Method, device and system for detecting fracture of electron gun harness

Abstract

The present invention discloses a method, device, and system for detecting fractures in an electron gun harness. The fracture detection method includes: adjusting a test current applied to the electron gun harness; obtaining the actual current in the electron gun harness; and determining the degree of fracture in the electron gun harness based on the test current and the actual current. The fracture detection method for an electron gun harness provided by the present invention can determine the degree of fracture in the electron gun harness by detecting and analyzing the harness current. It is not only low-cost and easy to operate, but also harms the harness and ensures the safety of personnel.

Description

Technical Field

[0001] The present invention relates to the technical field of electron guns, and in particular to a method, device and system for detecting the breakage of an electron gun harness. Background Art

[0002] Electron beam scanning measurement technology is becoming increasingly important in the semiconductor manufacturing industry due to its high sensitivity and ability to detect defects that are invisible to optical inspection equipment. Electron beam scanning measurement instruments apply a heating current to the cathode of a hot-field electron gun filament to reach its rated operating temperature. An extraction voltage is then applied to the filament to release a large number of free electrons within it. A suppression voltage is then applied to form an electron beam. This electron beam is then pulled and accelerated by several high-voltage electric fields and used to bombard the sample under test, thereby stimulating secondary electrons. These electrons are then collected and analyzed to detect defects.

[0003] The heating current, extraction voltage, suppression voltage, and high-voltage electric field of the electron beam scanning measurement instrument are provided by the electron gun's high-voltage power supply. This high-voltage power supply is typically bulky, heavy, and difficult to transport, making it difficult to install directly on the vacuum chamber. High-voltage wiring harnesses are required to connect the filament and various high-voltage coils. These electron gun high-voltage wiring harnesses often require specialized design, typically using an inner core consisting of at least 10 copper wire strands twisted into a single strand, an insulation layer with a radius of at least 3 mm, and a shielded conductor to meet the 3A current carrying capacity and 20kV withstand voltage requirements. In actual use, these high-voltage wiring harnesses are often 1-3 meters long and flexible enough to be bundled and securely fastened to the inside of the scanning measurement instrument's casing.

[0004] During long-term operation of scanning measurement systems, these high-voltage wiring harnesses often become damaged due to various reasons. These include insulation aging; installation limitations that lead to stress buildup within the wiring harness, which can easily cause material fatigue and fracture under stress concentration; or the wiring harnesses breaking due to excessive strain. Sometimes the damaged wiring harness is completely severed, preventing the electron gun's high-voltage power supply from properly delivering its output to the high-vacuum chamber. Other times, the damage is only partial, such as if half of the ten copper wires break and become poorly connected. This can lead to various faults, such as unstable output voltage or reduced overcurrent capability. These faults can result in poor or even no image capture from the electron beam scanning measurement system. Because a broken wiring harness occurs internally and cannot be directly observed, and the symptoms are similar to those of a high-voltage power supply failure, vacuum chamber failure, or secondary electron probe failure, and because the wiring harness replacement process is cumbersome, it can be easily overlooked by engineers when troubleshooting equipment failures.

[0005] Existing methods for detecting breaks in faulty high-voltage wiring harnesses are ineffective. Simple multimeter measurements, for example, can detect completely broken wiring harnesses, but are often ineffective against partially broken ones. This is primarily because the inherent resistance of a 1-3 meter high-voltage wiring harness is in the milliohm range, while the increase in resistance caused by a partial break is in the microohm range, making it difficult for a multimeter to effectively detect. Secondly, using the broken line method to assist with multimeter measurement carries the risk of electric shock, as the high-voltage wiring harness requires the rated high voltage to be effectively measured. Furthermore, while mature and widely used methods, such as the pulse reflection method, the high-voltage voltage direct flash method, and the high-voltage voltage impulse flash method, can pinpoint the fault location, they are blind spots for high-voltage wiring harnesses under 10 meters and with small cross-sectional areas. These measurement devices are inherently expensive, making improvements uneconomical. Summary of the Invention

[0006] The present invention provides a method, device and system for detecting the fracture of an electron gun wire harness. By detecting the actual current of the electron gun wire harness and analyzing and comparing the actual current with a preset current, the fracture degree of the electron gun wire harness is determined. The fracture detection method is not only low-cost and simple to operate, but also can accurately detect the fracture degree of the electron gun wire harness without damaging the electron gun wire harness.

[0007] According to a first aspect of the present invention, a method for detecting a break in an electron gun wire harness is provided, comprising:

[0008] regulating a test current applied to the electron gun wiring harness;

[0009] obtaining an actual current of the electron gun wire beam;

[0010] The degree of breakage of the electron gun wire bundle is determined according to the test current and the actual current.

[0011] Optionally, adjust the test current applied to the electron gun wire bundle, including:

[0012] Applying a first preset current to the electron gun beam and sequentially increasing the test current in first preset steps, or

[0013] Applying a second preset current to the electron gun beam, and sequentially reducing the test current in second preset steps;

[0014] Wherein, the first preset current is smaller than the second preset current.

[0015] Optionally, determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current includes:

[0016] When the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current, entering the waiting diagnosis state;

[0017] When the actual current is 0, it is determined that the electron gun wire bundle is completely broken.

[0018] Optionally, when the actual current increases according to the increase of the test current or the actual current decreases according to the decrease of the test current, entering the waiting diagnosis state includes:

[0019] When the actual current continues to increase in accordance with the increase of the test current, and / or

[0020] When the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun harness is not broken;

[0021] When the actual current increases according to the increase of the test current, and the actual current stops increasing when it reaches a first threshold, and / or

[0022] When the actual current decreases according to the decrease of the test current and the actual current decreases to a second threshold and stops decreasing, it is determined that the electron gun wire bundle is partially broken.

[0023] According to a second aspect of the present invention, there is provided a device for detecting the breakage of an electron gun harness, which performs the method for detecting the breakage of an electron gun harness described in the first aspect, wherein the device comprises: a current detection module, a current setting module, and a constant current source module;

[0024] The first output end of the current setting module is connected to the constant current source module, and the current setting module adjusts the test current applied to the electron gun wire harness based on the control instruction of the user end;

[0025] The first output end of the current detection module is connected to the electron gun wire harness, and the second output end of the current detection module is connected to the first input end of the current setting module. The current detection module is used to detect the actual current of the electron gun wire harness in real time and feed it back to the current setting module;

[0026] The output end of the constant current source module is connected to the current detection module, and the constant current source module applies the test current to the electron gun harness.

[0027] Optionally, a display module is also included;

[0028] The first input end of the display module is connected to the second output end of the current setting module, the second input end of the display module is connected to the third output end of the current detection module, and the display module is used to display the test current and the actual current.

[0029] Optionally, the first output end of the current detection module includes a first interface and a second interface;

[0030] The first interface is connected to the first end of the electron gun harness, and the second interface is connected to the second end of the electron gun harness;

[0031] The first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

[0032] Optionally, a power interface module is also included;

[0033] The input end of the power interface module is connected to the external power supply network through a power line, and the power interface module is used to convert the alternating current provided by the external power supply network into direct current.

[0034] Optionally, a warning module is also included;

[0035] The warning module is connected to the display module, and is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: a voice reminder, a buzzer reminder, and a light reminder.

[0036] According to a third aspect of the present invention, a system for detecting a breakage of an electron gun harness is provided, comprising a power supply, an electron gun harness to be tested, and the electron gun harness breakage detection device according to any one of the second aspects.

[0037] The present invention discloses a method, device, and system for detecting fractures in an electron gun harness. The method comprises adjusting a test current applied to the electron gun harness; obtaining the actual current of the electron gun harness; and determining the degree of fracture in the electron gun harness based on the test current and the actual current. The present invention provides a method, device, and system for detecting fractures in an electron gun harness. By detecting the actual current in the electron gun harness and analyzing and comparing the actual current with a preset current, the degree of fracture in the electron gun harness is determined. This fracture detection method is not only low-cost and simple to operate, but also can accurately detect the degree of fracture in the electron gun harness without damaging the harness.

[0038] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0040] Figure 1 This is a flow chart of a method for detecting a break in an electron gun harness provided by an embodiment of the present invention;

[0041] Figure 2 This is a flow chart of another method for detecting fracture of an electron gun wire harness provided by an embodiment of the present invention;

[0042] Figure 3 This is a flow chart of another method for detecting fracture of an electron gun wire harness provided by an embodiment of the present invention;

[0043] Figure 4 This is a flow chart of another method for detecting fracture of an electron gun wire harness provided by an embodiment of the present invention;

[0044] Figure 5 This is a block diagram of a device for detecting a breakage of an electron gun harness provided by an embodiment of the present invention;

[0045] Figure 6 This is a circuit schematic diagram of a current detection module in a device for detecting a break in an electron gun harness provided by an embodiment of the present invention;

[0046] Figure 7 This is a circuit schematic diagram of a current setting module in a device for detecting a breakage of an electron gun wire harness provided by an embodiment of the present invention;

[0047] Figure 8 This is a circuit schematic diagram of a constant current source module in a device for detecting a breakage of an electron gun harness provided by an embodiment of the present invention;

[0048] Figure 9 This is another circuit principle diagram of a constant current source module in an electron gun harness breakage detection device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0049] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0050] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0051] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0052] Figure 1 This is a flow chart of a method for detecting a fracture of an electron gun harness provided by an embodiment of the present invention, with reference to Figure 1 , an embodiment of the present invention provides a method for detecting a break in an electron gun wire harness, comprising:

[0053] S1. Adjust the test current applied to the electron gun wire bundle.

[0054] Among them, the electron gun is a device that generates, accelerates and converges a high-energy-density electron beam. It is widely used in many fields such as inelastic electron scattering and fluorescent screen luminescence. When using an electron beam scanning measuring instrument, it needs to be provided by a high-voltage power supply for the electron gun. Usually, this high-voltage power supply takes up a large space and is heavy and difficult to carry. It cannot be directly installed on the vacuum chamber, and the filament and each high-voltage coil must be connected through a high-voltage wire harness. The electron gun wire harness detected in this embodiment is the high-voltage wire harness for the electron gun. When the test current is applied to the high-voltage wire harness, the current response of the normal and broken wire harnesses is different.

[0055] Specifically, the test current applied to the electron gun wire bundle is adjusted to test the electron gun wire bundle.

[0056] S2. Get the actual current of the electron gun beam.

[0057] Specifically, the actual current fed back by the electron gun wire bundle after applying different test currents is monitored and obtained in real time.

[0058] S3. Determine the degree of breakage of the electron gun harness based on the test current and the actual current.

[0059] Specifically, the degree of breakage of the electron gun wire bundle is determined by analyzing and comparing different test currents applied to the electron gun wire bundle and the actual current fed back by the electron gun wire bundle. The degree of breakage may include any of the following: no breakage, complete breakage and partial breakage.

[0060] The embodiment of the present invention determines the degree of fracture of the electron gun wire bundle by detecting the actual current of the electron gun wire bundle and analyzing and comparing the actual current with the preset current. This fracture detection method is not only low-cost and simple to operate, but also can accurately detect the degree of fracture of the electron gun wire bundle without damaging the electron gun wire bundle.

[0061] Based on the above-mentioned embodiment of the invention, the embodiment of the present invention further refines the adjustment of the test current applied to the electron gun beam. Figure 2 This is a flow chart of another method for detecting the breakage of an electron gun harness provided by an embodiment of the present invention. Figure 2 , the control method of the embodiment of the present invention includes:

[0062] S21 . Apply a first preset current to the electron gun wire bundle and sequentially increase the test current with a first preset step length, or apply a second preset current to the electron gun wire bundle and sequentially decrease the test current with a second preset step length.

[0063] Specifically, a first preset current is applied to the electron gun wiring harness, illustratively, the first preset current may be 2A, and the test current applied to the electron gun wiring harness is sequentially increased, with each increase varying by 0.02A. Alternatively, a second preset current is applied to the electron gun wiring harness, illustratively, the second preset current may be 3A, and the test current applied to the electron gun wiring harness is sequentially decreased, with each decrease varying by 0.02A, wherein the first preset current is smaller than the second preset current. The embodiments of the present invention do not limit the first preset current, the second preset current, the first preset step length, and the second preset step length. The first preset step length and the second preset step length may also be the same, and the user may set them according to actual needs.

[0064] S22. Obtain the actual current of the electron gun beam.

[0065] S23. Determine the degree of breakage of the electron gun harness based on the test current and the actual current.

[0066] Based on the above-mentioned embodiment of the invention, the embodiment of the present invention further refines the determination of the fracture degree of the electron gun wire bundle according to the test current and the actual current. Figure 3 This is a flow chart of another method for detecting the breakage of an electron gun harness provided by an embodiment of the present invention. Figure 3 , the control method provided by the embodiment of the present invention includes:

[0067] S31. Adjust the test current applied to the electron gun wire bundle.

[0068] S32. Obtain the actual current of the electron gun beam.

[0069] S33. Determine the degree of breakage of the electron gun harness according to the test current and the actual current.

[0070] S34. Compare the test current and the actual current.

[0071] When the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current, execute step S3401; when the actual current does not increase according to the increase of the test current, when the actual current does not decrease according to the decrease of the test current, or when the actual current is 0, execute step S3402.

[0072] S3401. When the actual current increases as the test current increases or when the actual current decreases as the test current decreases, the system enters a waiting-for-diagnosis state.

[0073] Specifically, the current applied to the electron gun wire is 2A, and the current applied to the electron gun wire is adjusted in increments of 0.02A each time. When the actual current fed back by the electron gun wire increases with the increased test current, or

[0074] The current applied to the electron gun harness is 3A, and the current applied to the electron gun harness is adjusted in increments of 0.02A each time. When the actual current fed back by the electron gun harness decreases as the test current decreases, it proves that the electron gun harness is not completely broken at this time, but it is not possible to directly determine whether the electron gun harness is partially broken at this time. Therefore, it enters the diagnosis state.

[0075] S3402: When the actual current is 0, it is determined that the electron gun harness is completely broken.

[0076] Specifically,

[0077] When the actual current fed back by the electron gun harness is 0 regardless of how the test current applied to the electron gun harness changes (ie, the test current can be increased or decreased sequentially), it proves that the electron gun harness is completely broken.

[0078] On the basis of the above-mentioned embodiment of the invention, the embodiment of the invention further refines the process of entering the state to be diagnosed when the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current. Figure 4 This is a flow chart of another method for detecting the breakage of an electron gun harness provided by an embodiment of the present invention. Figure 4 , the control method provided by the embodiment of the present invention includes:

[0079] S41. Adjust the test current applied to the electron gun wire bundle.

[0080] S42. Obtain the actual current of the electron gun beam.

[0081] S43. Determine the degree of breakage of the electron gun harness according to the test current and the actual current.

[0082] S44. Compare the test current and the actual current.

[0083] S45. When the actual current increases as the test current increases or when the actual current decreases as the test current decreases, the system enters a waiting-for-diagnosis state.

[0084] S46: When the actual current continues to increase according to the increase of the test current, and / or when the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun harness is not broken.

[0085] Specifically, when the actual current fed back by the electron gun harness continues to increase according to the increase of the test current, for example, the test current applied to the electron gun harness is 2A, which increases by 0.02A each time, and the actual current fed back by the electron gun harness continues to increase with the increase of the test current, and / or when the actual current fed back by the electron gun harness continues to decrease according to the decrease of the test current, for example, the test current applied to the electron gun harness is 3A, which decreases by 0.02A each time, and the actual current fed back by the electron gun harness continues to decrease with the decrease of the test current, it can be understood that when the actual current fed back by the electron gun harness is consistent with the test current applied to the electron gun harness, it proves that the electron gun harness at this time is not broken.

[0086] S47. When the actual current increases according to the increase of the test current and stops increasing when it reaches a first threshold, and / or when the actual current decreases according to the decrease of the test current and stops decreasing when it reaches a second threshold, it is determined that a partial break occurs in the electron gun harness.

[0087] Specifically, when the electron gun wiring harness has a local break, for example, 5 out of 10 strands are broken, the cross-sectional area of ​​the electron gun wiring harness decreases, and the resistance increases, but the increase is not significant, and it cannot be effectively identified under static measurement. However, when a large current passes through, local high temperatures will be generated at the break, and high temperatures will increase the skin effect, further increasing the resistance. In addition, because the spacing between the broken strands is very small, when voltage is applied, a tip discharge phenomenon, commonly known as sparking, will occur, and the voltage cannot be stabilized. When the above situation occurs, the current carrying capacity of the electron gun wiring harness will decrease depending on the area of ​​the break. At this time, the actual current fed back by the electron gun wiring harness will be less than the set current value. In particular, when the electron gun wiring harness has a local break, the actual current fed back by the electron gun wiring harness will increase according to the increase of the test current, and stop increasing when the actual current increases to a first threshold value, and / or the actual current fed back by the electron gun wiring harness will decrease according to the decrease of the test current, and stop decreasing when the actual current decreases to a second threshold value, then it is determined that the electron gun wiring harness has a local break. The first threshold value and the second threshold value can be set according to actual needs.

[0088] Among them, the current carrying capacity of the electron gun harness can be calculated by the following formula:

[0089]

[0090] Where I is the current of the electron gun beam, U is the voltage of the electron gun beam, S is the cross-sectional area of ​​the electron gun beam, ρ is the resistivity, and L is the length of the electron gun beam.

[0091] According to the same inventive concept, Figure 5 This is a block diagram of a device for detecting the breakage of an electron gun wire harness provided by an embodiment of the present invention, with reference to Figure 5 An embodiment of the present invention provides a device for detecting the fracture of an electron gun harness, which executes the method for detecting the fracture of an electron gun harness in any of the above-mentioned embodiments of the invention. The detection device includes: a current detection module 1, a current setting module 2, and a constant current source module 3; the first output end of the current setting module 2 is connected to the constant current source module 3, and the current setting module 2 adjusts the test current applied to the electron gun harness 4 based on the control instruction of the user end; the first output end of the current detection module 1 is connected to the electron gun harness 4, and the second output end of the current detection module 1 is connected to the first input end of the current setting module 2, and the current detection module 1 is used to detect the actual current of the electron gun harness 4 in real time and feed it back to the current setting module 2; the output end of the constant current source module 3 is connected to the current detection module 1, and the constant current source module 3 applies the test current to the electron gun harness 4.

[0092] Specifically, the first output end of the current detection module 1 is connected to the electron gun harness 4, and the second output end of the current detection module 1 is connected to the first input end of the current setting module 2. The current detection module 1 is used to detect the actual current of the electron gun harness 4 in real time and feed it back to the current setting module 2.

[0093] Figure 6 This is a circuit diagram of a current detection module in a device for detecting a break in an electron gun harness according to an embodiment of the present invention. Figure 6 The actual current I1 on the sampling resistor R1 is converted into a feedback voltage Vfb through the calculation of the operational amplifier IC1. After passing through the resistance combination of resistors R2 and R3, this voltage value can be regarded as the actual current of the electron gun beam and fed back to the current setting module 2. The feedback voltage Vfb can be calculated by the following formula.

[0094]

[0095] Among them, 100 kΩ is the resistance value of resistor R3; 10 kΩ is the resistance value of resistor R2.

[0096] The first output end of the current setting module 2 is connected to the constant current source module 3 , and the current setting module 2 adjusts the test current applied to the electron gun harness 4 based on the control instruction of the user end.

[0097] Figure 7 This is a circuit schematic diagram of a current setting module in a device for detecting a break in an electron gun wire harness according to an embodiment of the present invention. Figure 7 , the processor IC2 is controlled by the buttons SA and SB, and the circuit composed of the processor IC3 and the operational amplifier IC4 outputs the set voltage V set Under the control of processor IC2, this sets the voltage V set The constant current source module 3 is controlled to output a 1:1 set current Set Current. It is understood that each time the button SB is pressed, the current setting module 2 causes the constant current source module 3 to increase the set current loaded onto the electron gun harness 4 by 0.02A, up to a maximum of 6A, thereby adjusting the test current of the electron gun harness 4. Alternatively, each time the button SA is pressed, the current setting module 2 causes the constant current source module 3 to decrease the set current loaded onto the electron gun harness 4 by 0.02A, up to a maximum of 6A, thereby adjusting the test current of the electron gun harness 4.

[0098] The output end of the constant current source module 3 is connected to the current detection module 1 , and the constant current source module 3 applies a test current to the electron gun harness 4 .

[0099] Figure 8 This is a circuit schematic diagram of a constant current source module in a device for detecting a break in an electron gun harness according to an embodiment of the present invention. Figure 8 , set the voltage Vset to enter the operational amplifier IC5 through R4. The output of this operational amplifier IC5 can control the output voltage of the power MOS tube Q2 when the transistor Q1 is turned on. Depending on Vset, 0-24V DC can be output to the third leg of the transformer T1. Transformer T1 is a center-tapped transformer with a turns ratio of 20:4 between the primary and secondary sides. Its power is specially designed to be 40W to prevent the broken high-voltage wiring harness from heating up severely during testing and thus damaging the detection device. In order for the center-tapped transformer to work, two power MOS tubes Q3 and Q4 are required to convert the output voltage of Q2 into the required input voltage on the T1 coil through fast switching action. In order for the power MOS tubes Q3 and Q4 to work normally, a set of inverted PWM waves CLK must be provided. The circuit diagram is as follows Figure 9 As shown, Figure 9 This is another circuit principle diagram of a constant current source module in an electron gun harness breakage detection device provided by an embodiment of the present invention.

[0100] Combine Figure 8 and Figure 9 Timer IC6, through the combination of resistors R5, R6, and capacitor C1, outputs a 25kHz PWM wave. IC7 generates its inverse PWM wave, which is then boosted to 15V by IC8 to control the switching of Q3 and Q4. When transformer T1 receives input voltage on its primary side, it outputs a corresponding voltage on its secondary side based on the turns ratio. This voltage is rectified by diodes D2 and D3 into a DC voltage, which is applied across the electron gun wiring harness 4 under test. Inductor L1 is a common-mode inductor, designed to eliminate common-mode current and improve measurement accuracy. R7 is 0.5 ohms and simulates the filament load typically connected in actual operation. R8 is a current sensing resistor, allowing current sensing module 1 to sample the actual current. The output voltage of current sensing module 1 is fed back to operational amplifier IC5 as feedback voltage Vfb to balance the entire circuit. Eventually, Vfb equals Vset, and constant current source module 3 stabilizes the output current, ensuring the actual output current remains consistent with the set current. However, if the electron gun wiring harness 4 under test breaks, the actual current flowing through the gun wiring harness will be less than the set current, and the corresponding Vfb will never reach Vset. Operational amplifier IC5 will be in an unbalanced resistor configuration, unable to balance the voltages at its two input pins. This results in an output voltage equal to its power supply (i.e., 15V), and Q2 will output its maximum value of 24V. In this case, the design of transformer T1's power limit of 40W effectively protects the entire circuit.

[0101] Optional, continue to refer to Figure 5The electron gun harness fracture detection device also includes a display module 5; the first input end of the display module 5 is connected to the second output end of the current setting module 2, the second input end of the display module 5 is connected to the third output end of the current detection module 1, and the display module 5 is used to display the test current and the actual current.

[0102] Specifically, the display module 5 can be used to display the test current applied to the electron gun harness 4, display the actual current fed back by the electron gun harness 4 and other information; illustratively, the display module 5 can be a digital tube.

[0103] Optionally, the first output end of the current detection module 1 includes a first interface and a second interface (the first interface and the second interface are not shown in the figure); the first interface is connected to the first end of the electron gun harness, and the second interface is connected to the second end of the electron gun harness; the first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

[0104] Specifically, the first output end of the current detection module 1 includes a first interface and a second interface, which are respectively connected in series with the electron gun harness 4, for transmitting the test current to the electron gun harness 4 and feeding back the actual current of the electron gun harness 4 to the display module 5.

[0105] Optional, reference Figure 5 The electron gun harness fracture detection device includes a power interface module 6; the input end of the power interface module 6 is connected to the external power supply network through a power line, and the power interface module 6 is used to convert the AC power provided by the external power supply network into DC power.

[0106] Specifically, the power interface module 6 is used to convert the 90V-260V AC power in the external power supply network into a voltage such as 24V to provide power to the display module 5 and the like.

[0107] Optional, reference Figure 5 The electron gun harness fracture detection device includes a warning module 7; the warning module 7 is connected to the display module 5, and the warning module 7 is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: voice reminder, buzzer reminder and light reminder.

[0108] Specifically, the warning module 7 is connected to the display module 5. The warning module 7 is used to issue a warning message to remind the staff when the actual current of the electron gun harness 4 is 0 and it is determined that the electron gun harness 4 is completely broken. The warning message includes voice reminder, buzzer reminder and light reminder.

[0109] According to the same inventive concept, an embodiment of the present invention provides an electron gun harness fracture detection system, comprising a power supply, an electron gun harness to be tested, and an electron gun harness fracture detection device according to any one of the above-mentioned inventive embodiments.

[0110] The electron gun harness fracture detection system provided by the embodiment of the present invention can achieve the same technical effects as the electron gun harness fracture detection device provided by the above-mentioned embodiment of the invention, and will not be described in detail here.

[0111] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A method for detecting a break in an electron gun harness, characterized in that: include: regulating a test current applied to the electron gun wiring harness; obtaining an actual current of the electron gun wire beam; determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current; Determining the degree of breakage of the electron gun wire bundle according to the test current and the actual current includes: When the actual current increases according to the increase of the test current or when the actual current decreases according to the decrease of the test current, entering the waiting diagnosis state; When the actual current is 0, it is determined that the electron gun wire harness is completely broken; When the actual current increases according to the increase of the test current or the actual current decreases according to the decrease of the test current, the system enters a waiting-for-diagnosis state, including: When the actual current continues to increase in accordance with the increase of the test current, and / or When the actual current continues to decrease according to the decrease of the test current, it is determined that the electron gun harness is not broken; When the actual current increases according to the increase of the test current, and the actual current stops increasing when it reaches a first threshold, and / or When the actual current decreases according to the decrease of the test current and the actual current decreases to a second threshold and stops decreasing, it is determined that the electron gun wire bundle is partially broken.

2. The method for detecting a breakage of an electron gun harness according to claim 1, wherein: Adjusts the test current applied to the electron gun harness, including: Applying a first preset current to the electron gun beam and sequentially increasing the test current in first preset steps, or Applying a second preset current to the electron gun beam, and sequentially reducing the test current in second preset steps; Wherein, the first preset current is smaller than the second preset current.

3. A device for detecting the breakage of an electron gun harness, characterized in that: The method for detecting the breakage of an electron gun harness according to any one of claims 1 to 2 is implemented, wherein the detection device comprises: a current detection module, a current setting module, and a constant current source module; The first output end of the current setting module is connected to the constant current source module, and the current setting module adjusts the test current applied to the electron gun wire harness based on the control instruction of the user end; The first output end of the current detection module is connected to the electron gun wire harness, and the second output end of the current detection module is connected to the first input end of the current setting module. The current detection module is used to detect the actual current of the electron gun wire harness in real time and feed it back to the current setting module; The output end of the constant current source module is connected to the current detection module, and the constant current source module applies the test current to the electron gun harness.

4. The device for detecting a breakage of an electron gun harness according to claim 3, wherein: Also includes a display module; The first input end of the display module is connected to the second output end of the current setting module, the second input end of the display module is connected to the third output end of the current detection module, and the display module is used to display the test current and the actual current.

5. The device for detecting breakage of an electron gun harness according to claim 3, wherein: The first output end of the current detection module includes a first interface and a second interface; The first interface is connected to the first end of the electron gun harness, and the second interface is connected to the second end of the electron gun harness; The first interface and the second interface are used to transmit the test current to the electron gun harness and to feed back the actual current to the current detection module.

6. The device for detecting breakage of an electron gun harness according to claim 3, wherein: Also included is a power interface module; The input end of the power interface module is connected to the external power supply network through a power line, and the power interface module is used to convert the alternating current provided by the external power supply network into direct current.

7. The device for detecting breakage of an electron gun harness according to claim 4, wherein: Also includes a warning module; The warning module is connected to the display module, and is used to issue a warning message when the actual current is 0; wherein the warning message includes at least one of the following: a voice reminder, a buzzer reminder, and a light reminder.

8. A fracture detection system for an electron gun harness, characterized in that: The invention comprises a power supply, an electron gun harness to be tested and a fracture detection device for an electron gun harness according to any one of claims 3 to 7.

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