A mask plate and a mask plate assembly, and an evaporation apparatus

Abstract

This disclosure provides a photomask and photomask assembly, and vapor deposition equipment. The photomask includes a blocking portion and multiple effective openings. The blocking portion includes a mask pattern area and a welding area. The welding area includes a plurality of overlapping units arranged at intervals along at least one edge of the mask pattern area. Each overlapping unit includes at least one overlapping portion. The overlapping portion has an extending length in the direction from the mask pattern area to the welding area. The overlapping portion has a connecting end and a welding end in its length extending direction. The welding end is located on the side of the connecting end away from the mask pattern area. The welding end has a first width in the direction perpendicular to the length extending direction of the overlapping portion. The first width is the minimum limit value of the clamping width of the screen tensioning equipment. The distance between two adjacent effective openings is greater than the first width. And / or, a plurality of virtual openings are also provided on the blocking portion. The photomask and photomask assembly and vapor deposition equipment provided by this disclosure can improve the yield of vapor-deposited products.

Description

Technical Field

[0001] This invention relates to the field of display technology, and in particular to a photomask and photomask assembly, and vapor deposition equipment. Background Technology

[0002] Organic light-emitting diode (OLED) displays are self-emissive displays. OLED displays are widely used in the display industry due to their advantages such as thinness, light weight, self-emissive operation, fast response time, wide viewing angle, rich colors, high brightness, low power consumption, and resistance to high and low temperatures.

[0003] In the manufacturing process of OLED displays, an evaporation machine is used in conjunction with a mask assembly to deposit OLED material onto a substrate through evaporation, forming an organic light-emitting pattern on the substrate to obtain an array substrate. The mask assembly mainly consists of a frame and a mask, with the mask welded to the frame around its perimeter. However, defects such as color mixing at the edges or corners of the mask can lead to a decrease in product yield. Summary of the Invention

[0004] This disclosure provides a mask template and mask template assembly, as well as vapor deposition equipment, which can improve the yield of vapor deposition products.

[0005] The technical solutions provided in this disclosure are as follows:

[0006] In a first aspect, embodiments of this disclosure provide a photomask, including a shielding portion and a plurality of effective openings for defining the shape of a display area. The shielding portion includes a mask pattern area and a welding area connected to at least one side of the periphery of the mask pattern area. The welding area includes a plurality of overlapping units arranged sequentially at intervals along at least one edge of the mask pattern area, each overlapping unit including at least one overlapping portion; wherein...

[0007] The overlapping portion has an extending length in the direction from the mask pattern area to the welding area. The overlapping portion has an opposing connecting end and a welding end in its length extending direction. The welding end is located on the side of the connecting end away from the mask pattern area. The welding end has a first width in the direction perpendicular to the length extending direction of the overlapping portion. The first width is the minimum limit value of the clamping width of the tensioning device. The distance between two adjacent effective openings is greater than the first width.

[0008] And / or, the shielding portion is further provided with a plurality of virtual openings.

[0009] For example, the first width is 2mm.

[0010] For example, at least a portion of the overlap has a width that is the first width at any position from the connecting end to the welding end.

[0011] For example, at least a portion of the connecting end of the overlapping portion has a second width, which is greater than the first width.

[0012] For example, at least a portion of the width of the overlap gradually decreases from the connecting end to the welding end.

[0013] For example, at least a portion of the overlap includes a first side and a second side disposed opposite to each other, both the first side and the second side extending from the connection end to the welding end, and either the first side or the second side is configured as a straight side, an arc-shaped curve side or a broken line side for making the width of the overlap gradually decrease from the connection end to the welding end.

[0014] For example, each of the overlapping units includes at least two overlapping portions spaced apart.

[0015] For example, in the mask pattern area, the occlusion portion includes a plurality of first occlusion portions extending along a first direction and a plurality of second occlusion portions extending along a second direction, the first occlusion portions and the second occlusion portions intersect to define a plurality of arrayed effective openings; wherein, at least one overlapping unit is correspondingly provided for each first occlusion portion, and the overlapping unit has a first center line in its width direction, the first occlusion portion has a second center line in the width direction of the corresponding overlapping unit, and the first center line of the overlapping unit is located on the extension line of the second center line of the corresponding first occlusion portion.

[0016] For example, at least a plurality of virtual openings are provided at intervals on the second occluding portion.

[0017] For example, the first direction is the row direction of the array of multiple effective openings, and the second direction is the column direction of the array of multiple effective openings; the multiple virtual openings include multiple first virtual openings, wherein at least one first virtual opening is provided between any two adjacent effective openings in each row of the effective openings.

[0018] For example, the center of the first virtual opening and the center of the effective opening in the same row are on the same straight line extending in the row direction, and the extension width of the first virtual opening in the second direction is greater than or equal to the extension width of the effective opening in the same row as the first virtual opening in the second direction.

[0019] For example, the plurality of virtual openings further include a plurality of second virtual openings; wherein,

[0020] At least one second virtual opening is provided at each of the opposite ends of a plurality of first virtual openings arranged along the column direction, and the second virtual opening and its adjacent first virtual opening are spaced apart in the column direction; and / or,

[0021] At least one of the second virtual openings is located between two first virtual openings that are arranged adjacent to each other along the column direction, and each second virtual opening and its adjacent first virtual opening are spaced apart in the column direction.

[0022] For example, the distance between any of the first virtual opening, the second virtual opening, the effective opening and its adjacent counterpart is greater than or equal to 2 mm.

[0023] Secondly, embodiments of this disclosure also provide a mask assembly, which includes:

[0024] The first mask template is the mask template described above;

[0025] A second mask, which is a precision metal mask, is stacked on top of the first mask.

[0026] The frame, with the four edges of the first mask template and the second mask template welded to the frame.

[0027] Thirdly, embodiments of this disclosure also provide a vapor deposition apparatus, which includes the vapor deposition mask assembly as described above.

[0028] The beneficial effects of the embodiments disclosed herein are as follows:

[0029] In the above solution, on the one hand, the welding area in the mask template can be optimized. The welding area includes several overlapping units, and each overlapping unit includes at least one overlapping part. By designing the welding end of the overlapping part to a first width, which is the minimum limit value of the clamping width of the tensioning equipment, the distance between two adjacent effective openings is greater than the width of the welding end of the overlapping part. In this way, by narrowing the welding end of the overlapping part, the welding area between the overlapping part and the frame is reduced, which can improve the problem that the edges or corners of the mask template are difficult to be adsorbed and flattened, improve the problem that the edges or corners of the mask template are prone to color mixing and other defects, and improve the product yield. On the other hand, multiple virtual openings can also be added to the shielding part to improve the problem that the edges or corners of the mask template are difficult to be adsorbed and flattened, improve the problem that the edges or corners of the mask template are prone to color mixing and other defects, and improve the product yield. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of a mask template provided in some embodiments of this disclosure;

[0031] Figure 2 This is the second schematic diagram showing the structure of the mask template provided in some embodiments of this disclosure;

[0032] Figure 3 This is the third schematic diagram showing the structure of the mask template provided in some embodiments of this disclosure;

[0033] Figure 4 This is the fourth schematic diagram showing the structure of the mask template provided in some embodiments of this disclosure;

[0034] Figure 5 This is the fifth schematic diagram illustrating the structure of the mask template provided in some embodiments of this disclosure;

[0035] Figure 6 This is the sixth schematic diagram illustrating the structure of the mask template provided in some embodiments of this disclosure;

[0036] Figure 7 This is the seventh schematic diagram illustrating the structure of the mask template provided in some embodiments of this disclosure;

[0037] Figure 8 This is the eighth schematic diagram showing the structure of the mask template provided in some embodiments of this disclosure. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0039] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms “first,” “second,” and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms “an,” “a,” or “the,” and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms “including,” “comprising,” or “containing,” and similar terms mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. The terms “connected,” “linked,” or similar terms are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The terms “upper,” “lower,” “left,” and “right,” etc., are used only to indicate relative positional relationships, and these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0040] The features such as "parallel," "perpendicular," and "identical" used in the embodiments of this disclosure include features in the strict sense of "parallel," "perpendicular," and "identical," as well as cases where "approximately parallel," "approximately perpendicular," and "approximately identical" include certain tolerances. Taking into account the measurement and the tolerances associated with the measurement of a specific quantity (e.g., limitations of the measurement system), they represent the acceptable deviation range for a specific value as determined by a person skilled in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of said value.

[0041] Furthermore, throughout this document, unless otherwise defined, the terms “substantially,” “essentially,” “approximately,” and “about” are used to describe and explain small variations. When used with an event or situation, these terms can cover situations where the event or situation occurs precisely or approximately. For example, when used with a numerical value, these terms can include a range of variation of the numerical value less than or equal to 10%, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. The term “substantially coplanar” can refer to two surfaces arranged along the same plane within a micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0042] Before providing a detailed description of the photomask and photomask assembly, and vapor deposition equipment provided in the embodiments of this disclosure, the following description of the related technologies is provided:

[0043] In the manufacturing process of OLED (Organic Light-Emitting Diode) displays, an evaporation machine and a mask assembly are used to deposit OLED material onto a substrate to form an organic light-emitting pattern, thus creating an array substrate. However, during the production of organic light-emitting diodes, color defects such as edge mixing or corner mixing often occur in the evaporation stage.

[0044] The inventors of this application have discovered through research that one of the reasons for the aforementioned defects is:

[0045] OLED display substrates comprise multiple sub-pixel units arranged in an array. Each sub-pixel unit includes an anode, an emissive layer, and a cathode, with the emissive layer formed using organic light-emitting materials. Currently, the emissive layer is primarily fabricated in each sub-pixel unit using a mask assembly via a vapor deposition process. The mask assembly mainly comprises a frame and a mask, with the mask welded to the frame around its perimeter. The mask mainly includes a fine metal mask (FMM), a full sheet (auxiliary support mask), and a frame. The fine metal mask has an opening pattern identical in shape to the display pixels on the display substrate. Below the fine metal mask is the full sheet, which has crisscrossing blocking portions defining multiple effective openings (AA cells). The shape of these effective openings defines the display area shape of each display screen. The edges of the full sheet and the full sheet are fixed to the frame using a screen-stretching device.

[0046] When the auxiliary support mask is uneven, it can lead to problems such as inaccurate alignment, excessive shadows, color mixing, and poor uniformity. To improve these issues, the auxiliary support mask can be magnetically attached to the fine metal mask, which can improve the problem of local unevenness in the auxiliary support mask.

[0047] However, since the auxiliary support mask is welded to the frame around its perimeter, the magnetic attraction at the edges or corners is weak, which can lead to poor adhesion at these locations, resulting in color defects such as color mixing at the edges or corners.

[0048] The inventors of this application discovered through research that the auxiliary support mask has a welding area with multiple overlapping areas. These overlapping areas are matched to the effective opening size inside the auxiliary support mask; for example, the distance between the overlapping area and its adjacent effective opening is approximately equal. However, the larger the welding area of ​​the overlapping area, the more difficult it is for the edges or corners of the auxiliary support mask to adhere during the vapor deposition process, leading to more likely edge or corner color mixing defects and affecting product yield.

[0049] To improve the above-mentioned problems, this disclosure provides a mask template and mask template assembly, and vapor deposition equipment, which can improve poor color mixing at edges or corners and improve product yield.

[0050] This disclosure provides a mask template, which can be fixed to a frame by a netting device.

[0051] like Figure 1 or Figure 4 As shown, the mask template includes a blocking portion 100 and a plurality of effective openings 200 for defining the shape of the display area. The blocking portion 100 includes a mask pattern area A and a welding area B connected to at least one side of the periphery of the mask pattern area A. The welding area B is used for welding to the frame. The welding area B includes a plurality of overlapping units 110 arranged sequentially at intervals along the extension direction of at least one edge of the mask pattern area A. Each overlapping unit 110 includes at least one overlapping portion 111.

[0052] Among them, such as Figure 1 As shown, the overlapping portion 111 has an extending length in the direction from the mask pattern area A to the welding area B. The overlapping portion 111 has an opposing connecting end 111A and a welding end 111B in its length extending direction. The welding end 111B is located on the side of the connecting end 111A away from the mask pattern area A, and the welding end 111B has a first width D1 in the direction perpendicular to the length extending direction of the overlapping portion 111. The first width D1 is the minimum limit value of the clamping width of the tensioning device. The distance d between two adjacent effective openings 200 is greater than the first width D1.

[0053] And / or, such as Figure 4 As shown, the shielding part 100 is provided with a plurality of virtual openings 300.

[0054] In the above scheme, the welding area B in the mask template can be optimized. The welding area B includes several overlapping units 110, and each overlapping unit 110 includes at least one overlapping part 111. By designing the welding end 111B of the overlapping part 111 to a first width D1, which is the minimum limit value of the clamping width of the tensioning equipment, and the distance between two adjacent effective openings 200 is greater than the width of the welding end 111B of the overlapping part 111, the welding end of the overlapping part 111 is narrowed. 111B, reducing the welding area between the overlap 111 and the frame can improve the problem of the mask template being difficult to be adsorbed and flattened at the edges or corners, thereby improving the problem of color mixing and other defects that are easy to occur at the edges or corners of the mask template and improving the product yield; in addition, the width of the welding end 111B of the overlap 111 is the first width D1, which is configured as the minimum limit width value that the overlap 111 can be clamped by the mesh tensioning equipment, which can ensure that the mask template can be stressed stably during the four-sided mesh tensioning process combined with the frame;

[0055] Alternatively, multiple virtual openings 300 can be added to the masking part to improve the problem of the mask edges or corners being difficult to adhere and flat, improve the problem of color mixing and other defects that easily occur at the mask edges or corners, and improve the product yield.

[0056] Alternatively, the overlapping portion 111 can be narrowed at the same time, and a virtual opening 300 can be added to improve the adsorption and bonding effect at the edge or corner of the mask template.

[0057] It should be noted that the first width D1 of the welding end 111B of the overlapping portion 111 can be determined based on the minimum limit width value of the overlapping portion 111 that can be clamped by the tensioning equipment. For example, the first width D1 can be 2mm. It should be understood that the value of the first width D1 is not limited to this.

[0058] As an exemplary embodiment, such as Figure 1 As shown, at least a portion of the overlapping portion 111 has a width of the first width D1 at any position from the connecting end 111A to the welding end 111B. For example, the overlapping portion 111 can be constructed as a rectangular shape with an equal width from the connecting end 111A to the welding end 111B.

[0059] As an exemplary embodiment, such as Figure 2 and Figure 3 As shown, at least a portion of the overlapping portion 111 has a connecting end 111A with a width of a second width D2, which is greater than the first width D1. In other words, at least a portion of the overlapping portion 111 is configured such that the connecting end 111A is wide and the welding end 111B is narrow.

[0060] Specifically, please see Figure 2 and Figure 3 As shown, in some exemplary embodiments, the width of at least a portion of the overlap 111 gradually decreases from the connecting end 111A to the welding end 111B.

[0061] As an exemplary embodiment, such as Figure 2 As shown, at least a portion of the overlap 111 includes a first side 1111 and a second side 1112 disposed opposite to each other, both the first side 1111 and the second side 1112 extending from the connecting end 111A toward the welding end 111B.

[0062] like Figure 2 As shown, in some embodiments, either the first side 1111 or the second side 1112 is configured as a straight side that gradually decreases the width of the overlap 111 from the connecting end 111A to the welding end 111B. In other words, the overlap 111 is configured to be generally trapezoidal in shape, with its width gradually decreasing from the connecting end 111A to the welding end 111B.

[0063] like Figure 3 As shown, in some other embodiments, either the first side 1111 or the second side 1112 is configured as an arcuate curve that gradually decreases the width of the overlap 111 from the connecting end 111A to the welding end 111B. In other words, the overlap 111 is configured to be generally flared in shape, with its width gradually decreasing from the connecting end 111A to the welding end 111B.

[0064] Furthermore, in other embodiments not shown in this disclosure, either the first side 1111 or the second side 1112 may be configured as a broken edge for the width of the overlap 111 to gradually decrease from the connecting end 111A to the welding end 111B.

[0065] It should be noted that the above are only some exemplary descriptions of the overlapping portion 111. In other embodiments not shown, the shape of the overlapping portion 111 is not limited to this.

[0066] For example, such as Figure 8 As shown, in some embodiments, from the direction of the connecting end 111A to the welding end 111B, the overlapping portion 111 may further include an extension area S1 and an effective overlapping area S2, the effective overlapping area S2 being used to overlap with the frame for welding fixation.

[0067] Wherein, the length of the effective overlap area S2 in the length extension direction of the overlap portion 111 can be greater than or equal to 2mm, and since the effective overlap area S2 is the main area for welding and fixing with the frame, it is sufficient to ensure that the width of the effective overlap area S2 is the first width D1, while the width of the extension area S1 can be greater than or equal to the width of the effective overlap area S2.

[0068] For example, see Figure 8 As shown, the width of the extension area S1 can be greater than the width of the effective overlap area S2, and the extension area S1 can also be a trapezoid that gradually converges from the connecting end 111A to the welding end 111B. In other embodiments not shown, the extension area S1 can be constructed as a rectangle, in which case a stepped structure is formed at the transition boundary between the extension area S1 and the effective overlap area S2; or, the extension area S1 can also be a trumpet shape that gradually converges from the connecting end 111A to the welding end 111B, etc. The specific shape of the extension area S1 is not limited to these.

[0069] In addition, as an exemplary embodiment, please refer to Figure 1 As shown, each of the overlapping units 110 may include only one overlapping portion 111.

[0070] In other embodiments, each of the overlapping units 110 may further include at least two overlapping portions 111 spaced apart. For example, as Figure 7 As shown, each of the overlapping units 110 may include two overlapping portions 111. Each overlapping portion 111 may be constructed as rectangular, trapezoidal, or trumpet-shaped.

[0071] Furthermore, as an exemplary embodiment, such as Figures 1 to 8 As shown, in the mask pattern area A, the blocking portion 100 includes a plurality of first blocking portions 101 extending along a first direction X and a plurality of second blocking portions 102 extending along a second direction Y. The first blocking portions 101 and the second blocking portions 102 intersect to define a plurality of effective openings 200 arranged in an array.

[0072] For example, the first direction X is the row direction of the array of the plurality of effective openings 200, and the second direction Y is the column direction of the array of the plurality of effective openings 200.

[0073] In this case, at least one overlapping unit 110 is provided for each of the first blocking portions 101, for example, such as Figure 1As shown, one overlapping unit 110 is correspondingly provided for each of the first shielding portions 101. Furthermore, the overlapping unit 110 has a first center line a in its width direction, and the first shielding portion 101 has a second center line b in the width direction of the corresponding overlapping unit 110. The first center line a of the overlapping unit 110 is located on the extension line of the second center line b of the corresponding first shielding portion 101. By adopting the above scheme, the stability of the mask template under stress during the mesh tensioning process can be further ensured.

[0074] In addition, please see Figure 1 As shown, one first shielding portion 101 corresponds to at least one overlapping unit 110. In other embodiments not shown, one second shielding portion 102 may also correspond to at least one overlapping unit 110. In practical applications, the positions of the overlapping units 110 can be reasonably arranged according to the mesh tensioning requirements of the mask template.

[0075] It should be noted that, in the actual vapor deposition process, the second direction Y can be the scanning direction of the line source vapor deposition source. The inventors of this application have discovered through research that, in the actual vapor deposition process of related technologies, the opposite sides of the mask are more prone to edge color mixing defects due to factors such as the vapor deposition angle, in the scanning direction of the line source vapor deposition source.

[0076] Therefore, in some exemplary embodiments, such as Figure 3 As shown, at least a plurality of virtual openings 300 are provided at intervals on the second shielding portion 102 extending along the second direction Y. In this way, by adding virtual openings 300 in the scanning direction of the online vapor deposition source, the weight of the shielding portion 100 can be reduced, which is more conducive to the magnetic adhesion of the mask template, thereby improving the problem of poor color mixing at the corner positions that easily occurs on both sides in the scanning direction of the online vapor deposition source.

[0077] As an exemplary embodiment, such as Figure 3 As shown, the first direction X is the row direction of the array of multiple effective openings 200, and the second direction Y is the column direction of the array of multiple effective openings 200. Each of the multiple virtual openings 300 includes multiple first virtual openings 310, and at least one first virtual opening 310 is provided between any two adjacent effective openings 200 in each row. This arrangement, placing the first virtual openings 310 between adjacent effective openings 200 in the first direction X, further ensures the stability of the mask template under force when the mesh is stretched across all four sides.

[0078] As an exemplary embodiment, such as Figure 4As shown, the centers of the first virtual opening 310 and the effective opening 200 in the same row are on the same straight line extending in the row direction, and the extension width of the first virtual opening 310 in the second direction Y is greater than or equal to the extension width of the effective opening 200 in the second direction Y in the same row as the first virtual opening 310.

[0079] By aligning the center of the first virtual opening 310 with the center of the effective opening 200, the stress on the mask template during the mesh stretching process can be stabilized. Furthermore, designing the extension length of the first virtual opening 310 in the column direction to be greater than the extension length of the effective opening 200 in the same row in the column direction allows for maximizing the area ratio of the first virtual opening 310 on the shielding portion while ensuring the stability of the mask template during mesh stretching. This is more conducive to the magnetic adhesion of the mask template and further improves the problem of poor color mixing at corner positions that easily occurs on opposite sides in the scanning direction of the online vapor deposition source.

[0080] To further increase the area ratio of the virtual opening 300, as an exemplary embodiment, such as... Figure 4 As shown, the plurality of virtual openings 300 further include a plurality of second virtual openings 320; wherein, at least one second virtual opening 320 is provided at each of the opposite ends of a plurality of first virtual openings 310 arranged along the column direction, and the second virtual opening 320 and the adjacent first virtual opening 310 are spaced apart in the column direction.

[0081] Using the above scheme, at least one second virtual opening 320 is also provided at each of the opposite ends of the first virtual opening 310 in each column. The opening area of ​​the second virtual opening 320 can be smaller than the opening area of ​​the first virtual opening 310. In this way, by providing the second virtual opening 320, the opening area of ​​the virtual opening portion 300 in the second direction Y is further increased.

[0082] Furthermore, in order to further increase the area ratio of the virtual opening 300, as another exemplary embodiment, such as Figure 5 As shown, at least one second virtual opening 320 is located between two first virtual openings 310 arranged adjacent to each other along the column direction, and each second virtual opening 320 and its adjacent first virtual opening 310 are spaced apart in the column direction.

[0083] Using the above scheme, at least one second virtual opening 320 can be set between two adjacent first virtual openings 310 in each column of first virtual openings 310. The opening area of ​​the second virtual opening 320 can be smaller than the opening area of ​​the first virtual opening 310. In this way, by setting the second virtual opening 320, the opening area of ​​the virtual opening portion 300 in the second direction Y is further increased.

[0084] It should be noted that when the mask template has the second virtual opening 320, the first virtual opening 310 may have a width in the column direction greater than the width of the effective opening 200 (see [link to documentation]). Figure 4 (as shown); or, the first virtual opening 310 may have a width in the column direction equal to the width of the effective opening 200 (see [reference]). Figure 5 (As shown).

[0085] In addition, in order to ensure that the mask template is clamped by the tensioning device to ensure the stability of the tensioning process, as an exemplary embodiment, the interval between any one of the first virtual opening 310, the second virtual opening 320, the effective opening 200 and the other adjacent one is greater than or equal to the minimum clamping width limit of the tensioning device, for example, 2mm.

[0086] In other words, whether it is between the effective opening 200 and the virtual opening 300, or between the first virtual opening 310 and the second virtual opening 320, the size of the blocking part should be greater than or equal to the minimum limit value of the clamping width of the netting device, so as to ensure the stability of the force during the netting process of the mask template.

[0087] Furthermore, embodiments of this disclosure also provide a mask assembly, which includes:

[0088] The first mask template is the mask template provided in the embodiments of this disclosure;

[0089] A second mask, which is a precision metal mask, is stacked on top of the first mask.

[0090] The frame, with the four edges of the first mask template and the second mask template welded to the frame.

[0091] Furthermore, this disclosure also provides a vapor deposition apparatus, which includes the vapor deposition mask assembly provided in this disclosure.

[0092] The mask assembly and the vapor deposition equipment, in addition to the mask provided in the embodiments of this disclosure, are all essential components that those skilled in the art should understand to have, and will not be described in detail here, nor should they be construed as limiting the present disclosure.

[0093] Since the principle by which the mask assembly and the vapor deposition equipment solve the problem is similar to that of the mask assembly described above, the embodiments of the mask assembly and the vapor deposition equipment provided in this disclosure can refer to the embodiments of the mask assembly described above, and will not be repeated here.

[0094] The following points need to be explained:

[0095] (1) The accompanying drawings of the embodiments of this disclosure only involve the structures involved in the embodiments of this disclosure. Other structures can be referred to the general design.

[0096] (2) For clarity, the thickness of layers or regions is enlarged or reduced in the drawings used to describe embodiments of the present disclosure, i.e., these drawings are not drawn to actual scale. It will be understood that when an element such as a layer, film, region or substrate is referred to as being “above” or “below” another element, the element may be “directly” located “above” or “below” the other element or there may be intermediate elements.

[0097] (3) Where there is no conflict, the embodiments of this disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.

[0098] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. The scope of protection of this disclosure shall be determined by the scope of the claims.

Claims

1. A mask plate, characterized by, The device includes a shielding portion and a plurality of effective openings for defining the shape of a display area. The shielding portion includes a mask pattern area and a soldering area connected to at least one side of the periphery of the mask pattern area. The soldering area includes a plurality of overlapping units arranged at intervals along a direction extending from at least one edge of the mask pattern area. Each overlapping unit includes at least one overlapping portion. The overlapping portion has an extending length in the direction from the mask pattern area to the welding area. The overlapping portion has an opposing connecting end and a welding end in its length extending direction. The welding end is located on the side of the connecting end away from the mask pattern area. The welding end has a first width in the direction perpendicular to the length extending direction of the overlapping portion. The first width is the minimum limit width value of the overlapping portion that can be clamped by the tensioning device. The distance between two adjacent effective openings is greater than the first width. The shielding portion is also provided with a plurality of virtual openings; the virtual openings include a first virtual opening and a second virtual opening. At least one second virtual opening is provided at each of the opposite ends of a plurality of first virtual openings arranged along the column direction, and the second virtual opening and the first virtual opening adjacent to it are spaced apart in the column direction; At least one second virtual opening is located between two first virtual openings that are arranged adjacent to each other along the column direction, and each second virtual opening and its adjacent first virtual opening are spaced apart in the column direction; The opening area of ​​the second virtual opening is smaller than the opening area of ​​the first virtual opening.

2. The mask plate according to claim 1, wherein The first width is 2mm.

3. The mask plate according to claim 1, wherein At least a portion of the overlapping portion has a width that is the first width at any position from the connecting end to the welding end.

4. The mask template according to claim 1, characterized in that, At least a portion of the connecting end of the overlapping portion has a second width, which is greater than the first width.

5. The mask template according to claim 4, characterized in that, The width of at least a portion of the lap joint gradually decreases from the connecting end to the welding end.

6. The mask template according to claim 5, characterized in that, At least a portion of the overlap includes a first side and a second side disposed opposite to each other, both the first side and the second side extending from the connecting end to the welding end, and either the first side or the second side is configured as a straight side, an arc-shaped curve side or a broken line side for making the width of the overlap gradually decrease from the connecting end to the welding end.

7. The mask template according to claim 1, characterized in that, Each of the said overlapping units includes at least two overlapping portions arranged at intervals.

8. The mask template according to claim 1, characterized in that, In the mask pattern area, the occlusion portion includes a plurality of first occlusion portions extending along a first direction and a plurality of second occlusion portions extending along a second direction. The first occlusion portions and the second occlusion portions intersect to define a plurality of arrayed effective openings. Each first occlusion portion corresponds to at least one overlapping unit, and the overlapping unit has a first center line in its width direction. The first occlusion portion has a second center line in the width direction of the corresponding overlapping unit, and the first center line of the overlapping unit is located on the extension line of the second center line of the corresponding first occlusion portion.

9. The photomask template according to claim 8, characterized in that, At least a plurality of the virtual openings are provided at intervals on the second occluding portion.

10. The mask template according to claim 9, characterized in that, The first direction is the row direction of the array of multiple effective openings, and the second direction is the column direction of the array of multiple effective openings; In each row of effective openings, at least one of the first virtual openings is provided between any two adjacent effective openings.

11. The mask template according to claim 10, characterized in that, The centers of the first virtual opening and the effective opening in the same row are on the same straight line extending in the row direction, and the extension width of the first virtual opening in the second direction is greater than or equal to the extension width of the effective opening in the same row as the first virtual opening in the second direction.

12. The mask template according to claim 11, characterized in that, According to the mask template of claim 11, the distance between any one of the first virtual opening, the second virtual opening, the effective opening and the other adjacent to it is greater than or equal to 2 mm.

13. A mask assembly, characterized in that, include: A first mask template, wherein the first mask template is the mask template as described in any one of claims 1 to 12; A second mask template is stacked on top of the first mask template; the second mask template is a fine metal mask template. and The frame, with the four edges of the first mask template and the second mask template welded to the frame.

14. A vapor deposition apparatus, characterized in that, Includes the mask assembly as described in claim 13.

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