Four-footed planar three-degree-of-freedom piezoelectric robot and motion excitation method thereof

Abstract

The invention discloses a four-footed planar three-degree-of-freedom piezoelectric robot and a motion excitation method thereof, and relates to the technical field of piezoelectric robots. The problem that a small mobile robot constructed by an electromagnetic driving device is difficult to have multi-degree-of-freedom high-precision motion is solved. The piezoelectric robot comprises four vertical piezoelectric legs and four horizontal piezoelectric beams; the vertical piezoelectric legs comprise a first vertical piezoelectric leg, a second vertical piezoelectric leg, a third vertical piezoelectric leg and a fourth vertical piezoelectric leg; the horizontal piezoelectric beams comprise a first horizontal piezoelectric beam, a second horizontal piezoelectric beam, a third horizontal piezoelectric beam and a fourth horizontal piezoelectric beam; the four vertical piezoelectric legs are arranged according to a space axial parallel relation; the four horizontal piezoelectric beams are located in the same plane and distributed in a square shape. The first vertical piezoelectric leg, the second vertical piezoelectric leg, the third vertical piezoelectric leg and the fourth vertical piezoelectric leg are arranged at four end points of the square structure. The method is applied to the fields of micro-nano assembly, precise positioning, micro-control and the like.

Description

Technical Field

[0001] The invention relates to the technical field of piezoelectric robots, in particular to a four-legged planar three-degree-of-freedom piezoelectric robot. Background Art

[0002] Small mobile robots with the ability to move in multiple degrees of freedom in a plane are one of the important branches in the field of robotics. With outstanding advantages such as high flexibility, large load capacity, small body size, and low power loss, they have become a type of high-end equipment that promotes the development of many advanced technology fields. Traditional small robots mostly use micro-electromagnetic drive devices such as servo motors and stepper motors as core power sources. Through systematic structural fusion design, small mobile robots of various shapes are constructed, which have linear, rotational, jumping and other motion functions and can achieve unlimited travel. However, the movement form of electromagnetic drive devices is usually only a single linear or rotational motion. The use of them to build small mobile robots requires the use of complex transmission mechanisms to achieve motion conversion and transmission. To achieve linear and rotational motion with multiple degrees of freedom, multiple sets of electromagnetic drive devices are required, which inevitably increases the structural complexity of small mobile robots and limits the miniaturization level of mobile robots. Due to the limitation of the working principle, the motion accuracy that can be achieved by electromagnetic drive devices is low. In addition, the conversion error of the complex transmission mechanism makes it difficult for small mobile robots built with such drive devices to have high-precision motion with multiple degrees of freedom. Piezoelectric drive is a new type of drive technology that uses the inverse piezoelectric effect to achieve motion output. It has significant advantages such as fast response, high precision, no electromagnetic interference, and no need for a transmission mechanism, which brings a new way for the innovative development of small mobile robots. However, how to use a variety of piezoelectric components to develop multi-degree-of-freedom small mobile robots faces dual challenges at the design and method levels, that is, new configurations and new methods related to mobile robots with high flexibility, high precision, and miniaturization need to be studied urgently. Summary of the invention

[0003] In view of the problem that the action accuracy achievable by electromagnetic drive devices is low and the conversion error of the complex transmission mechanism makes it difficult for a small mobile robot constructed using such drive devices to have multi-degree-of-freedom high-precision motion, the present invention proposes a four-legged planar three-degree-of-freedom piezoelectric robot, the piezoelectric robot comprising: four vertical piezoelectric legs and four horizontal piezoelectric beams; the vertical piezoelectric legs comprise a first vertical piezoelectric leg, a second vertical piezoelectric leg, a third vertical piezoelectric leg and a fourth vertical piezoelectric leg; the horizontal piezoelectric beam comprises a first horizontal piezoelectric beam, horizontal piezoelectric beam No. 2, horizontal piezoelectric beam No. 3 and horizontal piezoelectric beam No. 4; the vertical piezoelectric leg No. 1, vertical piezoelectric leg No. 2, vertical piezoelectric leg No. 3 and vertical piezoelectric leg No. 4 are arranged in a spatial axial parallel relationship; the horizontal piezoelectric beam No. 1, horizontal piezoelectric beam No. 2, horizontal piezoelectric beam No. 3 and horizontal piezoelectric beam No. 4 are located in the same plane, and the four are distributed in a U-shape; the vertical piezoelectric leg No. 1, vertical piezoelectric leg No. 2, vertical piezoelectric leg No. 3 and vertical piezoelectric leg No. 4 are arranged at the four endpoints of the U-shaped structure.

[0004] Furthermore, a preferred embodiment is proposed, wherein the structures of the first vertical piezoelectric leg, the second vertical piezoelectric leg, the third vertical piezoelectric leg and the fourth vertical piezoelectric leg are the same; the structures of the first horizontal piezoelectric beam, the second horizontal piezoelectric beam, the third horizontal piezoelectric beam and the fourth horizontal piezoelectric beam are the same.

[0005] Furthermore, a preferred embodiment is proposed, wherein the No. 1 vertical piezoelectric leg comprises a No. 1 leg base, four No. 1 leg upper end actuating elements and four No. 1 leg lower end actuating elements, the No. 1 leg base is composed of a rectangular parallelepiped and an inverted cone structure, the four No. 1 leg upper end actuating elements are arranged on the upper part of the rectangular parallelepiped, and the four No. 1 leg lower end actuating elements are installed on the lower part of the rectangular parallelepiped.

[0006] Furthermore, a preferred embodiment is proposed, wherein the actuating element at the upper end of the No. 1 leg is made of a piezoelectric material and is evenly distributed along the circumference of the upper part of the cuboid; and the actuating element at the lower end of the No. 1 leg is made of a piezoelectric material and is evenly distributed along the circumference of the lower part of the cuboid.

[0007] Furthermore, a preferred embodiment is proposed, in which the actuating element at the upper end of the No. 1 leg and the actuating element at the lower end of the No. 1 leg are connected to the cuboid by any one of bonding, welding and inlaying.

[0008] Furthermore, a preferred embodiment is proposed, wherein the horizontal piezoelectric beam No. 1 comprises a beam substrate No. 1 and two beam actuator elements No. 1, and the beam actuator elements No. 1 are respectively arranged on the inner side and the outer side of the beam substrate No. 1.

[0009] Furthermore, a preferred embodiment is proposed, in which the first beam actuator is made of a piezoelectric material.

[0010] Based on the same inventive concept, the present invention also proposes a motion excitation method for a quadruped planar three-degree-of-freedom piezoelectric robot, the method is implemented by the above-mentioned quadruped planar three-degree-of-freedom piezoelectric robot, and the method comprises:

[0011] A polarization electric field and an excitation signal are applied to each vertical piezoelectric leg along the thickness direction; vertical deformation is generated under the excitation of the electric signal, causing the bottom ends of the first vertical piezoelectric leg, the second vertical piezoelectric leg, the third vertical piezoelectric leg and the fourth vertical piezoelectric leg to generate vertical movement;

[0012] Under the excitation of electrical signals, each horizontal piezoelectric beam produces lateral deformation along the length direction, causing horizontal piezoelectric beam No. 1, horizontal piezoelectric beam No. 2, horizontal piezoelectric beam No. 3 and horizontal piezoelectric beam No. 4 to produce lateral movement; pushing vertical piezoelectric leg No. 1, vertical piezoelectric leg No. 2, vertical piezoelectric leg No. 3 and vertical piezoelectric leg No. 4 to produce lateral deformation, thereby causing their bottom ends to produce lateral movement.

[0013] Furthermore, a preferred embodiment is proposed, wherein the excitation signal is any periodic alternating waveform, including a sinusoidal signal, a square wave signal, and a triangular wave signal.

[0014] Furthermore, a preferred method is proposed, in which the first vertical piezoelectric leg, the second vertical piezoelectric leg, the third vertical piezoelectric leg and the fourth vertical piezoelectric leg generate lateral and vertical movements at the bottom ends respectively or simultaneously to synthesize a motion trajectory in any direction in space, and then utilize the friction between the bottom end and the working plane to push the robot as a whole to achieve linear motion along a specific direction and rotational motion around a specific axis.

[0015] The present invention is beneficial in that:

[0016] 1. The four-legged planar three-degree-of-freedom piezoelectric robot proposed in the present invention adopts a composite structure of piezoelectric elements and a metal matrix to construct the leg structure and the main body connection structure of the mobile robot, avoiding the structural complexity caused by the use of electromagnetic drive devices, and has the characteristics of miniaturization, lightness and simplified structure;

[0017] 2. The four-legged planar three-degree-of-freedom piezoelectric robot proposed in the present invention uses the principle based on the inverse piezoelectric effect to realize the conversion of electrical energy into mechanical energy, neither generates nor is affected by electromagnetic interference, and has good electromagnetic compatibility performance;

[0018] 3. The piezoelectric element has a sub-millisecond rapid response capability, and the piezoelectric robot proposed in the present invention has significant rapid start and rapid stop characteristics;

[0019] 4. The four-legged planar three-degree-of-freedom piezoelectric robot proposed in the present invention does not contain various complex mechanical transmission mechanisms, avoids motion transmission errors, and has high-precision motion capabilities at the micron level or even the nanometer level.

[0020] The present invention is applicable to the fields of micro-nano assembly, precision positioning, micro-manipulation, etc. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 A three-dimensional schematic diagram of a four-legged planar three-degree-of-freedom piezoelectric robot according to the first embodiment;

[0022] Figure 2 is a three-dimensional schematic diagram of four vertical piezoelectric legs according to the eleventh embodiment;

[0023] Figure 3 is a three-dimensional schematic diagram of four horizontal piezoelectric beams according to the eleventh embodiment;

[0024] Figure 4 A three-dimensional schematic diagram of upper and lower actuating elements included in the four vertical piezoelectric legs described in Embodiment 11;

[0025] Figure 5 A three-dimensional schematic diagram of the actuating elements included in the four horizontal piezoelectric beams described in the eleventh embodiment;

[0026] Figure 6 This is a schematic diagram of the body movement of the four-legged planar three-degree-of-freedom piezoelectric robot according to the twelfth embodiment moving along the X-axis;

[0027] Figure 7 A schematic diagram of an excitation scheme for the four-legged planar three-degree-of-freedom piezoelectric robot moving along the X-axis according to the twelfth embodiment;

[0028] Figure 8 This is a schematic diagram of the body movement of the four-legged planar three-degree-of-freedom piezoelectric robot according to the thirteenth embodiment moving along the Y-axis;

[0029] Fig. 9 A schematic diagram of an excitation scheme for the four-legged planar three-degree-of-freedom piezoelectric robot moving along the Y-axis according to the thirteenth embodiment;

[0030] Fig.10 A schematic diagram of the body movement of the four-legged planar three-degree-of-freedom piezoelectric robot according to the fourteenth embodiment moving along the angle between the X-axis and the Y-axis;

[0031] Fig.11 A schematic diagram of an excitation scheme for the movement of the fourteenth embodiment of the four-legged planar three-degree-of-freedom piezoelectric robot along the angle between the X-axis and the Y-axis;

[0032] Fig.12This is a schematic diagram of the body movement of the four-legged planar three-degree-of-freedom piezoelectric robot moving around the Z axis according to the fifteenth embodiment;

[0033] Fig.13 A schematic diagram of an excitation scheme for the four-legged planar three-degree-of-freedom piezoelectric robot moving around the Z axis according to the fifteenth embodiment;

[0034] In the above drawings, the XYZ coordinate system is a spatial Cartesian coordinate system, the three coordinate axes are perpendicular to each other, and the X axis is parallel to the length direction of the No. 1 and No. 3 horizontal piezoelectric beams, the Y axis is parallel to the length direction of the No. 2 and No. 4 horizontal piezoelectric beams, the Z axis is parallel to the length direction of the No. 1, No. 2, No. 3 and No. 4 vertical piezoelectric legs, and the origin of the XYZ coordinate system is located at the center of the line connecting the bottom ends of the four vertical piezoelectric legs;

[0035] In the figure, 1 is a vertical piezoelectric leg, 1-1 is a vertical piezoelectric leg No. 1, 1-2 is a vertical piezoelectric leg No. 2, 1-3 is a vertical piezoelectric leg No. 3, 1-4 is a vertical piezoelectric leg No. 4, 2 is a horizontal piezoelectric beam, 2-1 is a horizontal piezoelectric beam No. 1, 2-2 is a horizontal piezoelectric beam No. 2, 2-3 is a horizontal piezoelectric beam No. 3, 2-4 is a horizontal piezoelectric beam No. 4, 1-1-1 is a base of the leg No. 1, 1-1-2 is an upper actuating element of the leg No. 1, 1-1-3 is a lower actuating element of the leg No. 1, 1-2-1 is a base of the leg No. 2, 1-2-2 is an upper actuating element of the leg No. 2, 1-2-3 is a lower actuating element of the leg No. 2. End actuating element, 1-3-1 is the base of leg No. 3, 1-3-2 is the upper actuating element of leg No. 3, 1-3-3 is the lower actuating element of leg No. 3, 1-4-1 is the base of leg No. 4, 1-4-2 is the upper actuating element of leg No. 4, 1-4-3 is the lower actuating element of leg No. 4, 2-1-1 is the base of beam No. 1, 2-1-2 is the actuating element of beam No. 1, 2-2-1 is the base of beam No. 2, 2-2-2 is the actuating element of beam No. 2, 2-3-1 is the base of beam No. 3, 2-3-2 is the actuating element of beam No. 3, 2-4-1 is the base of beam No. 4, 2-4-2 is the actuating element of beam No. 4. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments.

[0037] Implementation method 1, see Figure 1This embodiment is further described in detail. The four-legged planar three-degree-of-freedom piezoelectric robot described in the first embodiment includes: four vertical piezoelectric legs 1 and four horizontal piezoelectric beams 2; the vertical piezoelectric legs 1 include a first vertical piezoelectric leg 1-1, a second vertical piezoelectric leg 1-2, a third vertical piezoelectric leg 1-3 and a fourth vertical piezoelectric leg 1-4; the horizontal piezoelectric beams 2 include a first horizontal piezoelectric beam 2-1, a second horizontal piezoelectric beam 2-2, a third horizontal piezoelectric beam 2-3 and a fourth horizontal piezoelectric beam 2-4; the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are arranged in a spatial axial parallel relationship; the first horizontal piezoelectric beam 2-1, the second horizontal piezoelectric beam 2-2, the third horizontal piezoelectric beam 2-3 and the fourth horizontal piezoelectric beam 2-4 are located in the same plane, and the four are distributed in a U-shape; the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are arranged at the four ends of the U-shaped structure.

[0038] The piezoelectric robot described in this embodiment includes four vertical piezoelectric legs and four horizontal piezoelectric beams. The vertical piezoelectric legs are responsible for providing stable support and accurately controlling their telescopic movement through the inverse piezoelectric effect, thereby adjusting the height of the robot. The horizontal piezoelectric beams are located in a plane and generate horizontal movement through the inverse piezoelectric effect, allowing the robot to achieve complex movement patterns on the plane. The configuration of four vertical piezoelectric legs and four horizontal piezoelectric beams makes the robot's movement in three-dimensional space more flexible and precise.

[0039] The fine control capability of piezoelectric materials allows for higher motion precision. Compared to electromagnetic actuators, piezoelectric systems reduce transmission errors and improve motion accuracy. The layout of four vertical piezoelectric legs and four horizontal piezoelectric beams supports three-degree-of-freedom motion in a plane, allowing the robot to perform better in complex environments.

[0040] Embodiment 2. This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 1. The structures of the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are all the same; the structures of the first horizontal piezoelectric beam 2-1, the second horizontal piezoelectric beam 2-2, the third horizontal piezoelectric beam 2-3 and the fourth horizontal piezoelectric beam 2-4 are all the same.

[0041] Since all vertical piezoelectric legs and horizontal piezoelectric beams have the same structure, the design and manufacturing process is simplified, reducing the complexity of production and maintenance. Unified components make repair and replacement more convenient. When any component fails, it can be directly replaced with a standard component without considering the compatibility issues between different components.

[0042] At the same time, since all the piezoelectric legs and beams have the same structure, the control system can use a unified algorithm to adjust the movement of each component, simplifying the design and debugging process of the control system. The same structure of all components makes the response characteristics consistent, simplifies the system's coordinated control of different components, and improves the coordination and accuracy of the robot's overall movement. The same component design helps to distribute the load more evenly when the robot moves, thereby improving the stability of the robot in different motion states. The same structural characteristics ensure that the various parts of the robot have consistent mechanical behavior under load and motion, reducing system instability and errors.

[0043] Embodiment three. This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment two. The No. 1 vertical piezoelectric leg 1-1 includes a No. 1 leg base 1-1-1, four No. 1 leg upper end actuating elements 1-1-2 and four No. 1 leg lower end actuating elements 1-1-3. The No. 1 leg base 1-1-1 is composed of a rectangular parallelepiped and an inverted cone structure. The four No. 1 leg upper end actuating elements 1-1-2 are arranged on the upper part of the rectangular parallelepiped, and the four No. 1 leg lower end actuating elements 1-1-3 are installed on the lower part of the rectangular parallelepiped.

[0044] The No. 1 leg base 1-1-1 proposed in this embodiment optimizes the stability and rigidity of the leg through a combination of a rectangular parallelepiped and an inverted cone structure. The rectangular parallelepiped provides basic stability, while the inverted cone structure helps to maintain a good balance under dynamic loads and reduce shaking caused by external impacts or robot movement. Disposing the four upper actuating elements and the four lower actuating elements at the upper and lower parts of the legs, respectively, helps to more accurately control the extension and contraction and movement of the legs. This layout can effectively control the extension and contraction of the legs in different working conditions and optimize the movement accuracy. By distributing the upper and lower actuating elements, more complex movement patterns can be achieved, such as adjusting the angle and height of the legs, thereby improving the maneuverability and adaptability of the robot.

[0045] The structural design makes the deformation of the legs more uniform and controllable when voltage is applied, reducing motion errors caused by structural asymmetry or uneven local stress. By controlling the actuators at the upper and lower ends separately, fine adjustment of the legs can be achieved, supporting more complex gaits and movement patterns, and improving the overall performance of the robot.

[0046] Embodiment 4. This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 3. The actuating element 1-1-2 at the upper end of leg No. 1 is made of piezoelectric material and is evenly distributed along the circumference of the upper part of the cuboid; the actuating element 1-1-3 at the lower end of leg No. 1 is made of piezoelectric material and is evenly distributed along the circumference of the lower part of the cuboid.

[0047] In this embodiment, the piezoelectric elements (piezoelectric material) are evenly distributed along the circumference of the upper part of the cuboid, which helps to achieve uniform distribution of force. This uniform distribution can reduce stress concentration, avoid local excessive wear or failure, and thus improve the durability and stability of the overall structure.

[0048] In this embodiment, the piezoelectric material can be a typical piezoelectric material such as piezoelectric ceramics and piezoelectric polymers; the structure containing the piezoelectric material is a single structure containing the piezoelectric material; the structure containing the piezoelectric material is a composite structure containing the piezoelectric material.

[0049] Embodiment 5. This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 3. The actuating element 1-1-2 at the upper end of leg No. 1 and the actuating element 1-1-3 at the lower end of leg No. 1 are connected to the rectangular parallelepiped by any one of bonding, welding and inlaying.

[0050] Embodiment 6. This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 2. The horizontal piezoelectric beam No. 1 2-1 includes a beam base No. 1 2-1-1 and two beam actuators No. 1 2-1-2. The beam actuators No. 1 2-1-2 are respectively arranged on the inner and outer sides of the beam base No. 1 2-1-1.

[0051] Embodiment 7: This embodiment is a further limitation of the four-legged planar three-degree-of-freedom piezoelectric robot described in Embodiment 2, and the first beam actuator element 2-1-2 is made of piezoelectric material.

[0052] Embodiment 8: A motion excitation method for a four-legged planar three-degree-of-freedom piezoelectric robot described in this embodiment is implemented based on the four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 1, and the method includes:

[0053] A polarization electric field and an excitation signal are applied to each vertical piezoelectric leg along the thickness direction; under the excitation of the electric signal, vertical deformation is generated respectively, causing the bottom ends of the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 to generate vertical movement;

[0054] Under the stimulation of electrical signals, each horizontal piezoelectric beam undergoes lateral deformation along its length direction, causing horizontal piezoelectric beam No. 1 2-1, horizontal piezoelectric beam No. 2-2, horizontal piezoelectric beam No. 3 2-3 and horizontal piezoelectric beam No. 4 2-4 to produce lateral movement; and pushes vertical piezoelectric leg No. 1-1, vertical piezoelectric leg No. 2 1-2, vertical piezoelectric leg No. 3 1-3 and vertical piezoelectric leg No. 4 1-4 to produce lateral deformation, thereby causing their bottom ends to produce lateral movement.

[0055] In this embodiment, the piezoelectric material can produce precise deformation after the electric field is applied, which enables the vertical piezoelectric legs and horizontal piezoelectric beams of the robot to achieve highly precise control when performing vertical and lateral movements. This precise control is particularly important for achieving complex movements of the robot in a plane. Through the vertical movement of the vertical piezoelectric legs and the lateral movement of the horizontal piezoelectric beams, the robot can achieve three-degree-of-freedom movement in a plane. This design enables the robot to move and adjust its posture flexibly in a two-dimensional plane, thereby adapting to a variety of tasks and environments.

[0056] Embodiment 9. This embodiment further limits the motion excitation method of a quadruped planar three-degree-of-freedom piezoelectric robot described in embodiment 8, wherein the excitation signal is an arbitrary periodic alternating waveform, including a sinusoidal signal, a square wave signal, and a triangular wave signal.

[0057] Embodiment 10. This embodiment further limits the motion excitation method of a four-legged planar three-degree-of-freedom piezoelectric robot described in embodiment 8. The first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 generate lateral and vertical movements at the bottom ends respectively or simultaneously to synthesize motion trajectories in any direction in space, and then utilize the friction between the bottom end and the working plane to push the robot as a whole to achieve linear motion in a specific direction and rotational motion around a specific axis.

[0058] Implementation method 11: See Figures 1 to 5 This embodiment is further described in detail. This embodiment provides a specific example of a four-legged planar three-degree-of-freedom piezoelectric robot described in the first embodiment, and is also used to explain the second to seventh embodiments. Specifically:

[0059] A four-legged planar three-degree-of-freedom piezoelectric robot, such as Figure 1As shown; in terms of structure, it includes four vertical piezoelectric legs 1 and four horizontal piezoelectric beams 2; wherein, the former vertical piezoelectric leg 1 includes the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4; the latter horizontal piezoelectric beam 2 includes the first horizontal piezoelectric beam 2-1, the second horizontal piezoelectric beam 2-2, the third horizontal piezoelectric beam 2-3 and the fourth horizontal piezoelectric beam 2-4. In terms of arrangement relationship, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are arranged in a spatial axial parallel relationship; the first horizontal piezoelectric beam 2-1, the second horizontal piezoelectric beam 2-2, the third horizontal piezoelectric beam 2-3 and the fourth horizontal piezoelectric beam 2-4 are located in the same plane, and the distribution positions of the four are in the shape of a square. In terms of connection method, the first vertical piezoelectric leg 1-1, the first horizontal piezoelectric beam 2-1, the second vertical piezoelectric leg 1-2, the second horizontal piezoelectric beam 2-2, the third vertical piezoelectric leg 1-3, the third horizontal piezoelectric beam 2-3, the fourth vertical piezoelectric leg 1-4, the fourth horizontal piezoelectric beam 2-4 and the first vertical piezoelectric leg 1-1 are fixedly connected in sequence, which may be by welding, screw connection, bonding, interference fit, inlay or the like.

[0060] Further explanation: If Figure 2 and Figure 3 As shown, the structural composition, assembly method and electrical connection relationship of the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are the same; the structural composition, assembly method and electrical connection relationship of the first horizontal piezoelectric beam 2-1, the second horizontal piezoelectric beam 2-2, the third horizontal piezoelectric beam 2-3 and the fourth horizontal piezoelectric beam 2-4 are the same; in terms of materials, the vertical piezoelectric leg 1 and the horizontal piezoelectric beam 2 are both composite structures of piezoelectric parts and metal parts, which can be composite methods such as bonding, welding, interference fit, and inlay.

[0061] Further explanation: Figure 2 and Figure 3As shown, the first vertical piezoelectric leg 1-1 can be assembled from the first leg base 1-1-1, four first leg upper end actuating elements 1-1-2 and four first leg lower end actuating elements 1-1-3; the second vertical piezoelectric leg 1-2 can be assembled from the second leg base 1-2-1, four second leg upper end actuating elements 1-2-2 and four second leg lower end actuating elements 1-2-3; the third vertical piezoelectric leg 1-3 can be assembled from the third leg base 1-3-1, four third leg upper end actuating elements 1-3-2 and four third leg lower end actuating elements 1-3-3; the fourth vertical piezoelectric leg 1-4 can be assembled from the fourth leg base 1-4-1, four third leg upper end actuating elements 1-3-2 and four third leg lower end actuating elements 1-3-3. -4-1, four No. 4 leg upper end actuator elements 1-4-2 and four No. 4 leg lower end actuator elements 1-4-3; No. 1 horizontal piezoelectric beam 2-1 can be assembled from No. 1 beam base 2-1-1 and two No. 1 beam actuator elements 2-1-2; No. 2 horizontal piezoelectric beam 2-2 can be assembled from No. 2 beam base 2-2-1 and two No. 2 beam actuator elements 2-2-2; No. 3 horizontal piezoelectric beam 2-3 can be assembled from two No. 3 beam bases 2-3-1 and two No. 3 beam actuator elements 2-3-2; No. 4 horizontal piezoelectric beam 2-4 can be assembled from No. 4 beam base 2-4-1 and two No. 4 beam actuator elements 2-4-2. The above assembly operation can be achieved by high-strength glue bonding, welding, interference fit, inlaying, etc.

[0062] Combination Figure 2 and Figure 4 This embodiment is further described in detail. This embodiment provides a specific implementation scheme for the distribution of core actuator elements in four vertical piezoelectric legs. In the vertical piezoelectric legs, the main bodies of the upper end actuator element 1-1-2 of the No. 1 leg, the upper end actuator element 1-2-2 of the No. 2 leg, the upper end actuator element 1-3-2 of the No. 3 leg and the upper end actuator element 1-4-2 of the No. 4 leg are all made of piezoelectric materials, and they are respectively evenly distributed along the upper ends of the No. 1 leg substrate 1-1-1, the No. 2 leg substrate 1-2-1, the No. 3 leg substrate 1-3-1 and the No. 4 leg substrate 1-4-1; similarly, the main bodies of the lower end actuator element 1-1-3 of the No. 1 leg, the lower end actuator element 1-2-3 of the No. 2 leg, the lower end actuator element 1-3-3 of the No. 3 leg and the lower end actuator element 1-4-3 of the No. 4 leg are all made of piezoelectric materials, and they are respectively evenly distributed along the lower ends of the No. 1 leg substrate 1-1-1, the No. 2 leg substrate 1-2-1, the No. 3 leg substrate 1-3-1 and the No. 4 leg substrate 1-4-1. The upper actuating elements and the lower actuating elements arranged around each vertical piezoelectric leg can be used in exactly the same structural form, polarization direction and excitation method, which can ensure the consistency and controllability of the movement of the vertical piezoelectric leg.

[0063] Combination Figure 3 and Figure 5This embodiment is further described in detail. This embodiment provides a specific implementation plan for the distribution of core actuators in four horizontal piezoelectric beams. In the horizontal piezoelectric beams, the main bodies of the No. 1 beam actuator 2-1-2, the No. 2 beam actuator 2-2-2, the No. 3 beam actuator 2-3-2 and the No. 4 beam actuator 2-4-2 are all made of piezoelectric material, and they are respectively arranged on the inner and outer sides of the No. 1 beam substrate 2-1-1, the No. 2 beam substrate 2-2-1, the No. 3 beam substrate 2-3-1 and the No. 4 beam substrate 2-4-1, and can be specifically connected by bonding, welding, inlaying and other connection methods. The upper end actuating element 1-1-2 of the number one leg, the upper end actuating element 1-2-2 of the number two leg, the upper end actuating element 1-3-2 of the number three leg and the upper end actuating element 1-4-2 of the number four leg are respectively in contact with the upper outer side surfaces of the number one leg base 1-1-1, the number two leg base 1-2-1, the number three leg base 1-3-1 and the number four leg base 1-4-1 and are fixedly connected to form a composite structure, and the lower end actuating element 1-1-3 of the number one leg, the lower end actuating element 1-2-3 of the number two leg, the lower end actuating element 1-3-3 of the number three leg and the lower end actuating element 1-4-3 of the number four leg are respectively in contact with the lower outer side surfaces of the number one leg base 1-1-1, the number two leg base 1-2-1, the number three leg base 1-3-1 and the number four leg base 1-4-1 and are fixedly connected to form a composite structure, and specific connection methods such as bonding, welding and inlaying can be used.

[0064] Implementation Method 12: See Figure 6 and Figure 7 This embodiment is further described in detail. This embodiment provides a specific implementation scheme for exciting the relevant body motion when the four-legged planar three-degree-of-freedom piezoelectric robot moves along the X-axis. Figure 6 As shown, the specific implementation steps are as follows:

[0065] Step 1: In the vertical piezoelectric leg 1 parallel to the Z axis, the upper actuating element 1-1-2 of the first leg, the upper actuating element 1-2-2 of the second leg, the upper actuating element 1-3-2 of the third leg and the upper actuating element 1-4-2 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. At the same time, the lower actuating element 1-1-3 of the first leg, the lower actuating element 1-2-3 of the second leg, the lower actuating element 1-3-3 of the third leg and the lower actuating element 1-4-3 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. Through this arrangement, the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 are stimulated to produce vertical elastic deformation along the Z axis.

[0066] Step 2: While implementing step 1, in the horizontal piezoelectric beam 2, the beam actuator element 2-2-2 and the beam actuator element 2-4-2 parallel to the X-axis both apply polarization electric field and excitation signal along the thickness direction. Through this setting, the piezoelectric beam 2-2 and the piezoelectric beam 2-4 are stimulated to simultaneously produce lateral elastic deformation along the X-axis, pushing the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 to produce lateral bending deformation along the X-axis.

[0067] Step 3: The elastic motion of the four vertical piezoelectric legs 1 stimulated by steps 1 and 2 along the X-axis and Z-axis is combined to generate spatial motion trajectories located in the XZ plane of the coordinate system at their respective bottom ends; the friction between these motion trajectories and the bottom contact plane can further drive the entire piezoelectric robot to generate linear motion along the X-axis.

[0068] Special note: The excitation signal mentioned in this embodiment can be a periodic sine wave, square wave, triangle wave or other signal types. If the excitation signal phase of the No. 1 vertical piezoelectric leg 1-1 and the No. 4 vertical piezoelectric leg 1-4 arranged in the positive direction of the X-axis in step one is recorded as P1, the excitation signal phase of the No. 2 vertical piezoelectric leg 1-2 and the No. 3 vertical piezoelectric leg 1-3 arranged in the negative direction of the X-axis is recorded as P2, and the excitation signal phase of the No. 2 piezoelectric beam 2-2 and the No. 4 piezoelectric beam 2-4 in step two is recorded as P3. To realize the linear motion along the X-axis as described in step three, it is required that P1 and P2 differ by half a cycle, P3 and P1 differ by a quarter of a cycle, and P3 and P2 differ by a quarter of a cycle; for example, when using a sine wave signal, P1, P2, and P3 are set to 90°, -90°, and 0°. The action states of the vertical piezoelectric leg 1 and the horizontal piezoelectric beam 2 in this embodiment are as follows: Figure 7 As shown, the projection directions of the elliptical motion trajectories generated by the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 on the XY plane are respectively along the dotted double-directional arrows shown in the figure.

[0069] Implementation 13: See Figure 8 and Fig. 9 This embodiment is further described in detail. This embodiment provides a specific implementation scheme for exciting the relevant body motion when the four-legged planar three-degree-of-freedom piezoelectric robot moves along the Y-axis. Figure 8 As shown, the specific implementation steps are as follows:

[0070] Step 1: In the vertical piezoelectric leg 1 parallel to the Z axis, the upper actuating element 1-1-2 of the first leg, the upper actuating element 1-2-2 of the second leg, the upper actuating element 1-3-2 of the third leg and the upper actuating element 1-4-2 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. At the same time, the lower actuating element 1-1-3 of the first leg, the lower actuating element 1-2-3 of the second leg, the lower actuating element 1-3-3 of the third leg and the lower actuating element 1-4-3 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. Through this arrangement, the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 are stimulated to produce vertical elastic deformation along the Z axis.

[0071] Step 2: While performing the above operations, in the horizontal piezoelectric beam 2, the beam actuator element 2-1-2 and the beam actuator element 2-3-2 parallel to the Y-axis both apply polarization electric fields and excitation signals along the thickness direction. Through this setting, the piezoelectric beam 2-1 and the piezoelectric beam 2-3 are stimulated to simultaneously produce lateral elastic deformation along the Y-axis, pushing the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 to produce lateral bending deformation along the Y-axis.

[0072] Step 3: Based on the elastic motion of the four vertical piezoelectric legs 1 stimulated by steps 1 and 2 along the Y-axis and the Z-axis, spatial motion trajectories located in the YZ plane of the coordinate system are generated at their respective bottom ends; the friction between these motion trajectories and the bottom contact plane can further drive the entire piezoelectric robot to produce linear motion along the Y-axis.

[0073] Special note: The excitation signal mentioned in this embodiment can be a periodic sine wave, square wave, triangular wave or other signal types. If the excitation signal phase of the No. 1 vertical piezoelectric leg 1-1 and the No. 2 vertical piezoelectric leg 1-2 arranged in the positive direction of the Y-axis in step one is recorded as P1, the excitation signal phase of the No. 3 vertical piezoelectric leg 1-3 and the No. 4 vertical piezoelectric leg 1-4 arranged in the negative direction of the Y-axis is recorded as P2, and the excitation signal phase of the No. 1 piezoelectric beam 2-1 and the No. 3 piezoelectric beam 2-3 in step two is recorded as P3. To realize the linear motion along the Y-axis described in step three, it is required that P1 and P2 differ by half a cycle, P3 and P1 differ by a quarter of a cycle, and P3 and P2 differ by a quarter of a cycle; for example, when using a sine wave signal, P1, P2, and P3 are set to 90°, -90°, and 0°. The action states of the vertical piezoelectric leg 1 and the horizontal piezoelectric beam 2 in this embodiment are as follows: Fig. 9 As shown, the projection directions of the elliptical motion trajectories generated by the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 on the XY plane are respectively along the dotted double-directional arrows shown in the figure.

[0074] Implementation Method 14: See Fig.10 and Fig.11 This embodiment is further described in detail. This embodiment provides a specific implementation scheme for exciting the relevant body motion when the four-legged planar three-degree-of-freedom piezoelectric robot moves linearly along the angle direction between the X-axis and the Y-axis. Fig.10 As shown, the specific implementation steps are as follows:

[0075] Step 1: In the vertical piezoelectric leg 1 parallel to the Z axis, the upper actuating element 1-1-2 of the first leg, the upper actuating element 1-2-2 of the second leg, the upper actuating element 1-3-2 of the third leg and the upper actuating element 1-4-2 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. At the same time, the lower actuating element 1-1-3 of the first leg, the lower actuating element 1-2-3 of the second leg, the lower actuating element 1-3-3 of the third leg and the lower actuating element 1-4-3 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. Through this arrangement, the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 are stimulated to produce vertical elastic deformation along the Z axis.

[0076] Step 2: During the above operation, in the horizontal piezoelectric beam 2, the second beam actuator 2-2-2 and the fourth beam actuator 2-4-2 parallel to the X-axis both apply polarization electric field and excitation signal in the thickness direction; through this setting, the second piezoelectric beam 2-2 and the fourth piezoelectric beam 2-4 parallel to the X-axis are excited to simultaneously produce lateral elastic deformation along the X-axis. Thanks to the transmission of elastic deformation by the fixed connection relationship, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are subjected to the driving effect of elastic deformation in the X-axis direction.

[0077] Step 3: During the above operations, in the horizontal piezoelectric beam 2, the first beam actuator 2-1-2 and the third beam actuator 2-3-2 parallel to the Y axis both apply polarization electric field and excitation signal in the thickness direction; through this setting, the first piezoelectric beam 2-1 and the third piezoelectric beam 2-3 parallel to the Y axis are excited to simultaneously produce lateral elastic deformation along the Y axis. Thanks to the transmission of elastic deformation by the fixed connection relationship, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are simultaneously subjected to the elastic deformation driving effect in the Y axis direction.

[0078] Step 4: Under the combined effect of the elastic deformation stimulated by step 1, step 2 and step 3, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 produce lateral bending deformation along a specific direction forming a certain angle with the X-axis and the Y-axis, and produce vertical elastic deformation along the Z-axis direction; according to the composite elastic motion of the four vertical piezoelectric legs 1 along the Z-axis direction and along the specific direction of the XY plane, a spatial motion trajectory perpendicular to the coordinate system XY plane along the specific direction is generated at each bottom end; further utilizing the friction between these motion trajectories and the bottom contact plane can drive the entire piezoelectric robot to produce linear motion in any direction in the XY plane, and the specific motion direction is determined according to the excitation intensity borne by the horizontal piezoelectric beam 2 in the above steps 2 and 3.

[0079] Special note: The excitation signal mentioned in this embodiment can be a periodic sine wave, square wave, triangle wave or other signal types. If the excitation signal phase of the first vertical piezoelectric leg 1-1 arranged in the positive direction of the X-axis and the third vertical piezoelectric leg 1-3 arranged in the negative direction of the X-axis in step one is recorded as P1, the excitation signal phase of the first vertical piezoelectric leg 1-2 arranged in the negative direction of the X-axis and the fourth vertical piezoelectric leg 1-4 arranged in the positive direction of the X-axis is recorded as P2, the excitation signal phase of the second piezoelectric beam 2-2 and the fourth piezoelectric beam 2-4 parallel to the X-axis in step two is recorded as P3, and the excitation signal phase of the first piezoelectric beam 2-1 and the third piezoelectric beam 2-4 parallel to the Y-axis in step three is recorded as P4. The excitation signal of the piezoelectric beam 2-3 is recorded as P4; to realize the linear motion in the XY plane described in step 4, it is required that P1 and P2 are half a cycle apart to form anti-phase, P3 and P4 are half a cycle apart to form anti-phase, P3 is a quarter cycle apart from P1 and P2, and P4 is a quarter cycle apart from P1 and P2; for example, when using a sine wave signal, P1, P2, P3, and P4 are set to 0°, 180°, 90°, and -90°, respectively. In this embodiment, the action states of the vertical piezoelectric leg 1 and the horizontal piezoelectric beam 2 are as follows: Fig.11 As shown, the projection directions of the elliptical motion trajectories generated by the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 on the XY plane are respectively along the dotted double-directional arrows shown in the figure.

[0080] Implementation 15: See Fig.12 and Fig.13 This embodiment is further described in detail. This embodiment provides a specific implementation scheme for exciting the relevant body motion when the four-legged planar three-degree-of-freedom piezoelectric robot rotates around the Z axis. Fig.12 As shown, the specific implementation steps are as follows:

[0081] Step 1: In the vertical piezoelectric leg 1 parallel to the Z axis, the upper actuating element 1-1-2 of the first leg, the upper actuating element 1-2-2 of the second leg, the upper actuating element 1-3-2 of the third leg and the upper actuating element 1-4-2 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. At the same time, the lower actuating element 1-1-3 of the first leg, the lower actuating element 1-2-3 of the second leg, the lower actuating element 1-3-3 of the third leg and the lower actuating element 1-4-3 of the fourth leg all apply a polarization electric field and an excitation signal along the thickness direction. Through this arrangement, the vertical piezoelectric leg 1-1, the vertical piezoelectric leg 1-2, the vertical piezoelectric leg 1-3 and the vertical piezoelectric leg 1-4 are stimulated to produce vertical elastic deformation along the Z axis.

[0082] Step 2: During the above operation, in the horizontal piezoelectric beam 2, the second beam actuator 2-2-2 and the fourth beam actuator 2-4-2 parallel to the X-axis both apply polarization electric field and excitation signal in the thickness direction; through this setting, the second piezoelectric beam 2-2 and the fourth piezoelectric beam 2-4 parallel to the X-axis are excited to simultaneously produce lateral elastic deformation along the X-axis. Thanks to the transmission of elastic deformation by the fixed connection relationship, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are subjected to the driving effect of elastic deformation in the X-axis direction.

[0083] Step 3: During the above operations, in the horizontal piezoelectric beam 2, the first beam actuator 2-1-2 and the third beam actuator 2-3-2 parallel to the Y axis both apply polarization electric field and excitation signal in the thickness direction; through this setting, the first piezoelectric beam 2-1 and the third piezoelectric beam 2-3 parallel to the Y axis are excited to simultaneously produce lateral elastic deformation along the Y axis. Thanks to the transmission of elastic deformation by the fixed connection relationship, the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 are simultaneously subjected to the elastic deformation driving effect in the Y axis direction.

[0084] Step 4: Under the combined effect of the elastic deformations stimulated by Step 1, Step 2 and Step 3, each of the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 generates lateral bending deformation along a specific direction that forms a certain angle with the X-axis and the Y-axis, and generates vertical elastic deformation along the Z-axis direction. According to the composite elastic motion of the four vertical piezoelectric legs 1 along the Z-axis direction and along the specific direction of the XY plane, a spatial motion trajectory perpendicular to the coordinate system XY plane along a specific direction is generated at each bottom end; further utilizing the friction between these motion trajectories and the bottom contact plane can drive the entire piezoelectric robot to generate rotational motion around the Z-axis.

[0085] Special note: The excitation signal mentioned in this embodiment can be a periodic sine wave, square wave, triangle wave and other signal types. If the excitation signal phase of the first vertical piezoelectric leg 1-1 and the fourth vertical piezoelectric leg 1-4 arranged in the positive direction of the X-axis in step one is recorded as P1, the excitation signal phase of the second vertical piezoelectric leg 1-2 and the third vertical piezoelectric leg 1-3 arranged in the negative direction of the X-axis is recorded as P2, the excitation signal phase of the second piezoelectric beam 2-2 and the fourth piezoelectric beam 2-4 parallel to the X-axis in step two is recorded as P3, and the excitation signal of the first piezoelectric beam 2-1 and the third piezoelectric beam 2-3 parallel to the Y-axis in step three is recorded as P4. To realize the motion around the Z axis described in step 4, it is required that P1 and P2 differ by half a cycle to form an anti-phase, P3 and P4 differ by half a cycle to form an anti-phase, P3 differs from P1 and P2 by a quarter of a cycle, and P4 differs from P1 and P2 by a quarter of a cycle; for example, when a sine wave signal is used, P1, P2, P3, and P4 are set to 0°, 180°, 90°, and -90°, respectively; the action states of the vertical piezoelectric leg 1 and the horizontal piezoelectric beam 2 in this embodiment are as follows: Fig.13 As shown, the projection directions of the elliptical motion trajectories generated by the first vertical piezoelectric leg 1-1, the second vertical piezoelectric leg 1-2, the third vertical piezoelectric leg 1-3 and the fourth vertical piezoelectric leg 1-4 on the XY plane are respectively along the dotted double-directional arrows shown in the figure.

[0086] The present invention proposes a four-legged planar three-degree-of-freedom piezoelectric robot, which uses the idea of ​​piezoelectric elements and elastic matrix to construct four vertical piezoelectric legs and four horizontal piezoelectric beams, further arranges the vertical piezoelectric legs and horizontal piezoelectric beams alternately, and uses the vertical piezoelectric legs and horizontal piezoelectric beams to form an integrated piezoelectric robot, which provides a new solution for building a new type of micro-robot using intelligent piezoelectric elements. A planar motion excitation method for a four-legged planar three-degree-of-freedom piezoelectric robot is proposed, which uses the combined excitation and elastic deformation of the vertical piezoelectric legs and horizontal piezoelectric beams to generate a spatial multi-dimensional motion trajectory at the bottom of the vertical piezoelectric legs, and further promotes the piezoelectric robot to realize the three-degree-of-freedom motion in the XY plane with the help of friction, which establishes a feasible solution for the motion realization of piezoelectric actuated micro-robots. The invented four-legged planar three-degree-of-freedom piezoelectric robot uses piezoelectric elements as the actuating unit, and has the advantages of fast response, high motion accuracy, and multiple degrees of freedom of motion, which will lay the foundation for applications in the fields of micro-nano assembly, precision positioning, and micro-control.

[0087] Although the preferred embodiments of the present invention have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the disclosure of the present invention.

[0088] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present disclosure. Thus, if these modifications and variations of the present disclosure fall within the scope of the claims of the present invention and their equivalents, the present disclosure is also intended to include these modifications and variations.

[0089] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit its protection scope. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the field should understand that after reading the present invention, those skilled in the art can still make various changes, modifications or equivalent substitutions to the specific implementation methods of the invention, but these changes, modifications or equivalent substitutions are all within the protection scope of the open claims to be approved.

Claims

1. A four-legged planar three-degree-of-freedom piezoelectric robot, characterized in that: The piezoelectric robot comprises: four vertical piezoelectric legs (1) and four horizontal piezoelectric beams (2); the vertical piezoelectric legs (1) comprise a first vertical piezoelectric leg (1-1), a second vertical piezoelectric leg (1-2), a third vertical piezoelectric leg (1-3) and a fourth vertical piezoelectric leg (1-4); the horizontal piezoelectric beams (2) comprise a first horizontal piezoelectric beam (2-1), a second horizontal piezoelectric beam (2-2), a third horizontal piezoelectric beam (2-3) and a fourth horizontal piezoelectric beam (2-4); the first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth horizontal piezoelectric beam (2-4); The first vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) are arranged in a spatial axial parallel relationship; the first horizontal piezoelectric beam (2-1), the second horizontal piezoelectric beam (2-2), the third horizontal piezoelectric beam (2-3) and the fourth horizontal piezoelectric beam (2-4) are located in the same plane, and the four are distributed in a U-shaped shape; the first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) are arranged at the four ends of the U-shaped structure.

2. A four-legged planar three-degree-of-freedom piezoelectric robot according to claim 1, characterized in that: The first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) are all of the same structure; the first horizontal piezoelectric beam (2-1), the second horizontal piezoelectric beam (2-2), the third horizontal piezoelectric beam (2-3) and the fourth horizontal piezoelectric beam (2-4) are all of the same structure.

3. A four-legged planar three-degree-of-freedom piezoelectric robot according to claim 2, characterized in that: The number one vertical piezoelectric leg (1-1) comprises a number one leg base (1-1-1), four number one leg upper end actuating elements (1-1-2) and four number one leg lower end actuating elements (1-1-3); the number one leg base (1-1-1) is composed of a rectangular parallelepiped and an inverted cone structure; the four number one leg upper end actuating elements (1-1-2) are arranged on the upper part of the rectangular parallelepiped, and the four number one leg lower end actuating elements (1-1-3) are installed on the lower part of the rectangular parallelepiped.

4. A four-legged planar three-degree-of-freedom piezoelectric robot according to claim 3, characterized in that: The actuating element (1-1-2) at the upper end of the No. 1 leg is made of a piezoelectric material and is evenly distributed along the circumference of the upper part of the rectangular parallelepiped; the actuating element (1-1-3) at the lower end of the No. 1 leg is made of a piezoelectric material and is evenly distributed along the circumference of the lower part of the rectangular parallelepiped.

5. The four-legged planar three-degree-of-freedom piezoelectric robot according to claim 3, characterized in that: The actuating element (1-1-2) at the upper end of the number one leg and the actuating element (1-1-3) at the lower end of the number one leg are connected to the rectangular parallelepiped by any one of bonding, welding and inlaying.

6. A four-legged planar three-degree-of-freedom piezoelectric robot according to claim 2, characterized in that: The No. 1 horizontal piezoelectric beam (2-1) comprises a No. 1 beam base (2-1-1) and two No. 1 beam actuating elements (2-1-2), wherein the No. 1 beam actuating elements (2-1-2) are respectively arranged on the inner side and the outer side of the No. 1 beam base (2-1-1).

7. A four-legged planar three-degree-of-freedom piezoelectric robot according to claim 6, characterized in that: The first beam actuating element (2-1-2) is made of piezoelectric material.

8. A motion excitation method for a quadruped planar three-degree-of-freedom piezoelectric robot, characterized in that: The method is implemented based on the four-legged planar three-degree-of-freedom piezoelectric robot according to claim 1, and the method comprises: A polarization electric field and an excitation signal are applied to each vertical piezoelectric leg along the thickness direction; vertical deformation is generated under the excitation of the electric signal, causing the bottom ends of the first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) to generate vertical movement; Under the stimulation of the electric signal, each horizontal piezoelectric beam is laterally deformed along the length direction, causing the first horizontal piezoelectric beam (2-1), the second horizontal piezoelectric beam (2-2), the third horizontal piezoelectric beam (2-3) and the fourth horizontal piezoelectric beam (2-4) to produce lateral movement; the first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) are pushed to produce lateral deformation, thereby causing their bottom ends to produce lateral movement.

9. The motion excitation method of a quadruped planar three-degree-of-freedom piezoelectric robot according to claim 8, characterized in that: The excitation signal is any periodic alternating waveform, including a sine wave signal, a square wave signal, and a triangle wave signal.

10. The motion excitation method of a quadruped planar three-degree-of-freedom piezoelectric robot according to claim 8, characterized in that: The first vertical piezoelectric leg (1-1), the second vertical piezoelectric leg (1-2), the third vertical piezoelectric leg (1-3) and the fourth vertical piezoelectric leg (1-4) generate lateral and vertical movements at the bottom ends respectively or simultaneously to synthesize a movement trajectory in any direction in space, and then use the friction between the bottom ends and the working plane to drive the robot as a whole to achieve linear movement in a specific direction and rotational movement around a specific axis.

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