Abrasive liquid jet nozzle with fluid self-oscillation and dielectrophoresis composite effect

The abrasive liquid jet nozzle with a composite effect of fluid self-excitation oscillation and dielophoresis solves the problems of uneven abrasive distribution and blocking layer, achieving more efficient processing accuracy and longer nozzle life.

CN119238382BActive Publication Date: 2025-08-29ZHEJIANG UNIV OF TECH
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Patent Information

Application Number
CN202411641747.5
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-11-18
Publication Date
2025-08-29
Estimated Expiration
2044-11-18

AI Technical Summary

Technical Problem

During the processing process, existing abrasive liquid jet nozzles have problems such as uneven abrasive distribution, poor processing surface unevenness, and short nozzle life. Especially in the post-mix method, uneven distribution of abrasives leads to poor processing surface inconsistency, and the blocking layer affects processing efficiency.

Method used

Abrasive liquid jet nozzles that use fluid self-excitation oscillation and dielophoresis composite effects generate pulse jets through the fluid self-excitation oscillation chamber, and the abrasive is distributed more uniformly in the jet under the dielophoresis effect. Abrasive distribution is improved by using a non-uniform electric field to destroy the blocking layer to improve processing efficiency and accuracy.

Benefits of technology

The uniform distribution of abrasives in the jet is achieved, the uniform consistency and accuracy of the processing surface is improved, the polishing efficiency is significantly improved, and the nozzle life is extended.

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Abstract

The present invention discloses an abrasive liquid jet nozzle with a composite effect of fluid self-oscillation and dielectrophoresis, comprising a fluid self-oscillation effect generating module and a dielectrophoresis effect generating module coaxially connected thereto; when the liquid jet passes through a fluid self-oscillation chamber in the fluid self-oscillation generating module, due to the special design of the inlet and outlet structures of the fluid self-oscillation chamber, the entering fluid generates a fluid self-oscillation effect, and changes from a traditional continuous jet to a pulse jet with a higher peak velocity, thereby improving processing efficiency; in addition, when the liquid jet passes through the non-uniform electric field in the dielectrophoresis effect generating module, the liquid jet will generate a dielectrophoresis effect, and the abrasive in the liquid jet will be affected by the dielectrophoresis force and move from a middle area where the liquid jet is more distributed to an outer peripheral area of ​​the liquid jet, thereby making the abrasive more evenly distributed in the liquid jet, which can improve the uniformity and consistency of the workpiece surface after abrasive liquid jet processing and improve the processing accuracy.
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Description

Technical Field

[0001] The invention relates to the field of precision and ultra-precision machining, and in particular to an abrasive liquid jet nozzle with fluid self-excited oscillation and dielectrophoresis composite effects. Background Art

[0002] Abrasive liquid jetting is a non-contact machining technology. The liquid, typically water, is pressurized by a high-pressure device. Abrasive is then added to the pressurized liquid through a feeding and mixing device, creating a two-phase liquid-solid jet. The high-speed impact and scouring of the abrasive and high-pressure fluid removes material from the machined surface. Compared to traditional mechanical polishing methods, abrasive liquid jetting offers advantages such as cold operation, non-contact operation, high process stability, and zero thermal deformation of the machined surface. This technology holds broad development prospects and has garnered widespread attention in the fields of jet machining and cutting.

[0003] A jet nozzle consists of a liquid jet nozzle, a mixing chamber, and a mixed liquid abrasive jet nozzle. In abrasive liquid jet processing, there are two types of processes, pre-mixing and post-mixing, depending on the mixing time and location of the solid particles. In the pre-mixing method, the fluid and abrasive slurry are mixed in the mixing chamber, which has the advantages of relatively uniform particle distribution and low required hydraulic pump pressure. However, its disadvantages include: the abrasive easily settles in the abrasive barrel, making it difficult to precisely control the abrasive concentration; high hydraulic pump losses; and frictional cutting of abrasive particles inside the jet nozzle, which causes rapid nozzle wear and shortens the nozzle life.

[0004] In the post-mixing method, a hydraulic pump pressurizes the fluid supply system to generate a high-pressure liquid flow, which passes through a liquid jet nozzle to form a high-speed jet before entering a mixing chamber. Abrasive is also fed into the mixing chamber through a feed system, where it undergoes initial mixing with the fluid. Further accelerated secondary mixing occurs within the liquid abrasive jet nozzle, forming a post-mixing abrasive liquid jet. This method is more widely used in liquid jet machining due to its relatively simple equipment, low cost, and easy maintenance. However, due to the different abrasive addition and mixing methods and the lack of a pre-mixing process, the mixing uniformity is slightly less than that of pre-mixing abrasive liquid jets. The abrasive is primarily concentrated in the middle of the jet, where the flow rate is faster. This uneven distribution of abrasive leads to less uniformity on the machined surface. In addition, in abrasive liquid jet processing, the jet beam in the impact area of ​​the workpiece surface and the reflected liquid flow on the workpiece processing surface will form a relatively stable holding layer (also called a blocking layer), which directly resists the jet impact force and consumes part of the jet energy. The smaller the diameter of the abrasive particles, the greater the impact of the blocking layer, which ultimately leads to the processing surface being a "W" shape with a convex middle and deeper on both sides. Summary of the Invention

[0005] In order to overcome the shortcomings of the prior art, the present invention provides an abrasive liquid jet nozzle with a composite effect of fluid self-oscillation and dielectrophoresis. When the liquid jet passes through the fluid self-oscillation chamber in the fluid self-oscillation generating module, due to the special design of the inlet and outlet structures of the fluid self-oscillation chamber, the jet generates violent shear motion on the exchange surface with the fluid in the chamber, thereby generating large-scale vortices and colliding back and forth with the oscillation chamber wall. The liquid passing through the fluid self-oscillation chamber changes from a traditional continuous jet to a pulse jet with a higher peak velocity, which will destroy the jet beam in the impact area of ​​the workpiece surface processing and the reflected liquid flow on the workpiece processing surface will form a blocking layer, thereby improving processing efficiency; in addition, when the liquid jet passes through the non-uniform electric field in the dielectrophoresis effect generating module, the dielectrophoresis effect can occur. The abrasive in the liquid pulse jet is affected by the dielectrophoretic force of the non-uniform electric field and moves from the middle area of ​​the jet where it is more distributed to the outer peripheral area of ​​the jet, thereby making the abrasive more evenly distributed in the jet. The use of this jet nozzle can improve the uniformity and consistency of the workpiece surface after processing and improve the processing accuracy.

[0006] The technical solutions of the present invention are as follows:

[0007] An abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis comprises a fluid self-oscillation effect generating module and a dielectrophoresis effect generating module coaxially connected thereto; the fluid self-oscillation effect generating module comprises a sand tube and a conductive slip ring sleeved on the sand tube, the front end of the sand tube being fixed in an outer cavity mounting joint; the front end face of the sand tube and the outer cavity mounting joint being sealed by a cavity length adjustment gasket, a liquid jet flow channel I being provided in the sand tube; a piston mounting hole being provided at the front end of the outer cavity mounting joint, an outlet piston being installed in the piston mounting hole, and a liquid jet flow channel II being provided in the outlet piston; the cavity length adjustment gasket being hollow, with its two ends respectively docked with the liquid jet flow channel I and the liquid jet flow channel II, forming a fluid self-oscillation chamber capable of causing the liquid jet fluid to produce a self-oscillation effect. During operation, the liquid jet changes from a continuous jet to a pulse jet with a higher peak velocity in the fluid self-excited oscillation chamber, and then flows out through the liquid jet flow channel II; the dielectrophoresis effect generating module includes a ceramic tube and a metal tube sleeved on the outside of the ceramic tube, a sealing cover is fixed to the front end of the metal tube, the ceramic tube is fixed in the metal tube through the sealing cover, and a liquid jet outlet is provided on the sealing cover; a liquid jet flow channel III is provided in the ceramic tube, so that the liquid jet fluid flowing out of the liquid jet flow channel II flows through the liquid jet flow channel III and is ejected through the liquid jet outlet; an insulating layer is provided between the metal tube and the ceramic tube, and an annular positive electrode and an annular negative electrode are provided in the insulating layer, and the annular positive electrode and the annular negative electrode are electrically connected to the two output ends of the conductive slip ring respectively, and can generate a non-uniform electric field after being powered on.

[0008] Compared with the prior art, the abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis of the present invention adopts a specific structure. Under the synergistic effect of fluid self-oscillation and abrasive dielectrophoresis effect, it improves the machining accuracy and machining efficiency of the workpiece surface. The details are as follows:

[0009] 1) In the present invention, the abrasive liquid jet passing through the nozzle, after passing through the fluid self-excited oscillation chamber, changes from a traditional continuous jet to a pulsed jet with a higher peak velocity, and then enters the dielectrophoresis effect generating module. Due to the action of the non-uniform electric field force in the dielectrophoresis effect generating module, the abrasive particles in the pulsed jet produce a dielectrophoresis effect, and the abrasive particles in the jet move from the middle area where they are more distributed to the outer periphery of the jet, thereby making the abrasive particles more evenly distributed in the jet. The machining removal amount using this jet is more uniform, and the accuracy of workpiece polishing is improved. The pulsed jet can destroy the jet beam in the impact area of ​​the workpiece surface and the reflected liquid flow on the workpiece surface to form a blocking layer, thereby improving machining efficiency.

[0010] 2) The present invention is suitable for abrasives that can produce a dielectrophoretic effect, such as silicon carbide, cerium oxide, etc., which can improve the distribution of abrasive particles in a specified area per unit time, significantly improve the unevenness of the jet processing area, and can well solve the problems of uneven material removal distribution on the workpiece surface and large roughness of the processed surface, significantly improve the polishing efficiency, and help to obtain better surface processing quality.

[0011] Furthermore, in the aforementioned abrasive liquid jet nozzle having a combined fluid self-oscillation and dielectrophoresis effect, the fluid self-oscillation effect generating module and the dielectrophoresis effect generating module are interconnected via a threaded sleeve, each end of which is provided with an internal threaded hole. The ends of the threaded sleeve are respectively threadedly connected to the external cavity joint and the metal tube. Furthermore, a sealing gasket I is provided between the front end face of the outlet piston and the threaded sleeve. A sealing gasket III is provided between the rear end face of the ceramic tube and the threaded sleeve. By installing the sealing gasket, a reliable seal is formed to ensure the sealing performance of the equipment, which is easy to implement.

[0012] Furthermore, in the aforementioned abrasive liquid jet nozzle having a combined effect of fluid self-oscillation and dielectrophoresis, the sand tube is fixed to the outer cavity joint by a threaded fastening sleeve sleeved on its outer periphery. The threaded fastening sleeve secures the sand tube to the outer cavity joint, thereby not only limiting the position of the sand tube but also facilitating its installation and removal. Furthermore, an inlet sand tube sleeve is provided at the front end of the sand tube, and is sealed to the outer cavity joint and the cavity length adjustment gasket respectively through the inlet sand tube sleeve. This structural design can further secure the sand tube, preventing the sand tube from shaking during operation, while also enhancing the sealing between the sand tube and the cavity length adjustment gasket.

[0013] Furthermore, in the aforementioned abrasive liquid jet nozzle with fluid self-oscillation and dielectrophoresis composite effect, a sealing gasket II is provided between the ceramic tube and the sealing cover plate. This structure not only forms a reliable seal but is also easy to implement.

[0014] Furthermore, in the aforementioned abrasive liquid jet nozzle exhibiting a combined fluid self-oscillation and dielectrophoresis effect, the annular positive electrode and annular negative electrode have different widths. The different widths of the annular positive and negative electrodes can generate a non-uniform electric field, thereby causing the abrasive particles in the pulsed jet to achieve a dielectrophoresis effect, moving the abrasive particles from the central region of the jet, where they are more concentrated, toward the outer periphery of the jet beam, resulting in a more uniform distribution of the abrasive particles within the jet beam, thereby improving the accuracy of the polished workpiece surface and facilitating implementation. Furthermore, the annular positive and negative electrodes are staggered and distributed at equal distances within the insulating layer.

[0015] Furthermore, in the aforementioned abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis, the two ends of the self-oscillation chamber are tapered. The tapered structure is conducive to the formation of large-scale vortices, thereby enhancing the self-oscillation effect generated by the fluid.

[0016] Furthermore, in the aforementioned abrasive liquid jet nozzle having a composite effect of fluid self-oscillation and dielectrophoresis, the ratio of the diameter size d3 of the liquid jet flow channel II to the diameter size d2 of the liquid jet flow channel I is preferably in the range of 1.1 to 2; the ratio of the diameter size d1 of the self-oscillation chamber to the diameter size d2 of the liquid jet flow channel I is preferably in the range of 5 to 10. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic structural diagram of an abrasive liquid jet nozzle having a composite effect of fluid self-oscillation and dielectrophoresis of the present invention;

[0018] Figure 2 It is a schematic structural diagram of a fluid self-oscillation effect generating module in an abrasive liquid jet nozzle having a fluid self-oscillation and dielectrophoresis composite effect according to the present invention;

[0019] Figure 3 It is a structural schematic diagram of a dielectrophoresis effect generating module in an abrasive liquid jet nozzle having a fluid self-oscillation and dielectrophoresis composite effect of the present invention;

[0020] Figure 4 Schematic diagram of the structure of the self-oscillation chamber of the abrasive liquid jet nozzle with the composite effect of fluid self-oscillation and dielectrophoresis of the present invention;

[0021] Figure 5 Schematic diagram of a liquid jet polishing device using an abrasive liquid jet nozzle having a composite effect of fluid self-oscillation and dielectrophoresis according to the present invention;

[0022] Figure 6 This is a surface morphology diagram of a workpiece processed by the abrasive liquid jet nozzle having the composite effect of fluid self-oscillation and dielectrophoresis of the present invention;

[0023] Figure 7 This is a surface morphology diagram of a workpiece after processing without using the abrasive liquid jet nozzle with the fluid self-oscillation and dielectrophoresis composite effect of the present invention (using a commercially available ordinary liquid jet nozzle);

[0024] Figure 8 The white light interferometer is used to measure the white light interference pattern of the surface of 316L stainless steel wafer before processing;

[0025] Figure 9 The white light interferometer is used to measure the white light interference pattern of the surface of a 316L stainless steel disc processed by the abrasive liquid jet nozzle having the composite effect of fluid self-oscillation and dielectrophoresis of the present invention;

[0026] Figure 10 The Taylor surface roughness meter is used to measure the surface topography of the workpiece after it is processed without using the liquid jet nozzle of the present invention;

[0027] Figure 11 The Taylor surface roughness meter is used to measure the surface topography of the workpiece after being processed by the abrasive liquid jet nozzle with the composite effect of fluid self-excited oscillation and dielectrophoresis of the present invention;

[0028] Figure 12 This is a graph of pressure changes caused by the liquid jet impacting the target at different outlet pressures, measured using a high-precision pressure meter (the red curve is the impact effect with the addition of a self-oscillation chamber, and the black curve is the impact effect without the addition of a self-oscillation chamber).

[0029] Reference numerals: 1-fluid self-oscillation effect generating module; 101-sand pipe; 1011-liquid jet flow channel I; 102-conductive slip ring; 103-external cavity mounting joint; 104-cavity length adjustment gasket; 105-outlet piston; 1051-liquid jet flow channel II; 106-self-oscillation chamber; 107-sealing gasket I; 108-threaded fastening sleeve; 109-inlet sand pipe sleeve; 2-dielectrophoresis effect generating module; 201-ceramic tube; 2011-liquid jet flow channel III; 202-metal tube; 203-sealing cover plate; 2031-liquid jet outlet; 204-insulating layer; 205-annular positive electrode; 206-annular negative electrode; 207-sealing gasket II; 3-threaded connection sleeve; 4-water supply system; 5-boosting system; 6-power supply; 7-workpiece; 8-mixing chamber; 9-waste recovery device; 10-abrasive supply device. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings and embodiments, but they are not intended to serve as the basis of the present invention.

[0031] Example (see Figure 1-12 ):

[0032] In the embodiment, the liquid jet polishing device includes an abrasive liquid jet nozzle with a composite effect of fluid self-oscillation and dielectrophoresis, a water supply system 4, a boosting system 5, a power supply 6, a mixing chamber 8, a waste recovery device 9, and an abrasive supply device 10.

[0033] In the embodiment, the abrasive liquid jet nozzle having the combined effects of fluid self-oscillation and dielectrophoresis includes a fluid self-oscillation effect generating module 1 and a dielectrophoresis effect generating module 2 coaxially connected thereto.

[0034] In the embodiment, the fluid self-excited oscillation effect generating module 1 includes a sand tube 101 and a conductive slip ring 102 sleeved on the sand tube 101. The front end of the sand tube 101 is fixed in the external cavity joint 103; the front end surface of the sand tube 101 and the external cavity joint 103 are sealed by a cavity length adjustment gasket 104. A liquid jet flow channel I 1011 is provided in the sand tube 101; a piston mounting hole is provided at the front end of the external cavity joint 103, and an outlet piston 105 is installed in the piston mounting hole. The outlet piston 105 is provided with a liquid jet flow channel II 1051. The cavity length adjustment washer 104 is hollow, with its two ends respectively connected to the liquid jet flow channel I 1011 and the liquid jet flow channel II 1051, forming a fluid self-excited oscillation chamber 106 that can cause the liquid jet fluid to produce a self-excited oscillation effect. During operation, the liquid jet fluid in the fluid self-excited oscillation chamber 106 changes from a continuous jet to a pulsed jet with a higher peak velocity, and then flows out through the liquid jet flow channel II 1051. The pulsed jet can destroy the jet beam in the impact area of ​​the workpiece 7 surface during machining, and the reflected liquid flow on the workpiece 7 surface will form a blocking layer, thereby improving machining efficiency.

[0035] In the embodiment, the dielectrophoresis effect generating module 2 includes a ceramic tube 201 and a metal tube 202 sleeved on the outside thereof, a sealing cover 203 is fixed to the front end of the metal tube 202, the ceramic tube 201 is fixed in the metal tube 202 through the sealing cover 203, and a liquid jet outlet 2031 is provided on the sealing cover 203; a liquid jet flow channel III 2011 is provided in the ceramic tube 201, so that the liquid jet fluid flowing out of the liquid jet flow channel II 1051 flows through the liquid jet flow channel III 2011 and is ejected through the liquid jet outlet 2031; an insulating layer 204 is provided between the metal tube 202 and the ceramic tube 201, and a ring-shaped positive electrode 205 and a ring-shaped negative electrode 206 are provided in the insulating layer 204, and the ring-shaped positive electrode 205 and the ring-shaped negative electrode 206 are respectively electrically connected to the two output ends of the conductive slip ring 102, and can generate a non-uniform electric field after the power is turned on.

[0036] In the embodiment, the sand pipe 101 is fixed to the outer cavity joint 103 by a threaded fastening sleeve 108 sleeved on its outer circumference. The threaded fastening sleeve 108 fixes the sand pipe 101 to the outer cavity joint 103, which not only limits the position of the sand pipe 101 but also facilitates the installation and removal of the sand pipe 101.

[0037] In this embodiment, the front end of the sand tube 101 is sheathed with an inlet sand tube sleeve 109, which is sealed to the outer cavity joint 103 and the cavity length adjustment gasket 104. This structural design further stabilizes the sand tube 101, preventing it from shaking during operation. It also enhances the seal between the sand tube 101 and the cavity length adjustment gasket 104.

[0038] In the embodiment, a sealing gasket II 207 is provided between the ceramic tube 201 and the sealing cover plate 203. A sealing gasket III is provided between the rear end surface of the ceramic tube 201 and the threaded connection sleeve 3. This structure not only forms a reliable seal but is also easy to implement.

[0039] In this embodiment, the annular positive electrode 205 and the annular negative electrode 206 have different widths. The annular positive electrodes 205 and the annular negative electrodes 206 are staggered and distributed equidistantly within the insulating layer. The different widths of the annular positive and negative electrodes can generate a non-uniform electric field, thereby causing the abrasive particles in the pulsed jet to produce a dielectrophoretic effect, causing the abrasive particles to move from the central region of the jet, where they are more concentrated, toward the outer periphery of the jet. This results in a more uniform distribution of the abrasive particles within the jet beam, improving the surface accuracy of the workpiece 7 after polishing and facilitating implementation. (The width ratio of the positive and negative electrodes can be adjusted based on the properties of the abrasive particles.)

[0040] In the embodiment, the self-excited oscillation chamber 106 has a conical structure at both ends. The conical structure is conducive to the formation of large-scale vortices, thereby enhancing the self-excited oscillation effect generated by the fluid and forming a pulse jet.

[0041] In the embodiment, Figure 4 As shown, the ratio of the diameter size d3 of the liquid jet flow channel II 1051 to the diameter size d2 of the liquid jet flow channel I 1011 is 1.2; the ratio of the diameter size d1 of the self-excited oscillation chamber 106 to the diameter size d2 of the liquid jet flow channel I 1011 is 8.

[0042] The cavity length adjustment gasket 104 can be replaced according to the desired cavity length L of the fluid self-oscillation chamber 106. By replacing the cavity length adjustment gasket 104 with different lengths and adjusting the cavity length L of the self-oscillation chamber 106, different self-oscillation effects can be produced to meet different processing requirements. In order to obtain a better self-oscillation effect, when implementing the present invention, it is preferable that the cavity length L of the self-oscillation chamber 106 is less than the diameter d1 of the self-oscillation chamber 106. In the embodiment, the ratio of the cavity length L of the self-oscillation chamber 106 to the diameter d1 of the self-oscillation chamber 106 is 2 / 3.

[0043] like Figure 6 、 Figure 7 As shown, when the abrasive liquid jet nozzle of the present invention is not used for liquid jet polishing, the abrasive particles are mostly distributed in the central area where the liquid jet velocity is relatively high. Due to the presence of the stagnation layer, the depth and width of the pits on the surface of the workpiece 7 are different, and the machined surface of the workpiece 7 is in a deep "W" shape (the stagnation layer refers to the relatively stable retention layer between the jet beam in the impact area and the surface of the workpiece 7 during the abrasive liquid jet processing process. It directly resists the impact of the liquid jet and consumes part of the energy of the jet. At the same time, the smaller the diameter of the abrasive particle, the greater the impact of the stagnation layer). After using the nozzle of the present invention for liquid jet polishing, the distribution of the abrasive in the liquid jet is improved and more uniform, the level of material removal is higher, and the surface flatness of the workpiece 7 is better.

[0044] The abrasive liquid jet nozzle with the composite effect of fluid self-oscillation and dielectrophoresis of the present invention is used to process 316L stainless steel discs. The experimental conditions are as follows: the density of the silicon nitride substrate used is ρ (g / cm 3 ) is 7.98, Vickers hardness H (GPa) is 150, Young's modulus E (GPa) is 190, fracture toughness The abrasive material used is silicon carbide abrasive, the abrasive particle size is 3μm, and the abrasive slurry flow rate is 15ml / min. The width of the annular positive electrode 205 used is 1mm, the width of the annular negative electrode 206 is 4mm, the distance between the annular positive and negative electrodes is 4mm, and the high voltage direct current passed is 10kv; the liquid jet incident angle is 60°, the target distance is 10mm, each processing time is 10min, and a total of 4 processing times. The workpiece 7 is first polished several times and then ultrasonically cleaned, and then its initial roughness is measured; as shown in FIG. Figure 8 、 Figure 9 As shown, in this embodiment, the initial surface roughness S of the 316L stainless steel disc is a The surface roughness of 316L stainless steel disc is 155.3nm. a The surface quality is improved by 31.5%, and the original bumps and pits on the surface of the 316L stainless steel wafer are well removed.

[0045] Take two workpieces 7 with the same conditions, and use the common liquid jet polishing nozzle on the market and the abrasive liquid jet nozzle with the fluid self-excited oscillation and dielectrophoresis composite effect of the present invention to perform single-point erosion on one of the workpieces 7 for 30 seconds respectively. Figure 10 、 Figure 11 As shown, after processing with the abrasive liquid jet nozzle of the present invention, the "W" shape of the workpiece 7 surface is significantly improved, and the height of the intermediate peaks is significantly reduced. Whereas, after processing with a conventional liquid jet polishing nozzle, the depth difference between the peaks and valleys of the workpiece 7 is 14 μm, after processing with the abrasive liquid jet nozzle of the present invention, the depth difference between the peaks and valleys of the workpiece 7 is 10 μm.

[0046] The machining surface of the workpiece 7 will generate a strong reflection pressure, namely stagnation pressure, on the continuous liquid jet, which usually does not fluctuate with time and has strong stability. The effect of self-oscillation is to turn the continuous jet into a pulsed jet, so that the impact pressure of the liquid jet changes at a high frequency, generating "water hammer pressure" on the machining surface of the workpiece 7, which can effectively destroy the stagnation pressure. The actual pressure change of the liquid jet generated by the jet nozzle of the self-oscillation chamber 106 impacting the machining surface of the workpiece 7 is detected by a high-precision pressure meter. The initial pressure of the machining surface of the workpiece 7 is 4.3 N, the acquisition frequency is 50 Hz, and the single acquisition time is 10 s. Figure 12 As shown, after the abrasive liquid jet nozzle of the present invention has the combined effect of fluid self-oscillation and dielectrophoresis effect, the peak pressure of the liquid jet increases significantly after the jet pressure is greater than 12 MPa, and the polishing efficiency is also improved accordingly.

[0047] The above general description of the invention and the description of its specific embodiments involved in this application should not be construed as limiting the technical solutions of the invention. Based on the disclosure of this application, those skilled in the art may, without violating the constituent elements of the invention involved, add to, subtract from, or combine the disclosed technical features in the above general description and / or specific embodiments (including examples) to form other technical solutions within the scope of protection of this application.

Claims

1. An abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis, characterized in that: It comprises a fluid self-excited oscillation effect generating module (1) and a dielectrophoresis effect generating module (2) coaxially connected thereto; The fluid self-excited oscillation effect generating module (1) comprises a sand tube (101) and a conductive slip ring (102) sleeved on the sand tube (101); the front end of the sand tube (101) is fixed in an outer cavity joint (103); the front end surface of the sand tube (101) and the outer cavity joint (103) are sealed by a cavity length adjustment washer (104); a liquid jet flow channel I (1011) is provided in the sand tube (101); a piston mounting hole is provided at the front end of the outer cavity joint (103), and an outlet piston (1011) is installed in the piston mounting hole. 05), a liquid jet flow channel II (1051) is provided in the outlet piston (105); the cavity length adjustment gasket (104) is hollow, and its two ends are respectively connected to the liquid jet flow channel I (1011) and the liquid jet flow channel II (1051), forming a fluid self-excited oscillation chamber (106) that can enable the liquid jet fluid to produce a self-excited oscillation effect. During operation, the liquid jet changes from a continuous jet to a pulse jet with a higher peak velocity in the fluid self-excited oscillation chamber (106), and then flows out through the liquid jet flow channel II (1051); The dielectrophoresis effect generating module (2) comprises a ceramic tube (201) and a metal tube (202) sleeved on the outside thereof; a sealing cover plate (203) is fixed to the front end of the metal tube (202); the ceramic tube (201) is fixed in the metal tube (202) via the sealing cover plate (203); a liquid jet outlet (2031) is provided on the sealing cover plate (203); a liquid jet flow channel III (2011) is provided in the ceramic tube (201), so that liquid flows from the liquid jet flow channel II (1051) to the metal tube (202); and a liquid jet outlet (2031) is provided on the sealing cover plate (203). The liquid jet fluid flows through the liquid jet flow channel III (2011) and is ejected through the liquid jet outlet (2031); an insulating layer (204) is provided between the metal tube (202) and the ceramic tube (201); an annular positive electrode (205) and an annular negative electrode (206) are provided in the insulating layer (204); the annular positive electrode (205) and the annular negative electrode (206) are respectively electrically connected to the two output ends of the conductive slip ring (102); and when the power is turned on, a non-uniform electric field can be generated.

2. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 1, characterized in that: The fluid self-excited oscillation effect generating module (1) and the dielectrophoresis effect generating module (2) are connected to each other via a threaded connection sleeve (3), both ends of the threaded connection sleeve (3) are provided with internal threaded holes, and the two ends of the threaded connection sleeve (3) are respectively connected to the outer cavity mounting joint (103) and the metal tube (202) via threads.

3. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 2, characterized in that: A sealing gasket I (107) is provided between the front end surface of the outlet piston (105) and the threaded connection sleeve (3); and a sealing gasket III is provided between the rear end surface of the ceramic tube (201) and the threaded connection sleeve (3).

4. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 1, characterized in that: The sand pipe (101) is fixed in the outer cavity joint (103) via a threaded fastening sleeve (108) sleeved on its outer circumference.

5. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 4, characterized in that: The front end of the sand pipe (101) is provided with an inlet sand pipe sleeve (109), and is sealedly connected to the outer cavity joint (103) and the cavity length adjustment gasket (104) through the inlet sand pipe sleeve (109).

6. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 1, characterized in that: A sealing gasket II (207) is provided between the ceramic tube (201) and the sealing cover plate (203).

7. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 1, characterized in that: The annular positive electrode (205) and the annular negative electrode (206) have different widths.

8. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 7, characterized in that: The annular positive electrodes (205) and the annular negative electrodes (206) are staggered and distributed at equal distances in the insulating layer (204).

9. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to claim 1, characterized in that: Both ends of the self-excited oscillation chamber (106) are tapered structures.

10. The abrasive liquid jet nozzle with a combined effect of fluid self-oscillation and dielectrophoresis according to any one of claims 1 to 9, characterized in that: The ratio of the diameter size d3 of the liquid jet flow channel II (1051) to the diameter size d2 of the liquid jet flow channel I (1011) is in the range of 1.1 to 2; the ratio of the diameter size d1 of the self-excited oscillation chamber (106) to the diameter size d2 of the liquid jet flow channel I (1011) is in the range of 5 to 10.

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