Adaptive method, device and system for growing diamond crystals

Abstract

The present invention provides an adaptive method, device and system suitable for diamond crystal growth, belonging to the field of crystal growth technology. The adaptive method suitable for diamond crystal growth includes: determining the process parameters for achieving the preset growth target from the diamond process database according to the preset growth target of the diamond crystal, and outputting the process parameters to the diamond growth equipment so that the diamond sample grows according to the process parameters; extracting the diamond growth parameters of the growing diamond sample from the diamond growth equipment, and using the diamond growth data analysis model to predict the predicted growth target under the process parameters; in the case where the predicted growth target is inconsistent with the preset growth target, adjusting the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters, and making the diamond sample grow according to the adjusted process parameters; repeating the extraction, prediction and adjustment operations until the predicted growth target is consistent with the preset growth target.

Description

Technical Field

[0001] The present invention belongs to the technical field of crystal growth and chemical vapor deposition, and in particular, relates to an adaptive method, device, and system suitable for diamond crystal growth, and more specifically, relates to an adaptive method, device, system, computer-readable storage medium, and computer program product suitable for diamond crystal growth. Background Art

[0002] Diamond is called the ultimate semiconductor, and growing diamonds through microwave plasma chemical vapor deposition (MPCVD) equipment is one of the effective ways to obtain higher purity and higher quality diamond crystals. However, since the plasma concentration in the MPCVD equipment cavity changes significantly with time, the surface state of the diamond material, temperature and other parameters, the process parameters need to be adjusted in real time during the diamond growth process, and the adjustment process mainly relies on experienced engineers to complete it manually. However, in the process of growing diamonds with larger sizes and higher purity, the growth process often takes dozens to hundreds of hours. During this period, engineers must keep an eye on the changes in the MPCVD equipment cavity environment in real time to make manual adjustments, which is a process that consumes a lot of physical and mental energy. In particular, there will be many uncertainties in the diamond growth process, which will cause the diamond growth target (i.e., growth quality) to change. At this time, engineers need to quickly judge and adjust the process parameters, but it is difficult to quickly give effective adjustment measures in a short period of time, which restricts the growth of higher quality diamond crystals. Summary of the invention

[0003] In view of the above technical problems, the present invention provides an adaptive method, device, system, computer-readable storage medium, and computer program product suitable for diamond crystal growth, in order to solve the difficulties, large physical and mental consumption, and inability to effectively provide adjustment directions in the manual adjustment process in the above technical problems. In this regard, the technical solution provided by the present invention is as follows.

[0004] As a first aspect of the present invention, the present invention provides an adaptive method for growing diamond crystals, comprising: determining process parameters suitable for achieving the preset growth target from a diamond process database according to a preset growth target of the diamond crystal, and outputting the process parameters to a diamond growth device, so that the diamond sample grows in the diamond growth device according to the process parameters; extracting diamond growth parameters of the growing diamond sample during the growth process from the diamond growth device; predicting a predicted growth target of the growing diamond sample under the process parameters using an established diamond growth data analysis model according to the diamond growth parameters; in the case where the predicted growth target is inconsistent with the preset growth target, adjusting the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters to obtain adjusted process parameters suitable for achieving the preset growth target, and outputting the adjusted process parameters to the diamond growth device, so that the diamond sample grows according to the adjusted process parameters; repeating the extraction, prediction and adjustment operations until the predicted growth target of the diamond sample is consistent with the preset growth target.

[0005] As a second aspect of the present invention, an adaptive device suitable for diamond crystal growth is provided, comprising: a process parameter determination module, a diamond growth parameter extraction module, a growth result prediction module, a process parameter adjustment module, a process parameter feedback module and a repetition module.

[0006] The process parameter determination module is adapted to determine process parameters suitable for achieving the preset growth target from a diamond process database according to the preset growth target of the diamond crystal, and output the process parameters to the diamond growth equipment so that the diamond sample is grown in the diamond growth equipment according to the process parameters.

[0007] The diamond growth parameter extraction module is suitable for extracting the diamond growth parameters of the growing diamond sample during the growth process from the diamond growth equipment.

[0008] The growth result prediction module is suitable for predicting the growth target of the growing diamond sample under the process parameters according to the diamond growth parameters using the established diamond growth data analysis model.

[0009] The process parameter adjustment module is suitable for adjusting the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters when the predicted growth target is inconsistent with the preset growth target, so as to obtain the adjusted process parameters suitable for achieving the preset growth target.

[0010] The process parameter feedback module is suitable for outputting the adjusted process parameters to the diamond growth equipment so that the diamond sample is grown according to the adjusted process parameters.

[0011] The repetition module is adapted to repeat the operations of extraction, prediction and adjustment until the predicted growth target of the diamond sample is consistent with the preset growth target.

[0012] As a third aspect of the present invention, an adaptive system suitable for diamond crystal growth is provided, comprising: a computing device, a diamond growing device, and a diamond detecting device.

[0013] The computing device includes one or more processors and a memory for storing one or more programs, wherein when the one or more programs are executed by the one or more processors, the one or more processors implement the adaptive method suitable for diamond crystal growth as in the above-mentioned embodiment.

[0014] The diamond growth device comprises a diamond growth unit and a diamond growth parameter extraction unit, wherein the diamond growth unit is suitable for growing a diamond sample in the diamond growth device according to process parameters, and the diamond growth parameter extraction unit is suitable for extracting diamond growth parameters of the growing diamond sample during the growth process.

[0015] Diamond testing equipment is suitable for testing the actual growth results of diamond samples after they are grown.

[0016] As a fourth aspect of the present invention, a computer-readable storage medium is provided, storing executable instructions, which, when executed by a processor, enable the processor to implement the adaptive method suitable for diamond crystal growth as in the above-mentioned embodiment.

[0017] As a fifth aspect of the present invention, a computer program product is provided, comprising a computer program, which, when executed by a processor, implements the adaptive method suitable for diamond crystal growth as in the above-mentioned embodiment.

[0018] In the embodiments of the present invention, the current process of growing diamond crystals of higher quality is overly dependent on the manual adjustment process by engineers, and the long-term diamond growth process is prone to unstable growth due to various emergencies, and the growth of defective or completely damaged diamonds. The present invention proposes to construct an adaptive method, device, system, computer-readable storage medium and computer program product suitable for the growth of diamond crystals with larger size, higher purity and higher growth efficiency, which can quickly and effectively adjust the process parameters of the diamond growth equipment according to various situations that occur during the growth of diamond samples, and predict the predicted growth target of the diamond sample under the current growth process parameters through the diamond growth data analysis model. By using data analysis and guiding the adjustment of the process parameters of the diamond growth equipment for growing diamond crystals, the dependence on and consumption of engineers is reduced, the growth cost of diamonds is reduced, and it is conducive to the rapid and efficient growth of diamonds and the occurrence of various emergencies during the growth process is reduced.

[0019] Specifically, according to the preset growth target of the diamond crystal, the process parameters for achieving the preset growth target are determined from the diamond process database, and the process parameters are output to the diamond growth equipment, and the diamond growth equipment guides the diamond sample to grow according to the process parameters. During the growth process of the diamond sample, the diamond growth parameters of the growing diamond sample can be extracted from the diamond growth equipment. According to the diamond growth parameters, the predicted growth target of the growing diamond sample under this process parameter can be predicted by the diamond growth data analysis model, that is, whether a diamond crystal that meets the preset growth target can be grown under this process parameter. In the case that the predicted growth target is inconsistent with the preset growth target, it is necessary to re-fine the process parameters of the diamond growth equipment based on the preset growth target, the predicted growth target, the process parameters and the diamond growth parameters, and grow according to the adjusted process parameters, and repeat the process of diamond growth parameter extraction and model prediction of growth target until a diamond crystal that meets the preset growth target can be grown. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 An application scenario diagram of an adaptive method for growing diamond crystals according to an embodiment of the present invention is shown;

[0021] Figure 2 A flow chart showing an adaptive method for growing diamond crystals in an embodiment of the present invention is shown;

[0022] Figure 3 A flow chart showing an adaptive method for growing diamond crystals in another embodiment of the present invention;

[0023] Figure 4 A flow chart of establishing a diamond growth data analysis model in an embodiment of the present invention is shown;

[0024] Figure 5 A structural block diagram of an adaptive device suitable for growing diamond crystals in an embodiment of the present invention is shown;

[0025] Figure 6 A schematic diagram of the architecture of a computing device for an adaptive method for growing diamond crystals according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0026] Below, embodiments of the present invention will be described with reference to the accompanying drawings. However, it should be understood that these descriptions are exemplary only and are not intended to limit the scope of the present invention. In the following detailed description, for ease of explanation, many specific details are set forth to provide a comprehensive understanding of embodiments of the present invention. However, it is apparent that one or more embodiments may also be implemented without these specific details. In addition, in the following description, descriptions of known structures and technologies are omitted to avoid unnecessary confusion of concepts of the present invention.

[0027] The terms used herein are only for describing specific embodiments and are not intended to limit the present invention. The term "comprising" used herein indicates the existence of features, steps, operations, but does not exclude the existence or addition of one or more other features.

[0028] In the case of using expressions such as "at least one of A, B, and C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, and C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.). In the case of using expressions such as "at least one of A, B, or C, etc.", it should generally be interpreted in accordance with the meaning of the expression generally understood by those skilled in the art (for example, "a system having at least one of A, B, or C" should include but is not limited to a system having A alone, B alone, C alone, A and B, A and C, B and C, and / or A, B, C, etc.).

[0029] The principle of growing diamond crystals using MPCVD equipment is as follows: the cylindrical cavity of the MPCVD equipment resonates with microwaves to generate a strong central electric field to ionize the hydrogen in the cavity, convert it into plasma, and then introduce methane gas and ionize it into carbon-containing groups for deposition on the diamond substrate to grow diamond crystals. Since the type and concentration of plasma in the MPCVD equipment cavity will change significantly with time, the surface state of the diamond material, temperature and other parameters, it is necessary to adjust the process parameters in real time during the growth of diamond crystals. Therefore, the present invention provides an adaptive method, device, system, computer-readable storage medium and computer program product suitable for diamond crystal growth to reduce dependence on manual labor, reduce the cost of diamond growth, and improve the efficiency and quality of diamond growth.

[0030] Specifically, the present invention provides an adaptive method for diamond crystal growth, including: according to the preset growth target of the diamond crystal, determining the process parameters suitable for achieving the preset growth target from the diamond process database, and outputting the process parameters to the diamond growth equipment, so that the diamond sample grows in the diamond growth equipment according to the process parameters; extracting the diamond growth parameters of the growing diamond sample during the growth process from the diamond growth equipment; according to the diamond growth parameters, using the established diamond growth data analysis model to predict the predicted growth target of the growing diamond sample under the process parameters; in the case where the predicted growth target is inconsistent with the preset growth target, based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters, adjusting the process parameters to obtain the adjusted process parameters suitable for achieving the preset growth target, and outputting the adjusted process parameters to the diamond growth equipment, so that the diamond sample grows according to the adjusted process parameters; repeating the extraction, prediction and adjustment operations until the predicted growth target of the diamond sample is consistent with the preset growth target. The method provided by the present invention can realize the preparation of single crystal diamond crystal or polycrystalline diamond crystal.

[0031] Figure 1 The following diagram shows an application scenario of the adaptive method for diamond crystal growth in an embodiment of the present invention. Figure 1 The application scenarios shown are only examples to help those skilled in the art understand the technical solutions of the present invention, but do not mean that the embodiments of the present invention cannot be used in other devices, systems, environments or scenarios.

[0032] like Figure 1 As shown, the application scenario 100 according to this embodiment may include a first terminal device 101, a second terminal device 102, a third terminal device 103, a network 104, and a diamond growing device 106; or include a first terminal device 101, a second terminal device 102, a third terminal device 103, a network 104, a server 105, and a diamond growing device 106. The network 104 is used to provide a medium for a communication link between the first terminal device 101, the second terminal device 102, the third terminal device 103, the server 105, and the diamond growing device 106. The network 104 may include various connection types, such as wired and / or wireless communication links, etc.

[0033] The user may use the first terminal device 101, the second terminal device 102, and the third terminal device 103 to interact with the server 105 and / or the diamond growing device 106 through the network 104 to receive or send messages, etc. Various communication client applications may be installed on the first terminal device 101, the second terminal device 102, and the third terminal device 103, such as shopping applications, web browser applications, search applications, instant messaging tools, email clients and / or social platform software, operating software, etc. (only for example).

[0034] The first terminal device 101, the second terminal device 102, and the third terminal device 103 may be various electronic devices having display screens and supporting web browsing, including but not limited to smart phones, tablet computers, portable computers, desktop computers, and the like.

[0035] The server 105 may be a server that provides various services, such as a background management server (only as an example) that provides support for websites browsed or operations performed by users using the first terminal device 101, the second terminal device 102, and the third terminal device 103. The background management server may analyze and process the received data such as user requests, and feed back the processing results (such as web pages, information, or data obtained or generated according to user requests) to the terminal device.

[0036] It should be noted that the adaptive method for diamond crystal growth provided in the embodiment of the present invention can generally be executed by the server 105. Accordingly, the adaptive device for diamond crystal growth provided in the embodiment of the present invention can generally be set in the server 105. The adaptive method for diamond crystal growth provided in the embodiment of the present invention can also be executed by a server or server cluster that is different from the server 105 and can communicate with the first terminal device 101, the second terminal device 102, the third terminal device 103 and / or the server 105. Accordingly, the adaptive device for diamond crystal growth provided in the embodiment of the present invention can also be set in a server or server cluster that is different from the server 105 and can communicate with the first terminal device 101, the second terminal device 102, the third terminal device 103 and / or the server 105. Alternatively, the adaptive method for diamond crystal growth provided in the embodiment of the present invention can also be executed by the first terminal device 101, the second terminal device 102 or the third terminal device 103, or by other terminal devices different from the first terminal device 101, the second terminal device 102 or the third terminal device 103. Correspondingly, the adaptive device suitable for diamond crystal growth provided in the embodiment of the present invention can also be set in the first terminal device 101, the second terminal device 102 or the third terminal device 103, or in other terminal devices different from the first terminal device 101, the second terminal device 102 or the third terminal device 103.

[0037] For example, the process parameters suitable for achieving the preset growth target can be stored in any one of the first terminal device 101, the second terminal device 102 or the third terminal device 103, or stored on the server 105 and can be imported into the first terminal device 101. Then, the first terminal device 101 can locally execute the adaptive method for diamond crystal growth provided in the embodiment of the present invention, including: according to the preset growth target of the diamond crystal, determining the process parameters suitable for achieving the preset growth target from the diamond process database, and outputting the process parameters to the diamond growth device 106 through the network 104, so that the diamond sample grows in the diamond growth device 106 according to the given process parameters. The diamond growth parameters of the growing diamond sample in the growth process are extracted from the diamond growth device 106; the diamond growth device 106 can feed back the diamond growth parameters to the first terminal device 101 through the network 104. The first terminal device 101 can use the diamond growth data analysis model stored in the first terminal device 101 to predict the predicted growth target of the growing diamond sample under the process parameters. In the case where the predicted growth target is inconsistent with the preset growth target, the first terminal device 101 can adjust the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters to obtain the adjusted process parameters suitable for achieving the preset growth target, and output the adjusted process parameters to the diamond growth device 106 through the network 104, so that the diamond sample grows according to the adjusted process parameters, and repeat the extraction, prediction and adjustment operations until the predicted growth target of the diamond sample is consistent with the preset growth target. Alternatively, the process parameters suitable for achieving the preset growth target or the adjusted process parameters are sent to other terminal devices, servers 105, or server clusters, and the other terminal devices, servers 105, or server clusters that receive the process parameters suitable for achieving the preset growth target or the adjusted process parameters execute the adaptive method for diamond crystal growth provided by the embodiment of the present invention.

[0038] It should be understood that Figure 1 The number of terminal devices, networks and servers in the embodiment is only for illustration. Any number of terminal devices, networks and servers may be provided according to implementation requirements.

[0039] According to the embodiments of the present invention, it should be noted that the term "diamond sample" refers to a growing diamond, and the term "diamond or diamond crystal" refers to a diamond crystal that meets a preset growth target.

[0040] The following is based on Figure 1 The application scenario described by Figure 2-Figure 3 The adaptive method for diamond crystal growth of the present invention is described in detail.

[0041] Figure 2 A flow chart of an adaptive method suitable for diamond crystal growth in an embodiment of the present invention is shown.

[0042] like Figure 2 As shown, the adaptive method suitable for diamond crystal growth in this embodiment includes: operations S201-S205.

[0043] In operation S201: according to a preset growth target of a diamond crystal, process parameters suitable for achieving the preset growth target are determined from a diamond process database, and the process parameters are output to a diamond growth device, so that a diamond sample is grown in the diamond growth device according to the process parameters.

[0044] In operation S202: diamond growth parameters of a growing diamond sample during the growth process are extracted from a diamond growing device.

[0045] In operation S203: according to the diamond growth parameters, the established diamond growth data analysis model is used to predict the predicted growth target of the growing diamond sample under the process parameters.

[0046] In operation S204: when the predicted growth target is inconsistent with the preset growth target, the process parameters are adjusted based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters to obtain adjusted process parameters suitable for achieving the preset growth target, and the adjusted process parameters are output to the diamond growth equipment so that the diamond sample is grown according to the adjusted process parameters.

[0047] In operation S205: the operations of extracting, predicting and adjusting are repeated until the predicted growth target of the diamond sample is consistent with the preset growth target.

[0048] In an embodiment of the present invention, according to the preset growth target of the diamond crystal, the process parameters for achieving the preset growth target are determined from the diamond process database, and the process parameters are output to the diamond growth equipment, and the diamond growth equipment guides the diamond sample to grow according to the process parameters. During the growth process of the diamond sample, the diamond growth parameters of the growing diamond sample during the growth process can be extracted from the diamond growth equipment. According to the diamond growth parameters, the predicted growth target of the growing diamond sample under this process parameter can be predicted by the diamond growth data analysis model, that is, whether a diamond crystal that meets the preset growth target can be grown under this process parameter. In the case that the predicted growth target is inconsistent with the set preset growth target, it is necessary to re-fine the process parameters of the diamond growth equipment based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters, so that the diamond sample grows according to the adjusted process parameters. The process of diamond growth parameter extraction, diamond growth data analysis model prediction of growth target and process parameter adjustment is repeated until a diamond crystal that meets the preset growth target can be grown. The present invention utilizes data analysis to guide diamond growth equipment to grow diamond crystals, thereby reducing dependence on and consumption of engineers, lowering the cost of diamond growth, being conducive to achieving rapid and efficient diamond growth, reducing the occurrence of various emergencies during the growth process, and being conducive to improving the growth quality of diamond crystals.

[0049] According to an embodiment of the present invention, in operation S201, the preset growth target of the diamond crystal is the diamond growth target set by the user. The preset growth target of the diamond crystal includes at least one of the size, thickness, thickness uniformity, crystal quality, surface roughness, and color of the diamond sample. For example, the user sets the preset growth target as: growing a cylindrical diamond with a thickness of 5 cm, a diameter of 5 cm, and yellow color. At this time, the diamond sample is grown using the diamond growth equipment with the task of achieving the preset growth target to obtain a diamond crystal that meets the preset growth target. For another example: the user sets the preset growth target as: growing a diamond within 2 hours without limiting the thickness, size, or color of the diamond. At this time, the primary goal is to grow a diamond crystal that meets the preset growth target in a short time. According to the preset growth target set, the user can determine the process parameters for achieving the preset growth target from the diamond process database, wherein the diamond process database can be stored in the server 105, or in the first terminal device 101, the second terminal device 102, or the third terminal device 103, or in the computing device in the subsequent embodiments. The diamond process database includes process parameters of diamond samples grown under different growth times and process parameters, diamond growth parameters of diamond samples during the growth process, process parameters adjusted due to certain emergencies during the growth process of diamond samples and diamond growth parameters obtained after the adjustment, and the real results of diamond samples grown under different process parameters, wherein the real growth results of diamond samples include information such as the growth quality and morphology of the final diamond crystal, for example, the real growth results of diamond samples include at least one of the size, thickness, thickness uniformity, crystal quality, surface roughness, and color of diamond samples. The data in the diamond process database can be used to establish a diamond growth data analysis model, thereby realizing the prediction of the growth target of diamond samples based on the diamond growth parameters of diamond samples. The process parameters of diamond growth equipment include at least one of microwave power, air pressure in the cavity of diamond growth equipment, and cooling water temperature of diamond growth equipment, wherein the change of air pressure in the cavity of diamond growth equipment affects the flow rate and flow rate of hydrogen and methane; the change of cooling water temperature affects the stability of the operation of diamond growth equipment.

[0050] According to an embodiment of the present invention, in operation S202, the diamond growth parameters include: at least one of the temperature and plasma concentration of the surface of the diamond sample, wherein the plasma concentration of the surface of the diamond sample includes: the concentration of groups applicable to or affecting the growth of the diamond sample, such as the concentration of carbon groups; wherein the plasma concentration of the surface of the diamond sample can be detected by a spectrometer. The diamond growth device includes: a diamond growth unit for growing diamond samples, and a diamond growth parameter extraction unit for collecting diamond growth parameters during the growth of the diamond sample. The diamond growth unit may include a vapor deposition device, such as MPCVD; the diamond growth parameter extraction unit includes various sensors and spectrometers, wherein the sensors are not limited to infrared temperature sensors and thermocouple sensors, and the temperature of the surface of the diamond sample is collected by various sensors. The spectrometer is not limited to an infrared spectrometer, an ultraviolet spectrometer, etc., and the plasma concentration of the surface of the diamond sample is collected by the spectrometer. By using various sensors and spectrometers to collect information on the surface of the growing diamond sample, and uniformly processing the collected various signals, the diamond growth parameters that can be identified by the terminal device and the server are obtained. Specifically, the unified processing of various signals from sensors and spectrometers includes: converting the format of various collected signals into a unified format, converting them into digital signals that can be recognized by terminal devices or servers (such as computers, mobile phones) and storing them.

[0051] According to an embodiment of the present invention, before using the established diamond growth data analysis model to make predictions based on diamond growth parameters, it also includes: removing abnormal data from the diamond growth parameters. The abnormal data includes: obviously erroneous data, abnormal data caused by environmental fluctuations or special circumstances, such as data exceeding 10% of the standard deviation can be identified as abnormal data or erroneous data. Further, in operations S203-S205, after removing the abnormal data from the diamond growth parameters, the predicted growth target of the growing diamond sample under the process parameters can be predicted based on the diamond growth parameters (such as spectral data, temperature data) through the diamond growth data analysis model. In other words, because the diamond growth parameters on the surface of the diamond sample are constantly changing during the diamond growth process, the diamond growth parameters are used as a medium, and the diamond growth parameter model is used to predict whether a diamond crystal that meets the preset growth target can be grown under the process parameters. In the case where the predicted growth target is inconsistent with the preset growth target, the process parameters are adjusted based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters to obtain the adjusted process parameters suitable for achieving the preset growth target, and the adjusted process parameters are output to the diamond growth equipment so that the diamond sample grows according to the adjusted process parameters. The extraction, prediction and adjustment operations are repeated until the predicted growth target of the diamond sample is consistent with the preset growth target. The method of adjusting the process parameters can be to analyze the data based on experience for adjustment, or the process parameters can be adjusted by analyzing the data according to the scheme provided by the diamond process database.

[0052] Figure 3 A flow chart of an adaptive method for growing diamond crystals according to another embodiment of the present invention is shown.

[0053] According to an embodiment of the present invention, Figure 3 As shown, the adaptive method for diamond crystal growth provided by the present invention, wherein operations S301 to S305 are Figure 2 Operations S201 to S205 are the same and will not be described in detail here. The only difference is that the adaptive method also includes operation S306.

[0054] In operation S306: when the predicted growth target is consistent with the preset growth target, the operation of adjusting the process parameters is omitted, so that the diamond sample continues to grow according to the current process parameters to obtain a diamond crystal that meets the preset growth target.

[0055] In an embodiment of the present invention, when the predicted growth target is consistent with the preset growth target, it means that the process parameters suitable for growing diamond crystals provided by the diamond process database are accurate and suitable for achieving the preset growth target, which is beneficial to improving the efficiency of diamond crystal growth and can better guide the diamond growth equipment to complete diamond crystal growth.

[0056] Figure 4 A flow chart of establishing a diamond growth data analysis model in an embodiment of the present invention is shown.

[0057] According to an embodiment of the present invention, Figure 4 As shown, establishing a diamond growth data analysis model includes: operations S401 to S403.

[0058] In operation S401: controlling the diamond growing device to grow a diamond sample according to preset sample process parameters, extracting the sample diamond growth parameters of the growing diamond sample during the growth process from the diamond growing device, and detecting the actual growth result of the diamond sample after the growth is completed.

[0059] In operation S402: the sample diamond growth parameters are input into the initialized diamond growth data analysis model to predict the sample growth target.

[0060] In operation S403: according to the actual growth results and the predicted sample growth target, the model parameters of the initialized diamond growth data analysis model are adjusted to obtain the diamond growth data analysis model.

[0061] In the embodiment of the present invention, in the process of establishing the diamond growth data analysis model, the diamond sample is first grown according to the preset sample process parameters by controlling the diamond growth equipment, and the sample diamond growth parameters of the growing diamond sample are extracted from the diamond growth equipment during the growth process, and the real growth result of the diamond crystal under the sample process parameters is detected after the diamond sample is grown. Subsequently, the sample diamond growth parameters are input into the initialized diamond growth data analysis model so that the model predicts the predicted sample growth target according to the sample stone growth parameters. According to the comparison result between the real growth result and the predicted sample growth target, the model parameters of the initialized diamond growth data analysis model are adjusted to improve the accuracy of the model prediction, so that the predicted sample growth target of the diamond sample predicted by the model is consistent with the actual detected real growth result, thereby obtaining a diamond growth data analysis model with high prediction accuracy.

[0062] In the process of adjusting the model parameters of the initialized diamond growth data analysis model, the predicted sample growth target and diamond sample growth rate of the growing diamond sample under the current sample process parameters are predicted based on the sample diamond growth parameters according to the results of multi-physics field multi-scale physical simulation (multi-physics fields include temperature field, electromagnetic field, plasma, flow field, stress, etc.) combined with the microscopic diamond growth mechanism, and the actual growth results of the diamond samples grown under different sample process parameters are combined to correct the model parameters of the initialized diamond growth data analysis model (i.e., model prediction parameters). In particular, when the predicted sample growth target of the diamond sample differs from the actual growth result of the diamond sample by more than 20%, the model parameters are adjusted. The initialized diamond growth data analysis model is continuously updated so that the predicted sample growth target (i.e., the predicted result) predicted by the diamond growth data analysis model is close to the actual growth result (i.e., the actual result) after the diamond sample growth is completed.

[0063] According to an embodiment of the present invention, in operation S401 to operation S403, the sample process parameters include at least one of microwave power, gas pressure in the cavity of diamond growth equipment, and cooling water temperature of diamond growth equipment. The sample diamond growth parameters include at least one of the temperature of the diamond sample surface and the plasma concentration, wherein the plasma concentration of the diamond sample surface includes: the concentration of groups applicable to or affecting the growth of diamond samples, such as the concentration of carbon groups, wherein the plasma concentration of the diamond sample surface can be detected by a spectrometer, and the temperature can be detected by various sensors. The predicted sample growth target includes at least one of the size, thickness, thickness uniformity, crystal quality, surface roughness, and color of the diamond sample. Further, the actual growth result of the diamond sample after the growth is completed can be determined by a diamond detection device, wherein the actual growth result of the diamond sample includes at least one of the size, thickness, thickness uniformity, crystal quality, diamond surface roughness, and color of the diamond sample. The size of the diamond sample is the size of the diamond substrate. Generally, a diamond substrate of one size can grow a diamond crystal of that size. The thickness of the diamond sample is detected by a step profiler, and the thickness uniformity of the diamond sample can be determined by testing the thickness at different angles or different positions. The crystal quality of the diamond sample can be detected by an X-ray diffractometer (XRD), and the purity or color of the diamond sample can be determined by the crystal quality. The surface roughness of the diamond sample is measured by an atomic force microscope. The diamond growth device uses the diamond growth device in the above operation S202, and will not be described in detail here.

[0064] Based on the above-mentioned adaptive method for diamond crystal growth, the second aspect of the present invention provides an adaptive device for diamond crystal growth. Figure 5 The device is described in detail.

[0065] Figure 5 The structure block diagram of the adaptive device suitable for diamond crystal growth in an embodiment of the present invention is shown.

[0066] like Figure 5 As shown, an adaptive device 500 suitable for diamond crystal growth includes: a process parameter determination module 501, a diamond growth parameter extraction module 502, a growth result prediction module 503, a process parameter adjustment module 504, a process parameter feedback module 505 and a repetition module 506.

[0067] The process parameter determination module 501 is adapted to determine process parameters suitable for achieving the preset growth target from the diamond process database according to the preset growth target of the diamond crystal, and output the process parameters to the diamond growth device, so that the diamond sample grows in the diamond growth device according to the process parameters. The diamond process database is stored in the process parameter determination module 501. In one embodiment, the process parameter determination module 501 can be used to perform the operation S201 and / or the operation S301 described above, and the specific process is not repeated here.

[0068] The diamond growth parameter extraction module 502 is adapted to extract the diamond growth parameters of the growing diamond sample during the growth process from the diamond growth device. The diamond growth device includes: a diamond growth unit and a diamond growth parameter extraction unit, and the diamond growth parameter extraction unit includes a plurality of sensors and a spectrometer. It should be noted that the diamond growth device in the embodiment of the present invention has the same composition and purpose as the diamond growth device in the above operation S202 and / or operation S302, and the specific process is not described in detail here. The diamond growth parameter extraction module 502 includes: a diamond growth parameter processing unit, which is used to convert the collected diamond growth parameters into a format, uniformly convert them into digital signals and store them, so that the subsequent diamond growth data analysis model can perform analysis. In one embodiment, the diamond growth parameter extraction module 502 can be used to perform the above-described operation S202 and / or operation S302, and the specific process is not described here.

[0069] The growth result prediction module 503 is adapted to predict the predicted growth target of the growing diamond sample under the process parameters using the established diamond growth data analysis model according to the diamond growth parameters. Specifically, the growth result prediction module 503 can predict the predicted growth target under the current real-time process parameters according to the real-time diamond growth parameters collected during the real-time growth process through the diamond growth data analysis model, and determine whether the predicted growth target under the process parameters is consistent with the preset growth target, that is, whether it meets the goal of growing diamonds with higher crystal quality and higher uniformity. In one embodiment, the growth result prediction module 503 can be used to perform the operation S203 and / or operation S303 described above, and the specific process will not be repeated here.

[0070] The process parameter adjustment module 504 is adapted to adjust the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters when the predicted growth target is inconsistent with the preset growth target, so as to obtain the adjusted process parameters suitable for achieving the preset growth target. In other words, the process parameter adjustment module 504 is used to adjust the process parameters that do not meet the preset growth target, so as to adjust the process parameters that do not meet the preset growth target to a process parameter range that tends to grow into a process parameter range that meets the preset growth target, thereby obtaining the adjusted process parameters.

[0071] The process parameter feedback module 505 is adapted to output the adjusted process parameters to the diamond growing device so that the diamond sample grows according to the adjusted process parameters. In one embodiment, the process parameter adjustment module 504 and the process parameter feedback module 505 can be used to perform the operation S204 and / or the operation S305 described above, and the specific process is not repeated here.

[0072] The repeating module 506 is adapted to repeat the operations of extracting, predicting and adjusting until the predicted growth target in the diamond sample is consistent with the preset growth target. In one embodiment, the repeating module 506 can be used to perform the operation S205 described above, and the specific process is not repeated here.

[0073] According to an embodiment of the present invention, the adaptive device 500 for diamond crystal growth further includes: a data processing module. The data processing module is used to eliminate abnormal data in the diamond growth parameters before predicting the predicted growth target of the growing diamond sample under the process parameters according to the diamond growth parameters through the established diamond growth data analysis model.

[0074] According to an embodiment of the present invention, the adaptive device 500 suitable for diamond growth also includes: a diamond growth module, which is suitable for omitting the operation of adjusting the process parameters when the predicted growth target is consistent with the preset growth target, so that the diamond sample continues to grow according to the current process parameters to obtain a diamond crystal that meets the preset growth target.

[0075] According to an embodiment of the present invention, the adaptive device 500 for diamond crystal growth further includes: a model building module, which is suitable for building a diamond growth data analysis model. The model building module includes: a sample growth control unit, a sample parameter extraction unit, a sample growth result prediction unit, and a model optimization unit.

[0076] Specifically, the sample growth control unit is suitable for controlling the diamond growth equipment to grow diamond samples according to preset sample process parameters.

[0077] The sample parameter extraction unit is adapted to extract the sample diamond growth parameters of the growing diamond sample during the growth process from the diamond growth device, and to extract the real growth result of the diamond sample after the growth is completed from the diamond detection device. In some embodiments, the sample growth control unit and the sample parameter extraction unit are used to perform the operations in the above operation S401, which will not be described in detail here.

[0078] The sample growth result prediction unit is adapted to input the sample diamond growth parameters into the initialized diamond growth data analysis model to predict the sample growth target. In some embodiments, the sample growth result prediction unit is used to perform the operations in the above operation S402, which will not be described in detail here.

[0079] The model optimization unit is adapted to adjust the model parameters of the initialized diamond growth data analysis model according to the actual growth results and the predicted sample growth target to obtain the diamond growth data analysis model. In some embodiments, the model optimization unit is used to perform the operations in the above operation S403, which will not be described in detail here.

[0080] According to the embodiment of the present invention, any one or more of the process parameter determination module 501, the diamond growth parameter extraction module 502, the growth result prediction module 503, the process parameter adjustment module 504, the process parameter feedback module 505 and the repetition module 506, or at least part of the functions of any one or more of them can be implemented in one module. According to the embodiment of the present invention, any one or more of the process parameter determination module 501, the diamond growth parameter extraction module 502, the growth result prediction module 503, the process parameter adjustment module 504, the process parameter feedback module 505 and the repetition module 506 can be split into multiple modules for implementation. According to the embodiment of the present invention, any one or more of the process parameter determination module 501, the diamond growth parameter extraction module 502, the growth result prediction module 503, the process parameter adjustment module 504, the process parameter feedback module 505 and the repetition module 506 can be at least partially implemented as a hardware circuit, such as a field programmable gate array (FPGA), a programmable logic array (PLA), a system on a chip, a system on a substrate, a system on a package, an application specific integrated circuit (ASIC), or can be implemented by hardware or firmware in any other reasonable way of integrating or packaging the circuit, or implemented in any one of the three implementation modes of software, hardware and firmware or in any appropriate combination of any of them. Alternatively, according to the embodiment of the present invention, one or more of the process parameter determination module 501, the diamond growth parameter extraction module 502, the growth result prediction module 503, the process parameter adjustment module 504, the process parameter feedback module 505 and the repetition module 506 can be at least partially implemented as a computer program module, and when the computer program module is executed, the corresponding function can be performed.

[0081] As a third aspect of the present invention, the present invention provides an adaptive system suitable for growing diamond crystals, comprising: a computing device, a diamond growing device and a diamond detection device, as follows: Figure 6 The architecture of a computing device suitable for an adaptive method of diamond crystal growth is described in detail.

[0082] Figure 6 A schematic diagram of the architecture of a computing device for an adaptive method for growing diamond crystals according to an embodiment of the present invention is shown.

[0083] like Figure 6 As shown, the computing device of the adaptive system suitable for diamond crystal growth includes: a processor 601 and a memory.

[0084] Processor 601, which is one or more processors, enables one or more processors to implement an adaptive method suitable for diamond crystal growth when one or more programs are executed by the one or more processors.

[0085] The memory is used to store one or more programs, including a read-only memory (ROM) 602 and a random access memory (RAM) 603 .

[0086] According to an embodiment of the present invention, a computing device 600 for an adaptive system for diamond crystal growth includes a processor 601, which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 602 or a program loaded from a storage part 608 to a random access memory (RAM) 603. The processor 601 may include, for example, a general-purpose microprocessor (e.g., a CPU), an instruction set processor and / or a related chipset and / or a special-purpose microprocessor (e.g., an application-specific integrated circuit (ASIC)), etc. The processor 601 may also include an onboard memory for cache purposes. The processor 601 may include a single processing unit or multiple processing units for performing different actions of the method flow according to an embodiment of the present invention.

[0087] In RAM 603, various programs and data required for the operation of computing device 600 are stored. Processor 601, ROM 602 and RAM 603 are connected to each other via bus 604. Processor 601 performs various operations of the method flow according to the embodiment of the present invention by executing the program in ROM 602 and / or RAM 603. It should be noted that the program can also be stored in one or more memories other than ROM 602 and RAM 603. Processor 601 can also perform various operations of the method flow according to the embodiment of the present invention by executing the program stored in one or more memories.

[0088] According to an embodiment of the present invention, the computing device 600 may further include an input / output (I / O) interface 605, which is also connected to the bus 604. The computing device 600 may further include one or more of the following components connected to the input / output (I / O) interface 605: an input portion 606 including a keyboard, a mouse, etc.; an output portion 607 including a cathode ray tube (CRT), a liquid crystal display (LCD), etc., and a speaker, etc.; a storage portion 608 including a hard disk, etc.; and a communication portion 609 including a network interface card such as a LAN card, a modem, etc. The communication portion 609 performs communication processing via a network such as the Internet. The drive portion 610 is also connected to the input / output (I / O) interface 605 as needed. A removable medium 611, such as a magnetic disk, an optical disk, a magneto-optical disk, a semiconductor memory, etc., is installed on the drive portion 610 as needed, so that the computer program read therefrom is installed into the storage portion 608 as needed.

[0089] According to an embodiment of the present invention, the method flow according to an embodiment of the present invention can be implemented as a computer software program. For example, an embodiment of the present invention includes a computer program product, which includes a computer program carried on a computer-readable storage medium, and the computer program includes a program code for executing the method shown in the flowchart. In such an embodiment, the computer program can be downloaded and installed from the network through the communication part 609, and / or installed from the removable medium 611. When the computer program is executed by the processor 601, the above-mentioned functions defined in the system of the embodiment of the present invention are executed. According to an embodiment of the present invention, the system, equipment, device, module, unit, etc. described above can be implemented by a computer program module.

[0090] According to an embodiment of the present invention, a diamond growth device comprises a diamond growth unit and a diamond growth parameter extraction unit. The diamond growth unit is suitable for growing a diamond sample in the diamond growth device according to process parameters; the diamond growth parameter extraction unit is suitable for extracting diamond growth parameters of the growing diamond sample during the growth process.

[0091] According to an embodiment of the present invention, a diamond detection device is suitable for detecting the actual growth result of a diamond sample after the growth is completed.

[0092] According to an embodiment of the present invention, the diamond growth unit is also suitable for growing a diamond sample in a diamond growth device according to preset sample process parameters. The diamond growth parameter extraction unit is also suitable for extracting sample diamond growth parameters of a growing diamond sample during the growth process.

[0093] The present invention also provides a computer-readable storage medium, which may be included in the device, apparatus or system described in the above embodiments; or may exist independently without being assembled into the device, apparatus or system. The above computer-readable storage medium carries one or more programs, and when the above one or more programs are executed, the method according to the embodiment of the present invention is implemented.

[0094] According to an embodiment of the present invention, the computer-readable storage medium may be a non-volatile computer-readable storage medium. For example, it may include but is not limited to: a portable computer disk, a hard disk, a random access memory (RAM), a read-only memory (ROM), an erasable programmable read-only memory (EPROM or flash memory), a portable compact disk read-only memory (CD-ROM), an optical storage device, a magnetic storage device, or any suitable combination thereof. In the present invention, the computer-readable storage medium may be any tangible medium containing or storing a program, which may be used by or in combination with an instruction execution system, an apparatus or a device.

[0095] For example, according to an embodiment of the present invention, the computer-readable storage medium may include the ROM 602 and / or the RAM 603 described above and / or one or more memories other than the ROM 602 and the RAM 603 .

[0096] An embodiment of the present invention also includes a computer program product, which includes a computer program, and the computer program contains program code for executing the adaptive method for diamond crystal growth provided by the embodiment of the present invention. When the computer program product is run on a computing device, the program code is used to enable the computing device to implement the adaptive method for diamond crystal growth provided by the embodiment of the present invention.

[0097] When the computer program is executed by the processor 601, the above functions defined in the system or device of the embodiment of the present invention are executed. According to the embodiment of the present invention, the system, device, module, unit, etc. described above can be implemented by a computer program module.

[0098] In one embodiment, the computer program may rely on tangible storage media such as optical storage devices, magnetic storage devices, etc. In another embodiment, the computer program may also be transmitted and distributed in the form of signals on a network medium, and downloaded and installed through the communication part 609, and / or installed from a removable medium 611. The program code contained in the computer program may be transmitted using any appropriate network medium, including but not limited to: wireless, wired, etc., or any suitable combination of the above.

[0099] According to an embodiment of the present invention, the program code for executing the computer program provided by the embodiment of the present invention can be written in any combination of one or more programming languages, specifically, these computing programs can be implemented using high-level process and / or object-oriented programming languages, and / or assembly or machine languages. Programming languages ​​include, but are not limited to, such as Java, C++, python, "C" language or similar programming languages. The program code can be executed entirely on the user computing device, partially on the user device, partially on the remote computing device, or entirely on the remote computing device or server. In the case of a remote computing device, the remote computing device can be connected to the user computing device through any type of network, including a local area network (LAN) or a wide area network (WAN), or can be connected to an external computing device (e.g., using an Internet service provider to connect through the Internet).

[0100] The flowcharts and block diagrams in the accompanying drawings illustrate the possible implementation architecture, functions and operations of the systems, methods, devices and computer program products according to various embodiments of the present invention. In this regard, each box in the flowchart or block diagram may represent a module, a program segment, or a part of a code, and the above-mentioned module, program segment, or a part of the code contains one or more executable instructions for implementing the specified logical function. It should also be noted that in some alternative implementations, the functions marked in the box may also occur in an order different from the order marked in the accompanying drawings. For example, two boxes represented in succession can actually be executed substantially in parallel, and they can sometimes be executed in the opposite order, depending on the functions involved. It should also be noted that each box in the block diagram or flowchart, and the combination of boxes in the block diagram or flowchart, can be implemented with a dedicated hardware-based system that performs the specified function or operation, or can be implemented with a combination of dedicated hardware and computer instructions. It can be understood by those skilled in the art that the features recorded in the various embodiments of the present invention can be combined and / or combined in various ways, even if such a combination or combination is not explicitly recorded in the present invention. In particular, without departing from the spirit and teachings of the present invention, the features recorded in the various embodiments of the present invention can be combined and / or combined in various ways. All these combinations and / or combinations fall within the scope of the present invention.

[0101] The embodiments of the present invention are described above. However, these embodiments are only for the purpose of illustration, and are not intended to limit the scope of the present invention. Although each embodiment is described above, it does not mean that the measures in each embodiment cannot be used in combination advantageously. Without departing from the scope of the present invention, those skilled in the art may make various substitutions and modifications, which should all fall within the scope of the present invention.

Claims

1. An adaptive method for growing diamond crystals, characterized in that: The adaptive method comprises: According to a preset growth target of a diamond crystal, determining process parameters suitable for achieving the preset growth target from a diamond process database, and outputting the process parameters to a diamond growth device, so that a diamond sample grows in the diamond growth device according to the process parameters; Extracting diamond growth parameters of the growing diamond sample during the growth process from the diamond growing device; According to the diamond growth parameters, using an established diamond growth data analysis model, predict the predicted growth target of the growing diamond sample under the process parameters; In the case where the predicted growth target is inconsistent with the preset growth target, adjusting the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters to obtain adjusted process parameters suitable for achieving the preset growth target, and outputting the adjusted process parameters to the diamond growth device so that the diamond sample grows according to the adjusted process parameters; Repeating the extraction, prediction and adjustment operations until the predicted growth target of the diamond sample is consistent with the preset growth target; The diamond growth parameters include at least one of the temperature of the diamond sample surface and the plasma concentration.

2. The adaptive method according to claim 1, characterized in that: The adaptive method further comprises: In the case where the predicted growth target is consistent with the preset growth target, the operation of adjusting the process parameters is omitted, so that the diamond sample continues to grow according to the current process parameters to obtain a diamond crystal that meets the preset growth target.

3. The adaptive method according to claim 1, characterized in that: The diamond growth data analysis model is established by the following method: Controlling the diamond growing device to grow a diamond sample according to preset sample process parameters, extracting sample diamond growth parameters of the growing diamond sample during the growth process from the diamond growing device, and detecting the actual growth result of the diamond sample after the growth is completed; Inputting the sample diamond growth parameters into an initialized diamond growth data analysis model to predict the sample growth target; According to the actual growth result and the predicted sample growth target, the model parameters of the initialized diamond growth data analysis model are adjusted to obtain the diamond growth data analysis model.

4. The adaptive method according to claim 3, characterized in that: The process parameters of the diamond growth equipment and the process parameters of the sample respectively include at least one of microwave power, air pressure in the cavity of the diamond growth equipment, and water temperature of cooling water of the diamond growth equipment; The sample diamond growth parameters include at least one of the temperature of the diamond sample surface and the plasma concentration; The predicted growth target, the predicted sample growth target and the actual growth result respectively include at least one of the size, thickness, thickness uniformity, crystal quality, surface roughness and color of the diamond sample.

5. The adaptive method according to claim 1, characterized in that: Before predicting the predicted growth target of the growing diamond sample under the process parameters using the diamond growth data analysis model according to the diamond growth parameters, the adaptive method further comprises: Abnormal data are eliminated from the diamond growth parameters.

6. An adaptive device suitable for growing diamond crystals, characterized in that: The adaptive device comprises: A process parameter determination module is adapted to determine process parameters suitable for achieving a preset growth target of a diamond crystal from a diamond process database, and output the process parameters to a diamond growth device, so that a diamond sample is grown in the diamond growth device according to the process parameters; A diamond growth parameter extraction module, adapted to extract diamond growth parameters of the growing diamond sample during the growth process from the diamond growth device; A growth result prediction module, adapted to predict the predicted growth target of the growing diamond sample under the process parameters according to the diamond growth parameters using an established diamond growth data analysis model; a process parameter adjustment module, adapted to adjust the process parameters based on the predicted growth target, the preset growth target, the diamond growth parameters and the process parameters when the predicted growth target is inconsistent with the preset growth target, so as to obtain adjusted process parameters suitable for achieving the preset growth target; A process parameter feedback module, adapted to output the adjusted process parameters to the diamond growth device, so that the diamond sample grows according to the adjusted process parameters; a repeating module adapted to repeat the operations of extracting, predicting and adjusting until the predicted growth target of the diamond sample is consistent with the preset growth target; The diamond growth parameters include at least one of the temperature of the diamond sample surface and the plasma concentration.

7. The adaptive device according to claim 6, characterized in that The adaptive device also includes: The diamond growth module is adapted to omit the operation of adjusting the process parameters when the predicted growth target is consistent with the preset growth target, so that the diamond sample continues to grow according to the current process parameters to obtain a diamond crystal that meets the preset growth target.

8. An adaptive system for growing diamond crystals, characterized in that: The adaptive system comprises: A computing device comprising one or more processors and a memory for storing one or more programs, A diamond growing device, comprising a diamond growing unit and a diamond growth parameter extraction unit, wherein the diamond growing unit is adapted to grow a diamond sample in the diamond growing device according to process parameters, and the diamond growth parameter extraction unit is adapted to extract diamond growth parameters of the growing diamond sample during the growth process; and Diamond testing equipment, suitable for testing the actual growth result of the diamond sample after growth is completed; Wherein, when the one or more programs are executed by the one or more processors, the one or more processors implement the adaptive method as described in any one of claims 1-5.

9. A computer-readable storage medium, characterized in that: Executable instructions are stored, and when the instructions are executed by a processor, the processor implements the adaptive method according to any one of claims 1 to 5.

10. A computer program product, characterized in that The computer program product comprises a computer program, which, when executed by a processor, implements the adaptive method according to any one of claims 1 to 5.

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