the target object 3 and the spatial light modulator 7 are respectively located in the object image plane and the image plane. The spatial light modulator 7DMD is composed of a micromirror array, and the inclination of the micromirror is at an angle of ±12° with the normal direction of the DMD surface, so that the incident object light modulated by the DMD forms a pair of complementary structured beams in the two reflected light paths. The attenuation plate 8 attenuates the laser of the inner reflected light path. The first collecting lens 9 and the first photodetector 10 form a barrel detector to record the total intensity of the modulated object light. The modulated object light is converged to the pinhole 12 through the second collecting lens 11 to obtain its Fourier spectrum. The pinhole 12 only allows the zero-frequency component to pass through and finally reaches the second photodetector 13. This detection method is called zero-frequency detection. According to the frame synchronization pulse of the spatial light modulator 7, the data acquisition card 14 respectively acquires the barrel detection signal and the zero-frequency detection signal from the first photodetector 10 and the second photodetector 13. The computer 15 is electrically connected to the spatial light modulator 7 and the data acquisition card 14, respectively, and is used to control the spatial light modulator 7 to load the Hadamard base pattern, and to process, store and display the measurement data acquired by the data acquisition card 14.

[0063] The working process of the present invention is:

[0064] The Hadamard basis matrix is ​​used to generate the Hadamard basis matrix sequence, which is expressed as:

[0065]

[0066] in H u and H v are the u-th and v-th row vectors of the Walsh-Hadamard matrix H of order N, respectively. Indicates H u is the transpose of . It only contains 0s and 1s and is therefore very suitable for binary on or off modulation of the spatial light modulator 7.

[0067] For an object beam with complex amplitude f, the modulated light in a reflected light path is The modulated light in the other reflected light path is in In the first reflected light path, the bucket detection signal is proportional to the total intensity of the modulated light:

[0068]

[0069] Among them, the sum is the sum of all matrix elements, η represents the detection efficiency, and considering Hadamard spectral components The difference between the two signals M(u,v) = α[B (+) (u,v)-B (-) (u,v)], where α = 1 / η. From the entire set of base patterns Looking at all the bucket detection signals, we can get the Hadamard spectrum matrix:

[0070] M=α[B (+) -B (-) [ (3)

[0071] Perform an inverse Hadamard transform on the spectrum matrix M to obtain the modulus image of the object:

[0072]

[0073] In the second reflected light path, the zero-frequency detection signal is proportional to the intensity of the zero-frequency component of the modulated light:

[0074]

[0075] Substituting formula (1) into formula (5), we get

[0076]

[0077] Among them, R = Σf can be regarded as a reference term, is the Hadamard spectrum component of f, It can be seen that the reference term R and the spectral component F(u,v) both come from the modulated object light, and the interference term obtained from the positive and negative base patterns has a π phase shift. By differentiating the two signals, we get According to all zero-frequency signals of the whole set of base patterns, we can get:

[0078]

[0079] For clarity, reference terms are expressed in exponential form. Then perform an inverse Hadamard transform on both sides of formula (7) to obtain:

[0080]

[0081] Where β = α / r, and considering that H is a real matrix. Therefore, the phase shift φ is obtained by zero-frequency detection. r It can be seen from equations (4) and (8) that the modulus image and the real image can be directly reconstructed from the difference of the bucket detection signal and the difference of the zero-frequency detection signal, respectively.

[0082] The present invention uses oral epithelial cells as the target object, and the test results after the system are as follows Figure 2 shown. Figure 2 (a) is the modulus detection result, Figure 2 (b) is the real part detection result. It can be seen that the modulus image can obtain the edge of the object, and the real part image can reflect the structural information contained in the phase.

[0083] Afterwards, in order to test the dynamic imaging performance, the present invention recorded the process of sugar dissolving in the droplet, and generated a pair of real-time video streams at a frame rate of about 0.51 FPS. Figure 3 The (a) and (b) rows of the graph show the modulus frame and real frame sampled therefrom, respectively. Note that the object in the box is not a sugar particle, but a speck of dust on the slide, which happens to serve as a reference. It can be seen that the present invention can not only capture the changes in the sugar itself, but also discover the changes it causes in the surrounding solution.

[0084] In addition, the present invention can detect the grating structure formed by the internal defects of the crystal, and the detection results are as follows: Figure 4 shown. Figure 4 (a) is a picture of the crystal taken by a mobile phone. Figure 4 (b) is the result of real part detection, Figure 4 (c) is the result of the modulus detection, from which we can see the diffraction pattern of the grating inside the crystal.

[0085] Finally, considering that the present invention is extremely convenient in converting to other wavelengths, we replaced the He-Ne laser 1 with a near-infrared 1550nm laser (PL-DFB-1550-C-1-SA-14BF, Xiaoxiao Photonics), and replaced the corresponding silicon-based photodetector with an indium gallium arsenide photodetector with a detection wavelength of 800nm-2600nm (PDAPC4, THORLABS). The silicon was then tested, and the test results are as follows: Figure 5 As shown. Among them, Figure 5 (a) is the result of the real part detection of silicon-based chips. Figure 5 (b) is the result of silicon-based chip module value detection. Figure 5 (c) is the result of the real part detection of the deep silicon etched wafer. Figure 5 (d) is the result of the deep silicon etched wafer mode value detection. From these results, the structural features of silicon can be clearly seen. It can be seen that this system can be easily extended to non-visible bands such as ultraviolet and near-infrared.

Claims

1. A single pixel microscopic detection system based on modulus and qualitative phase detection, characterized in that: The device comprises a laser, a microscope objective lens, a tube lens, a spatial light modulator, a data acquisition card and a computer; the laser, the microscope objective lens, the tube lens and the spatial light modulator are arranged in sequence along the laser optical path; the target object to be measured is arranged on the optical path between the laser and the microscope objective lens; The spatial light modulator is a digital micromirror device, and has two reflective light paths, one of which is provided with an attenuation plate, a first collecting lens, and a first photodetector in sequence; the other is provided with a second collecting lens, a pinhole, and a second photodetector in sequence; the first reflective light path is used for detecting the total intensity signal of the object light, and the second reflective light path is used for detecting the intensity signal of the zero-frequency component of the object light; The data acquisition card is connected to the spatial light modulator, the first photodetector, and the second photodetector respectively, and is used to collect synchronization information after the spatial light modulator is loaded with the substrate pattern, the total intensity signal of the object light collected by the first photodetector, and the zero-frequency component intensity signal of the object light collected by the second photodetector; The computer is connected to the spatial light modulator and the data acquisition card respectively, and is used to control the spatial light modulator to load the substrate pattern, and to process, store and display the data collected by the data acquisition card.

2. The single pixel microscopic detection system based on modulus and qualitative phase detection according to claim 1 is characterized in that: The digital micromirror device is a micromirror array composed of a number of tiny mirrors. The size of the micromirror array is 1024×768, and the size of each tiny mirror is 13.6×13.6 μm. 2 .

3. The single pixel microscopic detection system based on modulus and qualitative phase detection according to claim 2 is characterized in that: Each tiny mirror can be flipped to +12° or -12° under computer control.

4. The single pixel microscopic detection system based on modulus and qualitative phase detection according to claim 1 is characterized in that: A first reflector is arranged on the optical path between the laser and the microscope objective lens, and a second reflector is arranged on the optical path between the microscope objective lens and the tube lens; the first reflector is used to convert the horizontal optical path emitted by the laser into a vertical optical path, and the second reflector is used to convert the vertical optical path after passing through the microscope objective lens into a horizontal optical path; the target object to be measured is arranged on the optical path between the first reflector and the microscope objective lens.

5. The single pixel microscopic detection system based on modulus and qualitative phase detection according to claim 1 is characterized in that: Lasers emit a monochromatic, coherent beam of light.

6. The single pixel microscopic detection system based on modulus and qualitative phase detection according to claim 1 is characterized in that: The focal length of the first collecting lens is 100 mm and the diameter is 40 mm; the focal length of the second collecting lens is 150 mm and the diameter is 50 mm; the diameter of the pinhole is 15 μm.

7. A single pixel microscopic detection method based on modulus and qualitative phase detection, characterized in that: The steps include: (1) constructing the single-pixel microscopic detection system as described in claim 1; (2) The laser emits laser light and illuminates the target object to be measured; (3) The laser beam after passing through the target object passes through the microscope objective lens and tube lens, and then irradiates the spatial light modulator; (4) Under the control of a computer, the spatial light modulator is loaded with a substrate pattern and forms two reflected light paths, one of which is used to detect the total intensity signal of the object light and the other is used to detect the intensity signal of the zero-frequency component of the object light; (5) The data acquisition card collects the synchronization information, the total intensity signal of the object light, and the intensity signal of the zero-frequency component of the object light after the spatial light modulator is loaded with the base pattern; (6) The computer processes the data collected by the data acquisition card to obtain the modulus image and real part image of the target object to be measured.

8. The single pixel microscopic detection method based on modulus and qualitative phase detection according to claim 7 is characterized in that: The models and brands of the digital micromirror devices are V-7000 and VIALUX respectively.

9. The single pixel microscopic detection method based on modulus and qualitative phase detection according to claim 7 is characterized in that: The target to be detected is a cell, a crystal or a silicon wafer.

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