A method for suppressing crosstalk of a MEMS micro mirror

Abstract

The application provides a method for suppressing crosstalk of a MEMS micro-mirror. Since the crosstalk of the MEMS micro-mirror is caused by high-frequency resonance due to mechanical coupling, the method for suppressing crosstalk of the MEMS micro-mirror comprises the step of suppressing high-frequency mechanical resonance of the MEMS micro-mirror. The method for suppressing high-frequency mechanical resonance of the MEMS micro-mirror can be to increase the resonance frequency difference between the first actuator and the second actuator, thereby effectively suppressing the crosstalk between the two axes without sacrificing the deflection angle of the two axes, and ensuring the deflection performance of the MEMS micro-mirror in each axis. The method for suppressing high-frequency mechanical resonance of the MEMS micro-mirror can also be to filter the excitation signal, effectively filter out the high-frequency signal component in the excitation signal, reduce the interference of high-frequency resonance on the control of the MEMS micro-mirror, and improve the control accuracy of the MEMS micro-mirror.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of micro-electro-mechanical system, and particularly relates to a method for suppressing crosstalk of MEMS micro-mirror. BACKGROUND

[0002] In the field of micro-electro-mechanical system (MEMS), MEMS micro-mirror technology has attracted much attention due to its advantages in size, response speed and precision. MEMS quasi-static micro-mirror, especially the type of dual-axis actuator, has become an indispensable component in modern laser scanning systems, and is widely used in light detection and ranging (LiDAR), biomedical imaging, laser tracking and communication, and laser projection display fields.

[0003] However, although MEMS quasi-static micro-mirror has many advantages, it still faces many challenges in practical applications, among which the dual-axis crosstalk problem is particularly prominent. Dual-axis crosstalk refers to the situation that when driving the micro-mirror to move in a certain axis, due to the influence of mechanical structure, electromagnetic coupling or other physical factors, the other axis also produces unexpected movement, thereby causing significant deviation between the actual movement state of the micro-mirror and the expected set movement state. This deviation not only reduces the control accuracy of the system, but also may affect the stability and reliability of the entire system.

[0004] In order to solve the problem of dual-axis crosstalk, researchers have tried various methods. Among them, analog filtering is a commonly used technical means, which designs a special filter circuit to suppress high-frequency resonance, thereby reducing the crosstalk between the two axes. However, this method may filter out part of the normal driving signal while suppressing the crosstalk, affecting the dynamic performance of the micro-mirror. In addition, over-damped structure design is also used to suppress high-frequency mechanical resonance, but this method often comes at the cost of reducing the rotation angle of the MEMS micro-mirror, thereby limiting its application range and performance.

[0005] To solve the above problems, the present application provides a method for suppressing crosstalk of MEMS micro-mirror. SUMMARY

[0006] In view of the defects and deficiencies of the MEMS micromirror crosstalk in the prior art, the application provides a method for suppressing the crosstalk of the MEMS micromirror. Since the crosstalk of the MEMS micromirror is caused by high-frequency resonance due to mechanical coupling, the method for suppressing the crosstalk of the MEMS micromirror comprises the step of suppressing the high-frequency mechanical resonance of the MEMS micromirror. The way of suppressing the high-frequency mechanical resonance of the MEMS micromirror can be to increase the resonance frequency difference between the first actuator and the second actuator, thereby effectively suppressing the crosstalk between the two axes without sacrificing the deflection angle of the two axes, and ensuring the deflection performance of the MEMS micromirror in each axis. The way of suppressing the high-frequency mechanical resonance of the MEMS micromirror can also be to filter the excitation signal, effectively filtering out the high-frequency signal component in the excitation signal, reducing the interference of high-frequency resonance on the control of the MEMS micromirror, and improving the control accuracy of the MEMS micromirror.

[0007] An embodiment of the application provides a method for suppressing the crosstalk of a MEMS micromirror, the MEMS micromirror comprising a mirror surface, two first actuators symmetrically arranged along a first direction with the mirror surface as the center of symmetry, and two second actuators symmetrically arranged along a second direction with the mirror surface as the center of symmetry, the first actuators and the second actuators driving the mirror surface to deflect, the first direction being perpendicular to the second direction.

[0008] The method for suppressing the crosstalk of the MEMS micromirror comprises the step of suppressing the high-frequency mechanical resonance of the MEMS micromirror.

[0009] The way of suppressing the high-frequency mechanical resonance of the MEMS micromirror comprises increasing the resonance frequency difference between the first actuator and the second actuator and / or filtering the excitation signal.

[0010] As an implementation manner, the increasing of the resonance frequency difference between the first actuator and the second actuator comprises changing the stiffness of the first actuator or the second actuator, or changing the moment of inertia of the MEMS micromirror.

[0011] As an implementation manner, the changing of the stiffness of the first actuator or the second actuator comprises changing the thickness of the first actuator or the second actuator, or changing the cross-sectional area of the first actuator or the second actuator.

[0012] As an implementation manner, the first actuator comprises a first cantilever beam and a first elastic structure, the first cantilever beam being connected to the mirror surface through the first elastic structure; the second actuator comprises a second cantilever beam and a second elastic structure, the second cantilever beam being connected to the mirror surface through the second elastic structure.

[0013] As an implementation form, the changing of the thickness of the first actuator or the second actuator comprises changing the thickness of the first cantilever beam or the second cantilever beam, and the thickness of the first cantilever beam or the second cantilever beam is changed by dispensing, coating, patching or spraying on the first cantilever beam or the second cantilever beam.

[0014] As an implementation form, the changing of the cross-sectional area of the first actuator or the second actuator comprises changing the thickness or width of the first elastic structure or the second elastic structure.

[0015] As an implementation form, the changing of the moment of inertia of the MEMS micro-mirror comprises changing the assembly position of the mirror surface.

[0016] As an implementation form, the changing of the assembly position of the mirror surface comprises shifting the mirror surface in the first direction or in the second direction.

[0017] As an implementation form, the filtering of the excitation signal comprises using a feedforward control algorithm, a low-pass filter, an IIR digital filter, a Notch filter, a moving average filter, a median filter or a Kalman filter.

[0018] As an implementation form, the feedforward control algorithm comprises a two-step method, a three-step method or a feedforward neural network method.

[0019] As described above, the method for suppressing crosstalk of a MEMS micro-mirror has the following beneficial effects:

[0020] The method for suppressing crosstalk of a MEMS micro-mirror comprises the step of suppressing high-frequency mechanical resonance of the MEMS micro-mirror. The way of suppressing high-frequency mechanical resonance of the MEMS micro-mirror can be to increase the resonance frequency difference between the first actuator and the second actuator, thereby suppressing crosstalk between the two axes without sacrificing the deflection angle of the two axes, ensuring the deflection performance of the MEMS micro-mirror in each axis. The way of suppressing high-frequency mechanical resonance of the MEMS micro-mirror can also be to filter the excitation signal, effectively filtering out high-frequency signal components in the excitation signal, reducing the interference of high-frequency resonance on the control of the MEMS micro-mirror, and improving the control accuracy of the MEMS micro-mirror. The method for suppressing crosstalk of a MEMS micro-mirror effectively suppresses high-frequency oscillation phenomenon of the MEMS micro-mirror during operation, ensures that the MEMS micro-mirror can quickly reach and stabilize at its deflection angle, and improves the response speed and stability of the system. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 A structure schematic diagram of a MEMS micro-mirror in the prior art is shown.

[0022] Figure 2A schematic diagram of a method for suppressing crosstalk of a MEMS micro mirror is shown.

[0023] Figure 3 A structural schematic diagram of a method for suppressing crosstalk of a MEMS micro mirror is shown.

[0024] Figure 4 A structural schematic diagram of a method for suppressing crosstalk of a MEMS micro mirror is shown.

[0025] Figure 5 A structural schematic diagram of a method for suppressing crosstalk of a MEMS micro mirror is shown.

[0026] Figure 6 A schematic diagram of effects before and after suppressing crosstalk of a MEMS micro mirror is shown.

[0027] Figure 7 A schematic diagram of effects of an open loop and a feedforward control algorithm using double-step driving is shown.

[0028] Element number explanation

[0029] 100, mirror surface; 200, first actuator; 210, first cantilever beam; 220, first elastic structure; 300, second actuator; 310, second cantilever beam; 320, second elastic structure; 321, widened second elastic structure; 400, mechanical coupling column; 510, dropper; 520, thickened layer. DETAILED DESCRIPTION

[0030] The advantages and effects of the present application can be easily understood by those skilled in the art from the above description. The present application can also be implemented or applied in different specific embodiments, and the details in the description can be modified or changed based on different views and applications without departing from the spirit of the present application.

[0031] In modern laser scanning systems, MEMS quasi-static micro mirrors are widely used due to their small size, fast response, and high precision. However, these micro mirrors are often affected by the two-axis crosstalk effect in practical applications. This crosstalk causes a deviation between the actual motion state of the micro mirror and the expected set motion state, thereby affecting the overall performance and precision of the system.

[0032] In order to suppress the crosstalk between the two axes, the existing technology usually adopts the way of analog filtering, but this needs to design a special filter circuit, and may filter out the normal driving signal. Another method is to use the over-damped structure design, although it can suppress the high frequency mechanical resonance, but this method will reduce the rotation angle of the MEMS micro mirror, thereby limiting the application range of the MEMS micro mirror.

[0033] In view of the above defects, the application provides a method for suppressing the crosstalk of the MEMS micro mirror. The following embodiments are described in detail.

[0034] Before describing the method for suppressing the crosstalk of the MEMS micro mirror, the structure of the MEMS micro mirror is described first. As shown in the figure, Figure 1 The MEMS micro mirror includes a mirror surface 100, two first actuators 200 and two second actuators 300. Among them, along the first direction, the two first actuators 200 are arranged on both sides of the mirror surface 100 with the mirror surface 100 as the center of symmetry; along the second direction, the two second actuators 300 are arranged on both sides of the mirror surface 100 with the mirror surface 100 as the center of symmetry. The first direction and the second direction are perpendicular to each other, for example, the first direction can be the X-axis direction, and the second direction can be the Y-axis direction, so the first actuator 200 can also be called the X-axis actuator, and the second actuator 300 can also be called the Y-axis actuator. The first actuator 200 and the second actuator 300 drive the mirror surface 100 to deflect. The actuation mode of the first actuator 200 and the second actuator 300 in the MEMS micro mirror includes electrostatic driving, thermoelectric driving, electromagnetic driving or piezoelectric driving. Among them, the piezoelectric material of the piezoelectric driving can be scandium-doped aluminum nitride, lithium niobate, lead zirconate titanate, or lithium tantalate.

[0035] Embodiment one

[0036] The embodiment provides a method for suppressing the crosstalk of the MEMS micro mirror, as shown in the figure, Figure 2 The method for suppressing the crosstalk of the MEMS micro mirror includes the step of suppressing the high frequency mechanical resonance of the MEMS micro mirror. Among them, the way to suppress the high frequency mechanical resonance of the MEMS micro mirror includes increasing the resonance frequency difference between the first actuator 200 and the second actuator 300 and / or filtering the excitation signal.

[0037] The embodiment can effectively suppress the crosstalk between the two axes by increasing the resonance frequency difference between the first actuator 200 and the second actuator 300, and this method for suppressing the crosstalk does not sacrifice the deflection angle of the two axes, and ensures the deflection performance of the MEMS micro mirror in each axis; filtering the excitation signal can effectively filter out the high frequency signal component in the excitation signal, reduce the interference of high frequency resonance on the MEMS micro mirror, and improve the control accuracy of the MEMS micro mirror.

[0038] In an optional embodiment, as shown in the figure, Figure 2As shown, increasing the difference between the resonant frequencies of the first actuator 200 and the second actuator 300 includes changing the stiffness of the first actuator 200 or changing the stiffness of the second actuator 300, or changing the moment of inertia of the MEMS micromirror. Changing the stiffness of the first actuator 200 or the second actuator 300 can increase the difference between the biaxial resonant frequencies, thereby effectively suppressing high-frequency resonance caused by mechanical coupling and reducing the crosstalk effect between the two axes; it helps to avoid the mode coupling problem caused when approaching the resonant frequency, ensuring long-term stable operation of the system; at the same time, it not only suppresses crosstalk, but also improves the resonant frequency of the MEMS micromirror without sacrificing the deflection angle of the MEMS micromirror, optimizing the scanning speed and resolution; it is conducive to improving the control accuracy of the MEMS micromirror and the overall performance of the system. Changing the moment of inertia of the MEMS micromirror can increase the resonant frequency of the MEMS micromirror, so that the MEMS micromirror can work at a higher frequency, which is conducive to the application in high-speed scanning.

[0039] In an optional embodiment, as shown in Figure 2 Changing the stiffness of the first actuator 200 or the second actuator 300 includes changing the thickness of the first actuator 200 or the second actuator 300, or changing the cross-sectional area of the first actuator 200 or the second actuator 300. By changing the thickness of the first actuator 200 or the second actuator 300, the stiffness of each axis can be finely adjusted to achieve precise control of the resonant frequency, ensuring that the two axes work at different resonant frequencies, reducing crosstalk and improving control accuracy. By changing the cross-sectional area of the first actuator 200 or the second actuator 300, the resonant characteristics of the MEMS micromirror can be accurately controlled to achieve precise adjustment of the difference in resonant frequencies; at the same time, it can affect the torsional stiffness of the first actuator 200 or the second actuator 300, thereby changing the difference in resonant frequencies between the two axes.

[0040] In an optional embodiment, filtering the excitation signal comprises using a feedforward control algorithm, a low-pass filter, an IIR digital filter, a Notch filter, a moving average filter, a median filter, or a Kalman filter. Filtering the excitation signal can improve signal quality, suppress noise, reduce interference, improve system stability, and improve prediction accuracy. A feedforward control algorithm can measure changes in a disturbance or a given value and control before the controlled variable changes to compensate for the impact of the disturbance on the controlled variable. This control method can control more timely and is not affected by system lag. A low-pass filter can allow signals from DC to a certain cutoff frequency to pass through while attenuating signals above the cutoff frequency. This can remove high-frequency noise and retain useful low-frequency signals, thereby improving signal quality and system stability. An IIR digital filter can achieve higher filtering effect than a FIR filter at the same order, and is economical and efficient. The design of an IIR digital filter can be assisted by the achievements of mature analog filters, such as Butterworth, Chebyshev, and elliptic filters, which have ready-to-use design data or charts and less design workload. A Notch filter is designed to suppress signals at a specific frequency, such as harmonic interference on a power line, which can effectively remove noise at a specific frequency without affecting signals at other frequencies. A moving average filter reduces random noise by calculating the average value of a set of consecutive samples of data points, which is simple to implement, has high computational efficiency, and stable effect, and can stably reduce random fluctuations in data. Median filtering is a nonlinear filter that can effectively eliminate stubborn noise such as salt and pepper noise while preserving the edge characteristics of the signal, which is particularly important for image processing. A Kalman filter is a recursive filter suitable for linear dynamic systems, which can estimate the state of a dynamic system from a series of noisy measurements, and is very effective for real-time estimation and system state prediction.

[0041] Embodiment Two

[0042] This embodiment also provides a method for suppressing crosstalk of a MEMS micromirror, as shown in FIG. 1, the method for suppressing crosstalk of a MEMS micromirror also comprises the step of suppressing high-frequency mechanical resonance of the MEMS micromirror. The difference between this embodiment and Embodiment One is that: Figure 3

[0043] The first actuator 200 of the MEMS micromirror comprises a first cantilever beam 210 and a first elastic structure 220, one end of the first cantilever beam 210 is connected to the mirror surface 100 through the first elastic structure 220; the second actuator 300 comprises a second cantilever beam 310 and a second elastic structure 320, one end of the second cantilever beam 310 is connected to the mirror surface 100 through the second elastic structure 320.

[0044] ​Methods to suppress high-frequency mechanical resonance in MEMS micromirrors include changing the thickness of the first actuator 200 or the second actuator 300; generally, only the thickness of the first actuator 200 or only the thickness of the second actuator 300 is changed. Changing the thickness of the first actuator 200 or the second actuator 300 includes changing the thickness of the first cantilever beam 210 or the second cantilever beam 310; generally, only the thickness of the first cantilever beam 210 or only the thickness of the second cantilever beam 310 is changed. Changing the thickness of the first cantilever beam 210 or the second cantilever beam 310 can be achieved by applying adhesive, coating, patching, or spraying on the first cantilever beam 210 or the second cantilever beam 310. Changing the thickness of the first cantilever beam 210 or the second cantilever beam 310 can be achieved by increasing the thickness only at symmetrical locations of the two first cantilever beams 210 or only at symmetrical locations of the two second cantilever beams 310.

[0045] In optional embodiments, such as Figure 3 As shown, the thickness of the first cantilever beam 210 or the second cantilever beam 310 is altered by dispensing adhesive to increase the resonant frequency difference between the first actuator 200 and the second actuator 300. For example, by dispensing the adhesive from the dropper 510 onto the first cantilever beam 210, a thickened layer 520 is formed on the first cantilever beam 210. The positions of the thickened layer 520 on the two first cantilever beams 210 are symmetrical about the mirror surface 100. By increasing the thickness of the first cantilever beam 210, the stiffness K is increased, making the resonant frequency of the first cantilever beam 210 much greater than that of the second cantilever beam 310. This increases the resonant frequency difference between the first actuator 200 and the second actuator 300, thereby suppressing the mechanical biaxial crosstalk of the MEMS micromirror. The adhesive in the dropper 510 can be silica colloid, thermally conductive silicone, silicone sealant, UV-curable adhesive, silicone, epoxy resin, or polymer slurry.

[0046] Example 3

[0047] This embodiment also provides a method for suppressing MEMS micromirror crosstalk, such as Figure 4 As shown, this method for suppressing MEMS micromirror crosstalk also includes the step of suppressing high-frequency mechanical resonance of the MEMS micromirror. The difference between this embodiment and Embodiment 1 or Embodiment 2 is that:

[0048] Suppressing high-frequency mechanical resonance in MEMS micromirrors can be achieved by altering the cross-sectional area of ​​either the first actuator 200 or the second actuator 300. Generally, only the cross-sectional area of ​​the first actuator 200 or the second actuator 300 needs to be changed. This alteration can be achieved by changing the cross-sectional area of ​​either the first elastic structure 220 or the second elastic structure 320. Again, only the cross-sectional area of ​​the first elastic structure 220 or the second elastic structure 320 needs to be changed. This can be done by altering the thickness or width of either the first or second elastic structure 220.

[0049] In optional embodiments, such as Figure 4 As shown, the resonant frequency difference between the first actuator 200 and the second actuator 300 can be increased by increasing the cross-sectional area of ​​the first elastic structure 220 or by adding a second elastic structure 320. For example, by symmetrically increasing the width of the two second elastic structures 320, the stiffness K of the second actuator 300 can be increased, while the width of the two first elastic structures 220 remains unchanged. This makes the resonant frequency of the second elastic structure 320 much larger than the resonant frequency of the first elastic structure 310, thereby increasing the resonant frequency difference between the first actuator 200 and the second actuator 300, and thus suppressing the mechanical biaxial crosstalk of the MEMS micromirror.

[0050] Example 4

[0051] This embodiment also provides a method for suppressing MEMS micromirror crosstalk, such as Figure 5 As shown, this method for suppressing MEMS micromirror crosstalk also includes the step of suppressing high-frequency mechanical resonance of the MEMS micromirror. The difference between this embodiment and embodiments one through three is that:

[0052] Suppressing high-frequency mechanical resonance in MEMS micromirrors includes altering the moment of inertia of the MEMS micromirror. Altering the moment of inertia of the MEMS micromirror includes changing the mounting position of the mirror 100. Altering the mounting position of the mirror 100 includes offsetting the mirror 100 along a first direction or along a second direction.

[0053] In optional embodiments, such as Figure 1 As shown, the mirror 100 is connected to the first elastic structure 220 and the second elastic structure 320 via a mechanical coupling post 400. In a third direction (e.g., the Z-axis direction), the central axis of the mechanical coupling post 400 coincides with the central axis of the mirror 100. Figure 5As shown, the mirror surface 100 coinciding with the central axis of the mechanical coupling column 400 is offset to the right side of the first cantilever arm 210, thereby changing the rotational inertia I of the first actuator 200, increasing the resonance frequency difference between the first actuator 200 and the second actuator 300, and further suppressing the mechanical double-axis crosstalk of the MEMS micro-mirror.

[0054] Embodiments one to four change the thickness of the cantilever arm (the first cantilever arm 210 or the second cantilever arm 310), the cross-sectional area of the elastic structure (the first elastic structure 220 or the second elastic structure 320), and the assembly position of the mirror surface 100 relative to the rotation axis, thereby changing the stiffness K of the actuator (the first actuator 200 or the second actuator 300) and the rotational inertia I of the mirror surface 100, increasing the difference between the double-axis resonance frequencies, and suppressing the double-axis mechanical crosstalk caused by high-frequency resonance.

[0055] After suppressing the crosstalk of the MEMS micro-mirror by the method provided in embodiments two to four, the MEMS micro-mirror is compared with the MEMS micro-mirror without suppressing the crosstalk, and the results are shown in Figure 6 As shown, the difference between the resonance frequencies of the two pairs of axes (the first actuator 200 and the second actuator 300) is increased, and the oscillation of the driving axis does not cause the oscillation of the non-driving axis.

[0056] Embodiment five

[0057] This embodiment also provides a method for suppressing the crosstalk of the MEMS micro-mirror, as shown in Figure 7 The method for suppressing the crosstalk of the MEMS micro-mirror also includes the step of suppressing the high-frequency mechanical resonance of the MEMS micro-mirror. The difference between this embodiment and embodiments one to four is that:

[0058] The way of suppressing the high-frequency mechanical resonance of the MEMS micro-mirror includes filtering the high-frequency signal components from the excitation signal, and further suppressing the double-axis mechanical crosstalk caused by high-frequency resonance.

[0059] When the system is open-loop, as shown in Figure 7 (a), a step signal is directly input, and the driving signal contains a large number of high-frequency components, which can cause the oscillation of the MEMS micro-mirror, thereby causing obvious double-axis mechanical crosstalk. The two-step driving feedforward control algorithm divides the input into two steps, as shown in Figure 7 (b), the input voltage is scaled, a half-step input is used to make the peak value of the first oscillation period reach the target value, and then the input voltage is quickly adjusted to the target voltage to make the output remain at the target value, thereby filtering the high-frequency signal components and offsetting the high-frequency resonance of the system. As shown in Figure 7 According to the comparison before and after suppressing the crosstalk, the vibration of the driving axis does not cause the oscillation of the non-driving axis.

[0060] The method for suppressing crosstalk of the MEMS micro mirror provided by the embodiments of the present application can effectively suppress high-frequency oscillation of the MEMS micro mirror, quickly realize temperature of a deflection angle, increase a resonant frequency difference of a double-axis structure in an under-damped case, suppress double-axis crosstalk and not reduce a double-axis deflection angle, effectively reduce a mode coupling problem caused by frequency proximity, thereby avoiding possible scanning distortion or system failure, ensuring long-time stable operation of the system, suppressing influence of double-axis mechanical crosstalk on control, and thereby realizing faster and more accurate light beam scanning control.

[0061] The method for suppressing crosstalk of the MEMS micro mirror provided by the embodiments of the present application can suppress mechanical crosstalk, improve a mechanical coupling problem existing in the MEMS micro mirror structure, and realize faster and more accurate control of the MEMS micro mirror. These research results have important significance for design and application of the MEMS quasi-static micro mirror.

[0062] The above embodiments only exemplarily illustrate the principles and effects of the present application, and are not used to limit the present application. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and category of the present application. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the present application should be covered by the claims of the present application.

Claims

1. A method for suppressing crosstalk in MEMS micromirrors, characterized in that, MEMS micromirrors include a mirror, two first actuators symmetrically arranged along a first direction with the mirror as the center of symmetry, and two second actuators symmetrically arranged along a second direction with the mirror as the center of symmetry. The first actuators and the second actuators drive the mirror to deflect, and the first direction is perpendicular to the second direction. The method for suppressing MEMS micromirror crosstalk includes the step of suppressing high-frequency mechanical resonance of the MEMS micromirror; The methods for suppressing high-frequency mechanical resonance of MEMS micromirrors include increasing the resonant frequency difference between the first actuator and the second actuator and / or filtering the excitation signal. Increasing the resonant frequency difference between the first actuator and the second actuator includes changing the moment of inertia of the MEMS micromirror. Changing the moment of inertia of the MEMS micromirror includes changing the assembly position of the mirror surface. Changing the assembly position of the mirror includes shifting the mirror along the first direction or along the second direction.

2. The method for suppressing MEMS micromirror crosstalk according to claim 1, characterized in that, The filtering of the excitation signal includes using feedforward control algorithms, low-pass filters, IIR digital filters, Notch filters, moving average filters, median filters, or Kalman filters.

3. The method for suppressing MEMS micromirror crosstalk according to claim 2, characterized in that, The feedforward control algorithm includes a two-step method, a three-step method, or a feedforward neural network method.

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