Ion implanter push-pull door assembly and ion implanter

Abstract

The application discloses an ion implanter push-pull door assembly and an ion implanter. The ion implanter push-pull door assembly comprises a door body assembly, the door body assembly comprising a plurality of door bodies; an upper slide rail assembly comprising a plurality of upper slide rails, the plurality of upper slide rails being arranged in parallel, and the top of each door body being slidably connected with one upper slide rail; and a lower slide rail assembly comprising a plurality of lower slide rails, the plurality of lower slide rails being arranged in parallel, and the bottom of each door body being slidably connected with one lower slide rail. The door body assembly is composed of a plurality of door bodies and is slidably connected with the upper slide rail assembly and the lower slide rail assembly, so that the door can be opened and closed in a sliding push-pull mode, the space occupied in the opening and closing process of the door body is reduced, the weight of a single door body is reduced due to the arrangement of the plurality of door bodies, the opening and closing operation of the door body is simpler and more labor-saving, the stability of the door body can be improved, and deformation of the door body can be avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of ion implanters, and more particularly, to an ion implanter sliding door assembly and an ion implanter. BACKGROUND

[0002] At present, ion implanters mostly adopt a double-leaf door structure. The double-leaf door structure occupies a large space and is inconvenient to operate. In addition, in the case of a same size channel, two or more groups of double-leaf doors need to be set. If a sliding door is used, the occupied space can be reduced. However, since a lead plate is installed on the shielding door, the weight of the shielding door is large, up to 120 kg-150 kg. Therefore, if a large-size sliding door is used, the deformation of the sliding door will be large, and the sliding of the sliding door will be not smooth. SUMMARY

[0003] In view of the deficiencies in the prior art, the present application provides an ion implanter sliding door assembly and an ion implanter, which can solve the above technical problems in the prior art.

[0004] To achieve the above technical purposes, in a first aspect, the present application discloses an ion implanter sliding door assembly, comprising:

[0005] a door body assembly, the door body assembly comprising a plurality of door bodies;

[0006] an upper slide assembly comprising a plurality of upper slides, the plurality of upper slides being arranged in parallel, and the top of each door body being slidably connected to one upper slide;

[0007] a lower slide assembly comprising a plurality of lower slides, the plurality of lower slides being arranged in parallel, and the bottom of each door body being slidably connected to one lower slide.

[0008] Further, the door body assembly comprises a first door body, a second door body, and a third door body,

[0009] a first linkage is arranged on the first side of the first door body, a second linkage is arranged on the first side of the second door body, a third linkage is arranged on the second side of the second door body, a fourth linkage is arranged on the first side of the third door body, and a fifth linkage is arranged between the first side and the second side of the third door body,

[0010] the first linkage is used to cooperate with the second linkage or the third linkage, so that the first door body and the second door body can be synchronously slid,

[0011] the fourth linkage and the fifth linkage are used to cooperate with the third linkage, so that the second door body and the third door body can be synchronously slid.

[0012] Further, the upper slide track comprises a sliding groove, and the top of the door body is provided with a pulley which is slidably connected in the sliding groove.

[0013] Further, the top of the door body is provided with a plurality of pulley assemblies, each of which comprises a connecting frame provided on the door body and comprising a connecting shaft provided with a pulley.

[0014] Further, the lower slide track comprises a sliding rail which is a cylindrical or tubular structure, and the bottom of the door body is provided with a rolling wheel which is in rolling contact with the sliding rail.

[0015] Further, the bottom of the door body is provided with a rolling wheel seat provided with a rolling wheel, and the rolling wheel is provided with a V-shaped groove along the circumferential direction of the rolling wheel, and the inner wall of the V-shaped groove is in sliding contact with the sliding rail.

[0016] Further, the first door body and the third door body are provided with handles.

[0017] Further, the second side of the first door body is provided with a first door lock, and the second side of the third door body is provided with a second door lock.

[0018] Further, the door body comprises a frame and a door plate, the frame is composed of a plurality of cross beams and longitudinal beams connected with each other, and the door plate is wrapped outside the frame.

[0019] The door plate is composed of an aluminum plate and a lead plate, and the lead plate is wrapped by the aluminum plate.

[0020] In the second aspect, the ion implanter is disclosed, comprising a body, and the body is provided with the ion implanter sliding door assembly.

[0021] The beneficial effects of the present application are as follows:

[0022] The door body assembly is composed of a plurality of door bodies which are slidably connected with the upper slide track assembly and the lower slide track assembly, and the door body assembly is controlled to open and close in a sliding and pulling manner, so as to reduce the space occupied during the opening and closing of the door body, and the setting of the plurality of door bodies also reduces the weight of a single door body, so that the opening and closing operation of the door body is more simple and labor-saving, and the stability of the door body is improved, and deformation is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 FIG. 1 shows a structure schematic diagram of the ion implanter sliding door assembly according to an embodiment of the present application;

[0024] Figure 2 FIG. 3 shows a schematic diagram of the internal structure of the door body according to an embodiment of the present application;

[0025] Figure 3A schematic structural diagram of a pulley assembly according to an embodiment of the present invention is shown;

[0026] Figure 4 A schematic top view of a door assembly according to an embodiment of the present invention is shown;

[0027] Figure 5 A schematic diagram of the assembly structure of the roller and the guide rail according to an embodiment of the present invention is shown;

[0028] Figure 6 A schematic diagram of the roller seat installation structure on the door body according to an embodiment of the present invention is shown.

[0029] In the figure,

[0030] 1. Door body; 101. First door body; 102. Second door body; 103. Third door body; 11. Frame; 12. Door panel; 13. Cover plate; 141. Connecting frame; 142. Connecting shaft; 143. Pulley; 151. First linkage member; 152. Second linkage member; 153. Third linkage member; 154. Fourth linkage member; 155. Fifth linkage member; 161. Roller seat; 162. Roller; 17. Handle; 18. Connecting plate; 181. Connecting screw; 19. Support beam; 191. Support bolt; 2. Upper slide assembly; 3. Lower slide assembly; 31. Slide rail; 32. Base; 4. Column. DETAILED DESCRIPTION

[0031] The ion implanter sliding door assembly and the ion implanter provided by the present invention are explained and illustrated in detail below with reference to the accompanying drawings.

[0032] The first aspect of the present invention provides an ion implanter sliding door assembly, such as Figure 1 As shown, it includes a door body assembly, an upper slide assembly 2 and a lower slide assembly 3. The door body assembly is composed of multiple door bodies 1, which are slidably connected to the upper slide assembly 2 and the lower slide assembly 3 respectively. The door is controlled to open and close in a sliding push-pull manner, reducing the space occupied by the door body 1 during the opening and closing process. At the same time, the setting of multiple door bodies 1 also reduces the weight of a single door body 1, making the opening and closing operation of the door body 1 simpler and more labor-saving, and can also improve the stability of the door body 1 and avoid deformation. The following is a detailed introduction to the present invention in conjunction with specific embodiments:

[0033] In some embodiments, as Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5As shown, the door body assembly includes a plurality of door bodies 1, which can be independently slid and can be linked, that is, the sliding of one door body 1 can drive the sliding of an adjacent door body 1. The plurality of door bodies 1 at least partially overlap in the open door state, or all overlap, to obtain a larger opening range, and there is a partial overlap between adjacent two door bodies 1 in the closed door state, to ensure the sealing property of the closed door state of the door body 1. Optionally, the plurality of door bodies 1 are of the same size. Further, the adjacent two door bodies 1 have an overlap of at least 150 mm in the closed door state, to ensure the sealing property and the radiation shielding performance in the closed door state.

[0034] As shown, Figure 2 The door body 1 includes a frame 11 and a door plate 12. The frame 11 is formed by a plurality of cross beams and longitudinal beams connected with each other, and the door plate 12 is wrapped outside the frame 11. Optionally, the cross beams and the longitudinal beams are formed by square steel, and the plurality of cross beams and longitudinal beams are welded to form the frame 11. The door plate 12 is formed by an aluminum plate and a lead plate, and the lead plate is wrapped by the aluminum plate. Optionally, the thickness of the lead plate is 3 mm, and the thickness of the aluminum plate is 1.5 mm. In this embodiment, two layers of aluminum plates are arranged, and the lead plate is arranged between the two layers of aluminum plates. The edges of the lead plate are wrapped by the aluminum plate, and the lead plate and the aluminum plate are bonded. The thickness of the lead plate can be adjusted as needed, mainly to shield radiation, and the corresponding thickness of the lead plate can be selected according to the power of the ion implanter.

[0035] As shown, Figure 4 The door body assembly includes a first door body 101, a second door body 102 and a third door body 103. The first side of the first door body 101 is provided with a first linkage 151, the first side of the second door body 102 is provided with a second linkage 152, the second side of the second door body 102 is provided with a third linkage 153, the first side of the third door body 103 is provided with a fourth linkage 154, and the fifth linkage 155 is arranged between the first side and the second side of the third door body 103. The linkages are arranged at the top of the door body, so that the second door body 102 located in the middle can slide with the first door body 101 or the third door body 103 during the opening and closing of the door. In this embodiment, the first door body 101, the second door body 102 and the third door body 103 are of the same size. Optionally, taking the first door body 101 as an example, the size of the first door body 101 is 1200 mm x 2300 mm x 32 mm, so as to avoid that the size of a single door body is too large, the weight of a single door body is not too large, and the single door body is not easy to deform. In addition, the size of a single door body makes the total thickness of the first door body 101, the second door body 102 and the third door body 103 be 108 mm, so as to reduce the overall space occupied by the door body assembly.

[0036] In some embodiments, the first linkage 151 is arranged on the top of the first door body 101, and the first linkage 151 is formed with a first protrusion protruding to the side where the second door body 102 is located. The second linkage 152 and the third linkage 153 are arranged on the top of the second door body 102, and the second linkage 152 is formed with a second protrusion protruding to the side where the first door body 101 is located, and the first protrusion is located between the two second protrusions after the first door body 101 and the second door body 102 are installed, and the first protrusion and one of the two second protrusions abut to achieve linkage of the first door body 101 and the second door body 102. The third linkage 153 is further formed with a third protrusion protruding to the side where the third door body 103 is located, and the third protrusion and the second protrusion are opposite in direction, and the second door body 102 is arranged between the first door body 101 and the third door body 103.

[0037] The fourth linkage 154 and the fifth linkage 155 are arranged on the top of the third door body 103, and the fourth linkage 154 and the fifth linkage 155 are formed with a fourth protrusion protruding to the side where the second door body 102 is located. The third protrusion is located between the two fourth protrusions and can slide between the two fourth protrusions, and the third protrusion can abut to one of the fourth protrusions to achieve linkage of the second door body 102 and the third door body 103.

[0038] In some embodiments, the upper slide assembly 2 includes a plurality of upper slides arranged in parallel, and the top of each door body 1 is slidably connected to an upper slide. The upper slide includes a sliding groove, and the upper slide is optionally in a U-shaped groove structure. The plurality of upper slides are arranged side by side and form an overall structure. In this embodiment, three upper slides are arranged, corresponding to the first door body 101, the second door body 102, and the third door body 103.

[0039] The lower slide assembly 3 includes a plurality of lower slides arranged in parallel, and the bottom of each door body 1 is slidably connected to a lower slide. The lower slide includes a sliding rail 31 in a cylindrical or cylindrical structure, and the plurality of lower slides are arranged side by side and connected to a base 32 to form an overall structure. In this embodiment, three lower slides are arranged, corresponding to the first door body 101, the second door body 102, and the third door body 103.

[0040] The top of the door body 1 is provided with a pulley assembly, such as Figure 3As shown, the pulley assembly includes a connecting frame 141 arranged on the door body 1, the connecting frame 141 includes a connecting shaft 142, the connecting shaft 142 is provided with a pulley 143, the pulley 143 is slidably connected in the slide rail 31. Optionally, the first door body 101, the second door body 102 and the third door body 103 are each provided with two pulley assemblies, thereby improving the stability of the sliding of the door body 1. Optionally, the pulley 143 is wrapped with POM (polyformaldehyde, thermoplastic crystalline polymer) or other materials that can reduce the friction coefficient, thereby reducing the friction.

[0041] As shown in Figure 5 As shown, the door body 1 is provided with a roller seat 161 at the bottom, the roller seat 161 is provided with a roller 162, the roller 162 is formed with a V-shaped groove along the circumferential direction, the inner wall of the V-shaped groove is in sliding contact with the slide rail 31, thereby reducing the contact area between the roller 162 and the slide rail 31 and reducing the rolling friction.

[0042] In some embodiments, the inner side of the bottom of the door body 1 is provided with two connecting plates 18, the connecting plates 18 are vertically arranged, the roller seat 161 is arranged between the two connecting plates 18 and is adjustably connected with the connecting plates 18. Optionally, the connecting plates 18 are provided with a long hole, the roller seat 161 is connected with the connecting plates 18 through a connecting screw 181 on each side of the roller seat 161, and the position of the roller seat 161 can be adjusted by sliding in the long hole through the connecting screw 181, thereby adjusting the height of the roller 162. Optionally, the top end of the two connecting plates 18 is further provided with a support beam 19, the support beam 19 is provided with a support bolt 191, the support bolt 191 is threadedly connected with the support beam 19, one end of the support bolt 191 penetrates through the support beam 19 and abuts against the top of the roller seat 161, thereby supporting the roller seat 161. Further, the support bolt 191 is provided with a plurality of, such as two, thereby improving the carrying capacity.

[0043] Optionally, the pulleys 143 and the rollers 162 are symmetrically distributed about the vertical midline of the first door body 101, so that the center of gravity of the first door body 101 is located on the perpendicular bisector of the connecting line between the plurality of rollers 162 and on the perpendicular bisector of the connecting line between the plurality of pulleys 143, thereby improving the stability of the first door body 101. The distribution of the rollers 162 and the pulleys 143 on the second door body 102 and the third door body 103 is the same as that on the first door body 101.

[0044] In some embodiments, the door plate 12 is provided with a cover plate 13, the cover plate 13 is independently arranged with the door plate 12 and is detachably arranged on the frame 11, the pulley assembly and the roller seat 161 are arranged in the cover plate 13, and the cover plate 13 and the roller seat 161 can be disassembled by disassembling the cover plate 13.

[0045] In some embodiments, the second side edge of the first door body 101 is provided with a handle 17, and the second side of the third door body 103 is provided with a handle 17, so that the first door body 101 or the third door body 103 can be opened or closed by the handle 17, and the opening direction can be selected as needed. Alternatively, the second side of the first door body 101 is provided with a first door lock, and the second side of the third door body 103 is provided with a second door lock, so that the first door body 101 and the third door body 103 can be locked when not needed to be opened or in the closed state.

[0046] According to the second aspect of the present application, an ion implantation machine is provided, and the sliding door assembly is arranged on the machine body to open or close the access door of the machine body. Alternatively, the access door of the machine body is provided with a stand 4 on both sides, and the first door body 101 and the third door body 103 can be in contact with one stand 4 and can be locked. Alternatively, a buffer pad is arranged on the stand 4, which can reduce the impact force between the door body and the stand 4.

[0047] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0048] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0049] In the description of the specification, the description of the terms "the embodiment", "one embodiment", "some embodiments", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Also, the specific features, structures, materials or characteristics described can be combined in any suitable manner in at least one embodiment or example. In addition, the person skilled in the art can combine and combine the different embodiments or examples described in the specification and the features of the different embodiments or examples without contradiction.

[0050] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0051] The above is only the preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and simple improvement made on the essential content of the present application shall be included in the protection scope of the present application.

Claims

1. An ion implanter sliding door assembly, characterized in that: include: The door assembly includes a plurality of door bodies, each of which includes a frame and a door panel. The frame is composed of a plurality of crossbeams and longitudinal beams connected to each other, and the door panel is wrapped around the outside of the frame. The door panel is composed of an aluminum plate and a lead plate, and the lead plate is wrapped by the aluminum plate; An upper slide assembly, comprising a plurality of upper slides, the plurality of upper slides being arranged in parallel, the top of each door body being slidably connected to one of the upper slides; The downhill slide assembly includes a plurality of downhill slides, the plurality of downhill slides are arranged in parallel, the bottom of each door body is slidably connected to one of the downhill slides, the downhill slide includes a slide rail, the slide rail is a cylindrical or cylindrical structure, the bottom of the door body is provided with a roller, the roller is in rolling contact with the slide rail, The door body is provided with a roller seat at the bottom, a roller is provided on the roller seat, a V-shaped groove is formed on the roller along its circumference, and the inner wall of the V-shaped groove is in sliding contact with the slide rail. Two connecting plates are provided on the inner side of the bottom of the door body. The connecting plates are vertically arranged. The roller seat is arranged between the two connecting plates and is adjustably connected to the connecting plates. A support beam is also provided at the top of the two connecting plates, and a support bolt is provided on the support beam. The support bolt is threadedly connected to the support beam, and one end of the support bolt passes through the support beam and rests on the top of the roller seat. There are multiple support bolts.

2. The ion implanter sliding door assembly according to claim 1, characterized in that: The door assembly includes a first door body, a second door body and a third door body, A first linkage member is provided on the first side of the first door body, a second linkage member is provided on the first side of the second door body, a third linkage member is provided on the second side of the second door body, a fourth linkage member is provided on the first side of the third door body, and a fifth linkage member is provided between the first side and the second side of the third door body. The first linkage member is used to cooperate with the second linkage member or the third linkage member to enable the first door body and the second door body to slide synchronously. The fourth linkage member and the fifth linkage member are used to cooperate with the third linkage member so that the second door body and the third door body can slide synchronously.

3. The ion implanter sliding door assembly according to claim 2, characterized in that: The upper slideway includes a slide groove, and a pulley is provided on the top of the door body, and the pulley is slidably connected to the slide groove.

4. The ion implanter sliding door assembly according to claim 3, characterized in that: A plurality of pulley assemblies are provided on the top of the door body. The pulley assemblies include a connecting frame, the connecting frame is provided on the door body, the connecting frame includes a connecting shaft, and the connecting shaft is provided with a pulley.

5. The sliding door assembly of the ion implanter according to claim 2, characterized in that: The first door body and the third door body are provided with handles.

6. The sliding door assembly of the ion implanter according to claim 5, characterized in that: A first door lock is provided on the second side of the first door body, and a second door lock is provided on the second side of the third door body.

7. An ion implanter, characterized in that: The invention comprises a machine body, on which the ion implanter sliding door assembly according to any one of claims 1 to 6 is arranged.

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