Sliding door assembly of ion implanter and ion implanter

Abstract

The invention discloses a sliding door assembly of an ion implanter and the ion implanter. The sliding door assembly of the ion implanter comprises a door body assembly and a sliding door assembly, wherein the door body assembly comprises a plurality of door bodies; the upper slide way assembly comprises a plurality of upper slide ways which are arranged in parallel, and the top of each door body is in sliding connection with one upper slide way; the lower slide way assembly comprises a plurality of lower slide ways which are arranged in parallel, and the bottom of each door body is connected with one lower slide way in a sliding mode. The door body assembly is composed of the multiple door bodies and is in sliding connection with the upper slide way assembly and the lower slide way assembly, the door bodies are controlled to be opened and closed in a sliding push-pull mode, the occupied space in the door body opening and closing process is reduced, meanwhile, the multiple door bodies are arranged, the weight of the single door body is reduced, opening and closing operation of the door bodies is simpler, labor is saved, and use is more convenient. And the stability of the door body can be improved, and deformation and the like are avoided.

Description

Technical Field

[0001] The present invention relates to the technical field related to ion implanters, and more specifically, to an ion implanter sliding door assembly and an ion implanter. Background Art

[0002] At present, most ion implanters use a double-door structure, which takes up a large space and is inconvenient to operate. In addition, two or more sets of double-doors are required for the same size of channel. If a sliding door is used, the space occupied can be reduced. However, since the shielding door is equipped with a lead plate, it is heavy, up to 120kg-150kg. If a large-sized sliding door is used, it will be deformed and not slide smoothly. Summary of the invention

[0003] In view of the deficiencies in the prior art, the present invention innovatively provides an ion implanter sliding door assembly and an ion implanter, which can solve the above-mentioned technical problems existing in the prior art.

[0004] To achieve the above technical objectives, the present invention discloses, in a first aspect, an ion implanter sliding door assembly, comprising:

[0005] A door body assembly, wherein the door body assembly comprises a plurality of door bodies;

[0006] An upper slide assembly, comprising a plurality of upper slides, the plurality of upper slides are arranged in parallel, and the top of each door body is slidably connected to one of the upper slides;

[0007] The lower slide assembly comprises a plurality of lower slides, the plurality of lower slides are arranged in parallel, and the bottom of each door body is slidably connected to a lower slide.

[0008] Further, the door body assembly includes a first door body, a second door body and a third door body,

[0009] A first linkage member is disposed on the first side of the first door body, a second linkage member is disposed on the first side of the second door body, a third linkage member is disposed on the second side of the second door body, a fourth linkage member is disposed on the first side of the third door body, and a fifth linkage member is disposed between the first side and the second side of the third door body.

[0010] The first linkage member is used to cooperate with the second linkage member or the third linkage member so that the first door body and the second door body can slide synchronously.

[0011] The fourth linkage member and the fifth linkage member are used to cooperate with the third linkage member so that the second door body and the third door body can slide synchronously.

[0012] Furthermore, the upper slideway includes a slide groove, a pulley is arranged on the top of the door body, and the pulley is slidably connected in the slide groove.

[0013] Furthermore, a plurality of pulley assemblies are arranged on the top of the door body, and the pulley assemblies include a connecting frame, the connecting frame is arranged on the door body, the connecting frame includes a connecting shaft, and the connecting shaft is provided with a pulley.

[0014] Furthermore, the lower slide includes a slide rail, the slide rail is a cylindrical or cylindrical structure, and a roller is provided at the bottom of the door body, and the roller is in rolling contact with the slide rail.

[0015] Furthermore, a roller seat is provided at the bottom of the door body, a roller is provided on the roller seat, a V-shaped groove is formed on the roller along its circumference, and an inner wall of the V-shaped groove is in sliding contact with the slide rail.

[0016] Furthermore, the first door body and the third door body are provided with handles.

[0017] Furthermore, a first door lock is disposed on the second side of the first door body, and a second door lock is disposed on the second side of the third door body.

[0018] Furthermore, the door body includes a frame and a door panel, the frame is composed of a plurality of cross beams and longitudinal beams connected to each other, and the door panel is wrapped around the outside of the frame.

[0019] The door panel is composed of an aluminum plate and a lead plate, and the lead plate is wrapped by the aluminum plate.

[0020] A second aspect of the present invention discloses an ion implanter, comprising a body, on which the above-mentioned ion implanter sliding door assembly is arranged.

[0021] The beneficial effects of the present invention are:

[0022] The door body assembly of the present invention is composed of multiple door bodies, which are slidably connected to the upper slideway assembly and the lower slideway assembly respectively, and the door opening and closing is controlled in a sliding push-pull manner, thereby reducing the space occupied by the door body opening and closing process. At the same time, the arrangement of multiple door bodies also reduces the weight of a single door body, making the opening and closing operation of the door body simpler and more labor-saving, and can also improve the stability of the door body and avoid deformation. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram showing the structure of a sliding door assembly of an ion implanter according to an embodiment of the present invention is shown;

[0024] Figure 2 A schematic diagram showing the internal structure of a door body according to an embodiment of the present invention is shown;

[0025] Figure 3A schematic diagram showing the structure of a pulley assembly according to an embodiment of the present invention is shown;

[0026] Figure 4 A schematic top view of a door assembly according to an embodiment of the present invention is shown;

[0027] Figure 5 A schematic diagram of the assembly structure of the roller and the guide rail according to an embodiment of the present invention is shown;

[0028] Figure 6 A schematic diagram of the installation structure of the roller seat on the door body according to an embodiment of the present invention is shown.

[0029] In the figure,

[0030] 1. Door body; 101. First door body; 102. Second door body; 103. Third door body; 11. Frame; 12. Door panel; 13. Cover plate; 141. Connecting frame; 142. Connecting shaft; 143. Pulley; 151. First linkage member; 152. Second linkage member; 153. Third linkage member; 154. Fourth linkage member; 155. Fifth linkage member; 161. Roller seat; 162. Roller; 17. Handle; 18. Connecting plate; 181. Connecting screw; 19. Support beam; 191. Support bolt; 2. Upper slideway assembly; 3. Lower slideway assembly; 31. Slide rail; 32. Base; 4. Column. DETAILED DESCRIPTION

[0031] The ion implanter sliding door assembly and the ion implanter provided by the present invention are explained and illustrated in detail below in conjunction with the drawings in the specification.

[0032] A first aspect of the present invention provides an ion implanter sliding door assembly, such as Figure 1 As shown, it includes a door body assembly, an upper slideway assembly 2 and a lower slideway assembly 3. The door body assembly is composed of multiple door bodies 1, which are slidably connected to the upper slideway assembly 2 and the lower slideway assembly 3, respectively, and the door is controlled to be opened and closed in a sliding push-pull manner, thereby reducing the space occupied by the door body 1 during the opening and closing process. At the same time, the arrangement of multiple door bodies 1 also reduces the weight of a single door body 1, making the opening and closing operation of the door body 1 simpler and more labor-saving, and can also improve the stability of the door body 1 and avoid deformation. The present invention is described in detail below in conjunction with specific embodiments:

[0033] In some embodiments, Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5As shown, the door assembly includes a plurality of door bodies 1, and the plurality of door bodies 1 can slide independently and can be linked, that is, the sliding of one door body 1 can drive the sliding of an adjacent door body 1. The plurality of door bodies 1 are at least partially overlapped in the open state, or completely overlapped, to obtain a larger opening range, and there is a partial overlap between two adjacent door bodies 1 in the closed state to ensure the sealing of the door body 1 in the closed state. Optionally, the plurality of door bodies 1 are of the same size. Furthermore, in the closed state, two adjacent door bodies 1 have at least 150 mm of overlapping parts to ensure the sealing and radiation protection performance in the closed state.

[0034] like Figure 2 As shown, the door body 1 includes a frame 11 and a door panel 12. The frame 11 is composed of a plurality of cross beams and longitudinal beams connected to each other, and the door panel 12 is wrapped around the outside of the frame 11. Optionally, the cross beams and longitudinal beams are composed of square steel, and a plurality of cross beams and longitudinal beams are welded to form the frame 11. The door panel 12 is composed of an aluminum plate and a lead plate, and the lead plate is wrapped by an aluminum plate. Optionally, the lead plate has a thickness of 3 mm and the aluminum plate has a thickness of 1.5 mm. In this embodiment, two layers of aluminum plates are provided, and the lead plate is provided between the two layers of aluminum plates. The edge of the lead plate is wrapped by the aluminum plate, and the lead plate and the aluminum plate are bonded. The thickness of the lead plate can be adjusted as needed, and mainly plays a role in shielding radiation. The corresponding lead plate thickness can be selected according to the power of the ion implanter.

[0035] like Figure 4 As shown, the door assembly includes a first door body 101, a second door body 102 and a third door body 103. A first linkage member 151 is provided on the first side of the first door body 101, a second linkage member 152 is provided on the first side of the second door body 102, a third linkage member 153 is provided on the second side of the second door body 102, a fourth linkage member 154 is provided on the first side of the third door body 103, and a fifth linkage member 155 is provided between the first side and the second side of the third door body 103. The linkage member is provided on the top of the door body, and the second door body 102 located in the middle can slide along with the first door body 101 or the third door body 103 during the process of opening and closing the door through the provision of the linkage member. In this embodiment, the first door body 101, the second door body 102, and the third door body 103 are of the same size. Optionally, taking the first door body 101 as an example, the size of the first door body 101 is 1200mm×2300mm×32mm, so as to avoid a single door body being too large, so that the weight of a single door body will not be too large and deformation will not occur easily. In addition, the size of a single door body is such that the total thickness of the door body assembly composed of the first door body 101, the second door body 102 and the third door body 103 is 108mm, thereby reducing the overall space occupied by the door body assembly.

[0036] In some embodiments, the first linkage member 151 is disposed at the top of the first door body 101, and a first protrusion is formed on the first linkage member 151, which is perpendicular to the door body and protrudes toward the side where the second door body 102 is located. The second linkage member 152 and the third linkage member 153 are disposed at the top of the second door body 102, wherein a second protrusion is formed on the second linkage member 152, which is perpendicular to the second door body 102 and protrudes toward the side of the first door body 101. After the first door body 101 and the second door body 102 are installed, the first protrusion is located between the two second protrusions, and the first protrusion abuts against one of the two second protrusions to realize the linkage of the first door body 101 and the second door body 102. The third linkage member 153 is also formed with a third protrusion that is perpendicular to the second door body 102 and protrudes toward the side where the third door body 103 is located. The third protrusion and the second protrusion are in opposite directions, and the second door body 102 is disposed between the first door body 101 and the third door body 103.

[0037] The fourth linkage member 154 and the fifth linkage member 155 are arranged on the top of the third door body 103, and a fourth protrusion is formed on the fourth linkage member 154 and the fifth linkage member 155, which is perpendicular to the third door body 103 and faces the side where the second door body 102 is located. The third protrusion is located between the two fourth protrusions and can slide between the two fourth protrusions. The third protrusion can abut against one of the fourth protrusions to realize the linkage between the second door body 102 and the third door body 103.

[0038] In some embodiments, the upper slide assembly 2 includes a plurality of upper slides, the plurality of upper slides are arranged in parallel, the top of each door body 1 is slidably connected to an upper slide, the upper slide includes a slide groove, and the upper slide is optionally a U-shaped groove structure, and the plurality of upper slides are arranged side by side to form an integral structure. In this embodiment, three upper slides are arranged, corresponding to the first door body 101, the second door body 102, and the third door body 103, respectively.

[0039] The lower slide assembly 3 includes a plurality of lower slides, which are arranged in parallel, and the bottom of each door body 1 is slidably connected to a lower slide. Optionally, the lower slide includes a slide rail 31, which is a cylindrical or cylindrical structure, and the plurality of lower slides are arranged side by side and are connected to the base 32 to form an integral structure. In this embodiment, three lower slides are provided, corresponding to the first door body 101, the second door body 102 and the third door body 103, respectively.

[0040] A pulley assembly is provided at the top of the door body 1, such as Figure 3As shown, the pulley assembly includes a connecting frame 141, which is arranged on the door body 1, and the connecting frame 141 includes a connecting shaft 142, on which a pulley 143 is arranged, and the pulley 143 is slidably connected to the slide rail 31. Optionally, two pulley assemblies are arranged on each of the first door body 101, the second door body 102 and the third door body 103 to improve the sliding stability of the door body 1. Optionally, the pulley 143 is wrapped with POM (polyformaldehyde, a thermoplastic crystalline polymer) or other materials that can reduce the friction coefficient, so as to reduce friction.

[0041] like Figure 5 As shown, a roller seat 161 is provided at the bottom of the door body 1, and a roller 162 is provided on the roller seat 161. A V-shaped groove is formed on the roller 162 along its circumference, and the inner wall of the V-shaped groove is in sliding contact with the slide rail 31, thereby reducing the contact area between the roller 162 and the slide rail 31 and reducing rolling friction.

[0042] In some embodiments, two connecting plates 18 are provided on the inner side of the bottom of the door body 1, and the connecting plates 18 are arranged vertically. The roller seat 161 is arranged between the two connecting plates 18 and is adjustably connected to the connecting plates 18. Optionally, a long hole is provided on the connecting plate 18, and the two sides of the roller seat 161 are connected to the connecting plate 18 by a connecting screw 181, and the position of the roller seat 161 can be adjusted by sliding in the long hole through the connecting screw 181, thereby playing a role in adjusting the height of the roller 162. Optionally, a support beam 19 is also provided at the top of the two connecting plates 18, and a support bolt 191 is provided on the support beam 19. The support bolt 191 is threadedly connected to the support beam 19, and one end of the support bolt 191 passes through the support beam 19 and abuts against the top of the roller seat 161, thereby supporting the roller seat 161. Further, a plurality of support bolts 191 are provided, such as two, to improve the bearing capacity.

[0043] Optionally, the pulleys 143 and the rollers 162 are symmetrically distributed about the vertical center line of the first door body 101, so that the center of gravity of the first door body 101 is located on the midpoint perpendicular line of the line connecting the plurality of rollers 162, and is also located on the midpoint perpendicular line of the line connecting the plurality of pulleys 143, thereby improving the stability of the first door body 101. The distribution of the rollers 162 and the pulleys 143 on the second door body 102 and the third door body 103 is the same as that of the first door body 101.

[0044] In some embodiments, a cover plate 13 is provided on the door panel 12. The cover plate 13 is independently provided with the door panel 12 and is detachably provided on the frame 11. The pulley assembly and the roller seat 161 are provided in the cover plate 13. The cover plate 13 and the roller seat 161 can be disassembled and assembled by disassembling the cover plate 13.

[0045] In some embodiments, a handle 17 is provided on the second side edge of the first door body 101, and a handle 17 is provided on the second side of the third door body 103, so that the first door body 101 or the third door body 103 can be opened or closed by the handle 17, and the opening direction can be selected as needed. Optionally, a first door lock is provided on the second side of the first door body 101, and a second door lock is provided on the second side of the third door body 103, and when it is not necessary to open or in the closed state, the first door body 101 and the third door body 103 can be locked.

[0046] According to a second aspect of the present invention, an ion implanter is provided, wherein the ion implanter sliding door assembly is arranged on the machine body, and is used to close or open the access door of the machine body. Optionally, columns 4 are arranged on both sides of the access door of the machine body, and the first door body 101 and the third door body 103 can contact and lock with one column 4 respectively. Optionally, a buffer pad is arranged on the column 4 to reduce the impact force between the door body and the column 4.

[0047] In the description of the present invention, it is to be understood that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “thickness”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0048] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0049] In the description of this specification, the description with reference to the terms "this embodiment", "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in a suitable manner in any at least one embodiment or example. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0050] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0051] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and simple improvements made to the essential contents of the present invention should be included in the protection scope of the present invention.

Claims

1. An ion implanter sliding door assembly, characterized in that: include: A door body assembly, wherein the door body assembly comprises a plurality of door bodies; An upper slide assembly, comprising a plurality of upper slides, the plurality of upper slides are arranged in parallel, and the top of each door body is slidably connected to one of the upper slides; The lower slide assembly comprises a plurality of lower slides, the plurality of lower slides are arranged in parallel, and the bottom of each door body is slidably connected to a lower slide.

2. The ion implanter sliding door assembly according to claim 1, characterized in that: The door body assembly includes a first door body, a second door body and a third door body, A first linkage member is disposed on the first side of the first door body, a second linkage member is disposed on the first side of the second door body, a third linkage member is disposed on the second side of the second door body, a fourth linkage member is disposed on the first side of the third door body, and a fifth linkage member is disposed between the first side and the second side of the third door body. The first linkage member is used to cooperate with the second linkage member or the third linkage member so that the first door body and the second door body can slide synchronously. The fourth linkage member and the fifth linkage member are used to cooperate with the third linkage member so that the second door body and the third door body can slide synchronously.

3. The ion implanter sliding door assembly according to claim 2, characterized in that: The upper slideway comprises a slide groove, a pulley is arranged on the top of the door body, and the pulley is slidably connected in the slide groove.

4. The ion implanter sliding door assembly according to claim 3, characterized in that: A plurality of pulley assemblies are arranged on the top of the door body, and the pulley assemblies include a connecting frame, the connecting frame is arranged on the door body, the connecting frame includes a connecting shaft, and a pulley is arranged on the connecting shaft.

5. The ion implanter sliding door assembly according to claim 3, characterized in that: The lower slide includes a slide rail, which is a column or cylindrical structure. A roller is provided at the bottom of the door body, and the roller is in rolling contact with the slide rail.

6. The ion implanter sliding door assembly according to claim 5, characterized in that: A roller seat is arranged at the bottom of the door body, a roller is arranged on the roller seat, a V-shaped groove is formed on the roller along its circumference, and the inner wall of the V-shaped groove is in sliding contact with the slide rail.

7. The sliding door assembly of the ion implanter according to claim 2, characterized in that: The first door body and the third door body are provided with handles.

8. The sliding door assembly of the ion implanter according to claim 7, characterized in that: A first door lock is disposed on the second side of the first door body, and a second door lock is disposed on the second side of the third door body.

9. The sliding door assembly of the ion implanter according to claim 1, characterized in that: The door body includes a frame and a door panel, wherein the frame is composed of a plurality of cross beams and longitudinal beams connected to each other, and the door panel is wrapped around the outside of the frame. The door panel is composed of an aluminum plate and a lead plate, and the lead plate is wrapped by the aluminum plate.

10. An ion implanter, characterized in that: The invention comprises a machine body, on which is arranged the sliding door assembly of the ion implanter according to any one of claims 1 to 9.

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