Processing device

Abstract

The present invention is provided with: a frequency-scanned light output unit (421) that outputs frequency-scanned light; a light branching unit (422) that branches the frequency-scanned light output by the frequency-scanned light output unit (421) into reference light and irradiation light; a sensor head (41) that irradiates the irradiation light obtained by the light branching part (422) toward a processing surface (101) of the processed object (10) and receives reflected light from the processing surface (101); a light interference unit (423) which, on the basis of the reference light obtained by the light branching unit (422) and the reflected light received by the sensor head unit (41), generates interference light between the reference light and the reflected light and converts the interference light into an electric signal; an A / D converter (424) that converts the electrical signal obtained by the optical interference unit (423) from an analog signal to a digital signal; a distance information calculation unit (425) that calculates, on the basis of the digital signal obtained by the A / D converter (424), information relating to the distance from the tip of the sensor head (41) to the processed surface (101) of the processed object (10); and a roughness measurement unit (426) that measures the surface roughness of the processed surface (101) of the processed object (10) on the basis of the calculation result of the distance information calculation unit (425).

Description

Technical Field

[0001] The present disclosure relates to a processing device for measuring the surface roughness of a processed surface of a workpiece. Background Art

[0002] Conventionally, there is known a processing device that processes an object and measures the surface condition of the processed surface of the object after the processing (see, for example, Patent Document 1). In the processing device disclosed in Patent Document 1, a touch probe is used to measure the surface condition on a machine of the processing device.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-36083 Summary of the invention

[0006] Problems to be solved by the invention

[0007] Here, high-precision on-machine measurement can be performed in the contact type, that is, the touch probe method disclosed in Patent Document 1. However, in the touch probe method, the surface of the workpiece is damaged, and there is a limit to the size of R at the tip of the touch probe.

[0008] The present disclosure has been made to solve the above-mentioned problems, and an object of the present disclosure is to provide a processing device capable of measuring the surface roughness of a workpiece in a non-contact manner on a machine of the processing device.

[0009] Means for solving problems

[0010] The processing device disclosed in the present invention is characterized in that it comprises: a processing section that processes a processing surface of a workpiece; and a light sensor section that measures the surface roughness of the processing surface of the workpiece processed by the processing section, wherein the light sensor section comprises: a frequency scanning light output section that outputs frequency scanning light; a light branching section that branches the frequency scanning light outputted by the frequency scanning light output section into reference light and irradiation light; a sensor head that irradiates the irradiation light obtained by the light branching section toward the processing surface of the workpiece processed by the processing section and receives reflected light reflected by the processing surface; and a light interference section that measures the surface roughness of the processing surface of the workpiece processed by the light branching section according to the frequency scanning light outputted by the light branching section. a distance information calculating unit that calculates information related to the distance from the end of the sensor head to the processed surface of the workpiece processed by the processing unit based on the digital signal obtained by the analog-digital converter; and a roughness measuring unit that measures the surface roughness of the processed surface of the workpiece processed by the processing unit based on the calculation result of the distance information calculating unit.

[0011] Effects of the Invention

[0012] According to the present disclosure, since it is configured as described above, the surface roughness of the workpiece can be measured in a non-contact manner on a machine of the processing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a diagram showing a configuration example of a processing device according to the first embodiment.

[0014] Figure 2 This is a diagram showing a configuration example of a photosensor unit in Embodiment 1.

[0015] Figure 3 This is a diagram showing an example of frequency swept light used in the optical sensor unit in the first embodiment.

[0016] Figure 4 This is a diagram showing an example of reflected light with respect to irradiation light irradiated onto a workpiece in the processing apparatus according to the first embodiment.

[0017] Figure 5 This is a diagram showing a hardware configuration example of the control unit in the first embodiment.

[0018] Figure 6 This is a diagram showing an example of a reception spectrum used in the roughness estimation unit in the first embodiment.

[0019] Figure 7 This is a flowchart showing an example of the operation of the sensor main body in the first embodiment.

[0020] Figure 8 This is a diagram showing a configuration example of a photosensor unit in the second embodiment. DETAILED DESCRIPTION

[0021] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings.

[0022] Implementation Method 1

[0023] Figure 1 This is a diagram showing a configuration example of a processing device according to the first embodiment.

[0024] The processing device is a device that processes the processing surface 101 of the workpiece 10 and measures the surface roughness of the processed surface 101 of the workpiece 10 after processing. In addition, metals and the like are cited as the workpiece 10. In addition, in Embodiment 1, in order to simplify the description, the shape of the processing surface 101 before processing by the processing device is assumed to be a plane.

[0025] like Figure 1 As shown, the processing device includes a workbench 1 , a vise 2 , a processing unit 3 , a light sensor unit 4 , and a control unit 5 .

[0026] The table 1 is a table having a surface on which a workpiece 10 to be processed is placed.

[0027] The vise 2 is a fixing tool that is attached to the workpiece 10 placed on the table 1 and is used to fix the workpiece 10 so that it does not move.

[0028] The machining section 3 is a section that supplies cutting oil to a workpiece 10 placed on the table 1 and fixed by the vise 2 to machine a machined surface 101 .

[0029] like Figure 1 As shown, the processing unit 3 includes a processing head 31, a processing tool 32, a head driving unit 33, and a cutting oil nozzle 34 (not shown).

[0030] like Figure 1 As shown, the machining head 31 includes a head body 311 and a spindle (tool holding portion) 312 .

[0031] The head body 311 is a metal structure that supports the main shaft 312 .

[0032] The spindle 312 is a portion that holds the processing tool 32. The spindle 312 is a metal shaft-shaped member that incorporates a chuck device (not shown) that detachably holds the processing tool 32, and can be rotationally driven while holding the processing tool 32.

[0033] Furthermore, a part of the optical sensor unit 4 (a sensor head 41 described later) is mounted on the head main body 311 .

[0034] The processing tool 32 is a cutting tool that is held by a spindle 312 and rotates with the rotation of the spindle 312 to cut the processing surface 101 of the workpiece 10. Examples of the processing tool 32 include metal processing tools such as milling cutters, end mills, drills, and taps.

[0035] The head driving unit 33 is a driving mechanism that can change the position of the head body 311 relative to the processing surface 101 in accordance with a control signal from the control unit 5 .

[0036] The direction of the change in position of the head main body 311 achieved by the head driving unit 33 is Figure 1 The x-axis direction, the y-axis direction or the z-axis direction shown.

[0037] Furthermore, after the head driving unit 33 moves the head main body 311 according to the control signal from the control unit 5 , the head driving unit 33 notifies the sensor main body 42 that the movement is completed.

[0038] The cutting oil nozzle 34 is a nozzle for applying cutting oil to the machined surface 101 of the workpiece 10 in accordance with a cutting oil supply command from the control unit 5 .

[0039] The optical sensor unit 4 is a part that measures the surface roughness of the processed surface 101 of the workpiece 10 processed by the processing unit 3 in a non-contact manner. At this time, the optical sensor unit 4 calculates the distance from the end 41a of the sensor head 41 to the processed surface 101 of the workpiece 10 processed by the processing unit 3, and measures the surface roughness of the processed surface 101.

[0040] like Figure 1 As shown, the optical sensor unit 4 includes a sensor head 41 , a sensor body 42 , and a light transmission unit 43 .

[0041] The sensor head 41 is attached to an outer peripheral surface 311 a of the head main body 311 , which is opposed to a surface of the table 1 on which the workpiece 10 is placed.

[0042] The sensor head 41 irradiates the processing surface 101 with the irradiation light outputted from the sensor main body 42 , and receives the reflected light reflected from the processing surface 101 . The reflected light received by the sensor head 41 is outputted to the sensor main body 42 .

[0043] An example of the structure of the sensor head 41 will be described later.

[0044] The sensor main body 42 outputs the irradiation light to the sensor head 41 according to the control signal from the control unit 5. In addition, the sensor main body 42 receives the control signal (signal indicating the movement position of the head main body 311) from the control unit 5, and after receiving the notification indicating that the movement of the head main body 311 based on the control signal has been completed from the head driving unit 33, it starts to output the irradiation light to the sensor head 41. In addition, the sensor main body 42 receives the reflected light output by the sensor head 41. Then, the sensor main body 42 calculates the distance from the end 41a of the sensor head 41 to the processed surface 101 of the workpiece 10 processed by the processing unit 3 based on the irradiation light and the reflected light, and measures the surface roughness of the processed surface 101. The signal indicating the measurement result of the sensor main body 42 is output to the control unit 5.

[0045] An example of the structure of the sensor main body 42 will be described later.

[0046] The light transmission section 43 is a transmission path for light from the sensor body section 42 to the sensor head section 41 and for light from the sensor head section 41 to the sensor body section 42. The light transmission section 43 is formed of an optical fiber.

[0047] In addition, Figure 1 In the processing device of the embodiment 1 shown, the case where the light transmission unit 43 is provided is shown. However, the present invention is not limited thereto, and the light transmission unit 43 is not an essential structure in the processing device, and the light transmission unit 43 may not be provided in the processing device. Furthermore, when the processing device is not provided with the light transmission unit 43, the light from the sensor main body 42 toward the sensor head 41 and the light from the sensor head 41 toward the sensor main body 42 are transmitted through the space.

[0048] The control unit 5 is a part that controls the operation of the processing device.

[0049] The control unit 5 outputs a control signal indicating the movement position of the head main body 311 to the head driving unit 33 and the sensor main body 42. In addition, the control unit 5 outputs a supply command of cutting oil to the cutting oil nozzle 34.

[0050] Furthermore, the control unit 5 calculates the shape of the processed surface 101 based on the relative position of the head body 311 with respect to the processed surface 101 based on the control signal and the measurement result of the sensor body 42 .

[0051] Next, refer to Figure 2 A configuration example of the sensor head portion 41 and the sensor body portion 42 will be described.

[0052] like Figure 2 As shown, the sensor head 41 has a focusing optical element 411 .

[0053] In addition, if Figure 2 As shown, the sensor main body 42 has a frequency sweep light output unit 421 , a light branching unit 422 , a light interference unit 423 , an analog-to-digital converter (hereinafter referred to as “A / D converter”) 424 , a distance information calculation unit 425 and a roughness measurement unit 426 .

[0054] The frequency-sweep light output unit 421 outputs the frequency-sweep light to the light branching unit 422. The frequency-sweep light is light whose frequency changes with the passage of time.

[0055] In addition, the frequency scanning light output unit 421 receives a control signal (a signal indicating the moving position of the head main body 311) from the control unit 5, and starts to output frequency scanning light after receiving a notification from the head driving unit 33 indicating that the movement of the head main body 311 based on the control signal has been completed.

[0056] Figure 3 4 is an explanatory diagram showing an example of frequency swept light outputted by the frequency swept light output unit 421. Figure 3 , the solid waveform denoted by reference numeral 301 represents frequency-sweep light, and the dotted waveform denoted by reference numeral 302 represents reflected light of the frequency-sweep light (irradiation light) at the processing surface 101. The frequency difference between the solid waveform denoted by reference numeral 303 and the dotted waveform represents interference light.

[0057] like Figure 3 As shown in FIG. 1 , the frequency sweep light outputted by the frequency sweep light output unit 421 is a signal whose frequency changes from the lowest frequency, i.e., fmin, to the highest frequency, i.e., fmax, over time. Regarding the frequency sweep light, when the frequency reaches the highest frequency, i.e., fmax, the frequency temporarily returns to the lowest frequency, i.e., fmin, and the frequency changes again from the lowest frequency, i.e., fmin, to the highest frequency, i.e., fmax. In addition, this frequency sweep light is sometimes referred to as a chirp signal light.

[0058] The light branching unit 422 branches the frequency-sweep light output by the frequency-sweep light output unit 421 into reference light and irradiation light. Figure 2 As shown, the optical branching unit 422 includes an optical coupler 4221 and a circulator 4222 .

[0059] The optical coupler 4221 is an optical branching element that branches the frequency-sweep light outputted from the frequency-sweep light output unit 421 into reference light and irradiation light. The reference light obtained by the optical coupler 4221 is outputted to the optical interferometer 423 (optical interferometer 4231 described later), and the irradiation light obtained by the optical coupler 4221 is outputted to the circulator 4222.

[0060] The circulator 4222 outputs the irradiation light obtained by the optical coupler 4221 to the sensor head 41 (light-collecting optical element 411 ) via the light transmission unit 43 .

[0061] Furthermore, the circulator 4222 outputs the reflected light outputted from the sensor head 41 (light-condensing optical element 411 ) to the light interference unit 423 (light interferometer 4231 ).

[0062] The focusing optical element 411 focuses the irradiation light output from the sensor main body 42 (circulator 4222 ) on the processing surface 101 of the workpiece 10 .

[0063] Specifically, the focusing optical element 411 has two aspherical lenses. After the irradiation light outputted from the sensor main body 42 (circulator 4222) is parallelized by the aspherical lens at the front stage, the focusing optical element 411 converges the irradiation light by the aspherical lens at the rear stage and irradiates the processed surface 101 of the workpiece 10.

[0064] Figure 4 1 is an explanatory diagram showing an example of reflected light with respect to the reference light irradiated onto the processing surface 101 by the light-condensing optical element 411 .

[0065] like Figure 4 As shown, the irradiation light outputted from the focusing optical element 411 forms a beam spot having a certain fixed range. Furthermore, the irradiation light is reflected by the concavities and convexities of the processed surface 101 located within the range of the beam spot.

[0066] Then, the light-collecting optical element 411 receives the reflected light from the processed surface 101. The reflected light received by the light-collecting optical element 411 is output to the light interference unit 423 (light interferometer 4231) via the light transmission unit 43 and the circulator 4222.

[0067] In addition, Figure 4 , reference numerals 401a to 401n denote irradiation light, reference numerals 402a to 402n denote reflected light, and reference numeral 403 denotes a beam spot.

[0068] The optical interference unit 423 generates interference light of the reference light and the reflected light based on the reference light output by the optical branching unit 422 and the reflected light (the reflected light received by the sensor head 41). Then, the optical interference unit 423 converts the generated interference light into an electrical signal. Figure 2 As shown, the optical interference unit 423 includes an optical interferometer 4231 and a light detector 4232 .

[0069] The optical interferometer 4231 receives the reference light obtained by the optical coupler 4221 and the reflected light output by the circulator 4222 , and generates interference light of the reference light and the reflected light. The interference light generated by the optical interferometer 4231 is output to the photodetector 4232 .

[0070] The photodetector 4232 detects the interference light generated by the optical interferometer 4231 and converts the interference light into an electric signal. The electric signal obtained by the photodetector 4232 is output to the A / D converter 424.

[0071] The A / D converter 424 converts the electrical signal obtained by the photodetector 4232 from an analog signal into a digital signal. The digital signal obtained by the A / D converter 424 is output to the distance information calculation unit 425.

[0072] The distance information calculation unit 425 calculates information related to the distance from the end 41a of the sensor head 41 to the processed surface 101 of the workpiece 10 processed by the processing unit 3 based on the digital signal obtained by the A / D converter 424. At this time, the distance information calculation unit 425 converts the digital signal obtained by the A / D converter 424 into a signal in the frequency domain, analyzes the frequency of the interference light generated by the optical interference unit 423, and obtains the frequency information of the interference light of the processed surface, that is, the reception spectrum, as the information related to the above distance. That is, in the optical sensor unit 4, due to the difference in distance caused by the unevenness of the processed surface 101 within the beam point of the irradiated irradiation light, information of various frequencies can be obtained. Therefore, the distance information calculation unit 425 calculates the reception spectrum as information related to the distance. The signal indicating the information related to the distance (reception spectrum) calculated by the distance information calculation unit 425 is output to the roughness measurement unit 426.

[0073] In addition, the distance information calculation unit 425 is implemented by, for example, a distance information calculation circuit (not shown). The distance information calculation circuit is, for example, a single circuit, a composite circuit, a programmed processor, a parallel programmed processor, an ASIC (Application Specific Integrated Circuit), an FPGA (Field Programmable Gate Array), or a combination thereof.

[0074] In addition, the distance information calculation unit 425 is shown here to be implemented by a distance information calculation circuit as dedicated hardware, but is not limited to this, and can also be implemented by software, firmware, or a combination of software and firmware. Software or firmware is stored in a computer memory as a program. Computer means hardware that executes a program, such as a CPU (Central Processing Unit), a central processing unit, a processing unit, an arithmetic unit, a microprocessor, a microcomputer, a processor, or a DSP (Digital Signal Processor). Figure 52 is a hardware configuration diagram of a computer when the distance information calculation unit 425 is implemented by software or firmware. When the distance information calculation unit 425 is implemented by software or firmware, a program for causing the computer to execute the processing steps of the distance information calculation unit 425 is stored in the memory 201. Then, the processor 202 of the computer executes the program stored in the memory 201.

[0075] The roughness measuring unit 426 measures the surface roughness of the processed surface 101 of the workpiece 10 processed by the processing unit 3 based on the calculation result of the distance information calculating unit 425. At this time, the roughness measuring unit 426 estimates the surface roughness of the processed surface 101 in the beam spot based on the spread (spectrum width) of the reception spectrum obtained by the distance information calculating unit 425, thereby measuring the surface roughness of the processed surface 101 of the workpiece 10 processed by the processing unit 3. A signal indicating the measurement result of the roughness measuring unit 426 is output to the control unit 5.

[0076] Figure 6 : is an explanatory diagram showing an example of a reception spectrum used in the roughness measurement unit 426 .

[0077] In the reception spectrum, reflected light of various frequencies is observed due to the unevenness of the processed surface 101 in the beam spot, so the reception spectrum shows spread according to the roughness of the unevenness. Therefore, the roughness measuring unit 426 can measure the surface roughness of the processed surface 101 based on the spread of the reception spectrum.

[0078] In addition, Figure 6 In the figure, the waveform shown by the solid line indicates the case of RZ3.2, and the waveform shown by the dotted line indicates the case of RZ10. RZ is an index indicating the maximum roughness. RZ3.2 indicates that the maximum value of the surface roughness is 3.2um, and RZ10 indicates that the maximum value of the surface roughness is 10um. Figure 6 It can be seen that when the surface roughness of the processed surface 101 increases, the width of the reception spectrum increases.

[0079] In addition, the signal intensity at the edge of the reception spectrum obtained by the distance information calculation unit 425 is weak and not suitable for signal analysis. Therefore, the distance information calculation unit 425 may perform the calculation of the reception spectrum multiple times, the roughness measurement unit 426 may accumulate the intensity of the reception spectrum, and the surface roughness of the processed surface 101 of the workpiece 10 processed by the processing unit 3 may be measured based on the accumulated result. Thus, the roughness measurement unit 426 can easily analyze the portion that becomes the edge of the reception spectrum.

[0080] Next, refer to Figure 7 right Figure 2 An operation example of the sensor main body 42 in the first embodiment shown will be described.

[0081] exist Figure 2 In the example of the operation of the sensor main body 42 in the first embodiment shown in FIG. Figure 7 As shown, first, the frequency sweep light output unit 421 outputs the frequency sweep light whose frequency changes with the passage of time to the optical coupler 4221 (step ST701). In addition, the frequency sweep light output unit 421 receives the control signal (signal indicating the movement position of the head main body 311) from the control unit 5, and after receiving the notification indicating that the movement of the head main body 311 based on the control signal has been completed from the head driving unit 33, it starts to output the frequency sweep light.

[0082] The frequency-sweep light is branched into reference light and irradiation light by the optical coupler 4221. Then, the irradiation light is output to the circulator 4222, and the reference light is output to the optical interferometer 4231.

[0083] Then, the irradiation light is output to the focusing optical element 411 via the circulator 4222 and the light transmission unit 43, and irradiates the processing surface 101 by the focusing optical element 411. Then, the irradiation light is reflected by the processing surface 101, and the reflected light is received by the focusing optical element 411.

[0084] Then, the reflected light is output to the optical interferometer 4231 via the light focusing optical element 411 , the light transmission section 43 , and the circulator 4222 .

[0085] Then, the reflected light output from the circulator 4222 and the reference light output from the optical coupler 4221 interfere with each other in the optical interferometer 4231 , and the interference light is output to the optical detector 4232 .

[0086] Next, the photodetector 4232 detects the interference light generated by the optical interferometer 4231 (step ST702 ). Then, the photodetector 4232 converts the interference light into an electric signal. The electric signal obtained by the photodetector 4232 is output to the A / D converter 424 .

[0087] Next, after receiving the electric signal from the photodetector 4232 , the A / D converter 424 converts the electric signal from an analog signal into a digital signal (step ST703 ). The digital signal obtained by the A / D converter 424 is output to the distance information calculation unit 425 .

[0088] Next, after receiving the digital signal from the A / D converter 424, the distance information calculation unit 425 converts the digital signal into a signal in the frequency domain, thereby obtaining Figure 6The reception spectrum shown is obtained (step ST704). At this time, the distance information calculation unit 425 converts the digital signal into a signal in the frequency domain by, for example, FFT (Fast Fourier Transform). The signal representing the reception spectrum obtained by the distance information calculation unit 425 is output to the roughness measurement unit 426.

[0089] Next, after receiving the signal indicating the received spectrum from the distance information calculation unit 425, the roughness measurement unit 426 analyzes the spread of the received spectrum and measures the surface roughness of the processed surface 101 within the beam spot of the irradiated light (step ST705). A signal indicating the measurement result of the roughness measurement unit 426 is output to the control unit 5.

[0090] Then, the control unit 5 calculates the shape of the processed surface 101 based on the relative position of the head body 311 with respect to the processed surface 101 based on the control signal and the measurement result of the roughness measuring unit 426 .

[0091] As described above, according to the first embodiment, the processing device comprises: a processing unit 3, which processes the processing surface 101 of the workpiece 10; and a light sensor unit 4, which measures the surface roughness of the processing surface 101 of the workpiece 10 processed by the processing unit 3, and the light sensor unit 4 comprises: a frequency scanning light output unit 421, which outputs frequency scanning light; a light branching unit 422, which branches the frequency scanning light output by the frequency scanning light output unit 421 into reference light and irradiation light; a sensor head 41, which irradiates the irradiation light obtained by the light branching unit 422 toward the processing surface 101 of the workpiece 10 processed by the processing unit 3, and receives the reflected light reflected by the processing surface 101; and a light interference unit 423, which measures the surface roughness of the processing surface 101 of the workpiece 10 processed by the processing unit 3 according to the frequency scanning light output; The reference light obtained by the branching part 422 and the reflected light received by the sensor head 41 generate interference light of the reference light and the reflected light and convert the interference light into an electric signal; the A / D converter 424 converts the electric signal obtained by the light interference part 423 from an analog signal to a digital signal; the distance information calculation part 425 calculates information related to the distance from the end 41a of the sensor head 41 to the processed surface 101 of the workpiece 10 processed by the processing part 3 based on the digital signal obtained by the A / D converter 424; and the roughness measurement part 426 measures the surface roughness of the processed surface 101 of the workpiece 10 processed by the processing part 3 based on the calculation result of the distance information calculation part 425. Thus, the processing device of the first embodiment can measure the surface roughness of the workpiece 10 in a non-contact manner on the machine of the processing part 3.

[0092] Implementation Method 2

[0093] Figure 8 2 is a diagram showing a configuration example of the optical sensor unit 4 in the second embodiment. Figure 8 In the optical sensor unit 4 of the second embodiment shown in FIG. Figure 2 The optical sensor unit 4 of the first embodiment shown in the figure is provided with a polarization rotation unit 427. Figure 8 Other structural examples of the optical sensor unit 4 in the second embodiment shown in FIG. Figure 2 The configuration example of the optical sensor unit 4 in the illustrated embodiment 1 is the same, and the same reference numerals are used, and only different parts will be described.

[0094] The polarization rotation unit 427 rotates the polarization of the frequency-sweep light output from the frequency-sweep light output unit 421. In the polarization rotation unit 427, the polarization is scrambled at a certain fixed speed by a polarization scrambler or the like, thereby suppressing the measurement variation depending on the polarization of the frequency-sweep light. The frequency-sweep light polarized by the polarization rotation unit 427 is output to the light branching unit 422.

[0095] In Embodiment 2, the optical branching unit 422 branches the frequency-scanned light polarized by the polarization rotation unit 427 into reference light and irradiation light. That is, the optical coupler 4221 branches the frequency-scanned light polarized by the polarization rotation unit 427 into reference light and irradiation light.

[0096] As described above, according to this second embodiment, the processing device includes the polarization rotation unit 427 that rotates the polarization of the frequency-sweep light output by the frequency-sweep light output unit 421, and the light branching unit 422 branches the frequency-sweep light polarized by the polarization rotation unit 427 into the reference light and the irradiation light. Thus, compared with the processing device of the first embodiment, the processing device of the second embodiment can suppress the measurement variation depending on the polarization of the frequency-sweep light.

[0097] Furthermore, the various embodiments may be freely combined, arbitrary components of the various embodiments may be modified, or arbitrary components of the various embodiments may be omitted.

[0098] Industrial Applicability

[0099] The processing device disclosed in the present invention can measure the surface roughness of a workpiece in a non-contact manner on a machine of a processing part, and is suitably applied to a processing device that measures the surface roughness of a processed surface of a workpiece.

[0100] Description of symbols

[0101] 1: workbench; 2: vise; 3: processing unit; 4: optical sensor unit; 5: control unit; 10: workpiece; 31: processing head; 32: processing tool; 33: head drive unit; 34: cutting oil nozzle; 41: sensor head; 41a: end; 42: sensor body; 43: optical transmission unit; 101: processing surface; 201: memory; 202: processor; 311: head body; 311a: outer peripheral surface; 312: spindle; 411: focusing optical element; 421: frequency scanning light output unit; 422: light branching unit; 423: light interference unit; 424: A / D converter; 425: distance information calculation unit; 426: roughness measurement unit; 427: polarization rotation unit; 4221: optical coupler; 4222: circulator; 4231: optical interferometer; 4232: light detector.

Claims

1. A processing device, comprising: a processing section that processes a processing surface of a workpiece; and an optical sensor unit for measuring the surface roughness of a processed surface of the workpiece processed by the processing unit, The optical sensor unit has: A frequency sweep light output unit that outputs frequency sweep light; a light branching unit that branches the frequency-sweep light output by the frequency-sweep light output unit into a reference light and an irradiation light; a sensor head that irradiates the irradiation light obtained by the light branching portion toward a processed surface of the workpiece processed by the processing portion, and receives reflected light reflected by the processed surface; an optical interference unit that generates interference light of the reference light obtained by the optical branching unit and the reflected light received by the sensor head and converts the interference light into an electrical signal; an analog-to-digital converter that converts the electrical signal obtained by the optical interference unit from an analog signal to a digital signal; a distance information calculation unit that calculates information related to the distance from the end of the sensor head to the processed surface of the workpiece processed by the processing unit based on the digital signal obtained by the analog-to-digital converter; as well as A roughness measuring unit measures the surface roughness of a processed surface of the workpiece processed by the processing unit based on the calculation result of the distance information calculating unit.

2. The processing device according to claim 1, characterized in that: The processing unit has: a tool holding portion that holds a processing tool for processing a processing surface of the workpiece; and a head body portion supporting the tool holding portion, A part of the optical sensor unit is mounted on the head body unit.

3. The processing device according to claim 2, characterized in that: The sensor head is mounted on the head body.

4. The processing device according to claim 3, characterized in that: The processing device includes a worktable having a surface on which the workpiece is placed. The sensor head is attached to an outer peripheral surface of the head main body portion, which is opposite to a surface of the table on which the workpiece is placed.

5. The processing device according to claim 1, characterized in that: The processing device includes a polarization rotation unit that rotates polarization of the frequency-sweep light output by the frequency-sweep light output unit. The light branching section branches the frequency-scanned light polarized by the polarization rotation section into reference light and irradiation light.

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