A silicon rod cutting fluid recycling and filtering device

Abstract

The present invention provides a silicon rod cutting fluid recovery and filtration device, belonging to the technical field of silicon wafer production and manufacturing. It includes a cylinder body, a water inlet and a water outlet arranged on the cylinder body; it further includes a mounting frame slidably arranged in the cylinder body, a filter element is arranged in the mounting frame, and a replacement inlet and a replacement outlet for the mounting frame to slide in or out are correspondingly arranged on the opposite sides of the cylinder body; there are at least two mounting frames and only one is arranged on the cylinder body; a positioning mechanism for fixing the mounting frame is arranged on the cylinder body; a supporting plate hinged to the outside of the cylinder body is arranged below the replacement outlet, and a linkage mechanism is arranged between the mounting frame and the supporting plate. When the supporting plate is in the initial state, it naturally droops downward, and the linkage mechanism is used to drive the supporting plate to rotate upward to the horizontal state when the mounting frame moves towards the replacement outlet; a one-way limiting mechanism is arranged on the cylinder body, and the one-way limiting mechanism is used to limit the supporting plate to only rotate upward or release the limit. In the present invention, the cleaning or replacement process of the filter element will not affect the filtration operation of the cutting fluid, improving the filtration efficiency of the cutting fluid and reducing the time cost.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon wafer production and manufacturing, and more specifically, relates to a silicon rod cutting fluid recovery and filtration device. Background Art

[0002] During the process of cutting a silicon rod to prepare a silicon wafer, silicon powder generated by cutting is mixed in the cutting fluid. As the cutting time accumulates, the accumulation amount of silicon powder also increases, and the density of silicon powder in the cutting fluid increases accordingly, affecting the cooling and lubricating effects of the cutting fluid. Wire breakage and jumper often occur, and in severe cases, the cutting quality is affected and the cutting efficiency is reduced. Therefore, it is necessary to remove the silicon powder in the cutting fluid in order to reuse the cutting fluid and ensure the cutting quality.

[0003] There is a Chinese patent with the reference publication number CN209270955U, which discloses a silicon rod cutting fluid filtration and recovery device, including a main barrel body and a filter barrel arranged inside the main barrel body; an inlet, an outlet, a water injection port, and a sewage discharge port are arranged on the main barrel body. The inlet is arranged lower than the outlet, the water injection port is arranged at the top of the main barrel body, the sewage discharge port is arranged at the bottom of the main barrel body, and a first valve, a second valve, a third valve, and a fourth valve are respectively arranged on the inlet, the outlet, the water injection port, and the sewage discharge port; an opening is arranged at the upper part of the filter barrel, a filter element is arranged inside, and filter holes are arranged on the side wall; the outlet and the inlet are respectively arranged on the upper and lower sides of the opening.

[0004] During the process of flushing the filter element in the above patent, it is necessary to stop the filtration operation of the cutting fluid, resulting in a reduction in the filtration efficiency of the cutting fluid and an increase in time cost. Summary of the Invention

[0005] The purpose of the present invention is to provide a silicon rod cutting fluid recovery and filtration device to solve the technical problems of reduced filtration efficiency of the cutting fluid and increased time cost existing in the prior art.

[0006] To achieve the above object, the technical solution adopted by the present invention is: to provide a silicon rod cutting fluid recovery and filtration device, including a cylinder body, a water inlet and a water outlet provided on the cylinder body; further including a mounting frame slidably provided in the cylinder body, a filter element is provided in the mounting frame, and replacement inlets and replacement outlets for the mounting frame to slide in or out are correspondingly provided on opposite sides of the cylinder body; at least two mounting frames are provided and only one is provided on the cylinder body; a positioning mechanism for fixing the mounting frame is provided on the cylinder body; a supporting plate hinged to the outside of the cylinder body is provided below the replacement outlet, and a linkage mechanism is provided between the mounting frame and the supporting plate. When the supporting plate is in the initial state, it naturally droops downward. The linkage mechanism is used to drive the supporting plate to rotate upward to a horizontal state when the mounting frame moves towards the replacement outlet; a one-way limiting mechanism is provided on the cylinder body, and the one-way limiting mechanism is used to limit the supporting plate to only rotate upward or release the limit.

[0007] Combined with the above technical solution, in a possible implementation manner, sliding grooves for the mounting frame to slide in are provided on the opposite inner side walls of the cylinder body.

[0008] Combined with the above technical solution, in a possible implementation manner, the positioning mechanism includes positioning plates vertically slidably provided on both sides of the cylinder body, positioning shells fixed on both sides of the mounting frame for the positioning plates to be inserted downward, and a positioning component provided on the cylinder body. The positioning component is used to fix the positioning plates at positions separated from the positioning shells.

[0009] Combined with the above technical solution, in a possible implementation manner, the positioning component includes a fixed shell, a plug rod and a positioning spring. The fixed shell is fixed at a position above the positioning plate on the outside of the cylinder body. The plug rod is horizontally slidably provided on the fixed shell. The positioning spring is provided on the fixed shell and connected to the plug rod; a slot for the inner end of the plug rod to be inserted is provided on the positioning plate; when the inner end of the plug rod is located in the slot, the positioning plate is in a separated state from the positioning shell, and the positioning spring is in a natural state; the bottom surface of the plug rod located in the slot is inclined.

[0010] Combined with the above technical solution, in a possible implementation manner, the linkage mechanism includes a supporting shaft, a transmission shaft, a gear, a rack and a reverse transmission component. The supporting shaft is horizontally rotatably connected to the outside of the cylinder body, and the supporting plate is fixed on the supporting shaft; the transmission shaft is rotatably connected to the outside of the cylinder body and is coaxially arranged with the supporting shaft; the gear is coaxially fixed on the transmission shaft, and the rack is fixed on one side of the installation frame and is used to mesh with the gear; the reverse transmission component is arranged between the supporting shaft and the transmission shaft, and the reverse transmission component is used to drive the supporting shaft to reverse when the transmission shaft rotates; when the rack meshes with and then separates from the gear, the supporting plate moves upward to a horizontal state.

[0011] Combined with the above technical solution, in a possible implementation manner, the reverse transmission component includes a sliding screw and a guide frame. The guide frame is fixed on the outside of the cylinder body, and the sliding screw is slidably arranged on the guide frame; threaded holes are coaxially opened on the opposite end faces of the supporting shaft and the transmission shaft, and both ends of the sliding screw are simultaneously threadedly connected in the corresponding threaded holes.

[0012] Combined with the above technical solution, in a possible implementation manner, a guide groove is opened along the length direction of the outside of the sliding screw, and a guide block located in the guide groove is arranged in the guide frame.

[0013] Combined with the above technical solution, in a possible implementation manner, the one-way limiting mechanism includes a ratchet wheel, a ratchet pawl and a separation component. The ratchet wheel is coaxially fixed on the supporting shaft, the ratchet pawl is arranged on the separation component and meshes with the ratchet wheel, and the separation component is arranged on the cylinder body and is used to drive the ratchet pawl to move to separate from the ratchet wheel.

[0014] Combined with the above technical solution, in a possible implementation manner, the separation component includes a sliding plate and a separation spring. The sliding plate is slidably arranged on the outside of the cylinder body, the sliding direction of the sliding plate is consistent with the axial direction of the supporting shaft, and the separation spring is arranged on the cylinder body and is connected to the sliding plate; the ratchet pawl is arranged on the sliding plate, and when the separation spring is in a natural state, the ratchet pawl and the ratchet wheel are in a meshing state.

[0015] Combined with the above technical solution, in a possible implementation manner, magnets that attract each other are embedded on both the sliding plate and the cylinder body. When the ratchet wheel and the ratchet pawl are in a meshing state, the two magnets face each other and are attracted and tightened together.

[0016] The beneficial effects of a silicon rod cutting fluid recovery and filtration device provided by the present invention are as follows: Compared with the prior art, when the filter element needs to be cleaned or replaced in the present invention, the fixing of the installation frame is released through the positioning mechanism, the installation frame with a new filter element is inserted from the replacement inlet, and the installation frame with the old filter element slides out from the replacement outlet. At the same time, the linkage mechanism drives the supporting plate to rotate upward to a horizontal state, and the one-way limiting mechanism restricts the rotation direction of the supporting plate to support the sliding-out installation frame. After the installation frame with the new filter element slides to the designated position, it is fixed through the positioning mechanism, and then the filtration operation of the cutting fluid can be continued. After the sliding-out installation frame is removed from the supporting plate, the filter element can be cleaned or replaced, and the cleaning or replacement process of the filter element will not affect the filtration operation of the cutting fluid, improving the filtration efficiency of the cutting fluid and reducing the time cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0018] Figure 1 Structural schematic diagram of a silicon rod cutting fluid recovery and filtration device provided by an embodiment of the present invention Figure 1 ;

[0019] Figure 2 Structural schematic diagram of a silicon rod cutting fluid recovery and filtration device provided by an embodiment of the present invention Figure 2 ;

[0020] Figure 3 Partial cross-sectional view of the installation frame, filter element and sliding groove provided by an embodiment of the present invention;

[0021] Figure 4 Partial cross-sectional view of the positioning mechanism provided by an embodiment of the present invention;

[0022] Figure 5 Structural schematic diagram of the linkage mechanism provided by an embodiment of the present invention;

[0023] Figure 6 Partial cross-sectional view of the reverse transmission component provided by an embodiment of the present invention;

[0024] Figure 7 Partial cross-sectional view of the guide groove and guide block provided by an embodiment of the present invention;

[0025] Figure 8 Partial cross-sectional view of the one-way limiting mechanism provided by an embodiment of the present invention.

[0026] Among them, the reference numerals in the figures are as follows:

[0027] 1. Cylinder body; 11. Water inlet; 12. Water outlet; 13. Replacement inlet; 14. Replacement outlet; 15. Slide groove; 16. Magnet; 2. Installation frame; 21. Filter element; 3. Positioning mechanism; 31. Positioning plate; 311. Slot; 32. Positioning shell; 33. Positioning component; 331. Fixed shell; 332. Plug rod; 333. Positioning spring; 4. Support plate; 5. Linkage mechanism; 51. Support shaft; 511. Threaded hole; 52. Transmission shaft; 53. Gear; 54. Rack; 55. Reverse transmission component; 551. Sliding screw; 5511. Guide groove; 552. Guide frame; 5521. Guide block; 6. One-way limiting mechanism; 61. Ratchet; 62. Pawl; 63. Separation component; 631. Slide plate; 632. Separation spring. Detailed implementation manners

[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The specific embodiments described herein are only used to explain the present invention, and are not used to limit the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0029] It should be further noted that the drawings and embodiments of the present invention mainly describe and explain the concept of the present invention. On the basis of this concept, the specific forms and settings of some connection relationships, position relationships and power mechanisms may not be completely described. However, on the premise that those skilled in the art understand the concept of the present invention, those skilled in the art can adopt well-known methods to implement the above specific forms and settings.

[0030] When an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0031] The orientation terms "inside" and "outside" refer to the inside and outside relative to the outline of each component itself. The orientation or positional relationship indicated by terms such as "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. is based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of the present invention.

[0032] For the convenience of description, spatial relative terms can be used here, such as "above...", "over...", "on the upper surface of...", "upper...", etc., to describe the spatial positional relationship between a device or feature shown in the figure and other devices or features. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation described in the figure for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways, and corresponding interpretations are made for the spatial relative descriptions used here.

[0033] Now, a silicon rod cutting fluid recovery and filtration device provided by the present invention will be described.

[0034] As Figure 1 and Figure 2 shown, an embodiment of the present invention provides a silicon rod cutting fluid recovery and filtration device, which includes a cylinder body 1, a water inlet 11 and a water outlet 12 provided on the cylinder body 1; it further includes a mounting frame 2 slidably arranged inside the cylinder body 1, a filter element 21 is arranged inside the mounting frame 2, and a replacement inlet 13 and a replacement outlet 14 for the mounting frame 2 to slide in or out are correspondingly opened on the opposite sides of the cylinder body 1; there are at least two mounting frames 2 and only one is arranged on the cylinder body 1; a positioning mechanism 3 for fixing the mounting frame 2 is arranged on the cylinder body 1; a supporting plate 4 hinged to the outside of the cylinder body 1 is arranged below the replacement outlet 14, a linkage mechanism 5 is arranged between the mounting frame 2 and the supporting plate 4, and when the supporting plate 4 is in the initial state, it naturally droops downward. The linkage mechanism 5 is used to drive the supporting plate 4 to rotate upward to the horizontal state when the mounting frame 2 moves towards the replacement outlet 14; a one-way limiting mechanism 6 is arranged on the cylinder body 1, and the one-way limiting mechanism 6 is used to limit the supporting plate 4 to only rotate upward or release the limitation.

[0035] Further, referring to Figure 3, sliding grooves 15 for the installation frame 2 to slide therein are provided on the opposite inner side walls of the cylinder body 1, which can improve the sliding stability of the installation frame 2 in the cylinder body 1.

[0036] A silicon rod cutting fluid recovery and filtration device provided in this embodiment, compared with the prior art, when the filter element 21 needs to be cleaned or replaced, the fixing of the installation frame 2 is released by the positioning mechanism 3, and the installation frame 2 with a new filter element 21 is inserted from the replacement inlet 13, so that the installation frame 2 with the old filter element 21 slides out from the replacement outlet 14. At the same time, the linkage mechanism 5 drives the supporting plate 4 to rotate upward to the horizontal state, and at the same time, the one-way limiting mechanism 6 restricts the rotation direction of the supporting plate 4 to support the sliding-out installation frame 2. After the installation frame 2 with the new filter element 21 slides to the designated position, it is fixed by the positioning mechanism 3, and then the filtration operation of the cutting fluid can be continued. After the sliding-out installation frame 2 is removed from the supporting plate 4, the filter element 21 can be cleaned or replaced. The cleaning or replacement process of the filter element 21 will not affect the filtration operation of the cutting fluid, improving the filtration efficiency of the cutting fluid and reducing the time cost.

[0037] As Figure 2 and Figure 4 shown, a specific implementation manner provided by the present invention on the basis of the above embodiment is as follows:

[0038] The positioning mechanism 3 includes positioning plates 31 slidably arranged vertically on both sides of the cylinder body 1, positioning shells 32 fixed on both sides of the installation frame 2 for the positioning plates 31 to be inserted downward, and a positioning component 33 arranged on the cylinder body 1. The positioning component 33 is used to fix the positioning plates 31 at positions separated from the positioning shells 32.

[0039] When the installation frame 2 needs to be replaced, the positioning plates 31 on both sides of the cylinder body 1 are slid upward and fixed by the positioning component 33, so that the positioning plates 31 are in a separated state from the positioning shells 32, and then the installation frame 2 can be pushed out from the replacement outlet 14. After the installation frame 2 with a new filter element 21 slides into the cylinder body 1, the positioning component 33 cancels the fixing of the positioning plates 31, and the positioning plates 31 slide downward and are inserted into the corresponding positioning shells 32 to realize the fixing of the installation frame 2, improving the disassembly and assembly convenience of the installation frame 2.

[0040] As Figure 4 shown, a specific implementation manner provided by the present invention on the basis of the above embodiment is as follows:

[0041] The positioning assembly 33 includes a fixed shell 331, an insertion rod 332 and a positioning spring 333. The fixed shell 331 is fixed on the outer side of the cylinder 1 at a position above the positioning plate 31. The insertion rod 332 is horizontally slidably set on the fixed shell 331. The positioning spring 333 is set on the fixed shell 331 and connected to the insertion rod 332. A slot 311 is provided on the positioning plate 31 for the inner end of the insertion rod 332 to be inserted. When the inner end of the insertion rod 332 is located in the slot 311, the positioning plate 31 and the positioning shell 32 are in a separated state, and the positioning spring 333 is in a natural state. The bottom surface of the insertion rod 332 located in the slot 311 is inclined.

[0042] When the installation frame 2 needs to be replaced, the positioning plate 31 is slid upward so that its top is inserted into the fixed shell 331. The top of the positioning plate 31 presses the inclined surface of the insertion rod 332, causing the positioning spring 333 to stretch. After the positioning plate 31 slides upward into position, the retraction force of the positioning spring 333 drives the inner end of the insertion rod 332 to insert into the slot 311, thereby fixing the positioning plate 31. After the installation frame 2 with the new filter element 21 slides into the cylinder 1, the insertion rod 332 is directly pulled outward to disengage it from the slot 311, and the positioning plate 31 can slide downward by its own gravity to disengage from the fixed shell 331, thereby improving the overall convenience of operation.

[0043] like Figure 2 and Figure 5 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0044] The linkage mechanism 5 includes a supporting shaft 51, a transmission shaft 52, a gear 53, a rack 54 and a reverse transmission assembly 55. The supporting shaft 51 is horizontally rotatably connected to the outside of the cylinder 1, and the supporting plate 4 is fixed on the supporting shaft 51; the transmission shaft 52 is rotatably connected to the outside of the cylinder 1 and is coaxially arranged with the supporting shaft 51; the gear 53 is coaxially fixed on the transmission shaft 52, and the rack 54 is fixed on one side of the mounting frame 2 and is used to engage with the gear 53; the reverse transmission assembly 55 is arranged between the supporting shaft 51 and the transmission shaft 52, and the reverse transmission assembly 55 is used to drive the supporting shaft 51 to reverse when the transmission shaft 52 rotates; the rack 54 engages with the gear 53 until separation, and the supporting plate 4 moves upward to a horizontal state.

[0045] When the installation frame 2 is pushed to move toward the replacement outlet 14, the rack 54 on the installation frame 2 moves to engage with the gear 53. At this time, the movement of the installation frame 2 realizes the rotation of the transmission shaft 52 through the gear 53 and the rack 54. The rotation of the transmission shaft 52 drives the supporting shaft 51 to rotate in the opposite direction through the reverse transmission component 55, thereby realizing the upward rotation of the supporting plate 4 until the rack 54 moves to separate from the gear 53. The one-way limiting mechanism 6 keeps the supporting plate 4 in a horizontal state so that the supporting plate 4 supports the installation frame 2, thereby improving the linkage effect and operation convenience between the movement of the installation frame 2 toward the replacement outlet 14 and the upward rotation of the supporting plate 4.

[0046] As Figures 5 to 6 shown, a specific embodiment provided by the present invention on the basis of the above embodiments is as follows:

[0047] The reverse transmission assembly 55 includes a sliding screw 551 and a guide frame 552. The guide frame 552 is fixed on the outer side of the cylinder body 1, and the sliding screw 551 is slidably arranged on the guide frame 552; threaded holes 511 are coaxially opened on the opposite end faces of the supporting shaft 51 and the transmission shaft 52, and both ends of the sliding screw 551 are simultaneously threadedly connected in the corresponding threaded holes 511.

[0048] When pushing the installation frame 2 to move towards the replacement outlet 14, the transmission shaft 52 rotates counterclockwise. The rotation of the transmission shaft 52 drives the sliding screw 551 to move towards the inside of the threaded hole 511 of the supporting shaft 51. Since the sliding screw 551 is in a state of sliding out of the threaded hole 511 in the transmission shaft 52 and in a state of sliding into the threaded hole 511 in the supporting shaft 51, the sliding screw 551 drives the supporting shaft 51 to rotate clockwise, thereby realizing the upward rotation of the supporting plate 4. The transmission process is stable and accurate, thereby improving the linkage effect between the movement of the installation frame 2 towards the replacement outlet 14 and the upward rotation of the supporting plate 4.

[0049] Furthermore, in order to better improve the transmission effect between the sliding screw 551 and the two threaded holes 511, in this embodiment, the sliding screw 551 and the two threaded holes 511 can be threadedly connected through balls, and specifically can be realized through a ball screw.

[0050] Furthermore, in order to reduce the thread friction between the sliding screw 551 and the threaded hole 511, in this embodiment, the supporting plate 4 can be made of a lightweight thin plate, and this is achieved by reducing the weight of the supporting plate 4.

[0051] As Figures 6 to 7 shown, a specific embodiment provided by the present invention on the basis of the above embodiments is as follows:

[0052] A guide groove 5511 is opened along the length direction on the outer side of the sliding screw 551, and a guide block 5521 located in the guide groove 5511 is arranged in the guide frame 552.

[0053] When the rotation of the transmission shaft 52 drives the sliding screw 551 to move, the guide block 5521 always slides relatively in the guide groove 5511. The guide frame 552 and the guide block 5521 can support and guide the sliding screw 551, improving the movement stability of the sliding screw 551.

[0054] As Figure 5 and Figure 8As shown in the figure, a specific implementation manner provided by the present invention on the basis of the above embodiments is as follows:

[0055] The one-way limiting mechanism 6 includes a ratchet wheel 61, a pawl 62 and a separating component 63. The ratchet wheel 61 is coaxially fixed on the supporting shaft 51. The pawl 62 is arranged on the separating component 63 and meshes with the ratchet wheel 61. The separating component 63 is arranged on the cylinder body 1 and is used to drive the pawl 62 to move away from the ratchet wheel 61.

[0056] When the supporting shaft 51 rotates, it drives the ratchet wheel 61 to rotate synchronously. The pawl 62 realizes the one-way limiting effect on the supporting shaft 51 through the ratchet wheel 61. After the mounting frame 2 is removed from the supporting plate 4, the separating component 63 drives the pawl 62 to separate from the ratchet wheel 61, and the supporting plate 4 can drive the supporting shaft 51 to reverse and reset by its own gravity. Then, the separating component 63 is used to make the pawl 62 mesh with the ratchet wheel 61 again, which improves the stability of the supporting shaft 51 during the upward rotation process and after the rotation is completed.

[0057] As Figures 5 to 8 shown in the figure, a specific implementation manner provided by the present invention on the basis of the above embodiments is as follows:

[0058] The separating component 63 includes a sliding plate 631 and a separating spring 632. The sliding plate 631 is slidably arranged on the outer side of the cylinder body 1. The sliding direction of the sliding plate 631 is consistent with the axis direction of the supporting shaft 51. The separating spring 632 is arranged on the cylinder body 1 and is connected to the sliding plate 631. The pawl 62 is arranged on the sliding plate 631. When the separating spring 632 is in the natural state, the pawl 62 is in the meshing state with the ratchet wheel 61.

[0059] After the mounting frame 2 is removed from the supporting plate 4, the sliding plate 631 is pushed to drive the pawl 62 to move, realizing the separation of the pawl 62 from the ratchet wheel 61. After the supporting plate 4 drives the supporting shaft 51 and the ratchet wheel 61 to reverse and reset, the separating spring 632 drives the sliding plate 631 to reset, realizing the re-meshing of the pawl 62 with the ratchet wheel 61, which improves the operation convenience.

[0060] As Figure 8 shown in the figure, a specific implementation manner provided by the present invention on the basis of the above embodiments is as follows:

[0061] Both the sliding plate 631 and the cylinder body 1 are embedded with magnets 16 that attract each other. When the ratchet wheel 61 and the pawl 62 are in the meshing state, the two magnets 16 are facing each other and attracting tightly.

[0062] The two magnets 16 can make the sliding plate 631 and the cylinder body 1 more stable, improving the meshing stability between the ratchet wheel 61 and the pawl 62.

[0063] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.

[0064] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0065] Unless otherwise specifically stated, the relative arrangements of the components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the convenience of description, the sizes of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the specification. In all the examples shown and discussed herein, any specific values should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

Claims

1. A silicon rod cutting fluid recovery and filtration device, comprising a cylinder body (1), a water inlet (11) and a water outlet (12) provided on the cylinder body (1); characterized in that, It further includes a mounting frame (2) slidably arranged in the cylinder body (1), a filter element (21) is arranged in the mounting frame (2), a replacement inlet (13) and a replacement outlet (14) for the mounting frame (2) to slide in or out are correspondingly opened on the opposite sides of the cylinder body (1); at least two mounting frames (2) are provided and only one is arranged on the cylinder body (1); a positioning mechanism (3) for fixing the mounting frame (2) is arranged on the cylinder body (1); a supporting plate (4) hinged to the outside of the cylinder body (1) is arranged below the replacement outlet (14), a linkage mechanism (5) is arranged between the mounting frame (2) and the supporting plate (4), when the supporting plate (4) is in the initial state, it naturally droops downward, and the linkage mechanism (5) is used to drive the supporting plate (4) to rotate upward to the horizontal state when the mounting frame (2) moves towards the replacement outlet (14); a one-way limiting mechanism (6) is arranged on the cylinder body (1), and the one-way limiting mechanism (6) is used to limit the supporting plate (4) to only rotate upward or release the limit; The linkage mechanism (5) includes a supporting shaft (51), a transmission shaft (52), a gear (53), a rack (54) and a reverse transmission component (55), the supporting shaft (51) is horizontally rotatably connected to the outside of the cylinder body (1), and the supporting plate (4) is fixed on the supporting shaft (51); the transmission shaft (52) is rotatably connected to the outside of the cylinder body (1) and is coaxially arranged with the supporting shaft (51); the gear (53) is coaxially fixed on the transmission shaft (52), and the rack (54) is fixed on one side of the mounting frame (2) and is used to mesh with the gear (53); the reverse transmission component (55) is arranged between the supporting shaft (51) and the transmission shaft (52), and the reverse transmission component (55) is used to drive the supporting shaft (51) to reverse when the transmission shaft (52) rotates; when the rack (54) meshes with and then separates from the gear (53), the supporting plate (4) rotates upward to the horizontal state; The reverse transmission component (55) includes a sliding screw (551) and a guide frame (552), the guide frame (552) is fixed on the outside of the cylinder body (1), and the sliding screw (551) is slidably arranged on the guide frame (552); threaded holes (511) are coaxially opened on the opposite end faces of the supporting shaft (51) and the transmission shaft (52), and both ends of the sliding screw (551) are simultaneously threadedly connected in the corresponding threaded holes (511); The one-way limiting mechanism (6) includes a ratchet wheel (61), a ratchet pawl (62) and a separating component (63), the ratchet wheel (61) is coaxially fixed on the supporting shaft (51), the ratchet pawl (62) is arranged on the separating component (63) and meshes with the ratchet wheel (61), and the separating component (63) is arranged on the cylinder body (1) and is used to drive the ratchet pawl (62) to move to separate from the ratchet wheel (61).

2. The silicon rod cutting fluid recovery and filtration device according to claim 1, characterized in that, The opposite inner side walls of the cylinder body (1) are both provided with sliding grooves (15) for the installation frame (2) to slide therein.

3. A silicon rod cutting fluid recovery and filtration device according to claim 1, characterized in that, The positioning mechanism (3) includes positioning plates (31) slidably arranged vertically on both sides of the cylinder body (1), positioning shells (32) fixed on both sides of the installation frame (2) and for the positioning plates (31) to be inserted downward, and a positioning component (33) arranged on the cylinder body (1). The positioning component (33) is used to fix the positioning plates (31) at positions separated from the positioning shells (32).

4. A silicon rod cutting fluid recovery and filtration device according to claim 3, characterized in that, The positioning component (33) includes a fixed shell (331), a plug rod (332) and a positioning spring (333). The fixed shell (331) is fixed at a position on the outer side of the cylinder body (1) above the positioning plate (31). The plug rod (332) is horizontally slidably arranged on the fixed shell (331). The positioning spring (333) is arranged on the fixed shell (331) and connected to the plug rod (332). A slot (311) for the inner end of the plug rod (332) to be inserted is formed on the positioning plate (31). When the inner end of the plug rod (332) is located in the slot (311), the positioning plate (31) is in a separated state from the positioning shell (32), and the positioning spring (333) is in a natural state. The bottom surface of the plug rod (332) located in the slot (311) is inclined.

5. The silicon rod cutting fluid recovery and filtration device according to claim 1, characterized in that, A guiding groove (5511) is formed along the length direction on the outer side of the sliding screw rod (551), and a guiding block (5521) located in the guiding groove (5511) is arranged in the guiding frame (552).

6. The silicon rod cutting fluid recovery and filtration device according to claim 1, characterized in that, The separating component (63) includes a sliding plate (631) and a separating spring (632). The sliding plate (631) is slidably arranged on the outer side of the cylinder body (1), and the sliding direction of the sliding plate (631) is consistent with the axial direction of the supporting shaft (51). The separating spring (632) is arranged on the cylinder body (1) and connected to the sliding plate (631). The ratchet pawl (62) is arranged on the sliding plate (631). When the separating spring (632) is in a natural state, the ratchet pawl (62) is in an engaged state with the ratchet wheel (61).

7. The silicon rod cutting fluid recovery and filtration device according to claim 6, characterized in that, Magnets (16) that attract each other are embedded on both the sliding plate (631) and the cylinder body (1). When the ratchet wheel (61) and the ratchet pawl (62) are in an engaged state, the two magnets (16) are facing each other and tightly attracted to each other.

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